Abstract: A method for detecting fluids having a certain material composition is disclosed. The method comprises at least the following steps: ionizing the fluid using at least one high-voltage electrode coupled to a high-voltage source, such that the high voltage electrode generates charge carriers and emits these charge carriers which are at least partially re-collected by measurement electrodes; measuring electrical quantities at the plurality of measurement electrodes being spaced apart from each other as well as from the high voltage electrode; determining the spatial distribution of the measured electrical quantities; comparing the spatial distribution of the measured electrical quantities with at least one reference distribution; providing an output signal responsive to the comparison and indicating the presence of a fluid component and/or the concentration of the fluid component in the fluid.

Abstract: A self charging ion current sensing circuit is provided. The self charging ion current sensing circuit is coupled to spark generation circuitry, and utilizes the spark plug electrodes as the ion current sensing electrodes. The self charging is achieved by utilizing the spark current during an ignition event to charge an ion bias capacitor. After the ignition event, the charge voltage build up on the ion bias capacitor is used to provide an ion current across the spark plug gap. The ion current is passed through an offset stage that translates the ion current sense voltage to a voltage that can be buffered and amplified from a single power source available in automotive and vehicular applications. The output of the circuit provides tri-state information, including spark current, null current, and linear representation of ion sense current.

Abstract: An integrated circuit is described. The integrated circuit, comprising: a central processor; a memory; and an electromigration compensation system associated with a plurality of leads within the integrated circuit, wherein the electromigration compensation system causes the plurality of leads to have interlocking, horizontally tapered ends that substantially reduces electromigration divergence and consequently lead resistance and circuit shorting.

Abstract: The invention provides methods and apparatuses that utilize mass spectrometry for preparation of a surface to have catalytic activity through molecular soft-landing of mass selected ions. Mass spectrometry is used to generate combinations of atoms in a particular geometrical arrangement, and ion soft-landing selects this molecular entity or combination of entities and gently deposits the entity or combination intact onto a surface.

Abstract: This invention relates to a method and system for remote detection of a targeted substance by the appropriate application of a probing signal that induces molecular resonance in the target substance to create an identifiable signature or response. In the preferred embodiment, signals transmitted are an Infrared laser beam, amplitude modulated in the range of 100 kHz frequency. The probing signal stimulates molecular resonance of the target substance which produces characteristic electron signal responses that are detected by IR detectors. A software program is used to process the electrical response signals and to compare them with electrical response signals stored in a database of known substances, thus allowing the target substance to be identified. The system may also be used to locate targeted substances. Also disclosed is an artificial ground device that provides a positive ground that provides consistent responses.

Abstract: Provided are a FET-based sensor for detecting an ionic material, an ionic material detecting device including the FET-based sensor, and a method of detecting an ionic material using the FET-based sensor. The FET-based sensor includes: a sensing chamber including a reference electrode and a plurality of sensing FETs; and a reference chamber including a reference electrode and a plurality of reference FETs. The method includes: flowing a first solution into and out of the sensing chamber and the reference chamber of the FET-based sensor; flowing a second solution expected to contain an ionic material into and out of the sensing chamber while continuously flowing the first solution into and out of the reference chamber; measuring a current in a channel region between the source and drain of each of the sensing and reference FETs; and correcting the current of the sensing FETs.

Abstract: A test structure and a process for the electromigration test of integrated circuits is suggested, in which metallization planes consisting of strip conductors of a usual thickness (11) are connected with metallization planes consisting of substantially thicker strip conductors (12) as they are required for the connection of components of higher performance.

Abstract: A method for flame sensing in a solid, liquid or gaseous fuel burner, the flame generated at an ionization electrode, the flame presence resulting in an ionizing effect on the electrode. The electrode is powered by an alternating voltage signal. The ionization phenomenon generates in the electrode a direct current. The current being sensed by a suitable sensing circuit including a control unit. This signal generator being of relatively low internal impedance to enable the measured generated current to have a high value compared with that normally used and of waveform to tend to limit the value of the direct current flowing through the electrode. The sensing and control circuit being such as to enable the presence of a parasitic current on the flame sensing electrode to be measured. A device for implementing the method is also disclosed.

