Abstract: A surface-tracking measuring machine is provided, in which measurement range is enlarged while keeping a measuring force, responsivity, resolution thereof. For the object, the surface-tracking measuring machine has a frame (10), a probe (11) swingably supported by the frame (10) and having a tracer (15) at an end thereof, a measuring force controller (21) for controlling the measuring force applied to the probe, a displacement detector (31) for detecting a displacement of the probe, a measuring force detector (41) for detecting the measuring force applied to the probe, and a controller (51) for comparing a measuring force detected value detected by the measuring force detector and a previously commanded measuring force command value and to control the measuring force controller so that the measuring force detected value is equal to the measuring force command value.

Abstract: A dial gauge (1A) has stem bush (20) having a fitting (21) fitted to an inner wall of a stem (5) and having a predetermined clearance between a spindle (3), a holder (22) for slidably holding the spindle (3) while securing a predetermined clearance against the inner wall of the stem (5), and an elastically deformable connector (23) for connecting the fitting (21) and the holder (22), whereby an influence of deformation of the stem (5) and the fitting (21) on the holder (22) during clamping can be minimized, so that the dial gauge (1A) can be fixed to a supporting stand without deteriorating slidability of the spindle (3).

Abstract: A mechanism capable of achieving an arbitrarily specified spatial compliant behavior is presented. The mechanism is a parallel connection of multiple individual elastic components that connect a support body to a single compliantly floated body. Each elastic component is, in itself, a low friction 6 degrees of freedom (DOF) mechanism that provides compliant constraint along and/or about a single axis. The elastic components are of three functional types: 1) a “line spring” which resists only translation along its axis, 2) a “torsional spring” which resists only rotation about its axis, and 3) a “screw spring” which resists a specified combination of translation along and rotation about its axis. Through proper selection of the connection geometry, spring constant, and functional type of each elastic component, a spatial compliant mechanism capable of passive force guidance is realized.

Abstract: The invention concerns a method for determining the position of a point, in which use is made of a holder (1) with a measuring point (6) and at least three reference points (2, 3, 4), where said measuring point (6) is placed against the point which it is wished to measure, the position of said reference points (2, 3, 4) is measured and the position of said point is calculated, in which use is made of a holder (1) on which the position of said measuring point (6) is determined by holding the latter at a fixed point, rotating the holder (1) in various relative positions, then measuring the positions of the reference points (2, 3, 4) for at least two different positions of the holder (1), and calculating the relative position of the measuring point (6) with respect to the reference points (2, 3, 4).

Abstract: A touch probe has a stylus holder 16 which is supported on a radially extending flange 14 in a kinematic seat comprising pairs of balls 20 supporting rollers 24. To avoid the use of glue to fix the balls in position, the balls are located and clamped in recesses 22 on flange 14. Clamping pressure is provided by a plug 30 which is forced towards the flange by rolling a lip 54 over the protruding end of the plug. Other alternative constructions for providing the clamping force are described. An electrical circuit through the balls for producing a trigger signal includes a flexible member 40 on which electrical conducting elements 44 are formed. The member is positioned on the flange to overlie the recesses so that it is deformed into the recesses when the clamping force is applied. By making use of the clamping force in this way good electrical connections between the balls and the conducting elements is ensured and the need to connect wires to the balls is avoided.

Abstract: A gauging or measuring head for the linear dimension checking of mechanical pieces, including a casing (1), an arm (49) carrying a feeler (67) for contacting a piece to be checked, a fulcrum (74), coupled to the casing (1) and the arm (49), for enabling displacements of the arm (49) with respect to the casing (1), a return spring (95) for keeping the feeler (67) in contact with the piece during the checking, a device (98, 100) for retracting the arm (49) and a position transducer providing signals depending on the position of the arm (49) with respect to the casing (1). The fulcrum is made of a deformable element (74) including two coupling blocks (81, 83) and three laminae (75, 77, 79) permanently secured to the blocks (81, 83), and substantially arranged in two different planes of a sheaf of planes.

