Abstract: Microelectromechanical systems (MEMS) include critical devices for various highly sensitive applications. However, MEMS operation may be impaired by vibration. A modular vibration control pedestal for integration with a MEMS is provided according to embodiments of the present invention which includes a piezoelectric perovskite oxide disposed on a substrate and a shape memory alloy component disposed on the piezoelectric perovskite oxide. In particular embodiments of a MEMS device including a modular VCP, vibration is reduced by at least 50%.

Abstract: A synthetic jet ejector is provided which comprises (a) an LED (119), (b) a heat sink (121), (c) a first synthetic jet actuator (111) equipped with a first diaphragm (162) which is adapted to vibrate such that it undergoes displacements along a first axis, and (d) a second synthetic jet actuator (113) equipped with a second diaphragm (163) which is adapted to vibrate such that it undergoes displacements in an opposite direction along said first axis from said first diaphragm.

Abstract: An auxiliary handle device, in particular for a hand-held power tool, has an auxiliary handle and a damping unit that includes at least one damping element. The damping element is designed to pivot about a pivot axis while vibrations are being damped.

Abstract: Kits and methods for building devices for analyzing or suppressing vibrations in equipment are provided. An electrical-mechanical transducer is configured to be placed in operative contact with the equipment. The transducer may be directly mounted to a base plate that is configured for being mounted to the equipment. A first device (e.g., a printed circuit board) carrying electronic componentry is configured for transmitting vibration drive signals to the electrical-mechanical transducer. A second device (e.g., a printed circuit board) carrying electronic componentry is configured for receiving vibration sensing signals from the electrical-mechanical transducer. The first and second devices can be interchangeably mounted within a housing that can be mounted to the base plate. The housing may comprise an aperture for receiving the electrical-mechanical transducer.

Abstract: A driving apparatus has a piezoelectric element as a driver. The driving apparatus includes a first vibrator which generates an elliptical vibration when a voltage of a predetermined frequency is applied; a first member which holds the first vibrator; a second member which includes a first sliding member to which the first vibrator is pressed and makes a relative displacement with respect to the first member by being driven by the elliptical vibration of the first vibrator; and a first resonance preventive member which is provided to the second member and prevents a resonance in the second member from being generated by the elliptical vibration of the first vibrator.

Abstract: In an ultrasound transducer arrangement comprising at least one piezoelectric body with a lower and an upper electrode and a coupling layer including a wafer on which the ultrasound transducers are disposed and are connected to the lower electrode, a conductor structure of uniform height is disposed on the wafer and is in contact with the lower electrode and any space between the piezoelectric body and the wafer is completely filled with a cement material.

Abstract: An ultrasonic sensor includes a cylindrical casing having a bottom portion. The casing has a piezoelectric element on a bottom surface thereof. A substrate is attached to an end surface of an opening portion of the casing with a damping member provided therebetween such that the damping member covers the opening portion. Pin terminals are arranged so as to extend through the substrate and the damping member and are electrically connected to the piezoelectric element with lead wires. An inner space of the casing is filled with foamable resin.

Abstract: An ultrasonic transducer device comprising: an ultrasonic transducer array micromachined on a substrate; flexible electrical connections connected to the transducer array; and a body of acoustically attenuative material that supports the substrate and the flexible electrical connections. The acoustic backing material may contain additional features, such as tabs or notches, for use in positioning the transducer on fixtures during manufacturing or positioning the transducer within a housing during final assembly. Tabs or other features that are used only during manufacturing may be subsequently removed from the device. The MUT device itself may also be thinned so as to provide flexibility as desired. The backing material is preferably matched in acoustic impedance to the silicon wafer so as to prevent reflection at the interface of any acoustic energy propagating rearward, i.e., in the direction away from the device front surface.

Abstract: A clip for securing a sleeve to the body of a piezoelectric actuator in an actuator assembly. The clip takes the form of a band and has at least a first and a second stable state. The minimum separation of the walls of the band when the clip is in one of the stable states is less than the minimum separation of the walls of the band when the clip is in an unstable state. The clip is forced into an unstable state in order to be fitted over the sleeve of the actuator assembly. The force is then removed to allow the clip to revert towards a stable state. The dimensions of the clip are such that the clip is unable to fully revert to a stable state when fitted to the actuator assembly thereby maintaining sufficient additional strain energy to maintain a sufficient clamping force between the sleeve and the body of the actuator.

