Abstract: Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on its inner surface during fabrication thereof and/or thereafter.

Abstract: Methods and apparatus for spectrum-based endpointing. An endpointing method includes selecting a reference spectrum. The reference spectrum is a spectrum of white light reflected from a film of interest on a first substrate and has a thickness greater than a target thickness. The reference spectrum is empirically selected for particular spectrum-based endpoint determination logic so that the target thickness is achieved when endpoint is called by applying the particular spectrum-based endpoint logic. The method includes obtaining a current spectrum. The current spectrum is a spectrum of white light reflected from a film of interest on a second substrate when the film of interest is being subjected to a polishing step and has a current thickness that is greater than the target thickness. The method includes determining, for the second substrate, when an endpoint of the polishing step has been achieved. The determining is based on the reference and current spectra.

Abstract: The present invention relates to an imaging device (1) for imaging microscopic or macroscopic objects (5). The imaging device (1) comprises a light source (2), an illumination beam path (6), an imaging beam path (7) and an imaging optical means (4), in particular in the form of an objective. The illumination beam path (6) extends from the light source (2) to the object (5). The imaging beam path (7) extends from the object (5) to a detector or a tube (3). At least one polarization means (9) is provided in the illumination beam path (6), which polarization means (9) can be used to convert the light of the light source to a prescribable polarization state. An analyzer means (10) is provided in the imaging beam path (7), with the analyzer means (10) and the polarization means (9) being able to be adjusted in relation to one another in such a manner that the light entering the imaging beam path (7) cannot pass through the analyzer means (10).

Abstract: Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a polarization sensor configured at least in part to couple to a reticle stage, wherein components of the reticle polarization sensor can be loaded and unloaded in the lithographic apparatus in the manner used for conventional reticles. In one configuration an active reticle tool includes a rotatable retarder configured to vary the retardation applied to polarized light received from a field point in the illumination system. In another configuration, a passive reticle tool is configured as an array of polarization sensor modules, where the amount of retardation applied to received light by fixed retarders varies according to position of the polarization sensor module. Accordingly, a plurality of retardation conditions for light received at a given field point can be measured, wherein a complete determination of a polarization state of the light at the given field point can be determined.

Abstract: Many suppliers claimed their products have been Tachyonized™ since the discovery and commercialization of Tachyonized™ products by Advanced Tachyon Technologies International. Genuine materials that have been Tachyonized have demonstrated a range of beneficial properties to biological organisms and processes. However, the market has been saturated with competitors making such claims without any foundation. Accordingly, the inventive process provides a simple and rapid test method to confirm the authenticity of Tachyonized materials.

Abstract: To provide a device for pasting a film exhibiting dichroism and a film exhibiting birefringence at an arbitrary angle with high precision. The device for pasting a film exhibiting dichroism and a film exhibiting birefringence at an arbitrary angle comprises a detector for detecting the angle of an axis where absorption is maximum or minimum in the plane of a film exhibiting dichroism, and a detector for detecting the slow axis in the plane of a film exhibiting birefringence. An angle between the film exhibiting dichroism and the film exhibiting birefringence is controlled using the detector for a film exhibiting dichroism and the detector for a film exhibiting birefringence.

Abstract: A surface inspection method inspects a surface of a wafer having a repeated pattern formed by double patterning. The method includes: a first step (S121) which applies an inspection light to a surface of a wafer; a second step (S122) which detects a diffracted light from the surface of the wafer to which the inspection light has been applied; and a third step (S123) which checks whether a defect is present in the repeated pattern according to the diffracted light detected in the second step. The second step detects a diffracted light corresponding to a pattern having a pitch multiplied by 2 with respect to the pitch of the repeated pattern.

Abstract: This invention provides a displacement measurement device, a displacement measurement method, and a thickness measurement device capable of easily ensuring a conjugate relationship between the light source and the diaphragm and capable of accurately measuring the change in distance with the testing target. In the displacement measurement device, the light from the laser diode is collected towards the pin hole of the diaphragm plate at the collective lens, and then sent to the objective lens through the pin hole. The light is reflected at a surface of work, and detected by a photodiode through the objective lens, the pin hole, the collective lens, and the half mirror. That is, the pin hole becomes a substantial light source, and becomes a diaphragm with respect to the incident light on the work. The spot diameter collected on the pin hole by the collective lens is greater than the diameter of the pin hole.

