Machining Magnetic Material (e.g., Grinding, Etching, Polishing) Patents (Class 29/603.16)
  • Patent number: 9847099
    Abstract: A method according to one embodiment includes forming a first portion of a thin film writer structure on a substantially planar portion of a substrate such that planes of deposition of the first portion of the writer structure are substantially parallel to a plane of the substrate; forming a portion of a write gap of the writer structure at an angle of greater than 0° relative to the substantially planar portion of the substrate; and causing the writer structure to tilt at an angle relative to the plane of the substrate such that a plane of deposition of the write gap is oriented about perpendicular to a final media-facing surface of the writer structure.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: December 19, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Philipp Herget, Pierre-Olivier Jubert
  • Patent number: 9711170
    Abstract: A method according to one embodiment includes, in a first lapping step, lapping an end of a section of a thin film wafer for polishing the end of the section, the section having a plurality of rows of transducers formed on a substrate. A bearing surface slot is formed in the polished end at a location that defines a tape bearing surface extending between the bearing surface slot and portions of the transducers exposed on the polished end. A second lapping step is performed on the polished end for reducing a height of the polished end. After the first and second lapping steps, a row is sliced from the section, the row having the polished end and bearing surface slot.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: July 18, 2017
    Assignee: International Business Machines Corporation
    Inventors: Robert G. Biskeborn, Calvin S. Lo
  • Patent number: 9646636
    Abstract: A method of manufacturing a magnetic read-write head, including the steps of presenting a row bar to a processing location, the row bar including an air bearing surface, at least one read-write head, at least one electronic lapping guide, and at least one trigger device, wherein each electronic lapping guide is positioned at a different distance from the air bearing surface than each trigger device, and wherein the read-write head and at least one of the trigger devices include a multi-layer stack of materials; lapping the air bearing surface while measuring the electrical resistance of at least one electronic lapping guide and at least one trigger device until the resistance measurement of the trigger device provides an open circuit reading, and measuring an offset resistance value of the at least one electronic lapping guide concurrently with the measurement of the open circuit reading by the trigger device.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: May 9, 2017
    Assignee: Seagate Technology LLC
    Inventors: Jeffrey R. O'Konski, Garrick F. Shurts, Greg A. Schmitz, Gregory P. Shaffer
  • Patent number: 9361914
    Abstract: A magnetic sensor for use in a data storage device is described. The magnetic sensor includes a composite layer comprising a free layer portion and a bias layer portion each comprising a magnetic material, a shield layer comprising a magnetic material, and a continuous spacer layer comprising a non-magnetic material, the spacer layer separating the shield layer from the composite layer such that the magnetic coupling between the shield layer and the bias layer portion is stronger than the magnetic coupling between the shield layer and the free layer portion. A disk drive comprising a rotatable magnetic recording disk and the slider including the magnetic sensor arranged with the magnetic recording disk is also described.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: June 7, 2016
    Assignee: Western Digital (Fremont), LLC
    Inventors: Christian Kaiser, Qunwen Leng
  • Patent number: 9311954
    Abstract: A tape head is provided for use with a tape drive that is configured to receive a length of tape. The tape head includes a head body including at least one head element for performing read and/or write operations on the tape, and a protective layer extending over at least a portion of the head body for inhibiting wear of the head body when the tape is moved with respect to the head body. Furthermore, the protective layer is made of titanium oxide, chromium oxide, zirconium oxide, aluminum oxide, or zinc oxide.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: April 12, 2016
    Assignee: OPACLE INTERNATIONAL CORPORATION
    Inventors: Jianhua Li, Michael J. Link
  • Patent number: 9280990
    Abstract: A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. The method includes forming a trench in the intermediate layer using a plurality of etches. A first etch substantially provides a first portion of the trench having a first sidewall angle. The second etch substantially provides a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. The second portion of the trench includes the ABS location. The method also includes providing a main pole in the trench. The main pole has a plurality of sidewalls. The sidewalls having the first sidewall angle in the first portion of the trench and the second sidewall angle in the second portion of the trench.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: March 8, 2016
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinqiu Zhang, Feng Liu, Hongmei Han, Ming Sun, Xiaotian Zhou
  • Patent number: 9230573
    Abstract: A magnetic write head having a write pole with a tapered trailing edge and a magnetic oscillator formed on the trailing edge of the write pole. The magnetic oscillator is sandwiched between the magnetic write pole and a trailing magnetic shield. The write head also includes a non-magnetic, electrically conductive bump structure located over a back portion of the magnetic oscillator between the magnetic oscillator and the trailing magnetic shield. The presence of the non-magnetic, electrically conductive bump structure causes electrons to properly flow through the magnetic oscillator in a direction that is generally perpendicular to the plane of the magnetic oscillator, even when the magnetic oscillator is formed on an inclined plane on the tapered trailing edge of the write pole. This thereby ensures optimal performance of the magnetic oscillator.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: January 5, 2016
    Assignee: HGST Netherlands B.V.