Abstract: Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and an electrically-isolating acoustic coupler connected between the modulator and the demodulator. The acoustic coupler comprises no more than one decoupled stacked bulk acoustic resonator (IDSBAR). An electrically-isolating acoustic coupler based on a single IDSBAR is physically small and is inexpensive to fabricate yet is capable of passing information signals having data rates in excess of 100 Mbit/s and has a substantial breakdown voltage between its inputs and its outputs.

Abstract: A vibration controlled housing. The novel housing includes a housing structure and a mechanism for receiving a control signal and in accordance therewith electronically tuning a structural response of the structure. In an illustrative embodiment, the housing structure includes a composite material containing a plurality of piezoelectric fibers adapted to generate an electrical signal in response to a deformation in the structure and to deform the structure in response to an electrical signal applied thereto. A control circuit receives the sensed signal from the fibers and generates an excitation signal that is applied to the fibers to increase the stiffness or compliance of the fibers at predetermined frequencies. In an illustrative embodiment, the control signal is adapted to provide low frequency stiffness and strength performance while attenuating high frequency vibrations to protect electronics housed within the structure.

Abstract: A generating device (1) for generating a useful stream of a medium (2) comprises at least a medium stream source (14) for generating a high-frequency medium stream (15) and at least a medium stream diode (36, 37) for cooperating with the generated medium stream (15), and at least one medium stream sink (40, 41) for cooperating with the medium stream influenced by the medium stream diodes (36, 37), wherein the at least one medium stream sink (40, 41) suppresses high-frequency stream components in the medium stream such that a useful medium stream (2) in a low-frequency range is obtained.

Abstract: A sonic or ultrasonic transducer, which is embodied as a radial oscillator. So that the sonic or ultrasonic transducer can be used at high temperatures, a matching layer is located between the radial oscillator and the atmosphere into which the ultrasonic signals are transmitted The matching layer is made from a material that has a dimensional stability up to a temperature which lies above the temperature at the installation location of the sonic or ultrasonic transducer. Furthermore, the matching layer is selected such that its material-specific coefficient of thermal expansion is greater than that of the materials of a piezoelectric unit and a coupling ring, and that the modulus of elasticity of the material of the matching layer is at least one order of magnitude smaller than that of the piezoelectric unit and/or the coupling ring.

Abstract: The present invention relates to animated devices that include one or more electroactive polymer transducers. When actuated by electrical energy, an electroactive polymer produces mechanical deflection in one or more directions. This deflection may be used to produce motion of a feature included in an animated device. Electroactive polymer transducers offer customizable shapes and deflections. Combining different ways to configure and constrain a polymer, different ways to arrange active areas on a single polymer, different animated device designs, and different polymer orientations, permits a broad range of animated devices that use an electroactive polymer transducer to produce motion. These animated devices find use in a wide range of animated device applications.

Abstract: An energy trap piezoelectric resonator makes use of a harmonic wave in a thickness longitudinal vibration mode and can effectively suppress a spurious fundamental wave in a thickness longitudinal vibration mode without significantly suppressing the harmonic wave that is used for the resonator. The energy trap piezoelectric resonator has a first excitation electrode disposed at an upper surface of a piezoelectric substrate polarized in a thickness direction and a second excitation electrode disposed at a lower surface, and a floating electrode disposed at least one of the upper surface and/or the lower surface of the piezoelectric substrate so as to extend towards and away from the first excitation electrode with respect to a node of an electric potential distribution based on electric charges generated by the fundamental wave that is propagated when an energy trap vibration portion where the excitation electrodes oppose each other is excited.

Abstract: The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic decoupling material. Each of the FBARs has opposed planar electrodes and a piezoelectric element between the electrodes. The acoustic decoupler controls the coupling of acoustic energy between the FBARs. Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs. The reduced acoustic coupling gives the band-pass filter desirable in-band and out-of-band properties.

Abstract: An actuator comprises: an electro-mechanical conversion element; a driving frictional member mounted onto one side in an extension/contraction direction of the electro-mechanical conversion element, the driving frictional member being frictionally engaged with a driven member; and a weight member mounted onto the other side in the extension/contraction direction of the electro-mechanical conversion element, wherein at least a part of the weight member is disposed at the one side from an end face of the other side of the electro-mechanical conversion element.