Abstract: Methods and apparatus for concentration determination using polarized light. The apparatus includes a first polarized light source having a first light source polarization axis and a second polarized light source having a second light source polarization axis generally perpendicular to the first light source polarization axis. Also, a first polarized light receiver having a first polarized light receiver polarization axis and configured to measure an intensity of light transmitted from the first light receiver polarizer and a second polarized light receiver having a second polarized light receiver polarization axis substantially perpendicular to the first light receiver polarization axis and configured to measure an intensity of light transmitted from the second light receiver polarizer, wherein the first and second light receiver polarization axes are generally +/?45 degrees relative to the first and second light source polarization axes.

Abstract: A recursive-reflective photoelectric sensor has a sensor main body and a recursive reflecting part. The sensor main body includes a light projecting part that projects first circularly polarized light and a light receiving part. When a mixture of the first circularly polarized light and second circularly polarized light which is differently polarized from the first circularly polarized light is incident to the light receiving part, only the second circularly polarized light is selectively passed. The recursive reflecting part reflects the first circularly polarized light by converting into reflected light that includes the second circularly polarized light.

Abstract: A register mark detecting apparatus detects a transparent register mark printed on a conveyed transparent web. The register mark detecting apparatus includes a light source, a parallel light flux irradiation optical system, a collective optical system, a knife-edge, and a light receiving element. The parallel light flux irradiation optical system converts a light flux from the light source into a parallel light flux to irradiate a transparent web with the parallel light flux. The collective optical system collects the light flux transmitted through the transparent web. The knife-edge is disposed near a back focus of the collective optical system. The knife-edge interrupts the light flux going straight in the transparent web and causes only the light flux refracted by being transmitted through the transparent register mark to pass by. The light receiving element receives the light flux transmitted through the knife-edge.

Abstract: A system based on the continuous measurement (20) of the diameter of a cylindrical object (1) moving, laid down, on a belt conveyor (10) allows dimensional compliance of the latter object to be checked. The measurement system (20) may be coupled with a sorting system based on ejection out of the conveyor (10) by projecting a gas through a transverse nozzle (42). By means of the system according to the invention, it is possible to continuously determine whether a nuclear fuel pellet (1), in particular after rectification (2), has to be rejected or not.

Abstract: A liquid crystal display (LCD) device testing apparatus that comprises a stage configured in an air-floating structure to feed a liquid crystal panel including combined upper and lower substrates, a backlight unit configured to include a light source for an emission of light disposed under the stage, a protective film formed to encompass and protect the light source, and a lower polarizing plate formed on the protective film to firstly polarize light emitted from the light source in a fixed axis direction, an upper polarizing plate separated from the upper surface of the liquid crystal panel by a fixed distance to secondarily polarize light from the liquid crystal panel in the fixed axis direction; and a charge couple device (CCD) camera disposed on the upper polarizing plate to scan an image on the liquid crystal panel using light secondarily polarized by the upper polarizing plate.

Abstract: A polarizing device including a plurality of polarized light radiating units for radiating polarized light rays each of which is polarized in a particular direction, a rotary reflector for receiving light rays emitted by the plurality of polarized light radiating units while being rotated and for outputting reflected light in a certain direction, and an analyzer disposed midway an optical path of the reflected light from the rotary reflector to set a polarization direction of the reflected light in a certain direction, wherein each of the polarized light radiating units includes a light source, a polarizer for setting a polarization direction of light from the light source, and a first compensator for compensating for a change in a state of polarization attributable to the rotary reflector, and the plurality of polarized light radiating units are disposed in a radial arrangement that is centered at the rotary reflector.

Abstract: A linearly polarized light is used to probe the detailed structure of a specimen. A reference light is also generated whose amplitude matches the amplitude of the diffracted light from the specimen. The reference light could either be generated from the light source itself as it is reflected off from a mirror through a light attenuator, or could as well be generated off from the reflected/transmitted light from/through the specimen passing through a light attenuator. The light from the specimen is retarded by a quarter-wave with respect to the reference light and the two lights are then passed through another polarizer/analyzer which allows the reference light and the diffracted light from the specimen to pass through while removing the background light. The diffracted light from the specimen, which carries the phase information of the underlying specimen's structure, is modulated by the reference light. The modulation is then recorded on an image sensor such as CCD.

