By Etching Patents (Class 29/603.18)
  • Patent number: 9640205
    Abstract: A magnetic recording-reproducing head includes, on a support member, a first head section having a function of executing a recording process and having a function of executing a reproducing process, and one or more second head sections each having a function of executing an erasing process and having no function of executing a reproducing process.
    Type: Grant
    Filed: March 10, 2016
    Date of Patent: May 2, 2017
    Assignee: TDK CORPORATION
    Inventors: Akimasa Kaizu, Kei Hirata, Yosuke Antoku
  • Patent number: 9070388
    Abstract: In a plasma processing method of dry-etching of a magnetic film having a thickness of 200 nm to 500 nm, a plasma processing method of dry-etching of a sample having the magnetic film on which a multilayered film including a resist film, an non-organic film underlying the resist film, a Cr film underlying the non-organic film, and an Al2O3 film underlying the Cr film.
    Type: Grant
    Filed: January 21, 2011
    Date of Patent: June 30, 2015
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Kentaro Yamada, Takeshi Shimada, Takahiro Abe
  • Patent number: 9023219
    Abstract: A method of manufacturing a magnetoresistive-based device includes a metal hard mask that is inert to a top electrode etch chemistry and that has low sputter yield during a magnetic stack sputter. The metal hard mask is patterned by the photo resist and the photo mask is then stripped and the top electrode (overlying magnetic materials of the magnetoresistive-based device) is patterned by the metal hard mask.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: May 5, 2015
    Assignee: Everspin Technologies, Inc.
    Inventors: Sarin Deshpande, Sanjeev Aggarwal, Kerry Nagel
  • Patent number: 9015927
    Abstract: A method for fabricating a synthetic antiferromagnetic device, includes depositing a reference layer on a first tantalum layer and including depositing a first cobalt iron boron layer, depositing a second cobalt iron boron layer on the first cobalt iron boron layer, depositing a second Ta layer on the second cobalt iron boron layer, depositing a magnesium oxide spacer layer on the reference layer and depositing a cap layer on the magnesium oxide spacer layer.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: April 28, 2015
    Assignee: International Business Machines Corporation
    Inventors: David W. Abraham, Michael C. Gaidis
  • Patent number: 8997334
    Abstract: An auxiliary tool for assembling a number of voice coil motors includes a number of trays, a rod member, and two limiting members. Each tray defines a through hole. The rod member passes through the through holes of the trays. The two limiting members are sleeved over the rod member at two ends of the rod member, the trays being between the two limiting members, each two neighboring trays being configured for clamping a respective one of the voice coil motors.
    Type: Grant
    Filed: August 6, 2013
    Date of Patent: April 7, 2015
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Tzu-Nan Chou
  • Patent number: 8984740
    Abstract: A method for providing a magnetic recording transducer is provided. The method includes providing a substrate, and a magnetic shield having a top surface above the substrate. The top surface is treated by a first plasma treatment performed at a first power. An amorphous ferromagnetic (FM) layer is deposited on and in contact with the top surface to a thickness of at least 5 Angstroms and not more than 50 Angstroms. A second plasma treatment is performed at a second power. A magnetic seed layer is provided on and contact with the amorphous FM layer. The magnetic seed layer may comprise a bilayer. A nonmagnetic spacer layer is provided above the magnetic seed layer, an antiferromagnetic (AFM) layer provided above the spacer layer, and a read sensor provided above the AFM layer.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: March 24, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yuankai Zheng, Qunwen Leng, Cheng-Han Yang, Zhitao Diao
  • Patent number: 8984741
    Abstract: A method for manufacturing a magnetic read sensor allows for the construction of a very narrow trackwidth sensor while avoiding problems related to mask liftoff and shadowing related process variations across a wafer. The process involves depositing a plurality of sensor layers and forming a first mask structure. The first mask structure has a relatively large opening that encompasses a sensor area and an area adjacent to the sensor area where a hard bias structure can be deposited. A second mask structure is formed over the first mask structure and includes a first portion that is configured to define a sensor dimension and a second portion that is over the first mask structure in the field area.
    Type: Grant
    Filed: April 27, 2012
    Date of Patent: March 24, 2015
    Assignee: HGST Netherlands B.V.
