Multilayer Patents (Class 310/364)
  • Patent number: 11411168
    Abstract: A method of forming a piezoelectric thin film can be provided by heating a substrate in a process chamber to a temperature between about 350 degrees Centigrade and about 850 degrees Centigrade to provide a sputtering temperature of the substrate and sputtering a Group III element from a target in the process chamber onto the substrate at the sputtering temperature to provide the piezoelectric thin film including a nitride of the Group III element on the substrate to have a crystallinity of less than about 1.0 degree at Full Width Half Maximum (FWHM) to about 10 arcseconds at FWHM measured using X-ray diffraction (XRD).
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: August 9, 2022
    Assignee: Akoustis, Inc.
    Inventors: Craig Moe, Jeffrey B. Shealy, Mary Winters
  • Patent number: 11323088
    Abstract: An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 ???Mg?170 ? may be satisfied, ?Mg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: May 3, 2022
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Tae Kyung Lee, Tae Yoon Kim, Sang Kee Yoon, Chang Hyun Lim, Jong Woon Kim, Moon Chul Lee
  • Patent number: 11312137
    Abstract: A piezoelectric element includes: a first electrode provided on a base; a piezoelectric layer provided on the first electrode and containing a complex oxide which has a perovskite structure and contains potassium, sodium, and niobium; and a second electrode provided on the piezoelectric layer, in which the first electrode contains platinum, the first electrode is (111) preferentially oriented, and a platinum atom contained in the first electrode is bonded to an oxygen atom at an interface between the first electrode and the piezoelectric layer.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: April 26, 2022
    Inventors: Kazuya Kitada, Masayuki Omoto, Hidemichi Furihata, Kazuhide Gomi, Hidetoshi Tako
  • Patent number: 11245380
    Abstract: In an acoustic wave device, a piezoelectric body is directly or indirectly laminated on a silicon support substrate, and a functional electrode is provided on the piezoelectric body. A support layer is directly or indirectly laminated on the silicon support substrate, and the support layer is located outside the functional electrode when viewed in plan view. A silicon cover layer is provided on the support layer that includes an insulating material, and a space A is defined by the silicon support substrate, the support layer, and the silicon cover layer. The electric resistance of the silicon support substrate is higher than the electric resistance of the silicon cover layer.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: February 8, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Makoto Sawamura, Seiji Kai, Yutaka Kishimoto, Yuzo Kishi
  • Patent number: 11164698
    Abstract: Disclosed is a ceramic electronic component having external electrodes on each of opposing ends of a rectangular parallelepiped ceramic component body incorporating a functional portion. Facing directions of two opposing faces, other two opposing faces, and remaining two opposing faces of the ceramic component body are defined as first, second, and third directions, respectively, and dimensions along the respective directions are defined as first to third direction dimensions. Under this condition, the external electrode is of a two-face type continuously including a first face portion disposed on one face in the first direction and a second face portion disposed on one face in the third direction. A main layer portion of a protective portion is disposed on another face in the third direction and a first wraparound portion of the protective portion is disposed continuously with the main layer portion on each of the two faces in the second direction.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: November 2, 2021
    Assignee: Taiyo Yuden Co., Ltd
    Inventors: Wakaaki Murai, Fumi Mori
  • Patent number: 11158455
    Abstract: An electronic component includes a capacitor body including a dielectric layer and first and second internal electrodes, and a first to sixth surfaces, the first and the second internal electrodes being exposed through the third and the fourth surfaces, respectively; first and second external electrodes respectively extending from the third and fourth surfaces of the body to a portion of the first surface and respectively connected to the first and second internal electrodes; a shielding layer comprising a cap portion disposed on the second surface of the capacitor body and a side wall portion disposed on the third, fourth, fifth and sixth surfaces of the capacitor body; and an insulating layer disposed between the capacitor body and the shielding layer. A lower portion of the capacitor body is exposed from the insulating layer and the shielding layer.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: October 26, 2021
    Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Chan Yoon, Sang Soo Park, Hwi Dae Kim, Woo Chul Shin, Ji Hong Jo
  • Patent number: 11057017
    Abstract: A bulk-acoustic wave resonator includes a substrate; a lower electrode formed on the substrate, and at least a portion of the lower electrode is formed on a cavity; a piezoelectric layer formed on the lower electrode; an upper electrode formed on the piezoelectric layer; a membrane layer formed below the lower electrode and forming the cavity together with the substrate; and a protruding portion formed on the membrane layer and further formed in the cavity in a direction that extends away from the membrane layer.