    Inventors: Kimitoshi Etoh, Kenji Sugiura, Mikito Sugiyama, Yohji Maruyama, Kazuhiko Hosomi, Katsuro Watanabe
  • Patent number: 9230566
    Abstract: Embodiments disclosed herein generally relate to a perpendicular magnetic recording head for recording magnetic information and a magnetic recording device employing the magnetic head. The magnetic recording head comprises at least one thin shield region having a high coercive force and a magnetization direction oriented towards the right when viewed from the MFS with the leading side on bottom and the trailing side on top, and at least one thick shield region having a low coercive force. The thin shield region surrounds a main pole, and the thick shield region partially surrounds the thin shield region. The magnetic recording head is able to reduce FTI by controlling the magnetization direction of the shield layers.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: January 5, 2016
    Assignee: HGST Netherlands B.V.
    Inventors: Tadayuki Iwakura, Yohji Maruyama, Wataru Kimura, Shigeru Tadokoro
  • Patent number: 9202480
    Abstract: Various embodiments of the subject disclosure provide a double patterning process that uses two patterning steps to produce a write structure having a nose shape with sharp corners. In one embodiment, a method for forming a write structure on a multi-layer structure comprising a substrate and an insulator layer on the substrate is provided. The method comprises forming a hard mask layer over the insulator layer, performing a first patterning process to form a pole and yoke opening in the hard mask layer, performing a second patterning process to remove rounded corners of the pole and yoke opening in the hard mask layer, removing a portion of the insulator layer corresponding to the pole and yoke opening in the hard mask layer to form a trench in the insulator layer, and filling the trench with a magnetic material.
    Type: Grant
    Filed: October 14, 2009
    Date of Patent: December 1, 2015
    Assignee: Western Digital (Fremont), LLC.
    Inventors: Xiaohai Xiang, Yun-Fei Li, Jinqiu Zhang, Hongping Yuan, Xianzhong Zeng, Hai Sun
  • Patent number: 9196267
    Abstract: A data writer may be generally configured at least with a write pole adjacent to and separated from a side shield and a trailing shield. The side shield may be formed of a first material and configured with a trailing box region that is at least partially filled with a flux density insert formed of a second material that is different than the first material.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: November 24, 2015
    Assignee: Seagate Technology LLC
    Inventors: Swaraj Basu, Mark Gubbins, Muhammad Asif Bashir, Prim Gangmei
  • Patent number: 9015927
    Abstract: A method for fabricating a synthetic antiferromagnetic device, includes depositing a reference layer on a first tantalum layer and including depositing a first cobalt iron boron layer, depositing a second cobalt iron boron layer on the first cobalt iron boron layer, depositing a second Ta layer on the second cobalt iron boron layer, depositing a magnesium oxide spacer layer on the reference layer and depositing a cap layer on the magnesium oxide spacer layer.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: April 28, 2015
    Assignee: International Business Machines Corporation
    Inventors: David W. Abraham, Michael C. Gaidis
  • Patent number: 9009950
    Abstract: Disclosed herein is a method for manufacturing a high frequency inductor, the method including; forming a primary coil for manufacturing the high frequency inductor on a wafer; coating a primary PSV on the wafer on which the primary coil is formed; forming a secondary coil for manufacturing the high frequency inductor, after the coating of the primary PSV; coating a secondary PSV, after the forming of the secondary coil; forming a barrier layer on an electrode portion to be exposed of the high frequency inductor, after the coating of the secondary PSV; filling and curing an insulating resin on the wafer, after the forming of the barrier layer; and polishing the cured resin up to the barrier layer to expose the electrode.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: April 21, 2015
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Sang Moon Lee, Young Seuck Yoo, Jong Yun Lee, Young Do Kweon, Sung Kwon Wi
  • Patent number: 9011704
    Abstract: A method according to one embodiment includes contacting an oxidant with an AlTiC portion of a magnetic head for recessing TiC grains of the AlTiC portion. A method according to another embodiment includes contacting a peroxide with an AlTiC portion of a magnetic head for recessing TiC grains of the AlTiC portion from a media bearing surface of the AlTiC portion.