    Inventors: Yi Zheng, Guomin Mao, Hicham M. Sougrati, Xiaozhong Dang
  • Patent number: 8914970
    Abstract: A tunneling magnetoresistive sensor has an extended pinned layer wherein both the MgO spacer layer and the underlying ferromagnetic pinned layer extend beyond the back edge of the ferromagnetic free layer in the stripe height direction and optionally also beyond the side edges of the free layer in the trackwidth direction. A patterned photoresist layer with a back edge is formed on the sensor stack and a methanol (CH3OH)-based reactive ion etching (RIE) removes the unprotected free layer, defining the free layer back edge. The methanol-based RIE terminates at the MgO spacer layer without damaging the underlying reference layer. A second patterned photoresist layer may be deposited and a second methanol-based RIE may be performed if it is desired to have the reference layer also extend beyond the side edges of the free layer in the trackwidth direction.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: December 23, 2014
    Assignee: HGST Netherlands B.V.
    Inventor: Jordan Asher Katine
  • Patent number: 8914969
    Abstract: A method fabricates a magnetic transducer. A sacrificial leading shield is provided on an etch stop layer. A nonmagnetic layer is provided on the sacrificial leading shield. A pole trench is formed in the nonmagnetic layer and on the sacrificial leading shield. A pole is formed. The pole has a bottom and a top wider than the bottom in a pole tip region. Part of the pole in the pole tip region is in the pole trench and at the ABS location. The sacrificial leading shield and part of the nonmagnetic layer adjacent to the pole are removed. An air bridge thus resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer. As least one shield layer is provided. The at least one shield layer substantially fills the air bridge and form a monolithic shield including a leading and side shields.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: December 23, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Xiaotian Zhou, Hongzhou Jiang, Donghong Li, Lien-Chang Wang, Ching-Huang Lu, Wencheng Su, Lieping Zhong, Tao Pan
  • Patent number: 8893376
    Abstract: A method of forming a magnetic recording head is provided. The method comprises the steps of forming a damascene trench comprising a lower region having a substantially trapezoidal cross-section and an upper region having a substantially rectangular cross-section, and providing a magnetic material within the damascene trench.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: November 25, 2014
    Assignee: Western Digital(Fremont), LLC
    Inventors: Changqing Shi, Ming Jiang
  • Patent number: 8881378
    Abstract: A method is described to improve performance of a magneto-resistive (MR) sensor under conditions of high areal density. The free layer is partially etched away, the removed material being replaced by a magnetic flux guide structure that reduces the free layer's demagnetization field. This in turn reduces the stripe height of the sensor so that the resolution and the read-back signal are enhanced without increasing noise and instability.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: November 11, 2014
    Assignee: Headway Technologies, Inc.
    Inventors: Yuchen Zhou, Joe Smyth, Min Li, Glen Garfunkel
  • Publication number: 20140327988
    Abstract: A data reader can be configured with at least a magnetically responsive lamination that has a first portion with a first stripe height from an air bearing surface (ABS) and a second portion with a different second stripe height from the ABS. The first portion can be constructed to have a back edge surface shaped at a predetermined angle relative to the ABS by a back edge feature.
    Type: Application
    Filed: May 6, 2013
    Publication date: November 6, 2014
    Applicant: Seagate Technology LLC
    Inventors: Xin Cao, Frances Paula McElhinney, Jiansheng Xu, Marcus Winston Ormston
  • Patent number: 8844120
    Abstract: A method for providing a magnetic transducer including an underlayer is provided. The method comprises providing a recessed region in the underlayer. The recessed region includes a front having an angle from horizontal. The angle is greater than zero and less than ninety degrees. The method further comprises providing an assist pole layer in the recessed region, providing a main pole layer, a portion of the main pole layer residing on the assist pole layer, and defining a main pole from the assist pole layer and the main pole layer.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: September 30, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yong Shen, Zhigang Bai
  • Publication number: 20140268424
    Abstract: Method for manufacturing a magnetic head includes providing a stopper layer on an upper surface of a main magnetic pole layer applying a magnetic flux to a recording medium via a first insulation layer, providing a second insulation layer on the upper surface of the first insulation layer to cover at least an entire surface of the stopper layer, covering an upper surface portion of the second insulation layer with a mask layer, forming a height difference portion by removing at least a first insulation layer portion not covered by the mask layer by etching to at least partially remove at least a stopper layer portion in a film thickness direction, and subsequently by removing the mask layer, forming a electrode film in the height difference portion, and forming a plating film, which is a magnetic shield for the main magnetic pole layer, on an upper surface of the electrode.