    Type: Grant
    Filed: June 4, 2018
    Date of Patent: July 6, 2021
    Assignee: Samsung Electro-Mechanics Co., Ltd
    Inventors: Tae Yoon Kim, Won Han, Chang Hyun Lim
  • Patent number: 10964880
    Abstract: A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: March 30, 2021
    Assignees: THE REGENTS OF THE UNIVERSITY OF MICHIGAN, VESPER TECHNOLOGIES INC.
    Inventors: Karl Grosh, Robert J. Littrell
  • Patent number: 10903814
    Abstract: A bulk acoustic wave resonator includes a membrane layer, together with a substrate, forming a cavity, a lower electrode disposed on the membrane layer, a piezoelectric layer disposed on a flat surface of the lower electrode and an upper electrode covering a portion of the piezoelectric layer. An overall region at a side of the piezoelectric layer is exposed to the air. The side of the piezoelectric layer has a gradient of 65° to 90° with respect to a top surface of the lower electrode.
    Type: Grant
    Filed: October 20, 2017
    Date of Patent: January 26, 2021
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Won Han, Chang Hyun Lim, Yong Suk Kim, Seung Hun Han, Sung Jun Lee, Sang Kee Yoon, Tae Yoon Kim
  • Patent number: 10875301
    Abstract: An actuator device includes: an actuator including a first element contact; and a wire member including (a) a first contact connected to the first element contact and (b) a first wire configured to conduct with the first contact. A first wide portion is formed at a distal end portion of the first wire at an edge portion of the wire member. The first wide portion is disposed beyond the first element contact in a wire direction of the first wire. The first contact is disposed at a basal end portion of the first wire. The basal end portion is located further from the edge portion of the wire member than the first wide portion. The first contact is connected to the first element contact.
    Type: Grant
    Filed: December 10, 2018
    Date of Patent: December 29, 2020
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Toru Kakiuchi
  • Patent number: 10830738
    Abstract: A device for detecting environmental contaminants, diseases, and acute medical conditions related to heart failure identifies pathogens or troponins before infection or damage to heart muscles using an ultrasensitive high Q-factor AT-cut quartz crystal microbalance (QCM) that can measure from a single pg to a single fg. The device has a set of five disks of a QCM with a 10 mm diameter and a full coated bottom electrode, with an upper electrode with a center dot with different diameters labelled as 1 mm, 2 mm, 3 mm, 4 mm, and 5 mm. The full coating denoting an electrically continuous thickness of at last one monolayer. Measured parameters from the five disks include Q-factors, impedance, dissipation factors (D) and frequency shift (?f). Q-factors are used to calculate the Allman deviation ?(?) and measured frequencies are converted to mass sensitivity using the Sauerbrey mass sensitivity coefficient (K).
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: November 10, 2020
    Inventors: Selemani Seif Mziray, Thomas Thundat, Kenneth Cadien
  • Patent number: 10778179
    Abstract: An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 ???Mg?170 ? may be satisfied, ?Mg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: September 15, 2020
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Tae Kyung Lee, Tae Yoon Kim, Sang Kee Yoon, Chang Hyun Lim, Jong Woon Kim, Moon Chul Lee
  • Patent number: 10700662
    Abstract: An acoustic wave device includes: a piezoelectric substrate; and a pair of comb-shaped electrodes that is located on the piezoelectric substrate, includes a metal film, and excites a surface acoustic wave, the metal film being mainly composed of a metal having a melting point equal to or higher than a melting point of Pt, the metal film having a first region in which a crystal grain has a columnar shape and a second region that is located on and/or under the first region in a stacking direction and has less crystallinity than the first region or has an amorphous structure.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: June 30, 2020
    Assignee: TAIYO YUDEN CO., LTD.
