Abstract: In various embodiments, an apparatus can comprise one or more sliding mass cantilever devices. Cantilever devices can be structured as monolithic integrated structures with a mass coupled to a cantilever beam, where the mass has one or more cavities in which a liquid or solid particles are disposed. A cap can be arranged on the mass to prevent the liquid or solid particles from exiting the cavities in which they are embedded. The cantilever devices can be structured as microelectromechanical system (MEMS) resonators with a tunable resonant frequency. Such cantilever devices can be implemented as energy harvesting devices.

Abstract: A method for manufacturing a film bulk acoustic resonance device is disclosed. The proposed method, wherein the device has a specific resonant frequency, includes: providing a substrate having a recess, wherein the recess has a height; configuring a first piezoelectric material layer on the substrate, and causing the recess to form an air gap; configuring a lower electrode on the first piezoelectric material layer; when the height is in a first range, causing a resonant frequency of the film bulk acoustic resonance device versus the height to have a first slope; when the height is in a second range, causing the resonant frequency versus the height to have a second slope; and causing the first slope to be smaller than the second slope.

Abstract: A downhole energy harvesting system includes a housing subjected to periodic oscillations. An energy harvesting device is on, in, or otherwise connected to the housing and positioned to generate electricity based on the periodic oscillations. The energy harvesting device is coupled to at least one of a powered component or an energy storage device in order to use or store the harvested energy.

Abstract: An optical assembly of a projection exposure apparatus for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is subjected to a bias voltage by a controller that is present. A projection exposure apparatus for semiconductor lithography comprises an optical assembly. A method for operating an actuator for deforming an optical element for semiconductor lithography comprises subjecting the actuator to a bias voltage by a controller.

Abstract: A filter system includes a first resonator having a first resonant frequency, and a second resonator having a second resonant frequency different from the first resonant frequency, and electrically connected to the first resonator. A first response characteristic of the first resonator and a second response characteristic of the second resonator with respect to a frequency include a first section in which a first phase of the first resonator is equal to a second phase of the second resonator, and a second section in which the first phase is different from the second phase by 180 degrees. A first electrode of the first resonator is reversely connected to a second electrode of the second resonator.

Abstract: A liquid discharge head includes a nozzle member. The nozzle member includes a nozzle, a deformable laminar member, and an electromechanical transducer. The nozzle discharges liquid. The deformable laminar member has an opening forming the nozzle. The electromechanical transducer is disposed around the opening. The nozzle member is warped with respect to a discharge-side plane of the nozzle member in a surrounding area of the nozzle when no voltage is applied to the electromechanical transducer.

Abstract: The present application provides a motor and an electronic device, where the motor includes a housing, a first electric vibration part, and a mass block; an accommodating cavity is disposed in the housing, the first electric vibration part and the mass block are disposed in the accommodating cavity, a first end of the first electric vibration part is connected to the housing, and a second end of the first electric vibration part is connected to the mass block; and when a voltage is applied to the first electric vibration part, the first electric vibration part drives the mass block to move.

Abstract: An energy harvesting device for powering electronic devices such as wireless sensors and IoT devices is described. The device relies on nature's fundamental forces to convert kinetic energy to electrical energy, acting as power source; while accounting for the Casimir force. Nanotechnology and MEMS are used to fabricate the device embedding a mechanical oscillator, electronic circuitry, energy harvester, and transducer integrated in the same packaging. The device supports mechanism to excite and ignite the oscillatory behavior via RF signal from a remote signal source that synthesizes the RF signal on a fix or mobile platform. Additionally, solar and RF signals may be added constructively to boost the output power of the device. The device scales from micron size to blades and racks formed from arrays of the connected devices to increase the output power of the aggregate system to any desired level for powering home appliances or computer networks.

