Abstract: Provided is a sensor unit including a first sensor portion that detects deformation of a measuring target object and a second sensor portion that detects deformation of the measuring target object, in which in a state in which the first sensor portion and the second sensor portion are attached to the measuring target object, the first sensor portion and the second sensor portion are fixed to the measuring target object such that the measuring target object is disposed between the first sensor portion and the second sensor portion in a first direction, and a physical property value of the first sensor portion and a physical property value of the second sensor portion are changed according to first deformation of the measuring target object.

Abstract: A device includes a resonator stack. The resonator stack includes a first chiplet including a first acoustic resonator having a first resonant frequency and a second chiplet including a second acoustic resonator having a second resonant frequency that is different from the first resonant frequency. The device also includes a substrate coupled to the resonator stack, and electrical interconnections between the first chiplet and the second chiplet to provide a conductive path between the first acoustic resonator and the second acoustic resonator.

Abstract: A lamp for a vehicle includes a lamp housing part including an internal space configured to accommodate a light source, an outer lens part coupled to one side of the lamp housing part and configured to cover the internal space, a vibration part fixed to the outer lens part, the vibration part including a polarized piezoelectric element, and a first electrode and a second electrode respectively facing two opposite sides based on a direction in which the piezoelectric element is polarized, and a cover member provided at one side of the vibration part and including a partial region facing the outer lens part with the vibration part interposed therebetween, the cover member including one or more vibration reduction holes, wherein the piezoelectric element is configured to output a sound by being vibrated by a change over time in voltage applied to the first electrode and the second electrode.

Abstract: An ultrasound transducer according to the disclosure includes: a piezoelectric element; and a support member that supports the piezoelectric element, in which: the piezoelectric element includes a flat piezoelectric body, a first electrode that is laminated on at least one side of the piezoelectric body in a thickness direction, and a second electrode that is laminated on at least the other side of the piezoelectric body in the thickness direction; the support member includes a first terminal that is connected to the first electrode of the piezoelectric element, and a second terminal that is connected to the second electrode of the piezoelectric element; and the first terminal and the second terminal respectively include portions that do not overlap the piezoelectric element in the thickness direction.

Abstract: Disclosed are piezoelectric compositions and films with high D33 values and improved surface smoothness, scratch resistance and/or adhesion. The compositions and films can have a combination of benefits over the prior art compositions and films by having two different polymers (i.e., EVA and PVDF-TrFE-CFE) blended into a polymer matrix, to which is added piezoelectric additives like PZT, BaTiO3, etc. at greater than 70-90 wt. % loading. Devices utilizing the compositions and films are also disclosed. Such devices can include sensors, transducers, actuators, or wearable devices.

Abstract: A film bulk acoustic wave resonator comprising a piezoelectric film having a central region defining a main active domain in which a main acoustic wave is generated during operation, an upper electrode disposed on a top surface of the piezoelectric film, a lower electrode disposed on a lower surface of the piezoelectric film, a dielectric material layer disposed on a lower surface of the lower electrode, and lower recessed frame regions disposed laterally on opposite sides of the central region, the lower recessed frame regions defined by regions of one of the dielectric material or of the lower electrode having a lesser thickness than the thickness of the one of the dielectric material layer or of the lower electrode in the central region.

Abstract: A method for the quality inspection of an ultrasonic transducer and an ultrasonic sensor comprising an ultrasonic transducer and carrying out the quality inspection method are described. The ultrasonic transducer comprises a housing having an electrically conductive layer extending at least over an inner surface of a housing wall of the housing, and a piezoelectric transducer arranged in the housing, the end face of which equipped with an electrode is connected to the electrically conductive layer by means of a dielectric coupling layer. According to the method, at least one quality inspection of the ultrasonic transducer is carried out, in which a capacitance of a capacitor comprising the electrode, the electrically conductive layer serving as the counter electrode, and the dielectric coupling layer as a dielectric is measured and a quality defect of the ultrasonic transducer is determined if the measured capacitance is outside a specified capacitance range.

