Contact At Edges Only Patents (Class 310/353)
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Patent number: 11884537Abstract: An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.Type: GrantFiled: March 15, 2021Date of Patent: January 30, 2024Assignee: X-Celeprint LimitedInventors: Ronald S. Cok, Raja Fazan Gul, António José Marques Trindade
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Patent number: 11432084Abstract: A medical device prosthesis, including a housing and a piezoelectric transducer including a piezoelectric component, wherein the piezoelectric transducer is supported in the housing via at least one spring. In some embodiments, the medical device prosthesis is a bone conduction device, such as a transcutaneous passive or active bone conduction device.Type: GrantFiled: October 28, 2016Date of Patent: August 30, 2022Assignee: Cochlear LimitedInventors: Tommy Bergs, Marcus Vardfjäll, Kristian Gunnar Asnes
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Patent number: 10572015Abstract: A tactile sense presenting device that includes ribs near an adhesion region of a piezoelectric film and a vibrating member. The ribs prevent the adhesive from leaking and controls a leakage amount of the adhesive into a space between the piezoelectric film and the vibrating member.Type: GrantFiled: March 28, 2017Date of Patent: February 25, 2020Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Kentaro Usui
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Patent number: 10323713Abstract: An antivibration device which can enhance the antivibration characteristic in the horizontal direction is provided. An antivibration device 10 includes: a support part 100 supported by at least one first viscoelastic body 400 so as to permit circumferential movement; a carrying part 200 to which a target object 900 for antivibration is mounted; a connecting mechanism 300 connecting the support part 100 with the carrying part 200; wherein the connecting mechanism 300 has at least one second viscoelastic body 350 which permits the circumferential movement of the carrying part 200 with respect to the support part 100. Preferably, the connecting mechanism 300 further includes a suspending plate 302 suspending the carrying part 200; wherein the suspending plate 302 is supported by at least one of the second viscoelastic bodies 350 from the lower side in the gravitational direction.Type: GrantFiled: July 23, 2015Date of Patent: June 18, 2019Assignee: Herz Co., Ltd.Inventor: Shuichiro Chaen
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Patent number: 9118299Abstract: Disclosed herein is a piezoelectric vibration module that includes a side damper between a vibration plate with a piezoelectric element and an upper case so as to ensure reliability against external shock applied to the side and narrows a spaced distance between the vibration plate and the upper case.Type: GrantFiled: October 31, 2012Date of Patent: August 25, 2015Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Jae Kyung Kim, Dong Sun Park, Joon Choi, Yeon Ho Son
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Patent number: 8963402Abstract: A piezoelectric vibrator element includes a vibrating portion that excites thickness-shear vibration, and a peripheral portion that is disposed on the periphery of the vibrating portion and has a thickness thinner than the vibrating portion, the vibrating portion and the peripheral portion being formed in a piezoelectric substrate. A buffering portion and a mount portion are sequentially connected to the peripheral portion. The buffering portion includes a slit formed between the mount portion and the peripheral portion. The mount portion has notches which are formed at both end portions in a direction orthogonal to an arrangement direction of the mount portion, the buffering portion, and the peripheral portion.Type: GrantFiled: November 14, 2011Date of Patent: February 24, 2015Assignee: Seiko Epson CorporationInventor: Jun Kusano
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Patent number: 8786166Abstract: The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.Type: GrantFiled: August 12, 2011Date of Patent: July 22, 2014Assignee: Teknologian Tutkimuskeskus VTTInventors: Antti Jaakkola, Tuomas Pensala, Jyrki Kiihamäki
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Publication number: 20140125431Abstract: A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.Type: ApplicationFiled: November 4, 2013Publication date: May 8, 2014Applicant: RF Micro Devices, Inc.Inventor: Kushal Bhattacharjee
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Patent number: 8689415Abstract: In an exemplary method for manufacturing a piezoelectric device, a lid wafer, a piezoelectric wafer, and a base wafer are prepared. Each wafer defines multiple lids, multiple piezoelectric vibrating pieces, and multiple bases, respectively. The piezoelectric vibrating pieces comprise respective first and second electrodes, and the base wafer is made of glass. The bases comprise respective first and second metal wires extending therethrough, each wire having a respective end and a respective side surface at the end that protrudes at least partially from the first surface. A wafer sandwich is formed with the three wafers co-aligned with each other, with the protruding ends of the wires contacting respective first and second electrodes. The layers are anodic bonded together, which also bonds the protruding ends of the first and second wires to the respective first and second electrodes. The bonded wafer sandwich is cut into separate individual piezoelectric devices thus formed in the sandwich from each other.Type: GrantFiled: April 15, 2010Date of Patent: April 8, 2014Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Kozo Ono, Takahiro Inoue
