By Polarized Light Examination Patents (Class 356/364)
  • Patent number: 7889338
    Abstract: A coordinate measuring machine for the structured illumination of substrates is disclosed. The incident light illumination means and/or the transmitted light illumination means have a pupil access via which at least one optical element is positionable in the optical illumination path. The size and/or type and/or the polarization of the pupil illumination may be manipulated such that the structured illumination of the substrate in the coordinate measuring machine corresponds to the structured illumination of this substrate in the exposure process with a stepper.
    Type: Grant
    Filed: May 27, 2008
    Date of Patent: February 15, 2011
    Assignee: Vistec Semiconductor Systems GmbH
    Inventor: Michael Heiden
  • Patent number: 7889332
    Abstract: A physical quantity measuring apparatus utilizing optical frequency domain reflectometry of the invention includes a tunable laser; a first polarization-maintaining fiber; a polarization-maintaining coupler; a second polarization-maintaining fiber; a third polarization-maintaining fiber; a sensor consists of fiber Bragg gratings formed at a core of the third polarization-maintaining fiber; a fourth polarization-maintaining fiber; a photodiode detects Bragg reflected light from the sensor and reference light from the referential reflecting end; a controller detects a modulation of an interference intensity between the Bragg reflected light and the reference light, based on an intensity change of multiplexed light of the Bragg reflected light and the reference light; an incidence part inputs the measuring light; and an optical path-length adjuster arranged on the third polarization-maintaining fiber; the incidence part provided on the first polarization-maintaining fiber, or on both the second and third polariz
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: February 15, 2011
    Assignee: Fujikura Ltd.
    Inventors: Koji Omichi, Akira Sakamoto, Shunichirou Hirafune
  • Patent number: 7889343
    Abstract: Method and system for optical detection of nano-objects in a refracting medium. A nano-object (n_oi) and the refractive medium are illuminated (A) with a periodically amplitude modulated coherent electromagnetic heating wave (HB(?)), to generate a specified temperature and refractive index profile in the vicinity of the nano-object, and with a coherent electromagnetic probe wave (PB) to generate an emerging probe wave (EPB(?)) having at least one intensity component amplitude modulated by a beat at the modulation frequency of the coherent heating wave. The intensity component amplitude modulated by a beat is detected (C) in the emerging wave (EPB(?)), to distinguish and represent this nano-object in the refractive medium. The invention is useful in the detection of nano-objects in an industrial, physiological or intracellular medium.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: February 15, 2011
    Assignee: Centre National de la Recherche Scientifique (C.N.R.S.)
    Inventors: Brahim Lounis, Laurent Cognet, Stephane Berciaud
  • Patent number: 7889340
    Abstract: In embodiments of the present invention a second, different waveplate is introduced into a single rotating compensator normal incidence ellipsometer. The second waveplate provides a quarter wavelength retardation that is different from and complementary to that of the first waveplate in order to increase the spectral range for which useful retardation is available, especially towards the deep UV spectrum. The sensitivity for the system may also be increased in the conventional spectral range, since each of the two waveplates may be optimized for its own, somewhat more narrow spectral range of operation. With the proper choice of two waveplates of different retardation, the useful spectral range may be extended from typically 190-820 nm to 150-1000 nm, and beyond if necessary, while increasing the sensitivity within the conventional wavelength range at the same time.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: February 15, 2011
    Assignee: KLA-Tencor Corporation
    Inventors: Klaus Flock, Jeff T. Fanton
  • Publication number: 20110032502
    Abstract: Polarization evaluation mask according to one mode includes a transparent substrate, a light shielding portion, plural quarter-wavelength plates, and plural polarizers. The light shielding portion is formed on the transparent substrate and has plural openings therein. Plural quarter-wavelength plates are formed to cover at least one opening. Fast axes of the quarter-wavelength plates are different in azimuth by a certain angle. Plural polarizers are disposed upstream of the quarter-wavelength plates with respect to the illumination light and formed to overlay the quarter-wavelength plates and cover at least one of the openings. Transmission axes of the polarizers are different in azimuth by a certain angle. The plural openings are provided with different combinations of an azimuth, of the polarizer and an azimuth of the quarter-wavelength plate from one another.
