Abstract: A system for guiding a driver of a tractor trailer truck entering a loading bay includes a display screen disposed on the driver side of the loading bay and angled to remain in continuous uninterrupted view of the driver as the truck is entering the loading bay. A front sensor is disposed to a first side of the loading bay, and a rear sensor spaced apart from the front sensor is disposed along the same side of the loading bay. A controller is connected electrically to the front sensor, the rear sensor, and the display screen. A camera has a field of view aimed between the front sensor and the rear sensor where the loading hatch of the transport tank will be disposed when the transport tank is aligned in the loading bay for taking on cargo.

Abstract: A light module projects multiple light beams onto an installation surface to form multiple light indicia spaced apart in a pattern on the installation surface, with the light indicia identifying installation locations on the installation surface where construction mounts are then installed. Embodiments include systems in which the light module includes a light emitter that projects a source light beam and a diffractor that diffuses the source light beam into the multiple light beams, systems in which the light module is adjustably mounted to and movable with a handheld tool used to install the construction mounts, systems in which the light module is adjustably mounted to a static-use support, and methods of using these systems to install the construction mounts.

Abstract: The present disclosure provides a multi-frequency hybrid heterodyne laser tracker system based on a single light source. According to the laser tracking system proposed in the present disclosure, multi-frequency laser is obtained by conducting multi-acousto-optic frequency shift on a dual-longitudinal-mode laser unit, and an absolute ranging precision gauge is constructed by using a dual-longitudinal-mode interval of a light source. With the frequency shift difference of a multi-acousto-optic frequency shifter, an absolute ranging roughness gauge is constructed, and the relative displacement measurement of dual-frequency light interference is achieved.

Abstract: A board work system includes a moving device configured to move over an XY-plane, a lighting device attached to the moving device, a monochromatic camera attached to the moving device, and an image processing device. The image processing device selects one or multiple monochromatic lights based on a target object and, when the image processing device selects one monochromatic light, the image processing device causes the lighting device and the monochromatic camera to capture a monochromatic image of the target object which is illuminated with the one monochromatic light and sets the monochromatic image of the target object as a target object inspection image. When the image processing device selects multiple monochromatic lights, the image processing device captures monochromatic images of the target object illuminated with the monochromatic lights and sets a composite image where the monochromatic images are combined as a target object inspection image.

Abstract: Provided is a method of determining, out of a plurality of shot regions of a substrate, a set of sample shot regions in each of which a position of a mark is to be actually measured. The method includes setting an initial arrangement of the set of sample shot regions, and adding, to the set of sample shot regions, a shot region, among the shot regions other than the sample shot regions in the initial arrangement, in which a value indicating uncertainty of an estimate of a measurement value of a position of a mark obtained using an estimation model exceeds a predetermined threshold value.

Abstract: Metrology methods and targets are provided for reducing or eliminating a difference between a device pattern position and a target pattern position while maintaining target printability, process compatibility and optical contrast—in both imaging and scatterometry metrology. Pattern placement discrepancies may be reduced by using sub-resolved assist features in the mask design which have a same periodicity (fine pitch) as the periodic structure and/or by calibrating the measurement results using PPE (pattern placement error) correction factors derived by applying learning procedures to specific calibration terms, in measurements and/or simulations. Metrology targets are disclosed with multiple periodic structures at the same layer (in addition to regular target structures), e.g., in one or two layers, which are used to calibrate and remove PPE, especially when related to asymmetric effects such as scanner aberrations, off-axis illumination and other error sources.

Abstract: Disclosed herein is a system for a double-sided credit card and a method of manufacturing the same. In some embodiments, the double-sided credit card comprises a first side and a second side opposite to the first side. The first side comprises a first antenna configured to transmit electronic signals to execute transactions linked to a first financial account, while the second side comprises a second antenna configured to transmit electronic signals to execute transactions linked to a second financial account. An electronic blocker layer is positioned between the first side and the second side such that the electronic signals executing transactions linked to the first financial account is blocked from interfering with the electronic signals executing transactions linked to the second financial account.

Abstract: Methods, systems, and non-transitory computer readable media are configured to perform operations comprising determining a plurality of predetermined situations in which lighting operation of an ego vehicle should automatically transition; determining occurrence of a predetermined situation of the plurality of predetermined situations; and causing an automatic transition in lighting operation of the ego vehicle.