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Patent number: 8624471Abstract: Microelectromechanical resonators include a resonator body anchored to a substrate by at least one tether containing a coupled-ring linear acoustic bandgap structure therein. The coupled-ring linear acoustic bandgap structure can include a plurality of piezoelectric-on-semiconductor rings connected together by a plurality of piezoelectric-on-semiconductor tether segments. A first electrode may also be provided, which extends on the resonator body and the coupled-ring linear acoustic bandgap structure. This resonator body, which may be suspended opposite a recess in the substrate, may include a semiconductor (e.g., silicon) body having a piezoelectric layer (e.g., AlN) thereon, which extends between the semiconductor body and the first electrode. The coupled-ring linear acoustic bandgap structure may be a periodic structure, where a pitch between each of the plurality of piezoelectric-on-semiconductor rings in the at least one tether is equivalent, or a non-periodic structure.Type: GrantFiled: July 30, 2011Date of Patent: January 7, 2014Assignee: Georgia Tech Research CorporationInventors: Farrokh Ayazi, Logan Sorenson, Jenna Fu
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Patent number: 8446078Abstract: Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.Type: GrantFiled: March 26, 2010Date of Patent: May 21, 2013Assignee: Sand 9, Inc.Inventors: Behraad Bahreyni, David M. Chen, Alexei Gaidarzhy, Guiti Zolfagharkhani, Pritiraj Mohanty, Klaus Juergen Schoepf
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Publication number: 20130120083Abstract: A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.Type: ApplicationFiled: October 26, 2012Publication date: May 16, 2013Applicant: The Regents of the University of CaliforniaInventor: The Regents of the University of California
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Patent number: 8289092Abstract: The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.Type: GrantFiled: November 24, 2010Date of Patent: October 16, 2012Assignee: STMicroelectronics S.r.l.Inventors: Anna Pomarico, Pasquale Flora, Annarita Morea, Giuditta Roselli
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Publication number: 20120212107Abstract: A GT-cut crystal resonator that can be provided with a support portion having a small and simple configuration without adverse effect on vibration characteristics includes: a crystal plate formed in an elliptical shape with a major axis and a minor axis respectively corresponding to vibration directions of two longitudinal vibration modes orthogonal to each other in a GT-cut; and a support portion that supports the crystal plate, the support portion being connected to a position on an outer periphery of the crystal plate where a minimum vibration displacement is obtained when the two longitudinal vibration modes are coupled.Type: ApplicationFiled: February 13, 2012Publication date: August 23, 2012Applicant: NIHON DEMPA KOGYO CO., LTD.Inventors: Takashi Yamaguchi, Hiroaki Yamada
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Patent number: 8162628Abstract: An electrical connection structure for use in a micro piezoelectric pump is disclosed. The electrical connection structure includes a driving circuit board and a multilayered wiring structure. The electrical connection structure includes the driving circuit board, the wiring structure, and a piezoelectric element arranged from top to bottom. The driving circuit board is provided with a driving circuit for driving the piezoelectric element and at least an electrical contact, wherein the electrical contacts are electrically connected to the driving circuit. A first electrode contact region and a second electrode contact region electrically insulated from each other are defined on the same surface of the piezoelectric element. The wiring structure sends a signal from the electrical contacts to the first electrode contact region and the second electrode contact region.Type: GrantFiled: December 8, 2008Date of Patent: April 24, 2012Assignee: Microbase Technology Corp.Inventors: Hsien-Kai Meng, Shu-Pin Hsieh, Chieh-Ming Hsiung, Chien-Hua Lin, Yu-Chung Hsu, Tai-Shuan Lin
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Publication number: 20120056514Abstract: To provide an AT-cut quartz-crystal vibrating piece in which size of the vibrating unit is adjusted to appropriate value, so that the unnecessary vibration is inhibited and degradation of its characteristics is prevented. A mesa-type AT-cut quartz-crystal vibrating piece for vibrating at 38.400 MHz comprising a rectangular excitation unit (31) and a peripheral region (32) formed on the periphery of the excitation unit and having a thickness less than than the thickness of the excitation unit, is represented by the following equation: Mx/Gx=0.09×n?0.06 (n: natural number)??(1) Length of a crystallographic x-axis direction of the excitation unit is defined as Mx (mm) and length of the crystallographic x-axis direction of the peripheral region and excitation unit is defined as Gx (mm).Type: ApplicationFiled: September 1, 2011Publication date: March 8, 2012Applicant: NIHON DEMPA KOGYO CO., LTD.Inventors: Manabu Ishikawa, Kenji Shimao, Hiroyuki Sasaki
