Abstract: A latching relay employing a movable cantilever with a first permanent magnet and a nearby second magnet is disclosed. The permanent magnet affixed to the cantilever is permanently magnetized along its long (horizontal) axis. The cantilever has a first end associated to the first pole (e.g., north pole) of the first magnet, and a second end associated to the second pole (e.g., south pole) of the first magnet. When the first end of the cantilever approaches the second magnet, the first pole of the first magnet induces a local opposite pole (e.g., south pole) in the second magnet and causes the first end of the cantilever to be attracted to the local opposite pole of the second magnet, closing an electrical conduction path (closed state). An open state on the first end of cantilever 10 can be maintained either by the second pole of first magnet being attracted to a local opposite pole in the second magnet or by a mechanical restoring force of flexure spring which supports the cantilever.

Abstract: It is an object to provide is an overcurrent relay having less number of parts and a smaller space to implement an automatic reset function and a manual reset function. A contact point mechanism 110 includes a movable contactor support 10 for supporting a movable contactor composing a part of the usually-closed contact point while being maintained in the movable iron core 5, and a reset bar 14 arranged in a manner that is switchable between an automatic reset setting and a manual reset setting. The reset bar 14 does not engage with the movable contactor support 10 in an operation range of the movable contactor support 10 in the automatic reset setting.

Abstract: A forcibly guided relay is disclosed, with a housing, whose height is smaller than its width and whose width is smaller than its length. With this, the relay comprises an electromagnetic drive filling the length or the width of the relay, with a clapper-type contactor which comprises a drive arm which extends in the direction of the core and at its free end cooperates with a drive cam; several contact pairs, which are in each case formed by a contact spring and a fixed or spring-like counter-contact said contact springs extending in the direction of the core, and with the drive ends being in a forcibly guided engagement with the drive cam.

Abstract: A microelectromechanical (MEM) device is disclosed that includes a shuttle suspended for movement above a substrate. A plurality of permanent magnets in the shuttle of the MEM device interact with a metal plate which forms the substrate or a metal portion thereof to provide an eddy-current damping of the shuttle, thereby making the shuttle responsive to changes in acceleration or velocity of the MEM device. Alternately, the permanent magnets can be located in the substrate, and the metal portion can form the shuttle. An electrical switch closure in the MEM device can occur in response to a predetermined acceleration-time event. The MEM device, which can be fabricated either by micromachining or LIGA, can be used for sensing an acceleration or deceleration event (e.g. in automotive applications such as airbag deployment or seat belt retraction).

Abstract: An electrical switch for connecting and breaking a circuit including a connecting and breaking mechanism for connecting and breaking the circuit provided with at least a set of movable contacts and stationary contacts; a electromagnetism drive mechanism for controlling the contacts to be actuated so as to realize closed circuit; a housing for accommodating the movable contact and stationary contact; an arc-extinguishing mechanism disposed in the housing and corresponded to the movable and stationary contact; a case connected to a base for accommodating the electromagnetism drive mechanism; a bedplate associated with the case; and a holding mechanism disposed on the bedplate for holding the contacts to connect the circuit, the electromagnetic holding mechanism is electromagnetic and has a set of electromagnetic attracting mechanism in which the movable iron core is made to be a pothook or a baffle mechanism, the movable iron core is attracted so that the pothook or baffle keeps the switch closed by means of hi

Abstract: An electrostatic micro relay, in which the contact gap between moving and fixed contacts may be increased and the reliability and high-performance regarding contacting and separating the moving contact with and from the fixed contact may be improved. In the micro relay according to the invention, as a comb-shaped moving electrode is supported at an obliquely upper position relative to a fixed comb-shaped electrode, the contact gap may be lengthened. When a predetermined voltage is applied between the contacts, the moving electrode is moved obliquely downward toward the fixed electrode such that the contact surface of the moving electrode slidably contacts the contact surface of the fixed electrode. This slidably contact may cause a wiping effect, whereby each contact surface may be kept clean.

Abstract: There is provided a relay module including: a power lead part connected to a power source; a connector lead part connected to a load; a relay switch interposed between the power lead part and the connector lead part, and electrically connected thereto; a control member for controlling the relay switch; and a molded part sealing at least ends of the power lead part and the connector lead part near the control member, the relay switch, and the control member.

Abstract: A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.

