Abstract: The invention relates to a method for detecting and processing the amplitude and phase of signal waves. A Modulated signal source generates the signal waves which are modified by transmission medium or by reflection and scattering by at least one object. The modified signal waves are received and demodulated using a modulation signal. The amplitude of the modulated signal waves and their phase relationship to the modulation signal are measured and evaluated. The demodulated signal wave is converted into an electrical charge or charge displacement in the receiving medium and is distributed in accordance with a modulation signal to at least two readout outputs and fed to an evaluation unit. The evaluation unit produces the sum and difference of the output signals thus applying the value of the intensity and the phase position of the signal wave that has been scattered, reflected or delayed by the object.

Abstract: There is provided an apparatus for monitoring a size of a particle, including (a) a laser beam source which radiates a laser beam to an area in which particles exist, (b) a photodetector which receives the laser beam having been scattered by the particles, and outputs image data including brightness of pixels, (c) an area detector which detects pixels corresponding to an area on which the scattered laser beam is incident, based on the image data, (d) a maximum brightness detector which detects a maximum brightness among brightness of the pixels detected by the area detector, and (e) a measurement unit which compares the maximum brightness to a predetermined threshold brightness to thereby measure a relative size of the particles.

Abstract: Apparatus and method for quantifying the biological components of a biological system having at least two different refractive indices through detection of wave front distortions. The biological component fractions are determined based on information gathered on their respective indices when exposed to particular wavelengths of light.

Abstract: The present invention is directed to a system for converting between single flow and split flow evaporative light scattering detection devices for detecting samples in a mobile phase. Included in the system is a evaporative light scattering detection device, a low temperature adaptor, and a connection tube for providing a fluid connection between the evaporative light scattering detection device and the low temperature adaptor.

Abstract: Differential signals and sum signals are extracted from a detection signal of passing light detected when a light beam emitted to an analysis optical disc passes through a particle on the disc. Presence of the particle is decided based on the differential signals, effectiveness of counting particles is decided based on the sum signals, and the decision results are stored. The stored decision results are scanned by using a scanning window corresponding to a minimum size of measured objects, particles having the minimum size are detected, and the number of detected particles is stored. Subsequently, the stored decision results are scanned using a scanning window corresponding to a size larger by one scan than the maximum size of the measured objects, particles having a size larger by one scan than the maximum size are detected, and the number of detected particles is stored.

Abstract: To measure or exert optically-induced forces on at least one particle in the focus of an optical cage, the following steps are taken: a) the focus is positioned in a microelectrode arrangement with a three-dimensional electrical field that has a field gradient which forms an electrical capture area, and the focus is at a distance from the capture are and b) the amplitude of the electrical field, the light power of the light beam forming the optical cage, and/or the distance of the capture area from the focus are varied to detect which varied field property moves the particle from the focus to the capture area or vice versa, or at least to temporarily move the particle into the capture area.

Abstract: Optical emission spectra from a test wafer during a plasma process are measured using a spectrometer. The plasma charging voltage retained by (detected by) the test wafer is measured after the process step is completed. The emission spectra are correlated with the plasma charging voltage to identify the species contributing to the plasma charging voltage. The optical emission spectra are monitored in real time to optimize the plasma process to prevent plasma charging damage. The optical emission spectra are also monitored to control the plasma process drift.

Abstract: An illumination system for increasing a light signal from an object passing through a reflection cavity. The reflection cavity is defined by spaced-apart, opposed first and second surfaces disposed on opposite sides of a central volume. Preferably the first reflecting surface forms an acute angle with the second reflecting surface. A beam of light is directed into the reflection cavity so that light is reflected back and forth between the first and second surfaces a plurality of times, illuminating a different portion of the central volume with each pass until, having ranged over the central volume, the light exits the reflection cavity. The “recycling” of the light beam in this manner substantially improves the signal to noise ratio of a detection system used in conjunction with the reflection cavity by increasing an average illumination intensity in the central volume.

