Having Scale Or Grid Patents (Class 356/616)
  • Patent number: 7230727
    Abstract: A system for sensing an absolute position in two dimensions includes a target having a two-dimensional target pattern. A sensor captures an image of a first subset of the target pattern. A controller generates a first image vector representing summations of rows of pixel values from the image, and a second image vector representing summations of columns of pixel values from the image. The controller is configured to determine an absolute two-dimensional position of the first subset with respect to an origin of the target pattern based on the first and the second image vectors and a plurality of target vectors that represent the target pattern.
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: June 12, 2007
    Assignee: Agilent Technologies, Inc.
    Inventors: David C. Chu, Evan R. Whitney
  • Patent number: 7230230
    Abstract: A signal adjusting apparatus includes a movable member, a setting device, and a prohibiting device. The movable member is movable in a movable range to have the electrical signal adjusted in accordance with a position of the movable member. The setting device sets a prohibition range in the movable range. The prohibition range is a range where a volume level of the electrical signal is to be constant. The prohibiting device prohibits the volume level from being adjusted under the state that the movable member is located in the prohibition range.
    Type: Grant
    Filed: August 12, 2004
    Date of Patent: June 12, 2007
    Assignee: Pioneer Corporation
    Inventors: Takeaki Funada, Satomi Kasuya, Yoshiyuki Kakuta, Yoshinori Kataoka, Chihaya Oga, Jun Minokami, Youichi Yamada, Tatsuya Shiraishi
  • Patent number: 7202468
    Abstract: An angular offset sensing device includes an optical encoder having a light generating element and a light sensor. An armature includes a reflective surface having a generally semicircular shape and a spectrum of color disposed thereon varying from a first end of the surface to a second end of the surface. A housing encloses both the optical encoder and the armature and rotationally supports the armature. An electrical voltage is generated when light from the light generating element is reflected back to the sensor from the reflective surface. The voltage is proportional to a wavelength of the reflected light and is indicative of an angular rotation of the armature relative to the optical encoder. The voltage is corrected for linearity and used for example to signal a vehicle transfer case shift.
    Type: Grant
    Filed: October 2, 2006
    Date of Patent: April 10, 2007
    Assignee: Magna Powertrain USA, Inc.
    Inventors: Iraj Shahbazi, Victor L. Brezee, Randy Adler
  • Patent number: 7199356
    Abstract: First and second signal detecting element groups are respectively arranged to face first and second signal detecting tracks that are provided on a first code wheel. In addition, third and fourth signal detecting element groups are respectively arranged to face third and fourth signal detecting tracks that are provided on a second code wheel. A code string is output from the first and second signal detecting element groups to obtain a circular gray-code for detecting the rotation of the first code wheel within one revolution. Further, a code string is output from the third and fourth signal detecting element groups to obtain a circular gray-code for detecting the rotation of the first code wheel over one revolution.
    Type: Grant
    Filed: September 13, 2005
    Date of Patent: April 3, 2007
    Assignee: Alps Electric Co., Ltd.
    Inventor: Tadashi Sano
  • Patent number: 7196779
    Abstract: The present invention provides a sight adjuster for a velocity measurement system for sighting a projectile. A velocity measurement unit has a front sensor area and a back sensor area, and the sight adjuster has a front panel with a sighting bore such that the front panel is for positioning in the front sensor area of the velocity measurement unit, and the sight adjuster has a back panel for positioning in the back sensor area of the velocity measurement unit, and a light projects through the front panel sighting bore to strike the back panel.
    Type: Grant
    Filed: November 18, 2004
    Date of Patent: March 27, 2007
    Inventor: Daniel R. Royster
  • Patent number: 7196319
    Abstract: A position-measuring device for generating a measuring signal includes a track, which has an incremental graduation having a specified graduation period that extends along a measuring direction, having at least one discontinuity of the incremental graduation at a reference position for generating a reference signal and having a scanning unit movable relative to the track along the measuring direction, for scanning the incremental graduation, the at least one discontinuity formed by a modification of a transverse substructure of the incremental graduation that extends perpendicular to the measuring direction, and that deflects radiation beams originating from the scanning unit. The deflection direction at the discontinuity deviates from the deflection direction in other regions of the incremental graduation. The scanning unit includes at least two reference-pulse detectors provided for receiving radiation beams having a different deflection direction.
