Abstract: The present invention relates to a method for determining at least one physical characteristic value of an electromechanical oscillatory system, which comprises a piezoelectric element and at least one additional element coupled, with respect to oscillation, to the piezoelectric element, the piezoelectric element having an electrode and a counter electrode.

Abstract: Ultra-low power methods and sensor devices are provided for determining the presence and magnitude of electromagnetic radiation or other signals. The sensor devices and methods provide both qualitative and quantitative analyses and can be deployed in remote locations for continuous monitoring over years without requiring a replacement power supply.

Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.

Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.

Abstract: An input device includes: a housing; a tip electrode protruding outside of the housing and configured to transmit a downlink signal to the outside; a reception electrode inside the housing and configured to receive an uplink signal from the outside; and a communication circuit electrically connected to the tip electrode and the reception electrode and configured to receive the uplink signal from the reception electrode or to transmit the downlink signal to the tip electrode, wherein a surface of the reception electrode has a concave-convex structure.

Abstract: The invention relates to a brake device having a frame, at least one pair of mutually opposing braking elements, at least one actuation element in operative connection with each braking element, and a spring device, wherein each braking element has three joint sections which are arranged in a row and are connected to one another via flexure bearings, and the middle joint section of which has a contact section, and the two joint sections adjoining the middle joint section are each connected integrally to the frame via a flexure bearing, wherein a force is exerted on each braking element by means of the spring device, by means of which force the respective contact section can be pressed with a defined force against an element to be braked, and a force which counteracts the force exerted on the braking elements by the spring device acts on the braking elements by means of a continuous energy input into the actuation elements and, when the energy input into the actuation elements is absent, the force exerted by t

Abstract: A blowing apparatus includes a housing including an accommodating space and one or more blowing holes and a vibration apparatus in the accommodating space, wherein the vibration apparatus includes a first active vibration member, a second active vibration member connected to an inner lateral surface of the housing and connected to intersect with the first active vibration member, and a passive vibration member between the one or more blowing holes and the first active vibration member and connected to the first active vibration member.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a dielectric structure sandwiched between a first electrode and a bottom electrode. A passivation layer overlies the second electrode and the dielectric structure. The passivation layer comprises a horizontal surface vertically below a top surface of the passivation layer. The horizontal surface is disposed above a top surface of the dielectric structure.

Abstract: Even with the occurrence of misalignment of inner electrodes in a ceramic collective board, a multilayer electronic component is made in which inner electrodes are disposed at suitable positions. Disclosed herein are descriptions of a first-stage ceramic collective board and a second-stage ceramic collective board used for manufacturing a multilayer electronic component. The present disclosure further describes a manufacturing method for the second-stage ceramic collective board and a manufacturing method for a multilayer electronic component.

Abstract: A vibration structure that includes a piezoelectric film constructed to deform in a plane direction as a voltage is applied thereto, a frame-shaped member, a vibration portion surrounded by the frame-shaped member in a plan view of the vibration structure, a support portion connecting the vibration portion and the frame-shaped member, and supporting the vibration portion within the frame-shaped member such that the vibration portion vibrates in the plane direction when the piezoelectric film is deformed in the plane direction, a first connection member that connects the piezoelectric film to the vibration portion, and a second connection member that connects the piezoelectric film to the frame-shaped member. Of the connection members, the first connection member is disposed between the center of gravity of the vibration portion and the second connection member.

Abstract: A linear transducer is connected to a first flexible member that has a first elongated shape with a first minor axis and a first major axis perpendicular to each other. This connects the linear transducer to opposite portions of the first flexible member along the first major axis. A second flexible member having an elongated shape with a second minor axis and a second major axis is provided. The second flexible member is connected to the first flexible member such that portions on the second major axis are joined to move with portions of the first flexible member on the first minor axis. Operation of the linear transducer multiplies displacements of the second flexible member relative to those of the transducer.

Abstract: A piezoelectric actuator includes a square suspension plate, an outer frame, a plurality of brackets and a square piezoelectric ceramic plate. The outer frame is arranged around the suspension plate. A second surface of the outer frame and a second surface of the suspension plate are coplanar with each other. Each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate. Each bracket has a length in a range between 1.22 mm and 1.45 mm and a width in a range between 0.2 mm and 0.6 mm. A length of the piezoelectric ceramic plate is not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate.

Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed portion, a movable portion, and a driving assembly. The fixed portion includes a main axis. The movable portion is movably disposed on the fixed portion. The movable portion is connected to an optical element. The driving assembly is used for driving the movable portion to move relative to the fixed portion.

Abstract: Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.