    Type: Application
    Filed: August 6, 2010
    Publication date: February 10, 2011
    Inventor: Hiroshi NOMURA
  • Publication number: 20110032523
    Abstract: An apparatus and method for measurement of the stress in and thickness of the walls of glass containers is disclosed that uses fluorescence to quickly and accurately ascertain both the thickness of the stress layers and the wall thickness in addition to the stress curve in glass containers. The apparatus and method may be used to quickly and accurately measure both the stress in and the thickness of the side walls of glass containers throughout the circumference of the glass containers. The apparatus and method are adapted for large scale glass container manufacturing, and are capable of high speed measurement of the stress in and the thickness of the side walls of glass containers.
    Type: Application
    Filed: August 5, 2009
    Publication date: February 10, 2011
    Inventors: William J. Furnas, Sarath K. Tennekoon, Gary C. Weber
  • Publication number: 20110032524
    Abstract: An apparatus and method for measurement of the stress in and thickness of flat glass or curved glass segments is disclosed that uses fluorescence to quickly and accurately ascertain both the thickness of the stress layers and the wall thickness in addition to the stress curve in flat glass or curved glass segments. The apparatus and method may be used to quickly and accurately measure both the stress in and the thickness of flat glass or curved glass segments at a plurality of various locations therein. The apparatus and method are adapted for large scale flat glass or curved glass segment manufacturing, and are capable of high speed measurement of the stress in and the thickness of the flat glass or curved glass segments.
    Type: Application
    Filed: August 5, 2009
    Publication date: February 10, 2011
    Inventors: William J. Furnas, Sarath K. Tennakoon, Gary C. Weber
  • Publication number: 20110019188
    Abstract: An airborne multiple field-of-view water droplet sensor includes an illumination portion and a detection portion. The illumination portion includes a first optical beam emitter configured to output a light beam. The detection portion includes a kaleidoscope configured to channel a first portion of the backscattered light towards an inner reflective surface of a circle-to-line converter, a multiple field of view subsystem having at least a first detector configured to receive light reflected by the circle-to-line converter, and a single field-of-view subsystem configured to receive a second portion of the backscattered light, the second portion not having been reflected by the circle-to-line converter. The single field-of-view subsystem may include a dual channel circular polarization detector for distinguishing between liquid water droplets and ice crystals based on information in the single field-of-view.
    Type: Application
    Filed: July 23, 2009
    Publication date: January 27, 2011
    Applicant: Rosemount Aerospace, Inc.
    Inventors: Mark D. Ray, Michael P. Nesnidal
  • Patent number: 7876437
    Abstract: An apparatus and method for measurement of the stress in and thickness of the walls of glass containers is disclosed that uses fluorescence to quickly and accurately ascertain both the thickness of the stress layers and the wall thickness in addition to the stress curve in glass containers. The apparatus and method may be used to quickly and accurately measure both the stress in and the thickness of the side walls of glass containers throughout the circumference of the glass containers. The apparatus and method are adapted for large scale glass container manufacturing, and are capable of high speed measurement of the stress in and the thickness of the side walls of glass containers.
    Type: Grant
    Filed: August 5, 2009
    Date of Patent: January 25, 2011
    Assignee: Emhart Glass S.A.
    Inventors: William J. Furnas, Sarath K. Tennekoon, Gary C. Weber
  • Publication number: 20110013186
    Abstract: An optical displacement meter includes: a broadband light source; a spatial filter configured to extract light under measurement of a wavelength focused on a measurement target and specify the wavelength of the light under measurement; a polarizer configured to divide the light collimated and caused to propagate in one direction into linearly polarized beams of two directions orthogonal to a propagating direction; a wavelength plate that allows passage of the linearly polarized beams to produce elliptically polarized light having a phase difference commensurate with a light wavelength; a polarized light separation element configured to divide the elliptically polarized light into polarized light components with respect to the two directions; a light receiving element configured to detect quantities of the respective polarized light components; and a computing circuit configured to perform computation of (A?B)/(A+B) by use of light quantity signals A and B detected by the light receiving element.
    Type: Application
    Filed: July 12, 2010
    Publication date: January 20, 2011
    Applicant: MITUTOYO CORPORATION
    Inventor: Yutaka MIKI
  • Patent number: 7872751
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: January 18, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 7869062
    Abstract: In a substrate supporting apparatus of a surface potential measuring apparatus, a first fluid is ejected around a target region on an upper surface of a substrate from a circular-shaped first porous member of a first fluid ejection part and a second fluid is ejected onto a lower surface of the substrate from a circular-shaped second porous member of a second fluid ejection part which is opposite to the first fluid ejection part. The substrate can be supported and flattened between the first fluid ejection part and the second fluid ejection part. Also, it is possible to keep the distance between the substrate and the first porous member, with a simple construction. As a result, a probe can be positioned above a flatted target region with leaving a predetermined spacing, to perform measurement of a surface potential of the target region on the substrate with high accuracy.