    Type: Application
    Filed: March 18, 2013
    Publication date: September 18, 2014
    Inventor: TDK Corporation
  • Publication number: 20140254339
    Abstract: A method of making a transducer head disclosed herein includes depositing a spacer layer on an NFT layer of the transducer head, forming an etch stop layer on a spacer layer of a transducer, depositing a cladding layer on the etch stop layer, and milling the cladding layer at a sloped angle such that the milling stops at the etch stop layer.
    Type: Application
    Filed: March 11, 2013
    Publication date: September 11, 2014
    Inventors: Yongjun Zhao, Lien Lee, Lijuan Zou, Mark Henry Ostrowski
  • Patent number: 8756795
    Abstract: A method for manufacturing a read head includes the step of depositing a conductive filler into a plurality of holes that extend through a wafer. Each of the holes extends from a wafer top surface to a wafer bottom surface. Each of the holes includes an inner surface that includes an insulative layer. The method further includes the steps of fabricating a read transducer on the wafer top surface, and depositing a plurality of electrically conductive leading connection pads on the wafer bottom surface. The plurality of electrically conductive leading connection pads are in electrical contact with the conductive filler.
    Type: Grant
    Filed: March 21, 2012
    Date of Patent: June 24, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Mark D. Moravec, Subrata I Gusti Made, Santi Pumkrachang
  • Patent number: 8760807
    Abstract: A method fabricates a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. Etch stop and nonmagnetic etchable layers are provided. A side shield layer is provided between the ABS location and the etch stop and etchable layers. A pole trench is formed in the side shield and etchable layers. The pole trench has a pole tip region in the side shield layer and a yoke region in the etchable layer. A nonmagnetic side gap layer, at least part of which is in the pole trench, is provided. A remaining portion of the pole trench has a location and profile for a pole and in which at least part of the pole is formed. A write gap and trailing shield are provided. At least part of the write gap is on the pole. At least part of the trailing shield is on the write gap.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: June 24, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinqiu Zhang, Ying Hong, Feng Liu, Zhigang Bai
  • Patent number: 8726491
    Abstract: A dual spin filter that minimizes spin-transfer magnetization switching current (Jc) while achieving a high dR/R in STT-RAM devices is disclosed. The bottom spin valve has a MgO tunnel barrier layer formed with a natural oxidation process to achieve low RA, a CoFe/Ru/CoFeB—CoFe pinned layer, and a CoFeB/FeSiO/CoFeB composite free layer with a middle nanocurrent channel (NCC) layer to minimize Jc0. The NCC layer may have be a composite wherein conductive M(Si) grains are magnetically coupled with adjacent ferromagnetic layers and are formed in an oxide, nitride, or oxynitride insulator matrix. The upper spin valve has a Cu spacer to lower the free layer damping constant. A high annealing temperature of 360° C. is used to increase the MR ratio above 100%. A Jc0 of less than 1×106 A/cm2 is expected based on quasistatic measurements of a MTJ with a similar MgO tunnel barrier and composite free layer.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: May 20, 2014
    Assignee: Headway Technologies, Inc.
    Inventors: Cheng T. Horng, Ru-Ying Tong
  • Patent number: 8720044
    Abstract: A method for manufacturing a magnetic transducer is described. The method includes providing a negative mask having a bottom, a plurality of sides, and a top wider than the bottom. The method also includes depositing a nonmagnetic layer on the negative mask. The nonmagnetic layer has a plurality of portions covering the plurality of sides of the negative mask. The method also includes providing a first mask having a first trench therein. The negative mask resides in the first trench. The method further includes depositing side shield material(s), at least a portion of which resides in the first trench. The method further includes removing the negative mask to create a second trench between the plurality of portions of the nonmagnetic layer and form a pole, at least a portion of which resides in the second trench.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: May 13, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Zhigang Bai, Kevin K. Lin, Li He
  • Patent number: 8701274
    Abstract: A manner for stabilizing the shield domain structure is described that employs the magnetic field of a hard bias layer. More particularly, it has been found that the shield domain structure is stabilized when the height of the hard bias layer in the depth direction is made substantially half the height of upper shield layer. In another embodiment of the invention, a stabilizing structure is provided at approximately the midpoint of the shield in order to fix the closure domain of the shield to the desired two-domain structure. In an embodiment of the invention, the stabilizing structure is made convex or concave as viewed from the air-bearing surface.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 22, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Koji Kataoka, Takashi Wagatsuma
  • Patent number: 8701273
