By Polarized Light Examination Patents (Class 356/364)
  • Patent number: 7652473
    Abstract: Providing: quickly brining a vapor cell 119 to a desired temperature when retaining the heat of the vapor cell 119 to enhance the magnetic field detection performance of an optically pumped magnetometer; preventing adherence of atoms in the vapor cell 119 to a laser irradiation light passing-through part of the vapor cell 119; downsizing the periphery of the vapor cell 119; and suppressing the effect of a magnetic field from a heater used to retain the heat of the vapor cell 119.
    Type: Grant
    Filed: June 12, 2008
    Date of Patent: January 26, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventor: Ryuzou Kawabata
  • Publication number: 20100014083
    Abstract: An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction.
    Type: Application
    Filed: July 17, 2009
    Publication date: January 21, 2010
    Inventors: Takeo UENO, Hiroyuki Nakano, Yasuhiro Yoshitake
  • Publication number: 20100007881
    Abstract: The present invention provides a scatterfield microscopical measuring method and apparatus, which combine scatterfield detecting technology into microscopical device so that the microscopical device is capable of measuring the sample whose dimension is under the limit of optical diffraction. The scatterfield microscopical measuring apparatus is capable of being controlled to focus uniform and collimated light beam on back focal plane of an objective lens disposed above the sample. By changing the position of the focus position on the back focal plane, it is capable of being adjusted to change the incident angle with respect to the sample.
    Type: Application
    Filed: August 6, 2008
    Publication date: January 14, 2010
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Deh-Ming Shyu, Sen-Yih Chou, Yi-Sha Ku
  • Publication number: 20100002923
    Abstract: A device includes an incident arm, a detection arm, a sample stage, and an image processing computer. The incident arm includes a light source and a first polarizing element, and is disposed on one side of the sample stage. The detection arm includes a second polarizing element and a photoelectric detector, and is disposed on a light-detection path. The photoelectric detector is connected to the computer. The device further includes a device for adjusting polarization angles of the first and second polarizing elements. A method includes: illuminating a sample surface using linearly polarized light with a certain polarization angle; detecting outgoing polarized light by a photoelectric detector; adjusting polarization angles of the incident and detected polarized light, and repeating the above two steps to obtain a series of polarized images, each image corresponding to incident and detected polarization angles; and computer processing the obtained images to obtain sample information.
    Type: Application
    Filed: December 18, 2007
    Publication date: January 7, 2010
    Applicant: GRADUATE SCHOOL AT SHENZHEN, TSINGHUA UNIVERSITY
    Inventors: Xiaoyu Jiang, Hui Ma, Yonghong He
  • Publication number: 20100002230
    Abstract: An apparatus for measuring light proceeding backward to which a plasmonic device is applied is disclosed. A disclosed optical apparatus according to the present invention includes: a plasmonic device including a thin metal film having apertures having a nano-sized diameter, disposed close to an object, and generating a near field in front of the apertures; a polarization modulation unit for adjusting the polarized state of light entering through the apertures of the plasmonic device, and making the light reflecting the strength of the near field proceed backward through the nano-apertures of the plasmonic device, and a measuring unit detecting properties of the object from the light proceeding backward from the polarization modulation unit.
    Type: Application
    Filed: December 1, 2008
    Publication date: January 7, 2010
    Applicant: Industry-Academic Cooperation Foundation, Yonsei University
    Inventor: Jae Won Hahn
  • Publication number: 20090323064
    Abstract: A system for measuring linear or circular diattenuation in an optical element includes a sample rotation stage for securing an optical element sample; a light source module for generating a source light beam and a detector module. The light source module and detector module are arranged with the sample rotation stage between them, thereby permitting the source light beam to propagate through a sample that may be secured in the sample stage and to the detector module. Linear motion control of the light source module and the detector module, as well as tilt control of the light source module, the sample rotation stage and the detector module is provided, thereby to facilitate detection, by the detector module of the modulated light intensity information corresponding to a diattenuation characteristic of the optical sample secured in the sample stage.
    Type: Application
    Filed: May 1, 2007
    Publication date: December 31, 2009
    Applicant: HINDS INSTRUMENTS, INC.