Abstract: Provided are a layered film defect detection device capable of performing defect detection considering irregularities of optical performance of a phase difference layer constituting the layered film without requiring insertion of a new part into an optical path; and a layered film defect detection method. A defect detection device used for a layered film (11) having a polarizing plate (1) and a phase difference layer (separator (2)) includes: a light source (12) arranged at one side of the film surfaces of the layered film (11), an imaging unit (13) arranged on the other side of the film surface; an inspection polarization filter (15) arranged between the light source (12) and the imaging unit (13); a defect detection unit (14b) for detecting a defect existing on the polarizing plate (1) according to the captured image; and an optical axis adjusting unit (16) for adjusting a relative angle position of the polarization axis (L2) of a polarizing filter (15) and a polarization axis (L1) of a polarizer (2).

Abstract: An analog Mueller matrix data acquisition system (AMMS) acquiring middle-infrared Mueller (M) matrices of backscattering surfaces. The M-elements are measured by means of an active photopolarimetric sensor. The AMMS records nine M-elements simultaneously in groups of four modulo 2 incident continuous-wave CO2 laser beams—one incident beam is tuned to a fundamental molecular absorption cross-section by the aerosol of detection interest (analytic wavelength ?a) while the other beam is detuned off that resonance band (reference wavelength ?r) and in the closest vicinity to ?a. Accordingly, those ?M elements exhibiting susceptible behavior to the aerosol analyte, driven on-then-off its molecular vibrational resonance band, cues an identification event thus providing detection decision information.

Abstract: The non-destructive method is for measurement of recycled pulp or pulp immersed in suspension that enables real-time or on-line evaluation of particles in recycled pulp or pulp, especially for evaluation of particles including inks contained in recycled or de-inked pulp for their characteristics related to sizes, shapes, areas, amount, concentration, absorption coefficients, spectral characteristics such as color locus (L*, a*, b* values) and parameters, which are equivalent to an effective residual ink content (ERIC) or the ink elimination (IE) or detachment (ID), but independent of the size distribution of inks. The method can additionally be used for real-time or on-line recognizing inks from the other particles and distinguishing inks, which are already detached from or still attached to fibers and identification of the pulp fibers and fiber-based particles in recycled pulp or pulp from the non-fiber particles.

Abstract: In a method for describing, evaluating and improving optical polarization properties of a projection objective of a microlithographic projection exposure apparatus, the Jones or Stokes vectors are firstly determined at one or more points in the exit pupil of the projection objective. These are then described at least approximately as a linear superposition of predetermined vector modes with scalar superposition coefficients. The optical polarization properties can subsequently be evaluated on the basis of the superposition coefficients.

Abstract: An improved refractometer for automatically determining the refractive index of a test subject by using principles embodied in Brewster's Angle, the refractometer comprising a light source, a light detector, a subject mount for securing the test subject to the device, a positioning device to orient the light source and light detector to the subject such that the angles of the light source and light detector to the subject are substantially identical, a data gathering device to automatically retrieve relevant data regarding the angles of the light source and light detector to the subject and the light intensity of the reflected light, and a computational device to process the data using algorithms taking into account the principles embodied in Brewster's Angle and/or Fresnel Equations in order to arrive at the refractive index of the test subject.

Abstract: The present invention relates to a measuring method, etc., comprising a structure for accurately measuring optical characteristics such as PMD of an optical fiber. The measuring method is a technique for measuring polarization characteristic distributions along the longitudinal direction of the optical fiber as a measuring object by using BOCDA, and by propagating probe light and pumping light opposite in the optical fiber, BGS is generated at a plurality of respective measurement positions. Then, based on Brillouin gain fluctuations at the respective measurement positions, polarization characteristic distributions are calculated.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a polarization sensor configured at least in part to couple to a reticle stage, wherein components of the reticle polarization sensor can be loaded and unloaded in the lithographic apparatus in the manner used for conventional reticles. In one configuration an active reticle tool includes a rotatable retarder configured to vary the retardation applied to polarized light received from a field point in the illumination system. In another configuration, a passive reticle tool is configured as an array of polarization sensor modules, where the amount of retardation applied to received light by fixed retarders varies according to position of the polarization sensor module. Accordingly, a plurality of retardation conditions for light received at a given field point can be measured, wherein a complete determination of a polarization state of the light at the given field point can be determined.

