More Than Two Patents (Class 310/366)
  • Publication number: 20070267942
    Abstract: A piezoelectric film resonator for a radio-frequency circuit according to an aspect of the present invention includes a substrate and a multilayer film provided on the substrate. The multilayer film has a stacked structure in which at least two piezoelectric layers and at least three electrode layers disposed with each of the piezoelectric layers therebetween are stacked. At least one of the electrode layers is an electrode layer for excitation. The electrode layer for excitation has a structure in which a plurality of unit patterns as elements of the electrode layer for excitation are disposed periodically along a direction substantially perpendicular to a stacked direction of the stacked structure.
    Type: Application
    Filed: May 10, 2007
    Publication date: November 22, 2007
    Inventors: Hisanori MATSUMOTO, Atsushi ISOBE
  • Patent number: 7294952
    Abstract: A laminated-type piezoelectric element includes first electrode layers defining individual electrodes, second electrode layers defining common electrodes, and piezoelectric sheets sandwiched between the first and second electrode layers. The first and second electrode layers are laminated alternately. Each individual electrode has a substantially rectangle shape extending in a first direction. The individual electrodes defined in each first electrode layer are arranged at predetermined intervals in a second direction perpendicular to the first direction, to form a row. The common electrode includes a first portion having a band shape. The first portion overlaps the row when viewed in a plan view. The first portion has a pair of edges extending to be perpendicular to a long side of the rectangle shape of each individual electrode. Both ends of each individual electrode in the first direction protrude to outer positions than the edges, when viewed in the plan view.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: November 13, 2007
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Atsushi Ito
  • Patent number: 7294953
    Abstract: This invention provides a stacked piezoelectric element that has excellent durability and reliability by ensuring reliable electrical conduction between internal electrode layer and conductive adhesive, and a method of fabricating such a stacked piezoelectric element, wherein the stacked piezoelectric element 1 comprises: a ceramic stack 10 constructed by alternately stacking piezoelectric layers 11 made of a piezoelectric material and internal electrode layers 21, 22 having electrical conductivity; and external electrodes 32 bonded to the side faces 101 and 102 of the ceramic stack 10 via an electrically conductive adhesive 31.
    Type: Grant
    Filed: December 21, 2005
    Date of Patent: November 13, 2007
    Assignee: Denso Corporation
    Inventors: Akio Iwase, Shige Kadotani, Tetsuji Itou
  • Patent number: 7288874
    Abstract: The present invention is a piezoelectric actuator unit 29 having piezoelectric vibrators 33 vibrating in the lamination direction of electrode layers and piezoelectric material layers which are alternately laminated. The piezoelectric vibrators are arranged in one row in the direction of vibrator arrangement perpendicular to the lamination direction. Each of the piezoelectric vibrators includes the area on one side and the area on the other side in the direction of the vibrator width perpendicular to the lamination and vibrator arrangement directions, and either of the area on one side and the area on the other side forms active parts capable of performing piezoelectric deformation, and the other area forms inactive parts incapable of performing piezoelectric deformation, and in the adjacent piezoelectric vibrators, the arrangement of the active part and inactive part is opposite.
    Type: Grant
    Filed: October 2, 2003
    Date of Patent: October 30, 2007
    Assignee: Seiko Epson Corporation
    Inventor: Tomoaki Takahashi
  • Patent number: 7288875
    Abstract: This invention provides a laminated piezoelectric element that suppresses the peeling off of an electrically conductive adhesive and has excellent durability and high reliability, and a method of manufacturing the laminated piezoelectric element. A laminated piezoelectric element 1 has a ceramic laminate 10 formed by alternately laminating a piezoelectric layer 11 of a piezoelectric material and inner electrode layers 21 and 22 having electrical conductivity, and by having protection layers 12 of ceramics formed at both ends of the ceramic laminate 10 in a lamination direction, and that has an external electrode 34 connected to side surfaces 101 and 102 of the ceramic laminate 10 via an electrically conductive adhesive 33. One or more trenches 13 recessed inward are formed on side surfaces 121 and 122 of at least one of the protection layers 12 at both ends, and the electrically conductive adhesive 33 is filled in at least a part of the trenches 13.
    Type: Grant
    Filed: November 30, 2005
    Date of Patent: October 30, 2007
    Assignee: DENSO Corporation
    Inventors: Shige Kadotani, Akio Iwase
  • Patent number: 7288877
    Abstract: A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: October 30, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hiroyuki Kita, Hirokazu Uchiyama, Toshiyuki Matsunaga, Fumiyo Tojo
  • Patent number: 7282836
    Abstract: The invention includes a D33 mode piezoelectric actuator region, including electrodes of differing length to produce a bending motion. The invention also includes a piezoelectric actuator containing a first piezoelectric actuator region coupled to a second piezoelectric actuator region, which may be separated by the ceramic material. Applying a first potential difference between electrodes generates a first bending of the piezoelectric actuator region. Applying the negative first potential difference generates the complement first bending for the piezoelectric actuator. The piezoelectric actuator region may be used to radially move a coupled transducer by the first bending. The piezoelectric actuator may be used to radially move a coupled transducer by the first bending and/or its complement. The invention includes the methods of making the piezoelectric actuator region and the piezoelectric actuator, and their products.