Abstract: Gauging head and apparatus for the linear dimension checking of mechanical pieces comprising an integral element (1) that defined an arm (5) carrying a feeler (25), a reference portion (3), and a fulcrum (13) that enables rotations of arm (5) with respect to the reference portion (3), and a differential transformer position transducer with a cylindrical shaped casing (35; 82), carrying the windings (34; 83), fixed to the reference portion (3), and a ferromagnetic core (32; 84) movable together with the arm (5). The integral element (1) is locked in an adjustable way to a support (67), by means of the cylindrical casing (35; 82). The integral fulcrum is achieved by work hardening the material and subsequently grinding it.

Abstract: A composite structure for use in a coordinate measuring machine (CMM) includes a metallic material joined to a non-metallic material, wherein each material possesses a coefficient of thermal expansion (CTE) less than or equal to 6.1×10−6 cm/cm/° C. The metallic material may be INVAR, an alloy of iron and nickel, and the non-metallic material may be carbon fiber reinforced composite. Also, the metallic material may be in the shape of a space frame with the non-metallic material in the shape of stiffeners adhered to the space frame. The modulus of elasticity of the combined space frame and stiffeners is preferably greater than 140 GPa. The space frame may be a modified I-beam with reinforcing structures and mass-reducing cutouts. The stiffener may be a square tube, wherein one stiffener is adhered to each I-beam flange of the space frame. The stiffeners are ground and lapped to produce bearing tracks of high precision for air bearings to traverse.

Abstract: A non-contact surface roughness-measuring machine is provided which can avoid damage caused by collision with a workpiece and set a non-contact surface roughness probe at an appropriate position relative to a measurement surface of the workpiece. A non-contact surface roughness probe and a touch-signal probe are attached at a tip end of an arm of a coordinate measuring machine. A stylus of the touch-signal probe is protruded relative to a detection surface of the non-contact surface roughness probe, in which the protrusion amount is within an optimum distance of the non-contact surface roughness probe relative to the measurement surface. When the probes are brought close to the workpiece and the touch-signal probe detects contact, the non-contact surface roughness probe is set within the optimum distance relative to the workpiece.

Abstract: A measuring machine includes a probe mounting portion, a probe mounted on the probe mounting portion, for contacting a measuring surface of a workpiece, and a detector for detecting an amount of displacement of the probe as the probe moves in contact with the measuring surface of the workpiece. A cleaning device is provided at the probe mounting portion, with a nozzle for ejecting gas upon the measuring surface of the workpiece when the probe is positioned close to the measuring surface. A rotative driving device is provided for rotatively driving the cleaning device about the probe.

Abstract: A scanning head for completely measuring gears and gearlike workpieces on numerically controlled measuring instruments must also posses 3-D properties for scanning unknown contours. To that end, the scanning pin or probe must deflect of its own accord in the currently prevailing direction normal to the contour being scanned. Only those scanning heads, whose behavior is statically and dynamically the same in all arbitrary deflection directions, can do this. The new scanning head achieves this by providing, for the three spatial coordinates X, Y, Z, two leaf spring parallelograms (1, 2) attached one behind the other to the stationary scanning head base (4). The first parallelogram (1), which is pivotable about the horizontal axis, permits deflections of the scanning pin carrier (3) in the XZ plane and the second parallelogram (2) permits deflections in the Y direction.

Abstract: An electrical base 32 having a stationary detection element 31 is fixed to a body case 11 movably supporting a spindle 13, and a synthetic resin made scale holder 34 is provided to synchronize with the spindle 13 and move through a guide 33. In addition, a scale 36 having a movable detection element 35 is adherently fixed to the scale holder 34 at a plurality of points. More specifically, a projection 51 is fixed through an adhesive layer 52 to the back face of the scale 36, and held in a accommodating hole 46 formed in the scale holder 34, and then adhered through an adhesive layer 53 in the circumferential direction. As a result, the reduction in weight can be achieved and a disadvantage with the reduction in weight (which is that a gap between a stationary detection element and a movable detection element is changed) can be resolved.

