More Than Two Patents (Class 310/366)
  • Patent number: 7586243
    Abstract: A piezoelectric transducer is described that is configured for use within a path length control apparatus of an optical device. The transducer comprises at least one void formed within a central region of the piezoelectric transducer, the one void or alternatively, the multiple voids, utilized at least in part to limit a curvature induced into a mirror during operation of the piezoelectric transducer.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: September 8, 2009
    Assignee: Honeywell International Inc.
    Inventors: Christina M. Schober, Daniel J. Murray, Danielle D. Oscarson, Robert R. Divine
  • Publication number: 20090218916
    Abstract: A piezoelectric transformer includes a base body. The base body includes an input part and an output part mechanically connected to the input part. The base body also includes internal electrodes perpendicular to a polarization axis of the transformer-in the input part and the output part. The transformer also includes an auxiliary electrode galvanically separated from the input part and the output part.
    Type: Application
    Filed: September 29, 2006
    Publication date: September 3, 2009
    Inventors: Heinz Florian, Reinhard Gabl, Igor Kartashev, Patrick Schmidt-Winkel
  • Patent number: 7579760
    Abstract: A vibrator includes a vibrating body having a substantially quadrangular prism shape and including four side surfaces extending in the longitudinal direction of the vibrating body. A common electrode is formed on substantially an entire surface of one of the side surfaces of the vibrating body. Split electrodes extend in the longitudinal direction on another side surface opposite to the side surface on which the common electrode is formed, and are spaced from each other in the width direction of the side surface on which the split electrodes are formed. In the vibrating body, a first polarized section is polarized in a direction from the side surfaces of the vibrating body that do not have an electrode disposed thereon, toward the split electrodes. A second polarized section is polarized in a direction from the side surfaces of the vibrating body that do not have an electrode disposed thereon, toward the common electrode.
    Type: Grant
    Filed: April 11, 2008
    Date of Patent: August 25, 2009
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Katsumi Fujimoto
  • Patent number: 7579753
    Abstract: An electronic device and transducer structures are described.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: August 25, 2009
    Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
    Inventors: R. Shane Fazzio, Walter Dauksher, Atul Goel
  • Publication number: 20090200895
    Abstract: A piezoelectric actuator is proposed, having a plurality of piezoelectric elements that are stacked on top of each other. Piezoelectric layers between each of which an inner electrode having a polarity alternating within the layer structure is provided. Outer electrodes are present at two opposing lateral surfaces, through which the inner electrodes are supplied with an electric charge. From each outer electrode at least one conductive fuse bar is directed to these inner electrodes, preferably in the inactive region, for contacting each of these inner electrodes that are associated with the polarity. The fuse bar forms an electric resistance cross-section to the respective inner electrode with the respective contact surface. In case of high current flow, the respective fuse bar blows, thus forming a fusible cut-out.
    Type: Application
    Filed: September 28, 2007
    Publication date: August 13, 2009
    Inventors: Holger Rapp, Friedrich Boecking, Thomas Pauer
  • Publication number: 20090201337
    Abstract: Provided is an actuator device including a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate having a silicon oxide layer formed by thermal oxidation on at least a surface, and an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.
    Type: Application
    Filed: July 2, 2008
    Publication date: August 13, 2009
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Xin-Shan LI
  • Patent number: 7573180
    Abstract: The invention provides an ultrasonic motor including internal electrodes provided in an ultrasonic vibrator and disposed in regions where electrical charges of the same sign are generated in one vibration mode and where electrical charges of opposite sign and substantially the same amount are generated in another vibration mode; and a control unit configured to detect a phase difference between a vibration detection signal detected on the basis of electrical signals from the internal electrodes and any one of driving AC voltages, and to set a driving frequency such that the phase difference becomes a reference phase difference. Each driving AC voltage with the driving frequency set by the control unit is applied to the ultrasonic vibrator.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: August 11, 2009
    Assignee: Olympus Corporation
    Inventor: Tomoki Funakubo
  • Patent number: 7569977
    Abstract: A piezoelectric element suitable for use as a sensor element in a hydrophone. In a preferred embodiment, the sensor element comprises a ceramic lead zirconate titanate substrate defining opposed ends and including at least first and second conductive strip electrodes on opposed top and bottom faces thereof. In accordance with the invention, at least one of the strip electrodes, and preferably at least the end of one of the strip electrodes disposed adjacent one of the opposed ends of the substrate, includes one or more spaced-apart laser cuts created during the manufacture of the sensor element for presetting the capacitance of the sensor element.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: August 4, 2009
    Assignee: CTS Corporation
    Inventors: Gerald Stranford, Thomas A. Knecht
  • Patent number: 7567016
    Abstract: In k31 mode, a vibration is along an axis or orthogonal to the poling or electric field orientation. The direction of vibration is toward a face of an ultrasound transducer array. For each element of the array, electrodes are formed perpendicular to the face of the array, such as along the sides of the elements. Piezoelectric material is poled along a dimension parallel with the face of the transducer and perpendicular to the direction of acoustic energy propagation. Using elements designed for k31 resonant mode operation may provide for a better electrical impedance match, such as where small elements sizes are provided for a multi-dimensional transducer arrays. For additional impedance matching, the elements may be made from multiple layers of piezoelectric ceramic. Since the elements operate from a k31 mode, the layers are stacked along the poling direction or perpendicular to a face of the transducer array for transmitting or receiving acoustical energy.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: July 28, 2009
    Assignee: Siemens Medical Solutions USA, Inc.
