Abstract: In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a liquid metal is disclosed. The relay operates by means of a plurality of bending mode piezoelectric elements used to cause a pressure differential in a pair of fluid chambers. The piezoelectric elements act upon a membrane which in turn acts upon a fluid which fills the chambers. The differential pressure causes the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Abstract: A piezoelectric element includes a plurality of piezoelectric layers which contain a bismuth layer compound as the main component of the piezoelectric ceramic composition. The piezoelectric layers are provided with electrodes containing Pd as a main component so that the piezoelectric layers vibrate. At least one of the electrodes and the piezoelectric ceramic composition contains Ag.

Abstract: A bending transducer has a piezoelectret carried on a substrate of electrically insulating material. An electrically conductive coating, such as a foil, a grid foil, a grid mesh, or mutually parallel strips, connects the inner electrode of the piezoelectret to the substrate and forms electrical contact with the inner electrode at a number of points. The bending transducer is particularly suited for driving a drafting, weaving or knitting machine in the textile industry. The bending transducer is produced by connecting a substrate of electrically insulating material with a piezoelectret having an inner electrode facing towards the substrate, and placing an electrically conductive coating between the substrate and the piezoelectret such that electrical contact is made between the conductive coating and an inner electrode of the piezoelectret at a plurality of locations.

Abstract: In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a liquid metal is disclosed. The relay operates by means of a longitudinal displacement of a piezoelectric element in extension mode displacing a liquid metal drop and causing it to wet between at least one contact pad on the piezoelectric element or substrate and at least one other fixed pad to close the switch contact. This motion of the piezoelectric element is rapid and causes the imparted momentum of the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Abstract: A piezoelectric actuator, for example for actuating a mechanical component, is proposed, which has a multilayered structure of piezoelectric layers and internal electrodes (2, 3) disposed between them. As a conductive surface, a first external electrode (6) is affixed to a respective side surface and is contacted by the respective internal electrodes (2, 3), and a second net-like or woven cloth-like external electrode (7) is disposed on the first external electrode (6). In the regions of the piezoelectric layers, which have respective internal electrodes (2, 3) that are respectively contacted on opposite sides from one another, there is a passive zone (10) without an internal electrode layer. The ceramic piezoelectric material—at least in the passive zone (10)—and the material of the second external electrode (7) have almost the same thermal expansion coefficient, by means of which the influence of mechanical stresses in the piezoelectric actuator can be reduced.

Abstract: A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of &agr;-tantalum.

Abstract: An electronic component comprises a substrate having a surface on which an electrode is formed and an SAW circuit element having a surface on which a circuit is formed. The circuit element is held such that the surface of the circuit element and the surface of the substrate are opposed to each other. A bump electrode joins the circuit on the circuit element and the electrode of the substrate together, and a sealing material joins the circuit element and the substrate together in the periphery of the space between the circuit-forming surface of the circuit element and the substrate. The space between the circuit-forming surface of the circuit element and the substrate is hermetically sealed by the circuit element, the substrate, and the sealing material. Advantageously, a low-temperature soldering material such as solder, or an adhesive, is used as the sealing material.

Abstract: A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of &agr;-tantalum.

Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.

Abstract: An electroactive bender actuator includes one or more electroactive layers disposed at least in part between pairs of spaced electrode layers. At least a portion of the outer surface of the actuator is coated with a coating material in order to enhance the performance of the actuator, reduce the likelihood of electrical shorting between the electrode layers and improve wear resistance. The coating may be applied to the actuator by a vapor deposition, spraying or dipping process. Masking may be used to leave a selected area of the actuator outer surface uncoated.

Abstract: The invention provides a piezoelectric device having a structure which resists impact from the exterior and which can enhance electrical conductance between an electrode side of a package base and a piezoelectric resonator element. A piezoelectric device having a structure in which a piezoelectric resonator element is bonded to electrodes provided on a package base, includes underlying exposed electrodes as mounting electrodes which are provided on the package base and on which the piezoelectric resonator element is mounted; and gold-plated electrodes which are provided on the package base and to which a driving voltage is carried via conduction paths; in which the underlying exposed electrodes and the gold-plated electrodes are connected to each other with conductive adhesives provided therebetween, and the piezoelectric resonator element is bonded to the underlying exposed electrodes with silicone-based conductive adhesives provided therebetween.