Abstract: An energy harvesting module includes a pendular unit with piezoelectric transducer elastically deformable in bending between a clamped end and a free end coupled to an inertial mass. The piezoelectric transducer includes two coplanar piezoelectric beams arranged side-by-side on either side of a central axis of the transducer, each of the piezoelectric beams including adjacent external and internal arms, arranged side-by-side and formed single-piece. The external arm of each beam has a clamped proximal end and a free distal end, and the internal arm of each beam has a free proximal end supporting the inertial mass, and a free distal end connected to the distal end of the adjacent external arm by a common junction.

Abstract: The present disclosure provides a piezoelectric element, a piezoelectric vibrator, and a manufacturing method thereof, and an electronic device, and the present disclosure relates to the field of piezoelectric technologies. In the present disclosure, the piezoelectric element is provided with a first electrode and a second electrode positioned on the first electrode. The second electrode is provided with an opening where the first electrode is exposed. A piezoelectric structure is further arranged in the piezoelectric element. The piezoelectric structure includes a first piezoelectric portion and a second piezoelectric portion arranged around the first piezoelectric portion. The first piezoelectric portion is arranged in the opening and is in contact with the first electrode, the second piezoelectric portion is arranged on a side of the second electrode away from the first electrode, and the second piezoelectric portion has orientation.

Abstract: Aspects of self-powered weigh-in-motion systems and methods that utilize piezoelectric components for sensing load as well as powering data acquisition and analysis components. In one example, the weigh-in-motion system includes a number of piezoelectric stacks, each stack including a number of piezoelectric elements. Each stack includes one or more top or upper piezoelectric element that provides vehicle sensing data. Each stack also includes a set of piezoelectric elements used for energy harvesting. The sensing piezoelectric elements are connected to a data input of a microcontroller for vehicle classification, while the energy harvesting piezoelectric elements are connected to a power input of the microcontroller.

Abstract: A linear fan blade assembly including a wire spring having a first end attached to a fan blade and a second end attached to a fan frame. The fan blade includes a free end such that the blade can oscillate by pivoting on the wire spring. The wire spring flexes to enable the fan blade to oscillate.

Abstract: Microelectromechanical systems (MEMS) switches are disclosed. The MEMS switch may have an actuation voltage greater than the expected voltage of a signal being passed by the MEMS switch in normal operation. The MEMS switches may include a distributed hinge structure in some embodiments. Radial contact pads are included in some embodiments, with or separate from the distributed hinge.

Abstract: A cooling system including a support structure and a cooling element is described. The cooling element has a thickness and includes an anchored region and a cantilevered arm. The anchored region is coupled to and supported by the support structure. The cantilevered arm extends outward from the anchored region. The cantilevered arm includes at least one cavity therein. The at least one cavity has a depth of at least one-third and not more than three-fourths of the thickness of the cooling element. The cooling element is configured to undergo vibrational motion when actuated to drive a fluid for cooling a heat-generating structure.

Abstract: A method of manufacturing a ceramic structure, a method of manufacturing a ceramic structure with multiple layers of ceramic material, and a method of manufacturing a piezoelectric ceramic structure. The method of manufacturing a ceramic structure includes the steps of: placing a sheet of ceramic material on a supporting platform, wherein the supporting platform is arranged to elevate the sheet of ceramic material from a base of the supporting platform by supporting only a first portion of the sheet of ceramic material; sintering the sheet of ceramic material; and during the step of sintering of the sheet of ceramic material, facilitating forming a curvature on the sheet of ceramic material at a second portion of the sheet of ceramic material which is not supported by the supporting platform.

Abstract: A transportation vehicle may be equipped with electrical energy harvesting systems to harvest electrical energy for use. By way of example, the transportation vehicle includes a Venturi system and a plurality of energy harvesting systems. The Venturi system is configured to receive and accelerate the speed of an incoming air flow and based on the incoming air flow, each of the energy harvesting systems is configured to receive the accelerated incoming air flow and to generate electrical energy from the accelerated incoming air flow. The generated electrical energy is stored into onboard batteries in the transportation vehicle.

