Abstract: A method of drying a coated monolithic substrate by imposing a vacuum at one end of the substrate to draw volatilized constituents out of the channels and by delivering a gas stream through the other end of the substrate during the drying process.

Abstract: Apparatus and methods are disclosed for lyophilization of protein and/or pharmaceutical products, wherein said apparatus utilizes a dry vacuum pump for the direct removal of water vapor, rather than a cold trap condenser. A freeze dryer has a vacuum pump which is connected directly to a drying chamber without the use of a cold trap condenser. The exhaust of the vacuum pump is vented directly to atmosphere. Water vapor generated in the process is directly removed from the chamber by the vacuum pump. The apparatus permits lyophilization of pharmaceuticals e.g. antibiotics, vitamins products, vaccines, and biological protein solutions. The dryer operates on a batch basis or may be designed to perform continuous production.

Abstract: A dryer for use with chemical compounds employs controlled vacuum, elevated temperature and dry, inert gas to dry the chemical compounds. The dryer includes a vacuum chamber into which trays containing the compounds are placed. The chamber includes heating elements which elevate the temperature of chemical samples placed within the chamber. Supplying and evacuating manifolds, each with a plurality of orifices for supplying and evacuating dry inert gas, provide a substantially laminar flow of dry inert gas just above the trays of chemical compounds which are to be dried. The laminar gas flow removes the unwanted vapor which tends to form above the tray of chemical compound, thus accelerating the drying process.

Abstract: Apparatus and method are provided for obtaining improved measurement and control of the temperature of a semiconductor wafer (W) during processing. The apparatus includes a chuck for holding a wafer during processing, a coolant gas supply (16), and a temperature sensing arrangement for measuring and controlling the temperature of the wafer during processing. A top face of the chuck (22) over which the wafer is positioned, is configured with a plurality of holes (34) into which the coolant gas, such as helium, is admitted at controlled rate and pressure. The coolant gas passes through a narrow space (36) between the top face of the chuck and the underside of the wafer and is evacuated via an exhaust line (30) after being heated to (or nearly to) the temperature of the wafer. Temperature of the now-heated coolant gas is continuously measured by a temperature sensor arrangement which generates a signal controlling the pressure and flow of coolant gas to the wafer.

Abstract: A degasser tank which is used to remove moisture from welding flux, welding rods, welding wire and welding torch components comprising an airtight tank chamber and a vacuum pump for decreasing the pressure in the tank chamber to substantially zero pounds per square inch. An optional viewing window, and input and output control valves for regulating material flow are attached to the chamber. The vacuum drying process provides a more efficient and safe method of dehumidifying welding materials.

Abstract: Specifically configured dual rotor, multi-lobed, rotary gas compressors in a piping system will provide clean gas heating and re-circulation that will quickly and efficiently heat a connected process chamber or process piping section. Substantial heat is quickly generated through mechanical agitation of the gas molecules that pass through the inlet and outlet of a dual rotor, multi-lobed, rotary gas compressor. The invention application of a dual rotor, multi-lobed, rotary gas compressor as a means of imparting heat to a gas stream provides an economical source of convective heat for closed and open loop piping applications.

Abstract: The present invention includes a freeze dryer which has a housing defining a chamber. A condenser is remote from the chamber and has an interior coupled for communication with the chamber. A base supports the chamber and is configured to accommodate the chamber in a plurality of different positions relative to the base. A pump is coupled to the chamber to lower pressure in the chamber.

Abstract: The present invention includes a freeze dryer which has a housing defining a chamber. A condenser is remote from the chamber and has an interior coupled for communication with the chamber. A base supports the chamber and is configured to accommodate the chamber in a plurality of different positions relative to the base. A pump is coupled to the chamber to lower pressure in the chamber.

Abstract: A system for removing excess carrier liquid from an electrostatic image developed with liquid developing material made up of toner particles immersed in a liquid carrier medium on an image bearing member. The system includes an absorbent contact roller for absorbing at least a portion of the liquid carrier off of the liquid image, and vacuum source coupled to the contact roller for generating both negative pressure at the surface of the roller to draw the absorbed liquid through the contact roller, and positive air pressure for pushing contaminated liquid out of the roller.