    Type: Grant
    Filed: February 14, 2013
    Date of Patent: April 21, 2015
    Assignee: International Business Machines Corporation
    Inventors: Robert G. Biskeborn, Cherngye Hwang, Jason Liang, Calvin S. Lo
  • Publication number: 20150098151
    Abstract: A read head with at least two separately addressable read transducers that are coplanar in a cross track direction. The read transducers have a cross track width, wr, and a center-to-center separation distance between the two read transducers either greater than 3wr or the distance of two tracks of an associated medium in the cross track direction.
    Type: Application
    Filed: October 4, 2013
    Publication date: April 9, 2015
    Applicant: Seagate Technology LLC
    Inventors: Jason Bryce Gadbois, Steven A. Mastain, James K. Price
  • Patent number: 8997335
    Abstract: A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: April 7, 2015
    Assignee: Headway Technologies, Inc.
    Inventors: Yoshitaka Sasaki, Hiroyuki Itoh, Shigeki Tanemura, Hironori Araki, Kazuo Ishizaki, Takehiro Horinaka
  • Patent number: 8984739
    Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes the steps of: forming a preliminary head section that has a surface to be polished and includes a magnetic pole, a waveguide, and a preliminary plasmon generator; causing a volumetric expansion of the preliminary plasmon generator with heat by introducing light into the core of the waveguide of the preliminary head section; and polishing the surface to be polished of the preliminary head section into a medium facing surface. The preliminary plasmon generator has an end face located in the surface to be polished. In the step of polishing the surface to be polished, the surface to be polished is subjected to polishing with the preliminary plasmon generator expanded in volume, whereby the end face of the preliminary plasmon generator is polished into the front end face, and the preliminary plasmon generator thereby becomes the plasmon generator.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: March 24, 2015
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Koji Shimazawa, Yasutoshi Fujita, Tatsuya Shimizu
  • Patent number: 8984741
    Abstract: A method for manufacturing a magnetic read sensor allows for the construction of a very narrow trackwidth sensor while avoiding problems related to mask liftoff and shadowing related process variations across a wafer. The process involves depositing a plurality of sensor layers and forming a first mask structure. The first mask structure has a relatively large opening that encompasses a sensor area and an area adjacent to the sensor area where a hard bias structure can be deposited. A second mask structure is formed over the first mask structure and includes a first portion that is configured to define a sensor dimension and a second portion that is over the first mask structure in the field area.
    Type: Grant
    Filed: April 27, 2012
    Date of Patent: March 24, 2015
    Assignee: HGST Netherlands B.V.
    Inventors: Yi Zheng, Guomin Mao, Hicham M. Sougrati, Xiaozhong Dang
  • Patent number: 8984740
    Abstract: A method for providing a magnetic recording transducer is provided. The method includes providing a substrate, and a magnetic shield having a top surface above the substrate. The top surface is treated by a first plasma treatment performed at a first power. An amorphous ferromagnetic (FM) layer is deposited on and in contact with the top surface to a thickness of at least 5 Angstroms and not more than 50 Angstroms. A second plasma treatment is performed at a second power. A magnetic seed layer is provided on and contact with the amorphous FM layer. The magnetic seed layer may comprise a bilayer. A nonmagnetic spacer layer is provided above the magnetic seed layer, an antiferromagnetic (AFM) layer provided above the spacer layer, and a read sensor provided above the AFM layer.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: March 24, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yuankai Zheng, Qunwen Leng, Cheng-Han Yang, Zhitao Diao
  • Patent number: 8947828
    Abstract: In one embodiment, an apparatus includes a main pole, at least one side shield positioned on sides of the main pole, and a trailing shield having a multi-bump structure positioned near a trailing side of the main pole, wherein the multi-bump structure has six junctures along the trailing shield facing the main pole, a first juncture positioned at a media-facing surface, a sixth juncture positioned away from the media-facing surface, and second, third, fourth, and fifth junctures positioned along the side of the trailing shield facing the main pole between the first and sixth juncture, wherein an element height of a first face of the trailing shield positioned between the fourth and fifth juncture is less than an element height of a second face of the trailing shield positioned at an end of the trailing shield positioned opposite the media-facing surface of the trailing shield.