    Type: Grant
    Filed: September 21, 2004
    Date of Patent: March 27, 2007
    Assignee: Johannes Heidenhain GmbH
    Inventor: Karsten Saendig
  • Patent number: 7196801
    Abstract: A method for measuring a characteristic of a substrate, including directing an incident beam at an inspection grid of points on the substrate, receiving the reflected beam with a position sensitive detector, measuring the displacement of the reflected beam from its expected location, compiling a database of the displacement measurements, examining the database for effects of a pattern induced anomaly in the displacement measurements, producing an adjusted database, and deriving the characteristic of the substrate from the adjusted database. Thus, pattern induced errors from the displacement measurements are corrected. In this manner, problems with interpreting the reflection angles of a beam in substrate stress analysis equipment are overcome where distortions in the reflection angles are caused by deposition patterns on the substrates.
    Type: Grant
    Filed: February 3, 2004
    Date of Patent: March 27, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Gary R. Janik, Liang-Guo Wang, Christopher M. Pohlhammer
  • Patent number: 7193204
    Abstract: An optical encoder includes a sensor head, an encoder scale, and an optical wavefront dividing element. The sensor head includes a substrate, a light source, a first optical detector, and a second optical detector. The light source, the first optical detector, and the second optical detector are disposed on the substrate. The scale includes a first track and a second track. The optical wavefront dividing element is disposed between the sensor head and the scale. A light beam emitted by the light source is divided into a first beam and a second beam by the wavefront dividing element. The first beam is incident on the first track and the second beam is incident on the second track. Light from the first beam diffracted by the first track is incident on the first optical detector. Light from the second beam diffracted by the second track is incident on the second optical detector.
    Type: Grant
    Filed: July 7, 2003
    Date of Patent: March 20, 2007
    Assignee: GSI Group Corporation
    Inventor: Donald K. Mitchell
  • Patent number: 7183538
    Abstract: A signal adjusting apparatus comprises a movable member, a first detecting device, a second detecting device, and a correction device. The member is movable in a movable range composed of a plurality of intervals. The first detecting device detects one of the intervals where the member is located. The first detecting device is constituted by a first movable portion mounted on the member and a first fixed portion spaced apart from the first movable portion. The one of the intervals is an absolute position. The second detecting device detects a relative position of the member within the detected interval. The second detecting device is constituted by a second movable portion mounted on the member and a second fixed portion spaced apart from the second movable portion. The correction device corrects the detected relative position based on a relationship between the absolute position and the relative position stored in a memory.
    Type: Grant
    Filed: August 12, 2004
    Date of Patent: February 27, 2007
    Assignee: Pioneer Corporation
    Inventors: Jun Minokami, Yoshinori Kataoka, Yoshiyuki Kakuta, Chihaya Oga, Takeaki Funada, Youichi Yamada, Satomi Kasuya, Tatsuya Shiraishi
  • Patent number: 7176449
    Abstract: An angular offset sensing device includes an optical encoder having a light generating element and a light sensor. An armature includes a reflective surface having a generally semicircular shape and a surface height continuously increasing from a first end of the surface to a second end of the surface. A housing encloses both the optical encoder and the armature and rotationally supports the armature. An electrical voltage is generated when light from the light generating element is reflected back to the sensor from the reflective surface. The voltage is proportional to a wavelength of the reflected light and is indicative of an angular rotation of the armature relative to the optical encoder. The voltage is corrected for linearity and used for example to signal a vehicle transfer case shift.
    Type: Grant
    Filed: April 24, 2006
    Date of Patent: February 13, 2007
    Assignee: Magna Powertrain USA, Inc.
    Inventors: Iraj Shahbazi, Victor L. Brezee, Randy Adler
  • Patent number: 7164120
    Abstract: A method for position measurement that includes scanning a plurality of graduation periods of one incremental graduation by a detector arrangement extending over a length of one measurement range, a reference marking being integrated with one of the graduation periods, and generating a plurality of periodic scanning signals, of which at least one is locally modified by the reference marking. The method includes detecting the at least one scanning signal, modified by the reference marking, from among the plurality of periodic scanning signals. The method further includes determining an absolute position of the reference marking within the length of said measurement range as a function of the scanning signal detected.
    Type: Grant
    Filed: September 23, 2003
    Date of Patent: January 16, 2007
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventor: Erich Strasser
  • Patent number: 7161139
    Abstract: In a position measuring system and a method for operating such a position measuring system, e.g., for the purpose of producing at least one reference pulse signal, the position measuring system includes a gauge with a track in which a periodic incremental scale is disposed and extends in one direction of measurement. The track displays a discontinuity with respect to an optical property in at least one defined reference position. The position measuring system further a scanner unit that may be displaced across a predetermined measuring length relative to the gauge in the direction of measurement and that is provided, in addition to a light source, with a plurality of detector elements for the photoelectric scanning of the incremental scale. In adjacent sections of the measuring length, the incremental scale has different transverse substructures that deflect incident ray beams in first and second directions in space.
