Abstract: Magnetically actuated micro-electro-mechanical capacitor switches in laminate are disclosed. According to one embodiment, an apparatus comprises a first layer comprising a coil and magnetic element, the magnetic element made from one of nickel and iron; a second layer comprising a flexible member, wherein a permanent magnet is attached to the flexible member; a conductive plate having an insulating dielectric coating, the conductive plate attached to one of the flexible member or a magnet; and a third layer comprising a transmission line and magnetic material, wherein the transmission line comprises one or more of a signal conductor and one or more ground conductors in near proximity.

Abstract: An electromagnetic relay includes a relay body, a connector and an electronic-component connection terminal. The connector is provided integrally with the relay body. The electronic-component connection terminal is disposed so as to protrude from the relay body.

Abstract: A liquid micro-electro-mechanical system (MEMS) component includes a board, a channel, multiple liquid droplets, and one or more conductive elements. The channel is within the board and contains the multiple liquid droplets. A first liquid droplet has first properties and a second liquid droplet has second properties. When a force is applied upon the first and second liquid droplets, the first liquid droplet changes in accordance with the first properties with respect to the one or more conductive elements and the second liquid droplet changes in accordance with the second properties with respect to the one or more conductive elements thereby changing one or more characteristics of the liquid MEMS component.

Abstract: The present disclosure provides in one embodiment, a semiconductor device that includes a MEMS switch having a substrate, a first dielectric layer disposed above the substrate, and a bottom signal electrode, a bump, and a bottom actuation electrode disposed above the first dielectric layer. The MEMS switch further includes a second dielectric layer enclosing the bottom signal electrode, and a movable member including a top signal electrode disposed above the bottom signal electrode and a top actuation electrode disposed above the bottom actuation electrode and the bump, wherein the top actuation electrode is electrically coupled to the bump. A method of fabricating a MEMS switch is also disclosed.

Abstract: Vertical integrated MEMS switches, design structures and methods of fabricating such vertical switches is provided herein. The method of manufacturing a MEMS switch, includes forming at least two vertically extending vias in a wafer and filling the at least two vertically extending vias with a metal to form at least two vertically extending wires. The method further includes opening a void in the wafer from a bottom side such that at least one of the vertically extending wires is moveable within the void.

Abstract: An electromagnetic relay includes multiple contact sets each including a fixed contact and a movable contact displaceable in a first direction to approach the fixed contact and in a second direction to move away from the fixed contact; multiple permanent magnets each provided on the peripheral side of a corresponding one of the contact sets and having a polarity direction perpendicular to the first and second directions; and multiple ferromagnetic bodies parallel to the polarity directions of the permanent magnets and the first and second directions, wherein in a DC electric current flowing through each of the contact sets, the direction of a force exerted based on the permanent magnet is equal to the direction of a force exerted based on the ferromagnetic body.

Abstract: An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.

Abstract: The present invention generally relates to RF MEMS devices that are capable of hot switching. The RF MEMS devices, by utilizing one or more spring mechanisms, are capable of hot switching. In certain embodiments, two or more sets of springs may be used that become engaged at specific points in the displacement of the cantilever of the MEMS device. The springs allow for a significant increase in the release voltage for a given pull in landing voltage.

Abstract: A MEMS switch in which contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the contact where the signal is transmitted in an “on” state. The MEMS switch includes a first electrode, a second electrode opposed to and separated from the first electrode, a third and a fourth electrodes, wherein electrical contact is made between the electrodes by electrostatic force generated between the electrodes, and a bump which can form the contact between the electrodes is provided on an electrode, and a gap is formed between the electrodes when the electrical contact is made between the electrodes.

Abstract: An electromagnetic relay includes multiple contact sets each including a fixed contact and a movable contact displaceable in a first direction to approach the fixed contact and in a second direction to move away from the fixed contact; multiple permanent magnets each provided on the peripheral side of a corresponding one of the contact sets and having a polarity direction perpendicular to the first and second directions; and multiple ferromagnetic bodies parallel to the polarity directions of the permanent magnets and the first and second directions, wherein in a DC electric current flowing through each of the contact sets, the direction of a force exerted based on the permanent magnet is equal to the direction of a force exerted based on the ferromagnetic body.

