Abstract: A method of effecting a purchasing transaction includes providing a printed form having printed thereon coded data distributed over an area; capturing an image of the form using a sensing device, the captured image showing a portion of the coded data; decoding at least some of the coded data within the captured image; determining from the coded data an identity of the form, a position of the coded data on the form, and a parameter of the purchasing transaction; determining a position of the sensing device relative to the form from a distortion of the captured image and the determined position of the coded data; compiling the identify of the form, the position of the sensing device, and the parameter of the purchasing transaction as indicating data; receiving in a computer system the indicating data; and identifying, in the computer system and from the indicating data, at least one parameter relating to a purchasing transaction.

Abstract: Measurement targets for use on substrates, and overlay targets are presented. The targets include an array of first regions alternating with second regions, wherein the first regions include structures oriented in a first direction and the second regions include structures oriented in a direction different from the first direction. The effective refractive index of the two sets of regions are thereby different when experienced by a polarized beam, which will act as a TM-polarized beam when reflected from the first set of regions, but as a TE-polarized beam when reflected from the second set of regions.

Abstract: An optical assembly comprises at least one optical element movable in at least two degrees of freedom and at least one actuator for adjusting the least one optical element; at least one sensor for sensing the position of the at least one element in at least two degrees of freedom and is characterised in that the at least one sensor is located at least substantially diagonally opposite to the least one actuator.

Abstract: Disclosed are various embodiments of a reflective optical encoder system having at least three channels—two data channels and at least one index channel. The various configurations of reflective optical encoders disclosed herein permits very high resolution reflective optical encoders in small packages to be provided. In addition, the embodiments of the reflective optical encoder systems disclosed herein reduce problems associated with misalignment between code scales and light detectors, permit relatively simple electronic circuitry to be used to process outputs, and reduce manufacturing, assembly, integrated circuit and encoder costs. Methods of making and using such optical encoders are also disclosed.

Abstract: The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements (51) forming part of a mechanical structure (5), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C). The invention further relates to a corresponding method and to a program for carrying out the method.

Abstract: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions.

Abstract: Movements of a lithographic apparatus include dynamic positioning errors on one or more axes which cause corresponding errors which can be measured in the applied pattern. A test method includes operating the apparatus several times while deliberately imposing a relatively large dynamic positioning error at different specific frequencies and axes. Variations in the error in the applied pattern are measured for different frequencies and amplitudes of the injected error across a frequency band of interest for a given axis or axes. Calculation using said measurements and knowledge of the frequencies injected allows analysis of dynamic positioning error variations in frequency bands correlated with each injected error frequency.

Abstract: A position measurements system to measure a position of a movable object with respect to another object includes two or more one dimensional (1D) encoder heads mounted on one of the movable object and the other object and each capable of emitting a measurement beam along a measurement direction, one or more reference targets mounted on the other of the movable object and the other object, each reference target including a planar surface with a grid or grating to cooperate with the two or more one dimensional (1D) encoder heads, and a processor to calculate a position of the object on the basis of outputs of the two or more 1D encoder heads, wherein the measurement direction of each of the two or more 1D encoder heads is non-perpendicular to the planar surface of the respective reference target.

Abstract: A displacement sensing system is disclosed. Two image capturing devices are settled at to opposite ends of a coordinate axis of the planar area, respectively, for capturing images of the planar area and an object placed thereon. Four pre-established LUT databases and an interactive four-matrix lookup table process are implemented to determine actual coordinates of the object on in the planar area.

Abstract: An encoder includes: a main scale having two or more band-shaped tracks in each of which an optical main grating is formed so that longitudinal direction of the main scale corresponds to a measurement axis direction; and an index scale opposed to the main scale so as to form a diffraction interference optical system in cooperation with the main grating, disposed so as to be movable relative to the main scale in the measurement axis direction, and in which two or more optical index gratings are formed. A plurality of slits included in the main grating in at least one track are formed so as to be inclined at a predetermined inclination angle from a direction perpendicular to the measurement axis direction so that pitch of the slits in the track becomes equal to the pitch of the slits in the at least one other track.

Abstract: An optical encoder includes a light source 10, a scale 20 disposed so as to face the light source, a light receiving element 31 configured to receive luminous flux from the light source through the scale, and a signal processing circuit 39 configured to process an output signal of the light receiving element. A light emitting window 11 of the light source is constituted of a collection of a plurality of point light sources and has a shape which meets a predetermined expression.