    Type: Grant
    Filed: January 9, 2008
    Date of Patent: January 11, 2011
    Assignee: Dainippon Screen MFG Co., Ltd.
    Inventors: Yoshiyuki Nakazawa, Takamasa Sakai
  • Patent number: 7869024
    Abstract: A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: January 11, 2011
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yuta Urano, Toshiyuki Nakao, Yoshimasa Oshima
  • Publication number: 20110001971
    Abstract: There is provided an electromagnetic field measurement apparatus capable of achieving correct and timely circuit operation detection in an area where electronic devices are mounted at high density. An electromagnetic field measurement apparatus includes: a laser light source; a polarized wave controller that linearly polarizes laser light; an optical fiber probe that has an electrooptic material or a magnetooptic material at its leading end and in which the laser light reflected at the leading end is subjected to polarization modulation in accordance with an electric field intensity or a magnetic field intensity; and an analyzer that converts the laser light reflected by the optical fiber probe into intensity modulated light. The laser light source emits time-multiplexed laser light of a plurality of wavelengths different from one another.
    Type: Application
    Filed: February 4, 2009
    Publication date: January 6, 2011
    Inventors: Mizuki Iwanami, Tsuneo Tsukagoshi, Risato Ohhira, Masafumi Nakada, Tomonori Yamada
  • Publication number: 20100328640
    Abstract: A measurement apparatus for measuring the polarization state of a light beam Fourier-transforms changes in intensity of a plurality of light beams with different polarization states, which are detected while changing a relative rotation angle ? between the waveplate and the polarizer about the optical axis, to calculate the values of first Fourier coefficients of respective components oscillating with waveforms described by cos 4?, sin 4?, sin 2?, and cos 2?, approximately calculates, using the values of the first Fourier coefficients, third coefficients that define the relationship between the first Fourier coefficients and second Fourier coefficients of the respective components oscillating with waveforms described by cos 4?, sin 4?, and sin 2? assuming that the detection result contains no measurement error attributed to the optical system, and calculates a measurement error attributed to the optical system using the third coefficients.
    Type: Application
    Filed: June 30, 2010
    Publication date: December 30, 2010
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Takanori UEMURA
  • Patent number: 7859665
    Abstract: A polarization analyzing system includes a data collector collecting information on resist patterns formed over step patterns by first and second lights, the first and second lights being polarized parallel and perpendicular to the step patterns, a residual resist analyzer obtaining first and second relations between a ratio of a space to a line width of the resist patterns and the first and second residues, the first and second residues remaining at orthogonal points of the step patterns and the resist patterns, and a direction chooser choosing an optimum polarization direction reducing residues by comparing the first and second relations.
    Type: Grant
    Filed: April 9, 2009
    Date of Patent: December 28, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Ayako Nakano, Takashi Sato
  • Patent number: 7859659
    Abstract: Before the diffraction from a diffracting structure on a semiconductor wafer is measured, where necessary, the film thickness and index of refraction of the films underneath the structure are first measured using spectroscopic reflectometry or spectroscopic ellipsometry. A rigorous model is then used to calculate intensity or ellipsometric signatures of the diffracting structure. The diffracting structure is then measured using a spectroscopic scatterometer using polarized and broadband radiation to obtain an intensity or ellipsometric signature of the diffracting structure. Such signature is then matched with the signatures in the database to determine the grating shape parameters of the structure.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: December 28, 2010
    Assignee: KLA-Tencor Corporation
    Inventors: Yiping Xu, Ibrahim Abdulhalm
  • Publication number: 20100321773
    Abstract: A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.
    Type: Application
    Filed: December 28, 2009
    Publication date: December 23, 2010
    Applicants: Industrial Technology Research Institute, NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY
    Inventors: Liang-Chia Chen, Shih-Hsuan Kuo, Cheng-Han Chen, Yi-Wei Chang, Hau-Wei Wang
  • Publication number: 20100315640
    Abstract: A feedforward controller for controlling the polarization state of an optical signal. The feedforward controller includes an optical input for receiving an optical input signal having an input polarization state, an optical output for transmitting an optical output signal having an output polarization state, a polarization controller coupled to the optical input and the optical output, and a transfer function determiner for determining a characteristic polarization transfer function of the feedforward controller from the input and output polarization states. The polarization controller is adapted to modify the polarization state of light passing therethrough in dependence on the characteristic polarization transfer function of the feedforward controller.