Abstract: An electromagnetic relay includes: a main body including: a first cover; an electromagnet having a first terminal extending toward the outside from a bottom surface of the first cover; and a contact portion that opens and closes according to a magnetic attractive force of the electromagnet, and has a second terminal extending toward the outside from the bottom surface of the first cover; a cable line drawn out to the outside of the electromagnetic relay; and a printed circuit board that fixes the cable line to at least one of the first terminal and the second terminal by dip soldering, and electrically connects the cable line to the at least one of the first terminal and the second terminal.

Abstract: A MEMS element of an aspect of the present invention including a first electrode provided on a substrate, a second electrode which is provided above the first electrode and which is driven toward the first electrode, an anchor provided on the substrate, a beam which supports the second electrode in midair, one end of the beam being connected to the anchor and the beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion.

Abstract: An electromagnetic relay includes an electromagnet part, an actuating part, a contact part and a base for holding the electromagnet part, the actuating part and the contact part. The contact part includes a pair of fixed plates having one end fixed to the base and the other end to which a fixed contact is attached, a pair of movable springs having one end fixed to the base and the other end to which a movable contact is attached, and a connecting portion extending between the movable springs and electrically connecting the movable contacts to each other. The actuating part is actuated so as to press only a part of the movable springs inside an area defined between longitudinal axes extending between one end and the other end of the movable springs through the movable contact, when the contact part closes.

Abstract: A micro-electromechanical systems (MEMS) switch having a thermally neutral anchor configuration is provided. The MEMS switch includes a substrate onto which a first conductive pad and a second conductive pad are formed. A first conductive pad anchor is coupled to the first conductive pad and a second conductive anchor spaced from the first conductive anchor is also coupled to the first conductive pad. A conductive cantilever beam has a first end portion that is situated between and coupled to the first and second conductive anchors. Moreover, the conductive cantilever beam has a second end portion that is suspended over the second conductive pad, and a middle portion between the first end portion and the second end portion. The MEMS switch also includes a conductive actuator plate formed on the substrate at a location beneath the middle portion of the conductive cantilever beam and between the first and second conductive pads.

Abstract: An electromagnetic relay (1) is formed by assembling a drive part (30), mobile body (50) that moves when the drive part (30) is driven, and a plurality of contact mechanisms (60, 70) that switch the contact and separation of contacts (61d, 62d, 71d, 72d) by the movement of the mobile body (50) in a body (40). Furthermore, a partition wall (21) is provided inside a case (20), which is fitted over the body (40), and a latching part (42) is provided in a location on the body (40) corresponding to the partition wall (21). In the state where the case (20) is fitted over the body (40), the front end of the partition wall (21) is latched to the latching part (42).

Abstract: A micro-relay that overcomes some of the limitations and drawbacks of the prior art is disclosed. The micro-relay comprising: (1) a first substrate comprising one or more monolithically integrated planar coils for generating a magnetic field; and (2) a second substrate comprising a magnetically actuated switch having a moving contact that selectively moves in a plane parallel to its substrate. The first and second substrate are aligned and bonded to collectively provide a closed magnetic circuit that efficiently channels the generated magnetic field through the switch.

Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

Abstract: An electromagnetic relay includes an electromagnet that generates a magnetic field when electric current is supplied thereto, an actuator that is actuated in response to the generated magnetic field, a contact that opens and closes in response to the actuation of the actuator, the contact including a first contact and a second contact that contacts with the first contact when the contact closes, and a housing including a first housing that includes walls defining a recess that accommodates the electromagnet, the actuator and the contact therein, and a second housing that is fixed to the first housing and covers the recess of the first housing. The electromagnetic relay also includes a permanent magnet provided on an outer surface of the housing at a position corresponding to a position of the contact.