    Abstract: A method of manufacturing a magnetic head includes the step of forming an accommodation part and the step of forming a return path section. The return path section lies between a main pole and a top surface of a substrate, and connects a shield and part of the main pole away from a medium facing surface to each other so that a space through which part of a coil passes is defined. The accommodation part accommodates at least part of the return path section. The step of forming the return path section forms first to third portions simultaneously. The first portion is located closer to the top surface of the substrate than is the space. The second portion is located closer to the medium facing surface than is the space. The third portion is located farther from the medium facing surface than is the space.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: April 22, 2014
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Hironori Araki, Seiichiro Tomita, Kazuki Sato, Shigeki Tanemura, Tatsuya Shimizu
  • Patent number: 8689430
    Abstract: A method and system for providing a perpendicular magnetic recording (PMR) head are disclosed. A PMR pole having a bottom and a top wider than the bottom is provided. The PMR pole may be formed by depositing a PMR pole layer, then removing part of the PMR pole layer, leaving the PMR pole. The PMR pole may also be provided by forming a trench having the desired profile in a photoresist layer, depositing the PMR pole layer, then removing the photoresist layer, leaving the PMR pole in the location of the trench. A side gap is deposited over the PMR pole. A side shield is provided on the side gap. A planarization that removes part of the side shield on the PMR pole is performed. A top gap is provided on the PMR pole, substantially covering the entire PMR pole. A top shield is provided on the top gap.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: April 8, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yingjian Chen, Kyusik Sin
  • Patent number: 8671554
    Abstract: An example method for manufacturing a magneto-resistance effect element having a magnetic layer, a free magnetization layer, and a spacer layer includes forming a first metallic layer and forming, on the first metallic layer, a second metallic layer. A first conversion treatment is performed to convert the second metallic layer into a first insulating layer and to form a first metallic portion penetrating through the first insulating layer. A third metallic layer is formed on the first insulating layer and the first metallic portion. A second conversion treatment is performed to convert the third metallic layer into a second insulating layer and to form a second metallic portion penetrating through the second insulating layer.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: March 18, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideaki Fukuzawa, Hiromi Yuasa, Yoshihiko Fuji
  • Patent number: 8646168
    Abstract: A method for manufacturing a magnetic write pole of a magnetic write head for perpendicular magnetic recording. A magnetic write pole material is deposited, followed by union milling hard mask, a polymer mask under-layer followed by a dielectric hard mask material, followed by a photoresist. The photoresist is patterned to define a write pole shape and the shape of the patterned photoresist is transferred onto the underlying dielectric hard mask by a novel reactive ion etching that is performed in a chemistry that includes one or more fluorine containing gases and He. The presence of He in the reactive ion etching tool helps to improve the profile of the patterned dielectric hard mask. In addition, RIE parameters such a gas ratio (e.g. CF4 to CHF3 gas ratio) and power ratio (e.g. source power to bias power) are adjusted to optimize the profile of the patterned dielectric mask.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: February 11, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Guomin Mao, Sue Siyang Zhang, Yi Zheng
  • Patent number: 8615868
    Abstract: A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: December 31, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Yongchul Ahn, Xiaozhong Dang, Quang Le, Simon H. Liao
  • Patent number: 8607439
    Abstract: A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The method and system include providing a slider, an EAMR transducer coupled with the slider, and a top layer on the slider. The top layer includes a mirror well therein and has a substantially flat top surface. The method and system further includes providing a laser including a light-emitting surface and providing a mirror optically coupled with the laser. The laser is coupled to the top surface of the top layer external to the mirror well. The mirror has a bottom surface and a reflective surface facing the light-emitting surface of the laser. A portion of the bottom surface of the mirror is affixed to the top surface of the top layer. A portion of the mirror resides in the mirror well.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: December 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Lei Wang, Dujiang Wan
  • Patent number: 8607438
    Abstract: A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: December 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Wei Gao, Guanxiong Li, Ming Mao, Chih-Ching Hu, Guanghong Luo, Miao Wang, Zhihong Zhang, Anup G. Roy
  • Patent number: 8578594
    Abstract: A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: November 12, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ming Jiang, Ronghui Zhou, Guanghong Luo, Masahiro Osugi, Danning Yang
  • Patent number: 8578593
