Abstract: A mobile terminal, including: middle frame, main screen and secondary screen arranged at the middle frame. The secondary screen is arranged, in folded state, at back side of the main screen or at side of the main screen. The mobile terminal further includes at least one piezoelectric actuator fixed in the middle frame. The middle frame includes bottom wall and side wall bent and extending from the bottom wall to form receiving space. The piezoelectric actuator has one side fixed to the bottom wall, and another side fixed to the secondary screen. The piezoelectric actuator converts transverse deformation of the piezoelectric actuator into longitudinal driving force to drive the secondary screen to vibrate and sound and provide tactile feedback for the secondary screen. The piezoelectric actuator can improve overall firmness of the mobile terminal, and facilitating waterproof and dustproof effects, thereby enriching use experience.

Abstract: Provided is an equipment for treating a substrate. The substrate treating equipment may include: a nozzle supplying a chemical solution to a substrate; and a chemical solution supply apparatus supplying the chemical solution to the nozzle, and the chemical solution supply apparatus may include a pump member, an extraction nozzle provided on a flow path through which the chemical solution is introduced into the pump member and spraying the chemical solution by a spray scheme, and a control unit controlling an operation of the pump member.

Abstract: A cooling system is described. The cooling system includes a support structure, a cooling element, and drive electronics. The cooling element has a central axis and is supported by the support structure at the central axis. First and second portions of the cooling element are on first and second sides of the central axis and unpinned. The first and second portions of the cooling element undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure. The cooling element further has first and second piezoelectrics having opposite polarizations. The first piezoelectric is part of the first portion of the cooling element. The second piezoelectric is part of the second portion of the cooling element. The drive electronics drive the first and second portions of the cooling element using a single drive signal.

Abstract: A piezoelectric device includes a connection section including a first coupling portion, a second coupling portion, and a bridging portion. The first coupling portion extends along a slit and is connected to one of a pair of beam sections. The second coupling portion extends along the slit and is connected to another of the pair of beam sections. The bridging portion is located between the slit and an opening and is connected to both of the first coupling portion and the second coupling portion. The beam sections are connected to each other in a circumferential direction of a base having an annular shape via the connecting section while each of the beam sections is interposed between the slits extending in intersecting directions.

Abstract: In an embodiment a mechanical reinforcing element includes two end regions, two angular regions, wherein the end regions are located at two opposite end faces of the reinforcing element, wherein each angular region connects to one of the end regions via a first joint, and wherein the angular regions have a stiffening structure, and a connecting portion interconnecting the two angular regions and connecting to the angular regions through second joints, wherein the mechanical reinforcing element is configured such that, upon a relative movement of the end regions with respect to each other, the connecting portion performs a movement perpendicular thereto.

Abstract: The invention relates to an adjustment device, comprising: a stator; a driven element; a guide apparatus for bearing the driven element in a guided manner with respect to the stator in a drive direction when the adjustment device is operational; a slider; a bearing apparatus which bears the slider so as to be movable relative to the stator in the drive direction; a drive device which drives the slider; a coupling apparatus; and a clamping apparatus. When released, the clamping apparatus allows a range of movement between the connection device and either the slider or the driven element in order to set up an assembly state of the adjustment device and, when clamped, said clamping apparatus rigidly couples together the connection section and either the slider or the driven element in the drive direction and thereby allows a relative rotational movement between the driven element and the about a rotational axis extending in the drive direction.

Abstract: A gas control device includes a first pump, a second pump, and a connection casing. The first pump includes a first pump casing, a first suction hole, and a first discharge hole. The first pump casing has a plurality of outer walls. The second pump includes a second pump casing, a second suction hole, and a second discharge hole. The connection casing has a first opening and a second opening. The connection casing forms, together with the first pump casing and the second pump casing, a first closed space. The second discharge hole and the first suction hole communicate with each other via the first closed space. The first pump and the second pump are connected in series with each other. The outer wall in which first suction hole is provided faces the first closed space.

Abstract: An electronic device comprises an electro-optical circuit package including at least photonic integrated circuit (PIC) having at least one light source and a package substrate; a printed circuit (PCB) including at least one optical connector to receive light from the at least one light source; and multiple liquid metal electrical contacts disposed between the package substrate and the PCB.

Abstract: Certain examples disclose and describe apparatus and methods to provide fast response active clearance system with piezoelectric actuator in axial, axial/radial combined, and circumferential directions. In some examples, an apparatus includes an actuator to control clearance between a blade and at least one of a shroud or a hanger, the actuator including a multilayer stack of material, and wherein the actuator is outside a case. The apparatus further includes a rod coupled to the actuator and the at least one of the shroud or the hanger through an opening in the case, the rod to move the at least one of the shroud or the hanger in a radial direction based on axial movement of the multilayer stack of material.