Abstract: A position measuring arrangement including a scale connected with a first object, wherein the scale includes a reference marking and a plurality of graduated areas, which are arranged a periodically in the measuring direction and have different optical properties. Respective additional structures are arranged in the measuring direction adjacent to the reference marking, which extend in the measuring direction and minimize secondary maxima in the reference pulse signal, wherein the additional structures includes at least two tracks having a first optical property, between which a graduated area having a second optical property and extending in the measuring direction is arranged. The position measuring arrangement further includes a scanning unit movable in relation to the scale in the measuring direction and is connected with a second object, the scanning unit includes individual detector elements, whose geometric arrangement is matched to the reference marking for generating the reference pulse signal.

Abstract: A position detection sensor is provided and includes: a scale including a self-emitting part that emits light to form a pattern on the scale; and a relative movable part provided in such a manner to be opposed to the scale and to be movable relative to the scale, the relative movable part including a light receiving part that detects the light emitted at a position in a portion of the scale where the pattern is formed, the position corresponding to a current position of an object to be measured. At least one of a traveling amount, traveling speed and absolute position of the object is detected based on a detection signal outputted from the light receiving part.

Abstract: A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.

Abstract: A position sensing optical encoder includes an illumination source that operates by providing primary radiation having a first level of intensity uniformity to saturate at least a portion of a relatively broad phosphor area including uniformly distributed phosphor. The phosphor area absorbs the primary radiation and emits phosphor radiation to illuminate the encoder scale pattern. The scale pattern spatially modulates the phosphor light, and the spatially modulated pattern of phosphor light is sensed by a photodetector arrangement. Due at least partially to saturation of the phosphor, the phosphor light has a second level of phosphor light intensity uniformity that is more uniform than the first level of primary light intensity uniformity, which enhances the encoder accuracy. The uniform phosphor illumination intensity is economically provided over a broad area with few components and minimized optical path length, particularly for path length perpendicular to the scale.

Abstract: A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field.

Abstract: A method of determining a defect in a grid plate of an encoder-type position measurement system, the method including providing an encoder-type position measurement system to measure a position of a movable object with respect to another object, the encoder-type position measurement system including a grid plate and an encoder head, measuring a quantity of light reflected on each of the two or more detectors, using a combined light intensity of the reflected light on the two or more detectors to determine a reflectivity signal representative for the reflectivity of the grid plate at the measurement location, and determining a presence of a defect at the measurement location on the basis of the reflectivity signal of the grid plate.

Abstract: A lithographic apparatus is provided with an optical encoder measurement system having an irradiation system to direct an irradiation beam to a first scale. The system has optics to direct a primary diffracted beam diffracted from the first scale upon irradiation by the irradiation beam to a second scale and a detector to detect a secondary diffracted beam after interference and a second diffraction of the primary diffracted irradiation beam on the second scale to measure the position of the first scale with respect to the second scale.

Abstract: An absolute position length-measurement type encoder includes a scale having an incremental track, an absolute track, and a reference position track. The incremental track has incremental patterns including first light and dark patterns formed at equal intervals in first periods. The absolute track has absolute patterns representing an absolute position. The reference position track has reference position patterns including second light and dark patterns formed at equal intervals in second periods longer than the first periods. A light source emits a measurement light to the scale. A photodetector receives the measurement light reflected at or transmitted through the scale. A signal processing circuit processes the received light signal of the photodetector to detect an absolute position of the scale.

Abstract: A position transducer system is disclosed for a limited rotation motor that includes an illumination source that directs illumination toward an illumination reflector that rotates with a rotor of the limited rotation motor, and a plurality of detector areas adjacent the illumination source for receiving modulated reflected illumination from the illumination reflector.

Abstract: A system measures a location of a drop delivered by, for example, an ink-jet type applicator. An image of the drop is captured from two directions, resulting in two drop images. Only one image capturing apparatus is needed to capture the drop images. The location in three-dimensional space is determined by using the two images but only one image capturing device. The position or location information can then be used to calibrate a coating apparatus.

Abstract: A control system is provided for controlling a support structure in a lithographic apparatus. The control system includes a first measurement system arranged to measure the position of a substrate supported by the support structure, the position being measured in a first coordinate system. The control system further includes a second measurement system for measuring the position of the support structure in a second coordinate system, the first measurement system having a presumed position in the second coordinate system.