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Patent number: 8030827Abstract: In a crystal unit, at least two places of an outer circumference of a quartz crystal blank, which are places that correspond to both ends of a stress sensitivity zero axis of the crystal blank, are supported by supporters and fixed to the supporters by conductive adhesives. Each supporter includes; a vertical portion with a surface extending vertically, a slit formed in the vertical portion as extending vertically and with both ends thereof being closed, and a tongue portion projecting from a lower end of the slit. Each conductive adhesive includes; a first portion formed between the tongue portion and a lower surface of the crystal blank, a second portion extending to an end face of the crystal blank from an outer surface of the supporter and through the slit, and a third portion formed between an inner surface of the supporter and an upper surface of the crystal blank.Type: GrantFiled: February 6, 2009Date of Patent: October 4, 2011Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Takahiko Iwasaki, Kouichi Hara, Shigeru Obara
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Patent number: 7973610Abstract: An object of the invention is to provide a surface mount type crystal oscillator in which a probe can be easily brought into contact with a crystal inspection terminal. The surface mount type crystal oscillator is such that a crystal piece and an IC chip are housed within a container main body having a bottom wall and frame wall formed with laminated ceramics, and a communication terminal is provided on an outer side surface of the container main body. The communication terminal is provided so as to span from the outer side surface of the bottom wall to the outer bottom surface of the outer wall, the communication terminal is made the crystal inspection terminal, and the crystal piece and the IC chip are arranged in parallel on the inner bottom surface within the container main body.Type: GrantFiled: November 10, 2009Date of Patent: July 5, 2011Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Kouichi Moriya, Kenichi Sugawara
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Publication number: 20100117492Abstract: In a unit comprising a quartz crystal resonator, a case having a mounting portion, and a lid connected to the case, the quartz crystal resonator having a base portion, and first and second vibrational arms connected to the base portion, at least one groove being formed in at least one of opposite main surfaces of each of the first and second vibrational arms, at least one mounting arm being connected to the base portion having a length L1 less than 0.5 mm and extending in a common direction with at least one of the first and second vibrational arms, the at least one mounting arm being mounted on the mounting portion of the case.Type: ApplicationFiled: January 14, 2010Publication date: May 13, 2010Inventor: Hirofumi Kawashima
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Patent number: 7671511Abstract: This invention relates to a system for exciting oscillations of micromechanical cantilever sensors and for measuring and evaluating the corresponding oscillations. Such sensors can e.g. be used to detect chemical substances, biomolecules, microorganisms or viruses, or to analyze surface-related phenomena and processes such as conformational changes or phase transitions in thin layers, or to measure physical properties of their surrounding, such as viscoelastic properties of liquids. In the so-called dynamic operation mode, cantilever oscillations are excited and the frequency shift of the ground frequency and/or of one or some higher harmonics, occurring because of a process taking place at the cantilever surface, are measured. In the so-called static mode, the deflection of the cantilever is determined. The setup described in this invention allows measurements in gases as well as liquids.Type: GrantFiled: December 11, 2007Date of Patent: March 2, 2010Assignee: Concentris GmbHInventor: Felice Mauro Battiston
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Patent number: 7671517Abstract: A piezoelectric electroacoustic transducer includes a substantially rectangular piezoelectric diaphragm, a case having supports to support the four corners of the bottom surface of the piezoelectric diaphragm, terminals fixed to the case, each including an inner connection portion exposed near the supports, a first elastic adhesive disposed between the periphery of the piezoelectric diaphragm and the terminals, a conductive adhesive disposed between electrodes of the piezoelectric diaphragm and the terminals across the top surface of the first elastic adhesive, a second elastic adhesive filling and sealing a gap between the periphery of the piezoelectric diaphragm and an inner portion of the case, and an overamplitude-preventing receiver provided on a bottom wall of the case to limit the amplitude of vibration of the piezoelectric diaphragm to a predetermined range. The overamplitude-preventing receiver is disposed closer to the center of the piezoelectric diaphragm than the supports.Type: GrantFiled: October 20, 2004Date of Patent: March 2, 2010Assignee: Murata Manufacturing Co., Ltd.Inventors: Mitsunori Ishimasa, Keiichi Kami
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Publication number: 20090257320Abstract: An electronic apparatus comprises a display portion and at least one oscillating circuit comprising an amplifier, at least one resistor, a plurality of capacitors, and a unit having a case and a resonator. The resonator is vibratable in a flexural mode and has first and second vibrational arms, and at least one groove is formed in at least one of opposite main surfaces of each of the first and second vibrational arms, and at least one mounting arm protrudes from the base portion and extends in a common direction with at least one of the first and second vibrational arms. An output signal of the at least one oscillating circuit comprising the resonator is a clock signal for use in operation of the electronic apparatus to display time information at the display portion.Type: ApplicationFiled: January 17, 2008Publication date: October 15, 2009Inventor: Hirofumi Kawashima