Abstract: The invention discloses a differential compliant displacement reducer, and relates to three technical solutions with similar working principles. The three technical solutions have the following characteristics: firstly, the three technical solutions all relate to an outer frame and all belong to a differential compliant displacement reducer circumferentially formed by extending upward and downward along both ends of the driver, and the working principle is similar; secondly, the differential motion of the three technical solutions comes from the difference caused by deformation of the upper and lower or inclined upper and lower deformable parts of the driver in the differential compliant displacement reducer; thirdly, compared with a traditional displacement amplifier, the three technical solutions all belong to the displacement reducer, the structure is simpler than that of the existing displacement amplifier; and fourthly, the three technical solutions can be matched with a macro-motion platform.

Abstract: A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top surface of the substrate, and a lid body which is provided to close the top opening of the support body, and deforms the tube with the bottom surface of the substrate by pressing the substrate through the support body.

Abstract: The present disclosure relates to an electrostatic chuck. The electrostatic chuck according to the present disclosure may include a base substrate; an electrostatic chuck plate fixed on the base substrate, the electrostatic chuck plate having an electrode therein; and an electrode part disposed in a hole in the base substrate to supply power to the electrode, wherein the electrode part may include a housing inserted into the hole in the base substrate, an electrode rod passing through the inner wall of the housing such that one end thereof is in contact with the electrode; and an elastic support body configured to support the electrode rod at multiple points on the inner wall of the housing.

Abstract: A piezoelectric drive device includes a piezoelectric element, a vibrating plate with a concave portion provided in a side surface, and a projecting portion provided between two side surfaces of the concave portion and having a spherical shape, an elliptical shape, or an egg shape, wherein a plurality of the piezoelectric elements and a plurality of the vibrating plates are stacked, and the concave portion includes a bottom surface.

Abstract: A method of making a transfer head for transferring micro elements, wherein the transfer head includes a cavity with a plurality of vacuum paths and a suite having arrayed suction nozzles and vacuum paths. The suction nozzles are connected to the vacuum path components respectively, and the vacuum path components are formed to connect to vacuum paths in the cavity respectively. The suction nozzles attract or release the micro element through vacuum pressure transmitted by vacuum. When the suite is mounted in the cavity, the upper surface of the suite is arranged with optical switching components for controlling the switch of the vacuum path components and vacuum paths of each path so that the suction nozzles can attract or release required micro element through vacuum pressure; and fabricating a suite with an array micro-hole structure, wherein the array micro-hole structure serves as the vacuum path components and the suction nozzles.

Abstract: An RF circuit device using modified lattice, lattice, and ladder circuit topologies. The devices can include four resonator devices and four shunt resonator devices. In the ladder topology, the resonator devices are connected in series from an input port to an output port while shunt resonator devices are coupled the nodes between the resonator devices. In the lattice topology, a top and a bottom serial configurations each includes a pair of resonator devices that are coupled to differential input and output ports. A pair of shunt resonators is cross-coupled between each pair of a top serial configuration resonator and a bottom serial configuration resonator. The modified lattice topology adds baluns or inductor devices between top and bottom nodes of the top and bottom serial configurations of the lattice configuration. These topologies may be applied using single crystal or polycrystalline bulk acoustic wave (BAW) resonators.

Abstract: A piezoelectric film includes a plurality of laminated main baking unit PZT layers. A first seed layer is present at a lower surface side of a lowermost main baking unit PZT layer. A second seed layer is interposed between two adjacent main baking unit PZT layers at an intermediate position between the lowermost main baking unit PZT layer and an uppermost main baking unit PZT layer.

Abstract: A process for manufacturing a diaphragm unit of a MEMS transducer that includes multiple piezoelectric transducer units, each of the multiple piezoelectric transducer units including at least one electrode layer and at least one piezoelectric layer formed on a carrier includes the step of removing the transducer units from the carrier. At least one of the transducer units that has been removed from the carrier is arranged on a diaphragm and connected to the diaphragm. Moreover, a diaphragm unit made according to the process includes a diaphragm and multiple piezoelectric transducer units arranged on and connected to the diaphragm. Each of the multiple piezoelectric transducer units includes at least one electrode layer and at least one piezoelectric layer formed on a carrier.

Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold.