Abstract: An electromechanical relay employing a movable first permanent magnet and a nearby third electromagnet is disclosed. The movable first magnet is permanently magnetized and has at least a first end. The third electromagnet, when energized, produces a third magnetic field which is primarily perpendicular to the magnetization direction of the first movable magnet and exerts a magnetic torque on the first magnet to force the first magnet to rotate and closes an electrical conduction path at the first end. Changing the direction of the electrical current in the third electromagnet changes the direction of the third magnetic field and thus the direction of the magnetic torque on the first magnet, and causes the first magnet to rotate in an opposite direction and opens the electrical conduction path at the first end. Multiple magnets can be stacked together to form multi-pole-multi-throw relays.

Abstract: A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move horizontally away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

Abstract: Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

Abstract: The present invention provides multiple test structures for performing reliability and qualification tests on MEMS switch devices. A Test structure for contact and gap characteristic measurements is employed having a serpentine layout simulates rows of upper and lower actuation electrodes. A cascaded switch chain test is used to monitor process defects with large sample sizes. A ring oscillator is used to measure switch speed and switch lifetime. A resistor ladder test structure is configured having each resistor in series with a switch to be tested, and having each switch-resistor pair electrically connected in parallel. Serial/parallel test structures are proposed with MEMS switches working in tandem with switches of established technology. A shift register is used to monitor the open and close state of the MEMS switches. Pull-in voltage, drop-out voltage, activation leakage current, and switch lifetime measurements are performed using the shift register.

Abstract: The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material.

Abstract: The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material.

Abstract: A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move vertically away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

Abstract: A trip actuator assembly is provided for a circuit breaker including a housing having a mounting surface, separable contacts enclosed by the housing, and an operating mechanism structured to open and close the separable contacts. The trip actuator assembly includes a trip actuator cooperable with the operating mechanism, and a planar member having first and second ends, first and second edges, and an aperture. The trip actuator is at least partially disposed within the aperture and is further disposed between the planar member and the mounting surface of the housing. The first edge of the planar member is removably coupled to the mounting surface, thereby removably coupling the trip actuator to the housing. The circuit breaker may include an accessory tray which is insertable on and is removable from the mounting surface. When inserted, the accessory tray abuts the body of the trip actuator enclosure further securing the trip actuator.

Abstract: The invention relates to a power breaker for switching electrical loads having a parallelepipedal shape having four longitudinal sides lying in the longitudinal direction (LQ) of the parallelepiped, a first transverse side and an opposing second transverse side, an electromagnetic coil having a longitudinal axis (LS), an input connection, an output connection, and a moving contact path that is electrically connected to the input connection or the output connection. The invention also relates to power supply assembly arrangement for switching an electrical current between an external power supply line and at least one load where the moving contact path and the coil are arranged longitudinally parallel to one another in the longitudinal direction (LQ) of the parallelepipedal shape.

Abstract: A circuit for wetting relay contacts includes a relay having a relay coil, a movable contact and a stationary contact. The movable contact is movable between an open position and a closed position upon energizing of the relay coil, and the movable contact engages the stationary contact in the closed position. The movable contact is moved from the closed position to the open position when the relay coil is de-energized. A transistor is connected to the relay coil through a load, wherein the transistor loads the relay coil after the relay coil is de-energized to provide an arc between the movable contact and the stationary contact as the movable contact is moved from the closed position to the open position.

Abstract: A micro-relay includes a first substrate having stationary contacts and a stationary electrode, a second substrate arranged so as to face the first substrate, and a movable plate arranged between the first and second substrates. The movable plate has a frame and a movable portion. The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode.

Abstract: A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.

Abstract: A method includes forming a signal line on the substrate so as to have a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion for maintaining a distance from the substrate.

Abstract: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

Abstract: A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

Abstract: A relay includes a magnetic system provided with an armature and a contact system provided with a first contact and a moveable second contact. An electrically insulating base plate is arranged between the magnetic system and the contact system and has an opening therein. First and second walls extend from the base plate and are arranged between the opening and the magnetic system or the opening and the contact system. An actuator extends between the armature and the contact system through the opening and transfers movement of the armature to the second contact to move the second contact into electrical engagement with the first contact. The actuator has a third wall that extends toward the base plate and between the first and second walls. The first, second, and third walls extend a leakage path of an electrical leakage current between the contact system and the magnetic system.