    Inventors: Xuan-Ming Lu, Timothy L. Proulx, Lewis J. Thomas, III, Worth B. Walters
  • Patent number: 7567014
    Abstract: An energy trap piezoelectric resonator makes use of a harmonic wave in a thickness longitudinal vibration mode and can effectively suppress a spurious fundamental wave in a thickness longitudinal vibration mode without significantly suppressing the harmonic wave that is used for the resonator. The energy trap piezoelectric resonator has a first excitation electrode disposed at an upper surface of a piezoelectric substrate polarized in a thickness direction and a second excitation electrode disposed at a lower surface, and a floating electrode disposed at at least one of the upper surface and/or the lower surface of the piezoelectric substrate so as to extend towards and away from the first excitation electrode with respect to a node of an electric potential distribution based on electric charges generated by the fundamental wave that is propagated when an energy trap vibration portion where the excitation electrodes oppose each other is excited.
    Type: Grant
    Filed: April 20, 2005
    Date of Patent: July 28, 2009
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Hitoshi Sakaguchi, Hiroaki Kaida, Takashi Hase
  • Patent number: 7565724
    Abstract: A method for manufacturing a piezoelectric element includes the steps of forming a first electrode above a substrate, forming, above the first electrode, a piezoelectric layer composed of a piezoelectric material having a perovskite structure, and forming a second electrode above the piezoelectric layer, wherein the step of forming the first electrode includes forming a layer containing nickel, and forming, above the layer containing nickel, a lanthanum nickelate layer that is oriented to a cubic (100).
    Type: Grant
    Filed: February 20, 2006
    Date of Patent: July 28, 2009
    Assignee: Seiko Epson Corporation
    Inventors: Setsuya Iwashita, Koji Ohashi, Takamitsu Higuchi
  • Patent number: 7564173
    Abstract: An ultrasonic motor piezoelectric actuator element uses a primary longitudinal mode and a secondary bending mode and includes a stacked piezoelectric element in which piezoelectric layers and electrode layers are stacked alternately in such a manner that the electrode layers divide the piezoelectric layers into two approximately equal portions. A piezoelectric inactive region is formed from the surface portion to the center portion in the thickness direction of the stacked piezoelectric element. The migration resistance of the piezoelectric actuator element is improved while suppressing a decrease in displacement so that a short circuit can be prevented and portions generating heat during alternating polarization can be dispersed, whereby reliability is increased. Moreover, the amount of electrode material used can be reduced, whereby cost can be reduced.
    Type: Grant
    Filed: August 21, 2007
    Date of Patent: July 21, 2009
    Assignee: NGK Insulators, Ltd.
    Inventors: Masahiko Namerikawa, Masayuki Uetani, Hideki Shimizu, Tomohiro Yamada, Nobuo Takahashi
  • Patent number: 7562557
    Abstract: A flexural resonator includes a piezoelectric material. At least a portion of an electrode having a first surface and a second surface is embedded in the piezoelectric material such that the piezoelectric material is disposed over and in electronic association with the first and second surfaces of the electrode.
    Type: Grant
    Filed: April 20, 2005
    Date of Patent: July 21, 2009
    Assignee: MEAS France
    Inventors: James Bennett, Oleg Kolosov, Leonid Matsiev
  • Publication number: 20090179527
    Abstract: A device, especially a piezo stack (2) has a plurality of stacked actuator or sensor layers with electrodes (5) or piezo stack (2) contacts. A flexible lead frame (1) is electrically connected to the electrodes (5).
