Abstract: A bubble removal system includes an inspection cell configured to receive an ophthalmic device and a volume of working fluid. The system also includes a vacuum device configured to form a substantially fluid-tight seal with the inspection cell and to direct a negative pressure to the volume of working fluid and the ophthalmic device within the inspection cell.

Abstract: A plate inspection system and a plate inspection method with which irregularities in phase difference caused in a retardation layer can be efficiently detected. The inspection system is for inspecting a plate to be inspected having a retardation layer 3. The plate inspection system comprises a polarized-light source for irradiating a polarized light 50 and an observation-side polarizer 20 placed on the observation side. In the inspection system, a plate to be inspected is placed between the polarized-light source 50 and the observation-side polarizer 20 so that the plate to be inspected is irradiated with polarized light from the polarized-light source 50. The position of at least the observation-side polarizer 20 or the plate to be inspected is changeable relative to the polarized-light source 50.

Abstract: The present invention relates to an imaging optical system for imaging the peripherally extending lateral surfaces (9) of an object (10) on to an imaging plane, comprising a reflecting element (6) and a first angle-reducing element (3, 17) which is arranged downstream of the reflecting element in the beam direction and which reduces the angle between a light beam emanating from the object (10) and the optical axis (12). In order to provide an imaging optical system for imaging the peripherally extending lateral surfaces of objects, which is both simple and inexpensive to produce and also has a large acceptance angle for the incident radiation and which is tolerant in relation to inaccurate positioning of the object, it is proposed in accordance with the invention that arranged upstream of the reflecting element (6) in the beam direction is a second angle-reducing element (13) which reduces the angle between a light beam (1, 1) emanating from the object (10) and the optical axis (12).

Abstract: A reflection-testing device for testing for unwanted reflections in a lens module (12) includes a plurality of light sources (18) and an image capturer (16). The plurality of light sources is provided around the top end of the lens module, and the image capturer is provided near the other end of the lens module for receiving optical signals through the lens module. A lens reflection testing method is also disclosed.

Abstract: A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of the objective. The position of a type of structure is determined in the image field of the objective by a measuring window. The correction of the lens distortion required for the type of structure to be measured is retrieved from the database as a function of the type of structure to be measured.

Abstract: A test pattern is moved on a screen 5 subject to measurement with the field of view of an image sensor pursuing the motion of the test pattern so as to observe BEW. Subsequently, the field of view 33 of the image sensor is moved at the same velocity vc as in the foregoing observation to capture an image of a static pattern PE, and a blur width W along the scrolling direction that appears in a distribution profile of the captured image is observed. Based upon the blur width W and the exposure time of the image sensor for capturing the image of the static pattern PE, the moving velocity of the test pattern at the time of observation of the BEW is estimated, and by using the moving velocity, the BEW is normalized. Evaluation of the moving image quality of the screen is carried out by using the normalized N BEW. The moving velocity of the original test pattern can thus be estimated easily and accurately, and accordingly, the moving image quality of the screen can be evaluated accurately.

Abstract: A method of inspecting a liquid crystal display panel includes providing a liquid crystal display panel to be inspected, turning on a backlight unit that is disposed under the liquid crystal display panel to emit light toward the liquid crystal panel, driving the liquid crystal display panel by applying test signals to the liquid crystal display panel on a predetermined period, detecting defects by taking an image of the liquid crystal display panel on a period shorter than the driving period of the liquid crystal display panel, and detecting defects created in the liquid crystal display panel, which blink in accordance with a period of the test signals of the liquid crystal display panel.

Abstract: A method of producing an edge-light type light guide plate having a light exiting surface and a light reflecting surface having light reflective dots formed thereon in a scattered fashion. The method includes (a) producing a first prototype of the light guide plate having primary dots formed on the light reflecting surface, (b) examining optical characteristics of the first prototype relating to light exiting from the light exiting surface thereof, and (c) producing a second prototype of the lightguide plate when the examined first prototype exhibits unsatisfactory optical characteristics. The second prototype has primary dots that are the same as the primary dots of the first prototype in size and distribution, and secondary dots arranged between the primary dots in at least part of the light reflecting surface. The steps (b) and (c) are repeated until a prototype is produced which exhibits satisfactory optical characteristics.