Abstract: A line for the semiautomatic feeding of industrial hides, particularly for setting-out/drying machines and vacuum driers, includes a loading/unloading device (5, 5') that lies between the unloading section of the setting-out/drying machine (2) and the drying tables (3') of the vacuum drier (3); the device (5, 5') can be actuated on command after spreading the hides (P, P') on each table of the vacuum drier. The loading/unloading device (5, 5') has at least one movable surface (8, 8') and has a translatory direction (V) that lies substantially at right angles to the main dimension of the tables (8) of the vacuum drier (3). The loading/unloading device (5, 5') is of the type with a movable conveyor belt (6) with an unloading end (7) that can be superimposed on the tables of the vacuum drier (3). It is possible to provide a conveyor belt (12) that is interposed between the vacuum drier (3) and an optional percher (4) that is aligned with it.

Abstract: The objects of the present invention are to remove the dust in a closed container, to keep the pressure in the closed container within a predetermined range, and to shorten the maintenance time of a vacuum pump system.The present invention provides a centrifugal dust collector 2 on main pipes which connects a furnace body 1, a mechanical press 9 and a dry pump 10, and a metal mesh dust collector 15 on a bifurcated pipe in a single-crystal semiconductor pulling apparatus. When the vacuum pump process begins, the metal mesh dust collector 15 collects amorphous silicon generated in the furnace 1. As the pressure in the furnace is reduced, the centrifugal dust collector 2 collects the dust particles instead. Since the gas flow rate increases as the vacuum state become higher, the critical diameter of collectable particles decreases, thereby improving the dust collection efficiency.

Abstract: An apparatus for drying semiconductor wafers using IPA (Isopropyl Alcohol) vapor includes a first chamber for producing the IPA vapor, and a second chamber connected to the first chamber through an IPA supply line, for receiving the IPA vapor and drying semiconductor wafers using the IPA vapor. With the drying apparatus, the first and second chambers are separated from each other, which allows the process steps of producing the IPA vapor and the drying the wafers to be separately performed. The drying apparatus thus prevents particles from being generated in the second chamber during the drying process. The wafers can be dried without a variation in temperature in the second chamber. The IPA vapor is exhausted from the second chamber by introducing nitrogen into the second chamber. As a result, the IPA vapor in the second chamber is not liquified and thereby leaves no substance to adhere to a contact portion between a wafer carrier and each wafer.

Abstract: A method for drying wood by placing the wood in a dehydration chamber in which the temperature, humidity and pressure are controlled. Air and or gasses are circulated in the chamber to wick away moisture while the wood remains frozen. Both the internal temperature and the circulating air are kept below freezing during the drying process. Atmospheric pressure is manipulated to enhance drying and may be either increased or reduced. Exposure to the volume of dry air (air with zero percent humidity) varies with the drying process and depends on the species, the quantity of wood to be dried and the initial moisture content of the material.

Abstract: A method of decontaminating or sterilizing freeze dryers at low temperature and pressure levels by utilizing sterilant vapor is disclosed.

Abstract: A freeze dryer includes a freezer unit having a plurality of walls defining a freezer interior. A housing defining a chamber suitable for receiving a specimen to be freeze dried is mounted to one of the panels to extend through an aperture therein into the freezer interior. A lid engages the housing to seal the housing. A condenser and a pump are coupled to the housing to lower pressure in the chamber and to condense liquid from the specimen.

Abstract: The invention provides a method and an apparatus for vacuum drying of a material, particularly timber or the like. The apparatus comprises a drying chamber (1), a vacuum producing unit (6) coupled with the drying chamber, a cooler structure (2,4), and devices for heating the drying chamber (1). The cooler structure (2,4) and the drying chamber (1) are coupled together by a compression unit (9) that may be placed substantially within the drying chamber (1). The cooler structure (2,4) is placed at least partially in a heat transfer connection with the drying chamber (1).

Abstract: A thin gas distribution plate is provided, consistent with requirements for mechanical rigidity and strength. The gas distribution plate has sufficiently low mass to permit rapid heating to an equilibrium temperature as determined by radiated heat loss. The gas distribution plate has a thinner central cross-section, optionally including smaller diameter apertures formed therethrough; and has a thicker circumferential cross-section, optionally having larger apertures formed therethrough, to thereby promote even gas distribution across the surface of the wafer, while mitigating or eliminating entirely the first wafer effect.