Abstract: Multiple layer elements for a transducer array are provided. Each element comprises two or more layers of transducer material. Various of the elements include one or more of: (1) multiple-layer, multiple-dimensional arrays where the layers are electrically connected through asperity contact, (2) multiple layer array of elements where air or gas separates at least two elements, (3) an even number of layers where each layer is electrically connected through asperity contact, (4) multiple-layers where each layer comprises transducer material and electrodes in a substantially same configuration, and (5) electrically isolating electrodes on layers by kerfing or cutting after bonding the layers together.

Abstract: A surface acoustic wave device comprising a substrate having a piezoelectric function on a surface thereof, and an electrode film having a four-layer structure comprising, from underneath, a first layer comprising Ti, a second layer comprising Al or an Al alloy, a third layer comprising an intermetallic compound, a silicide or a CuAl2, and a fourth layer comprising Al or an Al alloy on the substrate.

Abstract: A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed on the piezoelectric substrate and made of a metal or an alloy having a higher specific weight than that of the piezoelectric material of the piezoelectric substrate so as to generate shear horizontal waves. The interdigital transducer includes a plurality of electrode fingers. A ratio of the electrode finger width relative to the electrode finger width plus the space between adjacent electrode fingers is about 0.55 to about 0.85.

Abstract: Of the first sheet formed of piezoelectric materials and the second sheet formed of prescribed materials, the upper electrode layer formed of conduction materials is formed on one surface of the first sheet and the lower electrode layer formed of conduction materials is formed on the other surface of said first sheet or on one surface of the second sheet. And the first and the second sheets are piled and densified having the lower electrode layer; between, and a piezoelectric actuator will be manufactured by patterning the upper electrode layer or the lower electrode layer in order to form multiple electrodes corresponding respectively to each pressure chamber of the pressure chamber forming unit.

Abstract: A method for producing a surface acoustic wave device includes the steps of forming a resist pattern corresponding to an interdigital electrodes transducer onto a piezoelectric substrate; forming a first electrode layer comprising elemental Ti or a Ti-based alloy onto the piezoelectric substrate and the resist pattern R; forming a second electrode layer which comprises elemental Cu or an Al-based alloy containing at least 2% by weight of Cu (this layer may have a multilayered structure) onto the first electrode layer; and removing both the resist pattern R and unnecessary parts, if any, of the first electrode layer 31 and the second electrode layer to simultaneously pattern the first electrode layer and the second electrode layer. A surface acoustic wave device is constructed according to the above method.

Abstract: Disclosed is a piezoelectric transformer provided with node point recognition patterns for visually indicating respective node points, at which external electrical connection of input and output electrodes is made, thereby allowing the external electrical connection of the input and output electrodes to be easily achieved in a manual wire soldering process, while allowing the wire soldering process to be automatically carried out irrespective of the size of the piezoelectric transformer. The piezoelectric transformer, which includes a piezoelectric member, an input electrode, an output electrode, and a ground electrode, the electrodes being printed on the piezoelectric member, further includes a plurality of node point recognition patterns extending radially about the center of each of the electrodes while being spaced apart from the center of the electrode by a desired radial distance.

Abstract: A piezoelectric actuator, for example for actuating a mechanical component, is proposed, which has a multilayered structure of piezoelectric layers and internal electrodes (2, 3) disposed between them. As a conductive surface, a first external electrode (6) is mounted on a respective side surface and is contacted by the respective internal electrodes (2, 3). An elastic contact is used to supply electrical voltage by means of connections (4, 5; 15) to a second net-like or woven cloth-like external electrode (7), which is disposed on the first external electrode (6).

Abstract: A method of bonding a piezoelectric element and an electrode, including the steps of forming a first coating of a material selected from the group consisting of Au, Al, Zn, Cu, and Sn on a bonding surface of the piezoelectric element, and forming a second coating of a material selected from the group consisting of Au, Al, Zn, Cu, and Sn on a bonding surface of the electrode. The combination of the materials of the first and second coatings is preferably Au/Au, Au/Al, Zn/Cu, or Sn/Cu. The method further includes the step of bringing the first and second coatings into close contact with each other and heating them under pressure to form a metallic bond or intermetallic compound between the first and second coatings, thereby bonding the piezoelectric element and the electrode.