    Inventor: Baoliang Wang
  • Publication number: 20090323060
    Abstract: The invention relates to an optical spectral sensor for determining the spectral information of incident light, in particular in the visible and infrared spectral range, with at least one optoelectronic semiconductor arrangement and at least one metal film, which is surrounded by a dielectric, wherein the metal film has a periodic pattern, wherein the at least one optoelectronic semiconductor arrangement and the at least one patterned metal film are arranged in such a way that light to be detected initially passes through the patterned metal film and then impinges on the optoelectronic semiconductor arrangement, wherein the optical spectral sensor is formed in such a way that the spectral sensitivity is determined essentially by the optical properties of the patterned metal film.
    Type: Application
    Filed: July 31, 2007
    Publication date: December 31, 2009
    Inventor: Dietmar Knipp
  • Patent number: 7639348
    Abstract: The stress of a sample semiconductor wafer is detected with high accuracy in the form of an absolute value without rotating the sample or the entire optical system. A laser light R is subjected to photoelastic modulation in a PEM 6 to generate a birefringence phase difference and then it is passed through first and second quarter wavelength plates and passes through a semiconductor wafer D having residual stress. When it is passed through a test piece, the direction of the stress of the test piece is detected when the angle between the laser light R and a linear polarization light is 0 and 90 degrees. The transmitted electric signal is delivered to an analog/digital converter 16, and the signal is inputted to a signal processor thus generating transmission signal data. The signal processor reads out the stored reference signal data and the transmission signal data and calculates a reference birefringence phase difference and the absolute values of the birefringence phase difference.
    Type: Grant
    Filed: March 5, 2004
    Date of Patent: December 29, 2009
    Assignee: Tokyo Denki University
    Inventors: Yasushi Niitsu, Kensuke Ichinose, Kenji Gomi
  • Patent number: 7639360
    Abstract: An examining device adapted to examining a transmittance of a display panel is provided. The examining device includes a light source, a first polarizer, a photodetector, a second polarizer, at least one first reflector and at least one second reflector. The light source and the photodetector are respectively disposed on both sides of the display panel. The second polarizer is disposed between the display panel and the photodetector. The first reflector is disposed between the display panel and the second polarizer. The second reflector is disposed between the display panel and the first polarizer. Light emitting from the light source successively passes via the first polarizer, the display panel, the first reflector, the display panel, the second reflector, the display panel, the second polarizer and then emits into the photodetector.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: December 29, 2009
    Assignee: Chunghwa Picture Tubes, Ltd.
    Inventors: Chun-Wei Wu, Cheng-Chung Hu, Chiu-Jung Huang, Chao-Song Chang, Huan-Ting Li
  • Publication number: 20090316152
    Abstract: A spectrometric analyzing device is capable of analyzing a thin film with high accuracy by using light having an arbitrary wavelength, such as not only infrared light but also visible light, ultraviolet light and X-ray, and using whatever refractive index of a supporting member of the thin film. A spectrometric analyzing device comprises a light source (1), a polarizing filter (2), a detection unit (3), a regression operation unit (4) and an absorbance spectrum calculation unit (5). The light source (1) emits light at n different angles of incidence (?n) to a measurement portion. The polarizing filter (2) shields an s-polarized component. The detection unit (3) detects transmitted spectra (S). The regression operation unit (4) uses the transmitted spectra (S) and a mixing ratio (R) to obtain an in-plane mode spectrum (sip) and an out-of-plane mode spectrum (sop) through a regression analysis.
    Type: Application
    Filed: December 21, 2007
    Publication date: December 24, 2009
    Inventor: Takeshi Hasegawa
  • Publication number: 20090318784
    Abstract: In the application, the change in the magnetic state of the haemoglobin caused by the malarial infection is exploited by detecting suitable properties of haemozoin which are dependent on the application of a magnetic field. FIG. 1 shows apparatus, shown generally at (10), for performing magneto-optical detection using photo-acoustic techniques. The apparatus (10) comprises a light source (12), producing a beam of optical radiation (14) which passes through a polariser (16), a variable LC retarder (0 or 180° retardance) (18), and a (chopper 20), before impinging on a sample (22) held in a sample holder (24). The sample is in direct contact with an acoustic detector (26). The apparatus (10) further comprises an electromagnet (28), and a Gauss meter (30) can be utilised to measure the applied magnetic field strength.
