Abstract: When a scanning image of a scanning charged particle microscope is impaired by an external disturbance, a disturbance frequency can be simply and precisely analyzed from the image in order to specify the external disturbance. The maximum frequency analyzable by the scanning charged particle microscope can also be increased up to several kHz, which is the rotation frequency of, for example, a turbo-molecular pump commonly used as an exhaust pump of the scanning charged particle microscope. In an FFT analysis of a stripe pattern which is an impairment of the scanning image, the scanning charged particle microscope performs a one-dimensional FFT (1D-FFT) in the Y-direction (sub-deflection direction of the charged particle beam) or a one-dimensional DFT (1D-DFT) in the X-direction (main deflection direction of the charged particle beam).

Abstract: Provided is a scanning electron microscope including: an image recording unit (112) which stores a plurality of acquired frame images; a correction analyzing handling unit (113) which calculates a drift amount between frame images and a drift amount between a plurality of field images constituting a frame image; and a data handling unit (111) which corrects positions of respective field images constituting the plurality of fields images according to the drift amount between the field images and superimposes the field images on one another so as to create a new frame image. This provides a scanning electron microscope which can obtain a clear frame image even if an image drift is caused during observation of a pattern on a semiconductor substrate or an insulating object.

Abstract: A synthetic aperture optics (SAO) imaging method minimizes the number of selective excitation patterns used to illuminate the imaging target, based on the objects' physical characteristics corresponding to spatial frequency content from the illuminated target and/or one or more parameters of the optical imaging system used for SAO. With the minimized number of selective excitation patterns, the time required to perform SAO is reduced dramatically, thereby allowing SAO to be used with DNA sequencing applications that require massive parallelization for cost reduction and high throughput. In addition, an SAO apparatus optimized to perform the SAO method is provided. The SAO apparatus includes a plurality of interference pattern generation modules that can be arranged in a half-ring shape.

Abstract: A defect detected by a wafer inspection tool is reliably captured by a defect review tool. A defect review condition in the defect review tool is varied depending on defect attributes provided by the wafer inspection tool so as to optimize the review process. For example, review magnification is varied depending on the size of the defect, or the frame addition number is varied depending on the maximum gray level difference.

Abstract: A high speed, high-resolution flow imaging system is modified to achieve extended depth of field imaging. An optical distortion element is introduced into the flow imaging system. Light from an object, such as a cell, is distorted by the distortion element, such that a point spread function (PSF) of the imaging system is invariant across an extended depth of field. The distorted light is spectrally dispersed, and the dispersed light is used to simultaneously generate a plurality of images. The images are detected, and image processing is used to enhance the detected images by compensating for the distortion, to achieve extended depth of field images of the object. The post image processing preferably involves de-convolution, and requires knowledge of the PSF of the imaging system, as modified by the optical distortion element.

Abstract: A sample observation method of the present invention comprises a step of defining, with respect to an electron microscope image, an outline of an observation object with respect to a sample (3), or a plurality of points located along the outline, and a step of arranging a plurality of fields of view for an electron microscope along the outline, wherein electron microscope images of the plurality of fields of view that have been defined and arranged along the shape of the observation object through each of the above-mentioned steps are acquired. It is thus made possible to provide a sample observation method that is capable of selectively acquiring, with respect to observation objects of various shapes, an electron microscope image based on a field of view definition that is in accordance with the shape of the observation object, as well as an electron microscope apparatus that realizes such a sample observation method.

Abstract: Embodiments of the present invention relate to a high-resolution imaging device with wide field and extended focus comprising a beam generator for generating a plurality of nondiffracting beams and a scanning mechanism for moving the plurality of nondiffracting beams relative to the object to illuminate a volume of the object. The high-resolution imaging device also comprises surface element and a body having a light detector layer outside the surface element. The light detector layer has a light detector configured to measure light data associated with the plurality of nondiffracting beams illuminating the volume of the object. In some cases, the high-resolution imaging device also includes a lens inside of the light detector layer. The lens is configured to focus the light on the light detector surface.

