Abstract: A beam position measuring apparatus and method using a beam expansion device may expand areas of beams irradiated onto a beam detection sensor. The beam expansion device is configured to expand areas of the beams onto the beam detection sensor is installed between a beam generator and the beam detection sensor. Central positions of the irradiated beams are detected using intensities of beams irradiated onto respective pixels of the beam detection sensor.

Abstract: A metrology tool is arranged to measure a parameter of a substrate that has been provided with a pattern in a lithographic apparatus. The metrology tool includes a base frame, a substrate table, a sensor, a displacement system, a balance mass, and a bearing. The substrate table is constructed and arranged to hold the substrate. The sensor is constructed and arranged to measure a parameter of the substrate. The displacement system is configured to displace the substrate table or the sensor with respect to the other in a first direction. The bearing is configured to movably support the first balance mass so as to be substantially free to translate in a direction opposite of the first direction in order to counteract a displacement of the substrate table or sensor in the first direction.

Abstract: A method of, and a device for, locating a piece with respect to a tool, utilize a measuring device for measuring a feeding speed, a driving direction and a feeding amount of the piece. The piece bears against two abutment rollers and is driven by a driving roller that is operated by a controllable motor operatively coupled to a machine numerical control apparatus. An output of the measuring device and an output of the controllable motor are both coupled to the machine numerical control apparatus.

Abstract: A hand-held device (10, 10?) for contactless distance measurement measures a distance (d) between a target object (18) and at least one reference point (20) of the device (10) using an emitted modulated measurement signal (16). The device includes a housing (12, 13, 56) with a first end (34) that faces the object (18) to be measured, and a second end (35) facing away from the object (18) to be measured. The housing includes an output unit (22, 28, 29, 31) for depicting measured results. Several measured distance values are to be assigned to at least one subsection of the path between the object (18) to be measured and the opposite end (35) of the housing (12, 13, 56) via a length-measurement scale (36, 38, 54) that is displayable in the output unit (22, 28, 29, 31).

Abstract: An apparatus for manufacturing a hydro dynamic bearing device is provided for the finishing treatment of lubricating oil after lubricating the hydro dynamic bearing device. The hydro dynamic bearing is constructed of an axial member housed in a housing, a radial bearing part for supporting the axial member in a non-contact manner in a radial direction by a hydro dynamic pressure action of the lubricating oil generated in a radial bearing clearance, and a sealing part arranged in an opening part of the housing, and the apparatus has a laser for measuring an oil-level height of the lubricating oil in the housing.

Abstract: An instrumented fastener (e.g., a “tack” fastener) includes one or more light sources (e.g., light-emitting diodes) configured to produce a light beacon that includes encoded information regarding the instrumented fastener (e.g., part number), wherein the direction of the light beacon can be used to align external and/or internal assembly systems to the instrumented fasteners. The light beacon may be activated automatically, or via an instruction received from an external system. Once aligned, the assembly system may, for example, proceed with installing permanent fasteners between neighboring tack fasteners.

Abstract: Apparatus for tracking an object (12A, 12B, 12C) including radiator modules (16A, 16B, 16C), disposed in an array of known locations adjoining a region (13) in which the object moves; each module includes at least one emitter (44, 46, 48) which emits a respective color selected from among a first plurality of colors. The apparatus includes a controller (32), which drives the at least one emitter to emit during a respective time slot, selected from among a second plurality of time slots during which the modules may emit. The apparatus also includes a location unit (22), fixed to the object and including at least one camera (72), which captures a sequence of electronic images containing some of the locations of the modules. The apparatus further includes a processing unit (26), which processes the electronic images to determine, responsively to the colors emitted by the modules and the time slots in which the colors are emitted, a location of the object.