    Type: Application
    Filed: November 9, 2007
    Publication date: December 24, 2009
    Inventors: David Michael Newman, John Heptinstall
  • Publication number: 20090316132
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Application
    Filed: August 25, 2009
    Publication date: December 24, 2009
    Applicant: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Publication number: 20090316153
    Abstract: A method and apparatus for improving the accuracy of in-band OSNR measurements using a conventional polarization extinction or polarization-nulling method. In particular, the severe degradations of the polarization extinction that result from slow and fast polarization fluctuations in the optical signal components during the in-band OSNR measurement are substantially mitigated by rapidly and/or randomly changing the state of polarization prior to conventional polarization control and filtering.
    Type: Application
    Filed: June 16, 2009
    Publication date: December 24, 2009
    Applicant: Acterna LLC
    Inventor: Fred L. HEISMANN
  • Patent number: 7633633
    Abstract: Utilizing frequency-dependent diffraction (also referred to as dispersion) to determine the angular position of a retro-reflective object within a scanning space. The technique involves dispersing an electromagnetic beam into a scanning space by frequency. If a retro-reflective object is located within the scanning space, the object will retro-reflect a portion of the dispersed beam having a frequency that is associated with the angular position of the retro-reflective object within the scanning space. The frequency of the retro-reflected beam is used to determine the angular position of the retro-reflective object within the scanning space. When a second beam is dispersed into the scanning space and a portion of the second beam is retro-reflected in the manner just described, a second angular position of the retro-reflective object can be found. Coordinates of the retro-reflective object are determinable by triangulation using the two angular positions.
    Type: Grant
    Filed: August 29, 2003
    Date of Patent: December 15, 2009
    Assignee: Avago Technologies ECBU IP (Singapore) Pte. Ltd.
    Inventors: Douglas M. Baney, Marshall T. DePue, Tong Xie
  • Publication number: 20090303574
    Abstract: The invention relates to a broadband Terahertz (THz) radiation generation and detection system and method. THz radiation is generated by optical rectification of an ultrashort pump pulse of a first wavelength having a duration in the picosecond- or sub-picosecond range in a first nonlinear optical crystal. The THz radiation is detected by electro-optic sampling or another appropriate method of a probe beam having a second wavelength in a second nonlinear optical crystal. According to the invention, at least one of the following conditions is fulfilled: a) the first wavelength is different from the second wavelength; b) the material of the first nonlinear optical crystal is different from the material of the second nonlinear optical crystal.
    Type: Application
    Filed: April 18, 2007
    Publication date: December 10, 2009
    Applicant: ETH ZURICH
    Inventors: Peter Gunter, Arno Schneider
  • Patent number: 7630075
    Abstract: A particle discriminator using circularly polarized light projected through a channel having target particles. Light may be propagated through the channel, with some light scattered separated into forward angle scattered light, small angle scattered light and unscattered light. The forward angle scattered light may be linearly polarized and detected. The small angle scattered light may be linearly polarized in a direction orthogonal to the direction of the polarization of the forward angle scattered light, and at least both these kinds of light may be detected. Data from these detected kinds of light may be analyzed to discriminate particles from one another.
    Type: Grant
    Filed: October 31, 2006
    Date of Patent: December 8, 2009
    Assignee: Honeywell International Inc.
    Inventor: Bernard S. Fritz
  • Publication number: 20090296744
    Abstract: Enantiomers are characterized, identified, synthesized and/or modified with a shaped laser pulse. In another aspect of the present invention, binary shaping and circular polarization are employed with a laser pulse. A further aspect of the present invention provides a quarter-wave plate in combination with one or more pulse shapers.
