Abstract: To simplify the optical calibration of an optical observation apparatus, a stand for an optical observation unit including a calibration object arranged directly on the stand in a fixed location is specified. Moreover, an optical observation apparatus, which includes such a stand and an optical observation unit connected to the stand, a method for calibrating such an optical observation apparatus, and a computer program are specified.

Abstract: An optical metrology device performs multi-wavelength polarized confocal Raman spectroscopy. The optical metrology device uses a first light source to produce a first light beam with a first wavelength and a second light source to produce a second light beam with a second wavelength. A dichroic beam splitter partially reflects the first light beam and transmits the second light beam to combine the light beams along a same optical axis that is incident on a sample. The dichroic beam splitter directs the Raman response emitted from the sample in response to the first light beam and the second light beam together towards at least one spectrometer and directs the first light beam away from the at least one spectrometer. A chopper may be used to isolate the Raman response to the first and second light beams that is received and spectrally measured by the at least one spectrometer.

Abstract: Real-time focusing in a slide-scanning system. In an embodiment, focus points are added to an initialized focus map while acquiring a plurality of image stripes of a sample on a glass slide. For each image stripe, a plurality of frames, collectively representing the image stripe, may be acquired using both an imaging line-scan camera and a tilted focusing line-scan camera. Focus points, representing positions of best focus for trusted frames, are added to the focus map. Outlying focus points are removed from the focus map. In some cases, one or more image stripes may be reacquired. Finally, the image stripes are assembled into a composite image of the sample.

Abstract: A synthetic aperture optics (SAO) imaging method minimizes the number of selective excitation patterns used to illuminate the imaging target, based on the objects' physical characteristics corresponding to spatial frequency content from the illuminated target and/or one or more parameters of the optical imaging system used for SAO. With the minimized number of selective excitation patterns, the time required to perform SAO is reduced dramatically, thereby allowing SAO to be used with DNA sequencing applications that require massive parallelization for cost reduction and high throughput. In addition, an SAO apparatus optimized to perform the SAO method is provided. The SAO apparatus includes a plurality of interference pattern generation modules that can be arranged in a half-ring shape.

Abstract: Systems and methods are provided for automated detection and disinfection of microbes in autonomous vehicles, to prevent possible transmission of diseases or illness to subsequent users. Automated detection and disinfection of a vehicle includes autonomously scanning various parts of the autonomous vehicle for microbes, selecting a disinfectant based on detected microbes, and autonomously disinfecting at least a portion of the autonomous vehicle.

Abstract: Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section image that is an SEM image obtained through observation of a cross section of the sample by a scanning electron microscope, and a criterion image that is the processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit.

Abstract: An Incoherent Fourier ptychographic imaging system. Multiple known light patterns are projected sequentially onto a target and images of the combined pattern and target are recorded by a camera, with the images being processed using an optical transfer function (OTF). The camera and projection system are aligned along the same optical axis. The known illumination patterns and the optical transfer function (OTF) are combined in an iterative algorithm to generate an image with resolution greater than would be achieved by uniform illumination of the target and imaging with the camera.

Abstract: A system 100 and method are provided for imaging a sample in a sample holder. For providing autofocus, a 2D pattern is projected onto the sample holder 050 via an astigmatic optical element 120. Image data 172 of the sample is acquired by an image sensor 140 via magnification optics 150. A difference in sharpness of the two-dimensional pattern in the image data is measured along a first axis and a second axis. Based on the difference, a magnitude and direction of defocus of the camera subsystem is determined with respect to the sample holder. This enables the sample holder, and thereby the sample, to be brought into focus in a fast and reliable manner.

Abstract: A system and method for high-resolution polarimetric imaging can include an array of micro-cameras to simultaneously capture polarized optical information from a wide area. Polarized illumination sources can be placed below and/or above the sample to direct polarized light to the sample during image capture. Post processing can be performed on the captured images to obtain polarimetric properties of the sample.