    Abstract: A method of manufacturing a thermally-assisted magnetic write head is provided. The method includes steps of: forming a laminate structure including the waveguide; the plasmon generator, and the magnetic pole in order; performing a first polishing process to planarize an end surface of the laminate structure; performing a first etching process to remove impurity attached on the end surface of the laminate structure, and to allow the plasmon generator to be recessed from the waveguide and the magnetic pole, thereby forming a recessed region on the end surface of the laminate structure; forming a protection layer on the end surface of the laminate structure such that at least the recessed region is filled; and performing a second polishing process on the end surface of the laminate structure formed with the protection layer until the plasmon generator is exposed, thereby completing the air bearing surface.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: November 12, 2013
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Kosuke Tanaka, Shinji Hara, Tsutomu Chou, Yasutoshi Fujita
  • Patent number: 8567045
    Abstract: As track densities increase, it becomes increasingly important, while writing in a given track, not to inadvertently write data in adjoining tracks. This problem has been overcome by limiting the width of material in the ABS plane to what it is at the write gap. The part of the lower pole that is wider than this is recessed back away from the ABS, thereby greatly reducing its magnetic influence on adjacent tracks. Four different embodiments of write heads that incorporate this notion are described together with a description of a general process for their manufacture.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: October 29, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Moris Dovek, Glen Garfunkel, Po Kang Wang
  • Patent number: 8555486
    Abstract: A method for fabricating a magnetic recording transducer is described. The transducer has an ABS location and a nonmagnetic intermediate layer having a pole trench. The method includes depositing at least one magnetic pole layer having a top surface and a pole tip portion proximate to the ABS location. A first portion of the magnetic pole layer(s) resides in the pole trench. The magnetic pole layer(s) have a seam in the pole tip portion that extends to the top surface. The method also includes cathodically etching a second portion of the magnetic pole layer(s) from the seam at a rate of not more than 0.1 nanometers/second, thereby forming a seam trench in the magnetic pole layer(s). The method also includes refilling the seam trench with at least one magnetic refill layer. At least an additional magnetic pole layer is deposited on the top surface and the magnetic refill layer(s).
    Type: Grant
    Filed: December 6, 2011
    Date of Patent: October 15, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jose A. Medina, Tiffany Yun Wen Jiang, Ming Jiang
  • Patent number: 8533935
    Abstract: An auxiliary tool, for assembling a number of voice coil motors, includes a number of trays, a rod member, and two limiting members. Each of the trays includes a main portion and a plurality of support arms extending away from the main portion. The main portion includes a top surface and a bottom surface. The support arms and the main portion cooperatively define two receiving spaces respectively on the top surface and the bottom surface. Each voice coil motor is received in two receiving spaces of two neighboring trays and clamped by the two neighboring trays. The rod member passes through trays and the voice coil motors. The two limiting members are sleeved over the rod member at two ends of the rod member. The trays and the voice coil motors are limited between the two limiting members.
    Type: Grant
    Filed: December 14, 2011
    Date of Patent: September 17, 2013
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Tzu-Nan Chou
  • Patent number: 8533937
    Abstract: A method or forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: September 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinwen Wang, Weimin Si, Jianxin Fang, Ying Hong, Hongzhou Jiang, Ching-Huang Lu, Yan Chen, Donghong Li, Lien-Chang Wang, Lieping Zhong, Tao Pan
  • Patent number: 8524094
    Abstract: The object of the present invention is to provide a masking material for dry etching, which is suitable for fine processing of a magnetic film as thin as a few nm such as NiFe or CoFe constituting a TMR film and capable of simplifying the process for producing a TMR element and reducing production costs related to facilities and materials. This object was solved by a masking material for dry etching of a magnetic material by using a mixed gas of carbon monoxide and a nitrogenous compound as etching gas, which comprises a metal (tantalum, tungsten, zirconium or hafnium) with a melting or boiling point increasing upon conversion thereof into a nitride or carbide.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: September 3, 2013
    Assignees: National Institute for Materials Science, Japan Science and Technology Corporation, Anelva Corporation
    Inventors: Isao Nakatani, Kimiko Mashimo, Naoko Matsui
  • Patent number: 8499435
    Abstract: A thin-film magnetic head is constructed such that a main magnetic pole layer, a lower shield layer, an upper shield layer and a thin-film coil are laminated on a substrate. A method of manufacturing the thin-film magnetic head has a lower shield layer forming step. This step comprises a step of forming a first lower shield part in a lower shield planned area, including a planned line along the medium-opposing surface, a step of forming a partial lower seed layer having a partial arrangement structure in which the partial lower seed layer is arranged on a lower formation zone except a lower exception zone including the planned line, a step of forming a second lower shield part on the partial lower seed layer.
