Abstract: An ultrasonic motor includes an actuator with a piezo-electric plate, at least one friction element, an element to be driven in active contact with the friction element, a tensioning device for pressing the friction element against the element to be driven, and a thermo-compensation platform having abutting sections by which displacement of the actuator is only possible along abutting side surfaces of the piezo-electric plate. The tensioning device includes two rotation angle levers of which two tension lever arms are connected to one another via a tensioned tension spring, to exert torque on the rotation angle lever such that pressure lever arms will act on the actuator to be linearly guided by the abutting sections in the direction of the element to be driven.

Abstract: An excitation system includes a pair of piezoelectric elements configured to apply respective excitation forces to a test structure, a clamp including an adjustable arm, the adjustable arm being configured to capture the test structure between the pair of piezoelectric elements, a controller coupled to the pair of piezoelectric elements and configured to generate a respective excitation control signal for each piezoelectric element, each excitation control signal being configured such that the respective excitation forces are matched to one another, and a pair of sensor film structures to generate respective output signals indicative of the excitation forces applied to the test structure, each sensor film structure being disposed between a respective one of the pair of piezoelectric elements and the test structure.

Abstract: The invention relates to an ultrasonic motor having a bracket, a plate-shaped ultrasonic actuator arranged in the bracket, said ultrasonic actuator having two opposing main surfaces and at least four side surfaces connecting the main surfaces to one another, and an element to be driven, wherein the ultrasonic actuator is pressed against the element to be driven, and the bracket comprises a first frame that supports the ultrasonic actuator and a second frame in which the first frame is supported and guided by bearing elements, and the bearing elements are pressed elastically against the first frame by the second frame. According to the invention, the first frame is pressed against the main surfaces of the ultrasonic actuator via the bearing elements, thus preventing or reducing movements of the ultrasonic actuator in a direction vertical to the main surfaces.

Abstract: Providing a glass assembly cutting method capable of improving yield by cutting a glass assembly into a predetermined size, providing a package manufacturing method, a package and a piezoelectric vibrator manufactured by the manufacturing method, and an oscillator, an electronic device, and a radio-controlled timepiece. Providing a wafer assembly cutting method of cutting a wafer assembly 60 along a scribe line M?, the method including: a scribing step of irradiating a laser beam having an absorption wavelength of the wafer assembly 60 along the contour line to form the scribe line M? on a lid board wafer 50; and a breaking step of applying a breaking stress along the scribe line M? using a cutting blade to cut the wafer assembly along the scribe line M?, wherein the scribing step involves forming the scribe line M? so that the ratio of a depth dimension D of the scribe line M? to a width dimension W thereof is 0.8 or larger and 6.0 or smaller.

Abstract: A holding device for a piezoelectric vibrator including a support member (11) for separately accommodating a piezoelectric vibrator (1), a first plate spring member (13) which extends from a proximal end fixedly bonded to one side of the support member (11) so as to sandwich opposing sides of the piezoelectric vibrator (1) and is folded back to be fixedly bonded to the piezoelectric vibrator, and a second plate spring member (18) which extends from a proximal end fixedly bonded to another side of the support member (11) so as to sandwich the opposing sides of the piezoelectric vibrator (1) and is folded back to be fixedly bonded to the piezoelectric vibrator. The first plate spring member (13) and the second plate spring member (18) are integrated at portions fixedly bonded to the piezoelectric vibrator (1).

Abstract: A transparent piezoelectric sheet-with-a-frame includes a transparent piezoelectric sheet and a frame covering a peripheral edge portion of the transparent piezoelectric sheet. The transparent piezoelectric sheet includes one transparent piezoelectric film including an organic polymer, one first transparent plate electrode placed on a first main surface of the transparent piezoelectric film and having a first transparent plate electrode portion, and one second transparent plate electrode placed on a second main surface of the transparent piezoelectric film and having a second transparent plate electrode portion. An outline of the second transparent plate electrode portion is positioned inside an outline of the first transparent plate electrode portion as seen in a plan view. The outline of the first transparent plate electrode portion completely coincides with the frame, and the outline of the second transparent plate electrode portion does not at all coincide with the frame as seen in the plan view.