Abstract: There is provided a switching element which facilitates integration with higher density and lamination in a device, the switching element including: an insulating substrate; a first electrode provided on the insulating substrate; a second electrode provided above the first electrode; and a between-electrode gap section provided between the first electrode and the second electrode and including a nanometer-scale gap for causing a switching phenomenon of a resistor by applying a prescribed voltage between the first electrode and the second electrode.

Abstract: An embodiment of an electrical contactor according to the present invention provides improved operability and manufacturability. Such electrical contactor may include a housing substantially surrounding an electrical conductor assembly and contact actuator. The conductor assembly includes a stationary contact assembly and a movable contact assembly. The contact actuator selectively mechanically interfaces to the movable contact assembly to make or break an electrical conduction. The contactor provides improved contact bounce dampening and actuator force characteristics. Methods according to the present invention include a method of manufacturing and a method of operating a solenoid actuated electrical contactor so as to minimize solenoid plunger acceleration and impact forces while making the electrical conduction and to maximize solenoid plunger acceleration and impact forces while breaking the electrical conduction.

Abstract: A single-coil actuator for low or medium voltage applications which comprises a first assembly which comprises a first casing having a first half-casing and a second half-casing coupled to each other. The first casing defines an internal space housing an electromagnet having a coil and an armature movable between two positions. The first half-casing has a first opening for the mechanical coupling of the armature with an external element, while one of the first or second half-casing has a second opening for the electrical connection of the electromagnet. The electrical connection comprises a first connection element of the socket and plug-type connection which is electrically connected to the coil and positioned in correspondence of the second opening.

Abstract: According to an illustrative embodiment, a switching device structure is provided comprising a cavity defined by a laminated structure; and a moveable member comprising a plurality of laminated layers, wherein the moveable member is suspended from a side surface of the cavity by a hinge comprising a plurality of adjacent electrical conductors. In one embodiment, a current conducting coil is formed within the moveable member, and first and second of the adjacent electrical conductors of the hinge respectively comprise coil-in and coil-out conductors electrically connected to the coil. In such an embodiment, the third and fourth of said electrical conductors may respectively comprise tip and ring conductors. In illustrative embodiments, each of the electrical conductors of the hinge may comprise a resilient or flexible copper material.

Abstract: Disclosed is a relay for an electric vehicle capable of guiding a precise assembly of a cover assembly and a supporting plate. The supporting plate comprises a position guiding portion protruding from an upper surface thereof so as to guide the cover assembly to be located on a predetermined position of the supporting plate when assembling the cover assembly and the supporting plate to each other.

Abstract: A system for determining the speed and position of objects comprises a beam source, a transmit reflection device, a beam receiver, a receive reflection device, and a controller. The beam source may generate a beam. The transmit reflection device may reflect the beam at the objects and may include a plurality of transmit faces with each transmit face oriented at a different angle and operable to reflect the beam at a different height. The beam receiver may detect the beam. The receive reflection device may include a plurality of receive faces with each receive face oriented at a different angle and operable to focus the beam reflected from objects at different heights onto the beam receiver. The controller may determine the position of the objects over time and calculate the speed of the objects based on a change in the position of the objects.

Abstract: In accordance with one aspect of the present invention, a MEMS switch is provided. The MEMS switch includes a substrate, a first and a second actuating element electrically coupled together, an anchor mechanically coupled to the substrate and supporting at least one of the first and second actuating elements, and a gate driver configured to actuate the first and second actuating elements.

Abstract: An orbiting relay assembly may be provided that has one or more switches. The switches may be provided with electrical contacts. An actuator such as an electromagnetic actuator may rotate guiding structures such as a rotating yoke about a rotational axis. The guiding structures may have portions that receive movable electrical coupling structures such as metal balls or cylinders. There may be multiple movable electrical coupling structures in a relay. The electrical coupling structures may be distributed radially outwards from the rotational axis, may be distributed circumferentially about the rotational axis, or may be distributed axially parallel to the rotational axis. The guiding structures may be configured to place the switches in one or more different operating states by moving the metal balls or other movable electrical coupling structures about the rotational axis.