Abstract: A computationless system is provided for determining the direction of and distance to a target, involving bathing an area surrounding an area to be protected with a polyspectral series of narrow fan beams of different colors from at least two spaced-apart projectors. The differently colored beams go out at different angles, thus to color-code map the area surrounding the protected space where beams of different colors cross to form color-coded cells. Light reflected back to the area to be protected from a threat has a color code corresponding to the colors associated with beams that cross at the threat, thus to identify by the reflected colors where in space the threat is located.

Abstract: A system and method uses light signals to detect and display the position of an airborne vehicle, such as a helicopter, during takeoff or landing or low speed, low altitude operation. A transmitter on the vehicle emits light signals while an optical receiver retrieves reflected light signals. Using light detection and ranging techniques, various parameters, such as altitude, ground speed and relative wind, are calculated based on the Doppler shift within the reflected light signals. The signals are transmitted in three different directions to facilitate the measurements of different Doppler shifts. The parameters are also displayed on a screen or other visual device within the vehicle.

Abstract: Methods are disclosed wherein the structural health of a civil structure, such as, but not limited to, a bridge or the like is measured by electronic distance measurement from a plurality of stable locations to a plurality of cardinal points on the structure in a methodical manner. By measuring the coordinates of the cardinal points, the dynamic and long-term static behavior of the structure provide an indication of the health of the structure. Analysis includes; comparison to a Finite Element Model (FEM), comparison to historical data, linearity, hysteresis, symmetry, creep, damping coefficient, and harmonic terms.

Abstract: A position sensing device comprises a light source that radiates diffuse source light along an optical axis direction to a detector, and a moving aperture arrangement positioned between the source and detector, to move perpendicular to the optical axis direction. The moving aperture arrangement comprises first and second limiting apertures, which angularly filter and transmit the diffuse source light to form a measurement spot on the detector. At least one signal output by the detector is indicative of a position of the movable member along a measurement axis. The angular intensity distribution of the angularly filtered rays of light which form the measurement spot is more consistent as a function of position along the measurement axis than the angular intensity distribution of the source light. The resulting consistent intensity distribution within the measurement spot throughout the measurement range enhances measurement linearity and accuracy.

Abstract: A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.

Abstract: The invention relates to a focusing and positioning ancillary device for a particle-optical scanning microscope, a particle-optical scanning microscope including a corresponding positioning aid, and a method for focusing and positioning an object in a particle-optical scanning microscope. The focusing and positioning ancillary device includes an illuminating device, a camera, a display and a control unit. The illuminating device produces a collimated or focused light beam at an angle to the particle-optical beam axis which intersects the particle-optical beam axis at a predetermined position. The camera is sensitive to the wavelength of the light beam and records an image of the object, which is positioned on the object table, at a second angle to the particle-optical beam axis. The control unit produces an image captured by the camera on the display together with a marking which indicates the position of the particle-optical beam axis in the image.

Abstract: A position measuring arrangement that includes a retroreflector, a light source generating a lightbeam and a scanning unit that receives the lightbeam and generates a partially-divergent lightbeam. The scanning unit includes a scanning mirror that is mounted so it can be deflected in a reproducible manner around two different rotating axes that cross each other in a center of the scanning mirror so that a grid-like scanning of a two-dimensional spatial area by the partially-divergent lightbeam, in relation to which the retroreflector is arranged, takes place over a plurality of scanning tracks. The position measuring arrangement further including an interferometric distance measuring unit that includes a beam splitter element that splits the lightbeam generated by the light source in such a way that split lightbeams pass through a reference arm and a measuring arm at least once in each direction.

Abstract: A profile scanner for locating a target zone on a profile of a vessel comprising an emitter adapted to progressively or instantaneously radiate towards the vessel; a receiver providing a signal indicative of radiation incident thereon; a controller or processor including stored instructions, for energizing the emitter and receiving the signal, and adapted to determine the vertical location of the target zone relative to scanner.