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Patent number: 7579754Abstract: A piezoelectric actuator that can be operated in the d31 mode and which controls the potential energy of a spring is disclosed. The d31 mode of operation provides large actuator displacement and the potential energy of the spring significantly increases the force and work produced by the actuator. In a first embodiment, a single piezoelectric element, operating in the d31 mode, controls the potential energy of the spring. In another embodiment, two piezoelectric elements, both operating in the d31 mode, control the potential energy of the spring.Type: GrantFiled: April 20, 2006Date of Patent: August 25, 2009Assignee: Channel Products, Inc.Inventor: Carl C. Petersen
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Publication number: 20090195126Abstract: In a crystal unit, at least two places of an outer circumference of a quartz crystal blank, which are places that correspond to both ends of a stress sensitivity zero axis of the crystal blank, are supported by supporters and fixed to the supporters by conductive adhesives. Each supporter includes; a vertical portion with a surface extending vertically, a slit formed in the vertical portion as extending vertically and with both ends thereof being closed, and a tongue portion projecting from a lower end of the slit. Each conductive adhesive includes; a first portion formed between the tongue portion and a lower surface of the crystal blank, a second portion extending to an end face of the crystal blank from an outer surface of the supporter and through the slit, and a third portion formed between an inner surface of the supporter and an upper surface of the crystal blank.Type: ApplicationFiled: February 6, 2009Publication date: August 6, 2009Applicant: NIHON DEMPA KOGYO CO., LTD.Inventors: Takahiko IWASAKI, Kouichi HARA, Shigeru OBARA
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Patent number: 7550899Abstract: In order to improve the sound pressure level and the sound quality of a piezoelectric electroacoustic transducing device without impairing the size, the productivity, the cost, and the like of the device, the piezoelectric electroacoustic transducing device 1 has: a frame 20; a piezoelectric vibrator 10 in which piezoelectric elements 12, 13 are bonded to a metal plate 11; and a support member 30 which supports a peripheral portion of the piezoelectric vibrator 10 on the frame 20, and which is made of a resin film such as a ring-like PET resin, and a mesh or embossed concave and convex structure is formed on the surface of the support member 30. While maintaining the external shape of the support member 30, the support member 30 is provided with a flexibility at which a large displacement of the piezoelectric vibrator 10 is not impeded.Type: GrantFiled: July 20, 2007Date of Patent: June 23, 2009Assignee: Hosiden CorporationInventors: Satoru Fujiwara, Yuka Nagata
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Patent number: 7518289Abstract: An actuator, comprising at least one beam capable of generating flexural oscillations, at least one pair of electric supply terminals (23, 24) which supply oscillation-inducing electric power to the beam(s), and a holding mechanism which holds the beam(s), the holding mechanism including at least one holding member (12) to hold one portion of the beam(s) and a case (13) jointed to the holding member and configured to contain the beam(s) therein.Type: GrantFiled: October 20, 2005Date of Patent: April 14, 2009Assignees: Citizen Electronics Co., Ltd., Authentic, Ltd.Inventors: Kazuhiro Kobayashi, Keita Watanabe, Shigehisa Watanabe, Yoshiro Ohkawa
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Patent number: 7511405Abstract: To achieve small-sized formation of a piezoelectric vibrator while preventing exciting electrodes provided at both faces of the piezoelectric vibrating piece from being shortcircuited to each other and enabling to fabricate the piezoelectric vibrating piece easily, there is provided a piezoelectric vibrator 1 including a case 3 in a shape of a bottomed cylinder having an opening portion 3a and having a conductivity, a ring 12 substantially in a cylindrical shape press-fitted to the opening portion 3a of the case 3 and having a conductivity, one piece of a lead 13 inserted to the ring 12 and having an inner lead portion 15 and an outer lead portion 16, a filling member 14 having an insulting property for sealing an interval between the lead 13 and the ring 12 in airtight, and a piezoelectric vibrating piece 2 which is constituted by substantially a plate-like shape arranged at inside of the case 3 and includes exciting electrodes 8, 9 at both faces thereof and in which the exciting electrode 8 is supported byType: GrantFiled: November 29, 2007Date of Patent: March 31, 2009Assignee: Seiko Instruments Inc.Inventors: Masashi Numata, Yasuo Kawada, Sadao Oku
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Publication number: 20090066191Abstract: A piezoelectric device includes: a lower substrate; an upper substrate; an intermediate substrate sandwiched between the lower substrate and the upper substrate, the intermediate substrate including: a piezoelectric vibrating portion; a frame surrounding a periphery of the piezoelectric vibrating portion; a connecting portion coupling the piezoelectric vibrating portion and the frame; a first exciting electrode disposed on an upper surface of the piezoelectric vibrating portion; a second exciting electrode disposed on a lower surface of the piezoelectric vibrating portion; a first wiring line electrically coupled to the first exciting electrode; and a second wiring line electrically coupled to the second exciting electrode; and an inside surface coupling an upper surface and a lower surface of the frame and having a slanted surface having an interior angle with respect to one of the upper surface and the lower surface, the angle being 90 degrees or more.Type: ApplicationFiled: August 29, 2008Publication date: March 12, 2009Applicant: EPSON TOYOCOM CORPORATIONInventors: Kenji TSUCHIDO, Takahiro KURODA