Abstract: In a method of monitoring the formation of a coating on a single particle (P), an apparatus is used which comprises means (2,5,6,9) for arranging said particle (P) at a given spatial location, and a fluid supply unit (3) adapted to apply a coating fluid to the particle (P) such that the coating is formed. Further, the apparatus has a measurement unit (4) which is adapted to perform a spectrometric measurement on the coating during formation thereof, and to derive a measurement value of at least one principle parameter related to the coating. This, such principle parameters, for example the thickness, thickness growth rate and physical and/or chemical properties related to the quality of the coating, as well as heat, mass and momentum transfer, can be continuously and non-invasively monitored during the coating process on the single particle (P).

Abstract: A model for determining the type of soil, the water content of a soil, and the soil properties, and a soil measurement data storage portion (60) to store therein measurement data necessary to carry out the model and correlated with specific measurement conditions are provided. The water content is measured by a water content measuring portion (57) on the basis of the measurement data fed from a soil sensor (S). The type of soil is determined by a feature extracting portion (56) and a type-of-soil determining portion (58), and the determined type of soil is sent to a determining portion (59). The determining portion (59) determines corresponding conditions and a model according to the type of soil and water content of the measured place received and sets them in a predetermined processing portion.

Abstract: The invention relates to a method for examining different structures in preferably biological preparations in a differential manner, especially by means of confocal laser scanning microscopy. The method is characterized in that particles having a specific diameter and specific characteristics are assigned to the structures and in that said structures are detected by detecting the particles which have specifically bonded in or to the preparations. The detection process is carried out in an advantageous manner by marking the structures with metal particles with diameters of 10 nm to 1,500 nm and detecting Mie scattering or a plasmon signal.

Abstract: A test pattern formed in a scribe line area of a wafer is irradiated with a light beam to measure the width thereof; the test pattern is irradiated with an electron beam so as to measure the width thereof; an amount of change in the width of the test pattern is calculated; a dummy pattern having the same width as that of a semiconductor device of the wafer is irradiated with an electron beam to measure the width thereof; and the width of a pattern is estimated by the use of the calculated amount of width change so as to determine the shape of the pattern. Thus, a shape measuring system and method capable of determining the shape of a micropattern in a semiconductor device without changing the dimensions of the micropattern can be provided.

Abstract: An apparatus embodying the invention includes a probe head with an interrogation surface that is intended to be positioned adjacent or pushed into contact with a target material or tissue. The probe head is constructed to have a plurality of interrogation devices arranged across the face of the interrogation surface. The probe head is also constructed so that the interrogation device can conform to a non-uniform or non-planar surface of the target tissue. In some embodiments, the interrogation surface may have a particular shape that conforms to the shape of a target material. In other embodiments, one or more portions of the interrogation surface could be movable with respect to the remaining portions so that the interrogation surface could be movable with respect to remaining portions so that the interrogation surface can thereby conform to a non-uniform surface. In still other embodiments, a plurality of separately moveable interrogation devices can be arranged across the interrogation surface.

Abstract: A method and a device for the measurement of turbidity in liquids is described, the measurement taking place by reflectometry. Reflectometers into which a cell and a diffuse reflector can be introduced are used. A method for the measurement of turbidity is described, for example for in-process controls or quality controls, which requires significantly less complex equipment than the conventional methods.

Abstract: A fluid particle counter comprising an inlet jet tip producing an air flow, a strip laser diode producing a laser beam, and a beam shaping system that includes an aspheric collimating lens, an achromatic spherical lens, a cylinder lens, and a series of cascading apertures. A retarder rotates the polarization so that the TE mode is along the direction of fluid flow. The optical system is designed so that along the flow axis the laser beam is single mode, while the multimodes due to the strip laser are constrained to the dimension perpendicular to the flow. The beam is pinched to a 35 micron waist and has a Gaussian profile along the flow direction which permits locating the beam within 3.5 mm of the flow tip while preventing stray light scattering from the tip. The beam profile along the axis perpendicular to the flow is closer to a square wave than a Gaussian.

