Abstract: A method of making a transfer head for transferring micro elements, wherein the transfer head includes a cavity with a plurality of vacuum paths and a suite having arrayed suction nozzles and vacuum paths. The suction nozzles are connected to the vacuum path components respectively, and the vacuum path components are formed to connect to vacuum paths in the cavity respectively. The suction nozzles attract or release the micro element through vacuum pressure transmitted by vacuum. When the suite is mounted in the cavity, the upper surface of the suite is arranged with optical switching components for controlling the switch of the vacuum path components and vacuum paths of each path so that the suction nozzles can attract or release required micro element through vacuum pressure; and fabricating a suite with an array micro-hole structure, wherein the array micro-hole structure serves as the vacuum path components and the suction nozzles.

Abstract: An RF circuit device using modified lattice, lattice, and ladder circuit topologies. The devices can include four resonator devices and four shunt resonator devices. In the ladder topology, the resonator devices are connected in series from an input port to an output port while shunt resonator devices are coupled the nodes between the resonator devices. In the lattice topology, a top and a bottom serial configurations each includes a pair of resonator devices that are coupled to differential input and output ports. A pair of shunt resonators is cross-coupled between each pair of a top serial configuration resonator and a bottom serial configuration resonator. The modified lattice topology adds baluns or inductor devices between top and bottom nodes of the top and bottom serial configurations of the lattice configuration. These topologies may be applied using single crystal or polycrystalline bulk acoustic wave (BAW) resonators.

Abstract: A piezoelectric film includes a plurality of laminated main baking unit PZT layers. A first seed layer is present at a lower surface side of a lowermost main baking unit PZT layer. A second seed layer is interposed between two adjacent main baking unit PZT layers at an intermediate position between the lowermost main baking unit PZT layer and an uppermost main baking unit PZT layer.

Abstract: A process for manufacturing a diaphragm unit of a MEMS transducer that includes multiple piezoelectric transducer units, each of the multiple piezoelectric transducer units including at least one electrode layer and at least one piezoelectric layer formed on a carrier includes the step of removing the transducer units from the carrier. At least one of the transducer units that has been removed from the carrier is arranged on a diaphragm and connected to the diaphragm. Moreover, a diaphragm unit made according to the process includes a diaphragm and multiple piezoelectric transducer units arranged on and connected to the diaphragm. Each of the multiple piezoelectric transducer units includes at least one electrode layer and at least one piezoelectric layer formed on a carrier.

Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold.

Abstract: A propulsion system includes a cylindrical shaft member coupled to a motor with a motor frame; said shaft member mechanically coupled to a disc members with radius, to rotate in a dynamically and statically balanced state with said shaft when said motor rotates; the apparatus further comprising a power source to supply power to said motor to rotate said shaft member with said disc members; each said disc members comprising an annular radial array of material segments extending radially to the radius; said material segments comprising of a material that responds to electromagnetic fields to change shape radially on said disc member; such that when power is supplied to rotate the motor, the motor rotates the disc members and when each such material segment rotates to an angular location of the shaft member relative to a fixed point on the motor frame, each said material segment is supplied with said electromagnetic field; and said material responds to said electromagnetic field to change its shape radially to a

Abstract: A very small piezoelectric sensor capable of being mass produced includes a core, a piezoelectric layer on a surface of the core; and a conductive layer on a surface of the piezoelectric layer away from the core. The core is flexible and threadlike, the core is a first electrode of the piezoelectric sensor, and the conductive layer is a second electrode of the piezoelectric sensor. An array of such sensors allows the “skin” of a robot for example to simulate the sensitivity of hair-covered human skin. A method for making the piezoelectric sensor and an electronic device using the piezoelectric sensor are also disclosed.

Abstract: A method for manufacturing a MEMS structure is provided. The method includes providing a MEMS substrate having a first surface, forming a first buffer layer on the first surface of the MEMS substrate, and forming a first roughening layer on the first buffer layer. Also, a MEMS structure is provided. The MEMS structure includes a MEMS substrate, a first buffer layer, a first roughening layer, and a CMOS substrate. The MEMS substrate has a first surface and a pillar is on the first surface. The first buffer layer is on the first surface. The first roughening layer is on the first buffer layer. The CMOS substrate has a second surface and is bonded to the MEMS substrate via the pillar. Moreover, an air gap is between the first roughening layer and the second surface of the CMOS substrate.