Abstract: Various embodiments include an arrangement comprising a plurality of MEMS switches with movable elements. The plurality of MEMS switches are connected to one another in a total-cross-tied configuration.

Abstract: A vibrating device includes a diaphragm that includes first and second vibrating portions and a fixation portion, first and second piezoelectric vibrators that are provided at the first and second vibrating portions, respectively, and fixation electrodes. The fixation portion includes a first side portion and a second side portion that extend in different directions. The diaphragm and the fixation electrodes are provided integrally as a single monolithic member. The first vibrating portion extends from the first side portion and the fixation electrodes extend from the second side portion.

Abstract: A panel speaker includes: a panel; a vibration actuator that vibrates the panel, the vibration actuator having first and second oppositely-facing surfaces, the first surface facing the panel; a bracket that is located between the first surface of the vibration actuator and the panel; a spacer that is located adjacent to the second surface of the vibration actuator, the spacer occupying a first area that is encompassed by a second area occupied by the bracket when the panel speaker is viewed in a direction that is perpendicular to a plane of the second surface; and a screw that passes through the spacer, the vibration actuator, and the bracket to fasten the spacer, the vibration actuator, and the bracket to the panel. The vibration actuator, disposed between the bracket and the spacer, is fastened by the screw to the panel.

Abstract: An ultrasonic transducer device includes a bottom electrode layer of a transducer cavity disposed over a substrate. The bottom electrode layer includes a bottom layer of a first type metal; a top layer of the first type metal; a second type metal disposed between the bottom layer and the top layer; and at least one intermediate layer of the first type metal disposed between the bottom layer and the top layer, the at least one intermediate layer configured so as to define at least two discrete layers of the second type metal.

Abstract: A valve assembly for a fuel tank includes a cage having a seat that defines an aperture and a spring latch that holds a poppet in an intermediate-open position, which spaces the poppet from a seat to allow fluid communication through an aperture. A method of operating a valve assembly due to a first-time fueling event is disclosed.

Abstract: A linear fan including a fan blade attached a fan frame by a wire spring having a first end attached to the fan blade and a second end attached to the fan frame. The fan blade includes a free end such that the blade oscillates by pivoting on the wire spring. The the wire spring flexes to enable the fan blade to oscillate. The fan includes a motor for driving the oscillation of the fan blade. The motor includes an armature or permanent magnet connected to the fan blade and a stator assembly connected to the fan frame. The stator assembly includes a current carrying coil wrapped around a leg of a stator core. The motor is controlled to vary the direction of the current being carried in the coil to thereby change the direction of the magnetic field created by the stator assembly and cause the fan blade to oscillate.

Abstract: A vessel pressure regulating system with a multidirectional control valve device includes: a pressure source; the multidirectional control valve device, which includes a housing, an actuation unit, and a working element, the housing having an interior space, an input port, and an output port, the input port being in communication with the pressure source, the actuation unit having a stationary portion and a driving portion, and the working element being controlled by the driving portion in order to open or close the output port; a vessel in communication with the output port; and a control unit for controlling the operation of the pressure source and of the driving portion. The vessel pressure regulating system enables a safety airbag of a vehicle or a similar device in a chair, bed, or the like to function effectively.

Abstract: An energy harvesting tape comprising a plurality of flexible layers. The plurality of flexible layers includes a solar cell layer configured to capture solar energy, a thermoelectric layer configured to capture thermal energy, one or more piezoelectric layers configured to capture mechanical energy; and an electrode layer configured to capture radiofrequency energy and to transmit a radiofrequency signal. The energy harvesting tape also includes one or more processing units on at least one of the plurality of flexible layers. The one or more processing units are configured to use the captured energy from the plurality of flexible layers to transmit the radiofrequency signal. The energy harvesting tape has a length, a width, and a thickness, where the length is greater than the width, and the width is greater than the thickness.