Abstract: A stacked piezoelectric device having high durability and a method of fabrication thereof facilitating easy control of the process of fabrication, comprising a piezoelectric stack (10) having a first side electrode (11) and a second side electrode (12), piezoelectric layers (131, 132) and internal electrode layers (141, 142) having substantially the same area, internal electrode layers (141, 142) having ends thereof exposed to the side (101) of the stack (10), the first side electrode (11) including first insulative portions (111) formed at the ends of alternate ones of the internal electrode layers (141) and a first conductive portion (121) formed over the first insulative portions (111), a second side electrode (12) being similarly configured to form insulative portions (112) at the other ends, the first and second insulative portions (111, 112) being formed of an insulative resin, while the first and second conductive portions (112, 122) being formed of a conductive resin.

Abstract: The present invention relates to electroactive polymers that are pre-strained to improve conversion from electrical to mechanical energy. When a voltage is applied to electrodes contacting a pre-strained polymer, the polymer deflects. This deflection may be used to do mechanical work. The pre-strain improves the mechanical response of an lo electroactive polymer. The present invention also relates to actuators including an electroactive polymer and mechanical coupling to convert deflection of the polymer into mechanical work. The present invention further relates to compliant electrodes that conform to the shape of a polymer. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: The present invention relates to electroactive polymers that are pre-strained to improve conversion from electrical to mechanical energy. When a voltage is applied to electrodes contacting a pre-strained polymer, the polymer deflects. This deflection may be used to do mechanical work. The pre-strain improves the mechanical response of an electroactive polymer. The present invention also relates to actuators including an electroactive polymer and mechanical coupling to convert deflection of the polymer into mechanical work. The present invention further relates to compliant electrodes that conform to the shape of a polymer. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: The present invention includes a method of fabricating a piezoelectric composite device comprising steps of (a) disposing a first layer of electrically non-conductive film over the first layer of tape; (b) disposing a first electrically conductive lead over the first layer of electrically non-conductive film; (c) disposing a piezoelectric wafer over the first electrically conductive lead and the first layer of electrically non-conductive film; (d) disposing a second electrically conductive lead over the piezoelectric wafer; (e) disposing a second electrically non-conductive film over the second electrically conductive lead and the wafer, wherein the layers of electrically non-conductive film, the electrically conductive leads, and the wafer form a laminate assembly; and (f) consolidating the laminate assembly at a predetermined temperature and pressure.

Abstract: Drive electrodes and sensing electrodes are formed on a front face of a piezoelectric body of a vibrator. A first reference electrode is formed on a rear face. Second reference electrodes are formed on side faces of arm bars of the vibrator at a position corresponding to the sensing electrodes. The second reference electrodes are connected to the first reference electrode formed on said rear face.

Abstract: Disclosed is a piezoelectric resonator that has a piezoelectric plate that has formed thereon a pair of main electrodes and has formed thereon a second electrode surrounding the peripheral edge of the main electrode with a gap being provided between the second electrode and a peripheral edge of the main electrode. The material of the main electrode and the material of the second electrode are differentiated from each other. As the material of the second electrode there is used a material the density of that is lower than the material of the main electrode. With this construction, there is obtained means for suppressing the occurrence of spurious due to an inharmonic mode generating in the high frequency piezoelectric resonator.

Abstract: A surface acoustic wave device 1 has a substrate 2 made of quartz, a pair of inter digital transducer-shape electrode 3 made of an aluminum layer, an electrode pad 4, and a pair of lattice-shaped reflectors 5 made of the same material as the electrode 3. The crystal structure of the aluminum layer composing the electrode 3 is a twin crystal structure, where crystal grains of the (−1 1 1) plane and the (0 0 2) plane and crystal grains of the (1 −1 −1) plane and the (0 0 −2) plane are in a twin crystal relationship with the (−1 1 −1) plane and the (1 −1 1) plane of aluminum as the twin boundaries. Also, the {1 1 1} plane of the aluminum layer is oriented to an 8° inclination relative to the {0 1 0} plane of quartz composing the substrate 2.

Abstract: A piezoelectric element, for generating drive force for an injector, provided with a plurality of alternately stacked piezoelectric layers expanding and contracting in accordance with application of voltage and internal electrode layers for supplying the applied voltage, wherein the piezoelectric layers contain voids, but the total thickness in the stacking direction of the voids contained in any one piezoelectric layer is not more than ⅓ of the thickness in the stacking direction of the piezoelectric layer and the thickness in the stacking direction of each of the voids is not more than 50 &mgr;m.

