Abstract: An electromagnetic relay includes a fixed terminal, a movable contact piece, and a support portion supporting the fixed terminal. The fixed terminal includes a fixed contact, a first terminal portion on which the fixed contact is disposed, a second terminal portion extending from one of both ends of the first terminal portion, a first protrusion disposed on the second terminal portion. The fixed terminal is bent between the first and second terminal portions. The first terminal portion has a first terminal surface opposite to the movable contact piece. The second terminal portion has a second terminal surface connected to the first terminal surface. The support portion has a contact surface contacting the first terminal surface of the first terminal portion, and a first side surface including a first groove where the first protrusion is fitted. The first protrusion is disposed on the second terminal surface of the second terminal portion.

Abstract: A connector assembly involving a plug connector that incorporates a photoelectric conversion element that conducts optical/electrical and electrical/optical signal conversion, and an actuation device that drives said photoelectric conversion element, and a receptacle connector mated with said plug connector, with the plug connector and the receptacle connector being electrically connected through mutual contact between terminals, wherein, in the plug connector, the front end side of a fiber optic cable used for optical signal transmission is connected to the rear end side of said plug connector and extends from the rear, lateral terminals are arranged in each of a pair of lateral edge portions that extend in the forward-backward direction, while end terminals are arranged in a front end edge portion 34 that extends perpendicular to the forward-backward direction.

Abstract: Electrical switching devices, such contactor and fuse devices, are disclosed that have improved reliability particularly through thermal cycling. One electrical switching device according to the present invention comprises an outer housing and internal operational components within the outer housing. An internal housing in included in that outer housing that surrounds at least some of the internal operational components. A sealing material is also included within the outer housing that is capable of forming a hermetic seal within the outer housing, wherein the sealing material contacts the internal housing. The internal housing has a CTE that substantially matches the CTE of the sealing material. Electrical system according to the present invention comprises an electrical circuit and an improved electrical switching device electrically connected to the electrical circuit to reliably open or close the circuit.

Abstract: A thin-plate-typed rotating module includes a rotating element, a driving unit and a base board. The rotating element is rotatable about a first axial direction and a second axial direction in a limited degree. The driving unit connects the rotating element for driving the rotating element to rotate about the first and second axial directions. The base board is furnished with a control module which is connected with the driving unit for controlling the driving unit to operate.

Abstract: A thin film actuator having transversely oriented structural stiffeners that serve to increase actuation stroke that results from longitudinal curvature. The thin film actuator may be deployed within electromechanical devices such that an actuatable deflection of a tip of the actuator plate produces the actuation stroke. The thin film actuator may include an actuator plate affixed to a substantially rigid frame structure. The actuator plate protrudes along a longitudinal axis away from the frame structure such that the actuator plate is cantilevered from the frame structure by some distance along this longitudinal axis. The thin film actuator includes a piezoelectric film on a surface of the actuator plate. Activation of the piezoelectric film generates tensile stress or compressive stress at the surface, thereby inducing a bending moment that causes the actuator plate to undergo longitudinal curvature and some lesser degree of transverse curvature.

Abstract: A radio frequency (RF) switching circuit is provided. The RF switching circuit includes a low-figure-of-merit (FOM) switching path that requires a longer duration to be switched on and off and a high-FOM switching path having a higher FOM than the low-FOM switching path but that can be switched on and off faster than the low-FOM switching path. In one aspect, the RF switching circuit passes an RF signal via the high-FOM switching path while toggling the low-FOM switching path to help reduce overall switching time of the RF switching circuit. In another aspect, the RF switching circuit passes the RF signal via the low-FOM switching path whenever the low-FOM switching path is switched on to help improve overall FOM of the RF switching circuit. As a result, the RF switching circuit may achieve a good overall response time and a reasonable overall FOM.