    Inventors: Shinpei Miura, Satoshi Imasu, Takashi Matsuda, Masafumi Iwaki
  • Patent number: 10680160
    Abstract: The present disclosure is drawn to a piezoelectric thin film stack and method of preparing the same. The piezoelectric thin film stack can comprise a substrate with an oxide application surface, a metal oxide adhesive blend layer applied to the oxide application surface, and a piezoelectric film applied directly to the metal oxide adhesive blend layer.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: June 9, 2020
    Assignees: Oregon State University, Hewlett-Packard Development Company, L.P.
    Inventors: James Elmer Abbott, Jr., Peter Mardilovich, Brady Gibbons, Bryan Alexander Maack
  • Patent number: 10663636
    Abstract: A wire grid polarization apparatus includes a plurality of wire-shaped metal layers arranged in parallel to each other in a region, on which light is incident, on a side of a first surface of a transmissive substrate. The wire-shaped metal layers include aluminum or silver as a principal component. Outside the region, a sacrificial electrode having an ionization tendency greater than an ionization tendency of the wire-shaped metal layers is electrically coupled to the wire-shaped metal layers. This allows the sacrificial electrode to prevent the wire-shaped metal layers from being corroded under a condition of high temperature and high humidity. Being provided outside the region, the sacrificial electrode does not impair polarization separation performance.
    Type: Grant
    Filed: October 29, 2018
    Date of Patent: May 26, 2020
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Masaaki Aota
  • Patent number: 10418183
    Abstract: A composite electronic component includes a capacitor device and a resistor device stacked together in a height direction. The capacitor device includes a capacitor body and first and second external electrodes. The resistor device includes a base, a resistive element, first and second upper surface conductors, first and second lower surface conductors, a first connection conductor, and a second connection conductor. The upper surface of the base of the resistor device faces the lower surface of the capacitor body of the capacitor device, the first upper surface conductor is electrically connected to the first external electrode, and the second upper surface conductor is electrically connected to the second external electrode.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: September 17, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Kazuo Hattori, Isamu Fujimoto, Shinichiro Kuroiwa
  • Patent number: 10411674
    Abstract: An elastic wave device includes first and second longitudinally coupled resonator elastic wave elements aligned on a piezoelectric substrate. A second reflector of the first longitudinally coupled resonator elastic wave element and a third reflector of the second longitudinally coupled resonator elastic wave element are adjacent to each other in an elastic wave propagation direction. A ground interconnection extends in a direction intersecting with the elastic wave propagation direction and in a region between the second reflector and the third reflector. A gap in one portion of the ground interconnection includes a different acoustic velocity portion where an acoustic velocity is different from an acoustic velocity in another portion of the ground interconnection.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: September 10, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Yohei Konaka
  • Patent number: 10374140
    Abstract: A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: August 6, 2019
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Tomohide Onogi, Chikara Kojima
  • Patent number: 10355664
    Abstract: Oscillators that use resonator elements formed from langasite or one of its isomorphs are described herein. The resonator elements include crystal orientations that are stress and/or temperature compensated. The resonators vibrate at an oscillating frequency in a thickness-shear mode of vibration. The oscillating frequency can be used to derive temperature, derive pressure, and/or for frequency control applications.
    Type: Grant
    Filed: July 10, 2014
    Date of Patent: July 16, 2019
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: Mihir S. Patel, Bikash K. Sinha, Tsutomu Yamate
  • Patent number: 10332681
    Abstract: A manufacturing method for a multilayer capacitor includes alternately laminating dielectric layers and conductor layers including less than 50 included in a first arrangement and a second arrangement different from the first arrangement when viewed from a lamination direction to form a laminate in which at least one pair of the conductor layers adjacent to each other with the dielectric layer interposed therebetween are included in the first or second arrangement, pressing the laminate to stretch the conductor layers in a direction perpendicular or substantially perpendicular to the lamination direction, pressing the laminate to bend the conductor layers in the lamination direction, and forming first and second outer electrodes on laminate surfaces such that the first outer electrode is connected to the conductor layers included in the first arrangement and the second outer electrode is connected to the conductor layers included in the second arrangement.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: June 25, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Masaki Tsukida, Hiroshi Masai
  • Patent number: 10263598
    Abstract: An acoustic resonator and a method of manufacturing the same are provided. The acoustic resonator includes a resonance part including a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes; and a substrate disposed below the resonance part. The piezoelectric layer is disposed on a flat surface of the first electrode.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: April 16, 2019
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Jea Shik Shin, Sang Uk Son, Yeong Gyu Lee, Moon Chul Lee, Ho Soo Park, Duck Hwan Kim, Chul Soo Kim
  • Patent number: 10199565
    Abstract: An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: February 5, 2019
    Assignee: ROHM CO., LTD.
