Abstract: The present invention relates to an electromagnetic relay comprising: a base comprising at least one printed circuit card, which card has at least two conductor tracks forming respective switch accesses; at least one conductive contact element movable between a closed position in which it presses against said two conductor tracks in order to establish an electrical connection between them, and an open position in which the contact element is spaced apart from at least one of said two tracks; a contact element support, the support comprising at least one flexible arm carrying the contact element; and an actuator mounted on the printed circuit card, and comprising at least one coil constituted by a winding of electric wires; wherein the support includes at least one portion, in particular a portion in the form of a tongue, on which a moving member of the actuator acts in order to move said flexible arm of the support.

Abstract: In a Micro Electro-Mechanical System (MEMS) switch, a common switch failure is a short between the upper and the lower electrostatic actuation plates. Such shorts may occur due to torque deformation. Stopper bumps having a slightly lower height profile than that of the contact bumps are provided to prevent such shorts. The stopper bumps may be made using the same mask as that used to create the contact bump with the height of the respective bumps controlled by determining the diameter of the bumps.

Abstract: The invention relates to an electrostatic micro-switch intended to connect two conductor paths (4, 5) placed on a support, the connection between the two conductor paths being created by means of a contact stud (6) fitted to the distortion means (3) made in insulating material and capable of distorting in relation to the support, under the influence of an electrostatic force generated by control electrodes, the contact stud connecting the ends (14, 15) of the two conductor paths (4, 5) when the distortion means are sufficiently distorted.

Abstract: An electromagnetic relay including a base, an electromagnet fitted to the base, and a contact section operable to open or close with an operation of the electromagnet. The base includes a retaining face firstly contacting with the yoke of the electromagnet, in an action of fitting the electromagnet to the base, and retaining the electromagnet at a predetermined height on the base as seen in a direction of the coil center axis of the electromagnet. The base also includes a guide face slidably engaged with the yoke, by shifting the yoke along the retaining face, and guiding the electromagnet in a fitting direction intersecting with the coil center axis. The retaining face and the guide face cooperate with each other to fixedly support the electromagnet at a predetermined fitting position on the base.

Abstract: Provided is a micro-electromechanical systems switch for controlling signal delivery in a high frequency band wireless communication and a radio frequency (RF) system and, comprising: a substrate; a signal line formed on the substrate and having a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion for maintaining a distance from the substrate.

Abstract: Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.

Abstract: A membrane actuator includes a magnetically actuatable membrane and a magnetic trigger. The membrane includes a shape memory alloy (SMA), and the magnetic trigger is configured to induce a martensitic transformation in the SMA, to produce a larger force than would be achievable with non-SMA-based materials. Such a membrane actuator can be beneficially incorporated into a wide variety of devices, including fluid pumps, shock absorbing systems, and synthetic jet producing devices for use in an aircraft. The membrane/diaphragm can be formed from a ferromagnetic SMA, or a ferromagnetic material can be coupled with an SMA such that the SMA and the ferromagnetic material move together. A hybrid magnetic trigger, including a permanent magnet and an electromagnet, is preferably used for the magnetic trigger, as hybrid magnetic triggers are easy to control, and produce larger magnetic gradients than permanent magnets or electromagnets alone.

Abstract: A micro-electro-mechanical switch includes at least one portion of a conductive line in the chamber, a beam with imbedded charge, and control electrodes. The beam has a conductive section which is positioned in substantial alignment with the at least one portion of the conductive line. The conductive section of the beam has an open position spaced away from the at least one portion of the conductive line and a closed position on the at least one portion of the conductive line. Each of the control electrodes is spaced away from an opposing side of the beam to control movement of the beam.

Abstract: A magnet system for a bi-stable relay includes a coil, first and second core yoke members, and an armature. The coil has a first polarity state and a second polarity state. Each of the first and second core yoke members has a core arm and a yoke arm. Each of the yoke arms of the first and second core yoke members has a pole face. The armature has substantially parallel armature core arms separated by a permanent magnet. The armature is pivotally mounted in an air gap between the pole faces of the yoke arms of the first and second core yoke members such that the armature core arms contact the yoke arms in a first switch position corresponding to the first polarity state and in a second switch position corresponding to the second polarity state. The armature core arms are arranged substantially perpendicular to a center axis of the coil.

