With Wave-modifying Means (e.g., Reflectors, Resonators, Diffractors, Multistrip Couplers, Etc.) Patents (Class 333/195)
  • Patent number: 11955949
    Abstract: A resonator includes: interdigital transducer (IDT) including first electrode including first base on piezoelectric substrate and extended in reference direction, and first protrusions connected to the first base and extended in direction intersecting with the reference direction, and second electrode including second base on the piezoelectric substrate and extended in the reference direction, and second protrusions connected to the second base and extended in direction intersecting with the reference direction, each of the second protrusions extended to have one of the first protrusions inserted between the second protrusion and another second protrusion adjacent to the second protrusion, wherein a width of each of first specific protrusions included between one end of the IDT and first position at first distance from the one end, among the first protrusions and the second protrusions, decreases from first specific protrusion closest to the first position toward first specific protrusion closest to the one e
    Type: Grant
    Filed: May 14, 2021
    Date of Patent: April 9, 2024
    Assignee: WISOL CO., LTD.
    Inventors: Toshihiko Kawamoto, Ryota Sato, Sang Tai Yu, Je Cheol Lee
  • Patent number: 11949405
    Abstract: A double mode SAW (DMS) filter includes: a plurality of interdigital transducers (IDTs), each having a plurality of Type 1 electrode fingers and a plurality of Type 2 electrode fingers formed on a piezoelectric substrate, wherein one Type 2 electrode finger among the plurality of Type 2 electrode fingers is disposed between two adjacent Type 1 electrode fingers among the plurality of Type 1 electrode fingers, and in a first IDT and a second IDT included in the plurality of IDTs to be adjacent to each other, one Type 1 electrode finger of the second IDT is disposed between two Type 1 electrode fingers of the first IDT. Accordingly, it is possible to provide a DMS filter capable of improving the amount of attenuation in an attenuation band adjacent to the wide band side for the passband and miniaturizing a product by saving space.
    Type: Grant
    Filed: May 20, 2021
    Date of Patent: April 2, 2024
    Assignee: WISOL CO., LTD.
    Inventors: Kensei Uehara, Takahiro Sato
  • Patent number: 11936359
    Abstract: An acoustic wave device includes a substrate, an interdigital transducer electrode including electrode fingers on a main surface of the substrate, and a protection film covering the main surface of the substrate, and side surfaces and upper surfaces of the electrode fingers. The protection film includes a portion covering the main surface of the substrate, an intermediate portion between two of the electrode fingers adjacent to each other, and a vicinity portion of the electrode fingers. The intermediate portion is thicker than the vicinity portion.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: March 19, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Akira Michigami
  • Patent number: 11916542
    Abstract: An acoustic wave filter device includes first and second terminals, an inductor connected to the first terminal, and a longitudinally coupled resonator coupled between the inductor and the second terminal. The longitudinally coupled resonator includes at least one first IDT electrode coupled to the first terminal, and at least one second IDT electrode connected to the second terminal. A total capacitance value of the at least one first IDT electrode is greater than a total capacitance value of the at least one second IDT electrode.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: February 27, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Kenichi Uesaka
  • Patent number: 11894835
    Abstract: A filter device has a first piezoelectric plate spanning a first and second cavity of a substrate. A first and second interdigital transducer (IDT) are on a front surface of the first piezoelectric plate over the first and second cavity. A dielectric layer is formed on the first piezoelectric plate and covers the first IDT and second IDT. A second piezoelectric plate is bonded to a front surface of the dielectric layer over the first cavity and the second cavity. A second dielectric layer is formed on a front surface of the second piezoelectric plate over the first cavity but not over the second cavity. The thickness of the dielectric layer, the first piezoelectric plate and the second piezoelectric plate can be selected to tune a shunt resonator over the first cavity and a series resonator over the second cavity.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: February 6, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Bryant Garcia, Pintu Adhikari, Andrew Guyette
  • Patent number: 11881841
    Abstract: A multiplexer includes a plurality of filters, in which one input/output terminal of each of the plurality of filters is connected to a common terminal, a first filter included in the plurality of filters is a ladder filter and includes at least one series arm resonator connected on a path connecting the common terminal and another input/output terminal of the first filter, at least one parallel arm resonator connected between a connection node provided on the path and a ground, and a switch which is connected in series to a parallel arm resonator connected most nearby to the common terminal among at least one parallel arm resonator and switches between conduction and non-conduction of a node to which the parallel arm resonator is connected and the ground.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: January 23, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Junpei Yasuda
  • Patent number: 11881837
    Abstract: Aspects of this disclosure relate to a surface acoustic wave device with a vertical stack over a piezoelectric layer. The vertical stack can include a first acoustic reflector disposed on the piezoelectric layer, a second acoustic reflector disposed on the piezoelectric layer, and an interdigital transducer electrode disposed on the piezoelectric layer and positioned between the first acoustic reflector and the second acoustic reflector. The interdigital transducer electrode has a first side that is closer to the first acoustic reflector and a second side that is closer to the second acoustic reflector. A vertical arrangement of the vertical stack can be configured such that an acoustic wave propagation velocity of a first region between the first side and a first reflector is faster than an acoustic wave propagation velocity of a second region between the first side and the second side.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: January 23, 2024
    Assignee: Skyworks Solutions, Inc.