    Inventors: Kunio Iida, Kinya Ashikaga
  • Patent number: 10164605
    Abstract: A bulk acoustic wave (BAW) resonator includes a substrate defining a cavity, a bottom electrode disposed over the substrate and the cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer. The piezoelectric layer includes polycrystalline lithium niobate (LN) material or polycrystalline lithium tantalite (LT) material. The BAW resonator may further include an encapsulant layer formed on side and top surfaces of the piezoelectric layer. The encapsulant layer is configured to protect the LN material or the LT material of the piezoelectric layer from a release solvent previously applied to sacrificial material within the cavity in the substrate.
    Type: Grant
    Filed: January 26, 2016
    Date of Patent: December 25, 2018
    Assignee: Avago Technologies International Sales Pte. Limited
    Inventors: Dariusz Burak, Kevin J. Grannen, John Choy
  • Patent number: 10155382
    Abstract: An ink jet print head 1 includes: a pressure chamber (cavity) 7; a movable film formation layer 10 arranged on the pressure chamber 7 and including a movable film 10A defining a ceiling surface portion of the pressure chamber 7; a piezoelectric element 9 formed on the movable film 10A and including a lower electrode 11, a piezoelectric film 12 formed on the lower electrode 11, and an upper electrode 13 formed on the piezoelectric film 12; and first upper wiring 16. The upper electrode 13 includes a main electrode portion 13A constituting the piezoelectric element 9 and an extension portion 13B as second upper wiring drawn out of the main electrode portion 13A and connected to the first upper wiring 16. The first upper wiring 16 has a portion arranged between the extension portion 13B and the movable film formation layer 10, and, within this portion, the extension portion 13B is connected to the first upper wiring 16.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: December 18, 2018
    Assignee: ROHM CO., LTD.
    Inventor: Kunio Iida
  • Patent number: 10024987
    Abstract: A neutron detecting system and method. The neutron detecting system may include one or more coated substrates including a piezoelectric substrate having a first surface and a second surface opposite of the first surface, a coating of 10boron (10B) on the first surface, and a conductive backplane deposited on the second surface. The coated substrates may be stacked to form a stacked layer array. When the neutrons are captured by the coating of 10B on the coated substrates, energy will be released, causing crystal dislocation of the piezoelectric substrate, thus producing an electric signal through the conductive backplane of the coated substrates. The electric signal may be received with an amplifier to produce an amplified electric signal provided to a processor or circuitry. The processor or circuitry may send a notification signal to a visual or audible user interface indicating detection of the neutrons.
    Type: Grant
    Filed: January 20, 2015
    Date of Patent: July 17, 2018
    Assignee: Honeywell Federal Manufacturing & Technologies, LLC
    Inventors: Christopher A. Boese, George Bohnert
  • Patent number: 9837598
    Abstract: A piezoelectric bulk wave device that includes a piezoelectric thin plate that is made of LiTaO3, and first and second electrodes that are provided in contact with the piezoelectric thin plate. The piezoelectric bulk wave device utilizes the thickness shear mode of the piezoelectric thin plate made of LiTaO3. The first and second electrodes are each formed by a conductor having a specific acoustic impedance higher than the specific acoustic impedance of a transversal wave that propagates in LiTaO3. When the sum of the film thicknesses of the first and second electrodes is defined as an electrode thickness, and the thickness of the piezoelectric thin plate made of LiTaO3 is defined as an LT thickness, the electrode thickness/(electrode thickness+LT thickness) is not less than 5% and not more than 40%.