    Type: Grant
    Filed: December 8, 2005
    Date of Patent: October 16, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Haesung Kwon, Hyung Jai Lee
  • Patent number: 7282839
    Abstract: Provided is a multilayer piezoelectric device high in reliability and easy in formation of a unit when incorporated into various devices. In a multilayer piezoelectric device, each second external electrode is integrally formed including a main body part electrically and physically connected to a first external electrode, and an extending part having an upper end projecting with respect to an upper face of laminate in a stack direction. This permits the extending part of the second external electrode to be used as a terminal, and, because the second external electrode is integrally formed, the second external electrode can be prevented from breaking. Therefore, it results in improving the reliability of piezoelectric device. Furthermore, between second external electrodes facing each other, a distance between extending parts is larger than a distance between main body parts, and thus it becomes easy to form a unit of the piezoelectric device when incorporated in various devices; e.g.
    Type: Grant
    Filed: October 19, 2005
    Date of Patent: October 16, 2007
    Assignee: TDK Corporation
    Inventors: Kazuo Mochizuki, Syuuzi Itoh, Hiroshi Hatanaka
  • Publication number: 20070236106
    Abstract: Provided is a piezoelectric vibrator that can finely drive a device by generating an elliptical motion using a combination of a longitudinal vibration and a flexural vibration. The piezoelectric vibrator can also provide high efficiency and be manufactured at low cost by using a simpler structure. The piezoelectric vibrator includes a piezoelectric element, first to third side electrodes, and a power transmission member. The piezoelectric element includes: a first piezoelectric element layer having a bisected top electrode formed thereon; a second piezoelectric element provided under the first piezoelectric element layer and having an internal ground electrode formed thereon; and a third piezoelectric element provided under the second piezoelectric element layer, the third piezoelectric element having an internal electrode symmetrical with the top electrode with respect to a stack plane, and a bottom electrode formed in a plane opposite to the plane where the internal electrode is formed.
    Type: Application
    Filed: March 20, 2007
    Publication date: October 11, 2007
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Burhanettin KOC, Dong Kyun LEE, Jung Ho RYU, Byung Woo KANG
  • Patent number: 7276837
    Abstract: A piezoelectric actuator has a multilayered structure of piezoelectric layers with inner electrodes interspersed between them and a contacting of the inner electrodes on alternating sides by means of outer electrodes that can supply an electrical voltage. The respective outer electrodes are attached in a net-like, mesh-like, or screen-like fashion and contacts the respective inner electrodes at least at points in the corner region of the piezoelectric actuator, wherein the outer electrode is guided around the respective corner in a predetermined region extends in the direction of the multilayered structure of piezoelectric layers, and is provided with a terminal there.
    Type: Grant
    Filed: July 10, 2003
    Date of Patent: October 2, 2007
    Assignee: Robert Bosch GmbH
    Inventor: Friedrich Boecking
  • Patent number: 7274134
    Abstract: A piezoelectric/electrostrictive structure is provided, including a plurality of stacked sheet-shaped piezoelectric/electrostrictive bodies and at least one sheet of a thin film. The interfaces between the piezoelectric/electrostrictive bodies are exposed at side faces of the piezoelectric/electrostrictive structure, the side faces have notches, and the thin film is placed on the notched portions of side faces. A method for manufacturing the piezoelectric/electrostrictive structure includes the steps of stacking a plurality of ceramic green sheets made of a piezoelectric/electrostrictive material, firing the stacked ceramic green sheets to prepare fired piezoelectric/electrostrictive bodies and forming at least one sheet of a thin film on side faces of the fired piezoelectric/electrostrictive bodies by a chemical vapor deposition process.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: September 25, 2007
    Assignee: NGK Insulators, Ltd.
    Inventors: Makoto Ohmori, Koji Kimura
  • Patent number: 7274133
    Abstract: A cell driving type piezoelectric actuator comprising: a plurality of cell driving bodies each comprising a wall portion, a cell formed by the wall portion, a piezoelectric body formed on at least one of wall portions and at least one pair of electrodes formed on the piezoelectric body; said piezoelectric operation portion being capable of changing a volume of the cell on which said piezoelectric operation portion is formed by its displacement, wherein the piezoelectric actuator comprises at least one pair of support bodies, the plurality of cell driving bodies are formed completely independent of one another and are connected to one another through at least one pair of support bodies, and the cell driving bodies and the support bodies are integrally formed by firing a green body of said piezoelectric actuator. A method for manufacturing the same is also disclosed.