    Type: Application
    Filed: June 11, 2010
    Publication date: December 16, 2010
    Applicant: XTERA COMMUNICATION INC.
    Inventors: Stephen Michael Webb, John Ellison
  • Publication number: 20100309469
    Abstract: Apparatus and method for producing quantum entangled signal and idler photon pairs is provided. The apparatus makes use of a nonlinear optical fiber to generate the entangled photons. The use of an external broad band light source for alignment of any downstream measurement apparatuses is disclosed. One or more polarized output signals can be generated at both the signal and idler wavelengths using the alignment source, allowing the downstream measurement apparatuses to be aligned using classical light. Multiple signal and idler wavelengths can be generated and aligned using such a system.
    Type: Application
    Filed: February 18, 2010
    Publication date: December 9, 2010
    Inventors: Gregory S. Kanter, Shawn Wang
  • Patent number: 7847937
    Abstract: An optical measurement system includes a rotating element ellipsometer comprising a radiant source and a rotating optical element coupled to the radian source, an optical system to provide a modulated pump beam, a detection system optically coupled to the ellipsometer and a signal analyzer. The rotating element ellipsometer is configured to deliver a probe beam to a measurement spot on a sample and to measure one or more ellipsometric parameters of the sample at one or more discrete wavelengths or wavelength ranges, or a plurality of wavelengths across a wavelength range. Methods for determining sample characteristics from radiation scattered, reflected, diffracted or otherwise emitted from a sample surface using the optical measurement systems are also disclosed.
    Type: Grant
    Filed: April 4, 2007
    Date of Patent: December 7, 2010
    Assignee: KLA-Tencor Technologies Corporation
    Inventor: Christopher F. Bevis
  • Patent number: 7843564
    Abstract: A non-sampling-based Q-factor measuring apparatus and method use a power conversion module to transform the power variation of inputted optical signals in time domain into the variation in other domains, such as optical wavelength, optical polarization and different output ports of optical elements. Taking optical wavelength as an example, different levels of power variation respond different outputs of wavelength variation through the use of a power-to-wavelength conversion module. An optical filter then separates the inputted optical signals with different wavelengths. The power average of a wavelength for its corresponding optical signals is further calculated by a photo detector. Thereby, the information of the power variation for the inputted optical signals at levels 1 and 0 can be obtained, and the Q-factor for the inputted optical signals is easily measured.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: November 30, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: San-Liang Lee, Chun-Liang Yang, Dar-Zu Hsu
  • Publication number: 20100296088
    Abstract: A method for detecting polarizing direction of electromagnetic wave includes disposing a carbon nanotube structure in a vacuum environment, irradiating a surface of the carbon nanotube structure by an electromagnetic wave with a polarizing direction while rotating the carbon nanotube structure, and determining the polarizing direction of the electromagnetic wave according to change of the visible light emitted from the carbon nanotube structure. The carbon nanotube structure includes a plurality of carbon nanotubes arranged along a substantially same direction. The carbon nanotube structure can absorb the electromagnetic wave and emit a visible light. The rotating axis is substantially perpendicular to the surface of the carbon nanotube structure irradiated by the electromagnetic wave.
    Type: Application
    Filed: November 12, 2009
    Publication date: November 25, 2010
    Applicants: Tsinghua University, HON HAI Precision Industry CO., LTD.
    Inventors: Lin Xiao, Yu-Ying Zhang, Kai-Li Jiang, Liang Liu, Shou-Shan Fan
  • Publication number: 20100282945
    Abstract: A two-dimensional solid-state image capture device includes pixel areas arranged in a two-dimensional matrix, each pixel area being constituted by multiple sub-pixel regions, each sub-pixel region having a photoelectric conversion element. A polarization member is disposed at a light incident side of at least one of the sub-pixel regions constituting each pixel area. The polarization member has strip-shaped conductive light-shielding material layers and slit areas, provided between the strip-shaped conductive light-shielding material layers. Each sub-pixel region further has a wiring layer for controlling an operation of the photoelectric conversion element, and the polarization member and the wiring layer are made of the same material and are disposed on the same virtual plane.