Abstract: In a measurement method for measuring polarization characteristics in which an image of a mask pattern is projected onto an image plane, a first and second slit having a width less than or equal to the wavelength of a light source are displaced on the image plane and light passing through the first and second slit is detected to obtain a first and second light intensity distribution with respect to the direction of displacement of the first and second slit. The positions at which the first light intensity distribution takes a maximum and a minimum value are determined. An index value is calculated using the respective light intensities in the second light intensity distribution at positions corresponding to the determined maximum and minimum positions. Polarization characteristics corresponding to the calculated index value are obtained by using information expressing the relationship between the index value and the polarization characteristics.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: A device for optically detecting and distinguishing airborne liquid water droplets and ice crystals includes an illumination portion and a detection portion. The illumination portion outputs a circularly polarized illuminating beam. The detection portion receives circularly polarized backscattered light from moisture in the cloud, in response to the illuminating beam. The circularly polarized backscattered light is passed through a circular polarizer to convert it into linearly polarized backscattered light, which is split into two components. Each of the two components is optionally subject to further linear polarization to filter out any leakage-type orthogonal polarization. The two components are then optically detected and the resulting detection signals are used to calculate one or more parameters reflective of the presence or absence of airborne ice crystals and/or water droplets.

Abstract: An optical characteristic measuring device includes: an optical system (10), a light intensity information acquisition unit (40) for acquiring light intensity information on the light to be measured, and an operation process unit (60). The optical system (10) introduces the light emitted from a light source (12) to a sample (100) via a polarizer (22), a ½ wavelength plate (24), and a first ¼ wavelength plate (26), and introduces the light emitted from the sample (100) to a reception unit (14) via a second ¼ wavelength plate (34) and a detector (36). The ½ wavelength plate (24), the first and the second ¼ wavelength plate (26, 34) and the detector (36) are configured so as to be rotated.

Abstract: Stereoscopic display systems including a position-tracking system that determine the position of the stereoscopic eyewear worn by a viewer. An exemplary embodiment of the eyewear includes retro-reflective reflectors that are illuminated by an infrared illuminator proximate to or optically co-axial with a capturing camera. Suppression reflections from other reflective features in the vicinity may be achieved by control of the polarization of the infrared light.

Abstract: A defect inspection apparatus for inspecting a defect of a substrate as an object to be inspected comprises an illumination optical system for illuminating the substrate, a receiving optical system for receiving diffracted light from the substrate and a polarizing element provided in either one of the illumination optical system or the receiving optical system.

Abstract: The present disclosure relates to a method for measuring the maturity or cell wall thickening of a sample of cellulosic fiber. The method at least includes exposing the sample of fiber to polarized light, capturing one or more images of the sample through crossed polar lenses and a compensator plate so that the image(s) include interference colors from the sample; and conducting computer analysis on the captured image(s) to determine the maturity or degree of cell wall thickening of the cellulosic fiber by comparing the image(s) to reference color interference data.

Abstract: A sensor unit for measuring a response characteristic of a polarization rotation liquid crystal cell, includes a measurement light source which emits measurement light, a first polarization plate which has a first polarization direction and receives the measurement light from the measurement light source to output measurement light having the first polarization direction to a polarization rotation liquid crystal cell, a second polarization plate which has a second polarization direction and receives measurement light passed through the polarization rotation liquid crystal cell, a light receiving unit which receives measurement light passed through the second polarization plate, and a measurement unit which determines a response characteristic of the polarization rotation liquid crystal cell on the basis of a drive signal of the polarization rotation liquid crystal cell and the amount of measurement light received by the light receiving unit.

Abstract: A system for measuring an electric field vector includes an optical extractor configured to extract an optical signal having a spatial resolution of a nanometer level. The optical signal corresponds to incident light at a measuring position within an examination area of a surface of a specimen. The system further includes a polarization analyzer for analyzing a polarization characteristic of the optical signal extracted by the optical extractor, and an electric field vector determinator for determining at least a size and an orientation axis of an electric vector at the measuring position using the polarization characteristic analyzed by the polarization analyzer.

Abstract: An apparatus for detecting an edge of a transparent substrate includes a light source provided on a rear side of the edge of the transparent substrate, a first polarizer provided between the transparent substrate and the light source and arranged to convert light from the light source to linearly polarized light, a light receiving unit provided on a front side of the edge of the transparent substrate, and a second polarizer provided between the transparent substrate and the light receiving unit, and having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer.