    Type: Grant
    Filed: May 27, 2004
    Date of Patent: September 25, 2007
    Assignee: NGK Insulators, Ltd.
    Inventors: Yukihisa Takeuchi, Koji Kimura, Koichi Iwata, Kazuhiro Yamamoto
  • Publication number: 20070216265
    Abstract: A piezoelectric actuator comprising a stack of piezoelectric layers formed from a piezoelectric material, a plurality of internal electrodes disposed throughout the stack to define active regions of the piezoelectric material therebetween which are responsive to a voltage applied across two or more groups of the internal electrodes in use, an insulating arrangement which at least partially covers at least one surface of the stack to define a piezoelectric/insulator interface, and two or more side electrodes to connect with the two or more groups of the internal electrodes.
    Type: Application
    Filed: March 15, 2007
    Publication date: September 20, 2007
    Inventors: Michael P. Cooke, Christopher A. Goat, Simon R. Panteny, Gordon M. Reid
  • Publication number: 20070216263
    Abstract: A droplet discharging head includes a diaphragm, a fixing plate, and a piezoelectric element. The piezoelectric element includes a first electrode, a second electrode, a piezoelectric body layer interposed between the first and second electrodes, a first internal electrode extending from the first electrode between the first and second electrodes, and a second internal electrode extending from the second electrode between the first and second electrodes. At least a part of a first end face of the piezoelectric element is in contact with the diaphragm. The first end face includes a first end of the first electrode, a first end of the second electrode, and a first end of the piezoelectric body layer. At least a part of a second end face of the piezoelectric element is in contact with the fixing plate. The second end face includes a second end of the first electrode and a second end of the piezoelectric body layer.
    Type: Application
    Filed: March 19, 2007
    Publication date: September 20, 2007
    Applicant: Seiko Epson Corporation
    Inventor: Hayato Takahashi
  • Publication number: 20070216258
    Abstract: A film-forming nozzle is moved so that a boundary portion of a plurality of areas on which a piezoelectric material layer is formed by a film-forming nozzle moving relative to a vibration plate is positioned outside deformable portions of the vibration plate and overlaps with restricted portions. This reduces stress concentration on a portion of the piezoelectric layer corresponding to the boundary portion of the deposition areas, and therefore, damage of the piezoelectric material layer is prevented.
    Type: Application
    Filed: March 13, 2007
    Publication date: September 20, 2007
    Inventors: Hiroto Sugahara, Motohiro Yasui
  • Patent number: 7271526
    Abstract: A piezoelectric actuator for actuating a mechanical component, having a multilayered structure of piezoelectric layers with inner electrodes disposed between them and contacting outer electrodes on alternating sides and the piezoelectric actuator has chamfered corners or edges. In the region of the corners or edges, on the sides of the piezoelectric actuator on which the inner electrodes with alternating polarities are routed to the respective outer electrodes, the inner electrodes have a contour that makes it possible to achieve a lower field intensity between the inner electrodes of alternating polarities in the structure of piezoelectric layers. This is achieved by virtue of the fact that on the side that does not contact the outer electrodes, the edge has an obtuse angle (?) or is rounded.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: September 18, 2007
    Assignee: Robert Bosch GmbH
    Inventors: Friedrich Boecking, Ulrich Schoor, Bertram Sugg
  • Patent number: 7268471
    Abstract: An electrical component includes a base having ceramic layers and internal electrodes between at least some of the ceramic layers. The electrical component also includes an external electrode on a face of the base, which contacts at least some of the internal electrodes. The external electrode includes a layer having at least one local minimum.
    Type: Grant
    Filed: January 20, 2003
    Date of Patent: September 11, 2007
    Assignee: Epcos AG
    Inventor: Steffen Riemer
  • Patent number: 7268473
    Abstract: The invention provides a piezoelectric actuator having a stack body comprising a plurality of piezoelectric elements, each element having a positive and negative electrode pair which are electrically isolated from one another by the piezoelectric elements, the electrode pairs being arranged in groups of one or more electrode pairs, each group having a conducting arrangement in electrical connection therewith. The piezoelectric actuator further comprises a distribution electrode arrangement for connecting the conducting arrangement to a power supply, in use, wherein the distribution electrode arrangement includes a fuse arrangement. In the event of a short circuit between electrodes of a pair within one of the groups, the fuse arrangement breaks the electrical connection between the power supply and the conducting arrangement.