    Type: Application
    Filed: April 20, 2010
    Publication date: November 11, 2010
    Applicant: SONY CORPORATION
    Inventor: Sozo Yokogawa
  • Patent number: 7830511
    Abstract: A polarization direction measuring apparatus includes: a first polarizing plate having an unknown polarization direction about a reference axis; a sample whose polarization direction is to be measured; a rotatable sample holder on which the sample is mounted in a first direction and a second direction opposite to the first direction, wherein the sample holder rotates the sample along a reference axis in the azimuth direction; a light source that generates light passing though the first polarizing plate and the sample; and a light detector detecting light generated by the light source that passes though the first polarizing plate and the sample.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: November 9, 2010
    Assignee: LG Display Co., Ltd.
    Inventors: Yong Sung Ham, Jong Won Moon, Jin Kwan Jeong
  • Patent number: 7826059
    Abstract: A method and apparatus for extracting the vector optical properties of biological samples with micron-scale resolution in three dimensions, using polarization-sensitive optical coherence tomography (PS-OCT). The method measures net retardance, net fast axis, and reflectivity. Polarization sensing is accomplished by illuminating the sample with at least three separate polarization states, using consecutive acquisitions of the same pixel, A-scan, or B-scan. The method can be implemented using non-polarization-maintaining fiber and a single detector. This PS-OCT method reported measures fast axis explicitly. In a calibration test of the system, net retardance was measured with an average error of 7.5° (standard deviation 2.2°) over the retardance range 0° to 180°, and fast axis with average error of 4.8° over the range 0° to 180°.
    Type: Grant
    Filed: January 22, 2002
    Date of Patent: November 2, 2010
    Inventors: Jonathan E. Roth, Joseph A. Izatt, Andrew M. Rollins
  • Patent number: 7826041
    Abstract: A register mark detecting apparatus detects a transparent register mark printed on a conveyed transparent web. The register mark detecting apparatus includes a light source, a parallel light flux irradiation optical system, a collective optical system, a knife-edge, and a light receiving element. The parallel light flux irradiation optical system converts a light flux from the light source into a parallel light flux to irradiate a transparent web with the parallel light flux. The collective optical system collects the light flux transmitted through the transparent web. The knife-edge is disposed near a back focus of the collective optical system. The knife-edge interrupts the light flux going straight in the transparent web and causes only the light flux refracted by being transmitted through the transparent register mark to pass by. The light receiving element receives the light flux transmitted through the knife-edge.
    Type: Grant
    Filed: February 17, 2009
    Date of Patent: November 2, 2010
    Assignee: Taiyo Electric Industry Co., Ltd.
    Inventor: Kazuhiko Takeda
  • Patent number: 7823215
    Abstract: The present invention relates to near-field scanning optical microscopy (NSOM) and near-field/far-field scanning microscopy methods, systems and devices that permit the imaging of biological samples, including biological samples or structures that are smaller than the wavelength of light. In one embodiment, the present invention permits the production of multi-spectral, polarimetric, near-field microscopy systems that can achieve a spatial resolution of less than 100 nanometers. In another embodiment, the present invention permits the production of a multifunctional, multi-spectral, polarimetric, near-field/far-field microscopy that can achieve enhanced sub-surface and in-depth imaging of biological samples. In still another embodiment, the present invention relates to the use of polar molecules as new optical contrast agents for imaging applications (e.g., cancer detection).
    Type: Grant
    Filed: May 12, 2006
    Date of Patent: October 26, 2010
    Assignee: The University of Akron
    Inventor: George C. Giakos
  • Patent number: 7821637
    Abstract: Disclosed is a system for controlling focus, angle of incidence and intensity of an electromagnetic beam over a spectrum of wavelengths, and methodology for optimizing investigation of samples which demonstrate low specular reflectance and/or are depolarizing of a polarized beam of electromagnetic radiation, such as solar cells.
    Type: Grant
    Filed: February 21, 2008
    Date of Patent: October 26, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Martin M. Liphardt, James N. Hilfiker
  • Publication number: 20100265504
    Abstract: Said device comprises a substrate (44) and, on said substrate, an integrated photonic circuit (46) adapted to be coupled to at least one optical waveguide (48) which transmits a light signal (50) and for processing said signal. According to the invention, the circuit comprises two superimposed elementary integrated photonic circuits (52, 54), each of which is adapted to be coupled to a given polarisation state of the signal and to process this state. The invention applies particularly to optical telecommunications.