Abstract: The present invention is a method for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrodes is structured with a plurality of stacked adjustment layers, each of which has distinct etching properties from any adjacent adjustment layers. Also as part of the same invention is a resonator structure in which at least one electrode has a plurality of stacked layers of a material having different etching properties from any adjacent adjustment layers, and each layer has a thickness corresponding to a calculated frequency increment in the resonant frequency of the resonator.

Abstract: A piezoelectric ceramic body includes a multiplicity of insulating layers, arranged one on top of the other, made of a piezoactive ceramic material, the insulating layers being separated from each other at least in areas by internal electrodes, of which at least one has a silver-containing material at least in areas. The material of the silver-containing internal electrode furthermore has a component reducing or inhibiting the diffusion of silver from the internal electrodes into an insulating layer, in particular a ceramic component on the basis of a PZT ceramic.

Abstract: A modification of the traditional unimorph flextensional actuator is provided by replacing the metal shim with an electrically conducting oxide. Comprised of lead zirconate titanate and zinc oxide that is co-sintered, the laminate composite obtains large axial displacements while maintaining moderate axial loads. The varistor properties of zinc oxide dictate that the conductance increases several orders of magnitude when a critical electric field is applied. The versatility of the processing over other actuator system facilitates miniaturization, while maintaining comparable performance characteristics. Functional gradients in the material properties are created in the green body by layering thin tape cast sheets. The unique PZT-zinc oxide composite not only controls the piezoelectric gradient, but permits control of the sintering kinetics leading to the processing of either flat or highly domed structures.

Abstract: A piezo actuator (1) is disclosed that has a contact lug (20, 21) for the electrical contacting of an electrode (14, 15) of an actuator member (11). Due to an expansion and contraction of the actuator member, a mechanical stress occurs in the contact lug that is minimized in that the contact lug has a device for adapting the expanse to a dimension of the expansion and contraction. The device is, for example, a deformation material in the form of a wire weave. The piezo actuator is utilized for the drive of an injection valve in an internal combustion engine.

Abstract: As the electrode material of a surface acoustic wave device, a laminated body laminating a second metal layer 5 on a first metal layer 4 is stacked up in two or more stages, and the first metal layer 4 is a metal of which coefficient of diffusion to Al is smaller than the coefficient of self diffusion of Al, and the second metal layer 5 is composed of an Al alloy of three elements or more containing at least one or more metals which forms solid solution with Al at ordinary temperature, and at least one or more metals forming segregation at the grain boundary of Al or an intermetallic compound with Al at ordinary temperature, and therefore the surface acoustic wave device excellent in electric power tolerance, compatible with the conventional pattern forming technology, stable thermally, and capable of preventing increase of insertion loss can be obtained.

Abstract: The present invention relates to a method for the parallel manufacturing of a plurality of piezoelectric actuators as well as a corresponding piezoelectric actuator.

Abstract: A wire bonding method for ultrasonically joining two connecting electrodes with a wire includes the steps of forming at least one of the connecting electrodes with tantalum and forming the wire of one of a metallic wire having a fracture load of about 21 g or greater and a metallic wire having a fracture stress of 290 N/mm2 or greater.

Abstract: A piezoelectric resonator which can be used as part of a piezoelectric component prevents self-welding of electrodes including silver provided on the surface of a piezoelectric substrate with silver coated terminals with abut with electrodes by forming high fusion point metals on the electrodes 3. The high fusion point metal is made by using Ni, Cr, W, Ti, Mo, Ni—Cu (monel) or their alloy. The thickness of the high fusion point metal is preferably less than about 1/10 of the thickness of the electrode 3 or less than 1 &mgr;m.

Abstract: Embodiments of actuators having an active member including a polymer having a surface, an electrolyte coupled to the surface, and an electrolyte are provided. Actuators which, when an electrical potential is applied across the electrolyte between the active member and the counter electrode, exert force per unit area of at least 10 MPa are described. Particular designs utilizing stretch aligned conducting polymers as active members are discussed.

Abstract: A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed thereon. The surface acoustic wave resonator operates using a shear horizontal wave, and the interdigital transducer includes an electrode film made of a metal containing W or Ta as its main component and a thin film made of Al.