Abstract: A suspension for a disk drive includes a plate member having a first surface, a second surface opposite to the first surface, a first penetration portion penetrating the first surface and the second surface, and a second penetration portion spaced from the first penetration portion and penetrating the first surface and the second surface, an actuator provided on the second surface and having an electrode located in the first penetration portion, and a flexure having an electrode connection portion connected to the electrode. The electrode connection portion includes a first region and a second region having a thickness smaller than a thickness of the first region, and the second region overlaps the second penetration portion.

Abstract: A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.

Abstract: Acoustic wave devices based on epitaxially grown heterostructures comprising appropriate combinations of epitaxially grown metallic transition metal nitride (TMN) layers, epitaxially grown Group III-nitride (III-N) piezoelectric semiconductor thin film layers, and epitaxially grown perovskite oxide (PO) layers. The devices can include bulk acoustic wave (BAW) devices, surface acoustic wave (SAW) devices, high overtone bulk acoustic resonator (HBAR) devices, and composite devices comprising HBAR devices integrated with high-electron-mobility transistors (HEMTs).

Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.

Abstract: A composition includes at least one Pb/Ni/Nb - Pb/Mg/W - Pb/Zr/Ti mixed oxide. A piezoelectric device may be made by providing at least two layers comprising the composition and coated with an outer electrode material; providing a plurality of layers comprising the composition and coated with an inner electrode material; combining or stacking a plurality of layers coated with inner electrode materials between two outer electrodes; and sintering or co-firing the inner electrode materials and outer electrode materials at a temperature at or below about 1000° C.

Abstract: A touchpad and an electronic device are disclosed. The touchpad includes a touch panel; a plurality of pressure sensors fixed to an elastic bracket and configured to detect a pressure applied on the touch panel; a piezoelectric ceramic assembly including a piezoelectric ceramic plate configured to provide a vibration feedback to a user, where the piezoelectric ceramic assembly is fixed below the touch panel in a suspended manner and spaced from the elastic bracket.

Abstract: An acoustic inspection device according to an embodiment has: an acoustic transducer including a piezoelectric element having at least one of functions of transmitting and receiving acoustic waves, and having an acoustic function surface functioning as at least one of a transmitting surface and a receiving surface of acoustic waves; a couplant, which is provided directly or with an intermediate member therebetween on the acoustic function surface of the acoustic transducer and contains at least an elastomer, having a contact surface to be in contact with an inspection target and an uneven structure provided on the contact surface; and a loading mechanism which applies and removes a load to/from the couplant.

Abstract: An energy producing device includes a piezoelectric layer having a first side and second side opposite of the first side, a first electrical contact arranged on the first side of the piezoelectric layer, a second electrical contact arranged on the second side of the piezoelectric layer, and a counter-layer arranged on the second electrical contact. The piezoelectric layer, first and second electrical contacts, and counter-layer form a beam having a neutral axis outside of the piezoelectric layer.

Abstract: Modular inflation systems and inflation segments including an inflation enclosure and a plurality of artificial muscle layers provided within the inflation enclosure in a stacked arrangement, each of the plurality of artificial muscle layers including one or more artificial muscles, wherein one or more plurality of artificial muscles of each of the plurality of artificial muscle layers are operable between an actuated state and a non-actuated state, and one or more fastening members for attaching the inflation segment to another inflation segment.

Abstract: This invention comprises a panel or system of panels. Each panel comprises a top layer, which is comprised of tempered glass that is highly transparent to allow for maximum light wave transmission. These solar light waves are captured by the photovoltaic cell which comprises the second layer of the panel where this solar energy is converted into usable electrical energy. Vibrations experienced by the photopiezoelectric panel due to foot and lightweight vehicle traffic are absorbed by the PZT sheet layer, which is the third layer of the panel where they are converted into usable electrical energy. The fourth and final layer of the panel consists of the connector plate which serves as the hub and interconnection for gathering the generated electrical energies and transmitting them into the modular grid network to be consumed by various load devices, such as streetlights and other power-dependent city infrastructure.

