Abstract: A solidly mounted resonator structure includes an multi-layer acoustic reflector structure and a piezoelectric material layer arranged between the first and second electrode structures to form an active region, with the acoustic reflector structure providing enhanced reflection of shear and longitudinal modes of acoustic vibrations. The solidly mounted resonator structure is configured for transduction of an acoustic wave including a longitudinal component and a shear component. The acoustic reflector structure includes multiple sequentially arranged differential acoustic impedance layer units each including a low acoustic impedance material layer in contact with a high acoustic impedance material layer. A frequency corresponding to a minimum transmissivity of a second harmonic resonance of a longitudinal response is substantially matched to a frequency corresponding to a minimum transmissivity of a third harmonic resonance of a shear response.

Abstract: A particulate matter sensor assembly including a resistance sensor and a resonance sensor. Each one of the resistance sensor and the resonance sensor is configured to measure particulate matter present in engine exhaust.

Abstract: The present disclosure relates to a display device and a method for fabricating a display device. The display device includes a display layer and a base layer under the display layer. The base layer includes a substrate having a first conductivity type, a well region in a portion of a side of the substrate facing towards the display layer, the well region having a second conductivity type, and an ultrasonic receiver formed in the well region. The ultrasonic receiver includes a first bottom electrode facing towards the substrate, the first bottom electrode including a first semiconductor region formed in the well region, and the first semiconductor region having the first conductivity type, a first top electrode facing towards the display layer, and a first piezoelectric layer formed between the first bottom electrode and the first top electrode.

Abstract: A sensor is disposed between a first component and a second component of an electronic device. The sensor includes a first surface having a first dimension and a second surface having a second dimension that is less than the first dimension such that the sensor has a tapered profile.

Abstract: At least a connector of a current collecting member that is welded to an electrode plate of an electrode assembly is constituted by a rolled material, and the current collecting member and the electrode assembly are bonded to each other by vibration welding.

Abstract: A piezoelectric acoustic resonator with an adjustable temperature compensation capability is disclosed. The piezoelectric acoustic resonator includes: a piezoelectric acoustic reflection structure, a first electrode, a second electrode, a piezoelectric layer between the first electrode and the second electrode, and a temperature compensation layer; wherein the temperature compensation layer is a single-layer temperature compensation layer formed of SixOy material, or a composite temperature compensation layer formed by stacking material with a positive temperature coefficient of sound velocity and material with a negative temperature coefficient of sound velocity; and the temperature compensation layer is configured to: perform reverse compensation for a temperature frequency shift caused by the first electrode, the piezoelectric layer and the second electrode in the piezoelectric acoustic resonator; wherein x:y is not equal to 1:2.

Abstract: An open path optical sensing system having an ultrasonic cleaner. The system includes at least one ultrasound transducer which is configured to propagate ultrasonic waves across exposed surfaces of optical components of the optical sensing system. The ultrasonic waves create tiny vibrations on the exposed surfaces of the optical components which clean the surfaces of environmental pollutants and prevent environmental pollutants from accumulating on the surface. The ultrasonic waves may have a frequency that is substantially different than the modulation frequency of a modulated laser light beam that is generated by a laser of the open path optical sensing system. The surfaces of a plurality of optical components may be cleaned by the ultrasonic waves of a single ultrasound transducer. A plurality of ultrasound transducers may propagate waves on a single optical component.

Abstract: An ultrasonic guided wave system for defect detection in a plate-like structure, includes at least one first circumferentially-polarized piezoelectric d15 shear ring element configured to be coupled to a structure. The controller includes a machine readable storage medium and a processor in signal communication with the machine readable storage medium. The processor is configured to cause a pulse generator to pulse the at least first circumferentially-polarized piezoelectric d15 shear ring element such that shear horizontal-type guided wave energy is transmitted in all directions in the plate-like structure, process at least one guided wave signal to identify the presence and location of at least one possible defect in the plate-like structure, and store the guided wave signal and defect detection data in the machine readable storage medium.