Abstract: In an image-recording system (10) for a dispensing head (50) with numerous dispensers (51, 52, 53, . . . ), in which a predetermined light path from a lighting device (20) to an image-recording device (40) intersects a drop release area of a drop-releasing dispenser (52), a deviating device (30) is provided with which a measuring light segment (33) is formed along a predetermined reference line through the drop release area, wherein the lighting and image-recording devices (20, 40) are spaced apart from the reference line.

Abstract: A method for controlling both the scattering and absorption of electromagnetic waves. The method is based on prescribing the sizes of the particles that are suspended in a specified medium and a ratio of the refractive indices of the particles and the medium. This method can be used in applications that require maximizing or minimizing scattering of electromagnetic waves. The present method can also be used in applications that require maximizing or minimizing absorption of electromagnetic waves. Further, the invention provides control of backscattering (radar cross section) and, controlling any combination of scattering, absorption and backscattering of electromagnetic waves. Applications for the present method include stealth technology, friend or foe identification, and defensive screening.

Abstract: This invention provides methodology for the measurement of both low and high levels of scattered radiation produced by decorative and barrier coatings and plastics. Measurements of low levels are especially important for coatings used in automotive applications. The method is based on the illumination of the sample with radiation and collection of only the portion of the radiation scattered from the coating before, during and after the testing step and relating the optical signal from the tested portion of the sample material to the untested portion of the material and/or a standard. Through the practice of the invention, a large number of coating samples, as in an array, may be analyzed for their optical quality, principally haze, either after coating and curing, and/or after subjection of such coatings samples to elongation stresses, and/or abrasion testing, solvent exposure, hydrolytic stability testing, and temperature exposure.

Abstract: The present invention provides a light scattering particle size distribution measuring apparatus, which does not require a burdensome optical axis adjustment of operator for every measurement and which is capable of maintaining a state most suitable for measuring. In the present invention, the light scattering particle size distribution measuring apparatus irradiates a sample with light from a light source, detects the resulting scattered light from the sample by a photodetector. Thereafter, the present invention calculates the size distribution of particles in the sample on the basis of the scattered light intensity pattern obtained. In addition, an automatic adjustment mechanism aligns and maintains the central position of the foregoing photodetector with the central position of the foregoing light source.

Abstract: The analytical method having both flow cytometery and cytodiagnosis functions comprises the steps of: preparing a sample containing particulate substances such as cells and viruses; injecting the sample into a plate-like sample container; centrifuging the sample container; and using the sample container in which a distribution of the particulate substances has been formed as a preparation for analysis. The preparation is scanned with a laser beam to obtain analytical data. An analytical device for this method is also provided.

Abstract: Arrangement for measuring physico-chemical properties of liquid, such as solutions, dispersions and emulsions. The arrangement comprises a light source for producing and emitting light in the liquid, a detector for detecting said light after being scattered by said liquid, processing means arranged for receiving an output signal from said detector. The processing means is further arranged to calculate a maximum value of the mean square displacement <&Dgr;rm2> from the autocorrelation function g(2) as a function of time and the value of the property from said calculated maximum value of the mean square displacement <&Dgr;rm2>.

Abstract: An imaging system, methodology, and various applications are provided to facilitate optical imaging performance. The system contains a sensor having one or more receptors and an image transfer medium to scale the sensor and receptors in accordance with resolvable characteristics of the medium, and as defined with certain ratios. A computer, memory, and/or display associated with the sensor provides storage and/or display of information relating to output from the receptors to produce and/or process an image, wherein a plurality of illumination sources can also be utilized in conjunction with the image transfer medium. The image transfer medium can be configured as a k-space filter that correlates receptor size to a diffraction-limited spot associated with the image transfer medium, wherein the receptor size can be unit-mapped within a certain ratio to the size of the diffraction-limited spot.