Abstract: A transparent piezoelectric sheet includes a quadrilateral-shaped transparent piezoelectric film and a first transparent plate electrode. The quadrilateral-shaped transparent piezoelectric film includes an organic polymer. The quadrilateral-shaped transparent piezoelectric film has entire main surfaces that are piezoelectric. The first transparent plate electrode is layered on part of a first main surface of the main surfaces of the transparent piezoelectric film. One to three sides of the four sides of the quadrilateral shape of the transparent piezoelectric film and area(s) of the first main surface adjacent thereto are not covered by the first transparent plate electrode.

Abstract: The present invention discloses an atomization structure comprising a carrier, a cover plate, a piezoelectric driving device and an atomization piece. The carrier includes at least one first support portion, the cover plate comprises at least one second support portion, and the carrier is covered by the plate covers. The piezoelectric driving device is disposed between the carrier and the cover plate, the atomization piece is clamped by one end of the piezoelectric driving device. The actuating effect of the piezoelectric driving device would not be absorbed but kept by point contacting the first support portions and the second support portions to clamp and support the piezoelectric driving device.

Abstract: The present invention provides a low frequency acoustic transducer for non-destructive testing of a test structure. The transducer is arranged for conversion between electrical energy and acoustic energy associated with an acoustic wave propagating through a portion of the test structure. The transducer comprises a bending actuator for generating the acoustic wave by generating a vibration from an electrical signal or for generating an electrical signal from a vibration generated by the received acoustic wave. The bending actuator has a vibration surface and a contact area surrounded by a portion of the vibration surface. The transducer further comprises a mode setting member that has a rigid portion which is in direct mechanical contact with the bending actuator at the contact area such that, within the contact area, an amplitude of the vibration is substantially suppressed. The location and shape of the contact area determine a bending mode associated with a resonance frequency of the bending actuator.

Abstract: The present invention relates to a transducer device (10), comprising: an acoustic membrane (14); a piezoelectric element (12) mounted to the acoustic membrane; two oppositely arranged elastic damping elements (16a, 16b) between which a peripheral portion (22) of the acoustic membrane is sandwichably supported; and a clamp (28) having two surfaces (30a, 30b) between which the two elastic damping elements are clamped so that the two elastic damping elements are pressed together, whereby the peripheral portion of the acoustic membrane is secured between the two elastic damping elements. The present invention also relates to a method of assembling such a transducer device.

Abstract: A piezoelectric transducer having a component therein for amplifying the deformation of the piezoelectric element so as to increase the available transducer stroke. This amplification of the piezoelectric element may be provided by a mechanical amplifier coupled to the piezoelectric element. The mechanical amplifier is configured to exert a preloading force on the piezoelectric element.

Abstract: A stack of piezoelectric elements, in the form of an elongated rod divided in to segments, for generating electric energy in response to compressive stress is provided comprising: piezoelectric elements stacked one on top of the other such that electrodes of same polarity of adjacent disks are touching A holding structure, such as a screw holds the piezoelectric elements together between a top and a bottom end pieces which transfer mechanical compressive stress to the elements in the stack. The holding structure accepts shear stresses, provides preloading stress on the stack and prevents buckling of the stack under pressure. A recess in the end piece, deeper than the head of the screw, ensures that load placed on the stack will compress the piezoelectric elements and not on the screw.

Abstract: A piezoelectric speaker includes a cabinet, piezoelectric vibrators horizontally mounted inside the cabinet at different elevations each having two eyed lugs respectively coupled to respective posts in the cabinet, a shock absorber coupled to the piezoelectric material of the piezoelectric vibrators, two conducting terminals accommodated inside the cabinet and clamped on the piezoelectric vibrators, and two clamps fastened to the conducting terminals to secure a respective signal line.

Abstract: A piezoelectric transformer includes: a piezoelectric transducer on whose outer surface an electrode is formed; a case housing the piezoelectric transducer; a terminal disposed to face the electrode; an elastic member in contact with both the electrode and the terminal in the case and having conductivity to bring the electrode and the terminal into mutual continuity; and a folder formed in the case and fixedly holding the elastic member to press-fit the elastic member between the electrode and the terminal.

Abstract: A device (D) is dedicated to fixing a first piece of equipment (E1) relative to a second piece of equipment (E2). The device has (i) a structure having a rigid central body (CC) prolonged by two approximately identical terminal bodies (CT1, CT2) each having a neck defining a flexible intermediate part (PD1, PD2) that is symmetric relative to a symmetry element, prolonged by a rigid internal part (PI1, PI2) that is symmetric relative to the symmetry element and joined to one of the ends of the central body (CC), and by a rigid external part (PE1, PE2) that is symmetric relative to a symmetry element, spaced from the internal part, and intended to be joined to the first (E1) or second (E2) piece of equipment. The device has (ii) at least two piezoelectric transducers (T11-T22) with each responsible for converting either an axial dimensional change into a measurement current representing the amplitude of the change, or a control current into a corresponding axial dimensional change.