    Type: Grant
    Filed: June 6, 2005
    Date of Patent: September 11, 2007
    Assignee: Delphi Technologies, Inc.
    Inventor: Jean-Francois Berlemont
  • Patent number: 7262545
    Abstract: A piezoelectric actuator 1 capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell 3 defined by two side walls 6, a substrate 2 and a ceiling wall 7; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls 6 comprising piezoelectric/electrostrictive devices 4, and the piezoelectric/electrostrictive devices 4 being capable of changing a volume of the cell 3 by displacement of the walls. Each of the piezoelectric/electrostrictive devices 4 comprises a plurality of layered piezoelectric/electrostrictive bodies 14 and electrodes 18, 19 which are alternately stacked, and end portions of the electrodes 18, 19 are embedded in the piezoelectric/electrostrictive bodies 14 in at least the internal side of the cell 3.
    Type: Grant
    Filed: May 27, 2004
    Date of Patent: August 28, 2007
    Assignee: NGK Insulators, Ltd.
    Inventors: Yukihisa Takeuchi, Koji Kimura, Koichi Iwata
  • Patent number: 7262546
    Abstract: A piezoelectric/electrostrictive element including a substantially trapezoidal laminate having narrower and wider surfaces lying substantially in parallel to each other and first and second surfaces opposed to each other between the narrower and wider surfaces. The first and second surfaces are inclined at given angles to one of the narrower and wider surfaces. The laminate includes piezoelectric/electrostrictive layers and interposed internal electrodes, the internal electrodes being broken up into a first and a second group, each of the first group internal electrodes lying over one of the second group internal electrodes through one of the piezoelectric/electrostrictive layers. A first external electrode is formed on the first surface of the laminate and is coupled to the first group internal electrodes. A second external electrode is formed on the second surface of the laminate and is coupled to the second group internal electrodes.
    Type: Grant
    Filed: June 14, 2005
    Date of Patent: August 28, 2007
    Assignee: NGK Insulators, Ltd.
    Inventors: Masahiko Namerikawa, Kazuyoshi Shibata, Masaki Iwamoto
  • Patent number: 7259504
    Abstract: The invention relates to a piezoelectric actuator (1) comprising a stack of a plurality of individual piezoelectric actuator elements (2, 2?, 2?) which are arranged between inner electrodes (3, 3?, 3?). Said piezoelectric actuator comprises a first metallisation strip (4) and a second metallisation strip (5), the inner electrodes (3, 3?, 3?) being respectively connected to the first or second metallisation strips (4, 5) in an alternating manner. A first outer electrode (6) and a second outer electrode (7) are fixed to the first or the second metallisation strips (4, 5) in order to electrically contact the piezoelectric actuator (1). Said outer electrodes (6, 7) respectively comprise a connection element (8, 9) for externally contacting the piezoelectric actuator (1), and at least one region which is embodied in such a way that it compensates length variations of the piezoelectric actuator (1) in the main oscillation direction (10) as a result of its design and arrangement.
    Type: Grant
    Filed: August 13, 2003
    Date of Patent: August 21, 2007
    Assignee: Siemens Aktiengesellschaft
    Inventors: Willibald Schürz, Martin Simmet
  • Patent number: 7253553
    Abstract: Provided is an electronic component permitting lead wires or the like to be securely soldered to a plurality of respective terminal electrodes connected to electroconductive members in through holes. On a surface 7a of a stack-type piezoelectric device being an electronic component, a lead wire is soldered to a second electrode layer 23 on one end side in the longitudinal direction of one terminal electrode 17 out of two adjacent terminal electrodes, and a lead wire is soldered to a second electrode layer 23 on the other end side in the longitudinal direction of the other terminal electrode 17. Since the one end side of one terminal electrode 17 and the other end side of the other terminal electrode 17 are located on the side opposite to the side where each terminal electrode is connected to an electroconductive member 14 in a through hole 13, it is feasible to prevent the electroconductive member 14 in the through hole 13 from dissolving into a molten solder 25.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: August 7, 2007
    Assignee: TDK Corporation
    Inventor: Satoshi Sasaki
  • Patent number: 7247975
    Abstract: Provided is a thin-film piezoelectric element which reduces the influence of an oxide film left on the electrode film on the degradation of element characteristics, and a method of making the thin-film piezoelectric element. The thin-film piezoelectric element has ZrO2 as the main component of the outermost layer of the oxide film which covers the laminate. Young's modulus of the ZrO2 is 190 GPa, giving a significantly low value compared with Young's modulus of MgO, 245 GPa. Consequently, the influence of the oxide film on the reduction in the displacement magnitude of the piezoelectric film is smaller than the influence of the MgO thin film left in the conventional thin-film piezoelectric element. As a result, the thin-film piezoelectric element decreases the influence of the oxide film on the degradation of element characteristics compared with the conventional thin-film piezoelectric element.