    Inventors: Joshua James Caron, Rei Goto, Benjamin Paul Abbott, Hiroyuki Nakamura
  • Patent number: 11881836
    Abstract: An acoustic wave device comprises a piezoelectric substrate, interdigital transducer electrodes having an electrode pitch ?0, and first and second reflector gratings disposed on opposite respective sides of the interdigital transducer electrodes in a propagation direction of a main acoustic wave through the acoustic wave device, the first reflector grating having a different electrode pitch ?1 than an electrode pitch ?2 of the second reflector grating to suppress ripples in a conductance curve of the acoustic wave device.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: January 23, 2024
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Xiao Zhang, Tomoya Komatsu, Yiliu Wang
  • Patent number: 11876506
    Abstract: An acoustic wave filter includes a series-arm resonator, a first parallel-arm resonator, and a second parallel-arm resonator. The series-arm resonator is disposed on a path connecting first and second input/output terminals. The first parallel-arm resonator is disposed on a path that connects ground with a node, which is located on a path connecting the series-arm resonator with the first input/output terminal. The second parallel-arm resonator is disposed on a path that connects ground with a node, which is located on a path connecting the series-arm resonator with the second input/output terminal. The parallel-arm resonator has a resonant frequency lower than the resonant frequency of the second parallel-arm resonator. The first parallel-arm resonator has an anti-resonant frequency higher than the anti-resonant frequency of the second parallel-arm resonator. The second parallel-arm resonator has the highest resonant frequency of all the parallel-arm resonators.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: January 16, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Akira Michigami
  • Patent number: 11876505
    Abstract: An acoustic wave filter device includes first and second terminals, a longitudinally coupled resonator coupled between the first terminal and the second terminal, and an inductor connected between a path and a ground potential, the path connecting the first terminal and the longitudinally coupled resonator to each other. The longitudinally coupled resonator includes at least one first IDT electrode coupled to the first terminal, and at least one second IDT electrode connected to the second terminal. A total capacitance value of the at least one first IDT electrode is smaller than a total capacitance value of the at least one second IDT electrode.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: January 16, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Kenichi Uesaka
  • Patent number: 11870418
    Abstract: An acoustic wave device includes first and second acoustic wave elements. The first acoustic wave element is disposed on a piezoelectric substrate, and includes at least one first IDT electrode. The second acoustic wave element is disposed on the piezoelectric substrate, and includes at least one second IDT electrode. The first and second acoustic wave elements are adjacent to each other in the direction of acoustic wave propagation. A diffracting component that diffracts an acoustic wave is disposed between the first IDT electrode and the second IDT electrode. The diffracting component includes a gap that defines and functions as a slit to diffract an acoustic wave.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: January 9, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Toru Yamaji, Tetsu Takahashi
  • Patent number: 11863160
    Abstract: A radio frequency filter includes at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port. Each of the sub-filters has a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, and portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the front surface of the plate, the conductor pattern includes interdigital transducers (IDTs) of a respective plurality of resonators, with interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. A thickness of the portions of the piezoelectric plate of the first sub-filter is different from a thickness of the portions of the piezoelectric plate of the second sub-filter.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: January 2, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Andrew Guyette, Neal Fenzi, Greg Dyer, Sean McHugh
  • Patent number: 11855606
    Abstract: An elastic wave device includes an LiNbO3 substrate, a first elastic wave resonator including a first IDT electrode and a first dielectric film, and a second elastic wave resonator including a second IDT electrode and a second dielectric film. A Rayleigh wave travels along at least one surface of the elastic wave device. A thickness of the first dielectric film differs from a thickness of the second dielectric film. A propagation direction of an elastic wave in the first elastic wave resonator coincides with a propagation direction of an elastic wave in the second elastic wave resonator. Euler angles of the LiNbO3 substrate fall within a range of (0°±5°, ?, 0°±10°).