Abstract: The invention relates to a device for coupling low-frequency high-power ultrasound resonators by a tolerance-compensating force-transmitting connection having at least one contact surface between the at least two resonators on or proximate to the oscillation maximum of the oscillation to be transmitted by the coupling for the purpose of transmitting low-frequency ultrasound power between the resonators coupled in this manner.

Abstract: An ultrasonic transducer includes: piezoelectric elements; a pair of clamping members which clamp said piezoelectric elements; and a cover member which is crimped to at least one of said pair of clamping members in a state where said cover member cooperates with said pair of clamping members to surround said piezoelectric elements.

Abstract: The invention describes a vibrating tine level detection device, and a method of forming the same, which is particularly suitable for operation in environments subject to rapid temperature change. A piezoelectric stack, which generates vibration of the tine, is located within a cage. The cage is, in turn, located within a hollow body defined by a diaphragm, from which the tines extend, and a wall section. The cage is attached to the inside surface of the wall section, adjacent to the junction between the wall section and the diaphragm. As a consequence, the ability of the cage to maintain a substantially constant compression on the piezoelectric stack is substantially unaffected by thermal expansion or contraction of the wall section.

Abstract: A piezo-effect transistor (PET) device includes a piezoelectric (PE) material disposed between first and second electrodes; and a piezoresistive (PR) material disposed between the second electrode and a third electrode, wherein the first electrode comprises a gate terminal, the second electrode comprises a common terminal, and the third electrode comprises an output terminal such that an electrical resistance of the PR material is dependent upon an applied voltage across the PE material by way of an applied pressure to the PR material by the PE material.

Abstract: Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved power output as compared with other known acrylic dielectric material based transducers. Such technology may be applied in motor-driven applications, lightweight flight applications and lighting applications among others.

Abstract: Implantable cardiac motion powered piezoelectric energy sources are provided. An aspects of embodiments of the subject implantable energy sources is that they include a piezoelectric transducer that converts cardiac mechanical energy to electrical energy. The subject energy sources find use in a variety of applications, including providing power to a wide range of implantable devices.

Abstract: A piezoelectric actuator that can be operated in the d31 mode and which controls the potential energy of a spring is disclosed. The d31 mode of operation provides large actuator displacement and the potential energy of the spring significantly increases the force and work produced by the actuator. In a first embodiment, a single piezoelectric element, operating in the d31 mode, controls the potential energy of the spring. In another embodiment, two piezoelectric elements, both operating in the d31 mode, control the potential energy of the spring.

Abstract: Electroactive polymer constructions that convert electrical energy to mechanical energy and vice versa are disclosed. The subject transducers (actuators, generators, sensors or combinations thereof) share the requirement of a frame or fixture element used in preloading elastomeric film electrodes and dielectric polymer in a desired configuration. The structures are either integrally biased in a push-pull arrangement or preloaded/biased by another element.

Abstract: An electric motor, in particular a starter device for internal combustion engines in which a current-limiting electric resistor (57) with a negative temperature coefficient is connected at the beginning of the main current path (49) of an electromagnetically excitable rotor (53) of the electric motor (16). The electric resistor (57) contains at least one monocrystalline semiconductor.

Abstract: A method for manufacturing a capacitor includes the steps of: forming a conductive layer above a base substrate; forming a dielectric layer above the conductive layer; forming a lanthanum nickelate layer above the dielectric layer; and patterning at least the dielectric layer by using at least the lanthanum nickelate layer as a mask.

Abstract: An actuator, comprising at least one beam capable of generating flexural oscillations, at least one pair of electric supply terminals (23, 24) which supply oscillation-inducing electric power to the beam(s), and a holding mechanism which holds the beam(s), the holding mechanism including at least one holding member (12) to hold one portion of the beam(s) and a case (13) jointed to the holding member and configured to contain the beam(s) therein.

Abstract: An ultrasonic transducer includes: piezoelectric elements; a pair of clamping members which clamp said piezoelectric elements; and a cover member which is crimped to at least one of said pair of clamping members in a state where said cover member cooperates with said pair of clamping members to surround said piezoelectric elements.