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Publication number: 20090015108Abstract: A piezoelectric electroacoustic transducer includes a substantially rectangular piezoelectric diaphragm, a case having supports to support the four corners of the bottom surface of the piezoelectric diaphragm, terminals fixed to the case, each including an inner connection portion exposed near the supports, a first elastic adhesive disposed between the periphery of the piezoelectric diaphragm and the terminals, a conductive adhesive disposed between electrodes of the piezoelectric diaphragm and the terminals across the top surface of the first elastic adhesive, a second elastic adhesive filling and sealing a gap between the periphery of the piezoelectric diaphragm and an inner portion of the case, and an overamplitude-preventing receiver provided on a bottom wall of the case to limit the amplitude of vibration of the piezoelectric diaphragm to a predetermined range. The overamplitude-preventing receiver is disposed closer to the center of the piezoelectric diaphragm than the supports.Type: ApplicationFiled: October 20, 2004Publication date: January 15, 2009Applicant: Murata Manufacturing Co., LtdInventors: Mitsunori Ishimasa, Keiichi Kami
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Patent number: 7423363Abstract: A piezoelectric vibrating element includes a main vibration section vibrating in a constant direction, an open edge formed at least at one edge among edges provided in a vibration direction of the main vibration section, an outer frame section formed so as to surround the main vibration section, and a junction section being disposed between the main vibration section excluding the open edge and the outer frame section, having groove parts being recessed with respect to both surfaces of the main vibration section and flat parts being substantially flush with the both surfaces of the main vibration section, and being formed so as to integrally connect the main vibration section with the outer frame section.Type: GrantFiled: February 24, 2006Date of Patent: September 9, 2008Assignee: Seiko Epson CorporationInventors: Masako Tanaka, Shigeru Shiraishi
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Patent number: 7259502Abstract: An insert terminal containing case includes a bottom wall, four side walls, and an opening at the upper portion, wherein a terminal made of a metal plate is vertically fixed to at least one of the four side walls by insert molding. A groove is vertically arranged at the outer side surface of the side wall fixing the terminal, the groove extending downward, the outer side surface of the terminal is partially exposed at the groove, and the inner side surface opposite the outer side surface of the terminal exposed at the groove is partially exposed at the inner side surface of the side wall. Therefore, when the terminal is provided in the case by insert molding, molding can be performed only using upper and lower dies. Furthermore, the terminal can be reliably exposed at the inner surface of the side wall. The insert terminal containing case has the minimum difference between the opening dimension of the case and the dimension of a piezoelectric diaphragm and is molded without using a sliding die.Type: GrantFiled: July 15, 2004Date of Patent: August 21, 2007Assignee: Murata Manufacturing Co., Ltd.Inventors: Keiichi Kami, Mitsunori Ishimasa, Tetsuo Takeshima, Manabu Sumita
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Patent number: 6984925Abstract: The invention is a method and apparatus for improving the aging, pressure sensitivity, and acceleration sensitivity of crystal resonators. In one embodiment the invention includes a coplanar two-dimensional compliant mounting structure, wherein the symmetry and compliance of the planar mounting structure reduces the effects of residual static stresses and dynamic vibratory stresses on the vibration sensitivity performance of a crystal resonator. The structural elements include compliance loops that provide relief from the effects associated with manufacturing, thermal and vibration stresses.Type: GrantFiled: May 28, 2003Date of Patent: January 10, 2006Assignee: Delaware Capital Formation, INCInventors: Peter E. Morley, Reichl B. Haskell, Daniel S. Stevens
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Patent number: 6933660Abstract: A piezoelectric actuator includes at least one piezoelectric bender that is deformable between a first arcuate shape and a second arcuate shape that have different curvatures. A resistance device includes a moveable portion in contact with the piezoelectric bender throughout its deformation from the first shape to the second shape. In addition, the resistance device is operable to resist the deformation, preferably by resisting a change in the transverse dimension of the piezoelectric bender through a friction interaction. By resisting transverse dimension changes in the piezoelectric bender, the axial force produced by the actuator can be increased, and the same structure can compensate for wear that could otherwise undermine performance after many deformation cycles. The piezoelectric actuator finds particular application in fast valves, such as those associated with pressure switching in fuel injection systems.Type: GrantFiled: June 6, 2002Date of Patent: August 23, 2005Assignee: Caterpillar IncInventors: Jerome P. Maushard, Larry G. Waterfield