    Type: Application
    Filed: November 29, 2006
    Publication date: December 3, 2009
    Applicant: BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY
    Inventors: Marcos Dantus, Vadim V. Lozovoy
  • Patent number: 7626689
    Abstract: A method for analyzing the imaging behavior of a first optical imaging element, in which an object is imaged by a second optical imaging element and light in the image plane is detected in a spatially resolved manner. The two optical imaging elements differ in at least one imaging characteristic. Values are determined for intensity and at least one second characteristic and then stored in image points, and processed in an emulation step. An emulation image is produced, taking into account the influence of the second characteristic. A series of images is produced by dividing a range of values of the second characteristic into subdomains, associating an image with each subdomain, and associating the corresponding intensity value with the image points of each image, in case the value of the second characteristic, associated with the image point, falls in the subdomain associated with the respective image.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: December 1, 2009
    Assignee: Carl Zeiss SMS GmbH
    Inventors: Ulrich Stroessner, Joern Greif-Wuestenbecker
  • Publication number: 20090288754
    Abstract: When inspecting a defect of a layered film having a polarizer by using an inspection polarizing filter or an inspection phase difference filter, members to be arranged in the imaging optical path are arranged in an appropriate order. A defect detection method of a layered film (11) having a polarizing plate (1) and an optical compensation layer includes: a step of applying light from a light source arranged at the polarizing plate layer side of the film surface of the layered film (11); a step of imaging a transmitting light image of the layered film (11) by an imaging unit (12) arranged at the optical compensation layer side of the film surface; and a defect detection step for detecting a defect existing on the layered film (11) according to the transmitting light image captured by the imaging unit (12).
    Type: Application
    Filed: January 10, 2007
    Publication date: November 26, 2009
    Applicant: NITTO DENKO CORPORATION
    Inventors: Takamasa Kobayashi, Michihiro Hagiwara, Yuuki Yano, Kouji Shizen
  • Patent number: 7623236
    Abstract: To effectively reduce a measurement error in a parameter indicating a state of spectroscopic polarization generated by variations in retardation of a retarder due to a temperature change or other factors, while holding a variety of properties of a channeled spectroscopic polarimeter. By noting that reference phase functions ?1(?) and ?2(?) are obtained by solving an equation from each vibration component contained in a channeled spectrum P(?), the reference phase functions ?1(?) and ?2(?) are calibrated concurrently with measurement of spectrometric Stokes parameters S0(?), S1(?), S2(?), and S3(?).
    Type: Grant
    Filed: January 11, 2006
    Date of Patent: November 24, 2009
    Assignees: National University Corporation Hokkaido University, OMRON Corporation
    Inventors: Kazuhiko Oka, Atsushi Taniguchi, Hiroshi Okabe
  • Patent number: 7623238
    Abstract: A system and method which reduces change in locus of a beam of electromagnetic radiation which otherwise result from vibrations caused by operation of a motor which controls the rotation of an element which affects the beam.
    Type: Grant
    Filed: June 2, 2007
    Date of Patent: November 24, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ping He, Martin M. Liphardt
  • Patent number: 7619747
    Abstract: An analyzer plate positioned between a projection system and a radiation sensor is illuminated by a projected beam of radiation. The analyzer plate includes two crossing regions, each of which transmits radiation with a different polarization direction. The beam of projection radiation is patterned without influencing the polarization of the beam. By patterning the beam of projection radiation so that one region receives more radiation than the other region, the radiation sensor is given polarization selectivity.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: November 17, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof
  • Patent number: 7619738
    Abstract: A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure, detecting light received from the marker structure at a sensor, and determining alignment information from the detected light, the alignment information comprising information relating a position of the substrate to the sensor.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: November 17, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Henry Megens, Maurits Van Der Schaar
  • Patent number: 7620276
    Abstract: A grating-based biosensor is disclosed where the biosensor is constructed and arranged such that the grating lines of the sensor align with an optical axis of a birefringent substrate, so as to improve resonance peak uniformity. Methods of manufacturing biosensors to provide alignment of the grating lines with the optical axes of a birefringent substrate are also disclosed. One embodiment uses a grating master wafer to form a grating on a continuous web of substrate material. The grating master wafer is rotated relative to the web until the lines of the grating in the master wafer are in substantial alignment with the optical axis of the web. A UV curable material is applied to the wafer and cured in place to form the grating on the surface of the substrate web. With a web of some preferred materials, such as PET film, one need only determine the optical axis orientation once for a given web since the optical axis orientation is essentially constant along the length of the web.