Abstract: A linear electromechanical translation apparatus is provided of the type comprising first and second clamps fixed to a support, first and second elongate movable members each extending through one of the clamps, and an extension actuator connected between the movable members and adapted to move each one of the elongate movable members longitudinally relative to the other member as the extension actuator is extended or retracted. The apparatus is characterized in that the first elongate movable member has a rear end connected to a front end of the extension actuator, and the second movable member has a rear end connected to a rear end of the actuator and has a forwardly extending elongate portion which lies beside and parallel to the first elongate movable member. Both the clamp assemblies may be located forwardly of the front end of the actuator.

Abstract: A linear drive for driving a moveably mounted object comprises at least one piezoelectric actuator that can be driven by a control device. The piezoelectric actuator has a piezoelectric element held by a holding body and a transducer coupled to said element. A mechanical frictional engagement is embodied for transmitting a driving force between the transducer and the object requiring to be moved. The control device controls the piezoelectric actuator in such a way that, exploiting the mass inertia of the object, the object will be moved compliantly by the transducer during an excursion of the piezoelectric element in the direction of motion and, in the opposite direction, the transducer will slide across the object. A simple and economic linear drive is realized in that way. The transducer is coupled purely passively by the frictional engagement. It is not necessary to provide an additional device for coupling.

Abstract: The present invention is directed to sensors that use wide band gap piezoelectric films such as aluminum nitride and zinc oxide. The films can be deposited with chemical and physical methods and etched or micro machined into miniature and micro sensing elements. Various piezoelectric sensing structures such as compression mode and cantilever-type accelerometers, diaphragm-type pressure sensors, and micro sensor arrays can be manufactured with the sensing elements. They can be used in the measurements of vibration, shock, dynamic pressure, stress, and high resolution ultrasound non-destructive test at high temperature up to 800-1000° C.

Abstract: [Problems] To provide a surface acoustic wave excitation device for efficiently exciting the surface acoustic wave on the surface of a material such as glass having free size and shape for making mechanical vibration available. [Means to Solve the Problems] The surface acoustic wave excitation device according to the present invention comprises a non-piezoelectric member 30 such as glass, a piezoelectric member 20, interdigital transducers 11 interposed between the non-piezoelectric member 30 and the piezoelectric member 20, and pre-pressurizing means 42 for pressing the piezoelectric member 20 onto the non-piezoelectric member 30 by way of the interdigital transducers. Alternating voltage is applied to the interdigital transducers 11 for exciting the surface acoustic wave on the non-piezoelectric member 30.

Abstract: The invention relates to a piezoelectric motor comprising a piezoelectric component that is connected to a resonator and a two-dimensional resonator that interacts with a movable. element, the resonator having principal surfaces that are parallel to each other and that are also identical in shape and size. The invention further relates to methods for producing such piezoelectric motors, wherein the resonators are manufactured by cutting a profiled, extruded bar into lengths or by cutting, preferably by punching, from sheet metal having constant thickness. Finally, this invention relates to a method for exciting such a piezoelectric motor, wherein the excitation frequency or frequencies is/are generated by the control electronics as a function of time in response to the respective peak current and/or in response to the respective phase minimum between current and voltage and/or in response to the change in phase.

Abstract: Temporary assembling is carried out by inserting an ion conducting actuator into a groove which is provided at a central portion of a substrate. Thereafter, a bump is pressed by forcing in a direction of a surface of the substrate while carrying out leveling and thrust control, by a flat portion of a pedestal having a recess which is provided such that the ion conducting actuator is not crushed. At this time, due to a deformation of the bump which is pressed, the electrical connections are carried out assuredly, and the ion conducting actuator is held mechanically by both sides.

Abstract: The invention relates to a piezoactuator (1) comprising a piezoelectric body (4) and elements for pre-tensioning the piezoelectric body, consisting of a first (2) and a second (3) connecting element for transferring forces to the piezoelectric body (4). The actuator is provided with an element (6) for transferring tensile/pressure forces between the connecting elements (2, 3), said element being at least partially located in a gap (5) in the form of a bore in the piezoelectric body (4). According to the invention, the piezoactuator (1) is set to a defined working curve using the pre-tensioning elements (2, 3, 6). The piezoelectric body (4) is preferably produced by the lamination of piezoelectric layers, into which a gap is drilled after lamination and the component is subsequently sintered.