    Type: Grant
    Filed: September 2, 2002
    Date of Patent: January 9, 2007
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Wolfgang Holzapfel, Karsten Saendig
  • Patent number: 7145126
    Abstract: An optical device that includes a grating (for example a moving reflective grating) and a light source disposed opposing a predetermined side of the grating. The optical device also includes a first reference grating (e.g., a fixed grating) disposed between the light source and the grating, a detector disposed opposing the predetermined side of the grating and a second reference grating (e.g., a fixed grating) disposed between the detector and the grating. The grating, first reference grating and light source are configured for movement relative to one another. For example, the grating can be moveable while the light source and first reference grating are fixed.
    Type: Grant
    Filed: March 16, 2004
    Date of Patent: December 5, 2006
    Inventor: Wai-Hon Lee
  • Patent number: 7138623
    Abstract: An angular offset sensing device includes an optical encoder having a light generating element and a light sensor. An armature includes a reflective surface having a generally semicircular shape and a spectrum of color disposed thereon varying from a first end of the surface to a second end of the surface. A housing encloses both the optical encoder and the armature and rotationally supports the armature. An electrical voltage is generated when light from the light generating element is reflected back to the sensor from the reflective surface. The voltage is proportional to a wavelength of the reflected light and is indicative of an angular rotation of the armature relative to the optical encoder. The voltage is corrected for linearity and used for example to signal a vehicle transfer case shift.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: November 21, 2006
    Assignee: Magna Powertrain USA, Inc.
    Inventors: Iraj Shahbazi, Victor L. Brezee, Randy Adler
  • Patent number: 7135673
    Abstract: An angle absolute encoder comprises an encoded code rod that has code marks, such as pairs of fine code lines and coarse code lines. Light is reflected from or transmitted through the code marks and detected by a light detector to determine absolute angle position.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: November 14, 2006
    Assignee: The Boeing Company
    Inventor: Jonathan M. Saint Clair
  • Patent number: 7127824
    Abstract: Described is a device for machine tools or measuring apparatus for detecting the spatial position of a carriage movable in a coordinate axis along a guide with respect to a reference standard which is designed as a rectangular plate extending parallel to the guide of the carriage. Two opposed, parallel surfaces of the reference standard carry each a two-dimensional line grating. A position measuring system serves the function of determining continuously the spatial position of a support member fixedly connectible with the carriage. The position measuring system includes three optical incremental reading heads and one distance sensor. The support member is arranged on the movable carriage such as to prevent the support member from contacting the reference standard over the entire length of the travel while at the same time detection is being performed.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: October 31, 2006
    Assignee: Klingelnberg GmbH
    Inventor: Georg Mies
  • Patent number: 7112782
    Abstract: An optical position measuring system including a scale and a scanning unit. The scanning unit includes a light source that emits light beams and a periodic scanning graduation having scanning graduation marks arranged periodically at a scanning graduation period along a measuring direction. The scanning unit further including a detector arrangement. The scanning graduation or the scale graduation includes at least three partial tracks, which adjoin perpendicularly with respect to the measuring direction, and graduation marks associated with each of the at least three partial tracks have a defined and constant offset spacing from their nominal positions, wherein the offset spacings associated with adjoining ones of the at least three partial tracks differ, so that filtering of undesired harmonic waves out of the at least one periodic scanning signal results from said offset spacings.
    Type: Grant
    Filed: October 13, 2004
    Date of Patent: September 26, 2006
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventor: Volker Höfer
  • Patent number: 7092108
    Abstract: A method for position determination that includes generating first and second position-dependent scanning signals, transmitting the first and second position-dependent scanning signals from a scanning location via corresponding first and second scanning channels to corresponding first and second storage elements, storing corresponding first and second instantaneous values present at the first and second storage elements at corresponding first and second storage times. Forming a measured position value from the first stored instantaneous value and the second stored instantaneous value. A difference exists between corresponding first and second transit times of the first and second position-dependent scanning signals in the corresponding first and second scanning channels, the difference is compensated by individually delaying the first and second position-dependent scanning signals, so that the stored first and second instantaneous values have appeared at a common time at the scanning location.
    Type: Grant
    Filed: October 13, 2001
    Date of Patent: August 15, 2006
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Jörg Drescher, Mathias Hausschmid, Herbert Huber-Lenk, Herbert Reiter, Johann Streitwieser, Wolfgang Holzapfel
  • Patent number: 7084390
    Abstract: A position-measuring device includes a measuring graduation extending along a measuring direction, a scanning unit for scanning the measuring graduation, and a detection device of the scanning unit including a plurality of detector elements that are arranged periodically one after the other along an extension direction and that, during scanning of the measuring graduation, generate output signals able to be supplied to an evaluation unit. In each case, a plurality of adjacent detector elements are interconnected to form a detector group such that their output signals are able to be joined and supplied as a unified signal to the evaluation unit. The detector elements are combined to form detector groups, and are arranged in the form of detector groups one after the other along the extension direction such that at least one defined harmonic is eliminated from the output signals.