Abstract: A material drying apparatus having a sealable chamber for receipt of wet material, such as clothing. In this embodiment clothing placed into the chamber is dried upon the evacuation of air from the chamber wherein moisture drawn from the clothes is condensed on a condensate coil placed in the chamber. Heating coils placed around the chamber elevate the temperature to enhance condensate operation providing an energy efficient material dryer requiring no make-up air. Condensed water is purged after the drying process although provisions provide for an interim purge should excess liquid be drawn from the material.

Abstract: The present invention provides a method and apparatus for separating volatile components from a base material. Specifically, the apparatus comprises a gas tight reactor, an induction heating vessel, a plate and evacuating means for evacuating volatile components from the reactor. The method comprises the steps of heating the material from which the volatile components are to be removed by induction heating in a gas tight vessel. More specifically, the area surrounding the object within the gas tight vessel is filled with metal filings which are then heated by induction heating. The metal filings thus inductively heat the object, causing any volatile components therein to be released. The volatile components are then evacuated from the gas tight vessel and the metal filings removed.

Abstract: The present invention is a method and apparatus for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with thermally activated nitrogen trifluoride wherein the cleaning effluent is safely removed and cleaning by-products isolated or diluted to provide for efficient cleaning and rapid restarts of fabrication equipment so cleaned.

Abstract: An apparatus for thermal treatment of a thin plate wafer having a peripheral edge, having a vacuum chamber, a heater block for heating the thin film wafer rigidly mounted and operatively positioned inside said vacuum chamber, a holding clamp positioned in said vacuum chamber and defining an open-ended cylinder having a bottom and a top, said bottom for receiving said heater block, said holding clamp for pressing against said wafer supported by said heater block; a device for holding the wafer in said open-ended cylinder to enable said holding clamp to hold the wafer prior to and subsequent to thermal treatment of the wafer, an elevator device for positioning said holding clamp relative to said heater block such that in use only said weight of said holding clamp presses against the wafer, and a mechanical device co-operating with the elevator device for supplying and removing wafers into and out of the apparatus.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A component drier for drying electronic components which are washed with solvent. The component drier includes a drying chamber, in which a vat having a bottom surface wall allowing passage of air and water is arranged. The vat stores components to be dried. Heated air is introduced into the drying chamber through an air inlet which is positioned above the vat. The air in the drying chamber is forcibly discharged through an air outlet which is positioned below the vat. Thus, a space under the vat has a sufficient negative pressure as compared with a space above the vat so that the air forcibly passes through clearances between the components downwardly from above the vat, thereby removing most part of the solvent moistening the components in the liquid state. A small quantity of liquid which is left on the components is subsequently efficiently vaporized by the heated air.

Abstract: A system for removing excess carrier liquid from an electrostatic image developed with liquid developing material made up of toner particles immersed in a liquid carrier medium on an image bearing member. The system includes an absorbent contact roller for absorbing at least a portion of the liquid carrier off of the liquid image, a vacuum source coupled to the contact roller for generating negative pressure at the surface of the roller to draw the absorbed liquid through the contact roller, and a nonpermeable vacuum sealing membrane member partially surrounding the contact member in an area not adjacent to the image bearing surface for reducing the surface area of the contact roller which is exposed to the ambient atmosphere to create a vacuum sealing arrangement adapted to deliver negative pressure airflow to a selected area adjacent the image bearing surface.

Abstract: Control of temperature of the shelves in a freeze dryer compartment is achieved by circulating a cooled heat transfer fluid from a heat exchanger through a vacuum condenser independently of circulating the cooled heat transfer fluid either directly through the passageway chambers in the freeze dryer shelves, for cooling the shelves, or through a heater for heating the shelves. These circulations are effected by the selective control of electrically operated valves in fluid conduits automatically by a programmed computer.

Abstract: A substrate resting on a substrate surface is inserted into a processing chamber and processed to produce integrated chips. The substrate may be clamped electrostatically to the substrate support surface during processing. The substrate support surface plays a major role in controlling the temperature of the substrate during processing. The substrate support includes a plurality of thermoelectric modules in heat transfer contact with the substrate support surface and a controlled current supply. By controlling the current supply to each of these modules, the required temperature distribution can be maintained across the substrate support surface to maintain temperature uniformity across the substrate during processing. The thermoelectric modules control the temperature of the substrate support surface in response to controlled currents from the current supply to provide a uniform substrate temperature. The substrate support may be an RF biased electrode, and the substrate may be a semiconductor wafer.