Abstract: A forcibly guided relay is disclosed, with a housing, whose height is smaller than its width and whose width is smaller than its length. With this, the relay comprises an electromagnetic drive filling the length or the width of the relay, with a clapper-type contactor which comprises a drive arm which extends in the direction of the core and at its free end cooperates with a drive cam; several contact pairs, which are in each case formed by a contact spring and a fixed or spring-like counter-contact said contact springs extending in the direction of the core, and with the drive ends being in a forcibly guided engagement with the drive cam.

Abstract: Methods and systems of assembling and making laminated electro-mechanical systems and structures are described. A plurality of structural layers are formed that include at least one structural layer having a movable element formed therein. The plurality of structural layers are stacked and aligned into a stack. Each structural layer in the stack is attached to an adjacent structural layer of the stack.

Abstract: A microelectromechanical system includes separate conducting elements. An electromechanically deformable element can be switched between a first stable position and a second stable position. Contact elements allow for electrical continuity to be established between the separate conducting elements. Switch control elements ensure that the first deformable element switches so as to establish electrical continuity between the separate conducting elements in the second stable position, by contact between the contact elements, and to break electrical continuity by separating the contact elements in the first stable position. The separate conducting elements and the contact elements are carried by the deformable element.

Abstract: A relay includes a magnetic system provided with an armature and a contact system provided with a first contact and a moveable second contact. An electrically insulating base plate is arranged between the magnetic system and the contact system and has an opening therein. First and second walls extend from the base plate and are arranged between the opening and the magnetic system or the opening and the contact system. An actuator extends between the armature and the contact system through the opening and transfers movement of the armature to the second contact to move the second contact into electrical engagement with the first contact. The actuator has a third wall that extends toward the base plate and between the first and second walls. The first, second, and third walls extend a leakage path of an electrical leakage current between the contact system and the magnetic system.

Abstract: Processes for preparing contacts on microswitches have been invented. The first is a wet process, involving the use of one or more acids, bases and peroxides, in some formulations diluted in water, to flush the contacts. The second process involves exposing the contacts to plasmas of various gases, including (1) oxygen, (2) a mixture of carbon tetrafluoride and oxygen, or (3) argon.

Abstract: A micro-electromechanical (MEM) RF switch provided with a deflectable membrane (60) activates a switch contact or plunger (40). The membrane incorporates interdigitated metal electrodes (70) which cause a stress gradient in the membrane when activated by way of a DC electric field. The stress gradient results in a predictable bending or displacement of the membrane (60), and is used to mechanically displace the switch contact (30). An RF gap area (25) located within the cavity (250) is totally segregated from the gaps (71) between the interdigitated metal electrodes (70). The membrane is electrostatically displaced in two opposing directions, thereby aiding to activate and deactivate the switch.

Abstract: Apparatus for a micro-electro-mechanical switch that provides for latching switching action. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. To latch the switch, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage to the electrodes on the substrate and the cantilever arm is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.

Abstract: Systems and methods for actuating micro-magnetic latching switches in an array of micro-magnetic latching switches are described. The array of switches is defined by Y rows aligned with a first axis and X columns aligned with a second axis. Each switch in the array of switches is capable of being actuated by a coil. In an aspect, a row of coils is moved along the second axis to be positioned adjacent to a selected one of the Y rows of switches. A sufficient driving current is proved to a selected coil in the row of coils to actuate a selected switch in the selected one of the Y rows of switches. In another aspect, a plurality of first axis drive signals and a plurality of second axis drive signals are generated. These signals drive an array of coils, wherein each coil in the array of coils is positioned adjacent to a corresponding switch in the array of switches. Each first axis drive signal is coupled to coils in a corresponding column of coils in the array of coils.