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Patent number: 6880407Abstract: Excitation electrodes are respectively affixed to central portions of both surfaces of a long plate-shaped AT-cut crystal resonator, the central portion starts a thickness shear oscillation in the length direction of the crystal resonator when an electric signal is applied to the central portion of the crystal resonator through the excitation electrodes. And, channel-shaped, half-circular-shaped, or trapezoid grooves in cross-section are respectively formed in the plate width direction on middle portions between the center portion and end portions of the crystal resonator. These grooves are formed so as to be symmetrical with respect to a thicknesswise central position of the crystal resonator through a well-known etching technique such as photo-etching and the like.Type: GrantFiled: June 5, 2002Date of Patent: April 19, 2005Assignees: Yamata Scale Co., Ltd., Nihon Dempa Kogyo Co., Ltd.Inventors: Masami Yamanaka, Motoyuki Adachi, Akio Chiba, Kozo Ono
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Patent number: 6806624Abstract: A micro-electro-mechanical generator has a liquid chamber, a heating block, an elongated elastic piezoelectric plate and a pair of electrodes. The liquid chamber is defined by bottom blocks which include the heating block and side walls, and can maintain a liquid. The heating block generates bubbles within the liquid chamber. The elongated elastic piezoelectric plate has a piezoelectric material layer, and is positioned in the liquid chamber adjacent to an upper portion of the heating block. The elongated elastic piezoelectric plate is deformable by contact with the bubbles, wherein a first end of the elongated elastic piezoelectric plate is a free end and a second end of the elongated elastic piezoelectric plate is a fixed end. The pair of electrodes are electrically connected to the piezoelectric material layer.Type: GrantFiled: November 8, 2002Date of Patent: October 19, 2004Assignee: Korea Institute of Science and TechnologyInventors: Yoon Pyo Lee, Ho-Young Kim, Kwang Ho Kim, Young Il Kim, Dae-Young Lee, Seo Young Kim, Kyung Ho Kim
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Patent number: 6791241Abstract: A piezoelectric resonator is assembled so that a gap is formed between a resonator element and a plug using a connecting layer formed with a conductive resin, with flattened leads having leading end portions opening in a U-shape. This piezoelectric resonator permits absorption of an impact by elasticity of the leading end portions. Further, operability can be increased by forming a temporary fixing layer using a UV-setting type resin between the leading end portions and the resonator element, or coating a silver paste on one of the leading end portions and the resonator element prior to forming a connecting layer. It is thus possible to mass-produce a piezoelectric resonator unit high in impact resistance and reliability with only slight variations of frequency when exposed to high temperatures.Type: GrantFiled: September 9, 1998Date of Patent: September 14, 2004Assignee: Seiko Epson CorporationInventor: Yasumitsu Ikegami
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Patent number: 6786095Abstract: An acceleration sensor includes a first resonator and a second resonator which resonate at independent frequencies and each of which includes a piezoelectric body and electrodes arranged on both main surfaces thereof, and a first base plate and a second base plate. A first unimorph type acceleration detection element includes the first resonator bonded to one surface of the first base plate, and a second unimorph type acceleration detection element includes the second resonator bonded to one surface of the second base plate. Each of the first and second unimorph type acceleration detection elements is fixed at one longitudinal end thereof or opposed longitudinal ends thereof such that the first resonator and the second resonator are diametrically opposed to each other or are arranged to face each other to allow the first resonator and the second resonator to independently deflect in response to the application of acceleration.Type: GrantFiled: September 21, 2001Date of Patent: September 7, 2004Assignee: Murata Manufacturing Co., Ltd.Inventor: Jun Tabota
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Patent number: 6700313Abstract: The resonator according to the invention, which is intended to be mounted in a case, includes a tuning fork shaped part (42) with two parallel arms (44, 46) connected to each other by a base (48) and carrying electrodes (52, 54) to make them vibrate, these electrodes being connected to connection pads (60, 62) intended to be electrically connected to the exterior of the case. In accordance with the invention, the resonator (40) also includes a central arm (50) attached to the base (48) and located between the arms (44, 46) of the tuning fork shaped part (42), substantially equidistant from them, this central arm (50) having a greater mass than that of the arms of the tuning fork shaped part and the connection pads (60, 62) are carried by this central arm. This resonator (40) is mounted in a case of parallelepiped shape by fixing its central arm (50) to at least one support secured to the bottom of the case.Type: GrantFiled: September 30, 2002Date of Patent: March 2, 2004Assignee: Eta Sa Fabriques D'EbauchesInventors: Silvio Dalla Piazza, Thomas Lüthi, Bruno Studer