Abstract: In a measuring method with a probe (a touch trigger probe 70), a velocity V1 and a coordinate value P1 of the prove trigger probe 70 are detected when a contact-detection signal is generated from the probe 70, and then a coordinate value P0 at the moment of contact is found from the coordinate value P1, the velocity V1, and an elapsed time T1 of the touch trigger prove 70 since the contact detection (an elapsed time from the contact until the contact-detection signal is generated).

Abstract: A coordinate measuring equipment has at least one part that is movably guided on a guideway for measuring a workpiece and a drive for moving the part along the guideway. The drive for moving the part is connected to the guideway by means of a frictional connection.

Abstract: A dovetail accessory (16) for a dial test indicator (18) having a body (20) with a dovetail tongue (22). The accessory (16) comprises a dovetail hinge member (24) to attach in an adjustable manner the dial test indicator (18) to a dovetail extension (26) in a spindle (28) of a piece of industrial machinery (30), so that the dial test indicator (18) can be properly aligned and positioned to measure various objects on the piece of industrial machinery (30). Other dovetail accessories are also provided, such as a modified dovetail hinge member (46), a dovetail adapter (72), a dovetail track bar (88), a horizontal adjustment attachment (100) and a ninety degree angle bracket (104).

Abstract: An air-probe structure of an air-gauge nozzle that defines an air-probe bore having an elongated, relatively small-area output tip (e.g., 0.3.times.1.3 millimeters) situated at the air-probe structure's output end. Such an air-gauge nozzle is useful in controlling the distance between the bore's output tip and a rowbar workpiece (employed in an optical microlithographic pole trimming step of the fabrication process for thin-film heads) in accordance with the air pressure measured by the air gauge. The air-probe structure's output end preferably also comprises a relatively large-area protective manifold (e.g., 6.times.7 millimeters) surrounding the elongated, relatively small-area output tip.

Abstract: A mechanism capable of achieving an arbitrarily specified spatial compliant behavior is presented. The mechanism is a parallel connection of multiple individual elastic components that connect a support body to a single compliantly floated body. Each elastic component is, in itself, a low friction 6 degrees of freedom (DOF) mechanism that provides compliant constraint along and/or about a single axis. The elastic components are of three functional types: 1) a "line spring" which resists only translation along its axis, 2) a "torsional spring" which resists only rotation about its axis, and 3) a "screw spring" which resists a specified combination of translation along and rotation about its axis. Through proper selection of the connection geometry, spring constant, and functional type of each elastic component, a spatial compliant mechanism capable of passive force guidance is realized.

Abstract: The present inventions relates to a coordinate measuring apparatus for measuring an object to be measured by bringing it into contact with the object to be measured, comprising an arm movable in X, Y and Z axial directions orthogonally crossing each other and a ball probe attached to the extremity of the arm to output a touch signal when it comes into contact with the object to be measured, wherein the ball probe comprises a shaft supported with the arm and a ball attached to the extremity of this shaft to be brought into contact with the object to be measured, wherein a mark is defined on the surface of the ball for identifying a crossing line between a plane passing the center of the ball and orthogonally crossing the central axis of the shaft and the surface of the ball.

Abstract: An adjustable support structure having an indicator device for use with a coordinate measuring machine (CMM) capable of minimizing deformation of an object to be measured. The adjustable support structure includes a base portion being secured to a pillar support of the CMM. A top and bottom swivel plate are further included in the adjustable support structure and are mounted to the base portion to frictionally retain a first swivel arm. Additional swivel arms are pivotally mounted to the first swivel arm. A point support post and locking nut are still further included and threadedly engaged with an end of the final support arm. The indicator device is finally included for indicating when the point support post is in electrical contact with the object, so as to maximize support of the object while minimizing deformation thereof.

Abstract: A dial gauge with a simplified structure and reductions in number of parts and production costs. In the dial gauge having a case 10 which is composed of a case body 11, a front case member 21 provided on the front of the case body 11, and a rear case member 31 provided on the rear of the case body 11, the case body 11 and the front case member 21 are combinedly formed by using plastic materials. The rear case member 31 includes a rear cover and a reinforcing plate covering the rear of the case body 11.