    Type: Application
    Filed: November 11, 2005
    Publication date: July 16, 2009
    Inventors: Michael Kaspar, Erhard Magori, Robert Weinke
  • Patent number: 7561010
    Abstract: A piezoelectric thin film resonator is formed on a base substrate such as made of Si in which the resonance frequency is substantially determined by the lateral size not by the thickness of the resonator, whereby a resonator for use in TCXO, etc. is provided by the thin film technique, which enables to reduce the thickness of the film and the size of the resonator and integration with Si-based IC incorporating the resonator in one identical substrate.
    Type: Grant
    Filed: January 18, 2006
    Date of Patent: July 14, 2009
    Assignee: Hitachi Media Electronics Co., Ltd.
    Inventors: Mitsutaka Hikita, Nobuhiko Shibagaki, Atsushi Isobe, Kengo Asai, Hisanori Matsumoto
  • Patent number: 7554246
    Abstract: A piezoelectric composite device including: a feeding electrode; a common electrode; a signal detecting electrode; a first piezoelectric element joined between the feeding electrode and the common electrode; and a second piezoelectric element joined between the common electrode and the signal detecting electrode; a predetermined voltage being supplied between the feeding electrode and the common electrode; and a force detection signal based on an external force being extracted from the detecting electrode.
    Type: Grant
    Filed: December 7, 2006
    Date of Patent: June 30, 2009
    Assignee: Sony Corporation
    Inventors: Shigeaki Maruyama, Junichi Sekine, Ivan Poupyrev
  • Patent number: 7554427
    Abstract: A thin film bulk acoustic wave (BAW) resonator structure and filter which can be fabricated by inexpensive manufacturing techniques and in smaller size than conventional such products are to be provided. The BAW resonator structure and filter have a substrate, a first BAW resonator placed over the substrate, an acoustic reflection layer placed over the first BAW resonator and a second BAW resonator placed over the acoustic reflection layer, and the acoustic reflection layer is electroconductive. Herein, the acoustic reflection layer constitutes a first electrode, and this first electrode electrically connects and acoustically separates the first BAW resonator and the second BAW resonator.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: June 30, 2009
    Assignee: Hitachi Media Electronics Co., Ltd.
    Inventors: Hisanori Matsumoto, Atsushi Isobe, Kengo Asai
  • Patent number: 7554251
    Abstract: A multi-layer piezoelectric element having high durability which allows it to increase the amount of displacement of a piezoelectric actuator under high voltage and high pressure and does not undergo a change in the amount of displacement during continuous operation in a high electric field and under a high pressure over a long time period is provided. The multi-layer piezoelectric element comprises a stack of at least one piezoelectric layer and a plurality of internal electrodes consisting of first and second internal electrodes placed one on another, a first external electrode formed on a first side face of the stack and connected to the first internal electrode and a second external electrode formed on a second side face of the stack and connected to the second internal electrode, wherein the bonding strength between the piezoelectric layer and the internal electrode is weaker than the bending strength of the piezoelectric layer.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: June 30, 2009
    Assignee: Kyocera Corporation
    Inventors: Mitsuo Kondo, Masaki Terazono, Takeshi Okamura, Katsushi Sakaue
  • Patent number: 7554250
    Abstract: A laminate-type piezoelectric element has a ceramic laminated body obtained by alternately laminating piezoelectric layers made of a piezoelectric material and inner electrode layers having electrical conductivity. Outer electrodes are joined to side surfaces of the ceramic laminated body via an electrically conductive adhesive. The electrically conductive adhesive has buried therein mesh bodies obtained by forming a mesh by using a nonmetallic material. The mesh bodies are desirably constituted by using any one of a resin, ceramic, carbon or glass.