Abstract: Backing blocks, transducer arrays and methods are provided for thermal cycle survivability. By decoupling a portion of the backing block from a case used to contain the transducer stack, the greater thermal expansion properties of most backing blocks may be minimized. For example, a rim is formed on the backing block material. The rim is bonded to the case structure while other portions of the backing block remain free of bonding to the case structure. During thermal cycling or other temperature changes, the backing block may be less likely to expand or bulge and crack, delaminate or damage transducer elements or other transducer materials.

Abstract: An ultrasonic sensor attached to a certain object, includes an ultrasonic detecting element, an acoustic matching member, and a reflection limiting member. The ultrasonic detecting element detects an ultrasonic wave. The acoustic matching member has a receiving surface that is adapted on a side of the certain object to face toward the detected body. The reflection limiting member is disposed to a side portion of the acoustic matching member between the receiving surface and an opposing surface of the acoustic matching member. The reflection limiting member limits the ultrasonic wave, which transmits inside the acoustic matching member, from being reflected by the side portion.

Abstract: The invention relates to an ultrasonic probe in which the array accuracy of lead wires, and heat resistance when connecting to a connector are enhanced, and a manufacturing method therefor. The ultrasonic probe of the invention is one in which a plurality of piezoelectric elements are arrayed in a two-dimensional direction on a fixing base, and lead wires from the lower surface of each of the piezoelectric elements are inserted through the fixing base, and the electrically connected lead wires are led out, and the fixing base has an opening portion in an array direction of the piezoelectric elements, and comprises unit fixing plates laminated in the array direction, and grooves through which the lead wires are inserted, are formed on one principal surface of the unit fixing plates, and damper material is filled into the opening portion. The invention is also for a manufacturing method for the ultrasonic probe.

Abstract: A piezooscillator having a piezoelectric resonator, composed of: a case surrounding a space where the piezoelectric resonator is provided and including a substrate and a cover; a buffer material supporting the piezoelectric resonator and suppressing a shock conveyed from the case to the piezoelectric resonator; and a wiring member electrically connecting the piezoelectric resonator and the substrate and having flexibility, or composed of: a case surrounding a space where the piezoelectric resonator is provided and including a first substrate and a cover; a second substrate mounting the piezoelectric resonator thereon; a buffer material supporting the second substrate and suppressing a shock conveyed from the case to the piezoelectric resonator; and a wiring member electrically connecting the first and second substrates and having flexibility, in which, when the case suffers the shock from outside, the buffer material absorbs the shock to prevent the shock conveyance to the piezoelectric resonator and frequenc

Abstract: An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

Abstract: A device for applying a therapeutic electrical field to a user's body includes an electroactive material shaped for application to a user body to provide a therapeutic electric field in response to pressure applied to the electroactive material and one or more electrodes integrated into the electroactive material and disposed along an inner surface of the electroactive material for delivering the therapeutic electric field to the user's body.

Abstract: An article of clothing for use in water includes an electroactive material integrated into the clothing, at least one electrode integrated into the clothing and wherein the electroactive material is adapted to release electrical impulses into the water. A method of generating electrical energy on a person includes wearing clothing with an integrated electroactive material that produces electrical charges upon movement of the person and harvesting electrical energy from the electroactive material for use with an electrical load. An article of clothing includes an electroactive material integrated into the clothing, at least one electrode integrated into the clothing, and wherein the electroactive material is adapted to generate an electrical field around the clothing.

Abstract: A sound or ultrasound sensor having a radiation characteristic with a preferably small beam angle and producing very little interference signals, including a pot-shaped housing closed at its bottom end by a floor, a piezoelectric element for producing and/or receiving sound or ultrasound through the floor, a matching layer between the piezoelectric element and the floor, and a metal ring gripping around the matching layer with an interlocking fit.

Abstract: The invention is constructed such that, in an ultrasonic probe in which a peripheral side face of a piezoelectric plate is covered with a shielding case, and an acoustic matching layer is provided on an ultrasonic wave transmission reception face including the piezoelectric plate and the shielding case, there is provided a voltage proof material on a tip side of the shielding case including at least an aperture end face. Moreover, the piezoelectric plate may be a divided type ultrasonic probe which is divided into two by a shielding plate, and the voltage proof material is provided on the tip side of the shielding plate including the end face. The voltage proof material may be a polyimide tape. As a result, it is possible to provide an ultrasonic probe which has a shielding function, and in which destruction of the acoustic matching layer caused by the applied voltage is prevented. Thus, excellent voltage endurance is maintained.