Abstract: An additive manufacturing system includes a build platform and at least two laser heads. Each laser head includes at least one laser device, an optical sensor, and a computing device. The build platform includes a plurality of calibration marks. The laser device is configured to generate a laser beam. The laser beam is directed toward the plurality of calibration marks and the build platform. The optical sensor is configured to detect a scattering signal of the laser beam generated by reflecting off of the plurality of calibration marks and the build platform. The computing device is configured to receive the scattering signal from the optical sensor. The computing device is configured to align the laser heads such that the scattering signal aligns with the plurality of calibration marks and such that the laser heads align with each other.

Abstract: A pre-alignment system includes a common object lens group configured to collect diffracted beams from a patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system. The pre-alignment system also includes a multipath sensory array having at least one image lens system, wherein the at least one image lens system includes a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system.

Abstract: An optical position-measuring device for determining a relative position of scales includes a light source, the scales and a detector. The scales are movable relative to each other along measurement directions and disposed in different planes in crossed relation to each other, and each have a graduation having grating regions which are arranged periodically and have different optical properties. At the first scale, the illumination beam is split into sub-beams, the sub-beams subsequently impinge on the second scale and are reflected back toward the first scale, and the reflected-back sub-beams strike the first scale again, where they are recombined, so that a resulting signal beam subsequently propagates toward the detector. The measuring graduation of one or more of the scales is configured as a two-dimensional cross grating which has a filtering effect that suppresses disturbing higher diffraction orders.

Abstract: This invention provides a position detection apparatus that improves the position detection accuracy. A position detection apparatus includes an absolute track in which when N is an integer of not less than 2, a recording binary sequence created based on a position detection binary sequence in which identical sequences do not exist no matter which N continuous terms are extracted is recorded, and an absolute sensor unit that reads the recording binary sequence from the absolute track, wherein a plurality of terms included in the recording binary sequence consist of two binary values, and when the two binary values are assumed to be 1 and 0, the recording binary sequence is a sequence obtained by replacing one of two values included in the position detection binary sequence with 10 and the other value in the position detection binary sequence with 01.

Abstract: The invention provides an inspection apparatus for inspecting an object, the apparatus comprising: a measurement system configured to measure: —a first parameter of the object across an area of interest of the object, and —a second parameter, different from the first parameter, of the object at a plurality of locations on the object; a stage apparatus configured to position the object relative to the measurement system during a measurement of the first parameter, wherein the measurement system is configured to measure the second parameter at the plurality of different locations during the measurement of the first parameter and wherein the stage apparatus is configured to position the object relative to the measurement system based on a compliance characteristic of the stage apparatus.

Abstract: Some implementations described herein provide an exposure tool. The exposure tool includes a reticle deformation detector and one or more processors configured to obtain, via the reticle deformation detector, reticle deformation information associated with a reticle during a scanning process for scanning multiple fields of a wafer. The one or more processors determine, based on the reticle deformation information, a deformation of the reticle at multiple times during the scanning process, and perform, based on the deformation of the reticle at the multiple times, one or more adjustments of one or more components of the exposure tool during the scanning process.

Abstract: Some implementations described herein provide an exposure tool and associated methods of operation in which a scanner control system generates a scanner route for an exposure recipe such that the distance traveled by a substrate stage of the exposure tool along the scanner route is reduced and/or optimized for non-exposure fields on a semiconductor substrate. In this way, the scanner control system increases the productivity of the exposure tool, reduces processing times of the exposure tool, and increases yield in a semiconductor fabrication facility in which the exposure tool is included.

Abstract: Surface elements for the face of laser beam targets which more efficiently use the properties of light reflectance and absorption to aid a laser tool operator in accurately directing a laser's beam. The surface elements include beam alignment crosshairs and a background. A light-reflective material makes up or covers the background areas of the face not occupied by the beam alignment crosshairs, and allows the operator to better determine the direction and amount of lateral or vertical movement required for final alignment. The beam alignment crosshairs on the face of the target are formed from non-reflective, light-absorbing material that gives the beam an appearance of vanishing when precisely centered. Coupled with the light-reflective background, the light-absorbent crosshairs remedy multiple detriments from beam spread at greater distances, a weak beam, and a poorly discerned beam from bright or sunlit environments.

Abstract: A method for providing a virtual distance of a device under test using a system including a light source, a wedge shear plate, a first detector and a second detector, wherein the wedge shear plate is disposed between the device under test and the light source, the first detector configured for receiving a first interference pattern formed as a result of the light source being disposed through and reflected by the wedge shear plate, and the second detector configured for receiving a second interference pattern formed as a result of the light source being disposed through and reflected by the wedge shear plate, the method including obtaining the first interference pattern using the first detector, obtaining the second interference pattern using the second detector and determining the virtual distance based on the first interference pattern, the second interference pattern, the light source and the wedge shear plate.

