Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “noncooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A system and method for measuring the profile of an external surface of a part is provided. The system includes a source of light that directs light onto a region of the external surface of the part. The system also includes a linear, light-sensitive sensor, and a lens used to image locations within the region onto the sensor. The source of light and the sensor are located substantially within the same plane such that the sensor detects substantially only light scattered, diffracted, or reflected from the region and travelling substantially within the plane. The system additionally includes a re-positionable mirror that re-directs the light emitted from the source of light to the plurality of locations within the region and re-directs light scattered, diffracted, or reflected from the plurality of locations within the region to the lens and the sensor.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A device and method for inspecting cam profiles by sensing and storing data points representing the profiles of camshaft cams and comparing this information to known acceptable limits. The device includes an array of laser range finders that are alignable with respective cams of a camshaft to be inspected. The range finders measure the distances to respective outer cam surfaces by reflecting laser light off those surfaces as the cams rotate, calculating angles of reflection by sensing the changing positions of reflected laser light and calculating distances to the respective reflecting points from the angles of reflection. The device also includes a circuit connected to the range finders that determines the dimensions of the cams by analyzing the electrical signals from the range finders as the camshaft rotates.

Abstract: The present invention relates to a process and an apparatus for detecting a fault in a flowing liquid sheet and in particular in a coating curtain. The process comprises the following steps: transmitting an electromagnetic beam to the sheet so as to irradiate approximately the entire width of the sheet in a direction approximately transverse to the sheet; recovering a beam reflected by the sheet by way of a collector; defining a reference position of the reflected beam on the collector; and noting the deviations of the reflected beam in relation to the previously defined reference position.

Abstract: A method of range imaging a scene includes directing a planar light beam onto a first portion of the scene, receiving a first reflected light stripe from that portion of the light beam on a row of sensors which emit responsive electrical signals. The first electrical signals are employed to create a salient feature containing saliency map with the salient feature being spatially related to the reflected light stripe. The light is subjected to sweeping to progressively create a plurality of light beams and reflected stripes leading to corresponding electrical output signals. This is repeated a plurality of times to establish the range image. In a preferred embodiment, a linear array of sensors has a winner-take-all circuit which selects a salient feature and employs that along with angle and time information to create an element of the image with repetition of the method generating the full range image.

Abstract: A three-dimensional input device including a light projecting device for projecting detection light, and an image sensing device for receiving the detection light reflected by an object and converting the received light to electrical signals. The detection light is controlled so as to scan the object periodically while changing the projection direction of the detection light, and to consecutively perform a plurality of scans at mutually different detection light projection angles in accordance with the predefined specifications at the start of operation.

Abstract: A method of improving the accuracy of optical 3-D measuring method utilizing a matrix camera provided with an image recording matrix of known pixel raster width of pitch for generating an image by measuring for all pixels or a selected portion thereof the individual deviation of the pixel site relative to a desired position for determining on the basis thereof the individual exact pixel sites and taking them into consideration for the calculation of the 3-D data.

Abstract: A shape measuring system reduced in size and cost and high in the light utilization efficiency, as well as a shape measuring method, are disclosed which can measure the distance up to an object accurately without being influenced by external conditions such as a change in reflectance of the surface of the object. A semiconductor laser emits an intensity-modulated illumination light. A plane sensor detects a combined light of both a reflected light from an object and a reference light and outputs a composite light detection signal. The semiconductor laser also emits an illumination light which is a stationary light not intensity-modulated. At this time, a shutter is closed. The plane sensor detects the reflected light from the object and outputs a detection signal thereof.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A method and an apparatus for scanning a vehicle wheel, wherein a location on the wheel is sensed by means of a light team emitted by a light source and is reflected to a position-sensitive receiver. The spacing of the sensed location relative to a reference location is measured from the directions of the emitted beam and the reflected beam. The light source and the position-sensitive receiver are synchronously pivoted about a common axis by means of a rotary drive including a stepping motor for successive measurement steps. A rotary angle sensor supplies signals proportional to the rotary position of the stepping motor to an evaluation system.

Abstract: In a system for locating and measuring an index mark on an edge of a wafer, a wafer to be examined is positioned and centered on a chuck in a horizontal chuck position such that an index mark is oriented within first and second index mark orientation features disposed on the chuck. The chuck is translatable, tiltable between horizontal and vertical positions, and rotatable over an angle subtended by the index mark orientation features of the chuck. A laser beam from a laser beam optical profiler is focussed on the surface of the wafer at a distance proximate the wafer edge and proximate the first index mark orientation feature of the chuck. The chuck is rotated in a direction from the first to the second index mark orientation feature whereby a reflected portion of the laser beam generates data corresponding to the angular location of index mark edges. An index mark center location is computed.

Abstract: A method and a device for opto-electrically acquiring the shape of a surface by illuminating the surface (S) with light beams (10) having different wavelengths and which converge at different points on the axial illumination direction (Y) in the vicinity of the surface (S), by spectral analysis of the light reflected or backscattered by the surface (S) in the direction (Y) and by determining distances of points on the surface (S) relative to a reference plane (X, Y) from the wavelength and/or the spectral widths of the light analyzed.

Abstract: The present invention provides a method and an apparatus for detecting a position of a light spot in a light distribution that can include stray light components (e.g. from other lasers, ambient lighting etc.) The apparatus includes a continous response position sensitive detector (CRPSD, e.g. lateral effect photo-iode) for determining a first centroid of the light distribution and a discrete response position sensitive detector (DRPSD, e.g. multiplexed array) for determining a second centroid of the light distribution within a reading window defined about the first centroid and within the light distribution. The second centroid represents the position of the light spot in the light distribution. This multiple stage approach exploits the high resolution and speed offered by traditional CRPSDs together with the accuracy under variable lighting conditions offered by traditional DRPSDs.