Abstract: A method for forming a MEMS device is provided. The method includes forming a stack of piezoelectric films and metal films on a base layer, wherein the piezoelectric films and the metal films are arranged in an alternating manner. The method also includes forming a first trench in the stack of the piezoelectric films and the metal films. The method further includes forming at least one void at the side wall of the first trench. In addition, the method includes forming a spacer structure in the at least one void. The method further includes forming a contact in the first trench after the formation of the spacer structure.

Abstract: A piezoelectric driving device includes: a driving portion to be brought into frictional contact with an object to be driven, which is moved with respect to a fixed body; and at least two piezoelectric portions, which are formed integrally with the driving portion, are arranged on a predetermined plane with the driving portion being sandwiched between the at least two piezoelectric portions, and are configured to be bent with respect to the predetermined plane when voltages are applied to the at least two piezoelectric portions, wherein outer edges of entirety of the at least two piezoelectric portions are fixed to the fixed body.

Abstract: A displacement magnification device has a first link portion including a first rigid body and a first plate spring that couples the first rigid body to a supporting portion and a movable portion. A second link portion includes a second rigid body and a second plate spring that couples the second rigid body to the supporting portion and the movable portion. In this structure, the first rigid body and the second rigid body play roles to suppress the bending of the first plate spring and the second plate spring. In addition, a connection portion between the first plate spring and the supporting portion, a connection portion between the second plate spring and the supporting portion, a connection portion between the first plate spring and the movable portion, and a connection portion between the second plate spring and the movable portion play roles of elastic hinges.

Abstract: The vibration device includes a diaphragm, and a plurality of piezoelectric films that are arranged at predetermined intervals in a first direction of the diaphragm to face the diaphragm and extend parallel to a second direction orthogonal to the first direction. The diaphragm has at least one slit formed therein and dividing the diaphragm into respective regions. Each of the piezoelectric films are fixed to a respective region of the diaphragm while extending along the second direction in a tensioned state. The piezoelectric films expand and contract in a plane direction when a voltage is applied thereto.

Abstract: A force transducer for an electronic device can be operated in a drive mode and a sense mode simultaneously. In particular, the force transducer can provide haptic output while simultaneously receiving force input from a user. The force transducer is primarily defined by a monolithic piezoelectric body, a ground electrode, a drive electrode, and a sense electrode. The ground electrode and the drive electrode each include multiple electrically-electrically conductive sheets that extend into the monolithic body; the electrically conductive sheets of the ground electrode and the drive electrode are interdigitally engaged. The sense electrode of the force transducer is typically disposed on an exterior surface of the monolithic body.

Abstract: An actuator includes a laminate including an elastomer layer and an electrode, in which the laminate has a spiral or concentric shape, pre-distortion is applied to at least one member out of the elastomer layer and the electrode, and area distortion of the at least one member is 10% or larger.

Abstract: Provided is a piezoelectric laminate element that outputs a fixed output voltage even in response to a static load for which an output voltage could not be obtained using a conventional piezoelectric element. A piezoelectric laminate body in which a plurality of piezoelectric polymer film layers consisting of film such as polylactic acid film that exhibits piezoelectricity in the planar direction are laminated is used as a piezoelectric laminate element. The piezoelectric laminate body is given a cylindrical shape, rounded rectangle shape, or other partially curved shape. The output voltage follows the increase and decrease of the applied load, and if a fixed load is continuously applied, a fixed output voltage is continuously output, and a piezoelectric laminate element is obtained that outputs a fixed output voltage even if a load is static.

Abstract: A thin-film piezoelectric-material element includes a laminated structure part having a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film, a lower piezoelectric-material protective-film being formed with alloy material, and an upper piezoelectric-material protective-film being formed with alloy material. The piezoelectric-material film includes a size larger than the upper electrode film, a riser end-surface and step-surface formed on a top-surface of the upper electrode film side. The riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface. The step-surface intersects vertically with the riser end-surface. The lower piezoelectric-material protective-film, and the upper piezoelectric-material protective-film are formed with alloy material including Fe as main ingredient and having Co and Mo, by Ion beam deposition.

Abstract: A control method for a piezoelectric drive device includes a piezoelectric vibrator having a vibrating portion and a distal end portion coupled to the vibrating portion, in which the distal end portion makes elliptic motion by a stretching vibration and a flexural vibration of the vibrating portion, a driven member driven by the elliptic motion of the distal end portion, and a drive signal generation circuit outputting a stretching vibration drive signal that generates the stretching vibration and a flexural vibration drive signal that generates the flexural vibration in the piezoelectric vibrator, and the method includes, when the driven member is stopped, superimposing and outputting a modulation signal for amplitude modification on the stretching vibration drive signal by the drive signal generation circuit.