Abstract: An apparatus for scattered light inspection of optical elements, having a light-generating unit (2) for generating light that is irradiated onto the optical element (9) respectively to be inspected, and a detector (4) for detecting scattered light (14) that is emitted by the optical element during irradiation. At least a portion of the components (2 to 8, 12) of the inspection apparatus are arranged on or in a housing/holding unit (1) that is dimensioned such that it can be held by a reticle holder of a lithography exposure machine, or all the components of the inspection apparatus are arranged on or in a common housing/holding unit that is portable and/or mobile. The apparatus may be used, e.g., for scattered light inspection of the surface of a lens, closest to the field, of a projection objective of a microlithography projection exposure machine.

Abstract: The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of accuracy. The apparatus includes: a light source 34, placed almost directly above the surface of a plate 30, for emitting an emission-line spectrum corresponding to at least one color of coloring particles in a color filter 32; a photo-receiver 36, placed obliquely upward with respect to the surface of the plate 30 and having a spectral sensitivity corresponding to the emission-line spectrum of the light source, for receiving reflected light from the color filter 32 on the plate 30 during inspection; and a detection means 42 for creating a brightness distribution for a color using a color signal output from the photo-receiver 36 as corresponding to its spectral sensitivity to detect the flatness (unevenness) of the surface of an overcoat layer 16.

Abstract: A method of evaluating a non-linear optical crystal used for non-linear wavelength conversion of laser beam which enables the non-linear optical crystal to be evaluated before the crystal is actually used as a wavelength conversion element in order for the crystal to be constantly used for an extended time with a high conversion efficiency retained and without lowering in output when non-linear optical crystals for various non-linear wavelength conversions such as a CLBO crystal are used to convert laser beams, wherein the non-linear optical crystal is moved to changed a laser beam incident position to detect the output of a laser beam emitted from the non-linear optical crystal for each changing position.

Abstract: A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.

Abstract: There is provided an optical window contamination detecting device capable of detecting even microscopic contamination attached onto an optical window with a limited number of contamination detecting sensors. An optical window contamination detecting device for a scanning type distance measuring apparatus includes a casing 101 formed with an optical window 102, the casing accommodating therein a light transmitting unit 3, a scanning mechanism 4 for deflection scanning measurement light output from the light transmitting unit 3 into a measuring space through the optical window 102, and a light receiving unit 5 for detecting reflected light from an object through the optical window 102.

Abstract: The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object 3 (object to be inspected), a stripe pattern 1 having a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, using the decided stripe pattern 1, the front surface shape of the transparent plate-shaped object 3 is evaluated by an image analysis using only a reflection image of the stripe pattern 1 produced by the transparent plate-shaped object 3.

Abstract: An inspecting system (100) includes a stage (10), a white light source (20), a CCD camera (40), a laser diode assembly (60), at least one beam splitter (36, 34), a photo diode (50), and an oscilloscope (52). The white light source emits a white light (22) to illuminate a color filter (200). The CCD camera photographs the color filter and is linked with an image processing and displaying device (42). The laser diode assembly emits a laser light (62). The at least one beam splitter is arranged in a path of the laser light and transmits the laser light to the color filter. The photo diode receives the laser light reflected by the color filter and generates an electronic signal. The oscilloscope is connected with the photo diode and displays the electronic signal. The inspecting system facilitates the convenient and accurate inspection/evaluation of color filters.

Abstract: Disclosed is an electro-optic modulator assembly capable of determining whether each process is being carried out normally during a fabricating process of a flat panel display by performing a contactless testing across the flat panel display, an apparatus and a method for contactless test of flat panel display using the electro-optic modulator assembly, and a method for manufacturing a flat panel display using the method for contactless test of the flat panel display.

Abstract: A method for determining a location of IR-cut filter film on a substrate, the filter film and the substrate cooperatively functioning as an IR-cut filter, includes the steps of: providing an infrared laser device, an IR-cut filter and an infrared laser sensor; emitting a laser from the IR laser device to a surface of the IR-cut filter in a manner such that the laser beam is obliquely incident on an edge portion of the IR-cut filter; and determining the location of the filter film on the substrate of the IR-cut filter in such a way that, if the intensity of the laser beam received by the infrared sensor is equal to or close to zero, the location of the filter film is on a surface of the substrate facing towards the infrared laser device; if the intensity of the laser beam received by the infrared sensor is the same as or close to an intensity of the laser beam emitted from the infrared laser device, the location of the filter film is on a surface of the substrate facing away from the infrared sensor.