Abstract: Methods for imaging a sample using fluorescence microscopy, systems for imaging a sample using fluorescence microscopy, and illumination systems for fluorescence microscopes. In some examples, a method includes positioning the sample such that a plane of interest of the sample is coplanar with a focal plane of a detection objective of a microscope. The method includes positioning a paraboloidal mirror around the sample such that a focal point of the paraboloidal mirror is coplanar with the focal plane of the detection objective and the plane of interest of the sample. The method includes directing a beam of annularly collimated excitation light on the paraboloidal mirror to focus a disc of light on the sample and thereby to provide 360 degree lateral illumination of the sample. The method includes imaging the sample through the detection objective.

Abstract: An exoscope with enhanced depth of field imaging is provided. The exoscope includes first and second sets of optical devices, the first set having a fixed image plane, the second set having a variable image plane adjacent the fixed image plane of the first set. The second set includes at least one variable device configured to change the position of the variable image plane. A beamsplitter splits light from a combined optical path of the first and second set to respective image devices of the first and second set of optical devices. A controller controls the at least one variable device to change the position of the variable image plane relative to the fixed image plane, combines images acquired by the respective image devices, and controls a display device to render a combined image.

Abstract: A synthetic aperture optics (SAO) imaging method minimizes the number of selective excitation patterns used to illuminate the imaging target, based on the objects' physical characteristics corresponding to spatial frequency content from the illuminated target and/or one or more parameters of the optical imaging system used for SAO. With the minimized number of selective excitation patterns, the time required to perform SAO is reduced dramatically, thereby allowing SAO to be used with DNA sequencing applications that require massive parallelization for cost reduction and high throughput. In addition, an SAO apparatus optimized to perform the SAO method is provided. The SAO apparatus includes a plurality of interference pattern generation modules that can be arranged in a half-ring shape.

Abstract: The present disclosure provides a technique for reducing man-hour of a user required for setting an automatic focused focal point search function of an electron beam and facilitating observation of a sample when reviewing a defect using an electron microscope. The present disclosure provides a technique in a charged particle beam system, in which an appropriate focal point position search width can be automatically set in consideration of convergence accuracy and an operation time based on a focal point measure distribution width for a focal point position acquired in advance under the same conditions and a difference between focal point positions before and after automatic focused focal point position search.

Abstract: A method for a deconvolution of a digital input image (I(xi)) having a plurality of input voxels (xi), in particular a digital input image obtained from a medical observation device, such as a microscope or endoscope and/or using fluorescence, includes computing a local signal-to-noise ratio (SNR(xi)) within an input region (R(xi)) of the digital input image, the input region consisting of a subset of the plurality of input voxels of the digital input image and surrounding the current input voxel. A noise component (?(SNR)) is computed from the local signal-to-noise ratio, the noise component representing image noise (([h*f](xi), n(xi)) in the deconvolution. The noise component is limited to a predetermined minimum noise value (?min) for a local signal-to-noise ratio above a predetermined upper SNR threshold value (SNRmax) and is limited to a predetermined maximum noise value (?max) for a local signal-to-noise ratio below a predetermined lower SNR threshold value (SNRmin).

Abstract: A sample observation device images a sample placed on a movable table by irradiating and scanning the sample with a charged particle beam of a microscope. A degraded image having poor image quality and a high quality image having satisfactory image quality which are acquired at the same location of the sample by causing the charged particle microscope to change an imaging condition for imaging the sample are stored. An estimation process parameter is calculated for estimating the high quality image from the degraded image by using the stored degraded image and high quality image. A high quality image estimation unit processes the degraded image obtained by causing the charged particle microscope to image the desired site of the sample by using the calculated estimation process parameter. Thereby, the high quality image obtained at the desired site is estimated, and then the estimated high quality image is output.

Abstract: An optical apparatus comprises an illumination module (100) comprising a carrier (110), which has at least one light-transmissive region (112), for example. The illumination module (100) comprises a plurality of light sources (111), which are arranged on the carrier (110).

Abstract: The invention is directed to a surgical microscope and a device for switching the same among multiple working modes. The device includes an illumination rotary member and an observation rotary member that are arranged, respectively, in the illumination beam path and the observation beam path of the surgical microscope and are drivable by the same power source to rotate synchronously among multiple rotary positions corresponding to the multiple working modes. In each of the rotary positions, light from a light source of the surgical microscope passes through one or more of multiple light-through-portions of the illumination rotary member along the illumination beam path to illuminate the observed object, and then passes through one or more of multiple light-through-portions of the observation rotary member along the observation beam path to reach the eyepiece and/or an observation instrument of the surgical microscope.