Abstract: A laser based coordinate measuring device measures a position of a remote target. The laser based coordinate measuring device includes a stationary portion, a rotatable portion, and at least a first optical fiber. The stationary portion has at least a first laser radiation source and at least a first optical detector, and the rotatable portion is rotatable with respect to the stationary portion. The first optical fiber system, which optically interconnects the first laser radiation source and the first optical detector with an emission end of the first optical fiber system, has the emission end disposed on the rotatable portion. The emission end emits laser radiation to the remote target and receives laser radiation reflected from the remote target with the emission direction of the laser radiation being controlled according to the rotation of the rotatable portion.

Abstract: A laser based coordinate measuring device measures a position of a remote target. The laser based coordinate measuring device includes a stationary portion, a rotatable portion, and at least a first optical fiber. The stationary portion has at least a first laser radiation source and at least a first optical detector, and the rotatable portion is rotatable with respect to the stationary portion. The first optical fiber system, which optically interconnects the first laser radiation source and the first optical detector with an emission end of the first optical fiber system, has the emission end disposed on the rotatable portion. The emission end emits laser radiation to the remote target and receives laser radiation reflected from the remote target with the emission direction of the laser radiation being controlled according to the rotation of the rotatable portion.

Abstract: An alignment device includes an incoherent light source, a first convex lens, a mirror rod, and a second convex lens. The incoherent light source emits incoherent light that is received by the first convex lens that produces a low divergence light beam. The low divergence light beam is directed to the mirror rod that reflects the light beam to the second convex lens that focuses the light beam to a convergent light beam.

Abstract: An apparatus measures displacement of a structure having a curved surface, such as a pipe, conduit, shaft or rod. The apparatus includes a support structure having opposing first and second ends, with a first laser distance measurement device at the first end and a second laser distance measurement device at the second end. The laser distance measurement devices generate dual laser beams that illuminate the curved surface of the structure, detect laser energy reflected from the curved surface of the structure, and generate distance signals based on the detected laser energy. A measurement device on the support structure measures a spacing between the two laser beams. The support structure is pivotally attached to a stabilizing base, thereby providing for the tilting of the support structure and the laser beams. An inclinometer on the support structure measures an angle of tilt.

Abstract: A coordinate detection apparatus has a light projecting unit and light receiving unit, detects abnormal light based on the output from the light receiving unit in a state in which the light projecting unit does not project any light, and detects the coordinates of a light-shielded position based on the output from the light receiving unit in a state in which the light projecting unit projects light.

Abstract: A method is disclosed whereby a laser-based spherical coordinate measurement system is dynamically calibrated. A mechanical oscillator, such as, but not limited to, a Foucault pendulum is used to generate periodic motions which can be fitted to Fourier series models. The residuals between the experimental measurements and the model can provide information which can be used to calibrate the instrument. The calibration information is used to augment the ASME B89.4.19-2006 standard to improve sensitivity to cyclic errors and include the servo systems.

Abstract: A wafer measurement/inspection instrument receives information on at least one of a processing result and an operating state of at least one of a coater/developer that performs film forming/resist processing to a wafer and an exposure apparatus that performs liquid immersion exposure to the wafer, and optimizes inspection conditions of the wafer based on the received information (steps 501 and 517). With this operation, quality inspection of the wafer can be efficiently performed, and as a consequence, it becomes possible to efficiently perform processing to the wafer.

Abstract: The invention relates to a system for determining a position by emitting a first laser beam (7) by a laser source (6) positioned in a reference system onto a detector (1) and simultaneously detecting the first laser beam (7) by the detector (1), thus defining an emission direction of the laser source (7). The detector (1) has a segmented detection area comprising a plurality of discrete partial detection areas (17), each having a defined partial detection direction and at least two partial detection directions thereof being different. When detecting the first laser beam (7), an impingement point (9) of the first laser beam (7) on the detector (1) is detected by means of at least one partial detection area (17), and when determining the incidence direction (10), said direction is derived from the at least one partial detection direction. The location of the detector (1) relative to the laser source (6) and the reference system is then determined using the emission direction and the incidence direction (10).