Abstract: A method of forming an electrode in a ceramic transducer electronic component is provided. The method includes preparing a sintered body for a ceramic transducer containing a metal oxide, performing patterning by irradiating a laser on a surface of the sintered body for a ceramic transducer, and forming a metal electrode by performing an electroless plating process on the sintered body for a ceramic transducer on which the patterning is formed, wherein, in the performing of the patterning by irradiating the laser on the surface of the sintered body for a ceramic transducer, the patterning is performed by irradiating the laser that satisfies at least one of a predetermined power condition and a predetermined processing speed condition.

Abstract: A piezoelectric device includes a substrate including a first main surface and a second main surface. A piezoelectric element is on the first main surface. A cover on the first main surface. The cover covers the piezoelectric element and is spaced apart from piezoelectric element on the first main surface side. The piezoelectric element includes a base portion and a membrane portion. The base portion is on the first main surface and has an annular external shape when viewed from the first main surface side. The membrane portion is inside the annular base portion when viewed from the first main surface side. The cover includes a first through hole. The substrate includes a second through hole facing the membrane portion and extends between the first main surface and the second main surface.

Abstract: A vapor injection system and method of use thereof. The system including a fluid inlet in fluidic communication with a fluid reservoir, a voltage conditioner connected to a power source, where the voltage conditioner is configured to receive electrical energy from the power source, and transform the electrical energy, wherein transforming the electrical energy includes regulating voltage of the electrical energy and modifying frequency of the voltage, an iron core coil connected to the voltage conditioner, wherein the iron core is configured to transmit the transformed electrical energy from the voltage conditioner, a crystal compressor connected to the iron core coil and the fluid inlet, configured to: receive the transformed electrical energy from the iron core coil, receive the fluid from the fluid inlet, generate the vapor as a function of the transformed electrical energy and the fluid and output the vapor using a vapor outlet.

Abstract: Techniques for compensating signal data from first order high pass filters for exponential decay to extract and underlying step function associated with the signal data. The techniques include adjusting a time scale of the signal data using a charge amplifier. The techniques also include determining a dynamic neutral point for the signal data using an exponential decay function. The techniques further apply an inverse transfer function to remove decay from the signal data and generate a step function associated with the signal data.

Abstract: A system and related method can self-adaptively absorb a flexural wave acting on a beam. The method includes the steps of receiving an input signal representing a frequency response of a flexural wave acting on the beam, determining a spring constant for absorbing the flexural wave based on the input signal, a damping value of a damper acting on the beam, and a mass value of a mass acting on the beam, and applying a spring constant voltage based on the spring constant to a piezoelectric device connected to the beam. The piezoelectric device has a variable spring value that varies based on the voltage applied to the piezoelectric device. The piezoelectric device's variable spring value is approximately equal to the spring constant value when the spring constant voltage is applied to the piezoelectric device.

Abstract: The present disclosure discloses an acoustic device, including: one or more shells each of which includes an accommodation cavity and an opening; one or more speakers each of which includes a vibration component placed in the accommodation cavity; one or more protection components configured to prevent a foreign body from entering the accommodation cavity through the opening, and at least a portion of one of the one or more protection components may be physically connected with the vibration component to transmit a vibration of the vibration component to the outside.

Abstract: A sports bra shock absorption effect evaluation method includes: allowing a subject to wear a sports bra for an experimental test, adhering a total of 43 infrared reflective mark points on the body, and completing preparation; allowing the subject naturally to stand on a treadmill, and acquiring static coordinate data; starting the treadmill, acquiring dynamic coordinate data for 5 minutes in sports when a speed in sports reaches 6-12 km/h, and immediately asking a subjective perception of the subject after doing sports; converting the dynamic coordinate data into coordinate data in which a thoracic vertebra point is defined as an origin, and calculating a square root index S of displacement amplitude data in the left-right direction and the up-down direction; and numerically sorting the displacement amplitudes according to the square root index S, and corresponding to subjective perceptions one by one to obtain hierarchical definitions for an existing bra.

Abstract: A component of a bone conduction device, including a housing and a piezoelectric bender located in the housing, wherein the component is configured to limit bending of the piezoelectric bender relative to that which would otherwise be the case in the absence of the limits via application of a stopping force at a centralized location of an assembly of which the bender is a part.