Abstract: A gage mechanism for a blood pressure measuring device or other similar apparatus includes a supported shaft member having one end in contact with an inflatable bellows. A pointer is attached at an opposite end of the shaft and a helically wound spring is attached to the shaft and a supporting structure. As the bellows inflates, the shaft is axially displaced and causes rotation due to the constraint of the helical ribbon spring, causing a corresponding angular deflection of the attached pointer relative to an indicating scale. The mechanism includes a first adjustment member for allowing the pointer to be preset to a zero or calibrated position, and a second adjustment mechanism that controls the amount of angular rotation of the shaft and pointer for a displacement of the bellows.

Abstract: A conversion mechanism of a dial gauge is provided with a spindle having a measuring point on the top end, and a sector gear having an abutting portion abutting on an engaging portion provided on the spindle, in which a sliding movement of the spindle is converted into a turning movement of the sector gear through the engaging portion and the abutting portion, then the turning movement is converted into a turning amount of a pointer. In such conversion mechanism of the dial gauge, the sector gear is integrally molded with the metal abutting portion with a plastic material, and the pointer adjusting means is provided, which enables to change the turning angle of the pointer without changing the position in the sliding direction of the measuring point on the spindle. Since the sector gear is integrally built, the cost of parts can be decreased, and since the pointer adjusting means is provided, the measurement at the easy-to-read position on the dial plate can be materialized.

Abstract: A swing amount magnifying mechanism is disclosed, which converts a swing angle S of a first arm 41 pivotally mounted on a first shaft 5 is converted by an adjacent second arm 26 into a swing angle .theta.. A movable surface 141A which transmits swinging of the first arm 41 to a transmitting pin 28A of the second arm 26 is inclined with respect to a neutral line M. Magnification factor K (.theta./S) thus can be stabilized over a side range of the angle .theta. without being affected by displacement of the transmitting pin 28A in the direction of a neutral line M. Highly accurate swing amount conversion is thus obtainable with a fixed magnification factor without substantial component alteration.

Abstract: A coordinate measuring machine carries a modular touch trigger probe 100, via an adaptor 200, on its movable arm 10. The probe 100 consists of a retaining module 102 which is mounted to the adaptor 200, and a stylus module 104 which is magnetically connected to the retaining module 102 in a manner which enables the exchange of one stylus module 104 for another. The adaptor consists of a pair of coupling members 202,204 which are urged into mutual engagement by magnets 212. Automatic exchange of stylus modules occurs by using movement of the arm 10 to disengage a stylus module 104 from the retaining module 102. Similarly, the exchange of one probe for another is carried out by using movement of the arm 10 to disengage the lower coupling member 204 from the upper coupling member 202.

Abstract: A coordinate measuring machine includes a stationary baseplate, a workpiece receptacle, a tracing head movable relative to the baseplate, and a supply, control and evaluation device. The baseplate has legs which are mounted pivotably on at least three fixed locations on the baseplate and on a body which carries the tracing head. The length or the inclinations of the legs can be adjusted in an accurately measurable manner.

Abstract: The invention is directed to a method for controlling a coordinate measuring apparatus wherein the probe head (2) and the probe pin (19) of the apparatus are control driven in accordance with desired data Pi. The probe pin (19) is movably attached to the probe head (2). In the method, the probe pin for measuring the workpiece (15) can touch down on the surface of the workpiece to be measured or can be lifted off of this surface. The speed of measurement is increased by selecting the angle (.alpha.down, .alpha.up) between the direction of movement vres of the probe head (2) when touching down or when lifting off and the projection of the direction of movement toward the plane tangential to the workpiece surface in the touchdown/liftoff point (Pdown, Pup) to be less than 30.degree..

Abstract: A touch probe includes a base structure and a stylus supporting member. The base structure and stylus supporting member are connected by six extensible legs that permit the stylus supporting member to move with six degrees of freedom relative to the base structure. A plurality of sensors are arranged to measure movement of the stylus supporting member relative to the base structure along all six axes.