    Type: Grant
    Filed: March 14, 2005
    Date of Patent: July 24, 2007
    Assignee: TDK Corporation
    Inventors: Kenichi Tochi, Takao Noguchi, Hiroshi Yamazaki, Ken Unno, Masahiro Miyazaki, Shigeru Shoji
  • Publication number: 20070164639
    Abstract: A multilayer piezoelectric device has a laminated body 1 having piezoelectric layers 2 laminated in the direction of a given axis “A” and internal electrode layers 4, 5 each disposed between two respective neighboring piezoelectric layers 2. The device further has a underlying layer 3 disposed on a side of the laminated body 1 and electrically connected to the internal electrode layers 4, 5, a first conductive reinforcing layer 10 joined to the underlying layer 3, a second conductive reinforcing layer 11 joined to the first conductive reinforcing layer 10, and a conductive joining material 9 joining the underlying layer 3 to the first conductive reinforcing layer 10. The second conductive reinforcing layer 11 is not directly joined by means of the conductive joining material 9.
    Type: Application
    Filed: November 21, 2006
    Publication date: July 19, 2007
    Applicant: NGK Insulators, Ltd.
    Inventors: Makoto Ohmori, Kunihiko Yoshioka, Koji Kimura
  • Patent number: 7245064
    Abstract: A piezoelectric/electrostrictive including a pair of mutually opposing vibration plates, each having a first portion and a second portion, a fixation section joined to the first portion of each of the vibration plates, and at least one piezoelectric/electrostrictive element arranged on at least one of the vibration plates. A surface of the device between the fixation section and the second portion of at least one of the vibration plates is curved.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: July 17, 2007
    Assignee: NGK Insulators, Ltd.
    Inventors: Yukihisa Takeuchi, Kazuyoshi Shibata, Masahiko Namerikawa
  • Patent number: 7242130
    Abstract: A piezoelectric device of the present invention includes first and second piezoelectric resonators. The first piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on a substrate. The second piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on the substrate. A feature of the above-structure piezoelectric device is that the piezoelectric layers, have the same film thickness, and the depth of the cavity of the first piezoelectric resonator is different from the depth of the cavity of the second piezoelectric resonator.
    Type: Grant
    Filed: November 3, 2004
    Date of Patent: July 10, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hiroyuki Nakamura, Keiji Onishi, Hiroshi Nakatsuka, Hiroshi Yamaguchi, Takehiko Yamakawa
  • Patent number: 7239067
    Abstract: A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.
    Type: Grant
    Filed: March 30, 2004
    Date of Patent: July 3, 2007
    Assignee: TDK Corporation
    Inventors: Eiju Komuro, Hisatoshi Saitou, Takao Noguchi, Masaaki Imura
  • Patent number: 7239070
    Abstract: A liquid-jet head is provided. In the liquid-jet head, a lower electrode, as a common electrode common to a plurality of piezoelectric elements, is continuously formed as far as an outer region opposite the piezoelectric elements, an auxiliary electrode layer is provided which comprises the same layers as layers constituting a lead-out electrode, and which is electrically connected to the lower electrode located outwardly of the region opposite the piezoelectric elements, a first insulation film at least in the vicinity of an end portion of a passage-forming substrate in a direction parallel to the arrangement of the piezoelectric elements is provided with a penetrated portion in a region opposite the auxiliary electrode layer, and the auxiliary electrode layer is in contact with the lower electrode via the penetrated portion provided in the first insulation film.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: July 3, 2007
    Assignee: Seiko Epson Corporation
    Inventors: Masato Shimada, Yoshinao Miyata, Tomoaki Takahashi
  • Patent number: 7233099
    Abstract: A multilayer piezoelectric element includes first and second internal electrodes laminated alternately, and a piezoelectric layer disposed therebetween. The first internal electrodes are connected to each other, and the second internal electrodes are connected to each other, via through holes that penetrate the piezoelectric layer in the laminated direction. The first internal electrode is formed so that its periphery portion is exposed on the side face of the multilayer piezoelectric element. The second internal electrode is formed so that its periphery portion is positioned inside the side face.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: June 19, 2007
    Assignee: TDK Corporation
    Inventor: Satoshi Sasaki
  • Patent number: 7224105
    Abstract: A piezoelectric element of the present invention includes a substrate, a lower electrode layer, a piezoelectric layer, an upper electrode layer, a cavity portion formed below a piezoelectric vibrating portion, and at least two bridging portions. The at least two bridging portions are formed so as not to be line-symmetric with respect to any line segment traversing the piezoelectric vibrating portion and/or so as not to be point-symmetric with respect to any point in the piezoelectric vibrating portion in a projection of the piezoelectric vibrating portion in the laminating direction.