Abstract: A method and apparatus for resolving both the angular (nx,ny) and spatial (x,y) dependence of the effective source coherence matrix for lithographic steppers and scanners is described. First an in-situ source metrology instrument is combined with in-situ polarization elements to create an in-situ source imaging polarizer or ISIP. The ISIP is loaded into a photolithographic exposure tool, aligned, and then exposed onto a suitable recording media or recording sensor. The recording sensor comprising either resist coated wafers or electronic sensors capture the image intensity at a multiplicity of different field points. The resulting measurements are entered into a computer program that reconstructs the source coherence matrix as a function of direction cosine at multiple field points. Alternative ISIP configurations are discussed in some detail. Applications of the ISIP include polarization source mapping for deep-UV and EUV lithography, process optimization, process monitoring, and chip manufacturing.

Abstract: Apparatus for measuring the differential group delay ?1 in an optical fiber connection. The apparatus comprises at the inlet to said connection, a generator (10) for generating a binary signal sequence at a data rate D and a first polarization controller (30) suitable for subjecting the binary signal of an incoming sequence to a first scan through polarization states; and at the outlet from the connection, a second polarization controller (60) suitable for subjecting the signal resulting from the outgoing sequence to a second scan through polarization states, independently of said first polarization scan, a differential group delay emulator (70) suitable for introducing a variable additional group delay ?2, and an analyzer device (90) suitable for detecting the equality ?1+?2=1/D in the resulting signal sequence.

Abstract: An apparatus for optical body analysis is built with an illumination and detection head, and an optical coupler. The illumination and detection head comprises a light source for illuminating a body portion to analyze through the optical coupler and a detector for receiving light diffusely reflected by the body portion. The optical coupler is mechanically decoupled from the illumination and detection head and is adapted to be in contact with an outer surface of the body portion while the contact between the optical coupler and the body portion minimally affects physical properties of the body portion. The apparatus may further comprise a position unit adapted to adjust the position of the illumination and detection head relative to the optical coupler so that the detector receives through the optical coupler light generated by the light source and diffusely reflected by the body portion.

Abstract: The present invention relates to a real-time PCR monitoring apparatus for real-time monitoring production of reaction product produced during the reaction while performing nucleic acid amplification such as PCR for various kinds of trace samples. Specifically, the present invention relates to an apparatus for real-time monitoring biochemical reaction for efficiently dividing interference between an excitation light and a fluorescence, which includes a polarizer, a polarizing beam splitter, a polarization converter and so on.

Abstract: A target substance-detecting apparatus comprises a target substance-detecting element comprising metal structures, a light irradiation section for irradiating the target substance-detecting element with a light, a light-polarizing section which polarizes the irradiating light and separates an output light emitted from the target substance-detecting element into a first polarized light and a second polarized light, first and second light-receiving sections for outputting first and second signals according to intensity of the first and second polarized lights, respectively; and a control section which determines peaks of absorbances of the first and second polarized lights by measuring the absorbances from the first and second signals respectively, and controls the target substance-detecting element so that the peak values of the first and second absorbances can be maximized and minimized respectively by controlling a incidence angle of formed by a vibration direction of the incident light and a main axis of th

Abstract: An instrument for measuring and analyzing surface plasmon resonance on a sensor surface has a polarized light source optically connected to the sensor surface by a plurality of optical elements, including in one embodiment an optical telescope that transfers light from a rotatable reflecting surface to the sensor surface. Selective positioning of a cylindrical lens into a first position within the path of light transforms collimated light to a rectangular wedge that is incident upon the sensor surface at numerous angles. In another embodiment, the light source is operated as a laser to excite fluorescence on the sensor surface and the fluorescence is selectively directed to a detector by appropriate optical elements positioned in specific configurations.

Abstract: Disclosed is a method and apparatus for determining the birefringence autocorrelation length of a fiber in a non-destructive manner. The PMD of an optical fiber is measured over a first optical spectrum. A Faraday rotation angle is measured over a second optical spectrum. The birefringence autocorrelation length is determined from the measuring of the PMD and the Faraday rotation angle.

Abstract: For detecting and storing information on optical properties analytical samples are digitally scanned with filters put in front of and behind the samples. A device for performing this method has means for putting filters on each side of the analytical samples. The filters may be polarizers, fluorescence filters etc.

Abstract: The invention provides a Stokes parameter measurement device and Stokes parameter measurement method that enable high-precision measurement. The Stokes parameter measurement device comprises a polarization splitting device which comprises an optical element formed of a birefringent crystal material and which, by means of the optical element, splits signal light to be measured into a plurality of polarized light beams and adjusts the polarization state of one or more among the plurality of polarized light beams, and a light-receiving portion for performing photoelectric conversion of an optical component of the signal light split by and emitted from the polarization splitting device.

