Abstract: An ultrasonic motor is obtained that reduces the resonant frequency of a vibrating body and efficient if made smaller. Also, a structure is provided that batch process is possible enabling mass production.

Abstract: A piezoelectric motor having a stator in which piezoelectric elements are contained in slots formed in the stator transverse to the desired wave motion. When an electric field is imposed on the elements, deformation of the elements imposes a force perpendicular to the sides of the slot, deforming the stator. Appropriate frequency and phase shifting of the electric field will produce a wave in the stator and motion in a rotor. In a preferred aspect, the piezoelectric elements are configured so that deformation of the elements in direction of an imposed electric field, generally referred to as the d33 direction, is utilized to produce wave motion in the stator. In a further aspect, the elements are compressed into the slots so as to minimize tensile stresses on the elements in use.

Abstract: A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.

Abstract: A stacked type electro-mechanical energy conversion element for use with a vibration driven device and a power supply includes a surface layer, a first surface electrode made of conductive material formed in the surface layer, for receiving a driving electrical signal from the power supply, and a second surface electrode formed in the surface layer that defines an index, where the second surface electrode is formed of the same material as the first surface electrode.

Abstract: 2n (n is an integer) projections are formed per half wavelength on the driving surface of a vibration member of a disclosed vibration driven motor. The vibration member has an A driving electrode group (A1 to A8) and a B driving electrode group (B1 to B8) polarized at a &lgr;/2 pitch so as to alternately have opposing expansion/contraction polarities with respect to a wavelength &lgr; of a vibration wave to be excited, and &lgr;/4-pitch vibration detection electrodes (SA, SB) and three ground common electrodes (G), which are arranged between the A and B electrode groups. The vibration detection electrodes (SA, SB) are arranged to have substantially loop positions of standing waves generated by the corresponding A and B driving electrode groups as their centers.