Abstract: A method of measuring properties of particles immersed in a body (B), comprising the performing of a series of instantaneous acquisitions by illumination of the body with a temporally coherent light beam (152) of predetermined width D and predetermined wavelength &lgr; such as to generate scattered radiation (155) by scattering interaction of the light beam with the particles, and the detection of a plurality of values of the intensity of the total radiation (155, 156, 155′, 156′) coming from the body at a plurality of points simultaneously, the points being at a distance z from the body such that the points can receive the scattered radiation (155, 155′) which comes from substantially all of the directions in which the particles are capable of scattering, and that each of the points receives the scattered radiation (155, 155′) of a large number of particles, and processing (100) of the series of acquisitions in a manner such as to determine the properties of the particles.

Abstract: A method and an apparatus for automatical analysis of particle size distribution, shape and colour, comprising collection of a particle sample, where the aprticles are distributed into a substantially monolayer particle curtain to be exposed to a light source for providing imaging and subsequent analysis of the particles. The apparatus has a sampling device that collects samples from the product stream integrated in the system.

Abstract: Various optical apparatus provide a source of parallel light (7, 75). The parallel light (7, 75) is generally achieved by directing an incident beam at the apex of a prism (1, 22, 24, 26, 28). The prism may have varying configurations. One configuration has a forward conical face (24). Another configuration has a pyramidal forward end (22). Other configurations are also disclosed. The application also discloses the use of reflectors (20, 78, 216, 316, 400) having internal reflective surfaces shaped as three-dimensional figures of revolution, for example paraboloid or ellipsoid. The reflectors (20, 78, 216, 316) focus light incident onto the reflectors at one or more foci (F, 220, 320, 420). The reflectors may be used in combination with the optical apparatus including the prisms (1, 22, 24, 26, 28). The reflectors (20, 78, 216, 316) may be used in flow cytometers for focussing light at a sample stream (237, 337) passing through the focus (F, 220, 320, 420) of the reflector (20, 78, 216, 316).

Abstract: Methods, systems and devices are described for rapid characterization and screening of liquid samples to determine properties (e.g., particle size, particle size distribution, molar mass and/or molar mass distribution) thereof with static light scattering and/or dynamic light scattering. The liquid samples can be solutions, emulsions, suspensions or dispersions. One method, includes providing a vessel containing a liquid sample having an exposed surface that defines a gas-liquid sample interface, and analyzing the sample by light scattering methods that include transmitting light through the gas-liquid sample interface into the sample, and detecting light scattered from the sample or from a component thereof. Additional methods are directed to characterizing a plurality of liquid samples or components thereof. The methods, systems, and devices have applications in high-throughput screening, and particularly, in combinatorial materials research and in industrial process control.

Abstract: Serum emission can be used as the first test to detect metabolic disorders in mammals. When changes in emission of the serum from patients with different pathological conditions were characterized, a difference was seen for patients with diseases such as cancer, thyroid disorder, arthritis, diabetes, coronary artery disease (CAD), hypertension, CFS (chronic fatigue syndrome), and fibromyalgia. The level of emission was enhanced or diminished and correlated with the level of energy metabolism and the level of metabolic rate. The method can also be used for risk assessment, to identify whether a treatment is working or to follow the course of a treatment, and to identify changes in energy levels due to stress, etc.

Abstract: According to the present invention, there is provided a light scattering type particle detector, using a semiconductor laser as a light source, for detecting particles contained in sample fluid which defines a flow path, wherein laser light generated from the semiconductor laser is irradiated to irradiate a region of the flow path with a concave mirror and thereby a particle detecting region is defined. According to the present invention, there is also provided a laser oscillator wherein the optical axis of a semiconductor laser for generating pumping laser light has a predetermined angle with respect to the optical axis of a laser medium for irradiating laser light by pumping. Using such a laser oscillator, laser light irradiated from the laser oscillator is condensed to irradiate a region of a flow path defined by sample fluid, and thereby a particle detecting region is defined. Particles contained in the particle detecting region are detected by receiving scattered light with a light receiving portion.