Abstract: A biological image presentation device includes: an acquisition unit; a determination unit determining an image as a standard and an image for comparison; an extraction unit extracting, from the image as a standard, a position where a change of luminance value equal to or larger than a defined value is present; a detection unit detecting a position corresponding to the position extracted from the image for comparison; a division unit dividing the image as a standard on the basis of the position extracted; a mapping unit mapping the image for comparison to an area corresponding to each divided area of the image as a standard while modifying so as to conform to the shape of the divided area; and a display control unit switching and displaying an image for display in a display area by using the image as a standard and an image mapped by the mapping unit.

Abstract: An image forming optical system includes a first image forming unit configured to form an image of a first surface onto a second surface, a second image forming unit including at least a portion of the first image forming unit and configured to form an image of the second surface onto a third surface, and a deflection unit configured to deflect light from the second surface toward the third surface. The numerical aperture of the first image forming unit on the side toward the second surface is larger than the numerical aperture of the second image forming unit on the side toward the second surface.

Abstract: Methods and systems are provided for using temporal supersampling to increase a displayed resolution associated with peripheral region of a foveated rendering view. A method for enabling reconstitution of higher resolution pixels from a low resolution sampling region for fragment data is provided. The method includes an operation for receiving a fragment from a rasterizer of a GPU and for applying temporal supersampling to the fragment with the low resolution sampling region over a plurality of prior frames to obtain a plurality of color values. The method further includes an operation for reconstituting a plurality of high resolution pixels in a buffer that is based on the plurality of color values obtained via the temporal supersampling. Moreover, the method includes an operation for sending the plurality of high resolution pixels for display.

Abstract: This invention overcomes disadvantages of the prior art by providing, vision system, typically in the form of a handheld ID reader, which can include two imaging systems, a first imaging system that is off-axis and a second imaging system that is on-axis. The on-axis imaging system is typically standard in configuration, and can be used, for example, with a polarized illumination system. The off-axis imaging system is intended to minimize the camera reflection footprint on a (typically rounded) shiny object to enhance reading of small feature sets (e.g. DMP codes). The off-axis imaging system includes a diffusive illumination source with an emitter in the form of a concave surface, such as a semi-cylinder or dome. Combining images from the two imaging systems allows the contrast of the imaged feature set to be optimized, and provide superior reading and decoding of small codes on shiny rounded surfaces—such as DPM codes.

Abstract: Charging areas in electron microscopy are identified by comparing images obtained in different frames. A difference image or one or more optical flow parameters can be used for the comparison. If charging is detected, electron dose is adjusted, typically just in specimen areas associated with charging. Dose is conveniently adjusted by adjusting electron beam dwell time. Upon adjustment, a final image is obtained, with charging effects eliminated or reduced.

Abstract: Two-pass capture of a macro image. In an embodiment, a scanning apparatus comprises a stage, a high-resolution camera, and a lens that provides a field of view, substantially equal in width to a slide width, to the high-resolution camera. The apparatus also comprises a first illumination system for transmission-mode illumination, and a second illumination system for reflection-mode illumination. Processor(s) move the stage in a first direction to capture a first macro image of a specimen during a single pass while the field of view is illuminated by the first illumination system, and move the stage in a second direction to capture a second macro image of the specimen during a single pass while the field of view is illuminated by the second illumination system. The processor(s) identify artifacts in the second macro image, and, based on those artifacts, correct the first macro image to generate a modified first macro image.

Abstract: The purpose of the present invention is to provide a pattern measurement device which adequately evaluates a pattern formed by means of a patterning method for forming a pattern that is not in a photomask. In order to fulfil the purpose, the present invention suggests a pattern measurement device provided with a computation device for measuring the dimensions between patterns formed on a sample, wherein: the centroid of the pattern formed on the sample is extracted from data to be measured obtained by irradiating beams; a position alignment process is executed between the extracted centroid and measurement reference data in which a reference functioning as the measurement start point or measurement end point is set; and the dimensions between the measurement start point or the measurement end point of the measurement reference data, which was subjected to position alignment, and the edge or the centroid of the pattern contained in the data to be measured is measured.