Abstract: The present method comprises the steps of imaging the sample under different imaging conditions to acquire multiple images, generating degradation functions for the multiple acquired images, and then generating an image with an improved resolution using the multiple acquired images and the degradation functions corresponding to the acquired images to process the image with the improved resolution.

Abstract: A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.

Abstract: An electronic microscope includes a handle having an outer body enclosing a main body and an image sensor, a lens controller fixed to the front end of the outer body of the handle, and a light guide coupled to the front end of the lens controller. The lens controller includes an inner case having a guide slot in the circumference and a flange on one end to which the handle is coupled, an outer case rotatably coupled with the inner case from outside and having a spiral passage in the circumference communicating with the guide slot, and a lens unit inserted into the inner case. The lens unit moves back and forth in response to rotation of the outer case. The light guide includes a LED board, LEDs radially mounted on the LED board, and an observation filter detachably provided on the front end of the lens controller.

Abstract: A method and apparatus for reviewing defects of a semiconductor device is provided which involves detecting a defect on a SEM image taken at low magnification, and reviewing the defect on a SEM image taken at high magnification, and which can review a lot of defects in a short period of time thereby to improve the efficiency of defect review. In the present invention, the method for reviewing defects of a semiconductor device includes the steps of obtaining an image including a defect on the semiconductor device detected by a detection device by use of a scanning electron microscope at a first magnification, making a reference image from the image including the defect obtained at the first magnification, detecting the defect by comparing the image including the defect obtained at the first magnification to the reference image made from the image including the defect at the first magnification, and taking an image of the detected defect at a second magnification that is larger than the first magnification.

Abstract: A cross-section processing and observation method includes: forming a first cross section in a sample by etching processing using a focused ion beam; obtaining image information of the first cross section by irradiating the focused ion beam to the first cross section; forming a second cross section by performing etching processing on the first cross section; obtaining image information of the second cross section by irradiating the focused ion beam to an irradiation region including the second cross section; displaying image information of a part of a display region of the irradiation region from the image information of the second cross section; displaying the image information of the first cross section by superimposing it on the image information being displayed; and moving the display region within the irradiation region. Observation images in which display regions are aligned can be obtained while reducing damage to the sample.

Abstract: A microstructure inspection method which inspects an angle of a sidewall of a sample microstructure pattern, the method including: taking SEM photographs of the sample microstructure pattern under plural SEM conditions; measuring a width of a white band at an edge portion of the sample microstructure pattern in the SEM photographs; and calculating the angle of the sidewall of the sample microstructure pattern on the basis of an amount of change in the width of the white band due to the change between the plural SEM conditions.

Abstract: The present invention relates to a digital microscope device that is mainly an innovative electronic equipment for observing, inspecting, and recording minute structures. It is including a digital microscope body set with a LCD on its top, and set with an optical lens and a main electrical circuit board in the main body. By utilizing the main electrical circuit board to link with the optical lens and LCD to display the images inspected by the optical lens directly on a LCD, a portable digital microscope that can be carried to any locations is formed, is convenient for the observation of users, and can store the observed images directly to obtain the better effectiveness.

Abstract: A microscope digital camera includes a camera head unit and an operation display unit. A display portion of the operation display unit displays an observed image acquired by a microscope body. A CPU in an operated portion of the operation display unit detects a change of the observed image. By turning on an objective warning LED provided for the operated portion, notification information indicating a detection result of a change of the observed image by the CPU is output.

Abstract: There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of a predetermined gray value is less than a predetermined percentage, it is decided that a mesh image is not included in the scanning transmission electron microscope image. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image.

Abstract: Various embodiments for providing removable, pluggable and disposable opto-electronic modules for illumination and microscopic imaging are provided, for use with portable display devices. Generally, various medical or industrial miniature microscopes can include one or more solid state or other compact electro-optic illuminating elements, electronic vision systems and means of scanning located thereon. Additionally, such opto-electronic modules may include illuminating optics, imaging optics, and/or image manipulation and processing elements. The illuminating elements may have different wavelengths and can be time-synchronized with an image sensor to illuminate an object for imaging or detecting purpose or other conditioning purpose. All control and power functions of such disposable microscope units can be made in the control unit that the disposable microscopes are plugged into.