Abstract: A high-speed solenoid includes a casing, a least two pairs of first permanent magnet and second permanent magnet installed in the casing, and coils corresponding to the pairs of first permanent magnet and second permanent magnet provided in the same number as the number thereof in a bobbin of a mover. In magnetic paths formed by the pairs of first permanent magnet and second permanent magnet and the coils, each magnetic path corresponding to each pair of first permanent magnet and second permanent magnet is separated from each other. Therefore, the multiple magnetic paths are formed to operate the mover. The high-speed solenoid has an advantage in that the mover is operated at a relatively high speed.

Abstract: A relay includes a fixed terminal, a fixed contact connected to the fixed terminal, a movable contact piece facing the fixed terminal, a movable contact, a card, and a drive unit configured to generate a driving force to operate the card. The movable contact is connected to the movable contact piece and faces the fixed contact. The card is made from resin and presses the movable contact piece to operate the movable contact piece. The card includes a first pressing portion and a second pressing portion. The first and second pressing portions are configured to contact the movable contact piece and press the movable contact piece. The second pressing portion is disposed apart from the first pressing portion in a width direction of the movable contact piece. The first and second pressing portions are disposed inside side edges of the movable contact piece in the width direction respectively.

Abstract: A movable contact piece is movable in an open direction and a closed direction with respect to a first fixed terminal and a second fixed terminal. A first movable contact is connected to the movable contact piece. The first movable contact is disposed facing a first fixed contact. A second movable contact is connected to the movable contact piece. The second movable contact is disposed facing a second fixed contact. At least one of the first fixed contact or the first movable contact has a material property different from that of at least one of the second fixed contact or the second movable contact.

Abstract: The contact switching device includes a first terminal, a first contact, a second terminal, and a base. The first contact is attached to the first terminal. The base includes a first attachment portion, a second attachment portion, and a groove portion. The first terminal is attached to the first attachment portion. The second terminal is attached to the second attachment portion. The groove portion is arranged between the first attachment portion and the second attachment portion. The groove portion has a shape in which the inside is larger than the entrance.

Abstract: A method and device for controlling an electronic lock are disclosed. The electronic lock includes a lock catch and a lock body that includes a first lock hook and a second lock hook. The first lock hook has a first lock hook locking position where it is engaged with the lock catch and a first lock hook unlocking position where it is separated from the lock catch. The second lock hook has a second lock hook locking position where it locks the first lock hook in the first lock hook locking position and a second lock hook unlocking position where it is separated from the first lock hook. The method includes: detecting whether a locking operation occurs; and when detecting a locking operation, controlling at least one of the first lock hook and the second lock hook to vibrate, allowing the second lock hook to lock the first lock hook in the first lock hook locking position or to be separated from the first lock hook.

Abstract: An electromagnetic relay includes a casing, a coil set, a rotating bridge, first and second extension arm, first and second switch conductive plate assemblies, and first and second gripper modules. The novel design of the rotating bridge allows the first and second switch conductive plate assemblies to have synchronous contact or disconnection and provide sufficient and appropriate force to a first movable contact and a first fixed contact of the first switch conductive plate assembly and a second movable contact and a second fixed contact of the second switch conductive plate assembly to achieve a stable conduction and ensure a reliable separation for a disconnection, so as to achieve the effects of reducing the excessive change of resistance during operation, preventing high temperature caused by incomplete contacts, and improve application performance.

Abstract: A fan casing assembly, connection assembly and method for moving a fan casing cooler. The fan casing assembly for the turbine engine can include an annular fan casing with a peripheral wall having a flow path defined through the casing. A fan casing cooler can mount along the peripheral wall in order to confront a cooling fluid flow within the flow path in order to cool a fluid through the fan casing cooler.

Abstract: A cartridge includes a substrate including a polymerase chain reaction (PCR) zone. The PCR zone includes a first heating region, a second heating region spaced away from the first heating region and a detection region. A microchannel is formed in the substrate. The microchannel receives a fluid flowing therethrough, the microchannel passing through the first heating region and second heating region to thermally cycle the fluid. The microchannel passes through the detection region after the fluid has been thermally cycled.