Abstract: A functionally integrated laser scanning microscope for scanning a sample with laser illumination, selectably in a confocal, line or wide-field operating mode, comprising a laser light source, an illumination and detection beam path, a detection device and at least one objective, wherein the illumination and detection beam path has optical means for the configuration of the laser illumination, at least one scanner for scanning the sample with the laser illumination, and a beam splitter for separating illumination and detection light, and controllable optical elements for changing the beam guiding depending on the operating mode selected in each case.

Abstract: For the purposes of high-resolution scanning microscopy, a sample is excited by illumination radiation to emit fluorescent radiation in such a way that the illumination radiation is focused at a point in or on the sample, so as to form a diffraction-limited illumination spot. The point is imaged in a diffraction image on a detector in a diffraction-limited manner, wherein the detector has detector elements and a plurality of location channels which resolve a diffraction structure of the diffraction image. The sample is scanned with various scanning positions with an increment smaller than half the diameter of the illumination spot. An image of the sample with a resolution that is increased beyond a resolution limit of the image is generated from the data of the detector and from the scanning positions associated with these data.

Abstract: Presented here is a system to record high-resolution infrared images without the need to include additional stand-alone sensors into the mobile device. According to one embodiment, an organic light emitting diode (OLED) display is modified to emit IR and near-IR light in a large field. The modified display allows for depth sensing and infrared imaging without a stand-alone emitter. Additionally, an IR shutter filter can be applied to the existing front facing red, green, blue (RGB) camera that would only be in place when the display is in IR emission mode. The combination of these two technologies allows a facial recognition system using existing hardware, and not require additional sensors or emitters to achieve face recognition.

Abstract: An optics device with an optics module that includes at least one optical element and a control module for controlling the optics device is provided. The optics module includes a sub-system with a memory as well as at least one of an actuator and a sensor. An instruction for setting the actuator and/or the sensor of the sub-system is stored in the memory. The control module is formed such that, during operation of the optics device, it reads the instructions from the memory of the sub-system and activates the actuator and/or the sensor of the sub-system according to the instruction.

Abstract: The invention relates to an optical device for measuring the position of an object along a first axis, the object being subjected to light radiations emitted by a light source.

Abstract: Systems and computer-implemented methods for microscope-based learning including providing a first menu on a GUI to allow a user to identify or view a cell category of interest on a digital slide image that is simultaneously displayed with the first menu on the GUI. The systems and methods further include providing a navigation system on the GUI to allow the user to navigate the digital slide image and select proportional x and y coordinates on the digital slide image. A second menu is also provided on the GUI to allow the user to identify a cell type for the selected proportional x and y coordinates. The systems and methods are capable of automatically determining if the cell type identified by the user matches a predetermined cell type within the x and y coordinates from a database. The systems and methods further indicate whether the identified cell type matches the predetermined cell type on the GUI and display a summary of the total matches on the GUI.

Abstract: A camera controller platform for use with a pipe inspection system is disclosed. The platform is configured for the rapid mounting and connection of an electronic computing device such as a laptop computer for providing display and/or virtual control interface functions in conjunction with an electronics module. An additional user interface, which may include a manual user interface device, may be coupled to the electronics module. Alternatively, a plurality of virtual controls may be supported by a software application on the electronic computing device, which may be connected to the camera controller platform by a USB or other interface bus.

Abstract: For scanning electron beams and measuring overlay misalignment between an upper layer pattern and a lower layer pattern with high precision, electron beams are scanned over a region including a first pattern and a second pattern of a sample, the sample having the lower layer pattern (the first pattern) and the upper layer pattern (the second pattern) formed in a step after a step of forming the first pattern. The electron beams are scanned such that scan directions and scan sequences of the electron beams become axial symmetrical or point-symmetrical in a plurality of pattern position measurement regions defined within the scan region for the electron beams, thereby reducing measurement errors resulting from the asymmetry of electric charge.

Abstract: According to one aspect, embodiments herein provide a non-imaging optical system including a focusing optical element positioned within an input optical path to receive electromagnetic radiation, a micro-mirror array including a plurality of micro-mirror pixels positioned within the input optical path, individual micro-mirror pixels of the plurality of micro-mirror pixels being positioned to receive electromagnetic radiation from the focusing optical element and redirect electromagnetic radiation along a redirected optical path, a relay optical element positioned within the redirected optical path to receive and focus electromagnetic radiation from the micro-mirror array, and a single-pixel non-imaging detector positioned to receive electromagnetic radiation from the relay optical element.