Abstract: A detection membrane (11) is joined to a first surface (10a) of an electrolyte membrane (10), and hydrogen gas is supplied to a second surface (10b) thereof. If the electrolyte membrane has a defect (10c), hydrogen gas leaks to the first surface, resulting in a change in electric resistance of the detection membrane near the defect. The defect is recognized by this change. FA hydrogen electrode (14) is joined to the second surface, and an electric circuit (17) is connected between the detection membrane and the hydrogen electrode. Hydrogen gas supplied to a space facing the hydrogen electrode is ionized at the hydrogen electrode, and hydrogen ions permeates through the electrolyte membrane and hydrogenates the detection membrane. Whether or not hydrogen ion conductivity is uniform is examined by measuring electric resistance of the detection membrane, which varies depending on the amount of hydrogen ions, for each of regions.

Abstract: An evaluation device of ion behavior includes: a voltage oscillator (17) for applying, to a liquid crystal cell, a voltage including a direct-current voltage component and a voltage including no direct-current voltage component; a residual DC voltage measuring section (20) for measuring, per predetermined temperature, a plurality of combinations of (a) an application time during which the voltage including a direct-current voltage component is applied and (b) a residual DC voltage occurring after the application of the voltage; a rate measuring section (21) for measuring, per temperature, an adsorption rate coefficient of ions to an interface between a liquid crystal and an alignment film, and a desorption rate coefficient of ions from the interface, by performing curve fitting according to [Math.

Abstract: This invention relates to a method and system for remote detection of a targeted substance by the appropriate application of a probing signal that induces molecular resonance in the target substance to create an identifiable signature or response. In the preferred embodiment, signals transmitted are an Infrared laser beam, amplitude modulated in the range of 100 kHz frequency. The probing signal stimulates molecular resonance of the target substance which produces characteristic electron signal responses that are detected by IR detectors. A software program is used to process the electrical response signals and to compare them with electrical response signals stored in a database of known substances, thus allowing the target substance to be identified. The system may also be used to locate targeted substances. Also disclosed is an artificial ground device that provides a positive ground that provides consistent responses.

Abstract: A demountable pellet is disclosed for use as an electrode contact assembly. The pellet comprises a base 1 upon which is mounted a plurality of electrodes 18, 19, 20 arranged in respective spaced parallel planes and having respective contacts 23, 24, 25 protruding from them. A closure 2 for the base 1 has a member 11, 12, 13 engaging at least one of the electrode contacts. In an unassembled condition of the pellet, with the closure 2 separate from the base 1 and each closure member disengaged from its respective electrode contact, the contacts 23, 24, 25 lie in respective spaced parallel planes. In the assembled condition of the pellet with each closure member engaging its respective electrode contact, at least one of the contacts 23, 24, 25 lies in a plane other than that in which it lay in the unassembled condition of the pellet.

Abstract: An electrode for an ionization chamber and an ionization chamber including an electrode are provided wherein the electrode comprises a substrate comprising a first material, and a plurality of nanowires extending from the substrate and manufactured by processing the first material of the substrate.

Abstract: An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to outer, in that order. The linear cathode includes a linear base and a field emission film deposited coating on the linear base. The ionization vacuum gauge with low power consumption can be used in a high vacuum system and/or some special vacuum system that is sensitive to heat and light. Such a gauge can be used to determine, simply yet accurately, pressures at relatively high vacuum levels.

Abstract: MRI echo data is acquired by performing selective-excitation on regions composed of multi-slices of an object, while the object is moved continuously. The positions of the multi-slices are moved within a predetermined imaging range fixedly determined by an MRI system, according to object movement. This allows positions of the multi-slices to be changed in compliance with the moved object, so that the multi-slices positionally track with the object within the imaging range. Accordingly, a multi-slice imaging technique can be provided, which is executable during even continuous movement of the object.

Abstract: According to a first aspect of the present invention there is provided a digital signal processing circuit, one or more switches of the circuit being provided by an ion sensitive field effect transistor.

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract: Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement. In one embodiment, an ion gauge substrate is formed. The electronic portion of the MEMs ion gauge is assembled by coupling a plurality of ion collectors with the ion gauge substrate, wherein the coupling of the plurality of ion collectors with the ion gauge substrate further comprises performing an operation that causes the plurality of ion collectors to be bowed out of plane to form a three dimensional arrangement.