Abstract: An electronic apparatus comprises: an exterior exposed to the outside; a piezoelectric vibrating element being transparent and being located inside the exterior; a vibration unit being transparent and including a surface on which the piezoelectric vibrating element is located, the vibration unit being configured to vibrate by the piezoelectric vibrating element to generate a voice; and a display located inside the exterior and overlapping the piezoelectric vibrating element in a plan view.

Abstract: A mirror system including a mirror that is mounted in a manner that permits oscillation, having a coil and at least one first spring that intercouples the mirror and the coil in a way that allows the coil to be placed as a counterweight to the oscillating mirror. Also a corresponding projection device.

Abstract: In some embodiments, an apparatus and a system, as well as a method and an article, may operate to receive a vibration signal having a frequency and a characteristic (e.g., voltage) proportional to the vibration amplitude of a tube in a vibrating tube density sensor. Further activity may include transmitting the density of a fluid flowing through the tube based on the frequency and an elastic modulus of the tube determined by the value of the characteristic. Additional apparatus, systems, and methods are described.

Abstract: An acoustic resonator device including a piezoelectric layer, a first electrode disposed adjacent to a first surface of the piezoelectric layer, and a second electrode disposed adjacent to a second surface of the piezoelectric layer. At least one of the first electrode and the second electrode includes a first conductive layer disposed adjacent to the piezoelectric layer and having a first acoustic impedance, and a second conductive layer disposed on a side of the first conductive layer opposite the piezoelectric layer and having a second acoustic impedance greater than the first acoustic impedance. The acoustic resonator device further includes at least one lateral feature for increasing quality factor Q of the acoustic resonator structure. The at least one lateral feature includes at least one of an air-ring between the piezoelectric layer and the second electrode, and a frame on at least one of the first electrode and the piezoelectric layer.

Abstract: A BAW component, a lamination for a BAW component, and a method for manufacturing a BAW component are provided. A lamination for a BAW component includes a first layer with a first piezoelectric material and a second layer with a second piezoelectric material that is different than the first piezoelectric material. The first and the second piezoelectric material can be Sc doped AlN and AlN, respectively.

Abstract: An acoustic galvanic isolation device includes a substrate capable of transmitting an acoustic wave. A first network of vibrating membrane electroacoustic transducers is arranged on a first surface of the substrate. A second network of vibrating membrane electroacoustic transducers is arranged on a second opposite surface of the substrate. An effective thickness of the substrate exhibits a gradient between the first and second surfaces with respect to propagating the acoustic wave.

Abstract: A sensor is provided having a diaphragm. One side of the diaphragm is arranged to be exposed to a fluid, to measure a characteristic of the fluid. Two supports are mounted on the diaphragm and a resonator is provided on the supports. The proportion of energy transferred from the resonator to the diaphragm is variable for the sensor to be used either as a viscosity/density sensor or as a pressure sensor.

Abstract: A tuning-fork type crystal resonator plate includes a base portion and a pair of leg portions protruding from the base portion in one direction. A groove and a bank portion are formed on at least one of main surfaces of each of the leg portions. The bank portion is formed accompanied by the formation of the groove, and a width of the bank portion differs along a width direction. The bank portion is constituted by a thick portion having a large width and a thin portion having a small width.

Abstract: The invention relates to a sonotrode (1) for an apparatus (40) for generating low-frequency high-power ultrasound. To be able to manufacture and permanently operate the sonotrode even with elements (2, 3) made of brittle materials, the sonotrode (1) is constructed with at least two materially interconnected elements (2, 3).

Abstract: A spectral detector includes a plurality of spectral detection units, each of the spectral detection units including an optical signal processor configured to deliver an optical signal incident to the spectral detection unit to an outside of the spectral detection unit, and a resonator configured to modulate a spectrum of an optical signal incident to the optical signal processor by interacting with the optical signal processor, at least some of the resonators of the plurality of spectral detection units having different lengths from each other, and a number of optical signal processors included in each respective spectral detection unit varying according to a length of the resonator included in the respective spectral detection unit.