Abstract: The reference mark has steps and is formed on a sample. A stage moves in X and Y directions. The sample M is placed on the stage. An optical lever type height position sensor emits light to detect the reference mark FM? by the stage being scanned. The spot position of light reflected on the sample is detected in position sensitive detector. The X and Y coordinates of the position of the stage positioned when the spot position of the reflected light is changed is detected. The detected X and Y coordinates are regarded as the position C of the reference mark FM?. The position of a phase defect D located in the sample M is specified on the basis of the position C of the reference mark FM?. The position of a portion on which writing is to be performed is determined on the basis of a relationship with the specified position of the phase defect D.

Abstract: In a beam irradiation device, laser light emitted from a laser light source is entered into a mirror. An actuator pivotally moves the mirror into which laser light is entered, whereby a targeted area is scanned with the laser light. Servo light emitted from a semiconductor laser is entered into a hologram element. The hologram element is pivotally moved with the pivotal movement of the mirror. A diffraction pattern is formed on an exit surface of the hologram element. A photodetector receives servo light transmitted through the hologram element to output a signal depending on a light receiving position of the servo light. The scan width of servo light on the photodetector is increased by a diffraction function of the hologram element.

Abstract: A position detector includes a first planar encoder including a first encoder head unit mounted on a test object that is a movable member, and a first grating unit mounted on a fixed member, the first planar encoder being configured to detect a position of the test object in two directions by measuring a position of the first grating unit using the first encoder head unit, and a second planar encoder including a second encoder head unit mounted on the fixed member, and a second grating unit mounted on the movable member, the second planar encoder being used to generate data for calibrating the position of the first grating unit measured by the first encoder head unit.

Abstract: A position detecting device for detecting a position of an object, includes a light emitting portion that emits light, a light receiving portion that receives the light from the light emitting portion, and a scale that is arranged between the light emitting portion and the light receiving portion, and includes a position detecting pattern and a smear detecting pattern. The position detecting pattern has a first light transmitting portion for transmitting the light from the light emitting portion and a first light interception portion for intercepting the light from the light emitting portion which are alternately arranged in a detection range of the object. The smear detecting pattern for detecting smear of the scale has a second light transmitting portion for transmitting the light from the light emitting portion and a second light interception portion for intercepting the light from the light emitting portion which are alternately arranged.

Abstract: A scale for a displacement detection apparatus includes a base, and reflection layers formed on the base in a lattice structure, wherein the scale is used as a member displaceable relative to a light-emitting element whose emission wavelength is approximately 1000 nm or less and a light-receiving element receiving the light that is emitted from the light-emitting element and is reflected by the reflection layers, and wherein the base is made of silicon.

Abstract: Methods and systems for determining the displacement of a substrate using a scale comprising TIR scale features are described. A scale that includes a number of total internal reflection (TIR) prisms as scale elements is disposed on the substrate. Light directed towards the scale is modulated by the TIR prisms. A signal indicating a displacement of the substrate is generated based on the modulated light. The signal 10 may be used to determine the web position, to control web movement, and/or to measure various web parameters.

Abstract: An optical instrument aligns an optical beam without the need for physical intervention of the instrument within the apparatus or platforms from which the trajectory of the beam to be ascertained. The alignment apparatus and method enable the desired function to be realized without the placement of physical apertures or sensors directly in the path of the beam through the system whose spatial position and slope is to be sought. An image plane provides the observer with a pair of well-defined images that are indicative of the beam centering and pointing alignment parameters. The optical alignment can be realized without the need for referencing to an external or fixed set of coordinates or fiducials. The instrument can therefore service situations where adverse environments would otherwise prohibit the use of such instruments, including regions of high radiation, high temperature, vacuum and/or cryogenic atmospheres.

Abstract: A position detecting device includes an optical position detecting element and a position information portion which are disposed so as to be opposed to each other. One of the optical position detecting element and the position information portion is mounted on the movable portion while the other thereof is mounted on an internal wall of a cabinet. The position information portion has a pattern where a signal level produced by the optical position detecting element changes in a continuous manner when the movable portion moves in a predetermined direction. The position detecting device carries out position detection of the movable portion in accordance with the signal level.

Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.

Abstract: A scanning head for an optical position-measuring system includes a receiver grating, formed of photosensitive areas, for the scanning of locally intensity-modulated light of differing wavelengths. The receiver grating is formed from a semiconductor layer stack of a doped p-layer, an intrinsic i-layer and a doped n-layer. The individual photosensitive areas have a first doped layer and at least a part of the intrinsic layer in common and are electrically separated from one another by interruptions in the second doped layer.