    Type: Application
    Filed: October 1, 2008
    Publication date: October 21, 2010
    Applicant: Commissariat A L'Energie Atomique Et Aux Engn Alt
    Inventors: Christophe Kopp, Jean-Marc Fedeli, Regis Orobtchouk
  • Publication number: 20100266156
    Abstract: A robotic optical sedimentation recorder is described for the recordation of carbon flux in the oceans wherein both POC and PIC particles are captured at the open end of a submersible sampling platform, the captured particles allowed to drift down onto a collection plate where they can be imaged over time. The particles are imaged using three separate light sources, activated in sequence, one source being a back light, a second source being a side light to provide dark field illumination, and a third source comprising a cross polarized light source to illuminate birefringent particles. The recorder in one embodiment is attached to a buoyancy unit which is capable upon command for bringing the sedimentation recorder to a programmed depth below the ocean surface during recordation mode, and on command returning the unit to the ocean surface for transmission of recorded data and receipt of new instructions.
    Type: Application
    Filed: November 7, 2008
    Publication date: October 21, 2010
    Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventor: James K.B. Bishop
  • Patent number: 7813787
    Abstract: Described are dental implements useful for inspecting tooth surfaces for abnormalities such as caries or plaque. Preferred implements of the invention include light emitting diodes mounted on an implement body having a mirror for insertion into a user's mouth. Such implements also have on-board batteries mounted in chambers in the implement handle, and a switch for energizing and de-energizing the LED with the battery. Also described are methods for examining tooth surfaces for abnormal conditions indicative of plaque involving illuminating surfaces with radiation at a wavelength in the range of 390-450 nm wherein the radiation is effective to cause detectable fluorescence emissions from bacterial metabolites known to be associated with plaque-containing surfaces, and detecting the emissions.
    Type: Grant
    Filed: July 31, 2002
    Date of Patent: October 12, 2010
    Assignee: Inspektor Research Systems BV
    Inventors: Elbert de Josselin de Jong, Elbert Waller, Monique van der Veen
  • Patent number: 7808636
    Abstract: Methods and apparatus for detecting variations in electromagnetic fields, in particular, terahertz (THz) electromagnetic fields, are provided. The methods and apparatus employ polarization detection devices and controllers to maintain or vary the polarization of modulated signals as desired. The methods and apparatus are provided to characterize electromagnetic fields by directing the electromagnetic field and a probe beam upon an electro-crystal and detecting the modulation of the resulting probe beam. Detection of the modulation of the probe beam is practiced by detecting and comparing the polarization components of the modulated probe beam. Aspects of the invention may be used to analyze or detect explosives, explosive related compounds, and pharmaceuticals, among other substances. A compact apparatus, modular optical devices for use with the apparatus, sample holders, and radiation source mounts are also disclosed.
    Type: Grant
    Filed: January 11, 2008
    Date of Patent: October 5, 2010
    Assignee: Rensselaer Polytechnic Institute
    Inventors: Brian Schulkin, Xi-Cheng Zhang, Thomas Tongue, Jingzhou Xu, Jian Chen
  • Publication number: 20100245819
    Abstract: A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift ? between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration.
    Type: Application
    Filed: March 27, 2009
    Publication date: September 30, 2010
    Inventor: Guoguang Li
  • Publication number: 20100231911
    Abstract: A system and method for detection and measurement of circular birefringences in materials, such as optically active (chiral) liquids and materials that exhibit the Faraday effect. The method and apparatus permit the detection of optical activities via the difference in the directions of propagation the left- and the right-circularly polarized light (components). A beam of light is directed at an interface formed by the optically active medium and another medium such that a difference in the angles of refraction and/or reflection and/or diffraction between the left- and the right-circularly polarized components of the light beam can be detected. The difference in the propagation directions between the two circularly polarized light components is measured on a position sensitive detector and/or is detected as an intensity difference.
    Type: Application
    Filed: June 27, 2007
    Publication date: September 16, 2010
    Inventors: Peer Fischer, Ambarish Ghosh
  • Patent number: 7796257
    Abstract: A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements.
    Type: Grant
    Filed: December 27, 2006
    Date of Patent: September 14, 2010
    Assignees: National University Corporation Tokyo University of Agriculture and Technology, National University Corporation Hokkaido University
    Inventors: Yukitoshi Otani, Kazuhiko Oka, Toshitaka Wakayama, Atsushi Taniguchi
  • Patent number: 7796259
    Abstract: Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: September 14, 2010
    Assignee: WeiFour, Inc.