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Patent number: 6629343Abstract: A method for fabricating a pressure-waveform sensor with a leveling support element. One embodiment provides a pressure-waveform sensor having a housing, a support element, and a piezoelectric element having a first end secured between the support element and the housing, and a second end in a cantilevered orientation. The support element and the piezoelectric element together form a plurality of support regions to level the piezoelectric element and relative to the housing. In some embodiments, the support element includes a ring having three slots spaced apart on one face of the ring, or one or more support regions formed with a shim having a thickness equal to a thickness of the piezoelectric device, or support regions that are integral to the support element. Another aspect provides a method for fabricating a pressure-waveform sensor.Type: GrantFiled: October 20, 2000Date of Patent: October 7, 2003Assignee: Hypertension Diagnostics, Inc.Inventors: Charles F. Chesney, Michael Terry Riggs, Charles A. Lemaire
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Patent number: 6545393Abstract: A quartz crystal unit using a metallic base and improved in its shock resistance includes a circular plate-like crystal blank having first and second extending electrodes respectively extended from excitation electrodes, first and second L-letter-shaped metallic brackets electrically and mechanically connected to the first and second extending electrodes at the outer circumferential portion of the crystal blank, first and second lead wires constituted as hermetic terminals penetrating the metallic base and bonded to the first and second brackets, and third and fourth L-letter-shaped metallic brackets mechanically connected to portions of the outer circumferential portion of the crystal blank, in which the naked surface if the crystal blank is exposed. The third and fourth brackets are interconnected to form an integral metallic holding member. An arrangement for connecting the holding member to the metallic base is further provided.Type: GrantFiled: August 20, 2002Date of Patent: April 8, 2003Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Takahiko Iwasaki, Kazuyoshi Oguri
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Patent number: 6445254Abstract: There is provided a crystal oscillator in which a crystal blank and an integrated circuit (IC) chip are accommodated in a vessel and the IC chip is fixed through a bump to the bottom surface of the vessel by means of ultrasonic thermocompression bonding. The IC chip contains an oscillation circuit utilizing the crystal blank and has a plurality of terminal electrodes on a major surface thereof. A plurality of connection terminal portions are formed on the bottom surface of the concave portion of the vessel so that each of the connection terminal portions corresponds to one of the terminal electrodes. Each of the connection terminal portions is formed into a rectangular shape and the width of each connection terminal portion is identical. The terminal electrodes and the connection terminal portions are bonded to each other through a bump by means of ultrasonic thermocompression bonding. Thus, the IC chip is fixed to the bottom surface of the concave portion of the vessel.Type: GrantFiled: August 30, 2000Date of Patent: September 3, 2002Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Tatsunobu Shibuya, Susumu Negishi, Hiroshi Uehara, Yasuo Sakaba, Seiji Oda, Xinglong Gong
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Publication number: 20020089263Abstract: A piezoelectric component includes a substantially rectangular shaped piezoelectric element, a first elastic material covering at least a pair of end portions of the piezoelectric element, the pair of end portions including edge parts of the piezoelectric element, a second elastic material covering the entire piezoelectric element and the first elastic material, and an outer-cladding resin covering the whole circumference of the piezoelectric element which is covered with the second elastic material.Type: ApplicationFiled: November 9, 2001Publication date: July 11, 2002Applicant: Murata Manufacturing Co., Ltd.Inventors: Koji Morita, Masanobu Sugimori, Muneyuki Daidai
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Patent number: 6396201Abstract: In a piezoelectric vibrator having a center supporting piezoelectric vibrating reed, one edge of an almost rectangular piezoelectric vibrating reed is fixed at two places of a case by a comparatively hard conductive adhesive. Also, the other edge facing the above-mentioned one edge is fixed at two other places of the case by a comparatively soft adhesive. Further, the case and a lid to cover the piezoelectric vibrating reed which constitute a container for the piezoelectric vibrator are sealed using a glass material having a low melting point of 340° C. or less. Further, in the case of a cantilever supporting piezoelectric vibrating reed, stoppers made of soft adhesive are formed at the top and bottom of the other edge facing the above-mentioned one edge with a slight clearance being provided.Type: GrantFiled: February 22, 2000Date of Patent: May 28, 2002Assignees: Miyota Co., Ltd., CitizensWatch Co., Ltd.Inventors: Toshinori Ide, Hisao Wakabayashi