Abstract: An injection valve includes a housing that movably accommodates a needle. A movable core is axially movable together with the needle in the housing. A stationary core is fixed in the housing for forming a magnetic circuit together with the movable core. At least one of the movable core and the stationary core has an end that has an annular first protrusion protruding toward an end of an other of the movable core and the stationary core. At least one of the movable core and the stationary core has an end that has an annular second protrusion protruding toward an end of an other of the movable core and the stationary core. The first protrusion is substantially coaxial with respect to the second protrusion.

Abstract: A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact electrode film provided on a side of the movable portion opposite the base, a pair of fixed contact electrodes joined to the fixed portion and having a region opposing the movable contact electrode film, a movable driving electrode film provided on a side of the movable portion opposite the base, and a fixed driving electrode having a region opposing the movable driving electrode film. The movable driving electrode film is thinner than the movable contact electrode film. The fixed driving electrode is joined to the fixed portion joined to the base.

Abstract: The electro-mechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selectively placed in one of two opposing states defined by the fixed electrodes. The stored elastic potential energy of the movable electrode and its flexible supporting structure is used for switching between the two states. An electrostatic hold voltage is used to hold the movable electrode in the two switch states.

Abstract: A method and apparatus for packaging a plurality of micro-magnetic switches is described. A bonded substrate structure includes a first substrate, a second substrate, and a magnetic layer. The first substrate has a plurality of cantilevers formed thereon. The second substrate has a first surface that is bonded to the first substrate. Each cantilever of the plurality of cantilevers on the first substrate is housed in a corresponding space formed between the first substrate and the second substrate. The magnetic layer is formed on a second surface of the first and/or second substrate to induce a magnetization in a magnetic material of each housed cantilever. The bonded substrate structure is singulated to form a plurality of separate micro-magnetic switch packages. Each micro-magnetic switch package of the plurality of micro-magnetic switch packages includes at least one housed cantilever.

Abstract: The MEMS switch comprises a first anchor formed over a substrate, a first spring connected to the first anchor, an upper electrode which is connected to the first spring and makes a motion above the substrate, elastically deforming the first spring, a lower electrode formed over the substrate, positioned under the upper electrode, a second spring connected to the upper electrode, and a second anchor connected to the second spring. When voltage is applied between the upper and lower electrodes and the upper electrode makes a downward motion, the second anchor is brought into contact with the substrate. As a result, the second spring is elastically deformed. When the upper electrode is subsequently brought into contact with the lower electrode, thereby the upper and lower electrodes are electrically connected. The first and second anchors, first and second springs, and upper electrode are formed of identical metal in integral structure.

Abstract: A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, ‘hot-switched’ life cycle test results of 1.02×108 and 2.70×108 cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts.

Abstract: In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer and a stationary electrode attached to that substrate layer. The movable electrode is adapted to move with respect to the substrate layer in response to an inertial force such that, when the inertial force per unit mass reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode, thereby changing the state of the inertial switch from open to closed. In one embodiment, the MEMS device is a substantially planar device, designed such that, when the inertial force is parallel to the device plane, the displacement amplitude of the movable electrode from an initial position is substantially the same for all force directions. Advantageously, inertial switches of the invention can be designed to have a relatively small size, e.g.

Abstract: Methods and systems of assembling and making laminated electro-mechanical system (LEMS) switches are described. A plurality of structural layers are formed that include at least two structural layers that each include a flexible member. The plurality of structural layers are stacked and aligned into a stack, to form at least one switch. Each structural layer in the stack is attached to an adjacent structural layer of the stack. When the formed switch is in an “on” state, the first flexible member is in contact with the second flexible member. When making contact with the second flexible member, the second flexible member flexes in response. In a further aspect, three flexible members may be present. When the switch is in an “on” state, the first flexible member is in contact with the second and third flexible members. When making contact with the second and third flexible members, the second and third flexible members flex in response.

Abstract: A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.