Abstract: An apparatus and method of detecting a defect in an imager die package. The method comprises the steps of exposing the imager die package to light at a first angle, exposing the imager die package to light at a second angle, outputting electrical signals based on the exposures; and determining the level at which a defect is present based on the output electrical signals. An exemplary embodiment of the apparatus comprises a first light source positioned over an imager die package at a first angle, a second light source over the imager die package at a second angle, said first and second angles being different from each other; and a processor for determining a level of defection in the die package.

Abstract: The invention describes a system for the measurement of volume holograms on a wafer scale that permits high-resolution and high throughput measurement of grating parameters. The invention uses a collimated beam of a fixed wavelength light source that is transmitted through the wafer to be tested. The transmitted beam is imaged with a lens onto a sensor. The sensor is used to measure the beam power under a variety of conditions, including without a wafer in place, so that the various measurements can be used to determine grating characteristics. The measurement data produced includes values for grating spacing, tilt angle, and diffraction efficiency with a high spatial resolution.

Abstract: The present invention relates to an optical system that allows accurate projection and inspection of a curved surface onto a flat plane. The present invention may be used to prevent or mitigate inspection errors caused by particulate matter by narrowing the depth of field along a curved surface.

Abstract: To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiation is received from a ghost particle, not all of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a contaminating particle results in all signals having a level above a threshold level. Thus, it may be determined with a high accuracy whether a particle or a ghost particle is redirecting radiation towards the detector system.

Abstract: In order to be able to check reliably glass protecting tubes for spiral-wound filaments of an infrared radiator heat source with respect to damages due to breaking, a device and method are provided for checking the integrity of a glass protecting tube, in particular made of quartz glass, is proposed with the invention for the spiral-wound filament of an infrared radiator heat source, whereby an analysis light beam is introduced into and passed through the material of the quartz protecting tube and whereby the analysis light beam coming out of the quartz protecting tube is detected and its intensity and/or wave length and/or phase is analyzed and whereby it is ascertained by means of the analysis if the quartz protecting tube is damaged or intact.

Abstract: Disclosed is an aperture variable inspection optical system including a variable aperture unit 13 having a polygonal light transparent section and light collecting systems 12a, 12b for forming an irradiation spot U of light passing through the variable aperture unit 13 at the position of a sample S. The variable aperture unit 13 is capable of changing the shape/size of the polygon. The size of the irradiation spot U can be changed without rearranging the aperture unit.

Abstract: A method of inspecting a light-management film comprises reflecting light from an overhead light source off a first side of the light-management film and examining the light-management film for defects; directing transmission light from a backlight source through a second side of the light-management film to the first side and examining the light-management film for defects; reflecting light from the overhead light source off the second side of the light-management film and examining the light-management film for defects; directing transmission light from the backlight source through the first side of the light-management film to the second side and examining the light-management film for defects; and measuring a location of each of the examined defects in the light-management film.

Abstract: A non-destructive process for evaluating subsurface damage in an optical element focuses a microscope at points within the optical element and measures the intensity of reflected light. In one embodiment, a microscope focus a laser beam at a measurement point with the optical element and also collects reflected or scattered light from damage in the optical element. Analysis of data indicating the reflected intensities for a three-dimensional array of points within the optical element can determine the location and severity of the subsurface damage.

Abstract: Disclosed are a method of reducing biological contamination in an immersion lithography system and an immersion lithography system configured to reduce biological contamination. A reflecting element and/or an irradiating element is used to direct radiation to kill biological contaminates present with respect to at least one of i) a volume adjacent a final element of the projection system or ii) an immersion medium supply device disposed adjacent the final element.

Abstract: Disclosed herein is a method comprising illuminating a microstructured prism, or linear array of prisms of a prism sheet with an incident beam. The method further comprises making measurements of the refracted image of the beam on a measuring device to measure the distance disposed on an opposing side of the prism sheet from the side that the light beam is incident upon. Measurement of two angles of the refracted images of the beam on the ruled scale, measured twice, illuminating the sample at different angles are used in an equation to simultaneously provide the apex angle, the skew angle and the refractive index of the prism sheet.

Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.

Abstract: The invention provides a device to inspect an illumination optical device and a method to inspect an illumination optical device that make it possible to efficiently inspect illumination optical devices and to control manufacturing cost. A lens array inspecting device is provided with a light source device to emit a parallel luminous flux, lens array holders to retain lens arrays, which are test objects that split the parallel luminous flux into a plurality of partial luminous fluxes, and a ground glass on which the optical images of the luminous fluxes emitted through the lens arrays are projected. On the ground glass, a parting frame appropriate to a design illumination region is formed. Therefore, whether the lens arrays are defective or non-defective can be determined by checking whether the optical images projected onto the ground glass include the area of the parting frame.