Abstract: An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line.

Abstract: Vertical integrated MEMS switches, design structures and methods of fabricating such vertical switches is provided herein. The method of manufacturing a MEMS switch, includes forming at least two vertically extending vias in a wafer and filling the at least two vertically extending vias with a metal to form at least two vertically extending wires. The method further includes opening a void in the wafer from a bottom side such that at least one of the vertically extending wires is moveable within the void.

Abstract: A functional device includes: a substrate; a functional structure formed on the substrate; a cavity in which the functional structure is disposed; and a cover which covers the cavity, wherein the cover includes a bumpy structure including rib shaped portions, or groove shaped portions, which cross a covering range covering at least the cavity.

Abstract: The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3?) under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

Abstract: Switches that are actuated through exposure to a magnetic field are described. A mobile element of a switch includes one or more anchoring members that are in electrical contact with one of the conductive portions. The mobile element also has a beam that is attached to the one or more anchoring members. The beam can be attached to the one or more anchoring members by flexures. The beam has an end portion that is configured to move toward the other conductive portion when exposed to an external force, such as a magnetic field. Various configurations of anchoring members may significantly decrease initial upward beam deformation upon manufacture of the mobile element, resulting in an increased sensitivity upon exposure to a magnetic field. Methods for manufacturing switches that exhibit increased sensitivity to magnetic fields are also disclosed.

Abstract: Embodiments of the subject invention relate to a method and apparatus for electromagnetic actuation. Embodiments of an electromagnet actuator in accordance with the subject invention can include a fixed main body and a deformable membrane or displaceable piston-like member. In the case of piston motion, in specific embodiments, the piston can be supported by a corrugated diaphragm or bellows. In various embodiments, all or portions of the electromagnet actuator can be produced using microfabrication techniques. Specific embodiment of the subject invention can incorporate a plurality of magnets providing magnetic flux to a plurality of coil conductor elements so as to provide a plurality of locations that a force is applied to the moveable body portion of the electromagnetic actuator. Specific embodiments can incorporate an array of magnets interdigitated with an array of coil conductor elements, where the arrays can include 2, 5, 10, 20, or more each.

Abstract: A micro-electromechanical systems (MEMS) switch or array is provided. A first substrate (e.g., carrier substrate) includes an electrically conductive substrate region. An electrical isolation layer may be disposed over a first surface of the carrier substrate. Movable actuators may be provided. At least one substrate contact is electrically coupled to at least one of the plurality of movable actuators so that a flow of electrical current is established during an electrically-closed condition of the MEMS switch array. A cover substrate may also be provided and includes an electrically conductive substrate region. The electrically conductive region of the carrier substrate is electrically coupled to the electrically conductive region of the cover substrate to define an electrically conductive path for the flow of electrical current during the electrically-closed condition of the switching array.

Abstract: A microstructure device that includes at least one thermally compensating anchor for preventing undesirable thermal displacement or actuation during manufacturing or operation is disclosed. In particular, the microstructure device includes a substrate and a movable structure suspended above the substrate by at least one anchor. The anchor is attached to the substrate. The anchor also includes an upper area of an upper surface region of a bottom portion attached to a lower surface of a proximal portion of the movable structure. The anchor further includes a top portion having a lower area of a lower surface region attached to an upper surface of the proximal portion of the movable structure, wherein the lower surface region of the top portion and the upper surface region of the bottom portion are geometrically asymmetric.

Abstract: An electromagnetic relay includes: a yoke capable of changing a magnetic pole thereof by an electromagnet; an armature that is magnetized by a permanent magnet and contacts with or separates from the yoke in accordance with the magnetic pole of the yoke; a movable contact that contacts with a fixing contact; an elastic body that biases the movable contact; and a pressing member that presses the elastic body in accordance with a movement of the armature to cause the movable contact to at least contact with or separate from the fixing contact, wherein a cover fixing the permanent magnet and the armature, and the pressing member are integrally formed.