    Type: Grant
    Filed: October 31, 2006
    Date of Patent: November 17, 2009
    Assignee: SRU Biosystems, Inc.
    Inventor: Stephen C. Schulz
  • Publication number: 20090279088
    Abstract: Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems.
    Type: Application
    Filed: July 20, 2009
    Publication date: November 12, 2009
    Applicant: KLA-TENCOR TECHONOLOGIES CORPORATION
    Inventors: John Fielden, Gary Janik, Shing Lee
  • Patent number: 7612880
    Abstract: A method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate an average degree of polarization, a weighted average degree of polarization, a degree of polarization map, a degree of polarization surface. Also, a method, apparatus, and computer program product for identifying features in a sample by analyzing Mueller matrices to calculate depolarization relative to a retardance axis and/or a diattentuation axis, and to calculate a ratio of diattenuation to polarizance or ratios of row and column magnitudes. Also, a method for retinal polarimetry, including a non-depolarizing light tube configured for insertion into the eye.
    Type: Grant
    Filed: August 3, 2004
    Date of Patent: November 3, 2009
    Assignee: Arizona Board of Regents on Behalf of the University of Arizona
    Inventor: Russell Chipman
  • Patent number: 7612879
    Abstract: The present invention relates to a method and a device for three-dimensionally determining the refractive index and, if necessary, the layer thickness of transparent or partially transparent layers in which the layer (1) is irradiated at different angles of incidence (5) with polarised light, and variations in the polarisation of the light are measured and evaluated as the light passes through the layer (1). The method is characterized in that the measurement is carried out through an immersion medium (3) between which the layer (1) is inserted. A highly accurate determination of the refractive index of anisotropic thin layers in all three spatial directions is made possible by this method.
    Type: Grant
    Filed: June 1, 2004
    Date of Patent: November 3, 2009
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.
    Inventors: Joachim Stumpe, Christoph Jung, Olga Kulikovska
  • Publication number: 20090262348
    Abstract: A method of modifying light is disclosed and includes: providing an optical element having an oriented polymer network of a silicone (meth)acrylate copolymer and exhibiting a first phase and a second phase, the first phase and the second phase being chemically connected and having different refractive indices, the first phase being continuous, and the second phase comprising a plurality of structures dispersed within the first phase; illuminating the optical element with light from a light source; and detecting polarized or directionally diffused light transmitted by the optical element. Optical elements including the polymer network and a variety of additional layers are also disclosed, as are optical devices such as prisms, display panels, lenses, and the like.
    Type: Application
    Filed: October 31, 2007
    Publication date: October 22, 2009
    Inventors: Mieczyslaw H. Mazurek, Robert L. Brott, David J. Kinning, Yufeng Liu, John E. Potts, Kevin R. Schaffer, Audrey A. Sherman, Wendi J. Winkler
  • Publication number: 20090262349
    Abstract: A device for measuring two components of an electromagnetic field in an analysis zone includes a light source for sending a polarized light beam into a polarization-maintaining optical fiber. The beam is directed along one axis of the fiber. An isotropic electrooptic material is placed in the zone for receiving the beam from the optical fiber via a substantially quarter-wave plate, which has its axes oriented at an angle of substantially 45° to the axes of the optical fiber and for sending a beam into the fiber. The plate is slightly detuned in regard to its characteristics or its orientation. The device further includes a phase-shifter for phase-shifting the beam sent into the fiber, wherein the phase-shifter is set so as to impose a phase shift equal and opposite to that imposed by the fiber and mechanism for analyzing the orientation and ellipticity of the wave exiting the phase-shifter.
    Type: Application
    Filed: June 15, 2007
    Publication date: October 22, 2009
    Applicants: INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE, UNIVERSITE DE SAVOIE
    Inventors: Lionel Duvillaret, Gwenael Gaborit
  • Publication number: 20090257058
    Abstract: A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.
    Type: Application
    Filed: March 31, 2009
    Publication date: October 15, 2009
    Inventors: Yuta URANO, Toshiyuki Nakao, Yoshimasa Oshima
  • Publication number: 20090244537
    Abstract: An optical system includes a light sending section that sends light to an object having a scattering medium and a lower medium positioned below the scattering medium, where the scattering medium scatters light and the lower medium feeds back polarized light in response to light incident thereon, a light receiving section that receives (i) light that is sent from the light sending section and then scattered by the scattering medium and (ii) light from the lower medium, and a thickness calculating section that calculates a thickness of the scattering medium, by referring to at least one of a non-polarization component and a polarization component of the light received by the light receiving section.