    Type: Grant
    Filed: March 18, 2014
    Date of Patent: February 3, 2015
    Assignee: HGST Netherlands B.V.
    Inventors: Wen-Chien D. Hsiao, Na Young Kim, Terence T. L. Lam, Yansheng Luo, Aron Pentek, Honglin Zhu
  • Patent number: 8914970
    Abstract: A tunneling magnetoresistive sensor has an extended pinned layer wherein both the MgO spacer layer and the underlying ferromagnetic pinned layer extend beyond the back edge of the ferromagnetic free layer in the stripe height direction and optionally also beyond the side edges of the free layer in the trackwidth direction. A patterned photoresist layer with a back edge is formed on the sensor stack and a methanol (CH3OH)-based reactive ion etching (RIE) removes the unprotected free layer, defining the free layer back edge. The methanol-based RIE terminates at the MgO spacer layer without damaging the underlying reference layer. A second patterned photoresist layer may be deposited and a second methanol-based RIE may be performed if it is desired to have the reference layer also extend beyond the side edges of the free layer in the trackwidth direction.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: December 23, 2014
    Assignee: HGST Netherlands B.V.
    Inventor: Jordan Asher Katine
  • Patent number: 8914969
    Abstract: A method fabricates a magnetic transducer. A sacrificial leading shield is provided on an etch stop layer. A nonmagnetic layer is provided on the sacrificial leading shield. A pole trench is formed in the nonmagnetic layer and on the sacrificial leading shield. A pole is formed. The pole has a bottom and a top wider than the bottom in a pole tip region. Part of the pole in the pole tip region is in the pole trench and at the ABS location. The sacrificial leading shield and part of the nonmagnetic layer adjacent to the pole are removed. An air bridge thus resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer. As least one shield layer is provided. The at least one shield layer substantially fills the air bridge and form a monolithic shield including a leading and side shields.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: December 23, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Xiaotian Zhou, Hongzhou Jiang, Donghong Li, Lien-Chang Wang, Ching-Huang Lu, Wencheng Su, Lieping Zhong, Tao Pan
  • Patent number: 8904628
    Abstract: Disclosed herein is a method of manufacturing a noise removing filter, including preparing at least one conductive pattern, an insulating layer for covering the at least one conductive pattern, and a lower magnetic body including input/output stud terminals for electrically inputting and outputting electricity to and from the at least one conductive pattern; disposing a recognizable portion on upper surfaces of the input/output stud terminals; disposing an upper magnetic body on the recognizable portion and the insulating layer; polishing the upper magnetic body; and removing the recognizable portion such that a level of an upper surface of the upper magnetic body is higher than levels of the upper surfaces of the input/output stud terminals.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: December 9, 2014
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Sang Moon Lee, Sung Kwon Wi, Jeong Bok Kwak, Won Chul Sim, Young Seuck Yoo, Yong Suk Kim
  • Patent number: 8893376
    Abstract: A method of forming a magnetic recording head is provided. The method comprises the steps of forming a damascene trench comprising a lower region having a substantially trapezoidal cross-section and an upper region having a substantially rectangular cross-section, and providing a magnetic material within the damascene trench.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: November 25, 2014
    Assignee: Western Digital(Fremont), LLC
    Inventors: Changqing Shi, Ming Jiang
  • Patent number: 8881377
    Abstract: A method for determining a critical dimension of a structure along a plane of interest from a measurement along a test plane that is not necessarily located at the plane of interest. The method involves slicing a structure along a test plane and measuring a marker feature in this test plane. A determination of a critical dimension of a feature at the plane of interest is then determined based on the measurement of the marker feature measurement at the test plane. This testing methodology can be useful, for example in the measurement of a critical dimension of a write pole at an air bearing surface plane form a measurement of a test feature at a plane that is not necessarily located at the air bearing surface plane.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: November 11, 2014
    Assignee: HGST Netherlands B.V.
    Inventor: Chester X. Chien
  • Patent number: 8881378
    Abstract: A method is described to improve performance of a magneto-resistive (MR) sensor under conditions of high areal density. The free layer is partially etched away, the removed material being replaced by a magnetic flux guide structure that reduces the free layer's demagnetization field. This in turn reduces the stripe height of the sensor so that the resolution and the read-back signal are enhanced without increasing noise and instability.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: November 11, 2014
    Assignee: Headway Technologies, Inc.