    Type: Grant
    Filed: November 18, 2004
    Date of Patent: May 29, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Keiji Onishi, Hiroyuki Nakamura, Hiroshi Nakatsuka
  • Patent number: 7215066
    Abstract: A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
    Type: Grant
    Filed: August 4, 2005
    Date of Patent: May 8, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Kawakubo, Toshihiko Nagano, Kazuhide Abe, Michihiko Nishigaki
  • Patent number: 7215068
    Abstract: A piezoelectric element of a piezoelectric actuator is clamped by two electrodes, each of which has a conductive layer on a insulating layer. At least a connection terminal is formed by extending the conductive layer outside the insulating layer.
    Type: Grant
    Filed: August 30, 2004
    Date of Patent: May 8, 2007
    Assignees: Fujitsu Limited, NHK Spring Co., Ltd.
    Inventors: Shinji Koganezawa, Hideki Kashima
  • Patent number: 7215064
    Abstract: A piezoelectric switch for tunable electronic components comprises piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: May 8, 2007
    Assignee: HRL Laboratories, LLC
    Inventor: Sarabjit Mehta
  • Patent number: 7211933
    Abstract: The present invention provides a voltage controlled oscillator comprising an thin film BAW resonator and a variable capacitor element. The thin film BAW resonator includes an anchor section formed on a Si substrate, a lower electrode supported on the anchor section and positioned to face the Si substrate, a first piezoelectric film formed on the lower electrode, and an upper electrode formed on the first piezoelectric film. On the other hand, the variable capacitor element includes a stationary electrode formed on a Si substrate, an anchor section formed on the Si substrate, a first electrode supported on the anchor section and positioned to face the Si substrate, a second piezoelectric film formed on the first electrode, and a second electrode formed on the second piezoelectric film.
    Type: Grant
    Filed: September 8, 2004
    Date of Patent: May 1, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Kawakubo, Kazuhide Abe, Mayumi Morizuka
  • Patent number: 7211931
    Abstract: A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1<a/b<1.9 is satisfied where a is a main axis of the elliptical shape, and b is a sub axis thereof.
    Type: Grant
    Filed: October 18, 2004
    Date of Patent: May 1, 2007
    Assignees: Fujitsu Media Devices Limited, Fujitsu Limited
    Inventors: Tokihiro Nishihara, Tsuyoshi Yokoyama, Takeshi Sakashita, Masafumi Iwaki, Tsutomu Miyashita
  • Patent number: 7211930
    Abstract: A multilayer piezoelectric element is provided with a multilayer body in which internal electrodes are arranged between stacked piezoelectric layers. The multilayer body has an active part piezoelectrically active, and nonactive parts piezoelectrically nonactive. The nonactive parts are located so as to interpose the active part in between in a direction intersecting with a displacement direction of the active part. The nonactive parts are provided with a release portion for releasing restraint on displacement of the active part.
    Type: Grant
    Filed: March 25, 2005
    Date of Patent: May 1, 2007
    Assignee: TDK Corporation
    Inventor: Mitsunao Homma
  • Patent number: 7208862
    Abstract: A piezoelectric component includes piezoelectric layers and electrode layers between at least some of the piezoelectric layers. The electrode layers define a middle segment in an interior of the piezoelectric layers and end segments located between ends of at least some of the electrode layers and an end of at least one of the piezoelectric layers. The piezoelectric layers include a first piezoelectric material at the end segments and a second piezoelectric material at the middle segment between electrode layers. The first piezoelectric material has a first expansion that is less than a second expansion of the second piezoelectric material.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: April 24, 2007
    Assignee: Epcos AG
    Inventors: Heinz Florian, Sigrid Ragossnig
  • Patent number: 7205702
    Abstract: A film bulk acoustic resonator, and a method for manufacturing the same. The film bulk acoustic resonator includes a substrate, a protection layer vapor-deposited on the substrate, a membrane vapor-deposited on the protection layer and at a predetermined distance from an upper side of the substrate, and a laminated resonance part vapor-deposited on the membrane. Further, the manufacturing method includes vapor-depositing a membrane on a substrate, forming protection layers on both sides of the membrane, vapor-depositing a laminated resonance part on the membrane, and forming an air gap by removing a part of the substrate disposed between the protection layers. Accordingly, the membrane can be formed in a simple structure and without stress, and the whole manufacturing process is simplified.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: April 17, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byeoung-ju Ha, Yun-kwon Park, In-sang Song, Il-jong Song, Jong-seok Kim, Duck-hwan Kim, Jun-sik Hwang
  • Patent number: 7205700
    Abstract: A method of producing a surface acoustic wave device includes the steps of forming a first electrode film for constituting an interdigital electrode, a wiring electrode, and an electrode pad on the piezoelectric substrate, forming an insulation film on the piezoelectric substrate so as to cover the first electrode film, patterning the insulation film so that the insulation film existing on the portion of the first electrode film onto which a second electrode film is to be laminated is removed, forming the second electrode film on the portion of the first electrode film from which the insulation film has been removed, and bonding a bump onto the second electrode film.