Abstract: A piezoelectric energy harvester device has a cantilevered structure with a rectangular proof mass portion defined by holes through a substrate along three sides of a proof mass portion and supported by a thinned hinge portion for free pivotal movement relative to an anchor portion. Elongated strips of piezoelectric energy harvesting units are formed in side-by-side spaced positions on the hinge portion and aligned parallel or perpendicular to a stress direction. Multiplexing electronics coupled to contact pads on the anchor portion selectively connects different strip combinations to power management circuitry, responsive to variations in vibration magnitude or modes.

Abstract: A capacitive coupled resonator device includes a substrate, a bottom electrode, a piezoelectric layer, a top electrode, and at least one support frame positioned between the piezoelectric layer and the top electrode and/or positioned between the piezoelectric layer and the bottom electrode. The top electrode includes a first top comb electrode having a first top bus bar and first top fingers extending in a first direction from the first top bus bar, and a second top comb electrode having a second top bus bar and second top fingers extending in a second direction from the second top bus bar, the second direction being substantially opposite to the first direction such that the first and second top fingers form a top interleaving pattern. The at least one support frame includes air-gaps separating at least one of the top electrode and the bottom electrode from the piezoelectric layer, respectively.

Abstract: Embodiments of resonator circuits and modulating resonators and are described generally herein. One or more acoustic wave resonators may be coupled in series or parallel to generate tunable filters. One or more acoustic wave resonances may be modulated by one or more capacitors or tunable capacitors. One or more acoustic wave modules may also be switchable in a filter. Other embodiments may be described and claimed.

Abstract: Disclosed is a vibration generating method includes providing a vibration generating device which receives a driving power and generates a vibration, and controlling vibration of a vibrator of the vibration generating device, wherein the vibration of the vibrator is controlled by systematizing an inertia matrix and a stiffness matrix of the vibrator, and wherein the inertia matrix and the stiffness matrix simultaneously satisfy diagonalization. A vibration generating device using this method is also disclosed.

Abstract: An electronic apparatus comprises a display unit and a first cover member that is located on a surface of the electronic apparatus and includes a layer made of sapphire. The first cover member has a first surface opposed to a display surface of the display unit and a second surface opposite to the first surface. The electronic apparatus includes an apparatus case to which the first cover member is mounted and accommodates the display unit. The second surface of the first cover member comprises an outline including first through sixth partial outlines. The electronic apparatus includes a second cover member and a fixing member that fixes said second cover member and said apparatus case to each other.

Abstract: A bulk acoustic wave (BAW) resonator includes a bottom electrode disposed on a substrate, a piezoelectric layer disposed over the bottom electrode, and a top electrode disposed over the piezoelectric layer. The BAW resonator further includes at least one air-gap and corresponding support structure, where the at least one air-gap separates at least one of the bottom electrode and the top electrode from the piezoelectric layer, respectively.

Abstract: A cell phone is provided having multiple sensors configured to detect and measure different parameters of interest. The cell phone includes at least one monolithic integrated multi-sensor (MIMS) device. The MIMS device comprises at least two sensors of different types formed on a common semiconductor substrate. For example, the MIMS device can comprise an indirect sensor and a direct sensor. The cell phone couples a first parameter to be measured directly to the direct sensor. Conversely, the cell phone can couple a second parameter to be measured to the indirect sensor indirectly. Other sensors can be added to the cell phone by stacking a sensor to the MIMS device or to another substrate coupled to the MIMS device. This supports integrating multiple sensors such as a microphone, an accelerometer, and a temperature sensor to reduce cost, complexity, simplify assembly, while increasing performance.

Abstract: An acoustic resonator device includes a bottom electrode disposed on a substrate over an acoustic reflecting feature, a piezoelectric layer disposed on the bottom electrode and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the acoustic reflecting feature define an active region of the acoustic resonator device. The acoustic resonator device further includes at least one of a wing having an outer edge extending beyond at least a portion of an outer edge of the top electrode, and a first frame formed in one of an outer region or a center region of the top electrode. The at least one of the wing and the first frame has an apodized shape, such that no edges are parallel to one another, the apodized shape of the at least one of the wing and the first frame being different from an electrode shape defined by an outer edge of the top electrode.