Abstract: A relay unit and an electrical junction box are disclosed as including a plurality of relays (2A˜2D) and a power supply bus bar (3) for supplying electric power to the plurality of relays (2A˜2D) which are contained in an electrical junction box, wherein electric power is supplied to the respective relays (2A˜2D) from the power supply bus bar (3) via relevant fuses (16a˜16d).

Abstract: A relay situated in series between an AC line source and an AC load has a core conductor connected with the fixed N.O. contact, so that load current flows axially through the core of the actuator coil. Alternatively, the fixed N.C. contact may be connected with the core conductor. A plate armature with leaf springs can achieve linear axial action. A sensor connected to leads of a winding of the actuator coil picks up a an induced voltage that is representative of the current supplied to the load. This provides a simple arrangement for monitoring for current level and can be used for measuring power factor or ?? at the load device. In a three phase embodiment, phase imbalance can be detected.

Abstract: A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.

Abstract: An electromagnetic relay having a moving contact plate and fixed contact plates juxtaposed with one another on a base. A moving iron plate is rotated during magnetization/demagnetization of a coil block put on the base to reciprocate a card in a horizontal direction. The moving contact plate is allowed to undergo elastic deformation so that a contact on the moving contact plate is brought into contact and out of contact with contacts on the fixed contact plates. The top corners of the moving contact plate is bent into an upper component and a lower components in such a fashion as to form card acceptance portions, and a distal end portion of the card is brought into contact with an inner surface of the card acceptance portions.

Abstract: A relay including a coil, a yoke having a first yoke leg and a second yoke leg, a first connector terminal being electrically connected to a first contact terminal, a second connector terminal being electrically connected to a second contact terminal via a movable contact terminal, and a fuse having, a first end portion and a second end portion. The first end portion and the second end portion of the fuse being fixedly and directly connected to the first contact terminal and the second contact terminal, respectively.

Abstract: Radio frequency (RF) switch comprising an electromagnet formed on a magnet, a transmission line formed on the electromagnet and having a ground line and a signal line, and a movable contact connected to either the ground line or the signal line and capable of electrically coupling the ground line with the signal line. The transmission line is capable of propagating a RF signal if the ground line is electrically decoupled from the signal line. Conversely, the transmission line is incapable of propagating a RF signal if the ground line is electrically coupled with the signal line. The electromagnet can comprise an electromagnetic coil, formed in a layer of dielectric material, electrically coupled to a current source. Preferably, the movable contact is capable of being magnetically actuated, and is latchable. The magnet, the electromagnet, the transmission line, and the movable contact can have dimensions at a micron order of magnitude. The transmission line can be a coplanar waveguide.

Abstract: The invention relates to an electromechanical switching device including at least one pair of inductive elements electrically connected in series, said inductive elements being intended to generate two magnetic fields when current is flowing through said inductive elements, the interaction between these two fields resulting in a displacement of at least one of the inductive elements and a displacement of a mobile contact element linked to said at least one inductive element and intended to switch between two positions, at least one of these positions enabling an electrical connection between at least two conductive elements. The invention uses the mechanical forces exerted on at least one inductive element able to move thanks to two electro-magnetic fields oppositely generated by two inductive elements to activate a switch effect between two positions.

Abstract: A semiconductor micro-electromechanical system (MEMS) switch provided with noble metal contacts that act as an oxygen barrier to copper electrodes is described. The MEMS switch is fully integrated into a CMOS semiconductor fabrication line. The integration techniques, materials and processes are fully compatible with copper chip metallization processes and are typically, a low cost and a low temperature process (below 400° C.). The MEMS switch includes: a movable beam within a cavity, the movable beam being anchored to a wall of the cavity at one or both ends of the beam; a first electrode embedded in the movable beam; and a second electrode embedded in an wall of the cavity and facing the first electrode, wherein the first and second electrodes are respectively capped by the noble metal contact.