Abstract: A method includes providing a polymerized optical film structure having a microstructured surface, forming a scratch having a length on the microstructured surface to form a scratched optical film, illuminating the scratched optical film to form an illuminated scratch, measuring a plurality of scratch contrast ratio values along the length of the illuminated scratch with a detector, and determining a maximum scratch contrast ratio from the plurality of scratch contrast ratio values along the length of the scratch.

Abstract: A reflection-testing device for testing for unwanted reflections in a lens module (12) includes a plurality of light sources (18) and an image capturer (16). The plurality of light sources is provided around the top end of the lens module, and the image capturer is provided near the other end of the lens module for receiving optical signals through the lens module. A lens reflection testing method is also disclosed.

Abstract: Described are a method and apparatus for analysing an optical device, including: a) arranging an illuminating device which generates a test beam, the optical device that the test beam passes and a position-resolving sensor device which detects the test beam, relative to each other in a reference position that establishes a reference beam path; b) transmitting the test beam in a plurality of relative positions off set with respect to the reference position, relative to the reference position, the test beam being incident upon a measuring point assigned to the respective relative position on the optical device; c) detecting, for a respective relative position, a position of incidence of the test beam, after it passes the optical device, on one or a plurality of planes of detection offset relative to each other; d) determining the beam path of the test beam from the positions of incidence detected in step c) for each relative position and calculating optical characteristics of the optical device.

Abstract: A detection method for detecting quality of an optical element includes the following steps. Firstly, a point light source is provided. Then, the point light source is allowed to penetrate through the optical element, thereby forming a first optical image on an optical image processing device. Then, the position of the optical element is adjusted when there is a shade block included in the first optical image, and the point light source is allowed to penetrate through the optical element after the adjusting step, thereby forming a second optical image on the optical image processing device. Afterward, the first optical image is compared with the second optical image to discriminate whether the shade block is synchronously moved with position adjustment of the optical element so as to realize the quality of the optical element.

Abstract: In a polarizing plate grading method a first measurement range A1 is chosen on a polarizing plate. After conducting an initial measurement by putting the polarizing plate under X1° C. for Y1 hours, the first measurement range is measured to obtain the maximum chromatic value Z1max (NIT,cd/m), and the minimum chromatic value Z1min. The minimum value is subtracted from the maximum value to obtain the net chromatic difference value W1. The temperature change measurement is conducted by putting the polarizing plate under X2° C. for Y2 hours and, then, the recovery measurement is conducted on the polarizing plate by putting the polarizing plate under X3° C. for Y3 hours. A first measurement range is measured to obtain the maximum chromatic value Z3max and the minimum chromatic value Z3min. The minimum chromatic value is subtracted from the maximum chromatic value to obtain the net chromatic difference value W3.

Abstract: A fluid dispenser dispenses a fluid alternately from one of a pair of ports (29,31) that are provided on opposite ends of a syringe (26) by moving a piston (42) back and forth inside the syringe. A pair of stirrers (47,48) are provided in the syringe on opposite axial sides of the piston. The stirrers may each individually rotate on an axis that extends in parallel with the moving direction of the piston. A pair of stirrer driving rings (49,50) are mounted on an outer periphery of the syringe in correspondence with the stirrers. Magnets (55,56,59,60) are embedded in the stirrers and the stirrer driving rings such that the stirrer is rotated by magnetic fields that are generated from the stirrer driving ring, as the stirrer driving ring is rotated by a motor (51,52).

Abstract: Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm.

Abstract: An apparatus for feature detection of a test object includes at least one light source module and at least one image capturing unit. The light source module provides light to illuminate a test region of the test object, and includes a substrate, a set of light-emitting components, and a light-focusing unit. The light-emitting components are mounted on the substrate for emitting light in parallel directions that are generally transverse to the substrate. The light-focusing unit is to be disposed between the light-emitting components and the test object, receives the light emitted by the light-emitting components, and focuses the light on the test region of the test object. The image capturing unit captures an image of the test object at the test region.

Abstract: An apparatus for monitoring the functionality of an optical element includes a detector and a light source whose radiation is reflected to the detector by a surface of the optical element facing the detector and the light source.