    Type: Grant
    Filed: December 19, 2006
    Date of Patent: June 30, 2009
    Assignee: Denso Corporation
    Inventors: Shige Kadotani, Akio Iwase, Teruaki Yamaguchi
  • Patent number: 7550904
    Abstract: A thin-film piezoelectric resonator has a piezoelectric film which is formed via a space on a substrate and is supported on the substrate at least one location, an upper electrode which has a plurality of electrode layers and a connection part connecting the electrode layers to each other, each of the electrode layers being formed on the piezoelectric film, having the same width and being arranged at the same interval as the width, a lower electrode formed under the piezoelectric film, a first pad which is formed on the substrate and is electrically connected to the upper electrode, and a second pad which is formed on the substrate and is electrically connected to the lower electrode.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: June 23, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki
  • Publication number: 20090152999
    Abstract: In a method for manufacturing a piezoelectric actuator, a ceramic sintered body is prepared and a size of the ceramic sintered body is adjusted in a thickness direction defined below by grinding piezoelectric ceramic layers, included in the ceramic sintered body, located outermost in the thickness direction. In the ceramic sintered body, internal electrodes are each disposed between piezoelectric ceramic layers. The thickness direction is defined as the direction along the thickness of the piezoelectric ceramic layer. Each of the inert sections are disposed on at least one side of the active section, for driving the piezoelectric actuator, in the thickness direction. Dummy internal electrodes are arranged in the inert sections such that each of the dummy internal electrodes are each located between ceramic layers. The thickness of the piezoelectric ceramic layers disposed between the dummy internal electrodes increases with distance from the active section.
    Type: Application
    Filed: February 17, 2009
    Publication date: June 18, 2009
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventors: Shinji OMURA, Koichi HAYASHI, Shozo KOBAYASHI
  • Patent number: 7545085
    Abstract: Internal electrode layers (5) include a common electrode layer (3) and feed electrode layers (6) alternately placed in a stacking direction with piezoelectric layers (1) interposed between the common electrode layer (3) and the feed electrode layers (6). The common electrode layer (3) has a common electrode (3a). The feed electrode layers (6) include a first feed electrode layer (6a) and a second feed electrode layer (6b). The first feed electrode layer (6) has a pair of electrically continuous first electrodes (2, 2) disposed on two areas (A2, A4) opposed along a first-diagonal-line direction (D1) of the principal surface of the associated piezoelectric layer (1) among four areas (A1 through A4) defined by dividing the principal surface of the associated piezoelectric layer (1) into two parts in the longitudinal and transverse directions (L) and (S).
    Type: Grant
    Filed: January 19, 2007
    Date of Patent: June 9, 2009
    Assignee: Panasonic Corporation
    Inventor: Yusuke Adachi
  • Publication number: 20090141092
    Abstract: A piezoelectric actuator includes a vibration plate, a first piezoelectric layer formed on one surface of the vibration plate, a second piezoelectric layer stacked on a surface of the first piezoelectric layer, a plurality of individual electrodes arranged on a surface of the second piezoelectric layer in a predetermined direction, a first common electrode having a plurality of first electrodes formed between the first piezoelectric layer and the second piezoelectric layer, and which are arranged in the predetermined direction to face the individual electrodes respectively, and a first wire electrically connecting all of the first electrodes, and a second common electrode having a plurality of second electrodes formed between the vibration plate and the first piezoelectric layer, and which are arranged in the predetermined direction to face the individual electrodes respectively, and a second wire electrically connecting all of the second electrodes.
    Type: Application
    Filed: November 26, 2008
    Publication date: June 4, 2009
    Inventor: Shohei Koide
  • Patent number: 7541722
    Abstract: An electronic component has a structure which prevents corrosion caused by moisture intrusion through an electrode pattern extending inwardly from an edge connecting a side and one of main surfaces of a substrate and, therefore, deterioration of a characteristic rarely occurs over time. The electronic component includes, on the first main surface of the substrate, the first electrode pattern extending inwardly from an edge connecting the side of the substrate and the first main surface of the substrate, the second electrode pattern that is opposite to the end of the first electrode pattern through the gap, and the third electrode pattern that is disposed on the first electrode pattern and the second electrode pattern such that it covers the gap. The third electrode pattern is formed from a metal film that is highly resistant to corrosion, the corrosion resistance of which is superior to that of metal films forming the first electrode pattern and the second electrode pattern.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: June 2, 2009
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Yutaka Ishiura, Takeshi Matsumae, Kazuhiro Inoue, Toshiaki Takata
  • Publication number: 20090135541
    Abstract: An actuator includes a substrate, a fixed electrode provided on a major surface of the substrate, a movable beam opposed to the major surface and held above the substrate with a gap thereto, and a dielectric film provided between the fixed electrode and the movable beam. The dielectric film is made of aluminum nitride oriented along c-axis with an orientation full width at half maximum of 4.6 degrees or less.
    Type: Application
    Filed: November 6, 2008
    Publication date: May 28, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Takashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki
  • Patent number: 7538477
    Abstract: Transducer structures having multiple piezoelectric layer and annular contacts are described.