Abstract: A process for drying a solution containing the material. The process includes the following steps: (1) subjecting the solution to vacuum-assisted freezing by introducing the solution into an evacuated chamber in the form of a spray, the droplets of which are at a sufficiently low temperature to ensure that they freeze at the vacuum pressure inside the chamber; (2) collecting the frozen droplets of the solution on a collecting surface of the chamber and controlling the temperature of the collecting surface and the pressure within the chamber so that the frozen solvent sublimes from the collected frozen droplets.

Abstract: A rotatable drum forms an airtight seal with a door. A vacuum line connects the interior of the drum to a vacuum pump. A shutoff valve closes the vacuum line to the pump. A pressure equalization valve connects the drum to the outside atmosphere. A bearing supports the drum, in combination with the vacuum line. Infrared lamps heat clothes placed inside the drum. The vacuum pump reduces the air pressure in the drum below atmospheric pressure, reducing the evaporation temperature of the water in the clothes. A heat sensor measures the temperature of the air leaving the drum. Solenoid-driven purge valves allow air to enter the drum in short bursts, thus aiding the drying of the clothes.

Abstract: The present invention relates to a method and instrument for the preparation of pollen and the development of a pollen bank for breeding purposes. More specifically, the invention relates to a method and instrument that permits pollen to be cryogenically stored in a visable state. Specifically, the present invention relates to a method of employing a heat or water or pressure related measurement to determine the realness of the pollen for cryogenic storage.

Abstract: Winding rods, built into the stator of an electrical machine, are no longer safe to operate after leakages in a water chamber. After this waterchamber has been removed, as is necessary anyway, a flexible, gas-proof hose is pulled upon the rod end, and the machine-side end of the hose is attached to the rod in a gas-proof manner. The other hose end is connected to a vacuum pump and, by evacuating the hose, the water that has penetrated into the rod insulation is removed by the same route as it penetrated into the insulation.The quality of this drying process is monitored by dielectric measurements.

Abstract: A device for positioning a probe, such as a temperature sensor, in a flask for freeze drying. The device includes a stopper adapted to be secured to an open end of the flask. The stopper has a center opening and at least one radial opening spaced from the center opening. The radial opening allows for fluid communication between inside and outside of the flask when the stopper is secured to the open end of the flask. The center opening receives a guide tube which extends into the flask and is sized to receive the probe such that substantially no fluid communication between the inside of the flask and the outside of the flask occurs through the guide tube or center opening. A channel formed in an upper surface of the stopper and an O-ring positioned about an outer diameter of a neck of the flask secure the probe in position relative to the guide tube. The multiple radial openings define an annular passageway which mimics fluid communication through a standard slit-type stopper employed in freeze drying.

Abstract: A method for drying wood by placing the wood in a dehydration chamber in which the temperature, humidity and pressure are controlled. Air and or gasses are circulated in the chamber to wick away moisture while the wood remains frozen. Both the internal temperature and the circulating air are kept below freezing during the drying process. Atmospheric pressure is manipulated to enhance drying and may be either increased or reduced. Exposure to the volume of dry air (air with zero percent humidity) varies with the drying process and depends on the species, the quantity of wood to be dried and the initial moisture content of the material.

Abstract: Specifically configured gas compressors in a piping system will provide clean, gas heating and recirculation that will quickly and efficiently heat a connected process chamber or process piping section. Substantial heat is quickly generated through mechanical agitation of the gas molecules that pass through the inlet and outlet of a dual rotor-multiple lobe per rotor, rotary gas compressor. The application of a rotary gas compressor as a means of imparting heat to a gas stream provides an economical source of convective heat for closed and open loop piping applications.

Abstract: A vacuum remediation system for remediating various devices and apparatus is shown. A moisture evaporation device including a vacuum system is described to provide a reduced level of pressure on the apparatus being remediated. A control circuit controls the operation of the moisture vaporization device and includes a timed control operation to limit and actuate operation of the remediation process. A resilient member having a vacuum aperture is described in combination with a removable encapsulation chamber having a fluid-sealing surface to cooperate with the resilient member. A vibration system is adapted to impart low levels of vibration to the apparatus being remediated. The operation is such that unwanted moisture is vaporized through action of a reduced atmospheric pressure produced by the pump, and the vibration in conjunction with the aspiration removes unwanted moisture and contamination particles from the apparatus being remediated.