Abstract: A propulsion system includes a cylindrical shaft member coupled to a motor with a motor frame; said shaft member mechanically coupled to a disc members with radius, to rotate in a dynamically and statically balanced state with said shaft when said motor rotates; the apparatus further comprising a power source to supply power to said motor to rotate said shaft member with said disc members; each said disc members comprising an annular radial array of material segments extending radially to the radius; said material segments comprising of a material that responds to electromagnetic fields to change shape radially on said disc member; such that when power is supplied to rotate the motor, the motor rotates the disc members and when each such material segment rotates to an angular location of the shaft member relative to a fixed point on the motor frame, each said material segment is supplied with said electromagnetic field; and said material responds to said electromagnetic field to change its shape radially to a

Abstract: A very small piezoelectric sensor capable of being mass produced includes a core, a piezoelectric layer on a surface of the core; and a conductive layer on a surface of the piezoelectric layer away from the core. The core is flexible and threadlike, the core is a first electrode of the piezoelectric sensor, and the conductive layer is a second electrode of the piezoelectric sensor. An array of such sensors allows the “skin” of a robot for example to simulate the sensitivity of hair-covered human skin. A method for making the piezoelectric sensor and an electronic device using the piezoelectric sensor are also disclosed.

Abstract: A method for manufacturing a MEMS structure is provided. The method includes providing a MEMS substrate having a first surface, forming a first buffer layer on the first surface of the MEMS substrate, and forming a first roughening layer on the first buffer layer. Also, a MEMS structure is provided. The MEMS structure includes a MEMS substrate, a first buffer layer, a first roughening layer, and a CMOS substrate. The MEMS substrate has a first surface and a pillar is on the first surface. The first buffer layer is on the first surface. The first roughening layer is on the first buffer layer. The CMOS substrate has a second surface and is bonded to the MEMS substrate via the pillar. Moreover, an air gap is between the first roughening layer and the second surface of the CMOS substrate.

Abstract: A piezoelectric driving device includes: a driving portion to be brought into frictional contact with an object to be driven, which is moved with respect to a fixed body; and at least two piezoelectric portions, which are formed integrally with the driving portion, are arranged on a predetermined plane with the driving portion being sandwiched between the at least two piezoelectric portions, and are configured to be bent with respect to the predetermined plane when voltages are applied to the at least two piezoelectric portions, wherein outer edges of entirety of the at least two piezoelectric portions are fixed to the fixed body.

Abstract: A method for forming a MEMS device is provided. The method includes forming a stack of piezoelectric films and metal films on a base layer, wherein the piezoelectric films and the metal films are arranged in an alternating manner. The method also includes forming a first trench in the stack of the piezoelectric films and the metal films. The method further includes forming at least one void at the side wall of the first trench. In addition, the method includes forming a spacer structure in the at least one void. The method further includes forming a contact in the first trench after the formation of the spacer structure.

Abstract: A displacement magnification device has a first link portion including a first rigid body and a first plate spring that couples the first rigid body to a supporting portion and a movable portion. A second link portion includes a second rigid body and a second plate spring that couples the second rigid body to the supporting portion and the movable portion. In this structure, the first rigid body and the second rigid body play roles to suppress the bending of the first plate spring and the second plate spring. In addition, a connection portion between the first plate spring and the supporting portion, a connection portion between the second plate spring and the supporting portion, a connection portion between the first plate spring and the movable portion, and a connection portion between the second plate spring and the movable portion play roles of elastic hinges.

Abstract: The vibration device includes a diaphragm, and a plurality of piezoelectric films that are arranged at predetermined intervals in a first direction of the diaphragm to face the diaphragm and extend parallel to a second direction orthogonal to the first direction. The diaphragm has at least one slit formed therein and dividing the diaphragm into respective regions. Each of the piezoelectric films are fixed to a respective region of the diaphragm while extending along the second direction in a tensioned state. The piezoelectric films expand and contract in a plane direction when a voltage is applied thereto.

Abstract: A force transducer for an electronic device can be operated in a drive mode and a sense mode simultaneously. In particular, the force transducer can provide haptic output while simultaneously receiving force input from a user. The force transducer is primarily defined by a monolithic piezoelectric body, a ground electrode, a drive electrode, and a sense electrode. The ground electrode and the drive electrode each include multiple electrically-electrically conductive sheets that extend into the monolithic body; the electrically conductive sheets of the ground electrode and the drive electrode are interdigitally engaged. The sense electrode of the force transducer is typically disposed on an exterior surface of the monolithic body.

Abstract: An actuator includes a laminate including an elastomer layer and an electrode, in which the laminate has a spiral or concentric shape, pre-distortion is applied to at least one member out of the elastomer layer and the electrode, and area distortion of the at least one member is 10% or larger.