    Type: Grant
    Filed: February 28, 2014
    Date of Patent: December 5, 2017
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Hajime Kando
  • Patent number: 9818510
    Abstract: In an electronic component, an outer electrode includes a sintered layer containing a sintered metal, an insulation layer containing an electric insulation material, and a Sn-containing layer containing Sn. The sintered layer extends from each of end surfaces of an element assembly onto at least one main surface thereof so as to cover each of the end surfaces of the element assembly. The insulation layer is directly provided on the sintered layer at each of the end surfaces of the element assembly so as to extend in a direction perpendicular or substantially perpendicular to a side surface of the element assembly, and defines a portion of a surface of the outer electrode. The Sn-containing layer covers the sintered layer except for a portion of the sintered layer that is covered by the insulation layer, and constitutes another portion of the surface of the outer electrode.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: November 14, 2017
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Haruhiko Mori, Hiroyuki Otsuna
  • Patent number: 9818511
    Abstract: In an electronic component, an outer electrode includes a sintered layer including a sintered metal, a reinforcement layer not containing Sn but including Cu or Ni, an insulation layer, and a Sn-containing layer. The sintered layer extends from each end surface of an element assembly onto at least one main surface thereof to cover each end surface of the element assembly. The reinforcement layer extends on the sintered layer and covers the sintered layer entirely. The insulation layer is directly provided on the reinforcement layer at each end surface of the element assembly, extends in a direction perpendicular or substantially perpendicular to a side surface of the element assembly, and defines a portion of a surface of the outer electrode. The Sn-containing layer covers the reinforcement layer except for a portion of the reinforcement layer that is covered by the insulation layer, and defines another portion of the surface of the outer electrode.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: November 14, 2017
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Haruhiko Mori, Hiroyuki Otsuna
  • Patent number: 9735756
    Abstract: A piezoelectric device includes a piezoelectric vibrating piece and a base. The piezoelectric vibrating piece includes an excitation portion, a framing portion, a connecting portion, excitation electrodes, and extraction electrodes. The base includes a mounting terminal, a cutout portion formed on a side surface, and a cutout-portion electrode formed in the cutout portion. The cutout-portion electrode connects the mounting terminal to the extraction electrode. The extraction electrode includes a cutout-portion region connected to the cutout-portion electrode, an excitation-electrode connecting region connected to the excitation electrode, and an erosion preventing region disposed between the cutout-portion region and the excitation-electrode connecting region to prevent erosion by solder.
    Type: Grant
    Filed: November 27, 2014
    Date of Patent: August 15, 2017
    Assignee: NIHON DEMPA KOGYO CO., LTD.
    Inventors: Takumi Ariji, Kunio Morita, Tomoyuki Ochiai
  • Patent number: 9660610
    Abstract: A crystal device has a crystal blank, a first excitation electrode part which is provided on an upper surface of the crystal blank, a first wiring part which extends from the first excitation electrode part to an edge part of the upper surface, a first lead-out terminal which is provided at the edge part of the upper surface of the crystal blank, a first mounting terminal which is provided at a position facing the first lead-out terminal, a first connection part which is provided so that one end is superimposed on the first lead-out terminal and the other end is superimposed on the first mounting terminal, a substrate having a mounting pad which is provided on its upper surface, a conductive adhesive which is provided between the mounting pad and the first mounting terminal, and a lid which is bonded to the upper surface of the substrate.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: May 23, 2017
    Assignee: KYOCERA CRYSTAL DEVICE CORPORATION
    Inventor: Kouhei Sasaoka
  • Patent number: 9496480
    Abstract: When a size from a main surface of an outer edge to a step of a first stage of a vibration section is Md1, a size from the step of the first stage to a step of a second stage is Md2, a density of materials of the substrate is dA, a density of materials of the excitation electrode is dB, and a thickness of the excitation electrode on a main surface of a mesa of the second stage is tB, a relationship of ((Md2+(dB/dA)×tB))/Md1?1.4 is satisfied.