Abstract: An electrostatic device (10) includes a first flexible electrode (1) on which a plurality of second electrodes (2) are mounted so as to move with the first electrode (1). Upon the application of an electrical charge, the or each second electrode (2) causes deflection of the first electrode (1) which deflection is enhanced by the movement of the second electrode therewith. A variety of different designs of the device are possible to provide movement of the first electrode in a plurality of directions and also different types of in and out of plane movement, including rotation and twisting. The structure enables the device to operate at voltage levels compatible with integrated circuits and for the device to be manufactured using integrated circuit manufacturing techniques.

Abstract: A MEMS device fabricated from a single multi-layered wafer, which alleviates the alignment problem associated with a two-piece prior-art design. In one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The stationary part has an electrode and a first conducting structure electrically isolated from the electrode. The movable part has a rotatable plate and a second conducting structure located on the plate and electrically connected to the plate. The mass and location of the second conducting structure are selected such as to compensate for the plate's imbalance with respect to the rotation axis. In addition, at the rest position, the first and second conducting structures form, around the electrode, a substantially continuous barrier adapted to provide electrical shielding for the electrode.

Abstract: A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.

Abstract: To provide a small-sized electromagnetic relay capable of reducing an internal resistance of a contact circuit as much as possible, and also capable of carrying a high current to the relay. The electromagnetic relay includes an electromagnetic driving block composed by a coil, an iron core, a yoke, and an armature; fixed contacts each provided on one end of each of a pair of terminals fixed to a base; and a movable spring having movable contacts provided at positions corresponding to the respective fixed contacts, the armature driving the movable spring depending on whether or not a current is carried to the coil, thereby opening or closing a contact circuit, wherein the movable spring has both ends supported by the base, the movable spring arranged in parallel to the terminals, and the movable contacts are provided on the movable spring.

Abstract: A micro magnetic switch includes a reference plane and a magnet located proximate to a supporting structure. The magnet produces a first magnetic field with uniformly spaced field lines approximately orthogonal to the reference plane, symmetrically spaced about a central axis, or non-uniformly spaced fields approximately orthogonal to the reference plane. The switch also includes a cantilever supported by the support structure. The cantilever has an axis of rotation lying in the reference plane and has magnetic material that makes the cantilever sensitive to the first magnetic field, such that the cantilever is configured to rotate about the axis of rotation between first and second states. The switch further includes a conductor located proximate to the supporting structure and the cantilever. The conductor is configured to conduct a current.

Abstract: An integrated microspring switch may be provided for relatively high frequency switching applications. A spring arm may be formed over a microspring dimple, which may be hemispherical and hollow in one embodiment. When the spring arm contacts the dimple, the spring dimple may resiliently deflect away or collapse, increasing the contact area between the spring arm and the dimple.

Abstract: Provided is a self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic system, which can suppress deformation of a movement plane generated during manufacturing and operation process by inserting the self-sustaining center-anchor, and improve a ground line contact phenomenon of an upper electrode, thereby enhancing reliability and signal isolation feature while maintaining an existing insertion loss feature compared to the microelectromechanical switch of the prior art.

Abstract: The present switch including the present actuator has a supporting column on a substrate, and a cap plate provided on the supporting column. The supporting column pivotally supports the cap plate. At ends of the cap plate, a plurality of beams are provided, respectively. The plurality of beams are subjected to electrostatic force of absorbing electrodes. According to the present switch, tilting directions of the cap plate (beams) can be set freely. Therefore, by providing the beams in a plurality of directions desired by a user and positioning the absorbing electrodes on the substrate so that the absorbing electrodes respectively correspond to the beams, the cap plate can be tilted in a plurality of desired directions. With this arrangement, the present switch has high degree of freedom as to the positions and number of substrate contact points.

Abstract: An electromagnetic relay has an iron core having a protruding shaft and a magnetic pole portion. The protruding shaft is penetrated through a through hole provided on a metal case, and coil is wound around the protruding shaft. A voltage is applied to the coil for magnetization and stopped for demagnetization, hence to drive a contact mechanism with a movable iron piece that is attracted by and separated from the magnetic pole portion, thereby causing a reciprocating motion of the movable iron piece. The relay can prevent generation of eddy current.