    Inventors: Yuchen Zhou, Joe Smyth, Min Li, Glen Garfunkel
  • Publication number: 20140313614
    Abstract: Approaches for a magnetic write head having a stacked coil architecture. Embodiments utilize the better process control capability available with thin films' thicknesses, compared to the control capability of vertical gap-filling processes, which provides for better scalability to shorter yoke length magnetic write heads, which are faster at writing data bits than are magnetic write heads having a longer yoke length.
    Type: Application
    Filed: April 19, 2013
    Publication date: October 23, 2014
    Applicant: HGST Netherlands B.V.
    Inventors: Wen-Chien David Hsiao, Quan-chiu Harry Lam, Edward Hin Pong Lee, Guomin Mao, Yi Zheng
  • Patent number: 8844120
    Abstract: A method for providing a magnetic transducer including an underlayer is provided. The method comprises providing a recessed region in the underlayer. The recessed region includes a front having an angle from horizontal. The angle is greater than zero and less than ninety degrees. The method further comprises providing an assist pole layer in the recessed region, providing a main pole layer, a portion of the main pole layer residing on the assist pole layer, and defining a main pole from the assist pole layer and the main pole layer.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: September 30, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yong Shen, Zhigang Bai
  • Patent number: 8839504
    Abstract: A method in one approach includes forming a first layer of a nonmagnetic material over two sides of a structure, the first layer being substantially absent from above a top of the structure; depositing an overlayer of an etchable, nonmagnetic material over the first layer and the top of the structure; and etching the overlayer for substantially removing the overlayer from above the top of the structure, wherein a substantial portion of the overlayer remains along the two sides of the structure after the etching. Additional systems and methods are also presented.
    Type: Grant
    Filed: May 13, 2008
    Date of Patent: September 23, 2014
    Assignee: HGST Netherlands B.V.
    Inventor: Yi Zheng
  • Publication number: 20140269234
    Abstract: Implementations disclosed and claimed herein provide a write head core located in a slider, the write head core comprising a first end operative to serve as a write pole, a second end operative to serve as a return pole, wherein the first end comprises a substantially smaller cross-sectional area than the second end, and wherein the write head core has a substantially smooth curvature.
    Type: Application
    Filed: December 30, 2013
    Publication date: September 18, 2014
    Applicant: Seagate Technology LLC
    Inventors: Kirill Rivkin, Ned Tabat, Mourad Benakli, Michael A. Seigler
  • Publication number: 20140254339
    Abstract: A method of making a transducer head disclosed herein includes depositing a spacer layer on an NFT layer of the transducer head, forming an etch stop layer on a spacer layer of a transducer, depositing a cladding layer on the etch stop layer, and milling the cladding layer at a sloped angle such that the milling stops at the etch stop layer.
    Type: Application
    Filed: March 11, 2013
    Publication date: September 11, 2014
    Inventors: Yongjun Zhao, Lien Lee, Lijuan Zou, Mark Henry Ostrowski
  • Publication number: 20140233361
    Abstract: This thermally-assisted magnetic recording head includes: a waveguide; a magnetic pole; and a plasmon generator having a first region and a second region, in which the first region has an one end exposed on an air-bearing surface and another end located on an opposite side of the air-bearing surface, and in which the second region is coupled to the another end of the first region and has a volume greater than a volume of the first region. The first region includes a high-density region having a density that is greater than the density of the second region.
    Type: Application
    Filed: February 21, 2013
    Publication date: August 21, 2014
    Applicant: TDK CORPORATION
    Inventor: Koji SHIMAZAWA
  • Patent number: 8801943
    Abstract: The present disclosure describes a method for manufacturing a full wraparound shield damascene write head through the implementation of a three layered (tri-layered) hard mask. According to an embodiment of the invention, the various layers of hard mask are used for different purposes during the formation of a write head. The wraparound shield head of the present invention exhibits improved physical characteristics that further result in improved performance characteristics. Use of the hard mask layers according to the present invention allows for use of manufacturing processes that can be more closely controlled than those processes used in other processes. For example, smaller dimension lithographic techniques can be used. Also, reliance on certain CMP processes is not necessary where the use of CMP processes is not as well-controlled as deposition or lithographic techniques as is possible using the present invention.