Abstract: A tunable bulk acoustic wave (BAW) resonator includes: a first electrode adapted to be coupled to an oscillator circuit; a second electrode adapted to be coupled to the oscillator circuit; and a piezoelectric layer between the first electrode and the second electrode; and a Bragg mirror. The Bragg mirror has: a metal layer; and a dielectric layer between the metal layer and either of the first electrode or the second electrode. The tunable BAW resonator also includes: a radio-frequency (RF) signal source having a first end and a second end, the first end coupled to the first electrode, and the second end coupled to the second electrode; and an amplifier circuit between either the first electrode or the second electrode and the Bragg mirror metal layer.

Abstract: A vibrator including a housing, a transducer mounted in the housing such that there is a gap between the housing and transducer; and an impulse force damper that substantially fills the gap. Such a damper includes: a first layer in contact with the housing; and a second layer in contact with the transducer and the first layer; wherein substantially no adhesion is exhibited between the first and second layers or between at least one of the first and second layers and at least one of the housing and the transducer.

Abstract: A support garment can include a textile layer forming a supportive region and configured to adjustably permit or inhibit displacement of a body part of the wearer that is positioned adjacent or proximate the supportive region. The garment can include an electroadhesive clutch device to help control displacement. In an example, the garment includes an underwear garment or a portion thereof.

Abstract: Aspects of this disclosure relate bulk acoustic wave resonators with a patterned mass loading layer at least contributing to a difference in mass loading between a main acoustically active region of the bulk acoustic wave resonator and a recessed frame region of the bulk acoustic wave resonator. Related methods of manufacturing can involve forming the patterned mass loading layer in the main acoustically active region and the recessed frame region in a common processing step such that the patterned mass loading layer has a higher density in the main acoustically active region than in the recessed frame region.

Abstract: A wideband vibration suppression device utilizing properties of a sonic black hole, comprising: a vibration absorber (101) comprising a uniform portion (1011) of a fixed thickness and a conical portion (1012) integrally connected to the uniform portion (1011), the conical portion (1012) extending from the junction in such a manner that the thickness thereof gradually decreases from the thickness (d1) of the uniform portion (1011) to a predetermined thickness (d2); and a damping layer (102) attached to the conical portion (1012) of the vibration absorber (101).

Abstract: A method for manufacturing a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength range and/or in the ultrasonic range, includes arranging at least one piezoelectric element on a support substrate. A diaphragm is formed on the at least one piezoelectric element. In forming the diaphragm, a flowable and curable polymer, which forms the diaphragm after curing, is at least partially cast around the at least one piezoelectric element. The invention further relates to the MEMS sound transducer formed by the method.

Abstract: A bulk acoustic wave (BAW) resonator includes a substrate, a stack over the substrate and including a piezoelectric layer disposed between two electrode layers, and one or more edge frames. The one or more edge frames can be a raised metal frame extending parallel to a periphery of an active region of the stack and has one or more slanted cuts such that the edge frame does not form a closed loop and loss of acoustic energy in the active region through the one or more cuts is reduced, minimized or prevented. Alternatively or additionally, the one or more edge frames include a recessed edge frame in the form of a trench in the piezoelectric layer extending parallel to a boundary of the active region, and may further include a second edge frame formed on the first electrode and embedded in the piezoelectric layer.

Abstract: An ultrasonic sensor having a case including a bottom section and a peripheral wall section; a piezoelectric device on the bottom section inside the case; and a resin foam filler filling at least part of the case and covering the piezoelectric device. An inner surface of the case includes a first region and a second region, a surface roughness of the first region is higher than a surface roughness of the second region, the first region includes at least part of the bottom section and/or a portion of the peripheral wall section facing the piezoelectric device, the second region is on the peripheral wall section and is farther from the piezoelectric device than the first region, and the resin foam filler contacts each of the first region and the second region.

Abstract: An impedance matching device for matching a characteristic acoustic impedance includes an impedance matching body including a first side and an opposite second side. The impedance matching device is configured to match a characteristic acoustic impedance of a medium contacted on the first side to a characteristic acoustic impedance of a sound transducer contacted on the second side. The impedance matching body includes microstructures which have a structural extent of at most 500 nanometers along at least one spatial direction.