Abstract: The method and apparatus of laser-induced incandescence (LII) to analyze characteristics of submicron-sized particles are described. LII is recognized as a good tool for determining the characteristics of small particles in a gas, e.g., volume fraction, particle size, and specific surface area. It uses the fact that the incandescence signal is proportional to the volume of the particles. It also uses the fact that transient cooling is dependent on the specific surface area of the particle, which is related to diameter of the particle. In LII, particles are heated by a pulsed laser light beam to a temperature where incandescence from the particles can be distinguished from ambient light. The temperature of particles and their volume fraction governs the incandescence. The temperature decay rate is proportional to the primary particle size. The invention uses an optical arrangement that ensures a near-uniform laser energy distribution spatial profile.

Abstract: The present invention relates to methods for analyzing agricultural products. More particularly, the present invention relates to methods for analysis of the oil content of one or more seeds.

Abstract: The invention relates to the characterising, separating and/or elimination of suspended particles in a carrier gas of an aerosol. According to a first aspect of the invention volatile suspended particles are eliminated in that in a first step the aerosol is heated to a temperature at which the volatile suspended particles evaporate and in a second step the aerosol is diluted with a dilution gas. The sequence of the first and of the second step may be exchanged. According to a second aspect a dilution of the raw gas takes place such that raw gas is led to a measurement gas channel through which measurement gas flows, wherein the quantity of raw gas transferred per unit of time is dependent on the volume flow in the raw gas channel. According to a third aspect of the invention, in a condensation nucleus counter not only is the number of scatter light pulses evaluated but also their intensity in order to be able to draw conclusions on the reliability of the measurement.

Abstract: A method and apparatus for spectrophotometric and/or nephelometric analyses. The apparatus can be used in in-vitro diagnosis.

Abstract: A method and apparatus are described by which previously identified aerosol particles that may have precipitated onto surfaces and/or into specific physical regions are detected, removed from said regions, and stored for later examination or destruction. The method includes means such as an ultrasonic probe to loosen said aerosol particles from the surfaces to which they have precipitated and then withdraw them into an optical read head for measurement. The optical read head illuminates each particle, previously diluted and entrained in a sheath flow, as it passes therethrough with a fine beam of light such as produced by a laser. The scattered light produced by each such particle is collected over a range of scattering angles, converted into a digital representation for each value collected, and stored in a computer means.

Abstract: A particle size distribution analysis apparatus comprising a sample measurement zone adapted to define a sample of particles, a light emitting means adapted to provide a source of light incident upon the sample measurement zone, and at least a first detection means adapted to measure light levels in the apparatus at particular scattering angles and output a signal to a computation means enabling the particle size distribution of particles contained within the sample to be determined, wherein the computation means is adapted, in use, to calculate a particle size distribution taking into account reflections by the measurement zone of light scattered off the particles.

Abstract: A method of processing a semiconductor device is provided with several steps, including the step of generating plasma in a processing chamber to form or process a thin firm on a semiconductor device. The step of scanning, through a window, intensity modulated laser beam, which is modulated at a desired frequency inside the processing chamber where the semiconductor device is being processed. The step of receiving by a sensor through the window a back scattered light being scattered from fine particles suspended in the processing chamber by the scanning laser and detecting the desired frequency component from a signal outputted from the sensor. From the detected frequency component information relating to quantity, size, and distribution of the fine particles illuminated by the laser beam inside the processing chamber is obtained. This information is then outputted.

Abstract: Fiber optic alignment methods and apparatus in accordance with the present invention first identify a target beam width incidence on an end of an optical element. The end of the optical element is placed into a beam of light at an axial location relative to the beam of light. The end of the optical element is subsequently moved transversally (perpendicular) to the beam of light until a position of maximum optical power, as measured through the optical element, is identified. A beam width of the beam of light is measured at that axial location. The movement and measurement sequence is repeated at multiple axial locations relative to the beam of light. Linear regression, or an equivalent approach is used, to predict an axial location relative to the beam of light with the target beam width. The end of the optical element is then moved to the axial location with the target beam width.