Abstract: A device includes a superconductor layer and a piezoelectric layer positioned adjacent to the superconductor layer. The piezoelectric layer is configured to apply a first strain to the superconductor layer in response to receiving a first voltage that is below a predefined voltage threshold and to apply a second strain to the superconductor layer in response to receiving a second voltage that is above the predefined voltage threshold. While the device is maintained below a superconducting threshold temperature for the superconductor layer and is supplied with current below a superconducting threshold current for the superconductor layer, the superconductor layer is configured to 1) operate in a superconducting state when the piezoelectric layer applies the first strain to the superconductor layer and 2) operate in an insulating state when the piezoelectric layer applies the second strain to the superconductor layer.

Abstract: A piezo actuator for carrying out an actuating movement is disclosed, with a piezo bending transducer made of a carrier layer which is at least partially covered on one or two sides with a piezo lamella, with a movable end and with a housing, with a reference stop connected to the housing for determining a reference position for the actuating movement, with a first bearing region which comprises regions of the piezo actuator and the housing and which allows for twists ?1 of the piezo bending transducer, with a second bearing region having a surface on the side of the bending transducer and a surface on the side of the housing, and an intermediate layer between the surfaces, which connects them and which can be liquefied, and with a pressure element for generating a bias torque on the piezo bending transducer around the first bearing region against the reference stop.

Abstract: A driving apparatus includes a fixed unit, a first movable unit held rotatably about a first axis relative to the fixed unit, a second movable unit held rotatably about a second axis different from the first axis relative to the first movable unit, a bearing configured to support the first movable unit rotatably about the first axis relative to the fixed unit, a first wiring having one end connected to the fixed unit and another end connected to the first movable unit, and a second wiring having one end connected to the fixed unit and another end connected to one of the first movable unit and the second movable unit. The first wiring includes a wound portion wound around the first axis and provided outside the bearing in a radial direction of the bearing. The second wiring is inserted inside the bearing.

Abstract: The present invention relates to a method for determining at least one physical characteristic value of an electromechanical oscillatory system, which comprises a piezoelectric element and at least one additional element coupled, with respect to oscillation, to the piezoelectric element, the piezoelectric element having an electrode and a counter electrode.

Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.

Abstract: Ultra-low power methods and sensor devices are provided for determining the presence and magnitude of electromagnetic radiation or other signals. The sensor devices and methods provide both qualitative and quantitative analyses and can be deployed in remote locations for continuous monitoring over years without requiring a replacement power supply.

Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.

Abstract: An input device includes: a housing; a tip electrode protruding outside of the housing and configured to transmit a downlink signal to the outside; a reception electrode inside the housing and configured to receive an uplink signal from the outside; and a communication circuit electrically connected to the tip electrode and the reception electrode and configured to receive the uplink signal from the reception electrode or to transmit the downlink signal to the tip electrode, wherein a surface of the reception electrode has a concave-convex structure.

Abstract: The invention relates to a brake device having a frame, at least one pair of mutually opposing braking elements, at least one actuation element in operative connection with each braking element, and a spring device, wherein each braking element has three joint sections which are arranged in a row and are connected to one another via flexure bearings, and the middle joint section of which has a contact section, and the two joint sections adjoining the middle joint section are each connected integrally to the frame via a flexure bearing, wherein a force is exerted on each braking element by means of the spring device, by means of which force the respective contact section can be pressed with a defined force against an element to be braked, and a force which counteracts the force exerted on the braking elements by the spring device acts on the braking elements by means of a continuous energy input into the actuation elements and, when the energy input into the actuation elements is absent, the force exerted by t

Abstract: A blowing apparatus includes a housing including an accommodating space and one or more blowing holes and a vibration apparatus in the accommodating space, wherein the vibration apparatus includes a first active vibration member, a second active vibration member connected to an inner lateral surface of the housing and connected to intersect with the first active vibration member, and a passive vibration member between the one or more blowing holes and the first active vibration member and connected to the first active vibration member.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a dielectric structure sandwiched between a first electrode and a bottom electrode. A passivation layer overlies the second electrode and the dielectric structure. The passivation layer comprises a horizontal surface vertically below a top surface of the passivation layer. The horizontal surface is disposed above a top surface of the dielectric structure.

Abstract: Even with the occurrence of misalignment of inner electrodes in a ceramic collective board, a multilayer electronic component is made in which inner electrodes are disposed at suitable positions. Disclosed herein are descriptions of a first-stage ceramic collective board and a second-stage ceramic collective board used for manufacturing a multilayer electronic component. The present disclosure further describes a manufacturing method for the second-stage ceramic collective board and a manufacturing method for a multilayer electronic component.