Abstract: Provided is a piezoelectric laminate element that outputs a fixed output voltage even in response to a static load for which an output voltage could not be obtained using a conventional piezoelectric element. A piezoelectric laminate body in which a plurality of piezoelectric polymer film layers consisting of film such as polylactic acid film that exhibits piezoelectricity in the planar direction are laminated is used as a piezoelectric laminate element. The piezoelectric laminate body is given a cylindrical shape, rounded rectangle shape, or other partially curved shape. The output voltage follows the increase and decrease of the applied load, and if a fixed load is continuously applied, a fixed output voltage is continuously output, and a piezoelectric laminate element is obtained that outputs a fixed output voltage even if a load is static.

Abstract: A thin-film piezoelectric-material element includes a laminated structure part having a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film, a lower piezoelectric-material protective-film being formed with alloy material, and an upper piezoelectric-material protective-film being formed with alloy material. The piezoelectric-material film includes a size larger than the upper electrode film, a riser end-surface and step-surface formed on a top-surface of the upper electrode film side. The riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface. The step-surface intersects vertically with the riser end-surface. The lower piezoelectric-material protective-film, and the upper piezoelectric-material protective-film are formed with alloy material including Fe as main ingredient and having Co and Mo, by Ion beam deposition.

Abstract: A control method for a piezoelectric drive device includes a piezoelectric vibrator having a vibrating portion and a distal end portion coupled to the vibrating portion, in which the distal end portion makes elliptic motion by a stretching vibration and a flexural vibration of the vibrating portion, a driven member driven by the elliptic motion of the distal end portion, and a drive signal generation circuit outputting a stretching vibration drive signal that generates the stretching vibration and a flexural vibration drive signal that generates the flexural vibration in the piezoelectric vibrator, and the method includes, when the driven member is stopped, superimposing and outputting a modulation signal for amplitude modification on the stretching vibration drive signal by the drive signal generation circuit.

Abstract: A piezoelectric sensor comprising an insulator layer having opposing upper and lower surfaces, a first piezoelectric portion having a lower surface in contact with the upper surface of the insulator layer, a second piezoelectric portion having a lower surface in contact with the upper surface of the insulator layer and an insulator strip dividing the first and second piezoelectric portions, wherein the first portion and second piezoelectric portion are laterally positioned with respect to one another in the same generally planar layer.

Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

Abstract: A touch feedback and sensing device includes a circuit board, a piezoelectric ceramic actuator on the circuit board; and at least one strain sensor on the circuit board. The piezoelectric ceramic actuator includes a piezoelectric ceramic block, a cathode and an anode on the piezoelectric ceramic block. Different voltages are applied to the cathode and the anode to vibrate the piezoelectric ceramic block. The circuit board vibrates with vibration of the piezoelectric ceramic block. The at least one strain sensor is configured to detect and monitor vibration of the circuit board.

Abstract: A power generating element is provided that includes first and second plate-like structures, a pedestal that supports the first plate-like structure, and first and second piezoelectric elements that generate charges on the basis of the deflections of the two plate-like structures. A base end portion of the first plate-like structure is connected to the pedestal, and a direction from the base end portion toward the tip end portion of the first plate-like structure is a Y-axis positive direction. A base end portion of the second plate-like structure is connected to the tip end portion of the first plate-like structure via a connection body, and a direction from the base end portion toward the tip end portion of the second plate-like structure is a Y-axis negative direction.

Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.

Abstract: A piezoelectric printing device includes a piezoelectric plate and a substrate with at least one row of drop ejectors. Each drop ejector includes a pressure chamber on a first side of the substrate and a nozzle on a second side of the substrate. The piezoelectric plate is attached to the substrate by a bonding layer. A first electrode layer is disposed on a first surface of the piezoelectric plate that is proximate to the first side of the substrate. The first electrode layer includes signal lines and ground traces corresponding to each pressure chamber. A second electrode layer including signal input pads and ground return pads is disposed on the first side of the substrate. Signal lines and ground traces in the first electrode layer are electrically connected to signal input pads and ground return pad(s) respectively on the second electrode layer through solder joints.

Abstract: A method is provided for manufacturing a dielectric elastomer transducer including a dielectric elastomer layer and electrode layers sandwiching the elastomer layer. The elastomer layer when stretched exhibits a stress-strain curve having: a low strain and high elasticity region; a low elasticity region; and a high strain region. The method includes: a pre-stretching process to reduce hysteresis in elastic behavior of the elastomer layer by stretching the elastomer layer one or more times under a load as heavy as a first load before the electrodes are provided, each stretching causing the elastomer layer to undergo a tension falling in the low elasticity region; and a dielectric elastomer layer fixing process including applying a second load smaller than the first load to the elastomer layer so as to fix the elastomer layer to a support member under a second tension smaller than the first tension.