    Type: Grant
    Filed: April 19, 2007
    Date of Patent: May 26, 2009
    Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
    Inventors: R. Shane Fazzio, Walter Dauksher, Atul Goel
  • Patent number: 7535158
    Abstract: A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: May 19, 2009
    Assignee: Epson Toyocom Corporation
    Inventor: Jun Watanabe
  • Patent number: 7535157
    Abstract: A piezoelectric element includes: a lower electrode film provided on a substrate; a piezoelectric layer provided on the lower electrode film; and an upper electrode film provided on the piezoelectric layer, wherein the lower electrode film includes columnar crystals of platinum, and an oxide exists in the grain boundaries of the crystals of platinum.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: May 19, 2009
    Assignee: Seiko Epson Corporation
    Inventor: Takeshi Saito
  • Publication number: 20090119896
    Abstract: A multilayered piezoelectric element in which braking to displacement of piezoelectric material layers is suppressed and insulating films suitable for thinning of the piezoelectric material layers are formed. A method of manufacturing the element includes the steps of: (a) forming a multilayered structure including piezoelectric material layers, at least one first electrode layer, and at least one second electrode layer; (b) discharging a liquid synthetic resin from a nozzle provided in a dispenser to apply it to an end portion of the first electrode layer in a first region within side surfaces of the multilayered structure and curing the liquid synthetic resin to form a first insulating film; and (c) discharging the liquid synthetic resin from the nozzle to apply it to an end portion of the second electrode layer in a second region and curing the liquid synthetic resin to form a second insulating film.
    Type: Application
    Filed: January 9, 2009
    Publication date: May 14, 2009
    Inventors: Takashi Nakamura, Atsushi Osawa
  • Patent number: 7531948
    Abstract: A stacked piezoelectric element comprising that can suppress periodic damping on miniaturization of a vibration wave motor and improve its performance. A stacked piezoelectric element comprises piezoelectric layers and electrode layers alternately stacked to have a shape of a cylinder. The electrode layers are divided into a plurality of electrode layer regions along a circumferential surface of the shape of a cylinder.
    Type: Grant
    Filed: May 15, 2007
    Date of Patent: May 12, 2009
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yutaka Maruyama, Kaishi Ohashi, Takayuki Tsukimoto
  • Patent number: 7525241
    Abstract: A multilayer ceramic component includes a stack containing ceramic layers and electrode layers interspersed among the ceramic layers. The electrode layers contain copper and define first and second internal electrodes. First and second external contacts are on different sides of the stack. The first and second external contacts contain copper and are substantially perpendicular to the ceramic layers and electrode layers. The first internal electrode is connected to the first external contact and the second internal electrode is connected to the second external contact. The first and second internal electrodes overlap each other at a plane intersecting the stack. In areas adjacent to boundaries between the first and second external contacts and the ceramic layers, the first and second external contacts are not oxidized and material making-up the ceramic layers is not diminished. A bonding strength of the external contacts to the stack exceeds 50N.
    Type: Grant
    Filed: September 29, 2004
    Date of Patent: April 28, 2009
    Assignee: Epcos AG
    Inventors: Heinz Florian, Marion Ottlinger, Peter Sedlmaier
  • Publication number: 20090102894
    Abstract: A piezoelectric actuator includes piezoelectric layers. Individual electrodes are formed on an outermost piezoelectric layer and arranged in a row extending along a first direction. Through holes are formed in the outermost piezoelectric layer and arranged substantially in a row extending in the first direction to contact with first end portions of the individual electrodes. The individual electrodes include at least one first individual electrode and at least one second individual electrode. The first individual electrode comprises a first electrode terminal provided at the first end portion, and the second individual electrode comprises a second electrode terminal provided at a second end portion opposite to the first end portion with respect to a second direction perpendicular to the first direction. The second individual electrode has a thickened portion extending from the second electrode terminal towards the first end portion.
    Type: Application
    Filed: October 2, 2008
    Publication date: April 23, 2009
    Inventor: Jun Isono
  • Patent number: 7518295
    Abstract: A multilayer piezoelectric element has a laminate body in which a plurality of piezoelectric bodies and a plurality of internal electrodes are alternately laminated and sintered. The plurality of internal electrodes comprise a first electrode and a second electrode. The laminate body is provided with a metal oxide layer formed of a material with a melting point higher than a sintering temperature of the piezoelectric bodies. The laminate body has an active portion in which the first electrode and the second electrode are arranged to overlap in a laminate direction of the laminate body, and inactive portions in which the first electrode and the second electrode are arranged not to overlap in the laminate direction of the laminate body. The inactive portions are provided on both sides of the active portion.