    Type: Grant
    Filed: October 24, 2011
    Date of Patent: August 6, 2013
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Shigeki Tanemura, Kazuki Sato, Atsushi Iijima
  • Patent number: 8495813
    Abstract: A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: July 30, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yufeng Hu, Jinshan Li
  • Patent number: 8474127
    Abstract: A method for enhancing thermal stability, improving biasing and reducing damage from electrical surges in self-pinned abutted junction heads. The method includes forming a free layer, forming first hard bias layers abutting the free layer and forming second hard bias layers over the first hard bias layers discontiguous from the free layer, the second hard bias layers being anti-parallel to the first hard bias layers, the first and second hard bias layers providing a net longitudinal bias on the free layer.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: July 2, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Hardayal Singh Gill, Wen-Chien Hsiao, Jih-Shiuan Luo
  • Patent number: 8468682
    Abstract: A method for providing a perpendicular magnetic recording transducer is described. The method and system include providing a metallic underlayer and providing an insulator, at least a portion of which is on the metallic underlayer. The method and system also include forming a trench in the insulator. The bottom of the trench is narrower than the top of the trench and includes a portion of the metallic underlayer. The method and system also include providing a nonmagnetic seed layer that substantially covers at least the bottom and sides of the trench. The method and system also include plating a perpendicular magnetic pole material on at least a portion of the seed layer and removing a portion of the perpendicular magnetic pole material. A remaining portion of the perpendicular magnetic pole material forms a perpendicular magnetic recording pole.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: June 25, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventor: Lei Larry Zhang
  • Patent number: 8468683
    Abstract: Methods of making write poles for perpendicular magnetic recording write heads. The bevel angle of the write pole for a perpendicular magnetic recording write head affects the performance of the write head. By forming reinforcement layer on the polymeric underlayer mask to enhance the mask durability during ion mill and tapering the polymeric underlayer above the non-magnetic mill mask layer using oxygen and nitrogen based reactive ion etch process, the bevel angle of the magnetic write pole can be increased greatly to meet the demands of the next and future generations of magnetic recording write heads.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: June 25, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Guomin Mao, Yi Zheng
  • Patent number: 8468692
    Abstract: A variable resistance memory device has memory cells that are operated by Joule's heat and which are highly thermally efficient. Conductive patterns are formed on a substrate; sacrificial patterns exposing a portion of the top surface of each of the conductive patterns are formed on the conductive patterns, lower electrodes are formed by etching upper portions of the conductive patterns using the sacrificial patterns as an etching mask, then mold patterns are formed on the lower electrodes and cover exposed sidewall surfaces of the sacrificial patterns, and then the sacrificial patterns are replaced with variable resistance patterns.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: June 25, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Byeung Chul Kim
  • Patent number: 8470185
    Abstract: A method of manufacturing a perpendicular magnetic write head capable of precisely narrowing a side gap is provided. A tip portion having a cross sectional geometry of an inverted trapezoid is formed in an opening portion of a non-magnetic layer and thereafter, the non-magnetic layer is etched with the tip portion as a mask. Thereby, a portion adjacent to the tip portion in a writing track width direction remains and an outermost edge portion of the tip portion in that direction is located on a plane which coincides with an etching face (side face) of the non-magnetic layer. When a gap layer is formed with a vapor phase growth such as a sputtering method to cover the side face of the non-magnetic layer and thereafter a side shield layer is formed adjacently to the tip portion therethrough, a thickness of the gap layer becomes extremely thin and is reproduced precisely. Therefore, the side gap is narrowed with high precision.
    Type: Grant
    Filed: May 29, 2009
    Date of Patent: June 25, 2013
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Tetsuya Mino, Naoto Matono, Ikuhito Onodera, Kazushi Nishiyama, Michitoshi Tsuchiya, Kenji Sasaki
  • Patent number: 8458892
    Abstract: A method for fabricating magnetic transducer is described. The method includes providing a main pole having a bottom and a top wider than the bottom. The method further includes performing a high energy ion mill at an angle from a normal to the to of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method also includes performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.