Abstract: A piezoelectric sensor comprising an insulator layer having opposing upper and lower surfaces, a first piezoelectric portion having a lower surface in contact with the upper surface of the insulator layer, a second piezoelectric portion having a lower surface in contact with the upper surface of the insulator layer and an insulator strip dividing the first and second piezoelectric portions, wherein the first portion and second piezoelectric portion are laterally positioned with respect to one another in the same generally planar layer.

Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

Abstract: A touch feedback and sensing device includes a circuit board, a piezoelectric ceramic actuator on the circuit board; and at least one strain sensor on the circuit board. The piezoelectric ceramic actuator includes a piezoelectric ceramic block, a cathode and an anode on the piezoelectric ceramic block. Different voltages are applied to the cathode and the anode to vibrate the piezoelectric ceramic block. The circuit board vibrates with vibration of the piezoelectric ceramic block. The at least one strain sensor is configured to detect and monitor vibration of the circuit board.

Abstract: A power generating element is provided that includes first and second plate-like structures, a pedestal that supports the first plate-like structure, and first and second piezoelectric elements that generate charges on the basis of the deflections of the two plate-like structures. A base end portion of the first plate-like structure is connected to the pedestal, and a direction from the base end portion toward the tip end portion of the first plate-like structure is a Y-axis positive direction. A base end portion of the second plate-like structure is connected to the tip end portion of the first plate-like structure via a connection body, and a direction from the base end portion toward the tip end portion of the second plate-like structure is a Y-axis negative direction.

Abstract: A piezoelectric printing device includes a piezoelectric plate and a substrate with at least one row of drop ejectors. Each drop ejector includes a pressure chamber on a first side of the substrate and a nozzle on a second side of the substrate. The piezoelectric plate is attached to the substrate by a bonding layer. A first electrode layer is disposed on a first surface of the piezoelectric plate that is proximate to the first side of the substrate. The first electrode layer includes signal lines and ground traces corresponding to each pressure chamber. A second electrode layer including signal input pads and ground return pads is disposed on the first side of the substrate. Signal lines and ground traces in the first electrode layer are electrically connected to signal input pads and ground return pad(s) respectively on the second electrode layer through solder joints.

Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.

Abstract: A method is provided for manufacturing a dielectric elastomer transducer including a dielectric elastomer layer and electrode layers sandwiching the elastomer layer. The elastomer layer when stretched exhibits a stress-strain curve having: a low strain and high elasticity region; a low elasticity region; and a high strain region. The method includes: a pre-stretching process to reduce hysteresis in elastic behavior of the elastomer layer by stretching the elastomer layer one or more times under a load as heavy as a first load before the electrodes are provided, each stretching causing the elastomer layer to undergo a tension falling in the low elasticity region; and a dielectric elastomer layer fixing process including applying a second load smaller than the first load to the elastomer layer so as to fix the elastomer layer to a support member under a second tension smaller than the first tension.

Abstract: A brace for a part of a body includes a first conductive fiber associated with a first polarity, and a second conductive fiber associated with a second polarity different from the first polarity. The second fiber is woven together with the first fiber and insulated from the first fiber. The brace also includes a selectively electrically activated cross-linking agent between the first and second fibers. The agent is constructed to cross-link in a first active mode when the first and second fibers are electrified and is constructed to not cross-link in a second inactive mode when the first and second fibers are not electrified. The brace surrounds a body part, such as a knee or neck. The agent can include an ER fluid and/or EAP. A brace system includes a selectively electrically activated brace for the part of the body.

Abstract: Servomotor (1) comprising: —a base body (10), —an actuator body (20) which is arranged on the base body (10)—a drive arrangement (40) which is coupled to a drive section of the actuator body (20) and, when the drive arrangement (40) is activated, brings about a movement of the drive section of the actuator body (20) in one of two opposing circumferential directions on the basis of this coupling, —a rotational guide (50) with which the actuator body (20) is rotatably guided on the base body (10) and by which the movement of the drive section of the actuator body (20) is converted into a rotational movement of the actuator body (20), —a resetting arrangement (80) which couples the actuator body (20) and the base body (10) to one another and applies a resetting force between them, which resetting force opposes the actuating movement of the actuator body (20), —a magnet-compensation device (90) which reduces or cancels out the resetting force applied by the resetting device (80).