Abstract: An electro-technical device, includes an input electrical connection supplied with an input signal and electrically isolated from an output electrical connection. A bar magnet is pivotally mounted on a pedicel between the input electrical connection and the output electrical connection. A pair of coils disposed on opposite sides of the bar magnet and each being supplied with an electronic signal from a sensor, the bar magnet being responsive to an electromagnetic filed generated by the pair of coils to cause the bar magnet to contact the input electrical connection and the output electrical connection and complete a circuit and send out a control signal.

Abstract: An electromagnetic relay includes a fixed contact holder, a moving contact holder, an electromagnetic device, and a magnet. The fixed contact holder extends in a predetermined direction and is provided with a fixed contact. The moving contact holder also extends in the predetermined direction, and is provided with a moving contact. The magnet is arranged perpendicularly to an opening/closing direction of the fixed contact and the moving contact. A stretch space in which an arc generated between the fixed contact and the moving contact is stretched is provided, in the predetermined direction, beyond respective tips of the fixed contact holder and the moving contact holder. The stretch space also faces a surface of the fixed contact holder and a surface of the moving contact holder.

Abstract: A power relay circuit for switching a load current includes a micro-electro-mechanical system (MEMS) switch and a semiconductor power switch. The MEMS switch and the semiconductor power switch are connected in series with the load current.

Abstract: The present disclosure relates to an insertion structure between a stationary spring and a bobbin, comprising: a stationary spring and a bobbin; wherein the stationary spring is inserted into the bobbin by a flip-chip method, and the bobbin is provided with slots, each having a groove shape with a laterally open in formed by an L-shaped side wall connecting with a convex wall, and each of two sides of the stationary spring is provided with a convex part, and two convex parts of the stationary spring are respectively fitted into the two opposite slots; a first blocking wall is provided along a horizontally extending direction of protruding of the convex wall, and a second blocking wall is further provided between the first blocking wall and the L-shaped side wall to connect them, and the convex parts of the stationary spring are mounted.

Abstract: SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

Abstract: A switch includes a housing, a switching mechanism housed in the housing and configured to switch a state of connection between at least two terminals exposed out of the housing by using a common contact and two switching contacts, and an electronic component that is disposed in the housing and electrically connects the terminals to each other. The switching mechanism includes a first metal plate that is connected to a first contact, which is one of the common contact and the two switching contacts, and includes a first exposed part to which a first electrode of the electronic component is soldered by laser irradiation, and a second metal plate that is connected to a second contact, which is another one of the common contact and the two switching contacts, and includes a second exposed part to which a second electrode of the electronic component is soldered by laser irradiation.

Abstract: Described herein is a technique capable of forming a sacrificial film with a high wet etching rate so as to obtain a wet etching selectivity with respect to a movable electrode when manufacturing a cantilever structure sensor. According to one aspect of the technique of the present disclosure, there is provided a method of manufacturing a semiconductor device including: (a) placing a substrate with a sacrificial film containing impurities on a substrate support in a process chamber, wherein the sacrificial film is formed so as to cover a control electrode, a pedestal and a counter electrode formed on the substrate; (b) heating the substrate; and (c) modifying the sacrificial film into a modified sacrificial film by supplying an oxygen-containing gas in a plasma state to the substrate to desorb the impurities from the sacrificial film after (b).

Abstract: An electromagnetic switch including a first stationary electric contact, a second stationary electric contact, a mechanical contact, and a moveable contact. The electromagnetic switch is configured for reciprocal motion of the moveable contact into and out of contact with the first stationary electric contact and the second stationary electric contact, wherein the moveable contact remains in contact with the mechanical contact (e.g., a non-conducting contact) throughout the reciprocal motion. In various embodiments, the moveable contact is configured so that at the end of the reciprocal motion three contact points occur, and a triangle defined by the three contact points encloses a center of force of the reciprocal motion.

Abstract: An electronic device includes a substrate having a top surface, a bottom surface and at least one opening therethrough. The substrate has circuitry. A relay is mounted to the substrate and is electrically connected to the circuitry. The relay has a switching device configured to activate the relay. The switching device has contacts electrically connected to the circuitry. The relay is mounted to the substrate in the opening such that at least a portion of the switching device is positioned above the top surface and at least a portion of the switching device is positioned below the top surface.