    Inventors: Anlun Tang, Yingwu Lian, Jonglip Choi
  • Patent number: 7796258
    Abstract: A non-sampling-based Q-factor measuring apparatus and method use a power conversion module to transform the power variation of inputted optical signals in time domain into the variation in other domains, such as optical wavelength, optical polarization and different output ports of optical elements. Taking optical wavelength as an example, different levels of power variation respond different outputs of wavelength variation through the use of a power-to-wavelength conversion module. An optical filter then separates the inputted optical signals with different wavelengths. The power average of a wavelength for its corresponding optical signals is further calculated by a photo detector. Thereby, the information of the power variation for the inputted optical signals at levels 1 and 0 can be obtained, and the Q-factor for the inputted optical signals is easily measured.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: September 14, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: San-Liang Lee, Chun-Liang Yang, Dar-Zu Hsu
  • Publication number: 20100225914
    Abstract: This invention provides a method for measuring and monitoring the state of polarization (SOP) of a polarization maintaining (PM) fiber and the like using a narrowband fiber Bragg grating (FBG) written on the same. The PM fiber therefore comprises a first narrowband reference FBG which is used as a reference to measure and monitor the SOP of the PM fiber. Due to the birefringence properties of the PM fiber, the reference FBG will generally reflect two narrowband spectra, each having a central wavelength; one in the slow axis and one in the fast axis. By measuring the intensity of the reflected spectra in each axis and by tuning the fiber with a polarization controller, it is possible to adjust the fiber to a predetermined SOP. After having adjusted the PM fiber to a predetermined SOP, it is possible to accurately measure the optical properties of a second grating, or of another optical device, according to the predetermined SOP.
    Type: Application
    Filed: May 23, 2007
    Publication date: September 9, 2010
    Inventors: Changzun Zhou, Yunfei Zhao
  • Patent number: 7791723
    Abstract: Optical measurement method and systems employing a fixed polarizer are disclosed. In one embodiment, the method includes providing at least one optical detection system having a fixed polarizer having a first type polarization; providing a first target on a substrate and a second target on the substrate; optically measuring the first target and the second target using the at least one optical detection system with the first target being positioned at a right angle relative to the second target to obtain a first measurement with the first type polarization and a second measurement with a second type-equivalent polarization; and combining the first measurement and the second measurement to obtain the optical measurement.
    Type: Grant
    Filed: January 21, 2008
    Date of Patent: September 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: Charles N. Archie, Matthew J. Sendelbach, Shahin Zangooie
  • Patent number: 7791725
    Abstract: An inspection apparatus and method includes a light source which emits an ultraviolet laser beam, an illuminating unit having a polarization controller and an object lens for illuminating a specimen with light emitted from the light source and passed through the polarization controller and the object lens, a detection unit having a sensor for detecting light from the specimen illuminated by the illuminating unit, a processor which processes a signal output from the sensor so as to detect a defect on the specimen, and a display which displays information output from the processor. The processor processes an image formed from the signal output from the sensor in which the image is reduced in speckle pattern.
    Type: Grant
    Filed: November 14, 2008
    Date of Patent: September 7, 2010
    Assignee: Hitachi, Ltd.
    Inventors: Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto
  • Publication number: 20100220324
    Abstract: A apparatus for use in a borehole in an earth formation. The apparatus may include: an electromagnetic source; an anisotropic permittivity material, either natural or manufactured, receiving electromagnetic radiation from the electromagnetic source; and a detector for estimating the electromagnetic radiation transmitted through the anisotropic permittivity material as an indication of a parameter of interest. Also, a method of estimating a parameter of interest using the aforementioned apparatus.
    Type: Application
    Filed: April 12, 2010
    Publication date: September 2, 2010
    Applicant: BAKER HUGHES INCORPORATED
    Inventor: Sebastian Csutak
  • Patent number: 7777883
    Abstract: A system for reducing reflections of a beam of electromagnetic radiation from the opposite, back, surface of an anisotropic sample, including methodology for investigating the incident, front, surface thereof with electromagnetic radiation, and analyzing the data as if the sample is isotropic.
    Type: Grant
    Filed: June 10, 2008
    Date of Patent: August 17, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ronald A. Synowicki, Thomas E. Tiwald
  • Patent number: 7777879
    Abstract: An optical rotary encoder uses polarization difference imaging techniques to calculate an angle of orientation of a rotatable member. The optical rotary encoder includes a light source, a polarization sensor that has a polarizer and image sensing structure, and a polarizer disk fixed between to the rotatable and interposed between the light source and the polarization sensor.