Abstract: Method and system for defining basis functions for fitting distortions of profiles of objects in a batch, that has undergone a fabrication process, in a manner adaptable to the fabrication process to reduce the errors between profiles approximated with the use of such basis functions and actual object profiles. Process-specific individual basis functions are defined based on spatially-dense measurement of objects from training sub-set of the batch and applying learning algorithm to results of such measurement. Advantages of process-adaptable basis functions over generic basis functions for fitting distortion shapes of objects include higher accuracy of fitting either at larger or a fewer locations across the object.

Abstract: A method, a system and an archive server for determining an illumination setting for capturing an image of a component, belonging to a specific package type, in a pick-and-place machine are provided. The method comprises capturing a first image of a first component of the specific package type while the first component is illuminated by a first illumination component, and capturing a second image of the first component while the first component is illuminated by a second illumination component, the second illumination component being different from the first illumination component. An illumination setting may then be determined by creating a plurality of generated images based on the first and second image of the first component, and selecting the generated image that fulfils a predetermined quality measure.

Abstract: Camera or object pose calculation is described, for example, to relocalize a mobile camera (such as on a smart phone) in a known environment or to compute the pose of an object moving relative to a fixed camera. The pose information is useful for robotics, augmented reality, navigation and other applications. In various embodiments where camera pose is calculated, a trained machine learning system associates image elements from an image of a scene, with points in the scene's 3D world coordinate frame. In examples where the camera is fixed and the pose of an object is to be calculated, the trained machine learning system associates image elements from an image of the object with points in an object coordinate frame. In examples, the image elements may be noisy and incomplete and a pose inference engine calculates an accurate estimate of the pose.

Abstract: An inspection apparatus inspecting a wafer on which a plurality of patterns are formed by a plurality of exposure shots, the inspection apparatus comprising: acquisition unit configured to acquire first information representing a positional relation between an inspection mark included in a pattern formed by a first exposure shot and an inspection mark included in a pattern formed by a second exposure shot, and second information representing a positional relation between the inspection mark included in the pattern formed by the second exposure shot and an inspection mark included in a pattern formed by a third exposure shot; and derivation unit configured to derive a linear component of an error caused by a reticle, and a linear component of an error caused by a position of a wafer, on the basis of the first information and the second information.

Abstract: A position measurement system including a first interferometer and a second interferometer arranged to determine a distance of the object in a first direction when the object is in a first measurement area by emitting beams onto a target surface of the object. The position measurement system further has a third interferometer and a fourth interferometer arranged to determine a distance of the object in the first direction when the object is in a second measurement area by emitting beams onto the target surface of the object. An arrangement of relative positions in a second direction of beams spots impinging on the target surface from the beams emitted by the first and second interferometers is different from an arrangement of relative positions in the second direction of beams spots impinging on the target surface from the beams emitted by the third and fourth interferometers.

Abstract: A multi-channel device and method for measuring the distortion and magnification of objective lens. The multi-channel device for measuring the distortion and magnification of objective lens comprises an illumination system, a reticle stage, a test reticle, a projection objective lens, a wafer stage and a multi-channel image plane sensor, wherein the multi-channel image plane sensor simultaneously measures the image placement shifts between actual image points and nominal image points after a plurality of object plane test marks are imaged by the projection objective lens, and calculates the distortion and magnification errors of the objective lens by fitting, which shortens the measurement time, eliminates the influence of wafer stage errors on the measurement accuracy and improves the measurement accuracy.

Abstract: A method of controlling wash equipment in an automated vehicle wash system having a conveyor includes, measuring one or more contours of a vehicle as the vehicle moves thorough an entry area of the automated vehicle wash system on the conveyor; tracking the distance a fixed point relative to the conveyor moves; associating the one or more contours of the vehicle with the position of the fixed point; determining, based on the one or more contours of the vehicle and the position of the fixed point, commands for operating the wash equipment; delivering the commands to the wash equipment; and operating the wash equipment in accordance with the commands.