Abstract: A transducer including a transducer body, a sensor associated with the transducer body, an electrical connector assembly fastened to an end of the transducer body, and a vibration damper system disposed between the end of the transducer body and the electrical connector assembly. The vibration damper system being operative for attenuating vibrational acceleration and amplification forces experienced by the electrical connector assembly when the transducer is exposed to vibration.

Abstract: In order to increase the lifetime for a piezoactuator of a fuel injector and to make possible a reliable seal of the piezoactor especially for comparatively thin head plates as well a gas exchange passage running through an actuator housing (52, 54) is provided, where a sealing unit (2) placed on the head arrangement (16, 18) is provided for sealing the piezoactor (12) which features a carrier (28) on which a sealing material (30) is arranged which forms a seal around the piezo contact pins (14) and the head arrangement (16, 18) and on which a microporous gas exchanger (26) to create gas permeability of the sealing unit (24) is integrated such that any fluid which has penetrated through to the gas exchanger (26) can flow out of the gas exchanger (26) under the force of gravity.

Abstract: A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.

Abstract: Provided are a method and system for a biometric sensing apparatus. An apparatus includes an input signal generator configured to produce an activation signal. Also includes is a piezoelectric ceramic sensor having a plurality of piezoelectric ceramic elements arrayed and spaced to (i) receive the activation signal (ii) detect one or more features of a digit proximate to the array in accordance with the received activation signal and (iii) produce output signals representative thereof. A processor is coupled to the sensor to process the output signals.

Abstract: A sensor, sensory array, and associated method for measuring a pressure are provided. The sensor includes a piezoelectric sensory device that is disposed on an electrically insulative substrate that can be adhered to a member for measuring the pressure on the member. The piezoelectric sensory device defines first and second contact surfaces and is adapted to provide an electric potential between the surfaces that corresponds to a pressure on the piezoelectric sensory device. Conductive terminals are in electrical communication with the piezoelectric sensory device and therefore also provide the electric potential indicative of the pressure on the surface of the test member. An electrically insulative sheet is disposed opposite the piezoelectric sensory device from the substrate. An electronic monitoring device can be electrically connected to the piezoelectric sensory device via the terminals and configured to monitor the electric potential provided by the piezoelectric sensory device.

Abstract: A method is provided for making a backing layer for an ultrasonic matrix array transducer useful in medical imaging and the like. A conductive grid is provided which includes a plurality of micro-contacts each joined together by a common base so that spaces are provided between the free ends of the contacts. A mold for the grid is filled with an acoustically absorbent material such that the absorbent material fills the spaces between the contacts, so as to produce a block when cured. The common base is removed so as to separate the contacts from one another within the block. Further machining exposes the opposite ends of micro-contacts so that a like number of contact faces or pads are provided at opposed surfaces of the backing layer. Improved transducer constructions are also disclosed.

Abstract: A gas sensor (10) including a measurement chamber (28) into which a gas GS is flown and a detection element main body (40) facing the measurement chamber (28). The detection element main body (40) includes an element case 42, and a protective film (48) is adhered to a bottom surface thereof. An acoustic matching plate (50) and a piezoelectric element (51) of a substantially columnar shape and a tube body (52) provided in a position surrounding the acoustic matching plate 50 and the piezoelectric element 51 are housed in the element case (42). A filler is then introduced into the element case (42), whereby the acoustic matching plate (50), the piezoelectric element (51), and the tube body (52) are sealed by a filled layer (99).

Abstract: The present invention generally relates to boards for performing skiing such as downhill skis, cross-country skis, snowboards and the like, to a method of stiffening such boards, and a method of manufacturing such boards. More specifically, the present invention relates to a downhill ski comprising electronics for establishing optimal handling and performance characteristics. The board for performing skiing sports of the present invention generally comprises a longitudinally extending body having a longitudinal axis, at least one transducer laminated to the body and converting upon deformation of the body mechanical power to electrical power, and an electrical circuit connected across the transducer.

