Position Of Detected Arrangement Relative To Projected Beam Patents (Class 356/622)
  • Patent number: 6903827
    Abstract: In order to adjust position of color combining optical system relative to a color separating optical system accommodated in an optical component casing for producing a projector, a white laser beam is irradiated on an optical axis of a light beam passing through the optical component casing and is separated by the color separating optical system, the separated respective color lights being incident on a light-incident end surface of the color combining optical system to be combined, the combined light beam being detected by a sensor, in which the position is adjusted while detecting the combined light beam.
    Type: Grant
    Filed: February 13, 2002
    Date of Patent: June 7, 2005
    Assignee: Seiko Epson Corporation
    Inventors: Masashi Kitabayashi, Shohei Fujisawa, Hidetoshi Hashizume
  • Patent number: 6892160
    Abstract: A method of locating an assembly point (P) on a first part (40), at which assembly point the first part is to be joined to a second part (1), the method comprising the steps of: determining an assembly location (1a, 1b, 1c, 1d) in respect of the second part; measuring a portion (42a, 42b, 42c) of a surface (43) of the first part, the surface being spaced away from the second part, so as to define the position and orientation of the surface; and, calculating the assembly point on the surface of the first part, where the surface of the first part is intersected by a vector (N) passing between the determined assembly location and the surface of the first part.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: May 10, 2005
    Assignee: BAE Systems plc
    Inventors: Richard Michael Gooch, Carol Anne Walker, John Stewart Anderson
  • Patent number: 6856388
    Abstract: An optical sensor for measuring the distance and/or inclination of a surface, particularly relative to a reference plane, or for detecting the distance and/or change in inclination of a surface, wherein a light spot is generated on a detector in that a light beam that is collimated in a first direction is focused in a direction perpendicular to the first direction, so that a line focus is effected along the first direction on the surface and the line focus is imaged on the detector in the second direction and, at the same time, the beam that is reflected at the surface and collimated in the first direction is focused on the detector, wherein the line focus is perpendicular to the reflection plane defined by the impinging, reflected beam.
    Type: Grant
    Filed: May 10, 2001
    Date of Patent: February 15, 2005
    Assignee: Carl Zeiss Jena GmbH
    Inventor: Stefan Schmidt
  • Patent number: 6853459
    Abstract: The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.
    Type: Grant
    Filed: January 11, 2001
    Date of Patent: February 8, 2005
    Assignee: NanoFocus AG
    Inventors: Jürgen Valentin, Marcus Grigat, Hans-Hermann Schreier
  • Publication number: 20040263865
    Abstract: A non-circular-orbit detection method and apparatus is disclosed. In some embodiments, the method includes: locating first and second detectors, displaced with respect to one another, a distance from a patient; moving the first and second detectors in a direction towards the patient until a first sensor senses a first point of the patient at a first sensing position; moving the first and second detectors in a second direction from the first sensing position until a second sensor senses a second point of the patient at a second sensing position; and moving the first and second detectors in a non-circular-orbit around the patient. Preferably, the method includes determining the non-circular-orbit based on, among other things, locations of the first point and the second point.
    Type: Application
    Filed: June 27, 2003
    Publication date: December 30, 2004
    Inventors: John Thomas Pawlak, Anthony Perrone
  • Patent number: 6822750
    Abstract: A method of making optical transducers by producing an integrated structure including, in a rectangular matrix array, a plurality of discrete light sources, a plurality of discrete light detectors each laterally spaced from a light source, a light shield in the space between a light source and a light detector for shielding the light detector from direct exposure to the light source, and a transparent plastic potting material embedding the light sources, light detectors and light shield; and cutting the integrated structure, along lines of the matrix, into individual optical units, each including a light source, a light detector, a light shield therebetween all embedded in the transparent plastic potting material, and an optical window for outputting light from the light source and for transmitting to the light detector light reflected back from the light source.
    Type: Grant
    Filed: March 13, 2002
    Date of Patent: November 23, 2004
    Assignee: Phone-Or Ltd.