Abstract: Probe systems configured to test a device under test and methods of operating the probe systems are disclosed herein. The probe systems include an electromagnetically shielded enclosure, which defines an enclosed volume, and a temperature-controlled chuck, which defines a support surface configured to support a substrate that includes the DUT. The probe systems also include a probe assembly and an optical microscope. The probe systems further include an electromagnet and an electronically controlled positioning assembly. The electronically controlled positioning assembly includes a two-dimensional positioning stage, which is configured to selectively position a positioned assembly along a first two-dimensional positioning axis and also along a second two-dimensional positioning axis.

Abstract: A method includes moving a wafer stage to a first station on a table body of a lithography chamber; placing a wafer on a top surface of the wafer stage; emitting a first laser beam from a first laser emitter toward a first beam splitter on a first sidewall of the wafer stage, wherein a first portion of the first laser beam is reflected by the first beam splitter to form a first reflected laser beam, and a second portion of the first laser beam transmits through the first beam splitter to form a first transmitted laser beam; calculating a position of the wafer stage on a first axis based on the first reflected laser beam; after calculating the position of the wafer, moving the wafer stage to a second station on the table body; and performing a lithography process to the wafer.

Abstract: Embodiments of a marking pattern in forming the staircase structure of a three-dimensional (3D) memory device are provided. In an example, a marking pattern for controlling a trimming rate of a photoresist trimming process includes a plurality of interleaved layers, the plurality of interleaved layers including at least two layers of different materials stacking along a vertical direction over a substrate. In some embodiments, the marking pattern also includes a central marking structure that divides the marking area into a first marking sub-area farther from a device area and a second marking sub-area closer to the device area, a first pattern density of the first marking sub-area being higher than or equal to a second pattern density of the second marking sub-area.

Abstract: A metrology tool may include an illumination sub-system to illuminate sample within two or more acquisition fields with two or more illumination beams, where the two or more acquisition fields are distributed along a scan direction in a non-overlapping configuration, and where a translation stage translates a metrology target on the sample along the scan direction sequentially through the two or more acquisition fields. The metrology tool may further include an imaging sub-system to image the two or more acquisition fields while the sample is scanned along the scan direction. The imaging sub-system may include a field-repositioning optical relay to relay images of the two or more acquisition fields to a scanning detector including one or more pixel columns distributed along a column direction, where the field-repositioning optical relay positions the images of the two or more acquisition fields on the scanning detector along the column direction.

Abstract: A carrier system and method carries an object to an object mounting member provided with an object mounting section. The system includes: a measurement device which obtains information related to a flatness of the object; a carrier member that carries the object; and a controller which controls a driving speed of the carrier member using the information related to the flatness of the object obtained by the measurement device.

Abstract: Provided is a fluid analysis apparatus and a method of controlling the same. The fluid analysis apparatus include an actuator provided on a part of the fluid analysis apparatus, a mounting portion on which a fluid accommodating cartridge is mounted thereon, the fluid accommodating cartridge provided with a well in which a fluid sample is accommodated, a measurement portion configured to transmit light to the fluid accommodating cartridge and detect an optical signal from the light passed through the fluid accommodating cartridge, and a controller configured to control an operation of the actuator based on the optical signal detected by the measurement portion such that the light transmitted from the measurement portion passes through a central portion of the well to perform an accurate inspection on the fluid sample.

Abstract: An anchoring system designed to anchor a position detector on a support plane in a predetermined lateral position relative to a vehicle. The anchoring system comprises a positioning plate, which is firmly fixed on the support plane in the predetermined lateral position, a flat base, which is firmly fixed to the position detector and is designed, in use, to be laid on the positioning plate, magnetic devices, which are arranged on the flat base and on the positioning plate and are structured so as to magnetically attract one another so as to firmly anchor, though in a removable manner, the base of the position detector on the positioning plate.

Abstract: A method, system and program for determining a position of a feature referenced to a substrate. The method includes measuring a position of the feature, receiving an intended placement of the feature and determining an estimate of a placement error based on knowledge of a relative position of a first reference feature referenced to a first layer on a substrate with respect to a second reference feature referenced to a second layer on a substrate. The updated position may be used to position the layer of the substrate having the feature, or another layer of the substrate, or another layer of another substrate.

Abstract: An overlay metrology target (T) is formed by a lithographic process. A first image (740(0)) of the target structure is obtained using with illuminating radiation having a first angular distribution, the first image being formed using radiation diffracted in a first direction (X) and radiation diffracted in a second direction (Y). A second image (740(R)) of the target structure using illuminating radiation having a second angular illumination distribution which the same as the first angular distribution, but rotated 90 degrees. The first image and the second image can be used together so as to discriminate between radiation diffracted in the first direction and radiation diffracted in the second direction by the same part of the target structure. This discrimination allows overlay and other asymmetry-related properties to be measured independently in X and Y, even in the presence of two-dimensional structures within the same part of the target structure.