Abstract: A drop generator for a printing head of a continuous inkjet printer includes at least one ink feed conduit for feeding ink into a stimulation chamber, which has a quality factor Q lower than 2 and at least one resonant frequency fr; an actuator for stimulating a wall of said stimulation chamber; and at least one nozzle for ejecting a jet.

Abstract: An active cooling system and method for using the active cooling system are described. The active cooling system includes a cooling element having a first side and a second side. The first side of the cooling element is distal to a heat-generating structure and in communication with a fluid. The second side of the cooling element is proximal to the heat-generating structure. The cooling element is configured to direct the fluid using a vibrational motion from the first side of the cooling element to the second side such that the fluid moves in a direction that is incident on a surface of the heat-generating structure at a substantially perpendicular angle and then is deflected to move along the surface of the heat-generating structure to extract heat from the heat-generating structure.

Abstract: A transducer assembly operable to transmit ultrasonic energy in a desired direction towards a zone adapted to be acoustically coupled to an object or area of interest is disclosed which has a transducer layer, a backing material disposed behind the transducer layer with respect to the desired direction, and a back-matching layer disposed between the transducer layer and the backing material to reflect towards the transducer layer part of the ultrasonic energy directed from the transducer layer to the backing material. The backing layer has an acoustic impedance higher than the acoustic impedance of the back-matching layer. The back-matching material has an impedance less than the impedance of the transducer layer and the transducer layer has a thickness greater than a ¼ of the wavelength of the ultrasound waves the assembly is configured to generate. A process for manufacturing a transducer assembly is also disclosed.

Abstract: A flexible ultrasonic transducer comprising a flexible metal plate, a piezoelectric ceramics element, a first electrical conductor and an insulation covering a portion of the metal plate. The metal plate comprises a first and a second outer surface opposite each other. The piezoelectric ceramics element is attached to the first outer surface, a first portion of the first outer surface is not covered with the piezoelectric ceramics element, and the first electrical conductor is attached to a first portion of the second outer surface or the first portion of the first outer surface. The first portion of the first outer surface and the first portion of the second outer surface have similar dimensions and positions and the insulation covering covers the first portion of the first outer surface so that the piezoelectric ceramics element is directly dry coupled an object to be inspected by means of the transducer.

Abstract: A cleaning device includes a casing holding an image capturing device, a protective cover disposed in a visual field of the image capturing device, a vibrator to vibrate the protective cover, a controller to control the vibrator, a monitor to detect an electrical characteristic value associated with a vibration of the vibrator, and a storage to store determination criteria based on which the controller evaluates the electrical characteristic value detected by the monitor. The controller is configured to evaluate the electrical characteristic value based on the plurality of determination criteria stored in the storage and clean a surface of the translucent body by controlling the vibrator according to the determination.

Abstract: An ultrasonic cellular stimulation device includes: an ultrasonic transducer for generating a vibration wave; an upper cap having a fixing portion disposed on a lateral surface thereof; and a lower cap having a first surface and a second surface, and including: a recess indenting the first surface; an abutment portion located at a bottom of the recess; and an opening formed in the second surface and being in communication with the recess. The upper cap is partially received in the recess. The ultrasonic transducer is clamped and fixed between the fixing portion and the first surface. A glass piece is disposed on the abutment portion and fixed between the upper cap and the lower cap, such that the vibration wave is conveyed from the first surface into the abutment portion and the glass piece and a uniform and controllable sound field is generated above the glass piece.

Abstract: Embodiments of the present disclosure provide a method for manufacturing a fingerprint recognition method, a fingerprint recognition module, and a display device. The method for manufacturing the fingerprint recognition module includes: providing a backplane; forming a bonding terminal in a bonding area of the backplane; forming a sensing electrode in a fingerprint recognition area of the backplane; forming an insulation layer cladding the bonding terminal in the bonding area, and forming a piezoelectric material layer in the fingerprint recognition area, where an orthographic projection of the piezoelectric material layer on the backplane coincides with an orthographic projection of the sensing electrode on the backplane; performing polarization processing on the piezoelectric material layer; and peeling off the insulation layer.