    Type: Grant
    Filed: August 18, 2004
    Date of Patent: August 1, 2006
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventor: Elmar Mayer
  • Patent number: 7078677
    Abstract: A code disk, an optical encoder using such a disk and a method thereof are described. The code disk includes a first region on the disk and a second region that is adjacent to the first region. The first region increases continuously in size in a radial direction from a minimum at a first angular position to a maximum that occurs 360 degrees from the first angular position. One of the first and second regions allows light to be transmitted therethrough to a detector, and the other of the first and second regions prevents light from being transmitted therethrough. The detector generates an output that corresponds to the amount of light transmitted through the code disk.
    Type: Grant
    Filed: January 21, 2004
    Date of Patent: July 18, 2006
    Inventors: Chee Keong Chong, Chin Yun Lee
  • Patent number: 7075661
    Abstract: Methods and apparatus for introducing a plurality of optical markers to a field of view, capturing a two-dimensional image of said field of view on an image plate comprising a pixel array, determining a set of marker origin offset values and using said offset values to establish a set of orientation values describing the relationship between the field of view and the image plate are disclosed. These orientation values are used to relate the area of image captured by each pixel in the image plate to the real world. By applying projective geometry, vector analysis and trigonometrical surveys an image analysis is conducted to establish a three-dimensional positional data set describing the three-dimensional position of regions of reflectivity in the captured two-dimensional image. From this data set a three-dimensional model of the field of view can be reconstructed.
    Type: Grant
    Filed: February 22, 2002
    Date of Patent: July 11, 2006
    Assignee: Industrial Control Systems Limited
    Inventors: John Michael Petty, Phillip Stephen Petty
  • Patent number: 7057162
    Abstract: An apparatus and a method of the present invention positions an optical component among several optical components, which are arranged in a receiving device. The receiving device is rotatable about an axis or movable along a direction in such a way that an optical component is positionable and the receiving device is retainable in a retention position. A coding device having first and second coders and two detectors are also provided. Either the coding device or the two detectors are associated with the receiving device and the two detectors detect the first and second coders at spatially different points. The coding device is embodied in such a way that the two detectors detect the first coder simultaneously when the receiving device is in a retention position and no more than one detector detects the second coder when the receiving device is in a region between two adjacent retention positions.
    Type: Grant
    Filed: September 25, 2003
    Date of Patent: June 6, 2006
    Assignee: Leica Microsystems Wetzlar GmbH
    Inventor: Wolfgang Rentzsch
  • Patent number: 7057163
    Abstract: An optical position sensing device for sensing a two-dimensional displacement, comprising a first photosensor arranged parallel to a first axis; a second photosensor arranged parallel to a second axis, wherein the first and the second axis are at an angle with respect to each other; and an encoding means which interferes with a path of light incident on the photosensors such that a pattern consisting of light and shadow is cast onto the photosensors, wherein the encoding means and the photosensors are able to move with respect to each other, resulting in modulation of light received by the photosensors, and are arranged in an arrangement such that when the encoding means moves relatively in a direction parallel to the first axis, the modulation of light received by the second photosensor is larger than the modulation of light received by the first photosensor; and when the encoding means moves relatively in a direction parallel to the second axis, the modulation of light received by the first photosensor is l
    Type: Grant
    Filed: April 28, 2003
    Date of Patent: June 6, 2006
    Inventor: Chong-Hin Chee
  • Patent number: 7057159
    Abstract: A light-emitting chip mounted on a leadframe has a light-emitting surface substantially orthogonal to an optical grating surface of a scale and in a direction of an optical grating. A transparent resin is molded so that it seals both the light-emitting chip and the leadframe. A first optical element reflects the light from the light-emitting chip substantially parallel to the optical grating surface and in a direction orthogonal to the direction of the optical grating. A second optical element reflects the parallel light from the first optical element and illuminates the optical grating over a specified area in the direction of the optical grating as the reflected parallel light is converged toward the optical grating.
    Type: Grant
    Filed: February 4, 2002
    Date of Patent: June 6, 2006
    Assignee: Mitutoyo Corporation
    Inventor: Toshihiro Omi
  • Patent number: 7050948
    Abstract: The invention describes a method and computer program product for the evaluation of data recorded by measuring instruments, which is particularly applicable to the precise localization of non-reflecting marks on a reflecting medium by means of a light-sensitive receiver and can be especially applied in precision positioning devices.