Abstract: An electromagnetic relay is provided which enables a coating process with a coating agent even after being mounted on a printed circuit board having undergone reflow heating by preventing invasion of water while maintaining air permeability. A main body making up the electromagnetic relay includes an electrical contact portion, electromagnetic driving portion and molded resin base and is covered with the molded resin cover. One or more through holes are formed by applying laser beam from a rear side of the molded resin cover. A spot diameter of each through hole on a surface of an outside of the molded resin cover is 0.1 ?m to 10 ?m. Instead of the molded resin cover, through-holes each having a size of 0.1 ?m to 10 ?m may be formed by applying the laser beam to the molded resin base.

Abstract: A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is surrounded by the fixing portion via a slit having a pair of closed ends. The movable portion includes a first surface and a second surface. The first surface faces the base substrate, and the second surface is opposite to the first surface. The microswitching element also includes a movable contact portion provided on the second surface of the movable portion, and a pair of fixed contact electrodes each including a contact surface facing the movable contact portion. The fixed contact electrodes are attached to the fixing portion.

Abstract: The inventive circuit breaker-contactor (1) comprises a fixed contact, a contact (5) movable (19, 21) with respect to the fixed contact between open and closed positions, means (7) for displacing the movable contact (5) in the closed position thereof, means (9) for displacing the movable contact in the open position.

Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

Abstract: A micro-switching device includes a base substrate and a cantilever fixed to the base substrate via a spacer or anchor portion. The cantilever has an inner surface facing the substrate and an outer surface opposite to the inner surface. A conductive strip is formed on the outer surface of the cantilever. The switching device also includes a pair of stationary electrodes fixed to the base substrate. Each of the electrodes includes a downward contacting part spaced from the conductive strip on the cantilever. As the cantilever bends upward, the conductive strip is brought into contact with the contacting parts of the respective stationary electrodes.

Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

Abstract: An electromagnetic block and a movable block are attached onto a base in an inclination attitude. Contact mechanisms press-fitted from above the base are laterally arranged in the inclination attitude, and the contact mechanisms are arranged in parallel in upper and lower stages. Idle end portions of movable contact pieces in the contact mechanisms are latched in a card which is linearly moved in a lateral direction. Terminals are projected downward from a bottom surface of the base, one of the terminals is connected to the fixed contact pieces of the contact mechanism, and the other terminal is connected to the movable contact pieces of the contact mechanism. The upper contact mechanism and the lower contact mechanism are alternately arranged in the lateral direction.

Abstract: A latching relay employing a movable cantilever with a first permanent magnet and a nearby second magnet is disclosed. The permanent magnet affixed to the cantilever is permanently magnetized along its long (horizontal) axis. The cantilever has a first end associated to the first pole (e.g., north pole) of the first magnet, and a second end associated to the second pole (e.g., south pole) of the first magnet. When the first end of the cantilever approaches the second magnet, the first pole of the first magnet induces a local opposite pole (e.g., south pole) in the second magnet and causes the first end of the cantilever to be attracted to the local opposite pole of the second magnet, closing an electrical conduction path (closed state). An open state on the first end of cantilever 10 can be maintained either by the second pole of first magnet being attracted to a local opposite pole in the second magnet or by a mechanical restoring force of flexure spring which supports the cantilever.

Abstract: A switch device includes: a movable spring that has one end as a fixed end, and the other end as a free end; a substrate that is disposed below the movable spring; a first contact point that is disposed at a predetermined location between the fixed end and the free end of the movable spring; a protrusion that is formed on the substrate and is located to face the free end of the movable spring; and a second contact point that is provided on the substrate and is located to face the first contact point. This switch device is put into an ON state when the free end of the movable spring is brought into contact with the protrusion and the first contact point is brought into contact with the second contact point.

Abstract: A circuit (10) comprising a latching device (20) operatively configured and arranged to change from a first output state to a second output state as a function of a magnetic field (40) applied in a first direction, to maintain the second output state when the magnetic field is no longer applied in the first direction, and to change from the second output state to the first output state as a function of a magnetic field applied in a second direction, a power switching device (30) coupled to a power source (15) and a load (35), the power switching device coupled to the latching device and the latching device and the power switching device operatively configured and arranged such that the power switching device connects the power source and the load when the latching device is in the first state and disconnects the power source and the load when the latching device is in the second state, the latching device coupled to the power source between the power source and the power switching device, a magnetic switching

Abstract: The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are fixed-fixed and fixed-free designs. Springs are used in the fixed-fixed design to account for dimensional changes as a result of thermal expansion. The fixed-free designs utilize a tether to prevent a cantilever arm from deforming as a result of thermal expansions, as well as reducing tight controls in the manufacture of fixed-free MEMS switches. Additionally, to prevent stiction in MEMS switches, a variegated electrode design is provided to utilize internal stresses of a suspended beam to increase the restoring force while not increasing the actuation force.