Abstract: A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512×512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32×32 pixel detector. Although the reconstructed object shows less resolution (“sharpness”), all features are there.

Abstract: A nanostructure semiconductor light emitting device includes a base layer, an insulating layer, and a plurality of light emitting nanostructures. The base layer includes a first conductivity type semiconductor. The insulating layer is disposed on the base layer and has a plurality of openings through which regions of the base layer are exposed. The light emitting nanostructures are respectively disposed on the exposed regions of the base layer and include a plurality of nanocores having a first conductivity type semiconductor and having side surfaces provided as the same crystal planes. The light emitting nanostructures include an active layer and a second conductivity type semiconductor layer sequentially disposed on surfaces of the nanocores. Upper surfaces of the nanocores are provided as portions of upper surfaces of the light emitting nanostructures, and the upper surfaces of the light emitting nanostructures are substantially planar with each other.

Abstract: The present application discloses a confocal microscope including a light generator configured to simultaneously generate reflection light, which is reflected from a sample, and transmission light, which passes through the sample; a scanner configured to optically scan the sample and define a direction of a first optical path, along which the reflection light propagates; an adjuster configured to angularly adjust a direction of a second optical path, along which the transmission light propagates; a first signal generator configured to generate a first signal based on the reflection light; a second signal generator configured to generate a second signal based on the transmission light; and an image generator configured to generate a synthetic image in which a reflection image represented by the reflection light and a transmission image represented by the transmission light are synthesized in response to the first and second signals.

Abstract: The present application discloses device and system embodiments that address mobile device integration considerations for various categories of UV sensors, including cameras, photodiodes, and chemical sensors. The UV sensors may use the functionalities of the existing in-built sensors in conventional mobile devices, and/or integrate additional components specific to UV sensing. By optimally positioning the sensors, UV sensing and other collateral functionalities (e.g., charging a photovoltaic cell integrated with the mobile device) can be realized in parallel.

Abstract: A distal-end rigid section of an insertion section of an endoscope, includes: a first base of a metallic material, which constitutes a distal-end portion of the insertion section of the endoscope; a second base of a resin material, which is formed on an axially proximal-end side of the first base; a cylindrical portion protruding from the second base toward an axially distal-end side of the first base and including a non-circular hole portion in which an illumination light source having a non-circular outer shape, generating light and emitting illumination light is disposed; and a through-hole formed by opening a part along an outer peripheral surface of the first base, the cylindrical portion being disposed in the through-hole such that the illumination light is emitted to the axially distal-end side of the first base.

Abstract: In a microscope which can incline an imaging section, a height position of an observation target is automatically matched to a eucentric position. The microscope includes: a placement stage on which an observation target is placed; a lower stage lifting section that vertically movably supports the placement stage; a first driving mechanism that drives the lower stage lifting section; an imaging section that captures an image of the observation target; and an upper stage lifting section that vertically movably supports a fitting member along an optical axis and is swingable about a swinging axis orthogonal to the optical axis, wherein the first driving mechanism can drive the lower stage lifting section such that the surface of the observation target placed on the placement stage is matched to a focal position of imaging unit, or a height position of the swinging axis.

Abstract: A synthetic image can be generated by a simple operation in a short time. A magnifying observation apparatus includes: a z-axis movement unit capable of automatically adjusting a working distance to an observation surface of an observation target placed on a placement section; an xy-axis movement mechanism capable of changing relative positions of the placement section and a microscope lens section; and an image synthesizing unit for generating a synthetic image obtained by synthesizing a plurality of images each captured at a relative distance made different by the z-axis movement unit, wherein image synthesis processing by the image synthesizing unit and processing of moving the microscope lens section by the z-axis movement unit and capturing an image by the camera section are asynchronously executed.