    Type: Grant
    Filed: May 23, 2002
    Date of Patent: May 23, 2006
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Uwe Trautwein, Fred Vogler
  • Patent number: 7046368
    Abstract: A position measuring arrangement for determining a relative position between a first object and a second object. The arrangement includes a light source having a single-mode laser light source that generates radiation and a signal generator that receives the radiation and generates displacement-dependent output signals that determine a relative position between a first object and a second object. A feedback device, wherein the laser light source interacts with the feedback device in such a way that an excitation of several modes takes place in the single-mode laser light source, and a multi-mode operation of the single-mode laser light source results.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: May 16, 2006
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Wolfgang Holzapfel, Udo Linnemann
  • Patent number: 7034948
    Abstract: A displacement pickup is provided which includes a displaceable scale (12) having defined therein a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a predetermined pitch different from that in the first area (12a), a first reading system (10) to read the positional information recorded in the first area (12a), a first phase detector (14) to detect a first phase on the basis of the positional information read by the first reading system (10), a second reading system (11) to read the positional information recorded in the second area (12b), a second phase detector (15) to detect a second phase on the basis of the positional information read by the second reading system (11), a phase comparator (16) to make a comparison between the first and second phases, and an origin signal generator (17) to generate an origin signal according to the result of comparison from the phase comparator (16).
    Type: Grant
    Filed: October 22, 2003
    Date of Patent: April 25, 2006
    Assignee: Sony Precision Technology
    Inventors: Hideaki Tamiya, Kayoko Taniguchi, Akihiro Kuroda
  • Patent number: 7019842
    Abstract: A position measuring device for detecting the relative position of a scanning unit and a scale. The position measuring device includes a scale and a scanning unit that is displaced with respect to the scale in a measuring direction. The scanning unit includes a scanning grating, a ridge prism and an optoelectronic detector element. The ridge prism having a ridge that is oriented parallel with the measuring direction, the ridge prism acts as a retro-reflector in a second direction which is aligned in a plane of the scale vertically with respect to the measuring direction.
    Type: Grant
    Filed: September 8, 2001
    Date of Patent: March 28, 2006
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Wolfgang Holzapfel, Andreas Schreiber
  • Patent number: 7012703
    Abstract: The invention is a system and method for automatically determining a resolution of an encoder, automatically calibrating the encoder resolution, and automatically determining a length of a workpiece from the encoder resolution and encoder count. The system comprises an encoder for generating an encoder signal indicative of linear movement of a moving workpiece traveling along a path. The system also comprises a first sensor positioned along the path traveled by the workpiece, the first sensor generating a first sensor signal in response to sensing an identifying characteristic of the workpiece. The system further comprises a second sensor positioned along the path traveled by the workpiece, the second sensor generating a second sensor signal in response to sensing the identifying characteristic of the workpiece, said second sensor being positioned a known distance from the first sensor along the path traveled by the workpiece.
    Type: Grant
    Filed: August 21, 2003
    Date of Patent: March 14, 2006
    Assignee: AMS Controls
    Inventors: Andrew J. Allman, James E. Burton, Richard D. Allman
  • Patent number: 6980303
    Abstract: The present invention provides a light emitting/receiving composite unit (1) for emitting and receiving lights, which includes a light source (3), an optical splitting unit (4) for splitting returning lights to the composite unit (1) into a plurality of lights, a polarizing unit (5) for increasing and decreasing quantity of lights transmitted therefrom corresponding to polarization state of the returning lights, and an optical receiving unit (6) which has a plurality of photo-detecting elements (6—1 to 6—4) for detecting the lights transmitted through the polarizing unit (5), which are unitedly integrated into one unit.
    Type: Grant
    Filed: February 1, 2002
    Date of Patent: December 27, 2005
    Assignees: Sony Corporation, Sony Precision Technology Inc.
    Inventors: Hidehiro Kume, Akihito Nakayama, Kayoko Taniguchi, Akihiro Kuroda
  • Patent number: 6977368
    Abstract: A position measuring system that includes a scale and a scanning device that scans the scale. A light source, which emits a light pulse upon receipt of a request signal and an optical fiber that transmits the light pulse from the light source to the scanning device and for illuminating the scale. At least one photo detector that detects the light pulse affected by the scale as a function of its position.
    Type: Grant
    Filed: October 13, 2001
    Date of Patent: December 20, 2005
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Jörg Drescher, Mathias Hausschmid, Herbert Huber-Lenk, Herbert Reiter, Johann Streitwieser, Wolfgang Holzapfel
  • Patent number: 6975408
    Abstract: This invention realizes a detection system which serves as a displacement measurement apparatus for optically detecting a relative position, improves the use efficiency of a light amount, and is resistant to mechanical variations. More specifically, in an optical sensor having a light source, a reflector for reflecting a divergent light beam from the light source, and a light-receiving portion for receiving a reflected light beam from the reflector. The reflector has an optical characteristic that a divergent light beam from the light source is wavefront-split into a plurality of beams and the respective split light beams are overlaid at a predetermined position.