Abstract: A vibration structure that includes a piezoelectric film constructed to deform in a plane direction as a voltage is applied thereto, a frame-shaped member, a vibration portion surrounded by the frame-shaped member in a plan view of the vibration structure, a support portion connecting the vibration portion and the frame-shaped member, and supporting the vibration portion within the frame-shaped member such that the vibration portion vibrates in the plane direction when the piezoelectric film is deformed in the plane direction, a first connection member that connects the piezoelectric film to the vibration portion, and a second connection member that connects the piezoelectric film to the frame-shaped member. Of the connection members, the first connection member is disposed between the center of gravity of the vibration portion and the second connection member.

Abstract: A linear transducer is connected to a first flexible member that has a first elongated shape with a first minor axis and a first major axis perpendicular to each other. This connects the linear transducer to opposite portions of the first flexible member along the first major axis. A second flexible member having an elongated shape with a second minor axis and a second major axis is provided. The second flexible member is connected to the first flexible member such that portions on the second major axis are joined to move with portions of the first flexible member on the first minor axis. Operation of the linear transducer multiplies displacements of the second flexible member relative to those of the transducer.

Abstract: A piezoelectric actuator includes a square suspension plate, an outer frame, a plurality of brackets and a square piezoelectric ceramic plate. The outer frame is arranged around the suspension plate. A second surface of the outer frame and a second surface of the suspension plate are coplanar with each other. Each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate. Each bracket has a length in a range between 1.22 mm and 1.45 mm and a width in a range between 0.2 mm and 0.6 mm. A length of the piezoelectric ceramic plate is not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate.

Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed portion, a movable portion, and a driving assembly. The fixed portion includes a main axis. The movable portion is movably disposed on the fixed portion. The movable portion is connected to an optical element. The driving assembly is used for driving the movable portion to move relative to the fixed portion.

Abstract: Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.

Abstract: The invention discloses a differential compliant displacement reducer, and relates to three technical solutions with similar working principles. The three technical solutions have the following characteristics: firstly, the three technical solutions all relate to an outer frame and all belong to a differential compliant displacement reducer circumferentially formed by extending upward and downward along both ends of the driver, and the working principle is similar; secondly, the differential motion of the three technical solutions comes from the difference caused by deformation of the upper and lower or inclined upper and lower deformable parts of the driver in the differential compliant displacement reducer; thirdly, compared with a traditional displacement amplifier, the three technical solutions all belong to the displacement reducer, the structure is simpler than that of the existing displacement amplifier; and fourthly, the three technical solutions can be matched with a macro-motion platform.

Abstract: A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top surface of the substrate, and a lid body which is provided to close the top opening of the support body, and deforms the tube with the bottom surface of the substrate by pressing the substrate through the support body.

Abstract: The present disclosure relates to an electrostatic chuck. The electrostatic chuck according to the present disclosure may include a base substrate; an electrostatic chuck plate fixed on the base substrate, the electrostatic chuck plate having an electrode therein; and an electrode part disposed in a hole in the base substrate to supply power to the electrode, wherein the electrode part may include a housing inserted into the hole in the base substrate, an electrode rod passing through the inner wall of the housing such that one end thereof is in contact with the electrode; and an elastic support body configured to support the electrode rod at multiple points on the inner wall of the housing.

Abstract: A piezoelectric drive device includes a piezoelectric element, a vibrating plate with a concave portion provided in a side surface, and a projecting portion provided between two side surfaces of the concave portion and having a spherical shape, an elliptical shape, or an egg shape, wherein a plurality of the piezoelectric elements and a plurality of the vibrating plates are stacked, and the concave portion includes a bottom surface.

Abstract: A method of making a transfer head for transferring micro elements, wherein the transfer head includes a cavity with a plurality of vacuum paths and a suite having arrayed suction nozzles and vacuum paths. The suction nozzles are connected to the vacuum path components respectively, and the vacuum path components are formed to connect to vacuum paths in the cavity respectively. The suction nozzles attract or release the micro element through vacuum pressure transmitted by vacuum. When the suite is mounted in the cavity, the upper surface of the suite is arranged with optical switching components for controlling the switch of the vacuum path components and vacuum paths of each path so that the suction nozzles can attract or release required micro element through vacuum pressure; and fabricating a suite with an array micro-hole structure, wherein the array micro-hole structure serves as the vacuum path components and the suction nozzles.