Abstract: A funnel-shaped underwater energy harvesting equipment includes a piezoelectric element configured to be installed at a seabed and to be moved by a fluid in order to convert vibration energy into electricity. The funnel-shaped underwater energy harvesting equipment further includes a fluid collector coupled to the piezoelectric element and configured to increase velocity of the fluid flowing toward the piezoelectric element. The harvesting equipment exhibits improved energy conversion efficiency, while simplifying the shape of the harvesting equipment.

Abstract: A micro-pneumatic control unit comprising a plurality of control channels for generating the control pressures in a pneumatically actuated multi-channel coating head for coating components with a coating agent, a control channel being characterized by a valve element comprising a valve bore in a valve plate and a diaphragm layer which is below the valve plate and is configured as a diaphragm closing element in the region of the valve bore, the shape of which diaphragm closing element defined by recesses positioned laterally with respect to the valve bore, by a micro-actuator having a plunger that actuates the diaphragm closing element through the valve bore such that the valve element opens, by a second micro-pneumatic element connected in series with the valve element, the control pressure developing and a cavity located at the connection node thereof, which cavity is connected to at least one pneumatically operated coating agent ejector, and by a pneumatic pressurization of the micro-pneumatic control unit,

Abstract: An acoustic transducer for generating electrical signals in response to acoustic signals, comprises a first diaphragm having a first corrugation formed therein. A second diaphragm has a second corrugation formed therein, and is spaced apart from the first diaphragm such that a cavity having a pressure lower than atmospheric pressure is formed therebetween. A back plate is disposed between the first diaphragm and the second diaphragm. One or more posts extend from at least one of the first diaphragm or the second diaphragm towards the other through the back plate. The one or more posts prevent each of the first diaphragm and the second diaphragm from contacting the back plate due to movement of the first diaphragm and/or the second diaphragm towards the back plate. Each of the first corrugation and the second corrugation protrude outwardly from the first diaphragm and the second diaphragm, respectively, away from the back plate.

Abstract: A layered actuation structure includes a first platform pair and a second platform pair. Each of the first platform pair and the second platform pair include an actuation platform and a mounting platform, forming an actuation cavity of each of the first platform pair and the second platform pair. One or more connecting ledges of each platform pair couple at least one of the actuation platform and the mounting platform of each platform pair to at least one of an actuation arm and a support arm, respectively. A collective stiffness of the one or more connecting ledges of the first platform pair is different than a collective stiffness of the one or more connecting ledges of the second platform pair. The layered actuation structure also includes one or more artificial muscles disposed in the actuation cavity of the first platform pair and the second platform pair.

Abstract: An energy harvester includes a frame having a base, a first side member affixed to the base, and a second side member affixed to the base and spaced apart from the first side member. A beam is coupled between the first side member of the frame and the second side member of the frame. The beam has a substrate layer with a first end affixed to the first side member of the frame, a second end affixed to the second side member of the frame, a first face, and a second face opposite to the first face. The substrate is elastically deformable in response to the vibratory force. The beam further includes a first piezoelectric layer joined to the first face of the substrate layer and having a terminal for electrical connection to a load, the first piezoelectric layer comprising at least one piezoelectric patch.

Abstract: A microphone device may include: a substrate wafer, a support member bonded to a front surface of the substrate wafer, a single-crystal piezoelectric film provided over the support member, a top electrode and a bottom electrode. The single-crystal piezoelectric film may have a first surface and an opposing second surface. The top electrode may be arranged adjacent to the first surface of the single-crystal piezoelectric film. The bottom electrode may be arranged adjacent to the second surface of the single-crystal piezoelectric film. The substrate wafer may have a through-hole formed therein. The through-hole of the substrate wafer may be at least substantially aligned with at least one of the top electrode and the bottom electrode.