Abstract: A piezoelectric vibrator has a piezoelectric vibrating piece having a base portion, a free end, and an intermediate portion disposed therebetween. Each of a pair of covers has a main surface and at least two recesses formed in the main surface. The covers are connected together so that the recesses of the covers form a hermetically sealed cavity into which the piezoelectric vibrating piece of the piezoelectric vibrating plate extends in a state in which the piezoelectric vibrating piece is capable of undergoing oscillating movement. The recesses of each of the covers extend to different depths from the main surface thereof so that during oscillating movement of the piezoelectric vibrating piece, the free end of the piezoelectric vibrating piece is prevented from contacting any one of the covers by contact between the intermediate portion of the piezoelectric vibrating piece and the main surface of the one cover.

Abstract: A device with a piezoelectric actuator (1) comprises two faces (2, 3) and two electroconductive contact paths (4, 5), each traversing the actuator (1) starting from at least one face (3). The actuator is clamped between two metallic plates (6, 7), each arranged against a face (2, 3). The piezoelectric actuator further comprises an electroinsulating layer (8) arranged between each face 92, 3) and the corresponding metallic plate (6, 7).

Abstract: A compact vibrator support structure has a very high “vibration confinement effect”, and includes a vibrator, vibrator support members, and a vibrator base, which supports the vibrator in midair via the vibrator support members and is made of a material having a specific gravity of about 3.0 or above. Since the high vibration confinement effect of the vibrator support structure reduces leakage of vibration from the vibrator base, the stability of the vibration of the vibrator is greatly improved, thereby increasing the detecting accuracy of angular velocity. This eliminates the need to enlarge the vibrator base or to adhere a weight thereto, resulting in a miniaturized vibrating gyroscope.

Abstract: An improved electric connecting element for piezoelectric plates has an elastic section connecting to an electric connection spot of a piezoelectric plate. The elastic section has one end extending to form a latch section to fasten to a circuit board and another end extending upwards above the piezoelectric plate to form a retaining section to constrain the piezoelectric plate from being shaken loose. Thereby the piezoelectric plate has a better electric connection and can be prevented from escaping under excessive shaking.

Abstract: A single piezoelectric is excited at a first frequency to cause two vibration modes in a resonator producing a first elliptical motion in a first direction at a selected contacting portion of the resonator that is placed in frictional engagement with a driven element to move the driven element in a first direction. A second frequency excites the same piezoelectric to cause two vibration modes of the resonator producing a second elliptical motion in a second direction at the selected contacting portion to move the driven element in a second direction. The piezoelectric is preloaded in compression by the resonator. Walls of the resonator are stressed past their yield point to maintain the preload. Specially shaped ends on the piezoelectric help preloading. The piezoelectric can send or receive vibratory signals through the driven element to or from sensors to determine the position of the driven element relative to the piezoelectric element or resonator.

Abstract: An electrically driven signal unit is adapted for one-step assembly or injection molding with a device housing to vibrate, flex, beep or emit audio signals, or to sense and provide tactile feedback or control. The signal unit is a package with one or more active areas each containing a layer of ferroelectric or piezoelectric material, connected by inactive areas which may position, align and conduct electricity to the active areas. The active areas may be coupled over a region to transmit compressional, shear or flexural wave energy into the housing, or may contact at discrete regions while bending or displacing elsewhere to create inertial disturbances or impulses which are coupled to create a tactile vibration of the housing. The unit may be assembled such that the housing, the sheet or discrete areas thereof form a bender to provide tactile or sub-auditory signals to the user, or may be dimensioned, attached and actuated to produce audio vibration in the combined structure and constitute a speaker.

Abstract: A method of designing and manufacturing a piezoelectric component which includes a case, a piezoelectric resonator in the case, a terminal including an external connecting portion extending from an opening of the case, and a spring member to contact the piezoelectric resonator and the terminal in the thickness direction, includes the step of designing the spring member such that the piezoelectric resonator and the terminal are held by a holding pressure in range not larger than Fmax when a spring height is Smax, where a thickness range of the piezoelectric resonator, the terminal and the spring member is not smaller than the minimum value of Tmin and not larger than the maximum value of Tmax, a dimension, range of the case interior is not smaller than the minimum value of Wmin and not larger the maximum value of Wmax.

Abstract: A piezoelectric actuator for operating a mechanical component, in particular for an injector for metering fuel in an internal combustion engine, is proposed in which one head part and one foot part (3, 4) are present, between which a piezoelectric element (2) is clamped in the direction of operation. At least one centering body (11, 12; 14, 15) is present, which is clamped between the piezoelectric element (2) and the head part and/or the foot part (3, 4), and a clamping device (5, 6; 12, 13) is present that is arranged between the head part and the foot part (3, 4) to clamp the piezoelectric element (2). The centering body can be a cone (11, 12) or a ball (14, 15), for example.