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: August 12, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Shiwen Huang, Fenglin Liu, Qiping Zhong, Kyusik Shin, Yingjian Chen
  • Patent number: 8790525
    Abstract: A method of manufacturing a magnetic recording medium is provided. The method includes: forming a magnetic layer 2 on a non-magnetic substrate 1; forming a mask layer 3 on the magnetic layer 2; forming a resist layer 4 which is patterned into a predetermined shape on the mask layer 3; patterning the mask layer 3 into a shape corresponding to the resist layer 4 using the resist layer 4; patterning the magnetic layer 2 into a shape corresponding to the mask layer 3 using the patterned mask layer 3; and removing the mask layer 3 that remains on the magnetic layer 2 by reactive plasma etching. The reactive plasma etching is performed under an atmosphere containing an organic compound having at least one kind or plural kinds of functional groups selected from a hydroxyl group, a carbonyl group, a hydroxy carbonyl group, an alkoxy group, and an ether group.
    Type: Grant
    Filed: January 16, 2013
    Date of Patent: July 29, 2014
    Assignee: Showa Denko K.K.
    Inventors: Makoto Hiwatari, Akira Yamane, Tomoo Shige, Akira Sakawaki
  • Patent number: 8792312
    Abstract: A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The method and system include providing a slider, an EAMR transducer coupled with the slider, and a top layer on the slider. The top layer includes a mirror well therein and has a substantially flat top surface. The method and system further includes providing a laser including a light-emitting surface and providing a mirror optically coupled with the laser. The laser is coupled to the top surface of the top layer external to the mirror well. The mirror has a bottom surface and a reflective surface facing the light-emitting surface of the laser. A portion of the bottom surface of the mirror is affixed to the top surface of the top layer. A portion of the mirror resides in the mirror well.
    Type: Grant
    Filed: May 7, 2013
    Date of Patent: July 29, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Lei Wang, Dujiang Wan
  • Patent number: 8758083
    Abstract: A method and system for providing transducer(s) including a disk structure and having an air-bearing surface (ABS) are described. The disk structure resides a distance from the ABS and has a disk dimension substantially perpendicular to the ABS. Lapping control and disk windage ELGs are provided. The lapping control ELG has first and second edges first and second distances from the ABS. The disk windage ELG has edges different distances from the ABS. A difference between these edges corresponds to the disk dimension. A windage resistance of the disk windage ELG is measured and a disk windage determined. The disk windage corresponds to a difference between designed and actual disk dimensions perpendicular to the ABS. A lapping ELG target resistance is determined based on the disk windage. The transducer is lapped. Lapping is terminated based on a resistance of the lapping control ELG and the lapping ELG target resistance.
    Type: Grant
    Filed: September 13, 2010
    Date of Patent: June 24, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Steven C. Rudy, Changqing Shi, Yufeng Hu, Mark D. Moravec, Eric R. McKie, Nurul Amin
  • Patent number: 8756795
    Abstract: A method for manufacturing a read head includes the step of depositing a conductive filler into a plurality of holes that extend through a wafer. Each of the holes extends from a wafer top surface to a wafer bottom surface. Each of the holes includes an inner surface that includes an insulative layer. The method further includes the steps of fabricating a read transducer on the wafer top surface, and depositing a plurality of electrically conductive leading connection pads on the wafer bottom surface. The plurality of electrically conductive leading connection pads are in electrical contact with the conductive filler.
    Type: Grant
    Filed: March 21, 2012
    Date of Patent: June 24, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Mark D. Moravec, Subrata I Gusti Made, Santi Pumkrachang
  • Patent number: 8726491
    Abstract: A dual spin filter that minimizes spin-transfer magnetization switching current (Jc) while achieving a high dR/R in STT-RAM devices is disclosed. The bottom spin valve has a MgO tunnel barrier layer formed with a natural oxidation process to achieve low RA, a CoFe/Ru/CoFeB—CoFe pinned layer, and a CoFeB/FeSiO/CoFeB composite free layer with a middle nanocurrent channel (NCC) layer to minimize Jc0. The NCC layer may have be a composite wherein conductive M(Si) grains are magnetically coupled with adjacent ferromagnetic layers and are formed in an oxide, nitride, or oxynitride insulator matrix. The upper spin valve has a Cu spacer to lower the free layer damping constant. A high annealing temperature of 360° C. is used to increase the MR ratio above 100%. A Jc0 of less than 1×106 A/cm2 is expected based on quasistatic measurements of a MTJ with a similar MgO tunnel barrier and composite free layer.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: May 20, 2014
    Assignee: Headway Technologies, Inc.