Abstract: A sensing system has a sensor arranged in the immediate neighborhood of a contacting shaped body. The sensor is connected to a circuit which is likewise arranged in the neighborhood of the contacting shaped body and emits electromagnetic radiation when the sensor responds to contact by the contacting shaped body with a surface to be measured.

Abstract: A metrology device determines the position of a machine component relative to a datum along three linear and three rotational axes. The metrology device has a pair of support structures connected by six legs that are each disposed at an angle with respect to the next adjacent leg. One of the support structures can be connected to the datum and the other can be connected to the machine component. A sensor cooperates with each leg to sense the actuation of that leg as the support structures move relative to one another. The combination of signals provided by the legs can be used to track movement of the machine component relative to the datum.

Abstract: The invention is directed to a coordinate measuring apparatus wherein the drives (3, 5, 6) for the measuring sleds of the apparatus are controlled on circularly-shaped paths to machine-control adjust the spatial orientation of the probe pin 9. The probe pin is attached to a passive rotation-pivot joint and has a probe ball which is driven into one of several centering gaps of a body 10. In this way, a separate drive for the rotation-pivot joint 8 is not needed.

Abstract: A manual three dimensional coordinate measuring machine has a probe manually movable along three orthogonal coordinate axes, X, Y and Z, and a Z axis member supporting the probe. The size and shape of a workpiece is determined by displacements along the three axes from a predetermined origin when the probe contacts the workpiece. The manual coordinate measuring machine further includes a slide ring positioned at the bottom side of the Z axis member and at least one elastic member. The slide ring is movable in an arbitrary direction relative to the Z axis and along the Z axis. The slide ring is held at a predetermined position in the plane and along the Z axis by the at least one elastic member. The at least one elastic member allows the slide ring to move in the plane or along the Z axis by elastic deformation of the at least one elastic member in response to a force which is larger than a predetermined value.

Abstract: A three-axis sensor device, such as a probe, includes a base structure and a stylus supporting member. The base structure and stylus supporting member are connected by three linkages that limit movement of the stylus supporting member relative to the base structure to movement along the three linear axes. Each linkage includes parallel articulated legs that limit rotational motion of the stylus supporting member. Three sensors also are disposed between the base structure and the stylus supporting member to sense movement of one with respect to the other.

Abstract: The invention is directed to a probe head of a coordinate measuring apparatus for conducting measurements on a workpiece. The probe head has a first longitudinal axis and has a probe pin mounted on the probe head. The probe pin has a second longitudinal axis defining an angle with the first longitudinal axis. A joint-free, rigidly-configured adjusting device adjusts this angle when the probe pin is not in contact with the workpiece.

Abstract: A multi-coordinate touch probe including a deflectable stylus, a stylus support, and a sensor arrangement for sensing the deflection of the stylus and for generating a deflection signal, with the deformation parameters of the assembly stylus/support, which include a geometrical layout of the support, a geometrical shape of the stylus, and properties of a stylus material, being so selected that a noticeable scanning direction-dependent characteristic is eliminated.

Abstract: A differential transformer includes a primary coil for excitation and first and second secondary coils for detection which can be wound up on an outer surface of a bobbin made of a non-magnetic substance. In the bobbin, i.e., in a differential coil composed of the primary coil and the first and second secondary coils, a core is movably inserted in an axial direction thereof and is made of a magnetic substance. In the differential transformer, when AC current is applied on the primary coil, an induced voltage corresponding to a relative displacement between the core and the differential coil is generated, so that a size of a measured member can be measured by detecting the induced voltage. In the first and second secondary coils, a compound conducting wire is used, which includes two conducting wires which are different from each other in forms of a thermal coefficient of resistivity and are connected by a predetermined rate with regard to their length.

Abstract: In a touch sensor for detecting the deflection of a feeler pin or the like, which is mounted for movement against a pressure element in a housing (1, 27), the pressure element is to consist of two magnets (23, 24) of opposite polarity, one of them being associated with the feeler pin or the like.