Abstract: Herein disclosed are a vacuum-degreasing cleaning method for degreasing a work by cleaning it with a solvent vapor under reduced pressure, and a vacuum-cleaning machine for practicing the method. This method comprises the vapor-cleaning step of cleaning the work under reduced pressure with a vapor of a petroleum solvent, and the drying step of drying the surface of the work under reduced pressure. This cleaning method can clean the work while preventing the deterioration of the working atmosphere and the air pollution and can reduce the initial cost and the running cost for the work cleaning operation. Moreover, the cleaning efficiency can be safely enhanced with neither any thermal influence upon nor any rust upon the work.

Abstract: A system providing wrinkle-free drying of a liquid zone coating applied to a paper web includes a surface of high thermal conductivity heated to a uniform temperature above the boiling point of the coating liquid and over which the web is drawn with the uncoated face in contact with the surface. A vacuum is also drawn through the surface to hold the web in intimate contact therewith during drying. The method and apparatus of the invention are applicable to unitary webs as well as composite webs such as corrugated paperboard.

Abstract: A method for separating volatile components from a particulate base material by induction heating, which method comprises: heating a particulate base material in an induction heating vessel within a gas-tight reactor by induction heating; agitating said particulate base material by induction heated agitator means; introducing inert gas into said base material; and evacuating volatilized components from said particulate base material.A method for separating volatile components from a solid object by induction heating, which method comprises: positioning the solid object in an induction vessel of a gas-tight induction heating reactor, so that the object is surrounded by metal filings; heating said object surrounded by said metal filings by induction heating; injecting an inert gas into said metal filings; evacuating volatile components from within said reactor; and removing metal filings from the object.

Abstract: An improved process for treating grain used for animal feeds includes steps of conditioning the grain to soften the grain coats, quickly heating the grain to a temperature just below a temperature sufficient to cause the grains to burst, compressing the heated grain between rollers to cause the grain to burst, further pressing the burst grains into flakes, and cooling the flaked grain. During the cooling step water is added to bring the moisture content of the final product to a desired level; digestibility enzymes and other additives are added with the water.

Abstract: A mobile Sand Dryer is disclosed. This dryer is substantially made up of two portions. The first portion of the Sand Dryer is a wet sand tank. This tank is essentially divided into two distinct portions; an upper wet sand holding chamber and a lower sand drying chamber. The two chambers are divided by a grate. The upper wet sand holding chamber is supplied with a removable lid as well as a fan which may be used to create a vacuum in the chamber. The lower sand drying chamber is supplied with a propane burner and a hopper bottom. During use wet sand is placed in the upper wet sand drying chamber via the removable lid. The wet sand collects on the steel grate as it is placed into the chamber. Upon ignition of the burner and the fan the vacuum crated by the fan tends to draw the heat and moisture from the sand up and out the top of the chamber. As the sand on the grate is dried it falls through the grate before finally be moved via a vacuum tube to the second chamber.

Abstract: The invention relates to a one-pot mixer/granulator/dryer constituting a single step or one-pot production apparatus for successively mixing, moist-granulating and drying solid pharmaceutical products, for example in the manufacture of powdered products, pellets or granules. The dryer according to the invention has a substantially improved drying performance compared with conventional production equipment. The high efficiency of drying is achieved by the simultaneous use of four different drying mechanisms.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: Methods are providing for cleansing contaminants from substrates, such as semiconductor wafer handling implements, and thereby reduce the incidence of contamination of semiconductor devices being assembled upon the semiconductor wafers. In one aspect of the invention, a substrate such as a semiconductor cassette or other semiconductor wafer handling implement, is inserted into a chamber that is substantially isolated from a surrounding environment. A pressurized, and optionally purified, cleansing medium is directed against at least one surface of the substrate to dislodge contaminants from the substrate surface. Dislodged contaminants are evacuated with negative pressure from the chamber. In a preferred aspect of the invention, the cleansing medium is an inert gas, such as nitrogen, and is applied to the substrate at a pressure from about 10 p.s.i. to about 100 or more p.s.i.