    Inventors: Cheng T. Horng, Ru-Ying Tong
  • Patent number: 8720044
    Abstract: A method for manufacturing a magnetic transducer is described. The method includes providing a negative mask having a bottom, a plurality of sides, and a top wider than the bottom. The method also includes depositing a nonmagnetic layer on the negative mask. The nonmagnetic layer has a plurality of portions covering the plurality of sides of the negative mask. The method also includes providing a first mask having a first trench therein. The negative mask resides in the first trench. The method further includes depositing side shield material(s), at least a portion of which resides in the first trench. The method further includes removing the negative mask to create a second trench between the plurality of portions of the nonmagnetic layer and form a pole, at least a portion of which resides in the second trench.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: May 13, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Zhigang Bai, Kevin K. Lin, Li He
  • Publication number: 20140123473
    Abstract: A method of forming a TAMR (Thermal Assisted Magnetic Recording) write head that uses the energy of optical-laser excited plasmons to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. The magnetic field of the write head is enhanced by the formation of a leading shield that is formed in a concave geometrical shape and partially surrounds the waveguide portion of the head within the concavity, which allows the distal end of the waveguide to extend to the ABS plane of the write head. This arrangement reduces the gap between the shield and the magnetic pole and does not interfere with the ability of the waveguide to efficiently transfer its optical energy to the plasmon generator and, ultimately, to the surface of the magnetic recording medium.
    Type: Application
    Filed: December 23, 2013
    Publication date: May 8, 2014
    Applicant: Headway Technologies, Inc.
    Inventors: Yiming Wang, Tobias Maletzky, Xuhui Jin, Dayu Zhou, Joe Smyth, Moris Dovek
  • Patent number: 8701273
    Abstract: A method of manufacturing a magnetic head includes the step of forming an accommodation part and the step of forming a return path section. The return path section lies between a main pole and a top surface of a substrate, and connects a shield and part of the main pole away from a medium facing surface to each other so that a space through which part of a coil passes is defined. The accommodation part accommodates at least part of the return path section. The step of forming the return path section forms first to third portions simultaneously. The first portion is located closer to the top surface of the substrate than is the space. The second portion is located closer to the medium facing surface than is the space. The third portion is located farther from the medium facing surface than is the space.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: April 22, 2014
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Hironori Araki, Seiichiro Tomita, Kazuki Sato, Shigeki Tanemura, Tatsuya Shimizu
  • Patent number: 8701274
    Abstract: A manner for stabilizing the shield domain structure is described that employs the magnetic field of a hard bias layer. More particularly, it has been found that the shield domain structure is stabilized when the height of the hard bias layer in the depth direction is made substantially half the height of upper shield layer. In another embodiment of the invention, a stabilizing structure is provided at approximately the midpoint of the shield in order to fix the closure domain of the shield to the desired two-domain structure. In an embodiment of the invention, the stabilizing structure is made convex or concave as viewed from the air-bearing surface.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: April 22, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Koji Kataoka, Takashi Wagatsuma
  • Patent number: 8689430
    Abstract: A method and system for providing a perpendicular magnetic recording (PMR) head are disclosed. A PMR pole having a bottom and a top wider than the bottom is provided. The PMR pole may be formed by depositing a PMR pole layer, then removing part of the PMR pole layer, leaving the PMR pole. The PMR pole may also be provided by forming a trench having the desired profile in a photoresist layer, depositing the PMR pole layer, then removing the photoresist layer, leaving the PMR pole in the location of the trench. A side gap is deposited over the PMR pole. A side shield is provided on the side gap. A planarization that removes part of the side shield on the PMR pole is performed. A top gap is provided on the PMR pole, substantially covering the entire PMR pole. A top shield is provided on the top gap.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: April 8, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yingjian Chen, Kyusik Sin
  • Patent number: 8671554
    Abstract: An example method for manufacturing a magneto-resistance effect element having a magnetic layer, a free magnetization layer, and a spacer layer includes forming a first metallic layer and forming, on the first metallic layer, a second metallic layer. A first conversion treatment is performed to convert the second metallic layer into a first insulating layer and to form a first metallic portion penetrating through the first insulating layer. A third metallic layer is formed on the first insulating layer and the first metallic portion. A second conversion treatment is performed to convert the third metallic layer into a second insulating layer and to form a second metallic portion penetrating through the second insulating layer.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: March 18, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideaki Fukuzawa, Hiromi Yuasa, Yoshihiko Fuji
  • Patent number: 8646168
    Abstract: A method for manufacturing a magnetic write pole of a magnetic write head for perpendicular magnetic recording. A magnetic write pole material is deposited, followed by union milling hard mask, a polymer mask under-layer followed by a dielectric hard mask material, followed by a photoresist. The photoresist is patterned to define a write pole shape and the shape of the patterned photoresist is transferred onto the underlying dielectric hard mask by a novel reactive ion etching that is performed in a chemistry that includes one or more fluorine containing gases and He. The presence of He in the reactive ion etching tool helps to improve the profile of the patterned dielectric hard mask. In addition, RIE parameters such a gas ratio (e.g. CF4 to CHF3 gas ratio) and power ratio (e.g. source power to bias power) are adjusted to optimize the profile of the patterned dielectric mask.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: February 11, 2014
    Assignee: HGST Netherlands B.V.