Abstract: An actuator includes a piezoelectric element, a vibration plate, and a holder. The vibration plate has the piezoelectric element joined thereto and vibrates an object of vibration in accordance with expansion and contraction of the piezoelectric element. The holder is joined to the vibration plate and holds the object of vibration. The height of the holder is less than the maximum bending displacement at which the piezoelectric element is not damaged by an external force.

Abstract: A micro-electromechanical transducer including one or more moveable members, and a viscoelastic substance having a predetermined viscoelasticity, the viscoelastic substance being adapted to influence the response of the transducer in a predetermined manner. The micro-electromechanical transducer of the present invention may include a MEMS transducer, such as a MEMS microphone, a MEMS vibration sensor, a MEMS acceleration sensor, a MEMS receiver.

Abstract: Provided are an ultrasonic device and a device for generating mechanical vibration. The ultrasonic device includes an ultrasonic probe and the device for generating mechanical vibration, where the device for generating mechanical vibration includes a vibration generator (1), a damping component (2), and a pressure component (3); the damping component (2) is fixed between the vibration generator (1) and the pressure component (3); the ultrasonic probe is connected to the pressure component (3); and the vibration generator (1) is configured to generate a vibration when a pressure value detected by the pressure component (3) falls into a preset range.

Abstract: A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. A first patterned electrode is deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the first electrode and a planarized support layer is deposited over the sacrificial layer, which is then bonded to a substrate wafer. The crystalline substrate is removed and a second patterned electrode is deposited over a second surface of the film. The sacrificial layer is etched to release the air reflection cavity. Also, a cavity can instead be etched into the support layer prior to bonding with the substrate wafer. Alternatively, a reflector structure can be deposited on the first electrode, replacing the cavity.

Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.

Abstract: A micro-electromechanical transducer including one or more moveable members, and a viscoelastic substance having a predetermined viscoelasticity, the viscoelastic substance being adapted to influence the response of the transducer in a predetermined manner. The micro-electromechanical transducer of the present invention may include a MEMS transducer, such as a MEMS microphone, a MEMS vibration sensor, a MEMS acceleration sensor, a MEMS receiver.

Abstract: A resonating needle is adapted to be used in a device for measuring and controlling the dosage of a small quantity of fluid, includes: a needle (1) adapted to contain said small quantity of fluid; a resonating element of the piezoelectric type (2), coupled to said needle and adapted to be energized in order to detect variations of oscillation parameters of the needle and of the resonating element for the purpose of determining the dosage measurement and control.

Abstract: A radar level gauging arrangement for performing radar level gauging in a tank having a tank wall which is impermeable to a product held in the tank and transmissive to radar signals, comprising an attachment device configured to be secured to a substantially flat portion of said tank wall, without penetration of the tank wall, and a radar level gauge including a directional antenna, the radar level gauge being mounted to the attachment device, such that, when said attachment device is secured against the tank wall, the directional antenna is positioned so as to enable transmission of radar signals through the tank wall. By mounting a radar level gauge to an attachment device which can be secured to the tank wall without penetrating the tank wall, radar level gauging can thus be provided without damaging or interfering with the tank.

Abstract: A tactile sense presenting device that includes a piezoelectric film, a first diaphragm and a second diaphragm. The piezoelectric film deforms in a planar direction when a voltage is applied thereto. The first diaphragm and the second diaphragm sandwich the piezoelectric film. Opposed ends of the first diaphragm and opposed ends of the second diaphragm are fixed, respectively, to opposed ends of the piezoelectric film such that the first diaphragm and the second diaphragm are in a warped state.

Abstract: A bimorph disk actuator is disclosed including a substrate formed from a substrate composite material and having a first substrate surface and a second substrate surface, a first piezoceramic disk rigidly connected to the first substrate surface of the substrate, a second piezoceramic disk rigidly connected to the second substrate surface of the substrate, and a first composite ring formed from a first ring composite material, rigidly connected to the first substrate surface and surrounding the first piezoceramic disk. A second composite may be rigidly connected to the second substrate surface and surrounding the second piezoceramic disk. A method and apparatus for forming the bimorph disk actuator are also disclosed.