Abstract: A 1:N MEM switch module comprises N MEM switches fabricated on a common substrate, each of which has input and output contacts and a movable contact which bridges the input and output contacts when the switch is actuated. The input contacts are connected to a common input node, and the output contacts are connected to respective output lines. Each output line has an associated inductance and effective capacitance, and is arranged such that its inductance is matched to its effective capacitance. The switches are preferably arranged symmetrically about the terminus point of the signal input line. A phase shifter employs at least two switch modules connected together with N transmission lines having different lengths, operated such that an input signal is routed via one of the transmission lines to effect a desired phase-shift.

Abstract: A method of forming a hermetically sealed MEMS package includes a step of providing a supporting GaAs substrate with at least one contact for the MEMS device on the surface of the supporting substrate and forming a cantilever on the surface of the supporting substrate positioned to come into electrical engagement with the contact in one orientation. A metal seal ring is fixed to the surface of the supporting substrate circumferentially around the contact and the cantilever. A cavity is etched in a silicon chip to form a cap member. A metal seal ring is fixed to the cap member around the cavity. The package is hermetically sealed by reflowing a solder alloy, positioned between the two seal rings, in an inert environment without the use of flux.

Abstract: A two-axis actuator having a large stage area and including includes a substrate, an anchor unit having sides approximately in a rectangular shape, fixed on the substrate, a plurality of first actuating parts actuating in a first direction and separated from the substrate within regions of both sides of the anchor unit, a plurality of second actuating parts actuating in a second direction between the first actuating parts, a rectangular shaped stage that actuates in the second direction, disposed above the second actuating parts, a third actuating part formed on the first actuating part, and elevated at a predetermined distance from the stage and the anchor unit, first direction deformable springs that support the first actuating part in inner parts of the anchor unit, and second direction deformable springs formed to fix the second actuating part in an inner part of the third actuating part.

Abstract: A microelectromechanical (MEM) apparatus is disclosed which can be used to generate electrical power in response to an external source of vibrations, or to sense the vibrations and generate an electrical output voltage in response thereto. The MEM apparatus utilizes a meandering electrical pickup located near a shuttle which holds a plurality of permanent magnets. Upon movement of the shuttle in response to vibrations coupled thereto, the permanent magnets move in a direction substantially parallel to the meandering electrical pickup, and this generates a voltage across the meandering electrical pickup. The MEM apparatus can be fabricated by LIGA or micromachining.

Abstract: A high life cycle and low voltage MEMS device. In an aspect of the invention, separate support posts are disposed to prevent a suspended switch pad from touching the actuation pad while permitting the switch pad to ground a signal line. In another aspect of the invention, cantilevered support beams are made from a thicker material than the switching pad. Increased thickness material in the cantilever tends to keep the switch flat in its resting position. Features of preferred embodiments include dimples in the switch pad to facilitate contact with a signal line and serpentine cantilevers arranged symmetrically to support the switch pad.

Abstract: Resonators 4 and 5 are able to oscillate horizontally and vertically to substrate 1. Resonator 4 is primarily composed of a supporting portion in stationary contact with substrate 1, a movable portion including a contact surface making contact with resonator 5 and a contact surface making contact with electrode 7, and a crossing portion that couples the supporting portion and movable portion. Electrode 6 is disposed in the direction in which resonator 5 is spaced apart from resonator 4. Electrode 7 is disposed in the direction in which resonator 4 is spaced apart from resonator 5. Electrode 9 is disposed in a position that causes resonator 5 to generate electrostatic force in a direction different from the direction of both forces of attraction acting between resonators 4 and 5 and between resonator 5 and electrode 6.

Abstract: A double relay is described which has two relay actuators which are inserted into a common receptacle. Each relay actuator has a first fixed contact and a movable contact. Arranged on the receptacle are two second fixed contacts, in each case a second fixed contact being associated with a movable contact of a relay actuator. The receptacle has a plurality of connection pins by way of which an electrical contact may be made with the relay actuators and the second fixed contacts. The double relay can be manufactured at low cost.