Abstract: The invention proposes a sensor array having a plurality of sensor devices comprising a source of electromagnetic radiation, a receiver for the electromagnetic radiation and a control device, the control device being designed to use the source to emit electromagnetic radiation and being designed to determine a distance covered by electromagnetic radiation, which is emitted by the source, from a reflection surface of an object to the receiver by evaluating the reflected radiation. According to the invention, the sensor devices of the plurality of sensor devices operate at different frequencies or using time-division multiplexing. The invention also proposes a sensor device for a sensor array, the control device being designed to measure the distance at different frequencies or using time-division multiplexing.

Abstract: As a light beam of a scanning optical system unit is adjusted in the state where the scanning optical system unit is assembled, its adjustment work and the assembly work of the scanning optical system are prevented from being useless. Thus, a scanning optical system adjusting device which can adjust the scanning optical system quickly and at a low cost is to be provided. A scanning optical system adjusting device according to the invention includes a static angle control unit configured to maintain a rotation angle of a rotary polygon mirror in the assembly unit of the scanning optical system at a predetermined angle and make the rotary polygon mirror static there, and a light beam parameter measuring unit configured to measure a predetermined parameter of a light beam reflected by the rotary polygon mirror maintained at the predetermined angle by the static angle control unit.

Abstract: An apparatus for measuring distances includes a lens module, a light sensor, and a calculation module. The lens module is used for imaging an object to be measured. The lens module has a focal plane which is non-vertical to the light axis thereof. The light sensor is used for receiving the image of the object through the lens module, and generating a corresponding signal accordingly. The calculation module is used for calculating the distance of the object based on a high frequency part of the signal. A relative method for measuring distances is provided as well.

Abstract: A probe includes an insertion tube and a plurality of light emitters disposed on the distal end of the insertion tube. The probe further includes at least one intensity modulating element through which light from the plurality of light emitters is passed to project a plurality of fringe sets onto a surface. Each of the plurality of fringe sets intern have a structured-light pattern that is projected when one emitter group of at least one of the plurality of light emitters is emitting. The probe further includes an imager for obtaining at least one image of the surface and a processing unit that is configured to perform phase-shift analysis on the at least one image. A method for projecting a plurality of fringe sets suitable for phase-shift analysis on a surface using a probe is also presented.

Abstract: A position transducer system is disclosed for a limited rotation motor that includes an illumination source that directs illumination toward an illumination reflector that rotates with a rotor of the limited rotation motor, and a plurality of detector areas adjacent the illumination source for receiving modulated reflected illumination from the illumination reflector.

Abstract: A system for automating the casting of concrete panels in which a bed position indicator is fed to a program which compares the bed position to CAD drawings concerning the concrete to be cast and sends the drawing detail for the position of the bed which is then shown on the bed by a laser.

Abstract: A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe.

Abstract: The present invention relates to an optical sensor based on the transit time principle, comprising a light source for the emission of emergent light pulses into an observed region, comprising a rotating device for rotating a beam direction of the emergent light pulses about a rotation axis orientated transverse to the beam direction, and comprising a detector for the detection of light pulses reflected by objects in the observed region, comprising a housing for keeping the sensor interior separate from the environment and including a partitioning screen that is transparent to the emergent light pulses and to the reflected light pulses, comprising a test device for testing the translucence of the partitioning screen, and comprising a control and evaluation unit for controlling the light source, for evaluating the light pulses detected by the detector, and for determining the distance away of an object on the basis of the measured transit time of the light pulses, which control and evaluation unit cooperates wi

Abstract: An optical measurement apparatus comprises an optical system (100). The optical system (100) comprises a source (102) and an image capture device (112). The source (102) is arranged to generate, when in use, a beam of electromagnetic radiation. Further, the optical system (100) is arranged to direct the beam of electromagnetic radiation to a location to be measured (132). The optical measurement apparatus also comprises a feedback arrangement (400, 602, 604) arranged to receive a reflected beam from the location to be measured and to provide feedback information in response to receipt of the reflected beam, the feedback information being indicative of degree of alignment of the location to be measured with the optical system.