Abstract: The present inventors have recognized that an electrical switch for opening doors in buildings, calling elevators, and the like can be improved to require less physical contact, larger activation area, and multiple activation methods, with increased reliability, by utilizing a piezoelectric sensor specifically arranged between rigid, parallel mounting plates in which one of the plates (an inner plate) is rigidly fixed to prevent movement while the other plate (an outer plate) is accessible for receiving physical contact. By rigidly fixing the inner plate, such as by mounting to a wall or bollard, the sensor can react with sensitivity upon an application of less pressure on the outer plate. Such pressure compresses the sensor between the plates to produce an electrical signal. A controller receiving the signal can, in turn, execute to open a door, call an elevator and/or activate a light or sound to provide feedback.

Abstract: A reusable piezoelectric sensor for damage identification includes a piezoelectric ceramic plate and a metal box bonded to the surface of a test piece, where a wire through hole is formed in the center of a top plate of the metal box, and a side wall of the metal box extends vertically upwards to form a striking face for being struck to remove the metal box from the test piece; the piezoelectric ceramic plate arranged in the metal box is closely and fixedly bonded to a bottom plate of the metal box; and wires of the piezoelectric ceramic plate penetrate through the wire through hole to be connected to an external impedance analyzer. The reusable piezoelectric sensor for damage identification is easy to manufacture and convenient to operate and can effectively eliminate the testing error caused by the difference of the piezoelectric ceramic plate.

Abstract: A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

Abstract: A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.

Abstract: A frame for an energy transducer device for generating electrical current, the frame being a single monolithic structure including a pressure receiver unit, a first arm and a second arm joined to respective lateral sides of the pressure receiver unit, a first attachment unit joined to the second end of the first arm, and a second attachment unit joined to the second end of the second arm. The frame is configured to be joined to a current generating unit, such that the first attachment unit is joined to a first edge of the current generating unit while the second attachment unit is joined to second edge of the current generating element. An external force applied at the pressure receiver unit of the frame causes the frame to deform and thereby change the mechanical strain of the current generating element.

Abstract: A sodium niobate-barium titanate-based coating liquid composition including: (a) a sol-gel raw material containing (i) a niobium component, such as a niobium alkoxide, (ii) a sodium component, such as a sodium alkoxide, (iii) a titanium component, such as a titanium alkoxide, and (iv) a barium component, such as a barium alkoxide; and (b) a compound including at least one kind selected from the group consisting of a ?-ketoester compound and a ?-diketone compound represented by the following formula (1): where R1 represents an alkyl group having 1 or more to 6 or less carbon atoms.

Abstract: A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.

Abstract: The invention comprises a piezo motor with a U-shaped housing lower part and a mounted cover. The piezo actuator is mounted between two clamping jaws. Planar guide tracks are formed in the housing lower part to both sides of the piezo actuator. Bearing elements of circular cross-section are arranged between the clamping jaws and the guide tracks. Thrust pieces are braced between the housing cover and the bearing elements, which thrust pieces press the bearing elements against the clamping jaws. Here, the thrust pieces together with the guide tracks of the housing lower part form V-shaped guides.

Abstract: An apparatus includes a first support member, a second support member and one or more electro-active polymer members between the first support member and the second support. The one or more electro-active polymer members include a first end configured to be coupled to the first support member, a second end configured to be coupled to the second support member and a middle portion located between the first end and the second end, where the middle portion includes a curved member in a first state of the one or more electro-active polymer members. A curved shape of the one or more electro-active polymer members is configured to create linear movement in a vertical direction, by bending in a curved direction.

Abstract: An apparatus includes a surface arranged to be mechanically displaced, a first magnet coupled with the surface, at least one supporting member for supporting the surface, a base comprising a second magnet, wherein the second magnet is arranged, at least partially, to face the first magnet, a coil coupled with the second magnet, and a signal port electrically coupled with the coil. An electrical signal is configured to travel between the signal port and the coil, and the electrical signal in the coil is proportional to mechanic displacement of the surface when a force equilibrium state of the surface is broken either by the electrical signal in the coil or the mechanic displacement of the surface from a position of the force equilibrium state.