Abstract: A brace for a part of a body includes a first conductive fiber associated with a first polarity, and a second conductive fiber associated with a second polarity different from the first polarity. The second fiber is woven together with the first fiber and insulated from the first fiber. The brace also includes a selectively electrically activated cross-linking agent between the first and second fibers. The agent is constructed to cross-link in a first active mode when the first and second fibers are electrified and is constructed to not cross-link in a second inactive mode when the first and second fibers are not electrified. The brace surrounds a body part, such as a knee or neck. The agent can include an ER fluid and/or EAP. A brace system includes a selectively electrically activated brace for the part of the body.

Abstract: Servomotor (1) comprising: —a base body (10), —an actuator body (20) which is arranged on the base body (10)—a drive arrangement (40) which is coupled to a drive section of the actuator body (20) and, when the drive arrangement (40) is activated, brings about a movement of the drive section of the actuator body (20) in one of two opposing circumferential directions on the basis of this coupling, —a rotational guide (50) with which the actuator body (20) is rotatably guided on the base body (10) and by which the movement of the drive section of the actuator body (20) is converted into a rotational movement of the actuator body (20), —a resetting arrangement (80) which couples the actuator body (20) and the base body (10) to one another and applies a resetting force between them, which resetting force opposes the actuating movement of the actuator body (20), —a magnet-compensation device (90) which reduces or cancels out the resetting force applied by the resetting device (80).

Abstract: A vacuum circuit breaker comprises a vacuum interrupter operable between a closed state and an open state, and an actuator. The actuator comprises a piezoelectric driving element that is expandable and contractable along an expansion axis in response to an electrical input signal. The actuator further comprises a mechanical amplifying structure extendable along an actuation axis and being mechanically coupled to the piezoelectric driver such that expansion or contraction of said piezoelectric driving element causes the amplifying structure to extend or retract along the actuation axis. The mechanical amplifying structure is coupled to the vacuum interrupter for operating the vacuum interrupter between said closed and open states.

Abstract: Described herein is a method of bonding a piezoelectric substrate to a support substrate to form a composite substrate. The piezoelectric substrate has one surface which is positively polarized, and a second surface which is negatively polarized. The method described herein includes the steps of bonding the positively polarized surface of the piezoelectric substrate to one surface of the support substrate by a direct bonding method.

Abstract: The present invention relates to a component (1) for generating active haptic feedback, comprising a main body (2) having first and second internal electrodes (3, 4) stacked one above another in a stacking direction (S), wherein a respective piezoelectric layer (9) is arranged between the internal electrodes (3, 4), wherein the component (1) is configured to identify a force exerted on the component (1), wherein the component (1) is configured to generate active haptic feedback if a force exerted on the component (1) is identified, and wherein the haptic feedback is generated by virtue of an electrical voltage being applied between the first and second internal electrodes (3, 4), said electrical voltage resulting in a change in length of the main body (2).

Abstract: A piezoelectric motor comprises a frame having a first frame side and a second frame side; a first actuator assembly and a second actuator assembly. The first actuator assembly comprises a first piezoelectric actuator and two rollers, each of the rollers is pressed between the first piezoelectric actuator and the first frame side. The second actuator assembly comprises a second piezoelectric actuator and two rollers, each of the rollers is pressed between the second piezoelectric actuator and the second frame side. The motor further comprises at least one pre-loaded spring provided between the first actuator assembly and the second actuator assembly, pushing the first actuator assembly and the second actuator assembly against the first frame side and the second frame side, respectively.

Abstract: An adjusting mechanism for adjusting a deformation of a panel and an electron beam detection apparatus comprising the same are disclosed, the adjusting mechanism including: a support plate, which is provided opposite to the panel, with a periphery of the support plate being in positive fit with a periphery of the panel; and at least one screw set, each screw set comprising: at least one first screw, each first screw penetrating through the support plate, and in turn being connected to the panel by being screwed into the panel; and at least one second screw, each second screw being screwed to penetrate through the support plate and to abut against the panel; the support has its structural rigidity larger than a structural rigidity of the panel.

Abstract: Systems and techniques are provided for a piezoelectric transducer. A base plate includes a first electrical contact and a second electrical contact. A transduction element is mounted directly on the base plate and electrically connected to the first electrical contact. A spacer includes a via. The via includes electrically conductive material. The spacer is mounted on the base plate around the transduction element and the electrically conductive material of the via is electrically connected to the second electrical contact. A diaphragm is mounted on the spacer and on the transduction element.