Abstract: There is provided a surveying instrument including a tripod which is installed on an installation surface and a surveying instrument main body which is provided on the tripod and laterally rotatable around a longitudinal axis, wherein the tripod includes a reference leg has a known relationship between a lower end of the reference leg and a machine reference point which is a machine center of the surveying instrument main body, and two auxiliary legs, the reference leg is installed in such a manner that a lower end of the reference leg coincides with a reference point, wherein the surveying instrument main body calculates a position of the machine reference point with respect to the reference point based on the positional relationship between the lower end of the reference leg and the machine reference point.

Abstract: Apparatuses, systems and methods for indicating whether a target has been impacted by a projectile are disclosed. Embodiments may include a microcontroller, an impact sensor, and an impact indicator. Apparatus may include an acoustic sensor and a miss indicator. Acoustic information or impact information may be received by the sensors and sent to the microcontroller unit. A determination may be made regarding whether the target has been impacted. An indication of a hit or a miss may be made by the impact indicator based on the determination. A light redirection element, which may include a light pipe, may direct light from the impact indicator around the edge of a target to a viewer.

Abstract: The invention relates to a product inspection and characterization device, including conveyance means, a two-dimensional inspection region, a radiation source generating a spot light beam for partially illuminating the surface of the product, optical means for directing the light beam provided with at least one mirror to aim the spot light beam in the inspection region, optical means for directing the reflected and/or scattered light to detection means, detection means for analyzing the light scattered and/or reflected by the product and a processing unit for characterizing the product. The radiation source emitting the light beam is therefore pointed at the product by optical means directing the light beam to the two-dimensional inspection region. Another object of the present invention relates to the method for product inspection and characterization.

Abstract: A misregistration metrology system and method useful in the manufacture of semiconductor devices, the multilayered semiconductor devices including a first periodic structure having a first pitch along a first axis, the first periodic structure being formed together with a first layer of the multilayered semiconductor device, a second periodic structure having a second pitch along a second axis, the second axis not being parallel to the first axis, the second periodic structure being formed together with the first layer of the multilayered semiconductor device and a third periodic structure having a third pitch along a third axis, the third axis not being parallel to the first axis and the third axis not being parallel to the second axis, the third periodic structure being formed together with a second layer of the multilayered semiconductor device, the third periodic structure and the first and second periodic structures overlying one another, the misregistration metrology system and method including generati

Abstract: Apparatuses, systems and methods for indicating whether a target has been impacted by a projectile are disclosed. Embodiments may include a microcontroller, an impact sensor, and an impact indicator. Apparatus may include an acoustic sensor and a miss indicator. Acoustic information or impact information may be received by the sensors and sent to the microcontroller unit. A determination may be made regarding whether the target has been impacted. An indication of a hit or a miss may be made by the impact indicator based on the determination. A light redirection element, which may include a light pipe, may direct light from the impact indicator around the edge of a target to a viewer.

Abstract: A method for forming a pattern of an imprint material on a shot region of a substrate by using a mold, includes determining a plurality of marks for alignment of the shot region and the mold, performing measurement for the alignment using the plurality of marks determined in the determining, setting an origin position of a coordinate system for acquisition of an alignment error between the shot region and the mold based on an arrangement of the plurality of marks determined in the determining, and acquiring the alignment error based on a measurement result in the measurement and the origin position determined in the setting.

Abstract: A vehicle sensing and guidance system for a vehicle wash, and a vehicle wash, are provided. The system includes a first vehicle sensing system having at least one sensor configured to detect a vehicle and generate sensor data, a storage storing computer readable instructions, at least one processor that, when executing the computer readable instructions, determines a pose of the first vehicle using the sensor data, and at least one output device configured to present at least one of a first vehicle positioning marker and a vehicle positioning signal at least partially based on the pose of the first vehicle.

Abstract: A parameter-stable misregistration measurement amelioration system and method including providing a wafer, including a plurality of multilayered semiconductor devices formed thereon, selected from a batch wafers intended to be identical, using a misregistration metrology tool to measure misregistration at multiple sites between at least a first layer and a second layer of the wafer, using a plurality of sets of measurement parameters, thereby generating measured misregistration data for each of the sets of measurement parameters, identifying and removing a parameter-dependent portion and a mean error portion from the measured misregistration data for the wafer for each of the sets of measurement parameters, thereby generating ameliorated parameter-stable ameliorated misregistration data for the wafer.