Abstract: In a piezoelectric transformer device (36), a plurality of inner electrodes are stacked on each other on the left side. These inner electrodes are alternately connected to each other through interlevel connection conductors to constitute two inner electrode groups. A secondary output electrode in the form of a mesh is formed near the end portion of the device (36) on the right side. Only primary input electrodes (1,2) connected to the two inner electrode groups, a secondary output electrode (40), and the lead electrode of the secondary output electrode in the form of a mesh are exposed on the same surface of the device.

Abstract: A surface acoustic wave device includes a quartz substrate having an angle .theta. of Euler angles (0, .theta., 90.degree.) that satisfies 122.degree..ltoreq..theta..ltoreq.131.degree.. An interdigital transducer made of an electrode material including at least one of Ta and W is disposed on the quartz substrate.

Abstract: A biocompatible, implantable microactuator (82) for a fully implantable hearing aid system includes a hollow body (84) that has an open first end (88) and, open first and second faces (94a and 94b). Flexible diaphragms (92, 96a and 96b), respectively covering the end (88) and faces (94a and 94b), hermetically seal the body (84). An incompressible liquid (98) fills the body (84). Transducers (102), provided by laminated, stress-biased unimorphs (32 or 62) that are mechanically coupled to the flexible diaphragms (96a and 96b), deflect the diaphragms (96a and 96b) in response to an electrical driving signal. Deflections of the diaphragms (96a and 96b) are coupled by the liquid (98) to the first flexible diaphragm (92). The unimorphs (32 or 62) include a layer of biocompatible metal (36 or 66-68) deposited on one side of a biocompatible piezoelectric ceramic plate (34 or 64) to stress-bias the plate (34 or 64). A thin, biocompatible electrode (44 or 72) coats the other side of the plate (34 or 64).

Abstract: The present invention provides a piezoelectric film element with improved adhesion between a first protective film and a substrate. This invention also provides a method of manufacturing a piezoelectric film element, which makes it possible to selectively form, by a hydrothermal synthesis, a piezoelectric film with excellent piezoelectric properties in a specified area. This piezoelectric element comprises, over a substrate 12: a piezoelectric film; a common electrode and an individual electrode located to hold the piezoelectric film in between; a first protective film 14 which is formed over almost the entire surface of the substrate 12 and which protects the substrate 12 to avoid the formation of the piezoelectric film directly over the substrate 12; and a base film 16 which is formed over the first protective film 14 in the area for forming the piezoelectric film, and which functions as a base when the piezoelectric film is caused to grow to be formed.

Abstract: A plate material 1 and piezoelectric ceramics 2 are bonded together through an alloy layer 3 formed by an alloy forming reaction due to the mutual diffusion phenomena between a liquid metal including at least galium and the plate material 1 or the piezoelectric ceramics 2, or the mutual diffusion phenomena between the liquid metal and metal powder. The alloy layer 3 may include at least one or more of indium, tin and zinc and at least one or more of copper, silver, gold, and palladium. Further, a metal may be provided on at least one of the bonded surfaces of the plate material 1 and the piezoelectric ceramics 2. This metal may include one or more of copper, silver, gold, tin and palladum. In addition, a metal layer may be formed on the bonded surface 1a side of the plate material 1. Still further, an amorphous layer may be formed on at least one of the parts between the plate material 1 and the alloy layer 3, and between the piezoelectric ceramics 2 and the alloy layer 3.

Abstract: A quartz oscillator for detecting a physicochemical change in a substance to be measured comprises a first electrode having at least two separate electrode portions for contact with the substance to be measured, and a second electrode. A chemical measuring instrument comprises a piezoelectric characteristic-measuring circuit having an output signal line connected to capacitors connected in parallel to the separate electrode portions of the first electrode of the quartz oscillator. An input signal line of the piezoelectric characteristic-measuring circuit is connected to the second electrode of the quartz oscillator. A voltage application circuit is connected to one of the separate electrode portions of the first electrode for applying a voltage between the separate electrode portions. An electrical current-measuring circuit is connected to the other of the separate electrode portions which is electrically grounded.

Abstract: An improved ultrasound transceiver array for permitting improved imaging is taught. The array may be either a two dimensional array for volumetric imaging or a one dimensional array of elements shaped to permit a more precise beam focus for finer resolution imaging. An Nd:YAG laser is used to machine a workpiece from both ends to produce kerfs which taper inwardly from the transceiving side of the array thereby permitting a stronger ultrasound signal and clearer imaging.