Abstract: A PZT microactuator such as for a hard disk drive has a restraining layer bonded on its side that is opposite the side on which the PZT is mounted. The restraining layer comprises a stiff and resilient material such as stainless steel. The restraining layer can cover most or all of the top of the PZT, with an electrical connection being made to the PZT where it is not covered by the restraining layer. The restraining layer reduces bending of the PZT as mounted and hence increases effective stroke length, or reverses the sign of the bending which increases the effective stroke length of the PZT even further. The restraining layer can be one or more active layers of PZT material that act in the opposite direction as the main PZT layer. The restraining layer(s) may be thinner than the main PZT layer.

Abstract: A solution is offered to providing wearable garment, which provides a continued support for the wearer. A novel system is proposed including a wearable garment and a sensor module attached to the wearable garment. The sensor module has an oscillation sensing element, which measures oscillations experienced by the wearable garment, and an interface provided to the oscillation sensing element for outputting measurement data to a processor.

Abstract: Embodiments provide a couplant and an arrangement of a couplant, a transducer, and a construction component. The couplant is adapted to couple the transducer to the surface of the construction component. The couplant provides 36% to 40% mass portion of hard metal.

Abstract: A method provides a band, including: placing an energy harvesting mechanism within a deformable band; the energy harvesting mechanism being placed to transform deformation of the deformable band into stored energy; and providing a connection element to the energy harvesting mechanism; said connection element offering a coupling of the stored energy of the deformable band to a device. In an embodiment, a force is applied to deform a deformable band along a length dimension of the deformable band. The force acts to move an energy harvesting mechanism of the deformable band such that the energy harvesting mechanism transforms deformation of the deformable band into stored energy. The stored energy may be used, e.g., to collect information using a sensor of said deformable band. Other aspects are described and claimed.

Abstract: An ultrasonic transmission probe is arranged such that an ultrasonic wave transmitted from the ultrasonic transmission probe toward a pipe propagates in a thick part of the pipe, is at least reflected on the outer peripheral face of the pipe, and travels toward an inspection site on the pipe, and an ultrasonic reception probe is arranged to be symmetrical to the ultrasonic transmission probe with reference to the xz plane including the inspection site and perpendicular to the center axis of the pipe.

Abstract: Printed resistive-based sensors and transducers comprising a thin, electronically “active” sensing layer within a dielectric and/or metallic layered structure are provided. The electronic resistance of the active sensing layer is measured during a change in the sensor environment. By utilizing a multi-layered architecture around the active sensing layer, the electronic signal of the sensing element can be improved. By carefully selecting the architecture and materials that surround the active sensing layer, the sensitivity, stability, and selectivity of the sensor to detect changes in the environment are improved. This design allows for a number of specific application areas for environmental sensing.

Abstract: A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. A first patterned electrode is deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the first electrode and a planarized support layer is deposited over the sacrificial layer, which is then bonded to a substrate wafer. The crystalline substrate is removed and a second patterned electrode is deposited over a second surface of the film. The sacrificial layer is etched to release the air reflection cavity. Also, a cavity can instead be etched into the support layer prior to bonding with the substrate wafer. Alternatively, a reflector structure can be deposited on the first electrode, replacing the cavity.

Abstract: Disclosed is a high speed actuator. The high speed actuator includes an actuation part configured to cause deformation such as bending or twisting and an active stiffness controller on a surface of the actuation part or in the actuation part configured to control in real time a stiffness (e.g., of the actuator) according to an external signal. The active stiffness controller may control a stiffness of the high speed actuator in order for the actuator to be actuated at a high speed. Moreover, since the stiffness of the actuator is controlled in real time, a speed of the actuator may be controlled in real time.

Abstract: An ultrasound observation apparatus includes: a sheet including a first transducer, a first transducer region, a columnar portion, and a film portion configured to connect a plurality of first upper electrodes in the first transducer region and a second surface of the columnar portion in an arrangement direction C; and a bonding portion provided between the first transducer positioned on a second end portion in the first transducer region and the columnar portion and configured to maintain a state in which the sheet is rounded such that the film portion becomes an external surface, and the first transducer positioned on the second end portion and a first surface of the columnar portion are attached to each other.