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Publication number: 20020060509Abstract: The Lame mode quartz crystal resonator vibrating in overtone mode is formed of an X-plate quartz crystal obtained in a manner that a blank X-plate quartz crystal having a coordinate of x, y and z axes is rotated through 36.5° to 47° about its y-axis and further rotated through 65° to 85° about a new x′-axis corresponding to the x-axis produced by the rotation about the y-axis and the thus rotated blank X-plate quartz crystal is then cut out along planes parallel to x-y, y-z and z-x planes of the original coordinate system, respectively. The quartz crystal resonator includes a vibrating portion, a supporting frame and a mounting portion formed integrally. The vibrating portion is connected through two connecting portions to the supporting frame and the mounting portion, as a result of which the quartz crystal resonator has less series resistance R1 and exhibits minimum vibrational energy losses and minimum frequency change over a wide temperature range.Type: ApplicationFiled: April 18, 2001Publication date: May 23, 2002Inventor: Hirofumi Kawashima
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Patent number: 6376969Abstract: A clamping device for providing temperature compensation of a piezoelectric device, such as a thermally pre-stressed bending actuator. The clamping device is configured to apply a variable clamping force to the piezoelectric device that varies in response to temperature changes proximate the piezoelectric device. The variable clamping force applied to the piezoelectric device alters its operating characteristics to provide temperature compensation of the device.Type: GrantFiled: February 5, 2001Date of Patent: April 23, 2002Assignee: Caterpillar Inc.Inventor: Glen F. Forck
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Publication number: 20020036448Abstract: A crystal oscillator is mounted on a ceramic substrate so that the crystal oscillator is sealed air tight. The peripheral portion of the lower surface of the substrate is provided with electrodes for external connection that project downward from the lower surface of the substrate. An electronic component is mounted on the lower surface of the substrate.Type: ApplicationFiled: September 24, 2001Publication date: March 28, 2002Inventors: Noboru Kageyama, Hisao Wakabayashi, Kiyoshi Shimizu, Atsushi Omura
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Patent number: 6300707Abstract: A quartz crystal unit with favorable frequency variation characteristics in response to changes in temperature and changes over time. A pair of lead wires provided perpendicularly to a base and a pair of supporters supported on the pair of lead wires are used for holding and electrically connecting a quartz blank at opposite points on the periphery thereof to which leading electrodes extend. The orientation of a line connecting holding points matches an axis on which stress sensitivity of the quarts blank exhibits the least value. A line connecting both supporting points for the supporters by the lead wires is disposed in a skew position with respect to another line connecting both holding points for the quartz blank. When the quartz blank is AT cut, an angle formed between these lines in the skew relationship is preferably set to approximately 30 degrees.Type: GrantFiled: January 2, 2001Date of Patent: October 9, 2001Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Sachiko Takehana, Mitsuaki Koyama, Shigeru Obara
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Publication number: 20010013741Abstract: A piezoelectric ceramic comprising lead titanate as a primary component, wherein the primary component contains a titanium oxide crystalline phase. Methods for producing the ceramic, and piezoelectric oscillators making use of the ceramic are also disclosed.Type: ApplicationFiled: March 1, 2001Publication date: August 16, 2001Inventors: Akihito Okuda, Akinobu Takamura, Masataka Kida, Yoshiaki Kohno
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Publication number: 20010009343Abstract: An energy-trap type piezoelectric resonator utilizes a fundamental wave of a thickness shear vibration mode and includes resonance electrodes provided on both main surfaces of a substantially rectangular piezoelectric plate so as to face each other with the piezoelectric plate disposed therebetween. An energy trap vibration portion including a portion of the piezoelectric plate where the resonance electrodes overlap each other is asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate.Type: ApplicationFiled: December 28, 2000Publication date: July 26, 2001Applicant: Murata Manufacturing Co., Ltd.Inventors: Kazuhiro Sawai, Ryuhei Yoshida
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Patent number: 6259188Abstract: An alert apparatus for a personal communication device includes a mechanically prestressed piezoelectric wafer positioned within the personal communication device and an alternating voltage input line coupled at two points of the wafer where polarity is recognized. The alert apparatus also includes a variable frequency device coupled to the alternating voltage input line, operative to switch the alternating voltage on the alternating voltage input line at least between an alternating voltage having a first frequency and an alternating voltage having a second frequency. The first frequency is preferably sufficiently high so as to cause the wafer to vibrate at a resulting frequency that produces a sound perceptible by a human ear, and the second frequency is preferably sufficiently low so as to cause the wafer to vibrate at a resulting frequency that produces a vibration readily felt by a holder of the personal communication device.Type: GrantFiled: August 31, 1999Date of Patent: July 10, 2001Assignee: Projects Unlimited, Inc.Inventors: Stanley E. Woodard, Richard F. Hellbaum, Robert H. Daugherty, Raymond C. Scholz, Bruce D. Little, Robert L. Fox, Gerald A. Denhardt, SeGon Jang, Rizza Balein