Abstract: An RF circuit device using modified lattice, lattice, and ladder circuit topologies. The devices can include four resonator devices and four shunt resonator devices. In the ladder topology, the resonator devices are connected in series from an input port to an output port while shunt resonator devices are coupled the nodes between the resonator devices. In the lattice topology, a top and a bottom serial configurations each includes a pair of resonator devices that are coupled to differential input and output ports. A pair of shunt resonators is cross-coupled between each pair of a top serial configuration resonator and a bottom serial configuration resonator. The modified lattice topology adds baluns or inductor devices between top and bottom nodes of the top and bottom serial configurations of the lattice configuration. These topologies may be applied using single crystal or polycrystalline bulk acoustic wave (BAW) resonators.

Abstract: A piezoelectric film includes a plurality of laminated main baking unit PZT layers. A first seed layer is present at a lower surface side of a lowermost main baking unit PZT layer. A second seed layer is interposed between two adjacent main baking unit PZT layers at an intermediate position between the lowermost main baking unit PZT layer and an uppermost main baking unit PZT layer.

Abstract: A process for manufacturing a diaphragm unit of a MEMS transducer that includes multiple piezoelectric transducer units, each of the multiple piezoelectric transducer units including at least one electrode layer and at least one piezoelectric layer formed on a carrier includes the step of removing the transducer units from the carrier. At least one of the transducer units that has been removed from the carrier is arranged on a diaphragm and connected to the diaphragm. Moreover, a diaphragm unit made according to the process includes a diaphragm and multiple piezoelectric transducer units arranged on and connected to the diaphragm. Each of the multiple piezoelectric transducer units includes at least one electrode layer and at least one piezoelectric layer formed on a carrier.

Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold.

Abstract: A propulsion system includes a cylindrical shaft member coupled to a motor with a motor frame; said shaft member mechanically coupled to a disc members with radius, to rotate in a dynamically and statically balanced state with said shaft when said motor rotates; the apparatus further comprising a power source to supply power to said motor to rotate said shaft member with said disc members; each said disc members comprising an annular radial array of material segments extending radially to the radius; said material segments comprising of a material that responds to electromagnetic fields to change shape radially on said disc member; such that when power is supplied to rotate the motor, the motor rotates the disc members and when each such material segment rotates to an angular location of the shaft member relative to a fixed point on the motor frame, each said material segment is supplied with said electromagnetic field; and said material responds to said electromagnetic field to change its shape radially to a

Abstract: A very small piezoelectric sensor capable of being mass produced includes a core, a piezoelectric layer on a surface of the core; and a conductive layer on a surface of the piezoelectric layer away from the core. The core is flexible and threadlike, the core is a first electrode of the piezoelectric sensor, and the conductive layer is a second electrode of the piezoelectric sensor. An array of such sensors allows the “skin” of a robot for example to simulate the sensitivity of hair-covered human skin. A method for making the piezoelectric sensor and an electronic device using the piezoelectric sensor are also disclosed.

Abstract: A method for manufacturing a MEMS structure is provided. The method includes providing a MEMS substrate having a first surface, forming a first buffer layer on the first surface of the MEMS substrate, and forming a first roughening layer on the first buffer layer. Also, a MEMS structure is provided. The MEMS structure includes a MEMS substrate, a first buffer layer, a first roughening layer, and a CMOS substrate. The MEMS substrate has a first surface and a pillar is on the first surface. The first buffer layer is on the first surface. The first roughening layer is on the first buffer layer. The CMOS substrate has a second surface and is bonded to the MEMS substrate via the pillar. Moreover, an air gap is between the first roughening layer and the second surface of the CMOS substrate.

Abstract: A method for forming a MEMS device is provided. The method includes forming a stack of piezoelectric films and metal films on a base layer, wherein the piezoelectric films and the metal films are arranged in an alternating manner. The method also includes forming a first trench in the stack of the piezoelectric films and the metal films. The method further includes forming at least one void at the side wall of the first trench. In addition, the method includes forming a spacer structure in the at least one void. The method further includes forming a contact in the first trench after the formation of the spacer structure.

Abstract: A piezoelectric driving device includes: a driving portion to be brought into frictional contact with an object to be driven, which is moved with respect to a fixed body; and at least two piezoelectric portions, which are formed integrally with the driving portion, are arranged on a predetermined plane with the driving portion being sandwiched between the at least two piezoelectric portions, and are configured to be bent with respect to the predetermined plane when voltages are applied to the at least two piezoelectric portions, wherein outer edges of entirety of the at least two piezoelectric portions are fixed to the fixed body.