Abstract: A data transmission device includes a coder configured to code the data into a multifrequency signal. A first array of ultrasonic transducers with a vibrating membrane is disposed on a first surface of a wafer. The first array configured to convert the signal into a multifrequency acoustic signal propagating in the wafer. A second array of ultrasonic transducers is disposed on a second surface of the wafer. The second array includes at least two assemblies of vibrating membrane ultrasonic transducers having resonance frequencies equal to two different frequencies of the multifrequency signal.

Abstract: A powder detector to detect an amount of powder in the powder container includes a wall without a through hole, a vibration plate attached to an inner face of the wall, a contact member to vibrate the vibration plate, and a vibration detector to detect a vibration state of the vibration plate. The vibration detector is attached to an outer face of the wall to face the vibration plate via the wall. The powder has flowability, and the vibration state of the vibration plate is affected by the powder in the powder container.

Abstract: Embodiments shown and described herein relate, in general, to systems and methods for driving ultrasonic transducers and, more particularly, to systems and methods for controlling the output of high power ultrasonic transducers and improving performance of ultrasonic systems.

Abstract: An ultrasonic transducer includes: a diaphragm pot that has a surrounding wall; a transducer element mounted in a diaphragm pot on a transducer section on an inner side of the diaphragm for generating the ultrasonic vibrations; a first damping element situated in the diaphragm pot on transducer element for damping the diaphragm; and a second damping element situated within the diaphragm pot in an edge section of the diaphragm around the transducer element for damping vibrations of the wall; the second damping element being connected with force locking, at least section by section, both to the edge section and to the inner side of the wall.

Abstract: An electronic apparatus comprises a display unit and a first cover member that is located on a surface of the electronic apparatus and includes a layer made of sapphire. The first cover member has a first surface opposed to a display surface of the display unit and a second surface opposite to the first surface. The electronic apparatus includes an apparatus case to which the first cover member is mounted and accommodates the display unit. The second surface of the first cover member comprises an outline including first through sixth partial outlines. The electronic apparatus includes a second cover member and a fixing member that fixes said second cover member and said apparatus case to each other.

Abstract: The present invention aims to provide a piezoelectric composition and a piezoelectric element containing the piezoelectric composition. In the piezoelectric composition, the main component contains a substance represented by the following formula with a perovskite structure, (Bi(0.5x+y+z)Na0.5x)m(Ti(x+0.5y)Mg0.5yAlkzCo(1?k)z)O3 0.15?x?0.7, 0.28?y?0.75, 0.02?z?0.30, 0.17?k?0.83, 0.75?m?1.0, and x+y+z=1.

Abstract: A device for measuring the level of a liquid within a container, in particular the level of liquid gas, comprises a housing and a piezoelectric element adapted for generating vibrations when energized. A coupling pad is provided which is bonded to the piezoelectric element for transmitting the vibrations to a surface of the container. Further, a non-tilting element is provided which surrounds the coupling pad. A method for measuring the level of liquid within a container uses a piezoelectric element for generating vibrations which are transmitted into the shell of the container. An analyzing strategy is used which distinguishes between normal post-pulse oscillations of the piezoelectric element after a measurement was triggered, and extended post-pulse oscillations which are the result of echoed oscillations in the shell of the container.

Abstract: A method of manufacturing a stacked thin film piezoelectric filter includes the steps of forming a lower thin film piezoelectric resonator on a substrate, measuring and adjusting a frequency of the lower thin film piezoelectric resonator, forming an acoustic coupling layer on the lower thin film piezoelectric resonator where the frequency of the lower thin film piezoelectric resonator has been adjusted, forming an upper thin film piezoelectric resonator on the acoustic coupling layer, and measuring and adjusting a frequency of the stacked thin film piezoelectric filter.