Abstract: A vacuum circuit breaker comprises a vacuum interrupter operable between a closed state and an open state, and an actuator. The actuator comprises a piezoelectric driving element that is expandable and contractable along an expansion axis in response to an electrical input signal. The actuator further comprises a mechanical amplifying structure extendable along an actuation axis and being mechanically coupled to the piezoelectric driver such that expansion or contraction of said piezoelectric driving element causes the amplifying structure to extend or retract along the actuation axis. The mechanical amplifying structure is coupled to the vacuum interrupter for operating the vacuum interrupter between said closed and open states.

Abstract: The present invention relates to a component (1) for generating active haptic feedback, comprising a main body (2) having first and second internal electrodes (3, 4) stacked one above another in a stacking direction (S), wherein a respective piezoelectric layer (9) is arranged between the internal electrodes (3, 4), wherein the component (1) is configured to identify a force exerted on the component (1), wherein the component (1) is configured to generate active haptic feedback if a force exerted on the component (1) is identified, and wherein the haptic feedback is generated by virtue of an electrical voltage being applied between the first and second internal electrodes (3, 4), said electrical voltage resulting in a change in length of the main body (2).

Abstract: Described herein is a method of bonding a piezoelectric substrate to a support substrate to form a composite substrate. The piezoelectric substrate has one surface which is positively polarized, and a second surface which is negatively polarized. The method described herein includes the steps of bonding the positively polarized surface of the piezoelectric substrate to one surface of the support substrate by a direct bonding method.

Abstract: A piezoelectric motor comprises a frame having a first frame side and a second frame side; a first actuator assembly and a second actuator assembly. The first actuator assembly comprises a first piezoelectric actuator and two rollers, each of the rollers is pressed between the first piezoelectric actuator and the first frame side. The second actuator assembly comprises a second piezoelectric actuator and two rollers, each of the rollers is pressed between the second piezoelectric actuator and the second frame side. The motor further comprises at least one pre-loaded spring provided between the first actuator assembly and the second actuator assembly, pushing the first actuator assembly and the second actuator assembly against the first frame side and the second frame side, respectively.

Abstract: An adjusting mechanism for adjusting a deformation of a panel and an electron beam detection apparatus comprising the same are disclosed, the adjusting mechanism including: a support plate, which is provided opposite to the panel, with a periphery of the support plate being in positive fit with a periphery of the panel; and at least one screw set, each screw set comprising: at least one first screw, each first screw penetrating through the support plate, and in turn being connected to the panel by being screwed into the panel; and at least one second screw, each second screw being screwed to penetrate through the support plate and to abut against the panel; the support has its structural rigidity larger than a structural rigidity of the panel.

Abstract: Systems and techniques are provided for a piezoelectric transducer. A base plate includes a first electrical contact and a second electrical contact. A transduction element is mounted directly on the base plate and electrically connected to the first electrical contact. A spacer includes a via. The via includes electrically conductive material. The spacer is mounted on the base plate around the transduction element and the electrically conductive material of the via is electrically connected to the second electrical contact. A diaphragm is mounted on the spacer and on the transduction element.

Abstract: A magnetostrictive alternator configured to convert pressure waves into electrical energy is provided. It should be appreciated that the magnetostrictive alternator may be combined in some embodiments with a Stirling engine to produce electrical power. The Stirling engine creates the oscillating pressure wave and the magnetostrictive alternator converts the pressure wave into electricity. In some embodiments, the magnetostrictive alternator may include aerogel material and magnetostrictive material. The aerogel material may be configured to convert a higher amplitude pressure wave into a lower amplitude pressure wave. The magnetostrictive material may be configured to generate an oscillating magnetic field when the magnetostrictive material is compressed by the lower amplitude pressure wave.

Abstract: The present disclosure provides a touch control substrate, a touch screen, an electronic device, and a touch control method. The touch control substrate comprises a base substrate, and a plurality of touch control units on the base substrate in an array; each touch control unit comprises a touch control electrode and a sensing structure electrically connected to the touch control electrode; and in response to being touched, the touch control electrode transmits voltage to the sensing structure, to cause tactility change of the sensing structure.