Abstract: A method for determining absolute number densities of particles in a solution is disclosed based on a light scattering method. A light scattering photometer is calibrated to produce the Rayleigh ratio at each angle measured with respect to light scattered per unit incident intensity, per unit volume illuminated within the field of view of each detector per steradian subtended by said detector. In order that the numbers calculated be accurate, the illuminated particles should be effectively monodisperse. From the excess Rayleigh ratios measured at a plurality of angles with respect to the incident light beam illuminating said sample particles, an effective size is calculated which, in turn, is used to calculate the differential scattered intensity at each angle. The number of particles per unit volume element is then determined from the measured excess Rayleigh ratio divided by the corresponding differential scattered intensity.

Abstract: A colloidal system for detection of a variety of analytes involves techniques which permit reconstitution of a desiccated substance such as for surface enhanced Raman spectroscopic analysis and multiple sensors at once, each having different spectra through the use of markers or the like. Competitive assay techniques and a variety of substances are explained to permit a practical an versatile system which can also be used for immunological assays and can include antibodies tagged to provide spectroscopic indicia.

Abstract: A portable particle detection and removal system (100) that connects to a house vacuum (200). A particle sensor (106) is connected between two hoses: one (102) connected to the house vacuum (200) and one (104) for vacuuming the wafer equipment chamber. A smaller diameter hose (104) may be used for vacuuming the wafer equipment chamber. The particle sensor detects (106) incoming particles and a particle count is displayed for the operator. A modulated cleaning system (112) modulates the vacuum pressure in the second hose (104) between two vacuum pressure states.

Abstract: A method capable of quantitatively evaluating the intensity of scintillation caused by surface unevenness. Light from a white light source is made incident on a surface of an object to be measured through a matrix filter. Reflected light or transmitted light from the object is photographed with a CCD camera and taken into a computer as data. Image processing for the luminance distribution of the captured light is performed to obtain a standard deviation of dispersion of the luminance distribution. The value of the standard deviation obtained is defined as a scintillation value of the surface of the object.

Abstract: An apparatus embodying the invention includes a probe head with an interrogation surface that is intended to be positioned adjacent or pushed into contact with a target material or tissue. The probe head is constructed to have a plurality of interrogation devices arranged across the face of the interrogation surface. The probe head is also constructed so that the interrogation device can conform to a non-uniform or non-planar surface of the target tissue. In some embodiments, the interrogation surface may have a particular shape that conforms to the shape of a target material. In other embodiments, one or more portions of the interrogation surface could be movable with respect to the remaining portions so that the interrogation surface could be movable with respect to remaining portions so that the interrogation surface can thereby conform to a non-uniform surface. In still other embodiments, a plurality of separately moveable interrogation devices can be arranged across the interrogation surface.

Abstract: A particle analyzer that includes a specimen source, a flow cell, a pump and delivery tube for transporting specimen fluid from the specimen source to the flow cell, a dispensing valve for injecting stain from a stain source into the specimen fluid in the delivery tube, and a mixing device for mixing the stain and the specimen fluid together. The mixing device includes a cylindrical shaped member having an outer surface, a channel formed in the outer surface with the channel including circumferential and longitudinal turns, and a hollow mixing tube disposed in the channel. As the stain and the specimen fluid flow through the mixing tube, they travel through the circumferential and longitudinal turns and are mixed together. A fluid sensor employing a sensor RC circuit and a reference RC circuit detects capacitance changes in the delivery tube for detecting the presence or absence of fluid therein.

Abstract: This invention provides a particle size distribution measuring apparatus, which has a function of informing an operator of a procedure of validation work of the particle size distribution measuring apparatus. A storage medium which records validation data providing a procedure of validation work for the particle size distribution measuring apparatus and a control unit which has a validation help function which successively reads a validation procedure from the validation data and controls the particle size distribution measuring apparatus according to a measuring procedure without any operation by an operator in the validation procedure while teaching the operator a work procedure requiring an operation by the operator.