Abstract: A transportation device is provided having multiple sensors configured to detect and measure different parameters of interest. The transportation device includes at least one monolithic integrated multi-sensor (MIMS) device. The MIMS device comprises at least two sensors of different types formed on a common semiconductor substrate. For example, the MIMS device can comprise an indirect sensor and a direct sensor. The transportation device couples a first parameter to be measured directly to the direct sensor. Conversely, the transportation device can couple a second parameter to be measured to the indirect sensor indirectly. Other sensors can be added to the transportation device by stacking a sensor to the MIMS device or to another substrate coupled to the MIMS device. This supports integrating multiple sensors such as a microphone, an accelerometer, and a temperature sensor to reduce cost, complexity, simplify assembly, while increasing performance.

Abstract: A method for manufacturing a vibrator according to the present invention includes: forming a coating layer that covers a silicon substrate; patterning the coating layer; forming a semiconductor layer that covers the silicon substrate and the coating layer; forming a vibrating portion having a beam shape on the coating layer and a support portion that supports the vibrating portion by patterning the semiconductor layer; forming an opening that exposes the silicon substrate; forming a recess portion by removing the silicon substrate through the opening; and removing the coating layer. In the step of forming the vibrating portion and the support portion, the support portion having a first portion that is located on the silicon substrate, and a second portion that connects the first portion and the vibrating portion and is located on the coating layer is formed.

Abstract: Micromechanical resonators having stub anchors are described. The micromechanical resonators may be suspended, being connected to a substrate or support by one or more anchors. The anchor(s) may include one or more stubs which can impact the acoustic impedance of the anchor(s). The stub(s) may have various shapes and sizes. In some instances, multiple resonators may be coupled together by a connector having one or more stubs.

Abstract: In some embodiments, a micromechanical filter includes multiple subfilters, each subfilter comprising multiple piezoelectric resonators mechanically coupled in series, wherein the subfilters are mechanically coupled to each other in parallel.

Abstract: An integrated circuit having an indirect sensor and a direct sensor formed on a common semiconductor substrate is disclosed. The direct sensor requires the parameter being measured to be directly applied to the direct sensor. Conversely, the indirect sensor can have the parameter being measured to be indirectly applied to the indirect sensor. The parameter being measured by the direct sensor is different than the parameter being measured by the indirect sensor. In other words, the direct sensor and indirect sensor are of different types. An example of a direct sensor is a pressure sensor. The pressure being measured by the pressure sensor must be applied to the pressure sensor. An example of an indirect sensor is an accelerometer. The rate of change of velocity does not have to be applied directly to the accelerometer. In one embodiment, the direct and indirect sensors are formed using photolithographic techniques.

Abstract: In accordance with a representative embodiment, a method of fabricating a piezoelectric material comprising a first component and a second component comprises: providing a substrate; flowing hydrogen over the substrate; flowing the first component to form the piezoelectric material over a target; and sputtering the piezoelectric material from the target on the substrate. In accordance with another representative embodiment, a method of fabricating a bulk acoustic wave (BAW) resonator comprises: forming a first electrode over a substrate; forming a seed layer over the substrate; and depositing a piezoelectric material having a compression-negative (CN) polarity. The depositing of the piezoelectric material comprises: flowing a first component of the piezoelectric material to form the piezoelectric material over a target comprising a second component of the piezoelectric material; and sputtering the piezoelectric material from the target to the substrate.

Abstract: The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.

Abstract: Systems and methods are provided for determining an acceleration at a location of interest within one of a user's head and neck. At least one of linear acceleration data, angular acceleration data, angular velocity data, and orientation data is produced using at least one sensing device substantially rigidly attached to an ambient-accessible surface of the user's head. The location of interest is represented relative to a position of the at least one sensing device as a time-varying function. An acceleration at the location of interest is calculated as a function of the data produced at the sensing device and the time-varying function representing the location of interest. The calculated acceleration at the location of interest is provided to at least one of the user and an observer in a human-perceptible form.