    Type: Grant
    Filed: October 18, 2007
    Date of Patent: April 14, 2009
    Assignee: TDK Corporation
    Inventors: Kazuo Mochizuki, Kazuo Nagata, Yuzo Sawara
  • Patent number: 7514848
    Abstract: An object of the present invention is to provide a piezoelectric stack substantially free from deterioration in performance and having high reliability, and a production method thereof.
    Type: Grant
    Filed: February 17, 2005
    Date of Patent: April 7, 2009
    Assignees: Denso Corporation, Toyota Jidosha Kabushiki Kaisha
    Inventors: Yoichi Kobane, Akira Fujii, Hideo Kamiya, Hiroaki Makino
  • Patent number: 7514847
    Abstract: In an actuator unit, the piezo actuator (1) is located inside a tubular spring (3) under pre-stress. To compensate the thermal length modifications of the piezo actuator (1) in relation to the actuator housing (4, 3, 6, 5), the compensation element is configured as an aluminium compensation cylinder (2) that is situated in an extension tube (6). The piezo actuator (1) and the compensation cylinder (2) are mounted in series and conjointly pre-stressed by means of the tubular spring (3) that is extended in relation to the actuator housing by the extension tube (6).
    Type: Grant
    Filed: January 11, 2005
    Date of Patent: April 7, 2009
    Assignee: Siemens Aktiengesellschaft
    Inventors: Jürgen Dick, Heinz Lixl, Martin Simmet
  • Patent number: 7514855
    Abstract: A piezoelectric actuator includes a first ceramic sheet having an individual electrode formed thereon, a second ceramic sheet having a common electrode formed thereon, a top ceramic sheet having a surface electrode for the individual electrode and a surface electrode for the common electrode formed thereon, wherein the surface electrode for the common electrode is divided by a plurality of slits into a plurality of electrode-portions each having a area of not more than a predetermined area. Accordingly, when these ceramic sheets are calcinated to be integrated together, this construction makes it possible to lower the affect due to difference in the amount of thermal shrinkage between the surface electrode for the common electrode and the top ceramic sheet, thereby suppressing the arching deformation of the top ceramic sheet.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: April 7, 2009
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Jun Isono
  • Publication number: 20090072667
    Abstract: A piezoelectric/electrostrictive film element 10 includes a substrate 11, a lower electrode 12, a piezoelectric/electrostrictive film 15, and an upper electrode 16. The substrate 11 has a thin-walled diaphragm portion 11a, and a thick portion 11b formed around the thin-walled diaphragm portion 11a. The lower electrode 12 is formed on the substrate 11 in such a manner as to extend over the thin-walled diaphragm portion 11a and the thick portion 11b. The piezoelectric/electrostrictive film 15 is formed on the lower electrode 12. The upper electrode 16 is provided on the piezoelectric/electrostrictive film 15 in such a manner as to face the thin-walled diaphragm portion 11a. The upper electrode 16 includes an upper-electrode body portion 16a and a connection portion 16b. The upper-electrode body portion 16a has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion 11a.
    Type: Application
    Filed: September 30, 2008
    Publication date: March 19, 2009
    Applicant: NGK Insulators, Ltd.
    Inventors: Takao Ohnishi, Hideki Shimizu, Katsuyuki Tsuneoka
  • Publication number: 20090058231
    Abstract: A method for manufacturing a piezoelectric element includes the steps of: forming a first base substrate having an element to be transferred; forming a second base substrate; and transferring the element to be transferred from the first base substrate to the second base substrate. The step of forming the element to be transferred includes forming a first electrode above a first substrate, forming a piezoelectric layer above the first electrode, forming a second electrode above the piezoelectric layer, crystallizing the piezoelectric layer, forming a dielectric layer at least above the second electrode, and etching the dielectric layer such that at least a portion of the second electrode is exposed and the dielectric layer has a protrusion upwardly protruding with respect to the second electrode.