    Type: Grant
    Filed: February 20, 2002
    Date of Patent: December 13, 2005
    Assignee: Canon Kabushiki Kaisha
    Inventors: Masahiko Igaki, Akio Atsuta
  • Patent number: 6970255
    Abstract: An encoder includes a layer on the scale that has a thickness that varies as a function of position along the length of the scale. The position of the sensor head with respect to the scale may be determined by measuring the thickness of the layer or index of refraction, e.g., using a reflectometer, and converting the thickness to the lateral position. In one embodiment, the thickness of the layer is used to provide a rough position of the sensor head with respect to the scale and an alignment target that includes periodic patterns on both the sensor head and scale is used to provide a refined position.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: November 29, 2005
    Assignee: Nanometrics Incorporated
    Inventors: Blaine R. Spady, John D. Heaton, Weidong Yang, Roger R. Lowe-Webb
  • Patent number: 6963409
    Abstract: An optical position measuring system including a periodic grating structure and a scanning unit. The scanning unit includes a light source that directs light towards the periodic grating structure and an optical lens device that receives light from the periodic grating structure and creates an image of the periodic grating structure in an image plane, the optical lens device having a periodic lens array with a grating period, AG(r) or the mutual distance between adjoining lenses of said lens array defined by the equation: A G ? ( r ) = ? ? ? ( r ) ? * [ t ? ( r ) * [ k + i + n ] + ? ] ( ? ? ? ( r ) ? + 1 ) wherein AG(r) is the grating per t(r) the period of the periodic grating structure, |?(r)| the absolute amount of the image magnification factor ? of the lens array ? a presettable defined phase shift r the radius of the grating arrangement, wherein in the case of a linear grating r=? and AG,t and |?| are constants, i, k, n ? N, i.e.
    Type: Grant
    Filed: April 2, 2003
    Date of Patent: November 8, 2005
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Ulrich Benner, Elmar Mayer
  • Patent number: 6958819
    Abstract: An encoder uses an alignment target that includes periodic patterns on the movable element and the stationary element. The alignment target may include at least two measurement locations, each location having a different offset between the periodic pattern on the movable element with respect to the periodic pattern on the stationary element. Alternatively, two measurements using different polarization states may be made at one location. When the periodic patterns on the movable element and the stationary element are aligned, the difference between the two measurements will produce a minimum, i.e., approximately a zero value plus noise. By counting the minima, the precise position of the movable element with respect to the stationary element can be determined. The resolution of the encoder may be further increased using reference measurements.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: October 25, 2005
    Assignee: Nanometrics Incorporated
    Inventors: John D. Heaton, Weidong Yang, Roger R. Lowe-Webb
  • Patent number: 6933492
    Abstract: An optical position transducer is arranged to determine the relative position of two objects. The position transducer includes a scale and a scanning device that is movable in relation thereto. On sides of the scanning device, signal-generating device(s) are provided for generating positionally dependent scanning signals, among which at least one is a deflector element for selectively influencing a light beam's propagation direction. Positioned on sides of the scanning device are adjustment device(s) for spatially adjusting the deflector element, the adjustment device(s) arranged to enable merely one spatial alignment of the at least one deflector element.
    Type: Grant
    Filed: August 4, 2003
    Date of Patent: August 23, 2005
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Udo Linnemann, Robert Sturm
  • Patent number: 6891150
    Abstract: It is an object of this invention to provide a mold for manufacturing an optical scale which can be easily manufactured and is capable of outputting high-precision position signals. In order to achieve this object, there is provided a mold for an optical scale, which has fixed and movable platens and is used to mold an optical scale, wherein both a first mold portion for forming a shaft mount hole for the optical scale and a second mold portion for forming a slit portion of the optical scale are arranged in one of the fixed and movable platens.
    Type: Grant
    Filed: April 11, 2001
    Date of Patent: May 10, 2005
    Assignee: Canon Kabushiki Kaisha
    Inventors: Manabu Takayama, Masahiko Igaki
  • Patent number: 6879405
    Abstract: A displacement pickup is provided which comprising a scale (12) having defined thereon a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a pitch different from that in the first area (12a), a first reader (10) which reads the positional information recorded in the first area (12a), a first phase detector (14) which detects a first phase on the basis of the positional information read by the first reader (10), a second reader (11) which reads the positional information recorded in the second area (12b), a second phase detector (15) which detects a second phase on the basis of the positional information read by the second reader (11), a phase comparator (16) which makes a comparison between the first and second phases, and an origin signal selector (18) which produce a plurality of signals according to the result of comparison and selects an arbitrary one of the plurality of signals on the basis of the pos
    Type: Grant
    Filed: November 10, 2003
    Date of Patent: April 12, 2005
    Assignee: Sony Precision Technology, Inc.