Abstract: A particle image-capturing method includes controlling a light-emitting diode unit to emit light so as to illuminate a fluid through an annular condenser, particles in which scattering the light, and controlling an image-capturing unit to capture images of the scattered light through a microscope. A micro particle image velocimetry that performs the method is also disclosed.

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: A microscope system includes a light amount ratio changing unit for changing a ratio of the amount of light directed to a first optical path for directing an optical image of the sample to an eyepiece lens and a second optical path for directing an optical image of the sample to an image capturing unit, an image capturing controlling unit for controlling an exposure time of the image capturing unit, and a controlling unit for obtaining a first exposure time from the image capturing controlling unit, for calculating a second exposure time on the basis of the first exposure time and a second ratio of the amount of light, and for controlling the image capturing controlling unit to set the second exposure time as the exposure time if the light amount ratio changing unit changes to the second ratio of the amount of light.

Abstract: A defect review apparatus includes a storage device which stores data about a defect of an inspection target object; a first imaging device which captures an image located in a position on a surface of the inspection target object, the position being specified by information regarding the position of the inspection target object which has been input; and a control device which controls the first imaging device. The storage device stores: first defect detection data including a defect number as which the defect of the inspection target object detected by a first defect detection process is labeled, and information regarding the position of the defect; and second defect data including a defect number as which the defect of the inspection target object detected by a second defect detection process is labeled, and information regarding its position.

Abstract: A video magnifier includes a body including a base, a table on which an object to be read is placed, the table being disposed on the base, a video camera disposed over the table, an illumination lamp illuminating the object placed on the table and a pointer irradiating a part of the object photographed by the video camera, and a monitor television displaying a video image delivered from the video camera. In the video magnifier, in synchronization with irradiation of the photographed part of the object by the pointer, an illuminance of the illumination lamp is rendered lower than an illuminance of the pointer.

Abstract: Exemplary embodiments provide solid-state microscope (SSM) devices and methods for processing and using the SSM devices. The solid-state microscope devices can include a light emitter array having a plurality of light emitters with each light emitter individually addressable. During operation, each light emitter can be biased in one of three operating states including an emit state, a detect state, and an off state. The light emitter can include an LED (light emitting diode) including, but not limited to, a nanowire based LED or a planar LED to provide various desired image resolutions for the SSM devices. In an exemplary embodiment, for near-field microscopy, the resolution of the SSM microscope can be essentially defined by the pitch p, i.e., center-to-center spacing between two adjacent light emitters, of the light emitter array.

Abstract: Providing an intermittent photo-taking device capable of correcting a focus drift in the optical axis direction by moving a stage to focus on a plurality focus position of a sample. The intermittent recording device 9 receives setting of a photo-taking timing for the intermittent recording, sets to a driving system 2 a plurality of focus points to take photographs of the sample in each photo-taking timing as relative positions with respect to a predetermined reference position, at each photo-taking timing, obtains a focus position as a reference position by the autofocus movement, varies the relative position between the microscope 1 and the stage 51 to focus on the set photo-taking position of the sample S on the basis of the obtained reference position and the relative positions, makes the photo-taking device 8 take photograph of the sample in each focus position, and captures the taken images.

Abstract: The present invention achieves the process of easily registering a template which is prepared for a size change in pattern matching for specifying a measurement point, and high-speed pattern matching by which adequate position accuracy can be obtained in measurement. The present invention includes means for automatically calculating the size and position of a positioning template different from a measurement point itself when the measurement point is designated, to display a template having the calculated size and position. The present invention further includes means for performing pattern matching by using all or some of a plurality of divided templates and extracting templates having a similar positional relationship to the original positional relationship.