Abstract: A displacement magnification device has a first link portion including a first rigid body and a first plate spring that couples the first rigid body to a supporting portion and a movable portion. A second link portion includes a second rigid body and a second plate spring that couples the second rigid body to the supporting portion and the movable portion. In this structure, the first rigid body and the second rigid body play roles to suppress the bending of the first plate spring and the second plate spring. In addition, a connection portion between the first plate spring and the supporting portion, a connection portion between the second plate spring and the supporting portion, a connection portion between the first plate spring and the movable portion, and a connection portion between the second plate spring and the movable portion play roles of elastic hinges.

Abstract: The vibration device includes a diaphragm, and a plurality of piezoelectric films that are arranged at predetermined intervals in a first direction of the diaphragm to face the diaphragm and extend parallel to a second direction orthogonal to the first direction. The diaphragm has at least one slit formed therein and dividing the diaphragm into respective regions. Each of the piezoelectric films are fixed to a respective region of the diaphragm while extending along the second direction in a tensioned state. The piezoelectric films expand and contract in a plane direction when a voltage is applied thereto.

Abstract: A force transducer for an electronic device can be operated in a drive mode and a sense mode simultaneously. In particular, the force transducer can provide haptic output while simultaneously receiving force input from a user. The force transducer is primarily defined by a monolithic piezoelectric body, a ground electrode, a drive electrode, and a sense electrode. The ground electrode and the drive electrode each include multiple electrically-electrically conductive sheets that extend into the monolithic body; the electrically conductive sheets of the ground electrode and the drive electrode are interdigitally engaged. The sense electrode of the force transducer is typically disposed on an exterior surface of the monolithic body.

Abstract: An actuator includes a laminate including an elastomer layer and an electrode, in which the laminate has a spiral or concentric shape, pre-distortion is applied to at least one member out of the elastomer layer and the electrode, and area distortion of the at least one member is 10% or larger.

Abstract: Provided is a piezoelectric laminate element that outputs a fixed output voltage even in response to a static load for which an output voltage could not be obtained using a conventional piezoelectric element. A piezoelectric laminate body in which a plurality of piezoelectric polymer film layers consisting of film such as polylactic acid film that exhibits piezoelectricity in the planar direction are laminated is used as a piezoelectric laminate element. The piezoelectric laminate body is given a cylindrical shape, rounded rectangle shape, or other partially curved shape. The output voltage follows the increase and decrease of the applied load, and if a fixed load is continuously applied, a fixed output voltage is continuously output, and a piezoelectric laminate element is obtained that outputs a fixed output voltage even if a load is static.

Abstract: A thin-film piezoelectric-material element includes a laminated structure part having a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film, a lower piezoelectric-material protective-film being formed with alloy material, and an upper piezoelectric-material protective-film being formed with alloy material. The piezoelectric-material film includes a size larger than the upper electrode film, a riser end-surface and step-surface formed on a top-surface of the upper electrode film side. The riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface. The step-surface intersects vertically with the riser end-surface. The lower piezoelectric-material protective-film, and the upper piezoelectric-material protective-film are formed with alloy material including Fe as main ingredient and having Co and Mo, by Ion beam deposition.

Abstract: A control method for a piezoelectric drive device includes a piezoelectric vibrator having a vibrating portion and a distal end portion coupled to the vibrating portion, in which the distal end portion makes elliptic motion by a stretching vibration and a flexural vibration of the vibrating portion, a driven member driven by the elliptic motion of the distal end portion, and a drive signal generation circuit outputting a stretching vibration drive signal that generates the stretching vibration and a flexural vibration drive signal that generates the flexural vibration in the piezoelectric vibrator, and the method includes, when the driven member is stopped, superimposing and outputting a modulation signal for amplitude modification on the stretching vibration drive signal by the drive signal generation circuit.

Abstract: A piezoelectric sensor comprising an insulator layer having opposing upper and lower surfaces, a first piezoelectric portion having a lower surface in contact with the upper surface of the insulator layer, a second piezoelectric portion having a lower surface in contact with the upper surface of the insulator layer and an insulator strip dividing the first and second piezoelectric portions, wherein the first portion and second piezoelectric portion are laterally positioned with respect to one another in the same generally planar layer.

Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

Abstract: A touch feedback and sensing device includes a circuit board, a piezoelectric ceramic actuator on the circuit board; and at least one strain sensor on the circuit board. The piezoelectric ceramic actuator includes a piezoelectric ceramic block, a cathode and an anode on the piezoelectric ceramic block. Different voltages are applied to the cathode and the anode to vibrate the piezoelectric ceramic block. The circuit board vibrates with vibration of the piezoelectric ceramic block. The at least one strain sensor is configured to detect and monitor vibration of the circuit board.