Abstract: A variable stiffness actuator includes a shape-memory member capable of transitioning in phase between a first phase and a second phase. The shape-memory member takes a low-stiffness state when in the first phase, and takes a high-stiffness state. The variable stiffness actuator also includes an inducing member configured to cause the shape-memory member to transition in phase between the first phase and the second phase and a connecting member elastically connecting the shape-memory member and inducing member. All of the shape-memory member, the inducing member, and the connecting member are conductive, and the shape-memory member, the inducing member, and the connecting member are electrically connected to each other.

Abstract: An electric linear repetitive pulsed drive for an operation of apparatuses, in particular for an operation of apparatuses for improving an efficiency of which a working energy that is output in a pulsed manner, with at the same time low repetition frequencies, is advantageous, includes a magnetic circuit with an air gap and an electric coil, a magnetic shape-memory adjustment element and a reset unit, and a control electronics unit, wherein the electric linear repetitive pulsed drive outputs its energy in discrete-time fashion, bundled in short time intervals, that is in pulses.

Abstract: Nanoelectromechanical systems (NEMS) devices/switches and methods for implementing and fabricating the same with conducting contacts are provided. A nanoelectromechanical system (NEMS) switch can include a substrate; a source cantilever formed over the substrate and configured to move relative to the substrate; a drain electrode and at least one gate electrode formed over the substrate; wherein the source cantilever, drain and gate electrodes comprises a metal layer affixed to a support layer, at least a portion of the metal layer at the contact area extending past the support layer; and an interlayer sandwiched between the support layer and substrate.

Abstract: A spring for an electric switch comprises a base portion, a contact section, and a return spring section. The base portion forms a proximal end of the spring. The contact section extends from the base portion to a distal end of the spring opposite the proximal end. The contact section has a contact member. The return spring section extends from the base portion alongside the contact section.

Abstract: Microelectromechanical systems (MEMS) packages and methods for forming the same are provided. The MEMS package includes a semiconductor substrate having a metallization layer over the semiconductor substrate. The MEMS package also includes a first planarization layer and an overlying second planarization layer over the metallization layer. The planarization structure has a first cavity therein exposing the metallization layer. The MEMS package also includes a MEMS device structure bonded to the second planarization layer. The MEMS device structure includes a moveable element over the first cavity. The MEMS package also includes a first stopper placed on the exposed metallization layer in the first cavity. The first stopper includes a patterned conductive layer and an underlying patterned insulating layer.

Abstract: A MEMS electrostatic actuator that provides 5 degrees of freedom (5-DOF) motion is disclosed. The actuator comprises of an inner, a middle, and an outer MEMS structures that are nested with respect to each other. Each of the structures comprise of a plurality of rotors and stators. The rotors further comprise a plurality of moving capacitive electrodes which engage with a plurality of fixed capacitive electrodes in the stators to provide a variety of translational and rotational motions.

Abstract: A movable spring plate structure for defining an open or closed state with respect to a fixed contact includes a rigid spring plate contact portion, a soft spring plate warp portion, a soft spring plate force-applying portion and a movable contact. The soft spring plate warp portion is coupled to the rigid spring plate contact portion, and a first deformation gap is formed between the rigid and soft spring plate contact portions. The rigid spring plate contact portion is harder than the soft spring plate warp portion. The soft spring plate force-applying portion is disposed at the soft spring plate warp portion, and the movable contact is disposed at the rigid spring plate contact portion. A force applied to the soft spring plate force-applying portion drives the movable and fixed contacts into a closed state.

Abstract: An electromagnetic relay includes: a first member integrally including a first horizontal portion to which an armature is fixed, a vertical portion to which a yoke is fixed, a hinge spring connected between the vertical portion and the first horizontal portion, a spring arm including a pair of movable contacts, and a pair of first terminals extended downward from the vertical portion; a second member integrally including a front plate portion extended in front of an electromagnet in a vertical direction, a second horizontal portion including a pair of fixed contacts opposed to the movable contacts, and a pair of second terminals extended downward from the front plate portion; a pair of permanent magnets that sandwich the movable contacts and the fixed contacts in a right-to-left direction and that is not opposed to the electromagnet; and a cover including accommodating portions accommodating the permanent magnets.