Abstract: The present invention is for saving the time of searching a visual field to be observed and observing a synthetic image. A magnifying observation apparatus includes a controller configured to set an imaging condition, to generate a first image to be displayed in a first display mode by performing a first image processing on the image acquired on the imaging condition, to generate a second image to be displayed in a second display mode by performing a second image processing on the image, to detect an image changing operation including at least one of changing of the imaging condition and changing of a visual field, and to switch from the first display mode to the second display mode in response to detect the image changing operation.

Abstract: A microscope for widefield microscopy having a detection beam path and an illumination beam path. The microscope includes a filter wheel device, which is arranged in the detection beam path and/or illumination beam path and has a filter wheel, wherein the filter wheel is mounted to rotate about an axis, and wherein the filter wheel is divided into segments. Filters forming a first part-circle are arranged in a first part of the segments, such that said filters are consecutively introduced into the detection beam path or illumination beam path when the filter wheel is rotated. A camera records images at a predefined frequency. The filter wheel device includes a motor-driven shaft that rotates the filter wheel at a predefined rotation frequency. The microscope also comprises a control system for synchronizing the image-recording frequency and rotation frequency based on the filters arranged on the filter wheel.

Abstract: A method includes performing an approximate partially coherent imaging operation for elements of a first basis generated from a model image having no noise and no blur, and generating based upon the first basis a second basis that is blurred, the approximate partially coherent imaging operation being expressed by a convolution integral on an eigenfunction corresponding to a maximum eigenvalue of a Kernel matrix and each element of the first basis, generating an intermediate image in which each pixel value of the observed image that has been denoised is replaced with its square root, and obtaining a restored image by approximating each of a plurality of patches that are set to entirely cover the intermediate image, using a linear combination of elements of the first basis and linear combination coefficients obtained when each patch is approximated by a linear combination of elements of the second basis.

Abstract: In one aspect, the present invention relates to a microfluidic chamber. In one embodiment, the microfluidic chamber has a first sub-chamber and at least one second sub-chamber. The first sub-chamber has a first window and a second window. Both the first window and the second window are transparent to electrons of certain energies. The second window is positioned substantially parallel and opposite to the first window defining a first volume therebetween. The first window and the second window are separated by a distance that is sufficiently small such that an electron beam that enters from the first window can propagate through the first sub-chamber and exit from the second window. The at least one second sub-chamber is in fluid communication with the first sub-chamber and has a second volume that is greater than the first volume of the first sub-chamber.

Abstract: Foreground objects of interest are distinguished from a background model by dividing a region of interest of a video data image into a grid array of individual cells. Each of the cells are labeled as foreground if accumulated edge energy within the cell meets an edge energy threshold, or if color intensities for different colors within each cell differ by a color intensity differential threshold, or as a function of combinations of said determinations.

Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.

Abstract: A method and structure for forming an array of micro devices is disclosed. An array of micro devices is formed over an array of stabilization posts included in a stabilization layer. Patterned sacrificial spacers are formed between the stabilization posts and between the micro devices. The patterned sacrificial spacers are disposed upon the patterned sacrificial spacers.

Abstract: According to various embodiments, the present teachings include an array of nanowire devices. The array of nanowire devices comprises a readout integrated circuit (ROIC). An LED array is disposed on the ROIC. The LED array comprises a plurality of LED core-shell structures, with each LED core-shell structure comprising a layered shell enveloping a nanowire core, wherein the layered shell comprises a multi-quantum-well (MQW) active region. The LED array further comprises a p-side electrode enveloping the layered core-shell structure and electrically connecting the ROIC, wherein each p-side electrode has an average thickness ranging from about 100 nm to about 500 nm. A dielectric layer is disposed on the plurality of LED core-shell structures, with each nanowire core disposed through the dielectric to connect with an n-side semiconductor that is situated on the dielectric.

Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.

Abstract: A method for ablating a first area of a light emitting diode (LED) device which includes an array of nanowires on a support with a laser is provided. The laser ablation exposes a conductive layer of the support that is electrically connected to a first conductivity type semiconductor nanowire core in the nanowires, to form a first electrode for the LED device. In embodiments, the nanowires are aligned at least 20 degrees from the plane of the support. A light emitting diode (LED) structure includes a first electrode for contacting a first conductivity type nanowire core, and a second electrode for contacting a second conductivity type shell enclosing the nanowire core, where the first electrode and/or at least a portion of the second electrode are flat.