Abstract: A molecular sensor (10) comprises a flow path (12) configured for flowing a solution (28) potentially containing a target molecule (26). A source of polarised light (16) is provided and a detector (18) arranged to receive light from the source after it has passed through the flow path. A sensor element (19) is provided comprising a scaffold moiety (20) with a high aspect ratio disposed, in use, within the flow path and a receptor moiety (24), for the target molecule, attached to the scaffold moiety. A method for sensing a target molecule in a flowing solution is also described.

Abstract: A rotation detection kit, comprising: a beam source; a receiver comprising at least one beam intensity sensor; a polariser device for location in the path of a beam emitted from the beam source and received by the beam sensor; and a modulator. The modulator is configured to modulate at least one of i) the beam source and ii) a beam emitted by the beam source to create a discretely varying polarisation orientation thereby defining first and at least second temporally spaced beam portions. The temporally spaced beam portions are incident on the polariser device and the beam sensor and have substantially identical profiles and at least an initial common propagation axis toward the polariser device.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a polarization sensor configured at least in part to couple to a reticle stage, wherein components of the reticle polarization sensor can be loaded and unloaded in the lithographic apparatus in the manner used for conventional reticles. In one configuration an active reticle tool includes a rotatable retarder configured to vary the retardation applied to polarized light received from a field point in the illumination system. In another configuration, a passive reticle tool is configured as an array of polarization sensor modules, where the amount of retardation applied to received light by fixed retarders varies according to position of the polarization sensor module. Accordingly, a plurality of retardation conditions for light received at a given field point can be measured, wherein a complete determination of a polarization state of the light at the given field point can be determined.

Abstract: An optical property measurement apparatus is equipped with an optical system unit that selectively places an opening section for passing illumination light, a microlens array for measuring wavefront aberration, and a polarization detection system for measuring a polarization state of the illumination light on an optical path of the illumination light. Accordingly an illumination shape and a size of an illumination optical system, wavefront aberration of a projection optical system and a polarization state of the illumination light can be measured together. Therefore, for example, even when exposure is performed with polarized illumination that is a type of modified illumination, highly-accurate exposure can be achieved by adjusting various optical systems based on the measurement results.

Abstract: A pattern inspection apparatus which compares images of regions, corresponding to each other, of patterns that are formed so as to be identical and judges that non-coincident portions in the images are defects. The pattern inspection apparatus is equipped with an image comparing section which plots individual pixels of an inspection subject image in a feature space and detects excessively deviated points in the feature space as defects. Defects can be detected correctly even when the same patterns in images have a brightness difference due to a difference in the thickness of a film formed on a wafer.

Abstract: A polarization modulation imaging ellipsometer capable of measuring ellipsometric parameters of the surface of a sample for each of the measured points with high precision and at high speed, which has a light source unit that emits light whose intensity periodically changes at a predetermined frequency; an incident-light optical unit having a collimator, a polarizer, and a photoelastic phase modulator which modulates light emitted from the light source unit an emitted-light optical unit having an analyzer which analyzes a polarization state of light that has been reflected from or transmitted through the sample and a two-dimensional detector which converts light received from the analyzer to an electrical signal and outputs the electrical signal; and a control/analysis unit which operates the light source unit and the photoelastic phase modulator at the same frequency, and calculates ellipsometric parameters of each of the measured points.

Abstract: A polarimetry technique for measuring optical activity that is particularly suited for high throughput screening employs a chip or substrate (22) having one or more microfluidic channels (26) formed therein. A polarized laser beam (14) is directed onto optically active samples that are disposed in the channels. The incident laser beam interacts with the optically active molecules in the sample, which slightly alter the polarization or the loser beam as it passes multiple times through the sample. Interference fringe patters (28) are generated by the interaction of the laser beam with the sample and the channel walls. A photodetector (34) is positioned to receive the interference fringe patterns and generate an output signal that is input to a computer or other analyzer (38) for analyzing the signal and determining the rotation of plane polarized light by optically active material in the channel from polarization rotation calculations.

Abstract: An apparatus and method for determining the concentration of chiral molecules in a fluid includes a first polarizer configure to polarize light in substantially a first plane to provide initially polarized light. A second polarizer is capable of polarizing the initially polarized light in a plurality of planes, at least one of the plurality of planes being different from the first plane, to provide subsequently polarized light. One or more receivers are included for measuring an intensity of the subsequently polarized light in one or more of the plurality of planes.