Abstract: A micro-electromechanical systems (MEMS) includes a substrate onto which a first conductive pad and a second conductive pad are formed. A conductive anchor coupled to the first conductive pad is a semi-circular frame that includes a first radial tab and a second radial tab. A conductive cantilever disc has a first end portion, a middle portion, and a second end portion. The first end portion of the conductive cantilever disc is coupled to the first radial tab and the second radial tab of the conductive anchor. The second end portion of the conductive cantilever disc is suspended over the second conductive pad with the middle portion being between the first end portion and the second end portion. A conductive actuator plate is formed onto the substrate at a location beneath the middle portion of the cantilever disc and between the first conductive pad and the second conductive pad.

Abstract: An electrical switching device includes a switch housing and first and second circuit assemblies received in the switch housing. Each of the first and second circuit assemblies include a base terminal and a moveable terminal moveable between an open state and a closed state. The moveable terminal is electrically connected to the base terminal in the closed state. An actuator assembly is received in the switch housing. The actuator assembly includes a motor that has a drive coil generating a magnetic field. First and second pivots are arranged within the magnetic field of the drive coil. The first and second pivots are rotated when the drive coil is operated. First and second actuators are coupled to the first and second pivots and are slidable within the switch housing. The first and second actuators are operatively coupled to the moveable terminals of the first and second circuit assemblies, respectively. The first and second actuators move the moveable terminals between the open and closed states.

Abstract: An electromagnetic relay includes multiple contact sets each including a fixed contact and a movable contact displaceable in a first direction to approach the fixed contact and in a second direction to move away from the fixed contact; multiple permanent magnets each provided on the peripheral side of a corresponding one of the contact sets and having a polarity direction perpendicular to the first and second directions; and multiple ferromagnetic bodies parallel to the polarity directions of the permanent magnets and the first and second directions, wherein in a DC electric current flowing through each of the contact sets, the direction of a force exerted based on the permanent magnet is equal to the direction of a force exerted based on the ferromagnetic body.

Abstract: Provided is a technology which has a simple structure, is easy to manufacture, and does not increase cost. A terminal member to be press-fitted into a terminal hole formed in a base, includes a press-fitted portion which is to be press-fitted in the terminal hole, and a terminal portion extending from the press-fitted portion and protruding from the base. The terminal portion is formed by folding a plate-like body such that folded portions overlap a planar portion. At least one of the folded portions has a cut-away portion extending from the base, respectively at an edge near the press-fitted portion. A sealing agent can be injected into the terminal hole via the cut-away portions.

Abstract: An integrated planar electromechanical contactor assembly includes a substrate, a through-hole formed through the substrate, a plurality of solenoid traces embedded within the substrate about the through-hole in a plurality of distinct planes, a solenoid core arranged in the through hole in electromagnetic communication with the plurality of solenoid traces, and a mobile contact arm. The plurality of distinct planes are substantially parallel to one another and each solenoid trace of the plurality of solenoid traces is in electrical communication with an adjacent solenoid trace through an electrical via. Furthermore, the mobile contact arm is configured to selectively connect an external contact lead arranged on the substrate to at least one electrical trace embedded within the substrate responsive to motion of the solenoid core.

Abstract: An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.

Abstract: The device comprises first and second contact pads having a contact surface. The first and second contact pads move with respect to one another between an ohmic contact position between these contact surfaces and another position. The device further comprises means for applying a non-uniform electric field around the first contact pad. The electric field has a component in a direction parallel to the contact surface of the first contact pad. A fluid with a first dielectric permittivity value is arranged between the first contact pad and the decontamination electrode. The decontamination device and the fluid are configured in such a way that the electric field generates a force directed towards the decontamination electrode on a contaminant, by dielectrophoresis.