    Inventors: Guomin Mao, Sue Siyang Zhang, Yi Zheng
  • Patent number: 8615868
    Abstract: A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: December 31, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Yongchul Ahn, Xiaozhong Dang, Quang Le, Simon H. Liao
  • Patent number: 8607438
    Abstract: A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: December 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Wei Gao, Guanxiong Li, Ming Mao, Chih-Ching Hu, Guanghong Luo, Miao Wang, Zhihong Zhang, Anup G. Roy
  • Patent number: 8607439
    Abstract: A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The method and system include providing a slider, an EAMR transducer coupled with the slider, and a top layer on the slider. The top layer includes a mirror well therein and has a substantially flat top surface. The method and system further includes providing a laser including a light-emitting surface and providing a mirror optically coupled with the laser. The laser is coupled to the top surface of the top layer external to the mirror well. The mirror has a bottom surface and a reflective surface facing the light-emitting surface of the laser. A portion of the bottom surface of the mirror is affixed to the top surface of the top layer. A portion of the mirror resides in the mirror well.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: December 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Lei Wang, Dujiang Wan
  • Patent number: 8590139
    Abstract: A method according to embodiments of the present invention comprises providing a magnetic stack comprising a magnetic layer sub-stack comprising magnetic layers and a bottom conductive electrode and a top conductive electrode electrically connecting the magnetic layer sub-stack at opposite sides thereof; providing a sacrificial pillar on top of the magnetic stack, the sacrificial pillar having an undercut with respect to an overlying second sacrificial material and a sloped foot with increasing cross-sectional dimension towards the magnetic stack, using the sacrificial pillar for patterning the magnetic stack, depositing an insulating layer around the sacrificial pillar, selectively removing the sacrificial pillar, thus creating a contact hole towards the patterned magnetic stack, and filling the contact hole with electrically conductive material.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: November 26, 2013
    Assignees: IMEC, Katholieke Universiteit Leuven, K.U. Leuven R&D
    Inventors: Maria Op De Beeck, Liesbet Lagae, Sven Cornelissen
  • Patent number: 8578594
    Abstract: A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: November 12, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ming Jiang, Ronghui Zhou, Guanghong Luo, Masahiro Osugi, Danning Yang
  • Patent number: 8578593
    Abstract: A method of manufacturing a thermally-assisted magnetic write head is provided. The method includes steps of: forming a laminate structure including the waveguide; the plasmon generator, and the magnetic pole in order; performing a first polishing process to planarize an end surface of the laminate structure; performing a first etching process to remove impurity attached on the end surface of the laminate structure, and to allow the plasmon generator to be recessed from the waveguide and the magnetic pole, thereby forming a recessed region on the end surface of the laminate structure; forming a protection layer on the end surface of the laminate structure such that at least the recessed region is filled; and performing a second polishing process on the end surface of the laminate structure formed with the protection layer until the plasmon generator is exposed, thereby completing the air bearing surface.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: November 12, 2013
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Kosuke Tanaka, Shinji Hara, Tsutomu Chou, Yasutoshi Fujita