    Type: Grant
    Filed: September 12, 2022
    Date of Patent: December 26, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Masakazu Mimura
  • Patent number: 11848661
    Abstract: A filter includes an additional circuit including first and second IDT electrode groups connected in multiple stages between first and second input/output terminals, the first IDT electrode group includes first and second IDT electrodes side by side in a propagation direction of an acoustic wave, and the second IDT electrode group includes third and fourth IDT electrodes side by side in the propagation direction. One end of each of the first and second IDT electrodes is respectively connected to the first and second input/output terminals. Other ends of the first and second IDT electrodes are connected in common and to a ground. One ends of the third and fourth IDT electrodes are connected in common. Other ends of the third and fourth IDT electrodes are connected in common. The additional circuit is connected in parallel with at least a portion of a filter circuit.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: December 19, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Yuichi Takamine
  • Patent number: 11838005
    Abstract: A BAW resonator filter can include a BAW resonator pass-band filter ladder, the BAW resonator pass-band filter ladder can be configured to pass frequency components of an input signal in a pass-band of frequencies received at an input node of the BAW resonator pass-band filter ladder to an output node of the BAW resonator pass-band filter ladder. A first rejection-band series resonator can be coupled in series between an input port of the BAW resonator pass-band filter ladder and the input node, the first rejection-band series resonator can have a first anti-resonant frequency peak in a rejection-band of frequencies that is less than the pass-band of frequencies. A second rejection-band series resonator can be coupled in series between an output port of the BAW resonator filter and the output node, the second rejection-band series resonator can have a second anti-resonant frequency peak in the rejection-band of frequencies.
    Type: Grant
    Filed: January 20, 2023
    Date of Patent: December 5, 2023
    Assignee: Akoustis, Inc.
    Inventors: Ya Shen, Michael D. Hodge
  • Patent number: 11838007
    Abstract: Aspects of this disclosure relate to a multiplexer that includes an acoustic wave filter including acoustic wave resonators on at least two die with a transmission line electrically connecting the acoustic wave resonators on the two die. The acoustic wave filter can include a plurality of acoustic wave resonators on a first die electrically connected to at least one acoustic wave resonator on a second die via the transmission line. The acoustic wave resonator on the second die can provide a relatively high impedance at a respective passband of one or more other filters of the multiplexer. This can reduce effects of the transmission line of the acoustic wave filter on a respective passband of one or more other filters of the multiplexer.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: December 5, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventor: Tomoya Komatsu
  • Patent number: 11838006
    Abstract: An acoustic wave device includes a piezoelectric substrate including a piezoelectric layer made of lithium tantalate, an IDT electrode on the piezoelectric substrate, and a pair of reflectors on both sides of the IDT electrode on the piezoelectric substrate in an acoustic wave propagation direction. SH waves are used as a principal mode. The IDT electrode includes electrode fingers and the pair of reflectors each including electrode fingers. When a length along a direction orthogonal to a direction in which the electrode fingers extend is a width, each of the reflectors includes first and second electrode fingers having different widths. Four consecutive electrode fingers, which are any four of the electrode fingers of each of the reflectors, include both of the first and second electrode fingers and distances between centers of the four consecutive electrode fingers are equal or substantially equal.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: December 5, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Akira Michigami, Katsuya Daimon
  • Patent number: 11824522
    Abstract: Aspects of the disclosure relate to wireless communication, and high-frequency filters with resonators configured to systematically modify phase characteristics of an antenna reflection coefficient. One example is a wireless communication apparatus for a multi-band system comprising a frequency band filter circuit having a filter passband that includes a first band of the multi-band system. The frequency band filter circuit comprises a plurality of resonators coupled between an antenna port and a signal port and a resonant structure electrically coupled to the plurality of resonators. The resonant structure has a resonance outside of the first band and a second band of the multi-band system, the resonance being closer to the second band than to the first band.
    Type: Grant
    Filed: November 11, 2020
    Date of Patent: November 21, 2023
    Assignee: RF360 Singapore Pte. Ltd.