    Inventors: Hideaki Tamiya, Kayoko Taniguchi, Eiko Kanbara
  • Patent number: 6876458
    Abstract: In a method for determining the absolute coordinates of an object (1), the object (1) is exposed to light (3) through a projection grid (2). The light (4) reflected by the object 1 is registered by a sensor (5). The image picked up by the sensor is evaluated. In order to improve such a method, the projection grid (2) comprises a first grid with a first grid vector (G1), and a second grid with a second grid vector (G2) which differs from said first grid vector. The sensor (5) is arranged at a distance (b) from the projection grid (2) such that the projections (bx, by), of the base vector (b) leading from the first and from the second grids to the sensor (5), onto the associated grid vectors (G1, G2) differ in size.
    Type: Grant
    Filed: March 19, 2003
    Date of Patent: April 5, 2005
    Assignee: Steinbichler Optotechnik GmbH
    Inventor: Anton Kraus
  • Patent number: 6853459
    Abstract: The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.
    Type: Grant
    Filed: January 11, 2001
    Date of Patent: February 8, 2005
    Assignee: NanoFocus AG
    Inventors: Jürgen Valentin, Marcus Grigat, Hans-Hermann Schreier
  • Publication number: 20040246500
    Abstract: A scanning unit for a position measuring instrument for optical scanning of a measuring graduation. The scanning unit includes a light source that emits light in a direction towards a measuring graduation that generates modified light from the emitted light. A detector that receives the modified light. A lens array, disposed upstream of the detector and including a plurality of optical lenses, that generates a defined image of a region of the measuring graduation, scanned by the emitted light, on the detector, wherein an image magnification of the lens array is greater than 0 and less than or equal to 2.
    Type: Application
    Filed: April 9, 2004
    Publication date: December 9, 2004
    Applicant: Dr. Johannes Heidenhain GmbH.
    Inventors: Wolfgang Holzapfel, Elmar Mayer, Ulrich Benner
  • Patent number: 6828548
    Abstract: An optical displacement measurement apparatus increasing the valid light receiving area struck by light so as to give a larger signal and reducing the effect of any unevenness or spottiness of the illuminance of the light source or any scratches or dirt on the glass scale is provided. The apparatus has a plurality of light receiving element arrays having a plurality of light receiving elements, has a plurality of light receiving element groups having a plurality of light receiving element arrays, has the plurality of light receiving element arrays arranged shifted by predetermined distances in the direction of movement of the glass scale, and has the light receiving element groups arranged shifted by predetermined distances with respect to the direction of movement of the glass scale.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: December 7, 2004
    Assignee: Citizen Watch Co., Ltd.
    Inventors: Tsutomu Iesaka, Sigehiro Fuwa
  • Publication number: 20040227958
    Abstract: A position measuring system that includes a material measure having a measuring graduation extending along a first line and a scanning device. The scanning device includes a light source that transmits light beams that scan the measuring graduation, wherein the measuring graduation generates modified light from the transmitted light beams and a detector unit that receives the modified light from the measuring graduation. A lens arrangement, arranged between the material measure and the detector unit, the lens arrangement generating a defined image of the measuring graduation on the detector unit, wherein the defined image extends along a second line, whose curvature is different from a curvature of the first line.
    Type: Application
    Filed: May 7, 2004
    Publication date: November 18, 2004
    Applicant: Dr. Johannes Heidenhain GmbH
    Inventors: Ulrich Benner, Elmar Mayer, Wolfgang Holzapfel
  • Patent number: 6791699
    Abstract: An optical displacement-measuring apparatus has a scale on which optical gratings are formed along a first axis and a second axis. It also has a sensor head arranged opposite to the scale and relatively movable along the first and second axes. The sensor head includes a photosensitive unit (3) for optically detecting a relative movement to provide a displacement signal. The photosensitive unit (3) includes a transparent substrate (30). A photosensitive device array (PDAy) is formed with a semiconductor film deposited on the substrate (30) and arrayed along the first axis at a certain pitch for providing a displacement signal corresponding to a displacement along the first axis. A photosensitive device array (PDAx) is formed with a semiconductor film deposited on the photosensitive device array (PDAy) sandwiching an insulator layer therebetween and arrayed along the second axis at a certain pitch for providing a displacement signal corresponding to a displacement along the second axis.