Abstract: An antenna device includes a core, a terminal mounting unit, a coil, a plurality of elongated terminals, and an electronic component provided on the terminal mounting unit. The core is formed from a magnetic material. The terminal mounting unit is arranged adjacent to one side of the core. The coil, which is a wound conductive wire, is arranged on an outer circumference of the core. A sidewall of the terminal mounting unit includes a plurality of through holes into which the elongated terminals are inserted.

Abstract: An apparatus includes an electro-active polymer (EAP) structure configured to move, responsive to an electrical field, between a first position and a second position. The apparatus also includes a conductive particle interconnect (CPI) including an elastomeric carrier and conductive particles dispersed therein. The CPI is positioned proximate to at least a portion of the EAP structure and is configured to exhibit a first electrical resistance when the EAP structure is in the first position and to exhibit a second electrical resistance when the EAP structure is in the second position, where the first electrical resistance is different from the second electrical resistance.

Abstract: A magnetic sensor integrated circuit, a motor assembly and an application device are provided. The magnetic sensor integrated circuit includes a magnetic field detection circuit. The magnetic field detection circuit includes a magnetic sensing element configured to sense an external magnetic field and output an electrical detection signal, a signal processing unit configured to perform amplification and interference rejection on the electrical detection signal to generate an analog electrical signal, and a comparator configured to compare the analog electrical signal with a reference voltage, and output magnet detection signal corresponding to the external magnetic field. The reference voltage is generated based on an input common-mode voltage of the magnetic field detection circuit.

Abstract: An apparatus including a memory array comprising a plurality of rows and a plurality of columns. A switch electrically connects to a particular row of the plurality of rows of the memory array per cycle. An energy storage unit is electrically connected to the memory array through the switch, wherein the energy storage unit is electrically connected in a series with an effective capacitance between ground and the particular row of the plurality of rows of the memory array to which the switch is connected to recycle energy from the memory array.

Abstract: A magneto-inductive waveguide comprising a plurality of resonant elements, the plurality of resonant elements including a first resonant element comprising a conductive loop broken by at least one capacitive gap, and a second resonant element comprising a conductive loop broken by at least one capacitive gap, the second resonant element for magneto-inductively coupling with the first resonant element; wherein the first resonant element and second resonant element are conductively coupled.

Abstract: A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via.

Abstract: A switch is envisaged in the present disclosure. The switch includes a plunger that has one of a push action and a slide action to actuate the switch. The plunger is at least partially attached to a conductive pill. The switch includes a pair of sense electrodes, each having a first operative surface to which a dielectric film is attached forming an operational capacitor, and a second operative surface which is in electrical contact with the operational capacitor. The operational capacitor has a parallel relationship with an external capacitor when the conductive pill makes contact with the dielectric film resulting in discharge of the external capacitor. The microprocessor includes an internal capacitor that discharges on discharge of the external capacitor. Charge across the internal capacitor is monitored and compared with a pre-defined threshold value by the microprocessor to activate/deactivate the switch.

Abstract: A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

Abstract: A shape memory circuit breaker includes a shape memory substrate having first and second opposed substrate ends. The shape memory substrate is configured to transition from a strained conductive configuration to a fractured non-conductive configuration. An isolation housing is coupled with the shape memory substrate. The isolation housing includes first and second anchors coupled near the first and second substrate ends. A brace extends between the first and second anchors, and the brace statically positions the first and second anchors and the respective first and second substrate ends. The shape memory substrate is configured to transition from the strained conductive configuration to the fractured non-conductive configuration at or above a specified temperature range corresponding to a specified overload current range or voltage range, and the first substrate end fractures from the second substrate end at or above the specified temperature range resulting in an open circuit.