Abstract: It is intended to provide an electromagnetic relay which resolves problems of large base size and difference in spring constant. In a facing gap defined between a pair of electromagnet units disposed on a base in parallel to each other and with shaft lines being oriented to an identical direction, a pair of moving contact springs overlaid along a vertical direction on the base and an A-fixed terminal unit and a B-fixed terminal unit provided with a plurality of contacts to which contacts of the moving contact springs selectively contact depending on excitation/non-excitation states of the electromagnetic units are housed. At least one of component parts of the respective electromagnetic units are included in electromagnetic connection passages between the moving contact springs and C-terminals.

Abstract: A magnet system for a bi-stable relay includes a coil, first and second core yoke members, and an armature. The coil has a first polarity state and a second polarity state. Each of the first and second core yoke members has a core arm and a yoke arm. Each of the yoke arms of the first and second core yoke members has a pole face. The armature has substantially parallel armature core arms separated by a permanent magnet. The armature is pivotally mounted in an air gap between the pole faces of the yoke arms of the first and second core yoke members such that the armature core arms contact the yoke arms in a first switch position corresponding to the first polarity state and in a second switch position corresponding to the second polarity state. The armature core arms are arranged substantially perpendicular to a center axis of the coil.

Abstract: The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

Abstract: An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.

Abstract: A latching relay employing a movable cantilever with a first permanent magnet and a nearby second magnet is disclosed. The permanent magnet affixed to the cantilever is permanently magnetized along its long (horizontal) axis. The cantilever has a first end associated to the first pole (e.g., north pole) of the first magnet, and a second end associated to the second pole (e.g., south pole) of the first magnet. When the first end of the cantilever approaches the second magnet, the first pole of the first magnet induces a local opposite pole (e.g., south pole) in the second magnet and causes the first end of the cantilever to be attracted to the local opposite pole of the second magnet, closing an electrical conduction path (closed state). An open state on the first end of cantilever 10 can be maintained either by the second pole of first magnet being attracted to a local opposite pole in the second magnet or by a mechanical restoring force of flexure spring which supports the cantilever.

Abstract: The micro relay of the present invention comprises a base substrate 3, an armature block 5, and a cover 7. The base substrate 3 has a storage recess 41 for accommodating an electromagnetic device 1. The storage recess is composed of a hole 41a penetrating the base substrate 3 and a thin storage recess lid fixed on the one surface of the base substrate to close the hole. The electromagnetic device 1 is isolated from a contact mechanism by the storage recess lid 41b to increase the reliability of the contacts. The electromagnetic device 1 includes a yoke 10, a coil 11 wound around the yoke to generate a flux in response to an exciting current, and a permanent magnet 12 secured to the yoke to generate a flux flowing through an armature 51 and the yoke 10. Because the permanent magnet 12 is secured to the yoke 10, this micro relay can reduce the thickness.

Abstract: A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.

Abstract: A Hall effect switching circuit includes a magnetic south pole detecting unit configured for detecting and judging a magnetic field intensity of a magnetic south pole to produce a first triggering signal; a magnetic north pole detecting unit configured for detecting and judging a magnetic field intensity of a magnetic north pole to produce a second triggering signal; and a detecting and controlling unit connected to the magnetic south pole detecting unit and the magnetic north pole detecting unit. The detecting and controlling unit is configured for judging a polarity of a magnetic field according to the first triggering signal and the second triggering signal, and selecting a triggering signal corresponding to the polarity of the magnetic field as a switching signal of the Hall effect switching circuit in a predetermined detect and setup time after starting the Hall effect switching circuit.