Abstract: Systems and techniques for laser metrology. Two or more fanned probe beams are scanned relative to a surface including one or more targets. A position detection module receives return beam information from the fanned probe beams, and determines a position of at least a first target of the one or more targets based on the return beam information.

Abstract: A chromatic confocal technique and apparatus for the rapid three-dimensional measurement of an object shape, particularly of a tooth in a patient's jaw, using an array of polychromatic point light sources, a planar detector matrix, a beam splitter for lateral spectral separation, and an objective for illuminating and recording the object. Spectral defined reference light bundles are generated, injected into the detection beam path via a reference beam path and, following spectral splitting, are focused on the detector matrix as reference image points, wherein laterally shifted sub-matrices are numerically defined on the detector matrix for spectral analysis of the object light, which sub-matrices are implemented as spectral cells for three-dimensional measurement of the shape of the object.

Abstract: A system for measuring a hole of a surface may include at least one light emitting member for emitting varied intensity flashes of light towards the hole of the surface. The system may further include a projector for projecting light beams onto the surface. The system may additionally include at least one camera for taking at least one picture of the hole of the surface each time the at least one light emitting member emits a flash of light towards the hole of the surface, and each time the projector projects light beams onto the surface. The system may also include a computer for determining measurements of the hole of the surface utilizing the at least one picture of the hole and Photogrammetry.

Abstract: An apparatus includes a first support structure configured to support an element that has an alignment marker provided with at least one height difference. The apparatus also includes an alignment sensor comprising a light source that is configured to provide a light beam that illuminates the alignment marker; and at least one detector configured to detect the at least one height difference of the alignment marker by analyzing the light beam reflected by the alignment marker. Such an apparatus may be used to align of the element with respect to the first support structure.

Abstract: An optical apparatus for plasma includes a light collection lens provided to receive optical emission spectrum from plasma, a first aperture stop disposed between the light collection lens and the plasma to block out-focused light, a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light, and a pinhole disposed at the imaging area of the light collection lens to limit depth of focus.

Abstract: An optical fly height measurement system includes a planar waveguide, a first diffraction grating for coupling an electromagnetic wave into the planar waveguide wherein the first diffraction grating is positioned for directing the electromagnetic wave towards an air bearing surface of a slider. A second diffraction grating is provided for receiving the electromagnetic wave reflected from the air bearing surface. A detector module and processor are provided to determine the fly height.

Abstract: An on-board, noncontact measurement system and method is disclosed for measuring track quality, vertical track stiffness and vertical track modulus for a portion of track underlying the rail vehicle. The system comprises first and second optical emitters mounted to the vehicle and configured to emit beams of light that are detectable on the underlying surface; a camera mounted to the vehicle for recording the distance between the beams of light as the vehicle travels along the surface, a mechanism for measuring the distance between the beams of light for a particular portion of the surface; and a mechanism for determining the vertical track stiffness or vertical track modulus for a particular portion of the track.

Abstract: This invention provides a displacement measurement device, a displacement measurement method, and a thickness measurement device capable of easily ensuring a conjugate relationship between the light source and the diaphragm and capable of accurately measuring the change in distance with the testing target. In the displacement measurement device, the light from the laser diode is collected towards the pin hole of the diaphragm plate at the collective lens, and then sent to the objective lens through the pin hole. The light is reflected at a surface of work, and detected by a photodiode through the objective lens, the pin hole, the collective lens, and the half mirror. That is, the pin hole becomes a substantial light source, and becomes a diaphragm with respect to the incident light on the work. The spot diameter collected on the pin hole by the collective lens is greater than the diameter of the pin hole.