    Type: Grant
    Filed: August 30, 2004
    Date of Patent: April 17, 2007
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Shuji Yamato
  • Patent number: 7205706
    Abstract: An object of the present invention is to provide a stacked piezoelectric element with excellent reliability and durability, a production method thereof and an electrically conducting adhesive. A stacked piezoelectric element comprising a ceramic stack obtained by alternately stacking a piezoelectric layer comprising a piezoelectric material and an internal electrode layer having electrical conductivity, and an electrically conducting adhesive layer provided to allow for electrical conduction to said internal electrode layer of the same polarity on the side surface of said ceramic stack, wherein said electrically conducting adhesive layer comprises a base resin having dispersed therein an electrically conducting filler and microparticles, and the boundary between said microparticle and said base resin is in a state that a void is formed at least in a part between those two members or in a state that when said base resin is elongated, a void can be formed between those two members.
    Type: Grant
    Filed: August 29, 2005
    Date of Patent: April 17, 2007
    Assignee: Denso Corporation
    Inventors: Shige Kadotani, Akio Iwase
  • Patent number: 7202591
    Abstract: The present invention presents a system for a compound actuator. The system includes first and second electrode layers each including two electrode sections, an intermediate electrode layer between the first and second electrode layers, and first and second electrostrictive materials that change length in an applied electrical field. The first electrostrictive material is positioned between the first and intermediate electrode layers. The second electrostrictive material is positioned between the intermediate and second electrode layers. The first electrostrictive material has a first length adjoining the first electrode section and a second length adjoining the second electrode section. The second electrostrictive material has a third length adjoining the fourth electrode section and a fourth length adjoining the fifth electrode section.
    Type: Grant
    Filed: July 7, 2005
    Date of Patent: April 10, 2007
    Assignee: The Boeing Company
    Inventors: Darin J. Arbogast, Frederick T. Calkins, Dan J. Clingman
  • Patent number: 7203551
    Abstract: In general, the invention is directed to an IMD having a piezoelectric transformer to power a lead-based sensor. The IMD powers the piezoelectric transformer with a low amplitude signal. The piezoelectric transformer serves to convert the voltage level of the low amplitude signal to a higher voltage level to drive the sensor produced by a battery in the IMD to voltage levels appropriate for IMD operation. A piezoelectric transformer offers small size and low profile, as well as operational efficiency, and permits the IMD to transmit a low amplitude signal to a remote sensor deployed within an implantable lead. In addition, the piezoelectric transformer provides electrical isolation that reduces electromagnetic interference among different sensors.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: April 10, 2007
    Assignee: Medtronic, Inc.
    Inventors: Richard P. M. Houben, Mark A. Christopherson, Adrianus P. Donders, Robert Leinders, Curtis D. Deno
  • Patent number: 7199504
    Abstract: A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.
    Type: Grant
    Filed: November 24, 2003
    Date of Patent: April 3, 2007
    Assignee: TDK Corporation
    Inventors: Eiju Komuro, Masaaki Imura, Qingxin Su, Paul B. Kirby, Roger W. Whatmore
  • Patent number: 7197798
    Abstract: A method for fabricating a piezoelectric macro-fiber composite actuator comprises making a piezoelectric fiber sheet by providing a plurality of wafers of piezoelectric material, bonding the wafers together with an adhesive material to form a stack of alternating layers of piezoelectric material and adhesive material, and cutting through the stack in a direction substantially parallel to the thickness of the stack and across the alternating layers of piezoelectric material and adhesive material to provide at least one piezoelectric fiber sheet having two sides comprising a plurality of piezoelectric fibers in juxtaposition to the adhesive material. The method further comprises bonding two electrically conductive films to the two sides of the piezoelectric fiber sheet. At least one conductive film has first and second conductive patterns formed thereon which are electrically isolated from one another and in electrical contact with the piezoelectric fiber sheet.