Abstract: A MEMS electrostatic actuator comprises first and second opposing electrode arrangements, wherein at least one of the electrode arrangements is movable. A dielectric material (24) is adjacent the one of the electrode arrangements (22). The second electrode arrangement is patterned such that it includes electrode areas (26) and spaces adjacent the electrode areas, wherein the dielectric material (24) extends at least partially in or over the spaces. The invention uses a multitude of electrode portions as one plate. The electric field lines thus form clusters between the individual electrode portions and the opposing electrode. This arrangement provides an extended range of continuous actuation and tunability.

Abstract: In an electro-optical device, a mirror and the like which is formed on an element substrate is sealed using a sealing member. The sealing member is provided with a frame section and a coyer section. In addition, the sealing member is provided on one face of the element substrate so that the mirror is surrounded by the element substrate and the sealing member and such that the mirror is positioned between a portion of the cover section and the element substrate. The sealing member is formed of a light-transmitting member having a frame section and a cover section which are integrally formed, and there is no interface between the frame section and the cover section.

Abstract: The contact device includes an armature, a driver, a fixed contact, a movable contact, a contact spring, a card, a case, and a positioning member. The driver is for driving the armature. The movable contact is to be in contact with and separate from the fixed contact. The contact spring is for holding the movable contact so as to allow movement of the movable contact. The card interconnects the armature and the contact spring. The case is a synthetic resin molded product. The positioning member is provided as a separate part from the case. The positioning member is for determining a positional relationship between the armature, the driver, the fixed contact, the movable contact, the contact spring, and the card, and is accommodated in the case.

Abstract: A self-testing fault detector having a line side and a load side and a conductive path there between is provided. The self-testing fault detector includes an auto-monitoring circuit electrically coupled to a fault detection circuit and an interrupting device and it continuously monitors one or more signals to determine an operating state of the fault detector. At least one of the monitored signals includes a fault detection signal, wherein if said automonitoring circuit determines that the fault detection circuit is not properly driving the interrupting device, the automonitoring device converts an input-output port receiving the fault detection signal from an input to an output and drives the interrupting device into a tripped condition using the input-output port.

Abstract: This document refers to multi-die micromechanical system (MEMS) packages. In an example, a multi-die MEMS package can include a controller integrated circuit (IC) configured to couple to a circuit board, a MEMS IC mounted to a first side of the controller IC, a through silicon via extending through the controller IC between the first side and a second side of the controller IC, the second side opposite the first side, and wherein the MEMS IC is coupled to the through silicon via.

Abstract: The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.

Abstract: After a first wafer on which mirrors and terminals are formed and a second wafer for sealing are stacked and bonded together, the first wafer and the second wafer are diced to manufacture electro-optical devices. In doing so, in a second surface of the second wafer, recesses overlapping the mirrors in a plan view are previously formed, and also grooves overlapping the terminals in the plan view are previously formed. For this reason, when the second wafer is diced along the grooves by advancing a dicing blade for second wafer from a third surface of the second wafer, the dicing blade for second wafer can be prevented from coming into contact with the terminal.

Abstract: The present invention provides a means in which contact between contacts in a “double-break (or double-make) contact structure” occurs in two places in the same state as much as possible. A contact structure includes two fixed members (110,112) each of which has a fixed contact (116,118) and a movable member (102) containing a movable contact (106) which contacts or separates from the fixed contact of each of the fixed members. The movable member is in the form of a strip as a whole, its one end is supported so as to allow the above mentioned contact and separation of the movable member, and the other end of the movable member has the movable contact, and the movable member has a narrowed section between its two ends.

Abstract: A method for forming an integrated circuit device includes forming a dielectric layer onto a first substrate, forming a sacrificial material into a sacrificial cavity formed into the dielectric layer, forming a membrane layer over the dielectric layer and sacrificial material, releasing the sacrificial material through at least one via formed through the membrane layer, and bonding a capping substrate to the membrane layer such that a second cavity is formed, the second cavity being connected to the sacrificial cavity though a via formed into the membrane layer.

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.