    Inventors: Volker Schulz, Gerhard Kloska, Ibrahim Mehinovic, Philipp Schwegler
  • Patent number: 11811390
    Abstract: According to various embodiments, there is provided a resonator device that includes a first interdigital transducer and a second interdigital transducer that is electrically connected to the first interdigital transducer. Both the first interdigital transducer and the second interdigital transducer are configured to resonate at a common frequency. At least one of an electrode width and an electrode pitch of the first interdigital transducer is different from the respective electrode width and/or electrode pitch of the second interdigital transducer such that spurious peaks of the resonator device are lower in amplitude as compared to spurious peaks of each of the first interdigital transducer and the second interdigital transducer.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: November 7, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: You Qian, Humberto Campanella Pineda, Rakesh Kumar
  • Patent number: 11799445
    Abstract: Aspects of this disclosure relate to an acoustic wave device that includes a multi-layer interdigital transducer electrode. The acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer. The interdigital transducer electrode includes a first interdigital transducer electrode layer positioned between a second interdigital transducer electrode layer and the piezoelectric layer. The second interdigital transducer electrode layer can include aluminum and having a thickness of at least 200 nanometers. The acoustic wave device can include a temperature compensation layer arranged such that the interdigital transducer electrode is positioned between the piezoelectric layer and at least a portion of the temperature compensation layer. Related filters, modules, wireless communication devices, and methods are disclosed.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: October 24, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Tomoya Kodama, Shinichi Hakamada, Hironori Fukuhara, Yosuke Hamaoka
  • Patent number: 11799450
    Abstract: A radio frequency module includes a radio frequency filter (10), and the radio frequency filter (10) includes a terminal (11), a terminal (12), an impedance element (Z) disposed in series on a path (13) connecting the terminal (11) and the terminal (12), and a parallel arm resonator (P) connected between a node (N) on the path (13) and a ground. The impedance element (Z) is a capacitor or an inductor, and a wiring length A1 between the node (N) and the parallel arm resonator (P) is shorter than a wiring length B1 between the impedance element (Z) and a terminal (terminal (11), for example) out of the terminal (11) and the terminal (12) having a shorter wiring length to the impedance element (Z).
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: October 24, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Hirotsugu Mori
  • Patent number: 11799443
    Abstract: An acoustic wave device includes a supporting substrate, an acoustic reflection layer, a piezoelectric layer, and an IDT electrode. At least one of a high acoustic impedance layer and a low acoustic impedance layer is a conductive layer in the acoustic reflection layer. When a wavelength of an acoustic wave determined by an electrode finger pitch of the IDT electrode is ? and a region between an envelope of tips of first electrode fingers and an envelope of tips of second electrode fingers is an intersecting region, the conductive layer overlaps at least the intersecting region in plan view in a thickness direction of the supporting substrate, and a distance from the tips of the first electrode fingers to an end of the conductive layer in a direction in which the first electrode fingers extend is more than 0 and not more than about 12?.
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: October 24, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Masashi Omura, Tetsuya Kimura
  • Patent number: 11791799
    Abstract: The present disclosure relates to a ladder-type surface acoustic wave (SAW) device, which includes a piezoelectric layer, two reflective structures, at least one series interdigital transducer (IDT) coupled between a first signal point and a second signal point, and at least one shunt IDT. The at least one shunt IDT is coupled at least between the first signal point and ground, or between the second signal point and ground. Herein, the two reflective structures, the at least one series IDT, and the at least one shunt IDT reside over the piezoelectric layer. The at least one series IDT and the at least one shunt IDT are arranged between the two reflective structures.
    Type: Grant
    Filed: July 19, 2021
    Date of Patent: October 17, 2023
    Assignee: Qorvo US, Inc.
    Inventor: Manjunath Swamy
  • Patent number: 11791798
    Abstract: An acoustic wave device includes a piezoelectric substrate, and an IDT electrode provided on the piezoelectric substrate. The IDT electrode includes an overlap region where first and second electrode fingers overlap each other in a first direction. The overlap region includes a central region located in a substantially central portion of the overlap region with respect to a second direction. The central region includes a low acoustic velocity portion with an acoustic velocity less than the acoustic velocity in another portion. The overlap region includes first and second low acoustic velocity regions. The first and second low acoustic velocity regions are respectively located on first-and-second-busbar sides from the central region. The IDT electrode includes first and second high acoustic velocity regions. The first and second high acoustic velocity regions are respectively located outside the first and second low acoustic velocity regions with respect to the second direction.
    Type: Grant
    Filed: November 5, 2019
    Date of Patent: October 17, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Kazuhiro Takigawa
  • Patent number: 11791566
    Abstract: A multiferroic antenna apparatus and method are described which provides increased energy efficiencies and ease of implementation. Magnetoelastic and/or magnetostrictive resonator are coupled to a piezoelectric substrate, along with electrodes coupled to its opposing surfaces. In receive mode the resonators create mechanical waves in response to being excited into magnetic oscillation by receiving electromagnetic radiation, and these mechanical waves coupled to the piezoelectric substrate causing it to generate an electrical output signal at said electrodes. In transmit mode an electrical signal coupled through the electrodes induces mechanical waves in the piezoelectric substrate directed to the resonators which are excited into magnetic oscillation to output electromagnetic waves.