    Type: Application
    Filed: March 31, 2009
    Publication date: October 1, 2009
    Applicant: FUJIFILM Corporation
    Inventors: Takashi Murooka, Hideyasu Ishibashi
  • Patent number: 7595885
    Abstract: A process monitoring system has a process chamber configured to hold an object to be processed, an illumination source configured to emit a light to the object, a polarizer configured to polarize the light, a monitor window having a birefringent material and provided on the process chamber to propagate the light, direction adjusting equipment configured to adjust a relationship between a polarization plane of the light and a direction of an optic axis of the monitor window, and a monitoring information processor configured to detect the light reflected from the object.
    Type: Grant
    Filed: January 31, 2008
    Date of Patent: September 29, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takayuki Sakai, Masanobu Kibe, Tokuhisa Ohiwa
  • Publication number: 20090236542
    Abstract: This invention relates to methods of determining physical characteristics of and identifying and locating defects in substrates, such as semiconductor wafers, optical thin films, display screens and the like. The method involve use of PC scanners to image the substrate. In particular PC scanners used in transmission mode imaging allow information about the volume of the substrate to be determined. The method allows determination of characteristics such as layer thickness, curvature and optical constants through use of interferometery techniques and bifrefringence and strain through use of polarised imaging. The methods also relate to stimulating luminescence in the substrate, for example photoluminescence and electroluminescence and scanning the stimulated substrate for luminescence mapping.
    Type: Application
    Filed: June 1, 2007
    Publication date: September 24, 2009
    Applicant: QINETIQ LIMITED
    Inventor: David John Wallis
  • Publication number: 20090237661
    Abstract: A laser device is equipped with an exciting optical system having a GaN semiconductor laser and a condensing lens; and a resonator having of a dichroic mirror and an output mirror, and a solid laser medium is disposed within the resonator. The solid laser medium is disposed in the resonator such that the c axis of a crystal is parallel to the x axis. The exciting optical system is disposed such that the direction in which excitation light emitted from the GaN semiconductor laser is polarized is parallel to the y axis, and is formed so as to absorb excitation light in the crystal axis perpendicular to the c axis. The direction in which the oscillation light emitted from the solid laser medium is polarized coincides with a direction parallel to the c-axis direction, and also coincides with a direction along the x axis.
    Type: Application
    Filed: March 11, 2009
    Publication date: September 24, 2009
    Applicant: FUJIFILM CORPORATION
    Inventor: Shogo YAMAZOE
  • Publication number: 20090237662
    Abstract: This disclosure relates to a real-time, hybrid amplitude-time division polarimetric imaging camera used to derive and calculate Stokes parameters of input light.
    Type: Application
    Filed: March 13, 2009
    Publication date: September 24, 2009
    Inventors: TALLIS Y. CHANG, Jian Ma, Bing Wen, Dong-Feng Gu, Sung J. Choi, Bruce K. Winker
  • Publication number: 20090237660
    Abstract: A reading machine includes an image input device including a lens and a polarizer disposed over the lens, a flash and a second polarizer disposed over the flash. The image input device also includes a computing device coupled to the image input device for capturing images, the computing device, including a processor to execute instructions and a computer program product residing on a computer readable medium, the computer program product comprising instructions for causing the processor to process the captured images to recognize features in the captured images.