    Type: Application
    Filed: August 15, 2008
    Publication date: March 5, 2009
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Akihito MATSUMOTO, Takamitsu HIGUCHI, Yasuhiro ONO
  • Patent number: 7498716
    Abstract: A piezoelectric actuator includes a piezoelectric vibrating plate including piezoelectric ceramics, an internal electrode formed on a first surface of the piezoelectric vibrating plate, a piezoelectric layer formed on the internal electrode, and a plurality of surface electrodes that are provided on a surface of the piezoelectric layer. When the internal electrode is grounded and a predetermined voltage is applied to a liquid contacting with a second surface of the piezoelectric vibrating plate, a value of a current flowing between the liquid and the internal electrode is not more than 0.01 ?A.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: March 3, 2009
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Hidetoshi Watanabe, Toshihumi Kubo
  • Patent number: 7497558
    Abstract: A piezoelectric actuator includes individual inner-electrodes arranged between stacked ceramic sheets, individual surface-electrodes arranged in a row in a row-direction on a top surface of the stacked ceramic sheets, and connection electrodes connecting the individual inner-electrodes and the individual surface-electrodes respectively. The connection electrodes each have a size enough to cover one of the individual surface-electrodes respectively. The individual surface-electrodes and the connection electrodes are connected to each other via inner conduction electrodes filled through holes which are located at mutually different positions in a direction orthogonal to the row-direction of the individual surface-electrodes. With this, it is possible to make the contour of the piezoelectric actuator to be small, and to suppress the arching deformation or warpage of the piezoelectric actuator.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: March 3, 2009
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Jun Isono, Atsushi Ito
  • Patent number: 7498727
    Abstract: A multi-layer piezoelectric element having high durability wherein the internal electrodes and the external electrodes do not break even when operated continuously over a long time under high electric field and high pressure is provided. The multi-layer piezoelectric element comprises a stack formed by stacking at least one piezoelectric layer and internal electrodes consisting of first and second internal electrodes one on another, and external electrodes formed on two side faces of the stack with one of which being connected to the first internal electrode and the other external electrode being connected to the second internal electrode, wherein the external electrodes contain a conductive material and glass, the side whereon the external electrode is formed has cleft which has a wedge which contains glass formed therein, and the cleft is filled with the glass contained in the wedge and glass contained in the external electrode.
    Type: Grant
    Filed: March 23, 2005
    Date of Patent: March 3, 2009
    Assignee: Kyocera Corporation
    Inventors: Shigenobu Nakamura, Hiroyuki Masuyama
  • Patent number: 7498726
    Abstract: A multilayer piezoelectric element has a laminate body in which a plurality of piezoelectric bodies and a plurality of internal electrodes are alternately laminated and sintered. The plurality of internal electrodes comprise a first electrode and a second electrode. The laminate body has an active portion in which the first electrode and the second electrode are arranged to overlap in a laminate direction of the laminate body, and inactive portions in which the first electrode and the second electrode are arranged not to overlap in the laminate direction of the laminate body. The inactive portions are provided on both sides of the active portion. The inactive portions are provided with a metal oxide layer made of a material having a melting point higher than a sintering temperature of the piezoelectric bodies and being soluble in the piezoelectric bodies.
    Type: Grant
    Filed: October 22, 2007
    Date of Patent: March 3, 2009
    Assignee: TDK Corporation
    Inventors: Kazuo Mochizuki, Satoshi Sasaki
  • Patent number: 7490390
    Abstract: A manufacturing method is provided for a voltage controlled oscillator comprising an thin film BAW resonator and a variable capacitor element. The thin film BAW resonator includes an anchor section formed on a Si substrate, a lower electrode supported on the anchor section and positioned to face the Si substrate, a first piezoelectric film formed on the lower electrode, and an upper electrode formed on the first piezoelectric film. The variable capacitor element includes a stationary electrode formed on a Si substrate, an anchor section formed on the Si substrate, a first electrode supported on the anchor section and positioned to face the Si substrate, a second piezoelectric film formed on the first electrode, and a second electrode formed on the second piezoelectric film.
    Type: Grant
    Filed: April 27, 2007
    Date of Patent: February 17, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Kawakubo, Kazuhide Abe, Mayumi Morizuka
  • Patent number: 7492075
    Abstract: A multilayer piezoelectric element includes at least one piezoelectric layer unit having sintered piezoelectric ceramic and electrode layers alternately stacked together in a first direction and a positioning member that, when the at least one piezoelectric layer unit is placed in an enclosing member in such a manner that the enclosing member encloses therewith a periphery of the at least one piezoelectric layer unit along a second direction perpendicular to the first direction, controls the position of the at least one piezoelectric layer unit within the enclosing member along the second direction.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: February 17, 2009
    Assignee: NGK Spark Plug Co., Ltd.