Abstract: A compact vibrator support structure has a very high “vibration confinement effect”, and includes a vibrator, vibrator support members, and a vibrator base, which supports the vibrator in midair via the vibrator support members and is made of a material having a specific gravity of about 3.0 or above. Since the high vibration confinement effect of the vibrator support structure reduces leakage of vibration from the vibrator base, the stability of the vibration of the vibrator is greatly improved, thereby increasing the detecting accuracy of angular velocity. This eliminates the need to enlarge the vibrator base or to adhere a weight thereto, resulting in a miniaturized vibrating gyroscope.

Abstract: A sonic transducer includes a transducer body and a drive element coupled to the transducer body to produce a sonic output in response to an applied electrical input. A sense element is coupled to the sonic drive element and is configured to provide an electrical feedback output related to the sonic output. The electrical feedback output is adapted to be used to control the applied electrical input to the sonic drive element so as to control the energy delivered to the working area or tip of the transducer.

Abstract: The distance between the side surfaces of a spacer 35 is made slightly smaller than the width of the drive friction member 46, and a pair of spring plates 32 are mounted to these side surfaces. The spring plates 32 enter the movement path of the drive friction member 46 and provide a constant level of friction between the spring plates 32 and the drive friction member 26.

Abstract: A clamping device for providing temperature compensation of a piezoelectric device, such as a thermally pre-stressed bending actuator. The clamping device is configured to apply a variable clamping force to the piezoelectric device that varies in response to temperature changes proximate the piezoelectric device. The variable clamping force applied to the piezoelectric device alters its operating characteristics to provide temperature compensation of the device.

Abstract: An electrically driven signal unit is adapted for one-step assembly or injection molding with a device housing to vibrate, flex, beep or emit audio signals, or to sense and provide tactile feedback or control. The signal unit is a package with one or more active areas each containing a layer of ferroelectric or piezoelectric material, connected by inactive areas which may position, align and conduct electricity to the active areas. The active areas may be coupled over a region to transmit compressional, shear or flexural wave energy into the housing, or may contact at discrete regions while bending or displacing elsewhere to create inertial disturbances or impulses which are coupled to create a tactile vibration of the housing. The unit may be assembled such that the housing, the sheet or discrete areas thereof form a bender to provide tactile or sub-auditory signals to the user, or may be dimensioned, attached and actuated to produce audio vibration in the combined structure and constitute a speaker.

Abstract: A stator includes a longitudinal-vibration sensing electrode. The stator also includes a torsional-vibration sensing piezoelectric element and a torsional-vibration sensing electrode plate for sensing torsional vibrations. A voltage signal from the torsional-vibration sensing electrode plate or a voltage signal from the longitudinal-vibration sensing electrode is sensed. Then, a drive voltage signal for driving the stator is generated in a self-excited oscillation drive circuit in such a manner that an actual vibrational frequency of the stator substantially coincides with a resonance frequency. Thereafter, the generated drive voltage signal is applied between a drive electrode and each one of first and second electrode plates.

Abstract: A piezoelectric resonator arrangement comprises a mount having at least two mounting elements on a base structure and at least one laminar piezoelectric resonator that is clamped between the mounting elements, of which at least one impinges on the resonator with a force. In order to obtain the oscillation and resonance characteristics in a manner as free as possible of influence from the mounting or, respectively, contacting, and over a large temperature range in order also to minimize the temperature-caused hysteresis of the resonance characteristics, the mounting elements abut immediately and directly on the resonator and fix this resonator in the arrangement without the use of adhesive, and the points of contact of the mounting elements with the resonator are located essentially in one plane that lies essentially parallel to the plane of the resonator, and, in addition, the mounting and contacting forces exerted by the mounting elements lie essentially parallel to the plane of the resonator.

Abstract: A piezo-electric actuator is rigidly mounted for a portion of one surface and provided with opposing electrodes for application of a bias. Because the mounted portion is constrained from deformation, the piezo-electric actuator deforms in a bending manner upon application of a bias. The actuator is provided with a mirror surface for selective reflection of an incident light beam in accordance with a bending deformation of the actuator. The actuator can also modulate a light beam by selectably deflecting into the light path to thereby block the light beam.