Abstract: A system to measure an impedance of an effluent associated with a foreline (effluent line or exhaust) is provided. This system includes a remote plasma source, a process chamber, an effluent line, an electrode assembly, an RF driver, and a detector. The remote plasma source couples to the process chambers and is operable to supply chamber-cleaning gas to the process chamber. The effluent line also couples to the process chamber where chamber-cleaning effluent exhausts the process chamber via the effluent line. The electrode assembly, located in the effluent line, is exposed to the effluent exhausting from the process chamber. The electrode assembly, coupled to the RF driver, receives an RF signal from the RF driver. The RF signal applied to the electrode assembly induces a plasma discharge within the electrode assembly and effluent line. A detector coupled to the electrode assembly detects an end point of a chamber clean of the process chamber.

Abstract: The condition of an electrochemical measuring probe (1) such as for example a pH-measuring probe, an oxygen-measuring probe, or a CO2-measuring probe is monitored and/or controlled. The measuring probe (1) has at least one electrode (EL) and is suitable for measuring the ion concentration of a process material (6). A charge storage device (Q2) which belongs to the electrode is charged up during a charge-up phase (TL) by means of a charge transfer that can be controlled by a controller unit (CU). During a subsequent test phase (TT) the resultant electrode voltage (UE) is measured at least once, and the result of the measurement is processed further.

Abstract: Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal.

Abstract: A demountable pellet is disclosed for use as an electrode contact assembly. The pellet comprises a base 1 upon which is mounted a plurality of electrodes 18, 19, 20 arranged in respective spaced parallel planes and having respective contacts 23, 24, 25 protruding from them. A closure 2 for the base 1 has a member 11, 12, 13 engaging at least one of the electrode contacts. In an unassembled condition of the pellet, with the closure 2 separate from the base 1 and each closure member disengaged from its respective electrode contact, the contacts 23, 24, 25 lie in respective spaced parallel planes. In the assembled condition of the pellet with each closure member engaging its respective electrode contact, at least one of the contacts 23, 24, 25 lies in a plane other than that in which it lay in the unassembled condition of the pellet.

Abstract: Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.

Abstract: A signal processing circuit comprising one or more ion sensitive field effect transistors, ISFETs, and a biasing circuit for biasing the or each ion sensitive field effect transistor to operate in the weak inversion region.

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract: An electronic circuit for ion sensor with the body effect reduction includes a bridge-type floating source circuit provided with an input terminal, an output terminal reflecting the change in the potential dependent on ion concentration, and an ion-sensitive field effect transistor (ISFET) wherein one terminal of the ISFET is coupled with the output terminal; a current mirror for providing a current to the bridge-type circuit; a third transistor for receiving the operating current provided by the current mirror, identical to the current provided to the ISFET; a differential amplifying circuit, wherein one input terminal of the amplifying circuit is input with a reference voltage, and the other input terminal is coupled with the output of the bridge-type readout circuit; and a third amplifier to generate a differential output voltage compensated for the body effect, temperature and time drift effects.

Abstract: Chemical analysis of impurities in buffer gas is provided at various pressures up to atmospheric. Identification of the impurities is carried out by analyzing energy of electrons releases via ionization of the impurity atoms or molecules in their collisions either with excited atoms of buffer gas or with monochromatic photons. To produce excited metastable atoms a pulsed plasma is ignited between plane anode and cathode, and electrons energy is measured in afterglow by determining second derivative of electric current in dependence of voltage applied between these electrodes. Another way, electrons energy can be analyzed by positioning a grid between anode and cathode and by using an external radiation source to ionize the impurities in equipotential space between the grid and the anode. Inter-electrode gap and gas pressure must be chosen so that distortions in the electrons energy distribution due to collisions with buffer gas should not exceed a prescribed value.

Abstract: A charge detector includes an outer housing having an entrance aperture. Within the housing is disposed a charge capture element that is electrically isolated from the outer housing. The charge capture element includes a plurality of apertures, such as provided by a mesh, and a conductive surface facing substantially away from the entrance aperture.