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: November 15, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Matsutaro Naito, Hideo Endo, Toshihiro Il
  • Patent number: 9450166
    Abstract: A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: September 20, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Yoshitaka Fujihara, Kazuhisa Hatanaka, Matsutaro Naito
  • Patent number: 9378902
    Abstract: A composite operating device is provided having a small number of components to retain an operating member in a neutral position. A composite operating device includes an operating member that is operable to rotate and to slide a slider and a base. One of the base and the slider includes a flexible portion that is capable of elastic bending deformation relative to the other, the flexible portion including a first engagement portion. The other includes a second engagement portion that retains the slider in the neutral position by engaging with the first engagement portion. The second engagement portion presses against the first engagement portion while being displaced in the sliding direction relative to the first engagement portion to cause bending deformation of the flexible portion. The amount of deformation of the flexible portion increases with the amount of operation of the operating member in the sliding direction.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: June 28, 2016
    Assignee: SUMITOMO WIRING SYSTEMS, LTD.
    Inventor: Masatomo Inoue
  • Patent number: 9362885
    Abstract: A piezoelectric device includes a piezoelectric vibrating piece, a lid portion, and a base portion. The piezoelectric vibrating piece includes: a vibrating portion; a framing portion surrounding the vibrating portion; an excitation electrode in the vibrating portion; and an extraction electrode electrically connected to the excitation electrode in the framing portion. The lid portion is bonded to a front surface of the piezoelectric vibrating piece via a bonding material. The base portion includes an external electrode bonded to a back surface of the piezoelectric vibrating piece via a bonding material and electrically connected to the extraction electrode. The excitation electrode and the extraction electrode each include: a foundation film formed of metal to be rendered passive; and a first metal film and a second metal film laminated to the foundation film. The foundation film has a film thickness of 1.0 nm to 8.0 nm.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: June 7, 2016
    Assignee: NIHON DEMPA KOGYO CO., LTD.
    Inventors: Takumi Ariji, Hiromasa Nakatake, Takehiro Takahashi
  • Patent number: 9231553
    Abstract: A configuration that reduces a parasitic capacitance between wires is achieved at a low cost. Disclosed is an acoustic wave filter provided with a piezoelectric substrate, resonators that include a comb-shaped electrode formed on the piezoelectric substrate, a wiring portion that is connected to the comb-shaped electrode, and a dielectric layer formed to cover the comb-shaped electrode. The wiring portion is provided with a lower layer wiring portion that is disposed in the same layer as the comb-shaped electrode and an upper layer wiring portion that is disposed on the lower layer wiring portion. The upper layer wiring portion includes a region that has a wider electrode width than the electrode width of the lower layer wiring portion.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: January 5, 2016
    Assignee: TAIYO YUDEN CO., LTD.
    Inventors: Kazunori Inoue, Takashi Matsuda, Michio Miura
  • Patent number: 9170288
    Abstract: The present invention provides a method for obtaining feedback parameters related to the state of a dielectric elastomer (DE). The method comprises introducing a small-scale oscillation to the voltage difference between electrodes of the DE, monitoring or repeatedly measuring several measurable electrical characteristics of the DE, deriving other relevant data from the measurements, deriving an equation for a plane of best fit through the relevant data when defined as orthogonal axes, and deriving the feedback parameters from coefficients of the plane equation. The method thus provides important feedback regarding the capacitance, leakage current and/or electrode resistance of the DE. Also disclosed are a computer program and a system adapted to perform the method.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: October 27, 2015
    Assignee: Auckland UniServices Limited
    Inventors: Benjamin Marc O'Brien, Todd Alan Gisby, Iain Alexander Anderson
  • Patent number: 9153381
    Abstract: Disclosed herein is a chip device including: a multilayer body having a hexahedral shape; an external electrode covering both distal ends of the multilayer body; and a shape maintaining material contained in the external electrode to maintain a shape of the external electrode at the time of forming the external electrode.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: October 6, 2015
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Jung Tae Park, Seung Heon Han, Young Jun Choi, Ji Hee Moon, Ki Won Kim, Joon Hwan Kwag
  • Patent number: 9136459
    Abstract: A piezoelectric device includes: a substrate; a first electrode which is layered over the substrate; a first piezoelectric film which is layered over the first electrode; a metal oxide film which is layered over the first piezoelectric film; a metal film which is layered over the metal oxide film; a second piezoelectric film which is layered over the metal film; and a second electrode which is layered over the second piezoelectric film.