    Type: Grant
    Filed: February 4, 2021
    Date of Patent: October 17, 2023
    Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Abdon E. Sepulveda, Gregory P. Carman, Jinzhao Hu, Joseph Devin Schneider, Elmer Wu, Zhi Yao, Sidhant Tiwari, Wenzhong Yan
  • Patent number: 11784633
    Abstract: The present disclosure relates to a ladder-type surface acoustic wave (SAW) device, which includes a piezoelectric layer, two reflective structures, at least one series interdigital transducer (IDT) coupled between a first signal point and a second signal point, and at least one shunt IDT. The at least one shunt IDT is coupled at least between the first signal point and ground, or between the second signal point and ground. Herein, the two reflective structures, the at least one series IDT, and the at least one shunt IDT reside over the piezoelectric layer. The at least one series IDT and the at least one shunt IDT are arranged between the two reflective structures.
    Type: Grant
    Filed: July 19, 2021
    Date of Patent: October 10, 2023
    Assignee: Qorvo US, Inc.
    Inventor: Manjunath Swamy
  • Patent number: 11742830
    Abstract: An elastic wave device includes a piezoelectric substrate, a first elastic wave element on the piezoelectric substrate and including at least one first interdigital transducer electrode and a first reflector in an area of the first interdigital transducer electrode at one side in a propagation direction of elastic waves, and a second elastic wave element on the piezoelectric substrate and including at least one second interdigital transducer electrode and a second reflector in an area of the second interdigital transducer electrode at one side in the propagation direction of elastic waves. The first and second reflectors are disposed side by side in the propagation direction. A reflection member, between the first and second reflectors, reflects elastic waves in at least a direction different from the propagation direction.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: August 29, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Kenji Inate
  • Patent number: 11734523
    Abstract: An RFID tag for marking storm drains incorporates the tag circuitry into a dome decal providing a flexible substrate capped by a self-leveling clear polymer. The RFID tag is placed between the polymer and the substrate on an electromagnetic radiation decoupling layer allowing a low profile fitting within the decal while allowing the decal to be used on metal drain surfaces. The decal includes a printed environment-promoting message relating to connection of the storm.
    Type: Grant
    Filed: June 13, 2019
    Date of Patent: August 22, 2023
    Assignee: BERNTSEN INTERNATIONAL, INC.
    Inventors: Michael Klonsinski, Jason Amos, Sumukh Ramesh, William Rushing
  • Patent number: 11728784
    Abstract: A radio frequency filter includes at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port. Each of the sub-filters has a piezoelectric plate having front and back surfaces, the back surface attached to a substrate, and portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the front surface of the plate, the conductor pattern includes interdigital transducers (IDTs) of a respective plurality of resonators, with interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. A thickness of the portions of the piezoelectric plate of the first sub-filter is different from a thickness of the portions of the piezoelectric plate of the second sub-filter.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: August 15, 2023
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Andrew Guyette, Neal Fenzi, Greg Dyer, Sean McHugh
  • Patent number: 11722122
    Abstract: A surface acoustic wave (SAW) resonator comprises a plurality of interdigital transducer (IDT) electrodes disposed on a multilayer piezoelectric substrate including a layer of piezoelectric material having a lower surface bonded to an upper surface of a layer of a dielectric material. The dielectric material has a lower surface bonded to an upper surface of a carrier substrate. The plurality of IDT electrodes include an upper layer and a lower layer. The upper layer is formed of a material having a higher conductivity than the lower layer. The lower layer is formed of a material having a higher density than the upper layer to provide for reduction in size of the SAW resonator.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: August 8, 2023
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Rei Goto, Gong Bin Tang, Keiichi Maki
  • Patent number: 11689180
    Abstract: An acoustic wave device includes a piezoelectric body portion, an interdigital transducer electrode connected to a first terminal and a second terminal, and a reflector connected to the second terminal. In the interdigital transducer electrode, in the interdigital transducer electrode, where, of a group of electrode fingers, the electrode finger located at one end in a second direction is a first end electrode finger and the electrode finger located at another end is a second end electrode finger, the first end electrode finger is located between the reflector and the second end electrode finger in the second direction. An outer busbar portion of one of a first busbar and a second busbar, not connected to the first end electrode finger, is located on an inner side in the second direction relative to a center portion, in a first direction, of the first end electrode finger.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: June 27, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takanao Suzuki, Koji Miyamoto
  • Patent number: 11683019
    Abstract: A surface acoustic wave device includes a piezoelectric substrate and a pair of interdigital transducer electrodes. The pair of interdigital transducer electrodes include an alternating region as a region where the electrode fingers connected to one busbar and the electrode fingers connected to the other busbar are alternately provided. When a region on an end portion side of the alternating region and a region including distal end portions of the plurality of electrode fingers is referred to as an edge region, a propagation velocity of a surface acoustic wave in the edge region is slower than a propagation velocity of a surface acoustic wave in the alternating region. A propagation velocity of a surface acoustic wave in a busbar region as a region where the busbar is disposed is faster than the propagation velocity of the surface acoustic wave in the alternating region.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: June 20, 2023
    Assignee: NDK SAW Devices Co., Ltd.