Abstract: An ionization detector includes a third (fence) electrode (55) between the counter electrode (53) and the sensing electrode (54). The fence electrode (53) is maintained at or near the potential of the sensing electrode (54) and traps charge movement (electrolytic current) along the detector walls associated with condensation and/or contamination within the detector. In a photoionisation detector, the fence electrode is also adapted to trap photo-induced current originating from the cathode (53). Current drawn from the fence electrode (53) provides a measure of the degree of contamination or condensation within the detector and of lamp efficiency.

Abstract: A symmetrically wired device and a process for measurement of the concentration of ions, especially hydrogen (H+) ions, in a measurement liquid. The device comprises a pH-sensitive measurement electrode, a reference electrode and a comparison electrode, all located in the measurement liquid and which places the measurement liquid at a definable ground reference. The device forms a difference signal referenced to the ground reference from the difference between a measurement signal (?pH) of the measurement electrode and the reference signal (?ref) of the reference electrode. The difference signal is dependent on the ion concentration in the measurement liquid. The device compensates for the noise potential (?chem) arising between the comparison electrode and the measurement electrode by setting a reference potential (?bez) on the comparison electrode, such that ?ref assumes a zero value.

Abstract: An electrical measurement device is described, with a measurement input, an integrated sensor, a measurement and evaluation circuit, and a measured value display, and several measured value outputs. The electrical measurement device enables not only one measured value or several measured values to be determined, but makes it possible to display and process the determined measured values depending on other values such as comparison values and setpoints. An influencing input acts on the measurement and evaluation circuit and is the connecting point for the electrical measurement device to which or via which an influencing value can be applied or input. Therefore, a value with which the measured value can be influenced in the broadest sense is applied.

Abstract: A method of fault classification in a plasma process chamber powered by an RF source includes initially running a plurality of different baseline plasma processes on the chamber. For each baseline process, the magnitudes of a plurality of Fourier components of delivered RF power are determined and stored as an impedance fingerprint for that baseline process. In the case of a fault, one or more of the baseline processes is repeated according to a predetermined decision tree to determine the current fingerprints and classify the fault by comparing the current fingerprints with the original fingerprints.

Abstract: A method of fault detection is described for use in a plasma process chamber powered by an RF source and subject to periodic standard preventive maintenance. Prior to a production run, the changes in magnitude of a plurality of Fourier components of the RF source resulting from known changes in a plurality of process conditions are determined and a single parameter which is a linear combination of a selected subset of said components is constructed. The construction is such that the combination is relatively sensitive to pre-selected process changes and relatively insensitive to said standard preventive maintenance. Then, during the production run, the single parameter is monitored to determine if there is a fault in the plasma process.

Abstract: An air ion measuring device is provided which holds the air passage rate in an ion detector as constant as possible to provide for improved air ion measurement reliability, permits a size and thickness reduction and also a reduction of parts and cost of the ion detector, permits ready cleaning thereof, provides a measure for coping with static electricity, provides good visual recognition property in the air ion data display and displays data other than air ion data and error data. An ion detector structure is formed by disposing a charge collector electrode and repelling electrodes in the vicinity of opposite ends of the charge collector electrode on one side surface of an air passage, through which air is withdrawn from one end portion and exhausted from the other end portion, and disposing a further repelling electrode on the other side surface of the air passage.

Abstract: The ion measuring device comprises an ion detector including a charge collector electrode disposed in an air passage with an air passing member provided therein and capable of collecting ions in air in the air passage and repelling electrodes disposed to face the charge collector electrode, a measurement computation device for executing computation processing on related to the charge on the charge collector electrode to obtain data representing the numbers of measured positive and negative ions per unit time and unit volume, a charging circuit including a switch for switching the positive and negative polarities of the charge applied to the repelling electrodes such that the repelling electrodes are charged to the same polarity as the polarity of measurement subject ions, and a discharging circuit for discharging the charge collector electrode at time intervals corresponding to the timings of switching by the switch.

Abstract: The invention relates to the field of micromovement measuring and can be used for recording creeping and dynamic infraprocesses both of natural and artificial origin, for example, seismic processes or infrasound and gravitation waves. The object of the invention is to raise sensitivity of measuring in a wide dynamic range. The micromovement measuring device consists of measuring element (2) and sensitive element (1), membrane (10), signal conditioner (6), the output of which is connected to the winding og the fixing electromagnet (4). According to the invention, the device is additionally provided with the pulling electromagnet (5), which interacts with the measuring element (2), the winding og the pulling electromagnet being connected to the second inverse output of the signal conditioner (6). The pulling electromagnet shall be preferably located on the membrane (10) that increases the range of the measurable movements.