Abstract: A position-measuring device for generating a reference-pulse signal at at least one reference position includes a scanning unit and also a reflection-measuring graduation displaceable relative thereto in at least one measuring direction. The scanning unit for generating the reference-pulse signal includes a plurality of optical elements, including at least one imaging optics as well as at least two diaphragm structures, which are disposed in a diaphragm plane and have a plurality of diaphragm openings in each case. Furthermore, a light source as well as at least two detector elements are assigned to the scanning unit. The reflection-measuring graduation has a reference marking at the at least one reference position. It includes at least one set of first structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a first transversal periodicity.

Abstract: An optical absolute rotary encoder can have a simple and small structure, for determining the absolute values of rotational positions with high accuracy. The encoder can include an optical scale having an absolute pattern representing a code corresponding to a single absolute value using a transmitting area and/or an intercepting area. A light emitting unit can be arranged at one side with respect to the optical scale, and configured to project light on the optical scale. A light receiving unit can be arranged at the same side as the light emitting unit, can configured to receive light passing through the transmitting area of the optical scale. A light guide unit can be provided and configured to guide the light from the light emitting unit to the light receiving unit. The optical scale and the light emitting unit can rotate relative to each other about an axis of rotation, and the light receiving unit can be disposed on the axis of rotation.

Abstract: A scanning unit is for scanning a measuring standard having a coded track formed by a graduated scale, such as an incremental track, and a reference mark system, including a detector system for scanning the coded track and an additional detector system for scanning the reference mark system. The detector system, when scanning the associated coded track or reference mark system, receives scanning signals on a signal-sensitive surface, and the additional detector system includes at least two sensors, of which only one is used for scanning the reference mark system during operation of the scanning unit. Each of the two sensors is connected to one of the two inputs of a differential amplifier, and the sensor not used for scanning is deactivated in that its signal-sensitive surface is covered.

Abstract: A device for determining the position of an object that is movable along at least one displacement direction, the or each displacement direction having assigned to it one length measuring device for measuring the position of the object along the respective spatial direction, includes: at least one scale extending along a displacement direction of the object to be measured as a first component of the respective length measuring device; a scanning head for scanning the scale as a second component of the respective length measuring device such that a change in the position of the scale with respect to the scanning head along the associated displacement direction of the object to be measured is measurable, one of the two components of the respective length measuring device being moved together with the object to be measured along the respective displacement direction when the latter is moved; and a device for determining the distance of the component of the respective length measuring device, which is movable tog

Abstract: The invention relates to a method for determining at least one influencing variable acting on the eccentricity in a goniometer, using a detector arrangement consisting of four optical detector elements, and a rotational body comprising a plurality of pattern elements arranged around a pattern center, the rotational body being rotatably arranged about an axis. According to said method, at least some of the pattern elements are reproduced on the detector arrangement, the positions of the pattern elements reproduced on the detector arrangement are resolved, and the eccentricity of the pattern center in relation to a detector center of the detector arrangement is determined. A plurality of such eccentricity measurements for different rotational positions enables different influencing variables acting on the current eccentricity to be separated, especially by forming units.

Abstract: This patent specification describes a relative position detection device and a detector for a rotary body and an image forming apparatus including the relative position detection device. The relative position detection device includes a scale comprising a pattern continuously formed by changing reflectance or transmittance and moving in a direction, a light source to irradiate the scale, a light receiving unit to read the pattern and output a signal, and a signal processing unit to process the output signal of the light receiving unit. The pattern is formed by a line pattern having regularly spaced lines perpendicular to the direction of movement of the scale, the light receiving unit is slanted with respect to the lines, and the relative position detection device detects a relative position change and speed change of the scale.

Abstract: The present invention relates to an optical projection grid (1) for producing a light distribution, which projection grid (1) has a transmittance distribution, wherein the transmittance distribution is formed by subregions (2a, 2b . . . 2i) containing transparent structures (5) and opaque structures (4). A plurality of structures of each type is distributed, in particular in an incoherent and alternating manner, within a subregion (2a, 2b, 2c, 2d, 2e, 2f, 2g, 2h, and 2i) and the ratio of transparent structures (5) to opaque structures (4) within a subregion (2a, 2b . . . 2i) is adjusted such that a transmittance index (Ta, Tb . . . Ti) assigned to a subregion (2a, 2b . . . 2i) is achieved at least in a statistical mean.