    Type: Application
    Filed: March 20, 2008
    Publication date: September 24, 2009
    Inventors: Paul Albrecht, Raymond C. Kurzweil, Lucy Gibson, Rafael Maya Zetune, Lev Lvovsky
  • Patent number: 7593102
    Abstract: A polarization evaluation mask for evaluating the state of polarization of an illumination light in exposure equipment comprises a transparent substrate; a light interceptor formed in said transparent substrate and having a plurality of fine apertures; a plurality of polarizers formed to cover said plurality of fine apertures and having orientation angles of the transmissive polarization differing in increments of certain angle; and a plurality of quarter-wave plates arranged upstream of said illumination light than said polarizers and formed as superimposed on said polarizers to cover said fine apertures, and having orientation angles of the fast axis differing in increments of certain angle. Each of said plurality of fine apertures has a different combination of said orientation angle of said polarizer and said orientation angle of said quarter-wave plate.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: September 22, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hiroshi Nomura
  • Publication number: 20090231582
    Abstract: The invention relates to a positioning method for determining the position and orientation of a mobile unit having a receiver (3?, whereby the receiver (3) is detected by a scanner (2), said scanner (2? determining at least the distance and a direction in relation to the receiver (3). The radiation emitted by the sensor is detected by the receiver (3? and the direction of incidence of radiation and the direction of incidence of radiation in relation to an axis of reception are derived while an offset of the incident radiation in relation to the axis of reception (EA) is determined. Position and orientation of the unit are derived from at least the distance, the direction in relation to the receiver (3?), the offset and the direction of incidence as the position information and the unit is optionally controlled via the optical connection (OV).
    Type: Application
    Filed: March 3, 2006
    Publication date: September 17, 2009
    Applicant: LEICA GEOSYSTEMS AG
    Inventors: Beat Aebischer, Bernhard Braunecker, Peter Kipfer
  • Patent number: 7586605
    Abstract: A method for testing a polarization state of polarized light includes forming a test photosensitive film on a test wafer, the test wafer having a flat surface and a grid pattern in which reflectance changes depending on a polarization direction of the polarized light, exposing the test photosensitive film to the polarized light, measuring a change of a property of the test photosensitive film caused by the polarized light, and determining a polarization state of the polarized light, based on the change.
    Type: Grant
    Filed: March 27, 2006
    Date of Patent: September 8, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kazuya Fukuhara
  • Patent number: 7586083
    Abstract: Presented herein is a non-contact torque sensing apparatus and method for measuring the instantaneous torque, or torsional stress/strain, transmitted through an elongated power transmission member such as a rotatable shaft. Polarized light is directed along a measurement light path in a cavity of a shaft where it intercepts a polarizing filter. The polarizing filter is operable to alter the polarization angle of the light according to torsional twisting of the shaft. A measurement device measures the change in the polarization angle of the light to obtain the shaft twist angle. Shaft torque is then calculated from the twist angle.
    Type: Grant
    Filed: December 7, 2007
    Date of Patent: September 8, 2009
    Assignee: GM Global Technology Operations, Inc.
    Inventors: Hamid Vahabzadeh, Ayoub Chakari
  • Patent number: 7586607
    Abstract: A system and method for inspection a substrate for various defects is herein disclosed. Polarizing filters are used to improve the contrast of polarization dependent defects such as defocus and exposure defects, while retaining the same sensitivity to polarization independent defects, such as pits, voids, cracks, chips and particles.
    Type: Grant
    Filed: February 23, 2007
    Date of Patent: September 8, 2009
    Assignee: Rudolph Technologies, Inc.
    Inventor: Gang Sun
  • Patent number: 7586606
    Abstract: A near-field polarized-light measurement apparatus 10 comprises a near-field probe 14, an analyzer 18, a detector 22, and an analyzer-rotating unit 20. The near-field probe 14 has at a tip thereof an opening smaller than the wavelength of light used for measurement and generates linearly polarized near-field light from the opening and irradiates a sample with the near-field light. The detector 22 detects light transmitted through the sample via the analyzer 18. The analyzer-rotating unit 20 rotates the analyzer 18 about an optical axis to vary the angle of a transmission axis thereof. And optical rotation of the sample is measured by rotating the analyzer 18 with the analyzer-rotating unit 20.
    Type: Grant
    Filed: April 5, 2006
    Date of Patent: September 8, 2009
    Assignee: JASCO Corporation
    Inventors: Tsutomu Inoue, Fuminori Sato, Yoshihito Narita, Mutsumi Senuma
  • Patent number: 7582857
    Abstract: A polarimetric imaging system employs a pixel pitch matched filter for use within, for example, a 2 by 2 pixel neighborhood, in which one pixel samples the scene via a 0 degree polarization filter and a second pixel samples the scene via a 45 degree polarization filter. The remaining two pixels record the intensity of the light within the 2 by 2 neighborhoods. The polarization filters employ organic materials such as polymers or metallic materials that are patterned and etched using reactive ion etching (RIE) or other appropriate etching technique in order to create 14 micron or smaller circular (or square) periodic structures that are patterned into polarization thin films that are deposited on an imaging sensor that includes a processor that computes from the polarization-filtered inputs the first three Stokes parameters in real-time.