Abstract: Disclosed herein are structures, devices, methods and systems for providing haptic output on an electronic device. In some embodiments, the electronic device includes a display portion, a housing pivotally coupled with the display portion and comprising a glass sheet that defines an input surface of the electronic device. The input surface can define a keyboard having a set of key regions arranged along the glass sheet. The electronic device may also include a haptic mechanism positioned beneath a key region of the set of key regions that includes a substrate defining a beam structure having first and second fixed ends, a spacer positioned along a first side of the beam structure and a piezoelectric element positioned along a second side of the beam structure. The piezoelectric element can be configured to deflect the beam structure to provide haptic output along the input surface.

Abstract: A rotating piezoelectric motor including a piezoelectric actuator including a resonator having a pair of arms connected at one of their ends in a connection area, the other two ends being free, a passive element including a cylindrical part extending substantially orthogonally to the resonator and passing between the free ends of the arms, the cylindrical part being rotatable by friction of the free ends, the passive element including: a lower and upper truncated cones, the small bases of the cones being arranged facing each other and on either side of the resonator, the cylindrical part of the passive element at least partly axially traversing the cones, the upper truncated cone being movable along the cylindrical part, and at least one of the cones being integral in rotation with the cylindrical part, a device for holding the lateral surfaces of the cones in contact with each of the free ends of the arms of the resonator.

Abstract: The invention provides a fingerprint sensor including a sensing array. The sensing array includes a plurality of sensing units to form a plurality of sensing regions arranged in an array. Each of the plurality of sensing regions includes at least one column of sensing units. A first part of the plurality of sensing regions receives a power signal to perform fingerprint sensing. A second part of the plurality of sensing regions does not receive a power signal. Therefore, the fingerprint sensor of the invention can provide a fast and energy-saving large-area fingerprint sensing effect.

Abstract: The invention relates to a roll stand (2) for rolling, in particular cold-rolling, metal products, comprising at least one actuator (16) which can be actuated for actively damping vibrations in the roll stand (2), and at least one supporting roll (10) which is non-adjustable or can be adjusted exclusively via a readjusting device for pass line adjustment (13) of the roll stand (2) for supporting a working roll (5) and/or intermediate roll of the roll stand (2), wherein the supporting roll (10) is guided at the ends via a respective bearing unit (11) on a rack (8) of the roll stand (2). In order to enable an optimal active damping of vibrations in a roll stand (2) of this type with low engineering effort, the invention proposes that the supporting roll (10) is supported on the actuator (16) via at least one bearing unit (11) and that the actuator (16) is supported on a section (17) of the rack (8) either directly or indirectly via at least one component (14) of the readjustment device (13).

Abstract: According to some embodiments of the present invention, a fine focus microscope includes an objective lens for collecting light from an object being imaged, and a tube lens for forming a first image from light received from the objective lens. The fine focus microscope further includes a fine focus lens for forming a second image from the first image, and an eyepiece for forming a third image from the second image, wherein the third image is viewable by a user. The fine focus microscope further includes a field lens for directing light from the second image to the eyepiece, and a positioning system mechanically coupled to the fine focus lens, the eyepiece, and the field lens. The positioning system changes a position of the fine focus lens, the eyepiece, and the field lens with respect to the objective lens to provide a change in focus of the object being imaged.

Abstract: Provided are resonators, a resonator system including the resonators, and a method of manufacturing the resonators. The resonator includes a vibration beam configured to vibrate in response to an external signal, a sensing unit configured to detect the movement of the vibration beam, and a lumped mass unit including a base unit that contacts the vibration beam and a wing unit arranged separately from the vibration beam on the base unit.

Abstract: The present invention provides a sound device, which includes a bottom plate, a support fixed to the bottom plate, a frame arranged on the support, and a diaphragm fixed to the frame. The sound device further includes a first piezoelectric ceramic sheet and a second piezoelectric ceramic sheet that are disposed separately on the support, and the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet are respectively provided with a transmission member abutting against the diaphragm. The sound device in the present disclosure can increase a driving force, increase a vibration amplitude, enhance a product sensitivity, broaden a response range, increase a driving fulcrum, improve a vibration balance, and avoid a product distortion.

Abstract: A piezoelectric stepper drive includes a piezoelectric drive apparatus with at least two drive sections, each acted upon by at least two piezoelectric actuators, and a driven member which is advanced by at least one of the drive sections when control voltages are applied to the actuators. The drive apparatus is configured approximately in the shape of a triangle, at the tip of which the drive sections are arranged. At least one of the drive sections is biased against the driven member, in the absence of control voltages applied to the actuators, such that the drive section blocks advance of the driven member, where each of the drive sections is mounted individually resilient relative to a base of the triangle.