    Type: Grant
    Filed: October 3, 2012
    Date of Patent: September 15, 2015
    Assignee: FUJIFILM Corporation
    Inventors: Takamichi Fujii, Yoshikazu Hishinuma
  • Patent number: 9050775
    Abstract: The present invention relates to methods of fabricating transparent conductive films based on nanomaterials, in particular, silver nanowires. The present invention incorporates a single step of annealing and patterning the conductive films by using a high energy flash lamp without post treatment to improve the conductivity and create substantially invisible patterns on the films for use in touch panel or display manufacturing industry.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: June 9, 2015
    Assignee: NANO AND ADVANCED MATERIALS INSTITUTE LIMITED
    Inventors: Li Fu, Caiming Sun, Man-Ho So, Kai Li, Chau-Shek Li, Tak-Hei Lam
  • Publication number: 20150146342
    Abstract: A multi-layer component has a base body that has a stack made of dielectric layers and internal electrode layers. An external contact is in electrical contact with the electrode layers. The external contact has a first layer and a second layer, where the first layer and the second layer are burned-in.
    Type: Application
    Filed: May 6, 2013
    Publication date: May 28, 2015
    Inventor: Markus Weiglhofer
  • Publication number: 20150130325
    Abstract: There are provided a piezoelectric element in which the peeling of a surface electrode is suppressed, and a piezoelectric vibrating device, a portable terminal, an acoustic generator, an acoustic generating device and an electronic apparatus including the same. A piezoelectric actuator includes a piezoelectric element including a plate-shaped stacked body including inner electrodes and piezoelectric layers laminated, a surface electrode disposed on one of main surfaces of the stacked body, the surface electrode being electrically connected to the inner electrodes. The surface electrode has a first area and a second area. The first area is an area mainly containing silver, and the second area is an area mainly containing silver and palladium and disposed so as to contact a piezoelectric layer.
    Type: Application
    Filed: September 30, 2013
    Publication date: May 14, 2015
    Applicant: KYOCERA Corporation
    Inventor: Hiroshi Suenaga
  • Publication number: 20150115771
    Abstract: An elastic wave device includes a piezoelectric substrate including a primary surface and a first electrode which is provided on the primary surface of the piezoelectric substrate, which includes a first multilayer metal film including at least three metal films laminated in a bottom-to-top direction, and which includes at least an IDT film. The first multilayer metal film includes a Ti film as the topmost film and has a crystal orientation oriented in a predetermined direction so that the normal line direction of the plane of a Ti crystal of the Ti film coincides with the Z axis of a crystal of a piezoelectric body defining the piezoelectric substrate.
    Type: Application
    Filed: October 9, 2014
    Publication date: April 30, 2015
    Inventor: Chihiro KONOMA
  • Patent number: 8994251
    Abstract: A piezoelectric device according to the present invention is provided with a first electrode film, a first nonmetal electroconductive intermediate film provided on the first electrode film, a piezoelectric film provided on the first nonmetal electroconductive intermediate film, a second nonmetal electroconductive intermediate film provided on the piezoelectric film, and a second electrode film provided on the second nonmetal electroconductive intermediate film. A linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than those of the first electrode film and the piezoelectric film, and a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than those of the second electrode film and the piezoelectric film.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: March 31, 2015
    Assignee: TDK Corporation
    Inventors: Katsuyuki Kurachi, Yasuhiro Aida, Hitoshi Sakuma, Kazuhiko Maejima
  • Publication number: 20150084487
    Abstract: In an electronic component, an outer electrode includes a sintered layer including a sintered metal, a reinforcement layer not containing Sn but including Cu or Ni, an insulation layer, and a Sn-containing layer. The sintered layer extends from each end surface of an element assembly onto at least one main surface thereof to cover each end surface of the element assembly. The reinforcement layer extends on the sintered layer and covers the sintered layer entirely. The insulation layer is directly provided on the reinforcement layer at each end surface of the element assembly, extends in a direction perpendicular or substantially perpendicular to a side surface of the element assembly, and defines a portion of a surface of the outer electrode. The Sn-containing layer covers the reinforcement layer except for a portion of the reinforcement layer that is covered by the insulation layer, and defines another portion of the surface of the outer electrode.