    Inventors: Naoto Matsuoka, Makiko Nakamura, Susumu Yoshimoto
  • Patent number: 11677376
    Abstract: Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate, a piezoelectric plate having front and back surfaces, and an acoustic Bragg reflector between a surface of the substrate and the back surface of the piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. The IDT is configured to excite a shear primary acoustic mode in the piezoelectric plate in response to a radio frequency signal applied to the IDT. All fingers of the IDT are disposed in a respective grooves in the piezoelectric plate.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: June 13, 2023
    Assignee: Murata Manufacturing Co, Ltd.
    Inventor: Viktor Plesski
  • Patent number: 11671071
    Abstract: An acoustic wave device includes a silicon oxide film, a piezoelectric body, and an interdigital transducer electrode laminated on a support substrate made of silicon. Where a wave length that is determined by an electrode finger pitch of the interdigital transducer electrode is ?, a thickness of the support substrate is greater than or equal to about 3?. An acoustic velocity of the first higher mode that propagates through the piezoelectric body is an acoustic velocity VSi=(V1)1/2 of bulk waves that propagate in the support substrate, which is determined by V1 out of solutions V1, V2, and V3 of x derived from the mathematical expression Ax3+Bx2+Cx+D=0, or higher than VSi.
    Type: Grant
    Filed: September 15, 2022
    Date of Patent: June 6, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takuya Koyanagi, Hideki Iwamoto
  • Patent number: 11646716
    Abstract: An acoustic resonator filter includes: a series unit including at least one series acoustic resonator electrically connected, in series, between first and second ports configured to pass a radio frequency (RF) signal; a first shunt unit disposed on a first shunt connection path between the at least one series acoustic resonator and a ground, the first shunt unit including a plurality of shunt acoustic resonators connected to each other in series and having different resonance frequencies; and a second shunt unit disposed in a second shunt connection path between the at least one series acoustic resonator and the ground, the second shunt unit including at least one shunt acoustic resonator and having higher inductance than inductance of the first shunt unit.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: May 9, 2023
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Chan Hee Park, Sung Tae Kim, Jung Woo Sung
  • Patent number: 11632095
    Abstract: Embodiments of the present application provide a wafer level surface acoustic wave filter and a package method, the surface acoustic wave filter includes a wafer, an electrode layer, a supporting wall and a cover plate; wherein, the wafer includes a substrate layer and a piezoelectric thin film layer combined together by wafer bonding, the electrode layer is arranged on a surface of the piezoelectric thin film layer, the supporting wall surrounds between the piezoelectric thin film layer and the cover plate to form a sealed cavity; and the cover plate includes at least a first material layer, which uses the same material as the substrate layer.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: April 18, 2023
    Assignee: Spreadtrum Communications (Shanghai) Co., Ltd.
    Inventors: Jing Chen, Cong Liang
  • Patent number: 11631515
    Abstract: A filter device includes a first filter including series resonators and parallel resonators, a first inductor connected in parallel between a first terminal and the first filter, a second inductor provided in series between the first filter and a second terminal, and a third inductor provided in series in a channel connecting the parallel resonator and ground, the third inductor is incorporated in a multilayer substrate, the first filter is mounted on a main surface of the multilayer substrate and incorporated in a filter chip, and the first inductor and the second inductor are chip inductors including coil conductors and are mounted on the main surface of the multilayer substrate beside the filter chip so as to be adjacent to each other and such that coil axes thereof are orthogonal or substantially orthogonal to each other.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: April 18, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Takao Mukai
  • Patent number: 11621691
    Abstract: Interdigital transducer (IDT) and reflective structure arrangements for surface acoustic wave (SAW) devices are disclosed. Representative SAW devices are described herein with reduced overall size while maintaining good quality factors. In certain embodiments, a SAW device may include an IDT arranged between reflective structures on a piezoelectric material. The reflective structures may include reflective IDTs that are configured to have a phase difference with the IDT to reflect and confine acoustic waves in the piezoelectric material. In certain embodiments, the reflective structures may be electrically connected to at least one of an input signal or an output signal. In this manner, the reflective structures may be configured with reduced size as compared to conventional reflective structures such as gratings, thereby providing a SAW device with reduced dimensions without a negative impact on device performance.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: April 4, 2023
    Assignee: Qorvo US, Inc.