Abstract: To provide a small-sized electromagnetic relay capable of reducing an internal resistance of a contact circuit as much as possible, and also capable of carrying a high current to the relay. The electromagnetic relay includes an electromagnetic driving block composed by a coil, an iron core, a yoke, and an armature; fixed contacts each provided on one end of each of a pair of terminals fixed to a base; and a movable spring having movable contacts provided at positions corresponding to the respective fixed contacts, the armature driving the movable spring depending on whether or not a current is carried to the coil, thereby opening or closing a contact circuit, wherein the movable spring has both ends supported by the base, the movable spring arranged in parallel to the terminals, and the movable contacts are provided on the movable spring.

Abstract: A microvalve which utilizes a low temperature (<300° C.) fabrication process on a single substrate. The valve uses buckling and an electromagnetic actuator to provide a relatively large closing force and lower power consumption. A buckling technique of the membrane is used to provide two stable positions for the membrane, and to reduce the power consumption and the overall size of the microvalve. The use of a permanent magnet is an alternative to the buckled membrane, or it can be used in combination with the buckled membrane, or two sets of micro-coils can be used in order to open and close the valve, providing the capability for the valve to operate under normally opened or normally closed conditions. Magnetic analysis using ANSYS 5.7 shows that the addition of Orthonol between the coils increases the electromagnetic force by more than 1.5 times. At a flow rate of 1 mL/m, the pressure drop is <100 Pa.

Abstract: A micro electromechanical system (MEMS) switch includes a fixed contact (24) and a moveable contact (35) on an armature (30). The switch has electrodes (22, 34) associated with both the fixed and moveable contacts for providing an electrostatic switch operation and piezoelectric material with associated electrodes (36, 40) for bending the armature upon application of an electric voltage and providing an initial piezoelectric switch operation followed by electrostatic switching and clamping. The armature is of curved shape which is bent away from the fixed contact when in a switch open condition with zero applied voltage. This gives a large, e.g. 3 pm, switch gap in an OFF state which is reduced by piezoelectric operation suitable for electrostatic switch closing. A curved condition is provided by varying strain across the armature thickness, and is produced during manufacture of the switch.

Abstract: A current control device is disclosed. The current control device includes control circuitry and a current path integrally arranged with the control circuitry. The current path includes a set of conduction interfaces and a micro electromechanical system (MEMS) switch disposed between the set of conduction interfaces. The set of conduction interfaces have geometry of a defined fuse terminal geometry and include a first interface disposed at one end of the current path and a second interface disposed at an opposite end of the current path. The MEMS switch is responsive to the control circuitry to facilitate the interruption of an electrical current passing through the current path.

Abstract: A micro-electro-mechanical system (MEMS) switch is described. The MEMS switch includes both RF-input and output transmission lines formed on a substrate. An RF armature is anchored to the substrate and is electrically connected with the RF-output transmission line. A contact is electrically connected with the RF-input transmission line. Both bias-input and output signal lines are formed on the substrate. A bias armature is anchored to the substrate and is electrically connected with the bias-input signal line. A DC/RF isolation insulator connects the bias armature with the RF armature. When a charge is introduced to the bias-input signal line, the bias armature is forced toward the bias-output signal line, thereby forcing the RF armature to connect with the contact and form an electrical circuit between the RF-input transmission line and the RF-output transmission line.

Abstract: Microrelays and microrelay fabrication and operating methods providing a microrelay actuator positively controllable between a switch closed position and a switch open position. The microrelays are a five terminal device, two terminals forming the switch contacts, one terminal controlling the actuating voltage on an actuator conductive area, one terminal controlling the actuating voltage on a first fixed conductive area, and one terminal controlling the actuating voltage on a second fixed conductive area deflecting the actuator in an opposite direction than the first fixed conductive area. Providing the actuating voltages as zero average voltage square waves and their complement provides maximum actuating forces, and positive retention of the actuator in both actuator positions. Various fabrication techniques are disclosed.

Abstract: A micro electromechanical relay opens and closes an electrical circuit by contact/separation between a fixed contact disposed on a base and a movable contact disposed on an actuator by driving of a movable electrode by electrostatic attraction by application of voltage between a fixed electrode disposed on the base and a movable electrode of the actuator. The actuator comprises a supporting portion disposed on the base, a beam portion extending in a cantilevered manner from the supporting portion, and a movable electrode and a movable contact elastically supported by the beam portion. The beam portion elastically supports, in order from the supporting portion end, the movable electrode and the movable contact. A slit is formed from the side of the supporting portion in the portion of the actuator connecting the beam portion and the movable electrode.