    Type: Grant
    Filed: April 18, 2006
    Date of Patent: September 1, 2009
    Assignee: The Trustees of The University of Pennsylvania
    Inventors: Viktor Gruev, Jan Van der Spiegel, Nader Engheta
  • Patent number: 7583367
    Abstract: It is possible to observe a state of stress applied to a region around a cavity replicating a body cavity such as a blood vessel and the like in a three-dimensional model. In catheter insert simulation, when stress is applied to the region around the cavity in the three-dimensional model, it is possible to observe the catheter state together with a photoelastic effect corresponding to the stress state in the surrounding region caused by the catheter.
    Type: Grant
    Filed: May 2, 2006
    Date of Patent: September 1, 2009
    Assignee: National University Corporation Nagoya University
    Inventors: Seiichi Ikeda, Toshio Fukuda, Ikuo Takahashi
  • Publication number: 20090213375
    Abstract: Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change: in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
    Type: Application
    Filed: March 13, 2009
    Publication date: August 27, 2009
    Inventor: Hamphrey J. Maris
  • Publication number: 20090213374
    Abstract: An optical characteristic measuring apparatus includes an optical system 10 including first and second carrier retarders 24 and 32 having the retardations being known and differing from each other. The optical characteristic measuring apparatus performs: a spectrum extraction process of extracting a plurality of spectral peaks from a frequency spectrum obtained by analyzing a light intensity signal detected by light-receiving/spectroscopic means; and an optical characteristic element calculation process of calculating an optical characteristic element representing optical characteristics of a measurement target based on the spectral peaks and the retardations of the first and second carrier retarders.
    Type: Application
    Filed: March 17, 2006
    Publication date: August 27, 2009
    Inventors: Yukitoshi Otani, Toshitaka Wakayama
  • Publication number: 20090213376
    Abstract: Optical equipment for detecting beams emitted from a sample by irradiating the sample with linear polarization according to an aspect of the present invention includes a wavelength-independent optical path division element arranged at a position of coupling of a illumination optical path of the linear polarization and a detection optical path of the beams, and the linear polarization is reflected by the interface of the optical path division element entered as S polarization and led to the sample, and the beams pass through the optical path division element and are detected.
    Type: Application
    Filed: February 19, 2009
    Publication date: August 27, 2009
    Applicant: Olympus Corporation
    Inventor: Hirofumi TAKATSUKA
  • Patent number: 7580122
    Abstract: A lens inspection device and method are provided. The lens inspection method includes the steps of providing a collimating light beam, polarizing the collimating light beam by a polarizer to produce a polarized light beam, deflecting the polarized light beam by a lens to be measured to produce a deflected light beam, providing a phase retardation plate through which a polarized compensation image is generated, and comparing the polarized compensation image with a lookup table having standard color values of a plurality of standard polarization compensated images recorded therein, so as to determine whether a deformation is presented on the lens.
    Type: Grant
    Filed: September 12, 2006
    Date of Patent: August 25, 2009
    Assignee: Instrument Technology Research Center
    Inventors: Kuo-Cheng Huang, Wen-Hong Wu, Chia-Wei Hsu, Ting-Ming Huang
  • Publication number: 20090207408
    Abstract: A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
    Type: Application
    Filed: February 13, 2009
    Publication date: August 20, 2009
    Inventors: Martin H. Liphardt, Blaine Johs
  • Publication number: 20090189074
    Abstract: Viscous oil residues are located based on fluorescence polarization. Methods and apparatus in accordance with the invention may be integrated with autonomous and remotely operated undersea vehicles to map the location of oil spills.
    Type: Application
    Filed: January 21, 2009
    Publication date: July 30, 2009
    Applicant: EIC Laboratories
    Inventor: Job M. Bello