Abstract: A composite material for piezoelectric transduction which exhibits a sufficient piezoelectricity, can be suitably utilized in various fields as a damping material and the like, and can be suitably utilized in the fields that require heat resistance. The composite material for piezoelectric transduction of the present invention absorbs external vibration or the like as strain energy, efficiently transforms the strain energy into electricity, and is capable of dissipating the electricity as heat, by using a material for piezoelectric transduction which is excellent in mass production at low cost and handlings. One of the preferable aspect of the composite material for piezoelectric transduction is to include a domain which exhibits piezoelectricity in a matrix material of the composite material for piezoelectric transduction, in which the domain is formed of a material for piezoelectric transduction which contains a main chain liquid crystal polymer.

Abstract: A piezoelectric transducer comprises a piezoelectric component, an acoustic member attached to one of the surfaces of the piezoelectric component and a dampening material of low elastic modulus attached to one or both surfaces of the piezoelectric transducer. The piezoelectric component may comprise either an unimorph or a bimorph structure including a piezoceramic wafer made of lead zirconate titanate and a layer of dampening material sandwiched between the piezoelectric component and the acoustic member. The acoustic member comprises a surrounding wall portion and an end portion which form an acoustic chamber when the member is mounted on a surface of the piezoelectrie component. The end portion has an orifice to form a passageway from the chamber through the end portion to the outside of the member.

Abstract: The band-pass filter has a stacked pair of film bulk acoustic resonators (FBARs) and an acoustic decoupler between the FBARs. Each of the FBARs has opposed planar electrodes and a layer of piezoelectric material between the electrodes. The acoustic decoupler has a single layer of acoustic decoupling material having a nominal thickness equal to an odd integral multiple of one quarter of the wavelength in the acoustic decoupling material of an acoustic wave having a frequency equal to the center frequency. The acoustic decoupling material comprises plastic. The acoustic decoupler controls the coupling of acoustic energy between the FBARs. Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs. The reduced acoustic coupling gives the band-pass filter desirable in-band and out-of-band properties.

Abstract: An ultrasonic vibration apparatus includes a casing having a vibration face, a piezoelectric element mounted in the casing, and a disk-like vibration plate supported at a position along a concentric circle differentiating two regions, an inner region and an outer region. In the ultrasonic vibration apparatus, the disk-like vibration plate is constructed so as to be a part of the casing serving as the vibration face, and, the piezoelectric element is mounted in the central part of the disk-like vibration plate, thereby causing the inner region and the outer region to vibrate in substantially the same phase.

Abstract: A film bulk acoustic resonator of the present invention includes an upper electrode 104, a lower electrode 102, and a piezoelectric film 103 as well as an acoustic multilayer 120 that are provided between the upper electrode 104 and the lower electrode 102. Thus, a distance between the upper electrode 104 and the lower electrode 102 is extended by a thickness of the acoustic multilayer 120, and electrostatic capacitance between the upper electrode 104 and the lower electrode 102 per unit area can be reduced accordingly. Therefore, an electrode area can be increased as compared to when there is no acoustic multilayer 120, and an influence of grains of a piezoelectric material can be reduced.

Abstract: A composite transducer array comprises a piezoelectric polymer composite panel, a continuous electrode coupled to a first surface of the composite panel, and a plurality of electrically-isolated electrode segments coupled to a second surface of the composite panel. Each electrode segment is shaped as an angular segment of a circular ring. The electrode segments are arranged to define an array of concentric circular rings of electrode segments.

Abstract: A piezoelectric actuator module has at least one piezoelectric element, one actuator foot and one actuator head, and is surrounded by an axially extending sleeve. To seal off the piezoelectric actuator module in the axial direction, the actuator foot is adjoined by a diaphragm that extends essentially in the radial direction and is connected to the sleeve.

Abstract: The active/passive absorber for extended vibration and sound radiation control includes principally two layers. The first layer has a low stiffness per unit area which allows motion in the direction perpendicular to its main plane. The second layer is principally a mass layer. These two combined layers have a frequency of resonance close to one of the main structure. The dynamic behavior of the coupled system makes the active/passive absorber a passive absorber; however, the first layer can be electrically actuated to induce motion in the direction perpendicular to its main plane. This addition property induces and/or changes the motion of the mass layer and therefore improves the dynamic properties of the active/passive absorber system. The acive/passive absorber can have multiple mass layers and multiple elastic layers stacked one on top of the other. In addition, the mass layers can be continuous or discretized, and have varying thicknesses and shapes for sections and/or segments in the mass layer.