    Type: Application
    Filed: September 16, 2014
    Publication date: March 26, 2015
    Inventors: Haruhiko MORI, Hiroyuki OTSUNA
  • Patent number: 8987975
    Abstract: A lead type piezoelectric resonator device includes a piezoelectric resonator plate and a lead terminal that supports the piezoelectric resonator plate. The piezoelectric resonator plate is provided with a terminal electrode that is electrically connected to the lead terminal, and the lead terminal is provided with a bonding layer that is electrically connected to the piezoelectric resonator plate. The piezoelectric resonator plate and the lead terminal are electromechanically bonded to each other by the terminal electrode and the bonding layer. A bonding material containing an Sn—Cu alloy is produced from the terminal electrode and the bonding layer by the bonding of the terminal electrode and the bonding layer.
    Type: Grant
    Filed: December 3, 2010
    Date of Patent: March 24, 2015
    Assignee: Daishinku Corporation
    Inventors: Tatsuya Murakami, Tadataka Koga, Koichi Kishimoto
  • Publication number: 20150077476
    Abstract: There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.
    Type: Application
    Filed: November 18, 2014
    Publication date: March 19, 2015
    Inventors: Toshihiro SHIMIZU, Hiroshi ITO, Jiro KATO, Eiju HIRAI
  • Publication number: 20150076967
    Abstract: The present disclosure relates to a multilayer piezoelectric element which includes a plurality of piezoelectric layers with a thickness of 15 ?m to 100 ?m each; and internal electrodes interposed between the plurality of piezoelectric layers and laminated to alternately form an anode and a cathode.
    Type: Application
    Filed: September 16, 2014
    Publication date: March 19, 2015
    Inventors: Boum Seock KIM, Hui Sun PARK, Jung Wook SEO
  • Patent number: 8970094
    Abstract: A piezoelectric ceramic material has the general formula: P1-c-dDcZd(PbO)w where: 0<c?0.025; 0?d?0.05; 0?w?0.05; where P stands for a compound having the formula [Pb1-vAgIv][(Zr1-yTiy)1-uCuIIu]O3, where 0.50?1?y?0.60; 0<u?0.0495; 0?v?0.02, and D stands for a component of the general formula [(M1O)1-p(M2O)p]a[Nb2O5]1-a, where M1 stands for Ba1-tSrt, where 0?t?1, M2 stands for Sr and/or Ca, and 0<p<1 and ?<a<1 and Z stands for a compound of the general formula: Pb(L1Rr)O3 where L is present in the oxidation state II or III, and R is present in the oxidation state VI or V, and: LII is selected from among Fe, Mg, Co, Ni and Cu in combination with RVI=W, where 1=½ and r=½, or LIII is selected from among Fe, Cr and Ga in combination with RV=Nb, Ta or Sb, where 1=½ and r=½, or LIII is selected from among Fe, Cr and Ga in combination with RVI=W, where 1=? and r=?.
    Type: Grant
    Filed: December 15, 2010
    Date of Patent: March 3, 2015
    Assignee: EPCOS AG
    Inventors: Michael Schossmann, Adalbert Feltz
  • Patent number: 8970095
    Abstract: In a piezoelectric actuator including a substrate, an insulating layer formed on the substrate, an adhesive layer formed on the insulating layer, a Pt lower electrode layer formed on the adhesive layer, and a PZT piezoelectric layer formed on the Pt lower electrode layer, the adhesive layer is made of TiOx having a composition x which is graded so that the composition x on the side of thio insulating layer is larger than the composition x on the side of the Pt lower electrode layer.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: March 3, 2015
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Susumu Nakamura
  • Publication number: 20150054388
    Abstract: A ceramic electronic component includes an electronic component body and first and second metal terminals. The electronic component body includes a bare ceramic body and first and second outer electrodes. The first and second outer electrodes of the electronic component body are connected respectively to the first and second metal terminals by solders containing Sn as a main constituent. An alloy layer containing Ni—Sn is provided in at least a portion of a bonding interface between adjacent two of the first and second metal terminals and the first and second outer electrodes.
    Type: Application
    Filed: August 7, 2014
    Publication date: February 26, 2015
    Inventors: Yoji ITAGAKI, Nobumichi KIMURA, Tomoaki MATSUDA