Abstract: The present invention is generally directed to a method and a structure for calibrating a scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device. In one illustrative embodiment, the method comprises measuring a critical dimension of at least one production feature formed above a wafer using a scatterometry tool, measuring at least one of a plurality of grating structures formed above the wafer using the scatterometry tool, each of the grating structures having a different critical dimension, and correcting the measured critical dimension of the at least one production feature based upon the measurement of the at least one grating structure.

Abstract: A smoke detector is shown in which blue light is directed through a scattering volume (9) from a radiation emitter (3) and infra-red radiation is also directed through the scattering volume (9) from an infra-red source (3A). Radiation forward-scattered by any particles in the scattering volume (9) is directed by a mirror (13) onto a photodiode (15) which produces an output to control means (16). The emitters (3,3A) are pulsed at different frequencies, enabling the control means (16) to produce separate signals (21,23) corresponding respectively to the scattered blue light and the scattered infra-red radiation. For smoke particles, significantly more blue light is scattered than infra-red radiation, but this is not so much the case for non-smoke particles. A comparator (25) takes the ratio of the two signals (21,23) to produce a smoke-dependent warning output.

Abstract: The invention concerns an apparatus and a method for measuring at least one optical characteristic, which can include in particular turbidity (T), absorbance (A) and fluorescence (F), of a medium (1), and a micro-bioreactor, a connector and associated male and female parts. The apparatus comprises a light source (3) provided with means for controlling (6) the intensity of the beam transmitted (11) by the source, a photodetector (4) for measuring the intensity of the beam reflected (12) by the medium, a feedback regulating system (7) operating on the control means such that the measured intensity of the reflected beam is equal to a predetermined nominal intensity, and means for reading the transmitted beam intensity, said intensity representing the medium optical characteristic(s). The apparatus also comprises means for adjusting the nominal intensity, such that the transmitted beam stabilised intensity is within a predetermined range. The invention is applicable to micro-bioreactors.

Abstract: Types of defects on a wafer are discriminated according to defect measurements obtained from a wafer inspection system which includes a plurality of dark field detectors. Using the wafer measurement system, it is determined whether first, second and third conditions are satisfied. The first condition is when a size of a defect on the wafer measured by the wafer inspection system is smaller than a limit value denoting a maximum size of crystal originated particles. The second condition is when a correlation between a plurality of defect light intensity values detected by a plurality of dark field detectors of the wafer measurement system satisfies a reference value. The third condition is when a location of the defect measured by the wafer inspection system is within a vacancy-rich area of the wafer. The type of the defect is then determined to be a crystal originated particle when the first, second and third conditions are all satisfied.

Abstract: The process is used for the screening of molecules from molecule libraries with regard to their individual binding behavior towards at least one given ligand. For this purpose the ligands labelled with a fluorescent dye are mixed with the molecule library which is in the form of a suspension. The mixture is plated out on a two-dimensional substrate (2) after the excess, unbound ligands have been washed out. Then the local fluorescence intensities on the substrate are electro-optically identified in a fluorescence microscope (5) and electronically discriminated in accordance with given selection criteria. The objects selected and localised in this way are then sequentially positioned exactly by a displacement, the coordinates of which are controlled by the image calculator, between the substrate (2) and a separation actuator (20, 21) and are spatially separated from the substrate (2) by the separation actuator (20, 21).

Abstract: A flow cytometer includes a flow cell for flowing a sample liquid in a flowing direction, to form a sample flow the sample liquid containing particles to be analyzed, a laser diode radiating a laser beam having an elliptic cross section, a beam collimating section for collimating the laser beam radiated from the laser diode, a beam spot forming section for focusing the collimated beam at the sample flow in the flow cell to form a beam spot, and a light receiving section for receiving light generated from the particles at the beam spot to detect optical information of the particles, wherein the laser diode is arranged such that a minor diameter of the elliptic section of the laser beam is parallel to the sample flow.

Abstract: The present invention relates to three-dimensional optical imaging techniques and, more particularly, to the detection and three-dimensional imaging of absorbing and/or scattering structures in complex random media, such as human body tissue, by detecting scattered light emerging from the medium.