Abstract: A microscope system has a VS image generation means for generating a virtual slide image of a specimen which is constructed by mutually connecting a plurality of microscope images with a first photomagnification photographed and acquired whenever an objective lens and the specimen are relatively moved in a direction perpendicular to the optical axis and which represents the entire image of the specimen, an object-of-interest set means setting an object of interest with respect to the entire image of the specimen represented by the VS image, and a three-dimensional VS image generation means for generating a three-dimensional VS image which is constructed by connecting the microscope images at different focal positions in accordance with the same focal position and which is constructed from the microscope images with a second photomagnification higher than the first photomagnification and represents the image of the object of interest.

Abstract: A digital camera for an optical apparatus according to an aspect of the present invention comprises a solid-state imaging device which picks up an image of a target object, a solid-state imaging device cooling part configured to cool the solid-state imaging device, and a sealing part which includes a printed board for wiring for electric signals, and seals the solid-state imaging device and the solid-state imaging device cooling part.

Abstract: Described are autofocusing algorithms and system implementations for machine inspection applications. The disclosed algorithms depend neither on the type of image (visual, infrared, spectrometric, scanning, etc.) nor on the type of image detector. Disclosed image filtering techniques, image focus measure functions and adaptive velocity control methods can be used in computer-based inspection systems for many different types of cameras and detectors as well as for a variety of magnification levels. The proposed autofocusing system can utilize the existing imaging hardware of the inspection system and does not require any additional components.

Abstract: A camera that is able to capture images of moving subjects as video images, that has a large depth of field and is thus able to capture images of thick objects, and that is able to capture images of living cells and tissues as well as tissues in water. One example includes an image pickup element and an objective lens disposed between the image pickup element and a subject. A photosensitive surface of the image pickup element has elements sensitive to light in the red, green, and blue spectral regions. Using chromatic aberration of the objective lens to form an image, the respective elements sensitive to light from the red, green and blue spectral region, collect light from respective surface segments XR, XG, and XB that lie at different heights in the subject. The images taken by the respective elements are imaged individually and produced on a monitor.

Abstract: This invention provides an inexpensive image acquisition apparatus capable of capturing not only an image of a still object, but also an image of a moving object with the use of an appropriate quantity of illumination light. The image acquisition apparatus includes a head section incorporating an image acquisition device therein and including a lens module and an illuminating part, a main body section including an illumination light source, an image acquisition control part and an image processing part, and a cable section connecting between the main body section and the head section. The lens module is one of a first lens module incorporating therein a lens for high-speed observation and a second lens module incorporating therein a lens for enlargement observation, which is selectively attached to the head section.

Abstract: A high tone image is saved in a versatile image file format to enhance usability. There are provided an imaging unit that images an original image having a predetermined dynamic range, which is a ratio between minimum luminance and maximum luminance; a synthesized image generating part that generates a synthesized image data that is higher in tone than a tone width of the original image by synthesizing a plurality of original images imaged under different imaging conditions at the same observation position; a display unit that displays the images imaged by the imaging unit; a tone conversion part that converts the synthesized image data generated by the synthesized image generating part to low tone image data having a tone width capable of being displayed on the display unit; and a tone data saving part that generates a high tone data-attached display file including a high tone image region for saving the synthesized image data serving as a basis as an image file for saving the low tone image data.

Abstract: A high tone image is saved in a versatile image file format to enhance usability. There are provided an imaging unit that images an original image having a predetermined dynamic range, which is a ratio between minimum luminance and maximum luminance; a synthesized image generating part that generates a synthesized image data that is higher in tone than a tone width of the original image by synthesizing a plurality of original images imaged under different imaging conditions at the same observation position; a display unit that displays the images imaged by the imaging unit; a tone conversion part that converts the synthesized image data generated by the synthesized image generating part to low tone image data having a tone width capable of being displayed on the display unit; and a tone data saving part that generates a high tone data-attached display file including a high tone image region for saving the synthesized image data serving as a basis as an image file for saving the low tone image data.

Abstract: A robotic CCD microscope and procedures to automate crystal recognition. The robotic CCD microscope and procedures enables more accurate crystal recognition, leading to fewer false negative and fewer false positives, and enable detection of smaller crystals compared to other methods available today.