    Inventor: Manjunath Swamy
  • Patent number: 11621690
    Abstract: A method of manufacturing an acoustic wave device is disclosed. The method includes attaching a support layer to a ceramic layer. The support layer has a higher thermal conductivity than the ceramic layer. The ceramic layer can be a polycrystalline spinel layer. The method also includes bonding a piezoelectric layer to a surface of the ceramic layer. The method further includes forming an interdigital transducer electrode over the piezoelectric layer.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: April 4, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Hironori Fukuhara, Rei Goto, Keiichi Maki
  • Patent number: 11621688
    Abstract: An acoustic wave device includes a piezoelectric layer and first and second electrodes. The first and second electrodes face each other in a direction intersecting with a thickness direction of the piezoelectric layer. The acoustic wave device uses a bulk wave of a thickness-shear primary mode. A material of the piezoelectric layer is lithium niobate or lithium tantalate. The piezoelectric layer is on a first main surface of the silicon substrate. The acoustic wave device further includes a trap region on a side of a second main surface of the piezoelectric layer.
    Type: Grant
    Filed: March 25, 2022
    Date of Patent: April 4, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takashi Yamane, Tetsuya Kimura, Sho Nagatomo, Katsuya Daimon, Hideki Iwamoto
  • Patent number: 11611325
    Abstract: An acoustic wave device includes an interdigital transducer electrode connected to first and second terminals, and a reflector connected to the second terminal. In a group of electrode fingers of the interdigital transducer electrode, the electrode fingers at one end and another end in a second direction are respectively first and second end electrode fingers, the first end electrode finger includes a wide portion at a distal end portion. The first end electrode finger is located between the reflector and the second end electrode finger in the second direction. An inner busbar portion of one of first and second busbars not connected to the first end electrode finger, is located on an inner side in the second direction relative to the wide portion of the first end electrode finger so as not to overlap the wide portion of the first end electrode finger in a first direction.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: March 21, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takanao Suzuki, Koji Miyamoto
  • Patent number: 11606081
    Abstract: A filter device includes a substrate having piezoelectricity, a first filter including an IDT electrode disposed on the substrate, a terminal electrode disposed on the substrate, a first wiring electrode disposed on the substrate and connecting the first filter and a terminal electrode, and a dielectric film disposed above the substrate to cover the IDT electrode. At least a portion of the first wiring electrode is not covered with the dielectric film.
    Type: Grant
    Filed: February 19, 2020
    Date of Patent: March 14, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Yuichi Takamine
  • Patent number: 11595024
    Abstract: An elastic wave device includes a piezoelectric substrate, an IDT electrode on the piezoelectric substrate, and a silicon oxide film arranged on the piezoelectric substrate to cover the IDT electrode. The IDT electrode includes first and second electrode layers laminated on each other, the first electrode layer is made of metal or an alloy with a density higher than a density of metal of the second electrode layer and a density of silicon oxide of the silicon oxide film, the piezoelectric substrate is made of LiNbO3 and ? is in a range of equal to or greater than about 8° and equal to or less than about 32° with Euler Angles (0°±5°, ?, 0°±10°) of the piezoelectric substrate, and the silicon oxide film contains hydrogen atoms, hydroxyl groups, or silanol groups.
    Type: Grant
    Filed: June 3, 2019
    Date of Patent: February 28, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Hideaki Takahashi, Hirokazu Sakaguchi, Yasuharu Nakai
  • Patent number: 11569433
    Abstract: An acoustic wave resonator includes: a piezoelectric substrate; and an interdigital transducer (IDT) located on the piezoelectric substrate, the IDT including a pair of comb-shaped electrodes having a plurality of electrode fingers and a bus bar to which the plurality of electrode fingers are coupled, the IDT having: a first region in which a pitch of electrode fingers is substantially constant; a second region in which a pitch of electrode fingers decreases at closer distances to an outer side; and a third region in which a pitch of electrode fingers increases at closer distances to an outer side, the second region being located outside the first region in an arrangement direction of the plurality of electrode fingers, and the third region being located outside the second region in the arrangement direction.
    Type: Grant
    Filed: March 15, 2018
    Date of Patent: January 31, 2023
    Assignee: TAIYO YUDEN CO., LTD.