Abstract: Provided are a method and an electronic device that may be coupled to a host device, the electronic device including a housing detachable to the host device, a light generator disposed on a first surface of the housing, a power transmission circuit disposed on a second surface of the housing, the second surface being opposite to the first surface, and a processor that controls the light generator to output a light, wherein an external electronic device moves to a predetermined position based on the outputted light, and control to wirelessly transmit power to the external electronic device via the power transmission circuit based on the external electronic device moving to the predetermined position.

Abstract: A multispectral material detection system captures spectral data and compares select spectral bands to reflectance spectra of a plurality of materials. The system identifies distinguishing features in reflectance spectra of a plurality of materials and in a plurality of spectral channels identifying distinguishing structural aspects of each material with respect to the background environments. Upon an observed spectral reflectance being proximate to one or more known spectra characteristics, the object is associated with a material of interest.

Abstract: A substrate processing module includes a process chamber configured to perform a treatment process on a substrate; a transfer chamber provided on a first side of the process chamber, the substrate being transferred between the process chamber and the transfer chamber; an optical emission spectroscopy (OES) system provided on a second side of the process chamber and configured to monitor the process chamber; and a reference light source disposed in the transfer chamber and configured to emit a reference light to calibrate the OES system.

Abstract: An adjustment method is for a marking laser beam of an imaging modality. The marking laser beam includes a central beam and at least one peripheral beam and extends from a laser source to a detection plane. The detection plane includes a central target position for the central beam and at least one peripheral target position for the at least one peripheral beam and a detection unit. The detection unit is embodied to capture whether the marking laser beam is striking at least one of the target positions. In an embodiment, the method includes a first adjustment of the marking laser beam via an adjusting unit, until it strikes the central target position; and a second adjustment of the marking laser beam via the adjusting unit, until it strikes the at least one peripheral target position. The marking laser beam will also be kept at the central target position.

Abstract: An optical circuit board which is mounted with a loop-back circuit for returning aligning light to the fiber array in the vicinity of the fiber array connection end. Since an aligning loop-back circuit can be formed in an optical waveguide pattern, a production cost does not increase in comparison to an optical circuit board of the related art. The aligning light combined from the optical fiber to the aligning port of the optical circuit board is returned to the optical fiber around the loop-back circuit. Therefore, it is possible to perform alignment using the returned light. That is, alignment can be performed while being mounted on a package without installing a light-reflecting film or mirror.

Abstract: Disclosed is a universal fixture based machine tool used in the machining industry. The tool includes a numerically controlled machine tool body, a multifunctional machine tool countertop, a first fixture pallet, a second fixture pallet, a fixture integration platform, a split bench vise, and a flexible fixture element. The multifunctional machine tool countertop, the first fixture pallet and the second fixture pallet are all made of perforated foundation plates. The numerically controlled machine tool body can achieve a three-axis linkage machining function of X-, Y-, and Z-coordinate moving axes. The fixture integration platform can achieve a rotary machining function of three rotation axes A, B, and C of the universal fixture based machine tool. The flexible fixture element can have various combinations and changes, so that the universal fixture based machine tool has a machining function of three increment axes U, V, and W.

Abstract: A movable body apparatus has: a substrate holder holding a substrate and can move in the X and Y-axes directions; a Y coarse movement stage movable in the Y-axis direction; a first measurement system acquiring position information on the substrate holder by heads on the substrate holder and a scale on the Y coarse movement stage; a second measurement system acquiring position information on the Y coarse movement stage by heads on the Y coarse movement stage and a scale; and a control system controlling the position of the substrate holder based on position information acquired by the first and second measurement systems. The first measurement system irradiates a measurement beam while moving the heads in the X-axis direction with respect to the scale, and the second measurement system irradiates a measurement beam while moving the heads in the Y-axis direction with respect to the scale.

Abstract: A sample holder 100 for use in a device for image-based analysis of multiple samples, the sample holder comprising: an optically flat surface 10; multiple locations of interest 16, 18 dispersed across the optically flat surface 10 that each, in use, correspond to locations of a sample of the multiple samples; and multiple focal structures 12 associated with the multiple locations of interest 16, 18; wherein the focal structures 12 each comprise at least one pyramid shaped indentation 30 in the optically flat surface 10.

Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.