    Type: Grant
    Filed: September 3, 2003
    Date of Patent: April 3, 2007
    Assignee: United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: W. Keats Wilkie, Robert G. Bryant, Robert L. Fox, Richard F. Hellbaum, James W. High, Rosemary Jalink, legal representative, Bruce D. Little, Paul H. Mirick, Antony Jalink, Jr., deceased
  • Patent number: 7196458
    Abstract: A layered piezoelectric element includes a plurality of driving parts divided by grooves and non-driving parts formed at both ends of the array of the driving parts. The driving parts and the non-driving parts include the alternate layers of piezoelectric layers and internal electrodes. The common electrode of the driving parts is extended from the non-driving parts. The capacitance C (F) of each driving part, the number of the driving parts n, and the resistance R (?) between the non-driving parts satisfy R?8×10?6/n/C.
    Type: Grant
    Filed: February 6, 2003
    Date of Patent: March 27, 2007
    Assignee: Ricoh Company, Ltd.
    Inventor: Takayuki Hiyoshi
  • Patent number: 7194793
    Abstract: A method for adjusting a frequency characteristic of an edge reflection type surface acoustic wave device includes the step of obtaining a frequency characteristic of an edge reflection type surface acoustic wave device having a piezoelectric substrate. The edge reflection type surface acoustic wave device has a pair of edges of the piezoelectric substrate which define a predetermined distance therebetween. The piezoelectric substrate is cut at a position which defines a distance that is shorter than the predetermined distance when a final frequency characteristic of the edge reflection type surface acoustic wave device is to be higher than the obtained frequency characteristic. The piezoelectric substrate is cut at a position which defines a distance that is longer than the predetermined distance when a final frequency characteristic of the edge reflection type surface acoustic wave device is to be lower than the obtained frequency characteristic.
    Type: Grant
    Filed: May 13, 2004
    Date of Patent: March 27, 2007
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Michio Kadota, Yasunori Takakuwa, Seigo Hayashi, Junya Ago, Hideya Horiuchi, Mamoru Ikeura
  • Patent number: 7193354
    Abstract: An electronic apparatus comprises a display portion and a plurality of oscillators, one of which is a quartz crystal oscillator comprising: a quartz crystal oscillating circuit comprising; an amplification circuit and a feedback circuit. For example, the feedback circuit is constructed by a quartz crystal resonator comprising vibrational arms and a base portion, and having novel shape and electrode construction. Also, the quartz crystal resonator is housed in a package. In addition, from a relationship of an amplification rate of the amplification circuit and a feedback rate of the feedback circuit, an output signal of the quartz crystal oscillating circuit having an oscillation frequency of a fundamental mode of vibration for the quartz crystal resonator can be provided with a frequency of high stability.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: March 20, 2007
    Assignee: Piedek Technical Laboratory
    Inventor: Hirofumi Kawashima
  • Patent number: 7187109
    Abstract: Overlapped electrodes of an electrical component are dimensioned in such a way that when there is translational displacement of one electrode in relation to the electrode situated opposite, their area of overlap remains within a manufacturing tolerance ?/2, and also remains constant within the tolerance limits when there is a simultaneous rotation of the electrodes with respect to one another. This is achieved in that the intersecting edge pairs of the overlapping electrodes are designed parallel to one another, whereby the length, measured in the direction parallel to the respective edge pair, of the corresponding electrode everywhere exceeds by ? the corresponding length of the area of overlap.
    Type: Grant
    Filed: July 28, 2004
    Date of Patent: March 6, 2007
    Assignee: Epcos AG
    Inventors: Pasi Tikka, Ralph Stömmer, Edgar Schmidhammer, Habbo Heinze
  • Patent number: 7183698
    Abstract: A piezoelectric structure receives input from a voltage source to generate polarization and output voltage. Two surfaces are formed on the direction normal to the polarized direction. One surface has an input electrode electrically connecting to the voltage source and an output electrode to output voltage. Another surface has a ground electrode. The distance between the input electrode and the ground electrode is different from the distance between the output electrode and the ground electrode. Through the height difference of the two electrodes, the step-up and step-down ratio can be altered.
    Type: Grant
    Filed: August 29, 2005
    Date of Patent: February 27, 2007
    Assignee: Zippy Technology Corp.
    Inventors: Chin-Wen Chou, Ying-Nan Cheng, Yu-Liang Cheng
  • Patent number: 7183699
    Abstract: A stacked type electromechanical energy conversion element which is compact in size and capable of providing higher output power and enhanced operating efficiency. A plurality of electrode layers are formed, respectively, on one surfaces of a plurality of piezoelectric layers, and the material layers and said electrode layers are stacked one upon another. Electrodes are formed at least in the plurality of material layers for providing electrical connections between corresponding ones of the plurality of electrode layers. The plurality of electrode layers have a non-uniform configuration depending on a predetermined strain distribution that is to occur in the stacked type electromechanical energy conversion element.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: February 27, 2007
    Assignee: Canon Kabushi Kaisha
    Inventors: Yutaka Maruyama, Kiyoshi Nitto