Abstract: The present disclosure provides an ultrasonic transducer and a method for manufacturing an ultrasonic transducer, a display substrate and a method for manufacturing a display substrate. The method for manufacturing the ultrasonic transducer includes: forming a via hole in a substrate; forming a structural layer on a side of the substrate, the structural layer cover the via hole; and etching the structural layer from a side of the substrate away from the structural layer by using the substrate formed with the via hole as a blocking layer, to form a cavity at a position of the structural layer corresponding to that of the via hole.

Abstract: An impactor, system and method for performing real-time measurements of particles in aerosol gases. The impactor comprises a plurality of cascading stages having impaction plates, mass-measurement mechanisms retained on the impaction plates, and a nozzle plate. A signal line associated with each of the plurality of cascading stages is configured to relay signals from the mass-measurement mechanism of the associated stage to a computer-based system configured to receive the transmitted signals from the signal lines, and to correlate changes in the resonant frequencies to particle concentrations in real time.

Abstract: A piezoelectric element includes a piezoelectric material layer and an electrode layer, wherein the piezoelectric material layer and the electrode layer are stacked on top of each other, the piezoelectric material layer includes a barium titanate-based material, and two coercive fields Ec1 and Ec2 of the piezoelectric element have the same sign and satisfy (|Ec2|?|Ec1|)?8 kV/cm.

Abstract: A method for exciting sound-wave producing transducers (7) which have operating frequencies defining a transducer frequency range, in which a generator (9) produces an electrical excitation signal for the transducers (7), these electrical excitation signal being fed to the transducers (7), wherein the generator (9) carries out frequency sweeps in a frequency sweep range between a minimum frequency (fmin) and a maximum frequency (fmax) with an adjustable sweep rate, with a target frequency (fZiel) being defined within said frequency sweep range, this method being characterized in that the minimum frequency (fmin), the maximum frequency (fmax) and the target frequency (fZiel) are selected in such a way that a first frequency difference (?f1) between the minimum frequency (fmin) and the target frequency (fZiel) differs in terms of magnitude from a second frequency difference (?f2) between the maximum frequency (fmax) and the target frequency (fZiel) within a number of frequency sweeps, and wherein the minimum fr

Abstract: A microfluidic device for generating microbubbles includes a substrate and a microfluidic channel embedded in the substrate. The microfluidic channel includes a plurality of fluid inlets, at least one bubble formation outlet having a nozzle with an adjustable diameter, and a flow focusing junction in fluid communication with the plurality of fluid inlets and the bubble formation outlet. A method for mass producing monodisperse microbubbles with a microfluidic device includes supplying a flow of dispersed phase fluid into a first fluid inlet of a microfluidic channel, supplying a flow of continuous phase fluid into a second fluid inlet of the microfluidic channel, and adjusting a diameter of a nozzle to obtain a plurality of monodisperse microbubbles having a specified diameter.

Abstract: A MEMS structure that includes: a substrate having an opening; a diaphragm arranged opposite the opening in the substrate; a plurality of anchors securing the diaphragm to the substrate or to another component; and a fixed membrane surrounding the diaphragm over a slit. The outline of the diaphragm protrudes toward the anchors and includes a predetermined intersecting structure that when viewed from the normal to the diaphragm, the diaphragm protrudes toward the anchors in at least one location on the diaphragm between two intersection points of the outline of the diaphragm and the outline of the opening in the substrate. The intersecting structure is configured such that the distance between the two intersection points is greater than the width of the diaphragm at a location closest to an anchor.

Abstract: Artificial muscles comprising a body of dielectric elastomer, wherein the body contains a pair of microfluidic networks are presented. Each microfluidic network includes a plurality of channels fluidically coupled via a manifold. The channels of the microfluidic networks are interdigitated and filled with conductive fluid such that each set of adjacent channels functions as the electrodes of an electroactive polymer (EAP) actuator. By using the manifolds as compliant wiring to energize the electrodes, artificial muscles in accordance with the present disclosure mitigate some or all of the reliability problems associated with prior-art artificial muscles.

Abstract: A flexible touch panel includes a flexible substrate bent in a first direction, and a touch sensor unit disposed on the flexible substrate, the touch sensor unit including a bridge extending in a second direction intersecting the first direction.