Abstract: A back-plunger type displacement detecting apparatus is provided having a thinner case. The back-plunger type displacement detecting apparatus has a spindle secured to the case to extend perpendicular to the display surface of a digital display unit. A movable member is secured to the case and extends perpendicular to the direction of movement of the spindle. A converting mechanism converts the displacement of the spindle into displacement of the movable member. An electrical unit detects the displacement of the movable member and displays the detected value on the digital display unit.

Abstract: A touch probe has a sensing module 10 and a stylus module 12 magnetically retained and kinematically located thereon. A stylus holder 102 is biased into a kinematic rest location within the stylus module 12. The sensing module 12 has a fixed structure provided by connector 14, cylindrical housing 16, and circuit supporting structure 18. An intermediate load member 30 is connected to structure 18 at one end by means of a relatively resilient diaphragm 40 and at the other by three supporting struts 50, extending at an angle of 45.degree. to the axis A. The load member 30 carries a circular retaining plate 22 upon which the stylus module 12 is located. During a measurement operation, a force applied to stylus tip 112 will cause bending of struts 50, and deformation of diaphragm 40 prior to movement of the stylus holder 102 out of its kinematic rest position. Strain gauges provided on the struts 50 detect this bending and generate an output signal accordingly.

Abstract: A gauge for checking linear dimensions of mechanical parts (41) comprises a support casing (4) substantially arranged along a longitudinal direction, and housing a transducer unit (5). The transducer unit (5) includes an axially movable rod (12). A ball-shaped element (23), moveable depending on the dimension of the mechanical part, is fixed at an end of an elongate element (22), having a second end coupled to the moveable rod (12) and a flexible cylindrical section (30). An abutment member (25) defines an inclined surface portion (26), having a Vee cross-section, for housing and guiding the ball shaped element (23).

Abstract: A dial indicator comprising a body having an dial face with marked graduations; a longitudinally reciprocating rod extending from the body, the rod having a standard rack internal to the body and an end of the rod external to the body having a contact surface; an interacting series of gear assemblies inside the body, one of the gear assemblies having a crowned pinion, the crowned pinion being driven by the rack; and a dial hand attached to the axle of another of the gears; whereby longitudinal pressure on the contact surface causes the rod to retract longitudinally into the body, the distance of retraction being indicated by the dial hand on the dial face.

Abstract: A probe head for a coordinate measuring machine is provided with a heat control management system which regulates the amount of heat generated within the probe head in order to provide thermal stability thereof. The heat control system includes a processor which determines the amount of current passed to one or more motors within the probe head over a predetermined time interval. The processor then determines whether auxiliary heat sources should be activated in order to provide thermal stability. In one embodiment the auxiliary heat sources are provided by passing a high frequency current through the motors of the probe head.

Abstract: A coordinate measuring machine includes a support structure, an articulated arm having a first end pivotally connected to the support structure and a second end that is movable in a horizontal plane. A Z-ram assembly is mounted to the second end of the articulated arm. The Z-ram assembly includes a Z-ram housing and a probe that is vertically movable with respect to the Z-ram housing. The probe is movable within a measurement volume defined by the articulated arm and the Z-ram assembly. The coordinate measuring machine further includes a measuring assembly for determining coordinates of the probe in the measurement volume. The articulated arm preferably includes first and second arm assemblies that have a parallelogram configuration to prevent substantial rotation of the Z-ram assembly as the articulated arm is moved in the horizontal plane. The angles of the articulated arm are preferably measured using a sensor which includes a pattern of parallel, straight grating lines.

Abstract: A probe for a position determining apparatus includes a sensing space and a movable stylus supported for three-dimensional position determining movement which extends into the space. A device emits sensing radiation into the space and a collector collects the sensing radiation from the space. A deflector is supported on the stylus within the space to deflect emitted sensing radiation and is movable with position determining movement of the stylus. The deflector concentrates the sensing radiation and the collector is sensitive to variations in the intensity distribution of collected deflected radiation which occur due to the three-dimensional movement of the stylus.