    Inventors: Hikaru Shimomura, Naoki Takahashi, Yuki Endo, Kota Okubo
  • Patent number: 11563422
    Abstract: A filter circuit comprises in a signal line a band filter (BF) allowing to let pass a useful frequency band and a notch filter (NF) circuited in series to the band filter for filtering out a stop band frequency. The notch filter comprises a series circuit of a number of parallel shunt elements (SE1 . . . SE6) wherein each shunt element is shifted infrequency against the other shunt elements that the frequencies thereof are distributed (f1 . . . F6) over a notch band. All shunt elements may be realized as a SAW one-port resonator (TRNF) including regions with different pitches.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: January 24, 2023
    Assignee: RF360 EUROPE GMBH
    Inventor: Roeland Heijna
  • Patent number: 11533806
    Abstract: A filter includes a first input/output electrode and the second input/output electrode, and is arranged on a first main surface of a mounting substrate. The mounting substrate includes a first land electrode, a second land electrode, a ground terminal, and a plurality of via conductors. The first land electrode is connected to the first input/output electrode. The second land electrode is connected to the second input/output electrode. The ground terminal is located closer to a second main surface side than the first main surface in a thickness direction of the mounting substrate. The plurality of via conductors is arranged between the first main surface and the second main surface, and is connected to the ground terminal. The plurality of via conductors is located between the first land electrode and the second land electrode in a plan view from the thickness direction of the mounting substrate.
    Type: Grant
    Filed: April 2, 2021
    Date of Patent: December 20, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Hiroshi Matsubara, Masanori Kato, Yukiteru Sugaya, Syunsuke Kido
  • Patent number: 11528010
    Abstract: A multiplexer includes a transmission filter and a reception filter connected to a common terminal, a first inductor connected to the common terminal, and a multilayer substrate on which the transmission filter and the reception filter are mounted and which includes dielectric layers. The transmission filter includes a parallel-arm resonator connected to a path between the common terminal and a transmission terminal and a parallel-arm terminal, and a second inductor connected to the parallel-arm terminal and ground. The first inductor includes a first coil pattern on a first dielectric layer and a second coil pattern on a second dielectric layer. The second inductor includes a third coil pattern on the first dielectric layer and that is magnetically coupled to the first coil pattern. The inductance value of the second coil pattern is greater than that of the first coil pattern.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: December 13, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Tomoko Taguchi
  • Patent number: 11522516
    Abstract: An apparatus is disclosed for a surface-acoustic-wave filter using lithium niobate (LiNbO3). In an example aspect, the apparatus includes at least one surface-acoustic-wave filter including an electrode structure, a substrate layer, and a piezoelectric layer disposed between the electrode structure and the substrate layer. The piezoelectric layer includes lithium niobate material configured to enable propagation of an acoustic wave across its planar surface in a direction along a first filter axis. A second filter axis is along the planar surface and perpendicular to the first filter axis. A third filter axis is normal to the planar surface. An orientation of the first, second, and third filter axes is relative to a crystalline structure of the lithium niobate material as defined by Euler angles ?, ?, and ?. A value of ? has a range approximately from ?70° to ?55° or at least one symmetrical equivalent.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: December 6, 2022
    Assignee: RF360 EUROPE GMBH
    Inventors: Ulrike Monika Roesler, Ingo Bleyl
  • Patent number: 11476828
    Abstract: An acoustic wave device includes a silicon oxide film, a piezoelectric body, and an interdigital transducer electrode laminated on a support substrate made of silicon. Where a wave length that is determined by an electrode finger pitch of the interdigital transducer electrode is ?, a thickness of the support substrate is greater than or equal to about 3?. An acoustic velocity of the first higher mode that propagates through the piezoelectric body is an acoustic velocity Vsi=(V1)1/2 of bulk waves that propagate in the support substrate, which is determined by V1 out of solutions V1, V2, and V3 of x derived from the mathematical expression Ax3+Bx2+Cx+D=0, or higher than Vsi.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: October 18, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Takuya Koyanagi, Hideki Iwamoto
  • Patent number: 11476827
    Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a piezoelectric layer including multiple thinned regions of different thicknesses each bounding in part a different recess, different groups of electrodes on or adjacent to different thinned regions and arranged for transduction of lateral acoustic waves of different wavelengths in the different thinned regions, and at least one bonded interface between the piezoelectric layer and a substrate. Optionally, a buffer layer may be intermediately bonded between the piezoelectric layer and the substrate. Methods of producing such devices include locally thinning a piezoelectric layer to define multiple recesses, bonding the piezoelectric layer on or over a substrate layer to cause the recesses to be bounded in part by either the substrate or an optional buffer layer, and defining multiple groups of electrodes on or over the different thinned regions.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: October 18, 2022
    Assignee: Qorvo US, Inc.
    Inventor: Kushal Bhattacharjee