Abstract: A nanoswitch device comprising: at least one stationary element (52) and at least one element (50) which is at least partially made of a magnetic material and which is movable with respect to the stationary element, means of activating the movable element, comprising: and at least one first and one second magnetic means (30, 30?, 40, 40?) each having a planar shape, defining a first and a second plane, in order to generate remanent magnetization in a direction contained within said first plane or perpendicular to this first plane, means (36, 36?) for reversing the direction of the remanent magnetization of at least one of said first and second magnetic means.

Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

Abstract: A magnetically actuatable contactor has first and second magnetic material strips extending longitudinally. Each has a pad with a contact face parallel to the longitudinal direction. The pads face each other when an intersection of the one contact face and a projection in a transversal direction of the other contact face forms an overlap zone having a surface area. A pad is capable of being transversally shifted in response to a magnetic field between closed and opened positions. In closed position and open positions, the faces and respectively in contact and separated. At least one strip forms pairs of facing pads disposed consecutively along the longitudinal direction. A bridge links two consecutive pads. A cross-section of the bridge is reduced relative to a cross-section of the pads and a surface area of a smallest cross-section of the bridge.

Abstract: An electromagnetic relay including an electromagnet device having an electromagnet and an armature, a contact portion openable and closable according to a movement of the armature. The contact portion includes a plurality of fixed contact members in which fixed contacts are respectively arranged and a plurality of movable contact members in which movable contacts opposed to the fixed contacts are respectively arranged, wherein the plurality of movable contact members operate according to a movement of the armature. The electromagnetic relay further includes a printed board to which the plurality of fixed contact members and the plurality of movable contact members are respectively electrically connected, and a plurality of contact terminal members electrically connected to the printed board and adapted to be connected to electrical parts provided outside.

Abstract: Electromechanical relays and semiconductor structures and microelectromechanical systems including at least part of an electromechanical relay are presented. For example, an electromechanical relay includes an electrically conductive terminal within a printed circuit board, one or more electrically conductive contacts, and one or more magnetic actuators. The one or more magnetic actuators are respectively associated with the one or more electrically conductive contacts and each magnetic actuator includes (i) a magnetic core within at least one via extending through one or more layers of the printed circuit board, and (ii) an electrical coil around at least a portion of the magnetic core and within one or more layers of the printed circuit board. Activation of the one or more actuators causes electrical contact between the terminal and an associated one of the one or more electrically conductive contacts.

Abstract: A micro-electromechanical (MEMS) switch includes a substrate, stationary actuator comb teeth extending from a stationary actuator pad supported above the substrate, stationary contact comb teeth extending from a stationary contact pad supported above the substrate, and a body suspended over the substrate for rotation about an axis perpendicular to the substrate. The body includes movable actuator comb teeth interdigitated in-plane with the stationary actuator comb teeth where the shortest distance between adjacent movable and stationary actuator comb teeth has a first value. The body further includes movable contact comb teeth interdigitated in-plane with the stationary contact comb teeth where the shortest distance between adjacent movable and stationary contact comb teeth has a second value smaller than the first value.

Abstract: A micro-machined magnetic relay has a moveable cantilever comprising a soft magnetic material and having a first end and a second end. The cantilever has a rotational axis which is a flexure supported by a substrate. The cantilever has a first state and a second state. A first permanent magnet is disposed near the first end of the cantilever to force the cantilever in the first state. A second movable magnet causes changes of magnetic forces and torques on the cantilever. Therefore, the direction of a sum of torque on the cantilever is reversed. As a result, the cantilever flips from the first state to the second state. The relay can be used as a proximity sensor to detect the motion of an object associated with the second movable magnet.

Abstract: In an electromagnetic relay, length from a movable contact to an end portion of a movable element on a first end side is set greater than length from the movable contact to another end portion of the movable element on a second end side opposite to the first end side. A direction of a Lorentz force acting on a portion of the movable element from the movable contact to the end portion of the movable element on the first end side is conformed to a direction for bringing fixed contacts and movable contacts into contact with each other. Thus, separation between the movable contacts and the fixed contacts due to an electromagnetic repulsive force can be inhibited.