Abstract: A measuring probe has a stylus carrier supported on a fixed member in a rest position when no force acts on the stylus, the stylus carrier being deflected from its rest position to produce a signal when an external force is applied to the stylus. The support for the stylus carrier comprises two concentric rings of ball bearings of different pitch circle diameters and arranged that each ball on one of the members contacts two adjacent balls on the other member. An additional annular surface is provided on one of the members and is contacted by each of the balls on the other member. The arrangement provides that the force required to deflect the stylus is substantially equal in all directions of the force, and that the movable member is properly guided during its deflection to the point where a signal is produced.

Abstract: A coordinate measuring apparatus carries a video camera 6 and a mechanical probe head 7 having a probe element 8 for contact-measuring the workpiece surface. With the aid of the coordinate measuring apparatus, the locations on the workpiece 9 to be mechanically contacted are driven to under visual control with the aid of the monitor 10 connected to the video camera. For this purpose, the probe element 8 is located in the viewing field of the video camera 6.

Abstract: The electronic system (20) of the probe head of a coordinate measuring machine permits the digital setting of parameters which determine the nature and manner of signal processing, such as trigger levels, the characteristic of frequency filters, and time intervals between several coherent probe signal pulses. Different parameter combinations are stored together in data files which can be called up in accordance with the selected measurement task or in accordance with the probe configuration which has been installed in probe head.

Abstract: A monitoring system having a stylus mounted to a support that controllably moves the stylus along a travel path as it contacts an object of interest. The object is supported by a rotating turntable and held in place by a manually actuatable retainer that exerts a repeatable downward force on the object. A frame that supports the stylus is supported by a flexure plate that makes the task of orienting the frame easier. The frame supports a saddle that can be raised and lowered by a belt system driven by a D.C. pancake motor. The entire monitoring system achieves a required degree of accuracy in monitoring object shape at a reduced manufacturing cost.

Abstract: A continuous air flow probe transducer gage assembly which is configured to permit a continuous selectively controlled flow of air therethrough so as to selectively actuate a spring-biased air piston probe slidably mounted therein from its retracted rest position into its extended soft contact measuring position against a part being measured. The continuous air flow probe transducer assembly is adapted to be a part of a computer controlled system whereby several variable air flow modes are delivered therethrough so that selective rest position air flow modes, high volume air flow calibration modes and operative soft contact air flow measuring modes are used to actuate the probe transducer in its operative use environment.

Abstract: An invention provides an arrangement for accomplishing three objects. The first is correcting distortions caused by probe geometry in probe microscope or profilometer data. The second is calculating apparent probe data from models. The third is deducing the shape of the probe tip from a standard or reference sample. The correction of distorted images data is done by mathematically placing one or more known or hypothetical tip surfaces at one or more points of the distorted image surface to provide a reconstructed surface, which is the envelope surface formed by all such tip surfaces. The calculation of probe microscope image data from one or more mathematical models of sample surfaces is done by mathematically placing one or more known or hypothetical inverted probe tip surface at one or more points on the mathematical model surface, and taking the image surface to be the envelope formed by all such tip surfaces.

Abstract: A probe head (10) includes a support (12) by which the probe head is retained on the quill of a coordinate positioning machine, and a rotor (14) which is magnetically retained on the support (12). The rotor (14) is rotatable between a plurality of indexed angular positions provided by a ring or balls (26) and three adjacently positioned pairs of rollers (24). A drive dog shaft (20) is linearly movable to disengage the balls (26) from the rollers (24), and rotatable to rotate the rotor (14) to a new indexed position, whereupon the drive dog shaft (20) is retracted to re-engage a set of three balls (26) with the rollers (24). Exchange of a measuring probe (16) is performed by removing the entire rotor (14), and exchanging it for a further rotor carrying a different measuring probe. The engagement elements provided by rollers (24) and balls (26) thus serve the functions of (a) indexing and (b) repeatably .[.retaining.]. .Iadd.positioning .Iaddend.a rotor (14) on the support (12).