Abstract: A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.

Abstract: A device for determining the position of a semiconductor substrate on a rotation device having a rotational axis, including a direction of rotation detecting unit for determining the rotational state of the rotation device, and also including at least one light source and at least one receiver which is photo-sensitive to the light from the light source, wherein at least one light beam emitted by the light source is directed toward the edge of the semiconductor substrate and passes said edge to at least a partial extent. The light of the light beam which has passed to at least a partial extent is then detected at least partially by the receiver.

Abstract: The aim of the invention is to determine the actual position and/or actual orientation of a measuring appliance (4b). To this end, at least two reference points (2b?) lying in a spatial segment (5?) scanned by a laser beam are detected and measured in terms of the distance thereinbetween and the inclination angle thereof. The actual position of the measuring appliance (4b) can be deduced from the known positions of said reference points (2b?) arranged in a detectable manner and the associated distances and inclination angle thereof. The detection, monitoring and measuring of the reference points is carried out by the measuring appliance (4b) in an automated manner, the measuring appliance (4b) and specifically embodied elements associated with the reference points (2b?) forming a local positioning and/or orientation measuring system.

Abstract: A method for determining a position of a selected area of a sheet of material relative to a reference plane includes launching a first incident light beam at the selected area of the sheet of material such that the first incident light beam strikes the selected area at a first position and a first angle, thereby producing a first reflected light beam. A second incident light beam is launched at the selected area of the sheet of material such that the second incident light beam strikes the selected area at a second position and a second angle, thereby producing a second reflected light beam. The second position and second angle are different from the first position and first angle, respectively. The first reflected light beam and the second reflected light beam are intercepted at the reference plane.

Abstract: In a measurement device for measuring a peripheral position in a Cartesian coordinate system, a rotating laser source is configured to emit a laser beam along a radius of a rotator. A reflector is configured to reflect the laser beam in a direction orthogonal to a path of the laser beam, and a scale having a pattern of transparent and reflective areas is positioned at a peripheral position of the measurement device. A detector is configured to provide a sequence of pulses by detecting a reflex or transmission of the rotating laser beam while the laser scans over the scale. The sequence of pulses correspond to Cartesian coordinates of the system.

Abstract: An optical arrangement includes a position sensitive optical detector, a collimated optical source, and a processor configured to monitor the inclination of an object. The collimated optical source is configured to transmit a collimated beam towards the object. The position sensitive optical detector is configured to detect the specific location of incidence of an optical signal received from the object, and the processor is configured to generate information relating to the inclination of the object from processing optical signals received at the position sensitive optical detector.

Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.

Abstract: Methods for digitizing complex surfaces of dental objects such as impressions of dental surfaces and shapes. While an impression mold is being scanned by translation along a known trajectory, typically in a plane, the line of sight of a distance probe is directed toward successive positions on the surface of the impression mold, such as by a periodic series of reflecting surfaces characterized by normal vectors at distinct non-orthogonal angles with respect to their axis of symmetry. One or more reference objects are scanned using the same translation and mirror positioning systems. Gathered coordinate data are processed to apply angular corrections and combined to form a single distortion-corrected image of the impression mold. An apparatus and methods are provided for measuring both sides of a dental object separately, and then registering the two sides relative to each other in a digital representation of the object.

Abstract: An optical locating device (100) for identifying position includes a light emitter (101), a reflector (20), and a light receiver (30). The light emitter is disposed on a moving member (10) for emitting light. The reflector is configured for reflecting the light. The light receiver has at least one linear image sensor (301) for receiving the light reflected by the reflector and thereby generating an image signal corresponding to the light, and a processor (302) connecting to the image sensor to process the image signal for identifying the position of the moving member.

Abstract: Multidirectional retroreflectors and methods of reflecting light beams from multiple directions are provided. The multidirectional retroreflectors utilize a four-mirror retroreflector with a common virtual reflection point.