    Type: Grant
    Filed: May 11, 2010
    Date of Patent: June 11, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Weimin Si, Yun-Fei Li, Ying Hong
  • Patent number: 8456781
    Abstract: A composite free layer having a FL1/insertion/FL2 configuration where a top surface of FL1 is treated with a weak plasma etch is disclosed for achieving enhanced dR/R while maintaining low RA, and low ? in TMR or GMR sensors. The weak plasma etch removes less than about 0.2 Angstroms of FL1 and is believed to modify surface structure and possibly increase surface energy. FL1 may be CoFe, CoFe/CoFeB, or alloys thereof having a (+) ? value. FL2 may be CoFe, NiFe, or alloys thereof having a (?) ? value. The thin insertion layer includes at least one magnetic element such as Co, Fe, and Ni, and at least one non-magnetic element. When CoFeBTa is selected as insertion layer, the CoFeB:Ta ratio is from 1:1 to 4:1.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: June 4, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Tong Zhao, Hui-Chuan Wang, Min Li, Kunliang Zhang
  • Patent number: 8453316
    Abstract: A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.
    Type: Grant
    Filed: July 2, 2009
    Date of Patent: June 4, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Yoshitaka Sasaki, Kazuo Ishizaki, Hiroyuki Itoh
  • Patent number: 8453317
    Abstract: Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.
    Type: Grant
    Filed: October 14, 2010
    Date of Patent: June 4, 2013
    Assignee: HGST Netherlands, B.V.
    Inventors: Donald Allen, Jennifer Ai-Ming Leung, Aron Pentek, Thomas Roucoux
  • Patent number: 8443510
    Abstract: A method for providing at least one transducer including magnetic structure and having an air-bearing surface (ABS) are described. The method includes providing a lapping electronic lapping guide (lapping ELG) and a targeting ELG. The lapping ELG and targeting ELG each are coplanar with the desired thickness of the magnetic structure and have a back edge at the distance from the ABS such that the ELG back edges are substantially aligned with the flare point. The targeting ELG has a front edge at a front edge distance from the ABS corresponding to an intersection of the bevel and the desired thickness. The method further includes lapping the transducer and terminating the lapping based on a first resistance of the lapping ELG and a second resistance of the targeting ELG.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: May 21, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Changqing Shi, Ming Jiang, Lijie Guan
  • Patent number: 8424192
    Abstract: A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.
    Type: Grant
    Filed: August 8, 2005
    Date of Patent: April 23, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Danning Yang, Lei Wang, Yingjian Chen, Brant Nease, Kyusik Sin
  • Patent number: 8413317
    Abstract: A method and system for fabricating a microelectric device are described. A write pole of an energy assisted magnetic recording head or a capacitor might be fabricated. The method includes depositing a resist film and curing the resist film at a temperature of at least 180 degrees centigrade. A cured resist film capable of supporting a line having an aspect ratio of at least ten is thus provided. A portion of the cured resist film is removed. A remaining portion of the resist film forms the line. An insulating or nonmagnetic layer is deposited after formation of the line. The line is removed to provide a trench in the insulating or nonmagnetic layer. The trench has a height and a width. The height divided by the width corresponds to the aspect ratio. At least part of the structure is provided in the trench.
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: April 9, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Dujiang Wan, Hai Sun, Ge Yi, Wei Gao, Hong Zhang, Guanghong Luo, Yunjun Tang, Tiffany Yun Wen Jiang, Zhigang Zhou, Wencheng Su
  • Publication number: 20130081263
    Abstract: A method for manufacturing a magnetic write pole of a magnetic write head for perpendicular magnetic recording. A magnetic write pole material is deposited, followed by union milling hard mask, a polymer mask under-layer followed by a dielectric hard mask material, followed by a photoresist. The photoresist is patterned to define a write pole shape and the shape of the patterned photoresist is transferred onto the underlying dielectric hard mask by a novel reactive ion etching that is performed in a chemistry that includes one or more fluorine containing gases and He. The presence of He in the reactive ion etching tool helps to improve the profile of the patterned dielectric hard mask. In addition, RIE parameters such a gas ratio (e.g. CF4 to CHF3 gas ratio) and power ratio (e.g. source power to bias power) are adjusted to optimize the profile of the patterned dielectric mask.
    Type: Application
    Filed: September 30, 2011
    Publication date: April 4, 2013
    Inventors: Guomin Mao, Sue Siyang Zhang, Yi Zheng
  • Patent number: 8407882
    Abstract: According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: April 2, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Takateru Seki, Zhou Wenjun, Kazuo Takeda, Takefumi Kubota