Abstract: A method operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power level is increased and decreased in steps, and the gauge pressure monitored following each increase and decrease. In another embodiment the rate of change in the gauge pressure is monitored while the degas power level is increased. If it is determined from the monitored rate of change that the gauge pressure may exceed the upper limit, the degas power increases can be stopped or the degas power decreased. These operation are continued until predetermined final degas conditions are met. A display can be activated following the successful completion of the degas operation.

Abstract: A combustion condition detecting device detects combustion ions between opposing electrodes in a combustion chamber by ion current flowing between the electrodes in response to a.c. current voltage applied between the electrodes. A low pass filter for eliminating current components having high order frequencies of the a.c. voltage is disposed in a primary side of the transformer so that a waveform of the a.c. voltage approximates a sine wave. Thus, detection accuracy of the combustion ions is prevented from being affected by variation of capacitive current included in the current flowing between the electrodes, wherein the variation of the capacitive current is caused by distortion of the waveform of the a.c. voltage.

Abstract: A nondestructive testing method of condensed matter surfaces, and a sensing device for the measurement of the work function of the surface of a conducting or semiconducting sample. The sensing device includes an ionization chamber, a probe having a first surface, and a potential difference measurement circuit that is capable of measuring a difference in potential between the first surface of the probe and a surface made of another material to be tested. The ionization chamber produces ionized particles that travel out of an output of the ionization chamber and toward the probe. The probe is a non-vibrating probe having a first surface that is either a positively or negatively charged electrode. The measurement circuit of the present invention is capable of sensing the small amount of electrical current that the electrons and ions moving toward the first surface and the testing surface represent.

Abstract: The invention relates to a process and an apparatus for detecting gas-permeable damaged points in an electrically non-conductive layer which can exist as a single layer or as a multi-layer composite with at least one conductive layer, which process can be used for containers or packaging of pharmacological preparations to determine their integrity after storage.

Abstract: A power supply to be tested is placed in a vacuum chamber; the power supply is turned on and gas pressure in the chamber is reduced. As the gas pressure is reduced below 1 atmosphere, the breakdown voltage decreases; when the breakdown voltage decreases to the value of the applied voltage, arcing occurs as long as the applied voltage is greater than a minima. When a site arcs, the site is noted; the power supply is removed from the vacuum chamber; the arc site is conformally coated and the coated cured. Thereafter, the power supply is returned to the vacuum chamber and the test process repeated until the power supply no longer arcs. Thus the partial pressure test can identify the sites that have a possibility of arcing in the field and the design of the power supply modified by use of one or more conformal coatings or by otherwise changing the configuration of the power supply.

Abstract: A combustion condition detecting device detects combustion ions between opposing electrodes in a combustion chamber by ion current flowing between the electrodes in response to a.c. current voltage applied between the electrodes. A low pass filter for eliminating current components having high order frequencies of the a.c. voltage is disposed in a primary side of the transformer so that a waveform of the a.c. voltage approximates a sine wave. Thus, detection accuracy of the combustion ions is prevented from being affected by variation of capacitive current included in the current flowing between the electrodes, wherein the variation of the capacitive current is caused by distortion of the waveform of the a.c. voltage.

Abstract: Ionic current measurement glow plug with electrical terminal for the glow current of a heating element which is located on the combustion space side in a glow tube, the glow tube being located in a plug housing, insulated relative to the latter, and the plug housing being electrically connected to the engine block (ground), in the terminal-side area of the plug a diode (15) being integrated or modularly located between the glow plug body (4) and the series circuit consisting of a glow tube and a heating element.

Abstract: The invention pertains to testing technique and designed to be used in the research n the dielectric rigidity of high-voltage equipment gaseous isolation. The technical result of the invention is the achievement of gas dielectric breakdown with relatively low voltage. A corona discharge is generated by supplying the initial voltage to the electrodes, defining the discharge gap so as to ensure a three dimensional load at the corona-producing electrode. Then, the total voltage, sufficient for complete breakdown, is supplied to the discharge gap with the uniformly distributed three-dimensional load and the breakdown of a gaseous dielectric takes place. The present method provides the decrease of corona discharge and formation of impulse pedestal with the help of additional dynamic discharger in the circuit, which electrodes are switched from the closed state to the open one.