Abstract: A physical quantity detection element includes a base part, a first connection part and a second connection part respectively extending from the base part in opposite directions to each other along the X-axis, a pair of first drive vibrating arm and second drive vibrating arm and a pair of third drive vibrating arm and fourth drive vibrating arm respectively extending from the first connection part or the second connection part in opposite directions to each other along the Y-axis, a first drive detection vibrating arm and a second drive detection vibrating arm obliquely extending from the first connection part, a third drive detection vibrating arm and a fourth drive detection vibrating arm obliquely extending from the second connection part, and a first detection vibrating arm and a second detection vibrating arm respectively extending from the base part in opposite directions to each other along the Y-axis.

Abstract: An HBAR resonator comprises, on a substrate, a piezoelectric transducer, said transducer comprising at least one piezoelectric layer, at least two series of electrodes and exhibiting resonance frequencies Fi corresponding to wavelengths ?i, characterized in that it comprises an amplification structure comprising at least one resonant cavity arranged on the substrate between said transducer and said substrate or in said substrate, this amplification structure being suitable for mechanically resonating at least one of the resonance frequencies Fi of said transducer corresponding to said wavelength ?i, so as to amplify the amplitude of the electrical resonance generated at said frequency.

Abstract: A piezoelectric power generation apparatus that includes a first vibrating portion having a fixed end and a free end, a first weight portion bonded to the free end of the first vibrating portion, a second vibrating portion having a fixed end bonded to the first weight portion and a free end, and including a vibrating plate and a piezoelectric element provided on the vibrating plate. A second weight portion is bonded to the free end of the second weight portion. In a state where the piezoelectric power generation apparatus is arranged on a vibration surface and is still, a position of the free end of the first vibrating portion and a position of the fixed end of the second vibrating portion in an axial direction perpendicular to the vibration surface are different from each other.

Abstract: A device includes: a base substrate having a bonding pad and a peripheral pad, the peripheral pad encompassing the bonding pad; an acoustic resonator on the base substrate; a cap substrate having a bonding pad seal and a peripheral pad seal, the bonding pad seal bonding around the perimeter of the bonding pad and the peripheral pad seal bonding with the peripheral pad to define a sealed volume between the cap substrate and the base substrate, the cap substrate having a through hole therein over the bonding pad providing access for a connection to the bonding pad; a low-resistivity material layer region disposed on a portion of a surface of the cap substrate disposed inside the sealed volume, the material layer region being isolated from the bonding pad seal; and electronic circuitry disposed in the material layer region and electrical connected with the acoustic resonator.

Abstract: A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.

Abstract: A piezoelectric vibrating piece includes an excitation unit in a rectangular shape, a framing portion, a connecting portion, and a protrusion. The excitation unit includes a pair of excitation electrodes on the pair of principal surfaces, a first side that extends in a first direction, and a second side that extends in a second direction. The second side is longer than the first side. The second direction is perpendicular to the first direction. The connecting portion connects the first side of the excitation unit to the framing portion. The connecting portion is thinner than the framing portion. The protrusion protrudes in the thickness direction in at least one of the connecting portion and a region between the connecting portion and the excitation electrode. The length of the protrusion in the first direction is equal to or longer than a length of the connecting portion in the first direction.

Abstract: A piezoelectric thin film resonator includes: a substrate; a piezoelectric film provided on the substrate; a lower electrode and an upper electrode that sandwich at least a part of the piezoelectric film and face with each other; and an inserted film that is inserted in the piezoelectric film, is provided on an outer circumference region in a resonance region in which the lower electrode and the upper electrode sandwich the piezoelectric film and face with each other, is not provided in a center region of the resonance region, and has a cutout in the resonance region.

Abstract: An electronic device includes: a first substrate, a first function part in its first surface, an adhesive layer on the first surface so as to surround the first function part, a second substrate bonded to the first substrate by the adhesive layer to form a gap between the first and second substrates, a first via interconnection piercing the first substrate to connect the first surface and an opposite second surface, a second via interconnection piercing the second substrate to connect a third surface of the second substrate opposite to the first substrate and a fourth surface opposite to the third surface, a first terminal provided on the second surface and connected to the first via interconnection, a second terminal provided on the fourth surface and connected to the second via interconnection. The first function part is connected to at least one of the first and second via interconnections.