Abstract: A stacked piezoelectric transformer is formed by stacking piezoelectric ceramic sheets each formed with internal electrodes at their predetermined regions, and has portions formed with the internal electrodes as input portions, and a portion not formed with the internal electrodes as an output portion. Ceramic layers, which are formed by mixing a small amount of metal powder to a ceramic powder made of the same material as that of the piezoelectric ceramic sheets, are formed among layers of the output portion. A method of manufacturing a stacked piezoelectric transformer includes the steps of forming an internal electrode at a predetermined region of a piezoelectric ceramic sheet, forming a ceramic material at the remaining region of the piezoelectric ceramic sheet, and stacking a plurality of piezoelectric ceramic sheets each obtained in this manner.

Abstract: An acoustical resonator and a method for making the same. A resonator according to the present invention includes a layer of piezoelectric material sandwiched between first and second electrodes. The first electrode includes a conducting sheet having a RMS variation in height of less than 2 .mu.m. The resonator bridges a cavity in a substrate on which the resonator is constructed. The resonator is constructed by creating a cavity in the substrate and filling the same with a sacrificial material that can be rapidly removed from the cavity after the deposition of the various layers making up the resonator. The surface of the filled cavity is polished to provide a RMS variation in height of less than 0.5 .mu.m. The first electrode is deposited on the polished surface to a thickness that assures that the RMS variation in height of the metallic layer is less than 2 .mu.m. The piezoelectric layer is deposited on the first electrode and the second electrode is then deposited on the piezoelectric layer.

Abstract: In the embodiments described in the specification, electrodes are bonded to the surface of a ceramic piezoelectric layer by supporting electrodes having a reduced dimension on a flexible dielectric film and placing the dielectric film under tension to expand the film and the electrodes sufficiently to conform the electrodes to the desired electrode pattern on the ceramic piezoelectric layer. The electrodes are then bonded to the piezoelectric layer with an adhesive bonding agent under pressure applied hydraulically so as to be distributed uniformly throughout the surface of the piezoelectric layer. In one embodiment the dielectric film also carries conductor arrays for connecting the electrodes to remote driver chips at locations spaced from the surface of the piezoelectric layer.

Abstract: A plate material 1 and piezoelectric ceramics 2 are bonded together through an alloy layer 3 formed by an alloy forming reaction due to the mutual diffusion phenomena between a liquid metal including at least galium and the plate material 1 or the piezoelectric ceramics 2, or the mutual diffusion phenomena between the liquid metal and metal powder. The alloy layer 3 may include at least one or more of indium, tin and zinc and at least one or more of copper, silver, gold, and palladium. Further, a metal may be provided on at least one of the bonded surfaces of the plate material 1 and the piezoelectric ceramics 2. This metal may include one or more of copper, silver, gold, tin and palladum. In addition, a metal layer may be formed on the bonded surface 1a side of the plate material 1. Still further, an amorphous layer may be formed on at least one of the parts between the plate material 1 and the alloy layer 3, and between the piezoelectric ceramics 2 and the alloy layer 3.

Abstract: An ink jet print head is provided with high integration in which a substrate formed with a wiring pattern of a driver circuit is adhered to an actuator plate to provide a joined body, which is formed with a number of channels serving as ink chambers. An actuator is formed between the channels, and conductive films serving as driving electrodes are formed over the substrate and the actuator plate at a part of side walls of the channels by electrically connecting to a wiring pattern by an oblique vapor deposition method and an electrolytic plating method. Accordingly, voltage can be directly applied to the driving electrodes from the driver circuit.

Abstract: In the electrode of a surface acoustic wave apparatus, the element concentration of copper in the aluminum alloy film is higher in the neighbors of grain boundary than the concentration within the crystal grain, and segregates to the neighbors of crystal grain boundary. In the electrode of this surface acoustic wave apparatus, the concentration of copper existing in the form of copper element, rather than in the form of intermetallic compound of copper and aluminum precipitated to the crystal grain boundary, is higher in the crystal grain boundary than the concentration within the crystal grain, and is in the segregation state. A ratio of a copper concentration in the neighbors of grain boundary to a copper concentration within the crystal grain in an aluminum alloy film forming an electrode of a surface acoustic wave apparatus is greater than 1.6. It is preferable that an electrode formed on a surface of the piezoelectric substrate is made of an aluminum alloy film doped with a copper in a range from 0.