Abstract: Systems and methods for rapidly analyzing cell containing samples, for example to identify morphology or to localize and quantitate biomarkers are disclosed.

Abstract: A method of and apparatus for viewing microscopic images include transmitting tiled microscopic images from a server to a client. The client assembles the tiled images into a seamless virtual slide or specimen image and provides tools for manipulating image magnification and viewpoint. The method and apparatus also provides a virtual multi-headed microscope function which allows scattered viewers to simultaneously view and interact with a coherent magnified microscopic image.

Abstract: An improved light beam combiner is disclosed that creates a more uniform light source across the UV, Visual, and NIR range. It is an optical mechanical device made up of a standard high low dielectric thin film which, when placed at a 45 degree angle between a Deuterium lamp and a Halogen or Tungsten lamp, reflects the UV portion of a Deuterium lamp and passes the visual portion while also allowing the visual energy of a Halogen or Tungsten lamp to pass resulting in a more uniform light source for use in spectroscopy.

Abstract: An apparatus and method acquires and stores multiple resolution images from a specimen on a support and provides to the user a low magnification, reconstructed macro image of the entire specimen, or a large portion thereof, to aid the person in selecting points of interest to be viewed or analyzed at higher magnifications and resolution. The reconstructed image is formed of a large number of tiled, stored images which are coordinated and assembled to form the macro image of the specimen which is displayed on a monitor. Preferably, the stored, reconstructed image is reduced further in size by a software system before it is displayed to the user. The display may be on a local monitor over a local area network or sent over the Internet to the user who is typically a pathologist. The user selects by a marker such as a cursor the defined area of interest or region and then views higher magnification images or has them analyzed.

Abstract: A data acquisition and display system comprises: a data acquisition device, such as a camera, microscope, telescope, thermal imager, medical scanning device, radar etc, operable to acquire data in scans over a field of interest using each of at least a first and a second data acquisition method. A field data storage device stores the field data together with corresponding field location data that describes a location within the field of interest. A field data display device such as a screen is operable to display simultaneously data from matched locations in the field of interest acquired respectively by the different data acquisition methods. The data, generally image data, may be superimposed or displayed side by side as desired. Preferably, one of the images being displayed is live whilst the other is recalled from the field data storage device.

Abstract: A color translating UV microscope for research and clinical applications involving imaging of living or dynamic samples in real time and providing several novel techniques for image creation, optical sectioning, dynamic motion tracking and contrast enhancement comprises a light source emitting UV light, and visible and IR light if desired. This light is directed to the condenser via a means of selecting monochromatic, bandpass, shortpass, longpass or notch limited light. The condenser can be a brightfield, darkfield, phase contrast or DIC. The slide is mounted in a stage capable of high speed movements in the X, Y and Z dimensions. The microscope uses broadband, narrowband or monochromat optimized objectives to direct the image of the sample to an image intensifier or UV sensitive video system.

Abstract: A digital camera has a mounting part to mount a shooting lens or other optical equipment, and includes a mode switch that changes between a mode that shoots using the shooting lens and a mode that shoots using the other equipment. The camera includes an information interface that communicates with the shooting lens or with the other equipment, and receives information from the shooting lens or from the other equipment corresponding to the set mode. A camera controller controls the camera to change a type of information received through the interface from the shooting lens or from the other equipment based upon the set mode. When changed to the mode that shoots using the other equipment, the interface receives information corresponding to a color temperature or a brightness of a light source of the other equipment, and the controller controls the camera shooting state based upon that received information.

Abstract: Vibration damping apparatus for vibrating environment such as a light emission microscope and an integrated circuit test head includes a rigid member with remotely controlled clamping apparatus attached to spaced portions of the member. The clamping apparatus engage the microscope and the test head for reducing vibrations, and the clamping apparatus can be readily deactivated for moving the microscope or the test head for alignment purposes. Advantageously, two or more rigid members including pneumatic cylinders can be positioned around the device under test while permitting the use of mechanical probes for engaging nodes of an integrated circuit for test purposes.