Abstract: An ionization detector includes a unique combination of elements including a non-radioactive glow discharge source, a gas flow area designed to promote mixing of sample gas with a reagent gas, a GC column interface which directs air leaks away from the sample area, and a signal electrode designed to discriminate against ion collection. This embodiment includes a body defining a detector cavity and a sample flow area. A plurality of electrodes are disposed within the body including a glow discharge source having a first and second discharge electrode located near one end of the body, a guard electrode located longitudinally intermediate to the discharge electrode and the sample flow area, and a signal electrode disposed within a signal electrode cavity located near an end opposite to the guard electrode. A column interface depends from the body, in communication with the sample flow area.

Abstract: An ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement element, as well as in the measurement region intrinsic to a second measurement element. This ionization vacuum gauge comprises a measurement element vessel, and first and second measurement parts provided within this measurement element vessel. The first measurement part comprises component electrodes including a filament, grid and ion collector, and is of an ionization-type construction for measurement of the pressure of vacuum states. The second measurement part is of a construction having different functions from those of the first measurement part, and is disposed in a space that is near the extension of the grid axis, and is away from the principal space for flying of thermal electrons emitted from the filament.

Abstract: A the power supply to be tested is placed in a vacuum chamber; the power supply is turned on and gas pressure in the chamber is reduced. As the gas pressure is reduced below 1 atmosphere, the breakdown voltage decreases; when the breakdown voltage decreases to the value of the applied voltage, arcing occurs as long as the applied voltage is greater than a minima. When a site arcs, the site is noted; the power supply is removed from the vacuum chamber; the arc site is conformally coated and the coated cured. Thereafter, the power supply is returned to the vacuum chamber and the test process repeated until the power supply no longer arcs. Thus the partial pressure test can identify the sites that have a possibility of arcing in the field and the design of the power supply modified by use of one or more conformal coatings or by otherwise changing the configuration of the power supply.

Abstract: A device and a method for converting flow of charge into a frequency signal is proposed. The device comprises: two parallel circuit branches (Z; Z′) which are arranged to receive flow of charge alternately and each of which has a series arrangement of a switching element (40; 40′), an integrator (10; 10′) and a comparator (30; 30′), wherein the switching elements (40; 40′) serve to supply the flow of charge to one of the two circuit branches (Z; Z′) and in the receiving circuit branch (Z; Z′) the integrator (10; 10′) serves to integrate the flow of charge and is configured to be resettable and the comparator (30; 30′) is configured to emit a signal when the integrated flow of charge corresponds to a specific threshold value signal.

Abstract: A probe (6) is brought into contact with a plasma produced by ionizing Ar gas, a saturation current (Ies2) at which current flowing through the probe is saturated when the potential of the probe is changed in a potential region where the potential of the probe is higher than a ground potential, and a saturation current (Iis2) at which current flowing through the probe is saturated when the potential of the probe is changed in a potential region where the potential of the probe is lower than the ground potential. Similarly, saturation currents (Ies2, Iis2) are measured by bringing the probe (6) into contact with a plasma produced by ionizing a mixed gas containing Ar gas and a process gas, such as C4F8 gas, and changing the potential of the probe (6). The negative ion density of the plasma produced by ionizing C4F8 gas is determined by using saturation current ratios (Iis1/Iis2, Ies1/Ies2).

Abstract: A detection device for analyzing charged particles. The charged particle analyzer comprises a source of charged particles and a charged particle detector spaced from the source and immersed within the source in an ionizable gas. The detector comprises at least one pair of electrodes, characterized in that the electrodes of the pair are spaced apart by a distance that is substantialy less than the spacing between the source and detector. The electrodes of the pair are maintained at different potentials, and the source is maintained at a potential different from the potentials of the electrodes. The potentials are selected such that charged particles emitted by the source are attracted from the source toward each of the pair of electrodes and such that charged particles adjacent the detector are accelerated to energies sufficient to ionize the gas.