Abstract: An optical assembly comprises at least one optical element movable in at least two degrees of freedom and at least one actuator for adjusting the least one optical element; at least one sensor for sensing the position of the at least one element in at least two degrees of freedom and is characterised in that the at least one sensor is located at least substantially diagonally opposite to the least one actuator.

Abstract: It is an object to provide an optical displacement sensor and an optical displacement measurement device capable of improving the detection accuracy in detecting the presence or absence of a target object.

Abstract: Methods and systems are disclosed which relate to online purchasing via interface surfaces printed with information and coded data. The coded data, encoded visibly or invisibly, may be queried by an appropriate sensing device. The sensing device communicates with a computer system. Together, the interface surfaces, sensing device and computer system are capable of effecting purchasing transactions over a network.

Abstract: An x linear encoder, which is configured of a pickup placed on a measurement mount and facing an x scale fixed on the lower surface of a barrel that houses a projection optical system, measures the displacement of the barrel with the measurement mount serving as a reference. With the configuration of the x linear encoder, a path of a measurement light that propagates back and forth between the pickup and the scale is significantly shortened, compared with the case of using an interferometer.

Abstract: A system for monitoring the deployment of an airbag. The system includes a sensor adapted to generate a signal and a flexible member having an indicator portion. The indicator portion inhibits at least a portion of the signal from transmitting through the flexible member.

Abstract: Rotary encoder apparatus is described that comprises one or more readheads (114) and a radial scale (20). Each of the one or more readheads (114) includes a light emitting portion (30, 32) for illuminating the radial scale and a light detecting portion (40, 42) for detecting interference fringes formed at a readhead analyser plane (AP). The readhead analyser plane (AP) is tilted relative to the plane containing the radial scale (20). In a preferred, embodiment, the readhead analyser plane (AP) is tilted towards the centre of rotation (112) of the rotary encoder apparatus by the angle (?).

Abstract: A lithographic apparatus includes a position measuring system configured to measure a position of a moveable object with respect to a reference frame of the lithographic apparatus, in at least one direction of an orthogonal x-y-z coordinate system of the moveable object. The position measuring system includes an optical x-z-encoder configured to measure a displacement of a radiation source, a first grating, and a detector with respect to a second grating of the encoder. The first grating includes an alignment marker. A controller is configured to define a zero level of the moveable object with respect to the reference frame in at least one of the x- and z-direction by performing the scanning along the first grating, the alignment marker during the scanning step causing changes in the phase of the response of both the first positive and negative orders.

Abstract: A movable body system is equipped with a stage having a stage main section which moves along an XY plane and a stage which is finely movable in a direction (a Z-axis direction) orthogonal to the XY plane and a tilt direction with respect to the XY plane, and a measurement device which measures positional information of the stage within the XY plane. The measurement device has a plurality of encoder heads arranged on the table, and optical fibers whose end sections are arranged facing each head at the stage main section and the optical axes at the end sections are substantially parallel to the Z-axis direction, and the device measures positional information of the stage, based on an output of a head facing a grating section placed substantially parallel to the XY plane. And, air transmission of a signal is performed between each of the heads and the end section of the optical fibers.

Abstract: A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes “primary” fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include “secondary” fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.

Abstract: A position measuring arrangement including a scale connected with a first object, wherein the scale includes a reference marking and a plurality of graduated areas, which are arranged a periodically in the measuring direction and have different optical properties. Respective additional structures are arranged in the measuring direction adjacent to the reference marking, which extend in the measuring direction and minimize secondary maxima in the reference pulse signal, wherein the additional structures includes at least two tracks having a first optical property, between which a graduated area having a second optical property and extending in the measuring direction is arranged. The position measuring arrangement further includes a scanning unit movable in relation to the scale in the measuring direction and is connected with a second object, the scanning unit includes individual detector elements, whose geometric arrangement is matched to the reference marking for generating the reference pulse signal.

Abstract: A scanning unit, by which a scale, which is movable in relation to the scanning unit in a measuring direction, can be optically scanned. The scanning unit including a detector arrangement and a transparent support having a first surface and a second surface, wherein the detector arrangement is arranged on the second surface. The scanning unit further including a transparent cover plate, which is fastened on the first surface of the transparent support and includes a shielding device for shielding the detector arrangement against electromagnetic fields.