Abstract: A high speed negative pressure air stream from a sucking-out nozzle or a combination of a high speed negative pressure air stream from the sucking-out nozzle and a high speed air jet stream from a blowing nozzle are used for drying an article. Flanges can be installed at a tip end of the sucking-out nozzle and the blowing nozzle. The air jet stream can be injected obliquely to the surface of the article to be dried. Water adhered to an article to be dried, for example, a wet mat, is rapidly divided into minute water drops which are extracted. Vermin, lice and other contaminants are also removed. The article to be dried is rapidly dehydrated and dried in a low temperature. The sucking-out nozzle provided with a flange in a sucking-out pipe is placed so that it can slide on the surface of the article to be dried. A water drop separating vessel is installed between the sucking-out pipe and the inlet of a blower. A dehumidifier is installed between the outlet of the blower and the blowing pipe.

Abstract: An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainment of particulates, while still reducing moisture contents below 100 parts per billion and achieving appropriate pressure drops without two phase flow.

Abstract: The present invention provides a shelf for a freeze dryer which includes a pair of first and second flat plates spaced apart from one another, and a plurality of ribs located between the first and second plates and spaced from one another so as to define flow channels for circulating a diathermic fluid. The ribs are preferably formed of hollow tubes that are brazed to the first and second plates and the hollow tubes and plates are stress relieved so that the first plate presents a flat surface at which heat is transferred from articles to be freeze dried and the diathermic fluid. A freeze dryer shelf constructed in such manner has less thermal mass than prior art design which have solid ribs and plates welded to the ribs with a thickness sufficient to prevent the formation of surface deformations that would interrupt the flat surface of the first plate.

Abstract: A substrate transporting system is presented which can prevent contamination within a sealed box, and which does not bring in contaminants from the outside environment when installing substrates in a processing apparatus connected to a clean tunnel. The substrate transporting apparatus according to the present invention includes a box for installing one or more substrates in a clean sealed atmosphere, and a box transporting apparatus for transporting the box by loading it on a carrier and through a clean sealed space of a tunnel shape, and further includes a box transfer apparatus arranged in the tunnel-shaped sealed space for transferring the box from the exterior of the sealed space to the carrier, and a substrate transfer apparatus for transferring substrates installed within the box to a substrate processing apparatus connected to the sealed space. It has a cleaning apparatus arranged within the tunnel-shaped sealed space for cleaning the outer surface of the box.

Abstract: A process is disclosed for drying sol-gel derived porous wet bodies without inducing cracks therein. The wet gel preferably is immersed in a liquid solvent before being placed inside a drying chamber capable of withstanding relatively high pressures and temperatures. After the wet gel is loaded, the chamber is sealed from the outside environment, and then is heated from outside the chamber in a controlled manner until a prescribed subcritical pressure is reached. The final temperature and pressure are always lower than the critical temperature and pressure of the drying solvent. The solvent vapor is then evacuated from the chamber in a controlled fashion to decrease the pressure until ambient pressure is reached, while preferably maintaining the temperature inside the chamber at the prescribed level. Thereafter, the inside of the chamber is purged with an inert gas for a prescribed time period, after which the chamber is cooled to ambient temperature and the dry crack-free porous gel is removed.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A chamber system for cryosorption freeze-drying of biological specimens in a Dewar vessel, comprises a chamber having a cylindrical metal wall and fitted within the Dewar vessel, a lower outer edge of which chamber is connected in a vacuum-tight manner to a lower edge of a metallic rotational component, the metallic rotational component having a bottom contact surface, which bottom contact surface corresponds with a complementary top contact surface on top of a cylindrical body around which liquid nitrogen flows and cools the metallic rotational component, the rotational component having a chamber to receive a drying agent for conducting cryosorption, for example a molecular screen, as well as a connection to the drying chamber.The upper edge of the metal wall or a ring connected thereto in a vacuum-tight manner is situated outside the Dewar vessel and is therefore approximately at ambient temperature and has a vacuum connection for the connection of commercially available vacuum components.

Abstract: An article is dried in a vacuum and sublimation is prevented by controlling both the heat applied to the article and the heat lost through evaporation. The article is placed in a vacuum chamber having a plurality of infrared lamps disposed around the interior of the chamber and the chamber is heated to a predetermined temperature prior to evacuation. Heat loss is controlled by maintaining the pressure above approximately 5 torr, which controls the rate of evaporation. The drying cycle also cleans the article.