Abstract: A color translating UV or IR microscope for imaging living or dynamic samples in real time. The microscope includes a UV or IR light source and a first filter for cyclically separating light from the light source into spectral components which illuminate the sample. A device such as an image intensifier converts light received from the sample to visible polychromatic light, e.g., an intensified white light. A second filter set separates the visible polychromatic light into color planes. The first and second filter sets are synchronized with each other so as to enable the color planes to be recombined into a visible multicolor image, wherein each color plane represents illumination of the sample by non-visible light of different wavelengths.

Abstract: A programmable camera uses a fast image sensor such as a CCD and a relatively slower digitizing board. The system includes random pixel digitization capability whereby it is possible to digitize only some, but not all of the pixels output. The other pixels are passed through the system without A/D conversion thereby speeding up the acquisition of the entire frame.

Abstract: A microscope includes a column which stands upright on a base, an LED light source, a stage for placing a specimen irradiated with light from the LED light source, a lens barrel which is arranged to face the specimen on the stage, and has an observation optical system for acquiring the observation image of the specimen, an image sensing element which is arranged at the imaging position of the observation optical system of the lens barrel, and senses the observation image of the specimen, a monitor for displaying the observation image sensed by the image sensing element, and a recording unit for recording image data of the observation image sensed by the image sensing element. At least the LED light source, stage, observation optical system, and image sensing element are arranged along the optical axis of the observation optical system, and supported along the column.

Abstract: The microscopic image capture apparatus includes: a slide glass transfer unit 17 transfers a slide glass 10 from a first slide glass storage unit 16 to a space under a microscope objective lens 11; a wide field-of-view image capture unit 60 captures the entire image of wide field-of-view of the slide glass 10 in synchronization with the transfer of the slide glass 10 by the slide glass transfer unit 17; a microscopic image capture unit 14 captures a microscopic image of the sample S on the slide glass 10 whose entire image of wide field-of-view has been captured by the wide field-of-view image capture unit 60; and a slide glass storage unit 18 stores the slide glass 10 whose sample S has been captured by the microscopic image capture unit 14 from the observation position of the microscope 11 into the second slide glass tray unit 19.

Abstract: The invention relates to an optical system for determining the distribution, environment, or activity of fluorescently labeled reporter molecules in cells for the purpose of screening large numbers of compounds for specific biological activity. The invention involves providing cells containing fluorescent reporter molecules in an array of locations and scanning numerous cells in each location with a fluorescent microscope, converting the optical information into digital data, and utilizing the digital data to determine the distribution, environment or activity of the fluorescently labeled reporter molecules in the cells. The array of locations may be an industry standard 96 well or 384 well microtiter plate or a microplate which is a microplate having a cells in a micropaterned array of locations. The invention includes apparatus and computerized method for processing, displaying and storing the data.

Abstract: There is provided a controller capable of effectively using a camera in a TV telephone system and a technique related to the same.

Abstract: The system for adjusting the image acquisition system of a microscope (2) comprises a microscope (2) having an image data acquisition element (4), a memory element (10) being associated with the image data acquisition element (4). The image data acquisition element (4) is connected to a computer (14), and the transfer of image data from the memory element (10) and to the computer (14) is accomplished via a coder (20).

Abstract: The invention concerns a compact video microscope or video tube body (6) for all usual investigative methods. The video microscope can take the form of an enclosed microscope housing (1a) which, in addition the optical and mechanical components, comprises one or a plurality of electronic image sensors (24), a computer (25) and a flat screen (8). It can further consist of an ocular-free microscope stand (1b) and a modular video tube body (6) which can be attached thereto or mounted thereon. The enlarged image of the object is not observed via a conventional microscope tube body with oculars, but is made accessible on a flat screen (8) as a digital image which can be observed directly by the eye.

Abstract: A TV camera for microscopic or macroscopic imaging is characterized by a confocal lens with a laser light source (1), a scanner (2), a detector (3) and an electronic control unit (4), for using confocal characteristics in the most compact possible format.