    Type: Grant
    Filed: August 6, 2001
    Date of Patent: September 14, 2004
    Assignee: Mitutoyo Corporation
    Inventor: Toshihiko Aoki
  • Publication number: 20040168333
    Abstract: A scanning unit is for scanning a measuring standard having a coded track formed by a graduated scale, such as an incremental track, and a reference mark system, including a detector system for scanning the coded track and an additional detector system for scanning the reference mark system. The detector system, when scanning the associated coded track or reference mark system, receives scanning signals on a signal-sensitive surface, and the additional detector system includes at least two sensors, of which only one is used for scanning the reference mark system during operation of the scanning unit. Each of the two sensors is connected to one of the two inputs of a differential amplifier, and the sensor not used for scanning is deactivated in that its signal-sensitive surface is covered.
    Type: Application
    Filed: February 27, 2004
    Publication date: September 2, 2004
    Inventors: Herbert Mauerberger, Sebastian Tondorf
  • Patent number: 6771377
    Abstract: An optical displacement sensing device is provided for determining the relative displacement of a diffraction scale grating that may have a grating pitch less than the wavelength of the light of the sensing device. The sensing device includes a split light beam input portion for inputting two split light beams along respective light paths, and light beam directing elements for directing the two split beams along converging light paths toward a first zone on the scale grating to give rise to two diffracted beams along light paths which diverge. The sensing device further includes retroreflector elements for receiving the two diverging diffracted beams and retroreflecting them along light paths which converge toward a second zone on the scale grating to give rise to two later-diffracted light beams that are then directed to a shared zone. The retroreflectors may be positioned to eliminate cross-over beams and the need for polarizers.
    Type: Grant
    Filed: October 22, 2002
    Date of Patent: August 3, 2004
    Assignee: Mitutoyo Corporation
    Inventors: Benjamin K. Jones, Karl G. Masreliez, Kim W. Atherton
  • Patent number: 6763133
    Abstract: The present invention relates a moiré image capturing apparatus and the related method, the apparatus comprising: an optical projection unit arranged in perpendicular to a reference surface with a light source for illuminating light to the reference surface, where an object is positioned, and a projection grating installed on a optic axis between the light source and the reference surface for projecting the light generated by the light source toward the object; and an optical imaging unit arranged in perpendicular to the reference surface with an imaging lens for making an image with the light reflected at the object and a light receiving part installed on the same optic axis as that of imaging lens for receiving the light passing through the imaging lens to turn into a moiré image, so that a reference grating is removed to make the apparatus in a simpler structure and that a step of removing an image of the reference grating except the moire image having information on figure of the object is n
    Type: Grant
    Filed: May 30, 2000
    Date of Patent: July 13, 2004
    Assignees: Sun Moon University, Intek Engineering Co., Ltd., Zcan Co., Ltd.
    Inventors: Yoon-Chang Park, Kyung-Keun Park, Kyung-Min Jeong
  • Patent number: 6760466
    Abstract: An automatic image replacement and rebuilding system and method thereof which can replace and rebuild the image automatically. The system includes an input module; a processing module; a storage module; and an output module. The input module inputs external image data into the system. The processing module is coupled to the input module to receive the image data, then analyzes the shading value and the direction of the sample object in the image data, and outputs an access signal and an output signal. The storage module coupled to the processing module to receive the access signal, and is stored or read out on a replaced image, and the output module coupled to the processing module to receive the output signal, and outputs the image data.
    Type: Grant
    Filed: January 29, 2001
    Date of Patent: July 6, 2004
    Assignee: Institue of Information Industry
    Inventors: Ta-Chun Wang, Wen-Jen Ho
  • Publication number: 20040119989
    Abstract: A scanning unit for an optical position measuring device, the scanning unit having a structured optoelectronic photodetector that includes: a semiconductor substrate, a plurality of radiation-sensitive detector areas, which are arranged next to each other on the semiconductor substrate and a strip conductor, wherein at least a portion of the strip conductor is positioned across a surface defined by the plurality of detector areas and forms a connection with an associated detector area of the plurality of detector areas.
    Type: Application
    Filed: November 28, 2003
    Publication date: June 24, 2004
    Inventors: Elmar J Mayer, Wolfgang Holzapfel, Klaus Loeschcke
  • Patent number: 6723980
    Abstract: An optical track sensing device, and in particular to an optical sensor for detecting optical tracking information on a moving medium (or stationary medium and moving sensor). The sensing device relies on self-imaging, rather than optics, and obtains a very acceptable detected signal at other than the self imaging plane of the reflection off a moving medium. This provides more flexibility in the placement of the sensor, while still allowing the elimination of optical components by relying on self-imaging instead. In addition, by providing a pattern over the photodetector with a smaller period, higher frequency harmonics are detected, allowing more precise detection of the position of the medium. In one embodiment, the period of the detector pattern is selected to detect the higher harmonics of the grating on the moving medium.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: April 20, 2004
    Inventor: Wai-Hon Lee