    Type: Grant
    Filed: February 1, 2007
    Date of Patent: August 17, 2010
    Assignee: STMicroelectronics (Research & Development) Ltd.
    Inventors: Patrick Baxter, Jeffrey Raynor
  • Patent number: 7777880
    Abstract: Method and a polarimetric measurement device of a planar object carrying patterns repeated regularly and forming the lines of a grid. A first measurement is carried out at zero order, under an angle of incidence ?1 and for a first azimuthal angle ?1, a second measurement at least is carried out at zero order, under an angle of incidence ?2 and for a second azimuthal angle ?2, the polarization of the incident beam is modulated and the polarization of the reflected beam is analyzed for each measurement, theoretical polarimetric data is calculated for a model object of the real object, the model object including parameters adjustable using a formalism of electromagnetism. An iterative comparison of the measurements is conducted with the theoretical polarimetric data for different values of the adjustable parameters.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: August 17, 2010
    Assignees: Ecole Polytechnique, Centre National de la Recherche Scientifique - CNRS
    Inventors: Antonello De Martino, Bernard Drevillon
  • Patent number: 7777881
    Abstract: A laser device is equipped with an exciting optical system having a GaN semiconductor laser and a condensing lens; and a resonator having of a dichroic mirror and an output mirror, and a solid laser medium is disposed within the resonator. The solid laser medium is disposed in the resonator such that the c axis of a crystal is parallel to the x axis. The exciting optical system is disposed such that the direction in which excitation light emitted from the GaN semiconductor laser is polarized is parallel to the y axis, and is formed so as to absorb excitation light in the crystal axis perpendicular to the c axis. The direction in which the oscillation light emitted from the solid laser medium is polarized coincides with a direction parallel to the c-axis direction, and also coincides with a direction along the x axis.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: August 17, 2010
    Assignee: FUJIFILM Corporation
    Inventor: Shogo Yamazoe
  • Patent number: 7773211
    Abstract: A method and system as described herein provides for detecting certain anomalies in a wafer. According to one aspect, these anomalies relate to defects or stress that can lead to wafer breakage before, during or after further wafer processing. According to other aspects, the method includes passing polarized light through a wafer and analyzing the transmitted light for any changes in polarization. According to additional aspects, the method includes analyzing the entire wafer in one image capturing operation. According to still further aspects, the light passed through the wafer is below the bandgap for a material such as silicon that comprises the wafer, so that substantially all light will be transmitted through rather than absorbed or reflected by the material. According to still further aspects, the detection operation can be rapid and automatic, so that it can be easily included in an overall processing sequence.
    Type: Grant
    Filed: April 2, 2007
    Date of Patent: August 10, 2010
    Assignee: Applied Materials, Inc.
    Inventor: Peter G. Borden
  • Patent number: 7773219
    Abstract: A method and apparatus for measuring Mueller matrix parameters from scattered light. The apparatus is advantageous for use in countering bioterrorism by detecting information concerning airborne pathogens, particularly microorganism in aerosol form. The system provided is portable, more efficient, and less sensitive to wavelength changes. The method uses variation in retardation over wavelength as opposed to variation in retardation with time.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: August 10, 2010
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: Jozsef Czege, Burt V. Bronk
  • Publication number: 20100195101
    Abstract: An apparatus and method for determining the concentration of chiral molecules in a fluid includes a first polarizer configure to polarize light in substantially a first plane to provide initially polarized light. A second polarizer is capable of polarizing the initially polarized light in a plurality of planes, at least one of the plurality of planes being different from the first plane, to provide subsequently polarized light. One or more receivers are included for measuring an intensity of the subsequently polarized light in one or more of the plurality of planes.
    Type: Application
    Filed: February 2, 2010
    Publication date: August 5, 2010
    Applicant: DEKA Products Limited Partnership
    Inventor: Jacob W. Scarpaci
  • Patent number: 7768687
    Abstract: A photoelastic modulator, comprising a driving block and a driver transducer for perturbing said block in a predefined direction to establish a standing wave extending longitudinally in said block and hence perpendicularly to said predefined direction. The transducer is affixed to said block at two regions of the transducer mutually displaced in said predefined direction, to minimize the coupling of lateral perturbation perpendicular to the predefined direction. A recess or gap may be provided under the transducer.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: August 3, 2010
    Assignee: Endeavour Instruments Pty. Ltd
    Inventor: William Pui Ling