    Inventors: Masashi Tsuzuki, Hideki Ishikawa
  • Patent number: 7492077
    Abstract: An actuator for a deformable optical component includes a stack of ferroelectric layers, a plurality of electrodes for applying a voltage across each layer; every other electrode extending to an associated first conductor path and interstitial electrodes extending to an associated second conductor path the first conductor path or receiving a first conductor lead, the second conductor path for receiving a second conductor lead to contact the respective electrodes.
    Type: Grant
    Filed: May 13, 2005
    Date of Patent: February 17, 2009
    Assignee: Xinetics, Inc.
    Inventors: Mark A. Ealey, Paul A. Davis, Jeffrey L. Cavaco
  • Patent number: 7482737
    Abstract: A piezoelectric thin film resonator has a substrate and a piezoelectric layered structure including a lower electrode, piezoelectric aluminum nitride thin film with c-axis orientation and upper electrode formed on the substrate in this order. The lower electrode are made of a metal thin film including a layer containing ruthenium as a major component having a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of ruthenium of 3.0° or less. The piezoelectric aluminum nitride thin film formed on the lower electrode has a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of 2.0° or less.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: January 27, 2009
    Assignee: UBE Industries, Ltd.
    Inventors: Tetsuo Yamada, Keigo Nagao, Eiji Masui
  • Patent number: 7479729
    Abstract: A piezoelectric actuator 3 includes a metallic vibration plate 30, an insulating layer 31, a plurality of individual electrodes 32, a piezoelectric layer 33 and a common electrode 34. The insulating layer 31 is formed on the top surface of the vibration plate 30. The individual electrodes 32 are formed on the top surface of the insulating layer 31. The piezoelectric layer 33 is formed on the top surfaces of the individual electrodes 32. The common electrode 34 is formed on the top surface of the piezoelectric layer 33 over the individual electrodes 32. A plurality of terminals 36 and a plurality of wirings 35 are formed on the top surface of the insulating layer 31. Each of the terminals 36 is associated with one of the individual electrodes 32. Each of the wirings 35 connects one of the individual electrodes 32 and the associated terminal 36.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: January 20, 2009
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Hiroto Sugahara, Kazuo Kobayashi
  • Patent number: 7477002
    Abstract: An actuator includes a stack of piezoelectric layers, and electrode layers between the piezoelectric layers. A stabilization element is attached to a side surface of the stack. The stabilization element fixes a height of the stack so that the height does not change when an operating voltage is applied to at least one of the electrode layers.
    Type: Grant
    Filed: November 7, 2001
    Date of Patent: January 13, 2009
    Assignee: EPCOS AG
    Inventor: Heinz Florian
  • Patent number: 7474040
    Abstract: In the present invention, a dual-output piezoelectric transformer for driving at least two loads is provided. The dual-output piezoelectric transformer comprises a piezoelectric piece, a set of input electrodes mounted centrally on a first and a second sides of the piece with a first polarization direction along a thickness direction of the piece, and a first and a second output electrodes polarized reversely in a second polarization direction and respectively mounted around surfaces of two ends of the piece with the second polarization direction being a longitudinal direction of the piece.
    Type: Grant
    Filed: January 4, 2007
    Date of Patent: January 6, 2009
    Assignee: National Taiwan University
    Inventors: Yao-Tien Huang, Wen-Hsin Hsiao, Yen-Chieh Wang, Yu-Yuan Chen, Wen-Jong Wu, Chih-Kung Lee
  • Patent number: 7468143
    Abstract: The piezoelectric ceramic composition of the present invention contains a main component represented by general formula {(1-n)(Ag1-xLix)m(Nb1-yTay)O3-n(M1,M2)M3M3O3} or {(1-n)(Ag1-xLix)m(Nb1-yTay)O3-nM4M5O3} and x, y, m, and n are defined to be 0.075?x<0.40, 0?y<0.2, 0.98?m?1.0, and 0.01?n?0.1. M1 is a trivalent metal element such as Bi; M2 is a monovalent metal element such as K, Na, Li or Ag; M3 and M5 each are a tetravalent metal element such as Ti, Zr, Sn or Hf; and M4 is a divalent metal element such as Ba, Sr, Ca, or Mg. With this composition, an highly reliable lead-free piezoelectric ceramic composition having a high relative dielectric constant and good piezoelectric properties such as electromechanical coupling factor k33 and piezoelectric constant d33 can be provided, and a highly reliable lead-free piezoelectric element can be fabricated using the piezoelectric ceramic composition.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: December 23, 2008
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Toshikazu Takeda