Abstract: A method is provided for detecting spot defects on an object when an allowable variation (called the “background”) in the appearance of the object can be modeled. Methods are also provided for measuring and classifying detected spot defects. An alignment model is used to align the image of the object, a background model is then used to estimate the (possibly different) background in each region, and each background is substantially removed from the image so as to form a foreground image on which blob analysis can be applied to detect spot defects, the blob analysis using a threshold image that accommodates different noise statistics for each region. The method facilitates robust spot defect inspection of fiber optic end faces, or of any object with different object regions. The method also allows use of blob analysis over a larger range of conditions, including conditions that make simple blob analysis infeasible.

Abstract: Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm.

Abstract: An apparatus and method of detecting a defect in an imager die package. The method comprises the steps of exposing the imager die package to light at a first angle, exposing the imager die package to light at a second angle, outputting electrical signals based on the exposures; and determining the level at which a defect is present based on the output electrical signals. An exemplary embodiment of the apparatus comprises a first light source positioned over an imager die package at a first angle, a second light source over the imager die package at a second angle, said first and second angles being different from each other; and a processor for determining a level of defection in the die package.

Abstract: A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being rotatable around an optical axis of the target optical system, and an illumination optical system for introducing the measuring light into the barrel, the illumination optical system being movable along a direction perpendicular to the optical axis of the target optical system, wherein the measuring apparatus controls an illumination area of the measuring light in the target optical system using a polar coordinate determined by a rotational angle of the barrel and a moving amount of the illumination optical system.

Abstract: In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.

Abstract: The invention automates determination of the quantity of a index matching liquid.

Abstract: Pattern transfer can be performed with improved exposure accuracy, by reducing the contamination caused by the attachment of a photosensitive agent or the like on an optical member of a projection optical member or the like. The pattern transfer onto a substrate W is performed after cleaning the objective member OB disposed at a given position by a cleaning device 8 at the time when pattern transfer is not performed, or while making flow a gas in a space between the substrate W and the optical member OB by a contamination protection device 98. Alternatively, the optical member OB disposed at a given position is inspected for contamination by a contamination inspection device 84 at the time when pattern transfer is not performed, and the pattern transfer or the cleaning or replacement of the optical member is performed based on the result.

Abstract: A fluid dispenser dispenses a fluid alternately from one of a pair of ports (29,31) that are provided on opposite ends of a syringe (26) by moving a piston (42) back and forth inside the syringe. A pair of stirrers (47,48) are provided in the syringe on opposite axial sides of the piston. The stirrers may each individually rotate on an axis that extends in parallel with the moving direction of the piston. A pair of stirrer driving rings (49,50) are mounted on an outer periphery of the syringe in correspondence with the stirrers. Magnets (55,56,59,60) are embedded in the stirrers and the stirrer driving rings such that the stirrer is rotated by magnetic fields that are generated from the stirrer driving ring, as the stirrer driving ring is rotated by a motor (51,52).

Abstract: An objective lens system having reconfigurable optical components that enable the inspection of inspection surfaces in the absence of a pellicle or through a thin membrane pellicle, and using the same system, also enabling the inspection of inspection surfaces through a thick pellicle. An objective lens system includes a first group and a second group of optical elements. The first group of optical elements enables high numerical aperture and beam contraction. The second group of optical elements is capable of two mode operation enabling, in one mode, inspection through a thin membrane pellicle or in the absence of a pellicle and in another mode, enabling inspection through a thick pellicle. The system can also be enhanced through the use of an interposable aberration corrector plate that is used to correct optical aberrations caused by the presence, absence, or thickness of pellicles.

Abstract: In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.

Abstract: A monitoring system for detection of defects in an optical fiber coating during production of the fiber has first and second beam generating means which produce planar coherent beams which cross each other at the fiber passing through the system creating one or more diffraction patterns. A first plurality of photodetectors are mounted in a mount, the front face of which is impinged by the planar diffraction pattern, and a second plurality of photodetectors is similarly mounted in position below the impinging pattern. A defect in the fiber coating, regardless of shape or orientation, will cause the pattern or patterns to be tilted or shifted upward, downward, or planarly tilted to impinge one or more of the photodiodes which, as a result, generates a signal which is applied to a comparator and control circuit.

Abstract: An apparatus and method for quantitatively measuring ripple and distortion levels in a transparent sheet (or film) material is provided. The apparatus includes a light source for projecting light beams onto a screen. A frame assembly is positioned intermediate to the light source and is adapted to hold the transparent sheet material at a predetermined angle and distance from the screen. The light beams pass though the transparent sheet material and projects an image onto the screen. The process includes digitally capturing the image and generating parameter signals from the digital image. The parameter signals are used in a model to quantitatively assign a value to the level of ripple and distortion present in the transparent sheet material.