Abstract: In a system for overcoming or at least damping oscillations in or through channels (9) which carry fluid in a component, in particular coolant in cooling channels in an optical element (1), in particular a projection objective lens (1a) for semiconductor lithography, oscillations which occur are detected and evaluated by sensors (5), after which the result is passed, in the form of an adaptronic control loop to piezoelectric elements (9), which are integrated in the optical element, and are in the form of thin plates, films or layers which, when activated, produce the oscillations or frequencies which counteract oscillations and natural frequencies produced by the turbulence.

Abstract: There is put forward a piezolectric element for converting pressure signals into electrical signals and vice versa, with a porous homogeneous ceramic body and with at least two electrodes attached to the ceramic body. The porous ceramic body comprises open pores and is preferably hermetically sealed on the whole surface with an elastic coating. Furthermore there is suggested an oscillation transducer with the piezolement which is accommodated in a housing. The piezolectric element is with one end face rigidly connected to the base of the housing. The other end face represents a surface which is sensitive to oscillations, which preferably is not covered by the housing. The volume of the housing is filled with a casting compound, wherein the piezolectric element is mechanically decoupled from the casting compound.

Abstract: A method is provided for producing a matrix array ultrasonic transducer having an integrated interconnection assembly. A piezoelectric member, formed by a plurality of individual elemental transducers arranged in M×N matrix configuration, is provided and an interconnect interface device is joined to the rear face of the piezoelectric member. A plurality of printed circuits are then attached to the interconnect device so as to enable the resultant transducer array to be electrically connected to an external cable. The interconnect device is formed by an insulator member having dimensions in accordance with those of the piezoelectric member. A drilling operation is performed on the insulator member to form a corresponding array of through holes. The insulator member is then metallized and a resin used to provide filling of the through holes. Grooves are formed in at least one face of the insulator for receiving the printed circuits.

Abstract: A reinforcing structure for an automobile's central rearview mirror which includes an electronic vibration-dampening device. The reinforcing structure includes Piezo electric elements attached to a support structure, a clamping mechanism to stabilize the reflective mirror element and electronics including LEDs to dissipate energy extracted from the mirror. The vibration-dampening features include Piezo electric crystals attached to a support structure to press against the central rearview mirror housing and a circuit card with various components to dissipate unwanted vibration. Also, the invention includes a spring loaded, pivoted clamping system to further stabilize the entire structure. The invention achieves dampening mainly through the application of an inertial dampening system that utilizes Piezo crystals and weights to adequately absorb excess vibration.

Abstract: A valve for regulating fluids includes a piezo actor (2), a converter (3) for converter the stroke of the piezo actor, an inwardly opening control valve (11), which is disposed in a valve chamber (12) and on a first valve seat (14), closes a connection to a low-pressure line (18). A nozzle needle (20) is disposed in the control chamber (21). The control chamber (21) is connected with a high-pressure line (19) via a first supply throttle (22) and with the valve chamber (12) by means of a throttle (23), whereby the valve chamber (12) is connected with the high-pressure line via a second supply throttle (24), in order to make possible a fast closing of the valve.

Abstract: A resonator apparatus has a piezoelectric resonator as well as an acoustic reflector which has a layer having a high acoustic impedance and a layer having a low acoustic impedance. The thickness of one layer is set different from a quarter of the wavelength in this layer at the operating frequency due to technological limitations in the manufacturing of this layer, and the thickness of the other layer is set dependent from the one layer, such that a predetermined minimum quality of the acoustic reflector is attained.

Abstract: Resonator structure (600, 800, 810, 820) comprises two conductor layers (110, 120) and a piezoelectric layer (100) in between the conductor layers, and said conductor layers and piezoelectric layer extend over a first area of the resonator structure, which first area is a piezoelectrically excitable area of the resonator structure. The resonator structure is characterized in that it is arranged to have a zone (603, 801, 803, 804), which confines a center area (604, 802) within the first area of the resonator, and the layer structure in the zone is arranged to be such that piezoelectrically excited vibrations are dampened more effectively in the zone than in the center area.

Abstract: According to various aspects of the invention, a transducer is manufactured by providing a substrate assembly, making major element cuts in the substrate assembly in a first direction, making minor element cuts in the substrate assembly in a second direction, positioning a plurality of signal lines (such as a flex circuit) on the substrate assembly such that the plurality of signal lines is aligned with said minor element cuts, and making major element cuts in the substrate assembly in the second direction after said plurality of signal lines is positioned.