    Inventors: Alexander Paritsky, Alexander Kots
  • Patent number: 6819436
    Abstract: An image capturing apparatus for obtaining information regarding a depth of a subject includes: an illumination unit operable to cast a first illumination light beam that mainly contains a first wavelength and has a first intensity distribution on a plane perpendicular to an optical axis of the first illumination light beam and a second illumination light beam mainly containing a second wavelength and a third wavelength and having a second intensity distribution on a plane perpendicular to an optical axis of the second illumination light beam onto the subject, the second and third wavelengths being different from the first wavelength, the second intensity distribution being different from the first intensity distribution; and a depth calculation unit operable to calculate a depth-direction distance to the subject based on outgoing light beams from the subject.
    Type: Grant
    Filed: March 2, 2004
    Date of Patent: November 16, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Shuji Ono
  • Patent number: 6813567
    Abstract: Systems and methods are described for processing an emission signal, such as a fluorescent signal, to compensate for noise in an excitation beam, such as a laser beam. As one example, a scanning system is described that includes an excitation signal generator that provides an excitation signal having one or more representative excitation values representative of an excitation beam; an excitation reference provider that provides at least one excitation reference value; a normalization factor generator that compares the excitation reference value to at least one representative excitation value, thereby generating a normalization factor; and a comparison processor that adjusts at least one emission value corresponding to the at least one representative excitation value based, at least in part, on the normalization factor.
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: November 2, 2004
    Assignee: Affymetrix, Inc.
    Inventors: Nathan K. Weiner, Peter D. Honkanen, Timothy J. Woolaver
  • Patent number: 6806484
    Abstract: An edge detector with sub-micron accuracy. The edge detector comprises two single mode optical fibers with an optical path between them. One fiber is coupled to a laser light source, and creates a light beam. The other fiber is coupled to an optical power detector. The optical power reaching the optical power detector is determined by how much of the light beam is obscured by an object. Thus the position of the edge of the object may be determined from the optical power measured by the detector. The edge of an object may be positioned automatically according to the optical power measured by the detector.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: October 19, 2004
    Assignee: Agilent Technologies, Inc.
    Inventors: Edward Steketee, John Bernard Medberry, Benno Guggenheimer
  • Patent number: 6801313
    Abstract: The present invention relates to an overlay mark used for the measurement of the overlay accuracy between layered patterns and alignment at the time of exposure; which has a grooved pattern surrounding a mark pattern that is formed by engraving a groove or an indent in a prescribed position on a layer where a circuit pattern is formed so as to protect this mark pattern from being deformed by thermal expansion or contraction of this layer. The present invention enables to form a multi-layered circuit pattern with a high accuracy and a high yield in production, even in the formation of a minute and densely-spaced circuit pattern.
    Type: Grant
    Filed: July 27, 2000
    Date of Patent: October 5, 2004
    Assignee: NEC Electronics Corporation
    Inventor: Kazuki Yokota
  • Publication number: 20040174542
    Abstract: Devices and methods according to the invention allow measurement of deformation of objects by installing on them one or several of lasers or other light sources and a corresponding number of arrays of photo-sensors. The light beams may be shaped so that the response of the sensors may be processed to calculate the bend and twist of the object. By positioning the lasers and sensors in sequence, a cumulative calculation of the deformation is made possible. The applications include anemometry, a variety of blades, buildings, towers and other structures where deformation needs to be measured.
    Type: Application
    Filed: November 25, 2003
    Publication date: September 9, 2004
    Applicant: Boxboro Systems LLC
    Inventors: Daniel F. Handman, Forrest S. Stoddard
  • Patent number: 6778284
    Abstract: An apparatus for measuring the characteristic parameters of an overhead railway or tramway line, characterized by comprising, on board a railway or tramway vehicle (25): at least one laser source (2) for generating a laser beam, optical means for transforming said laser beam, generated by said soruce (2), into a flat beam (4), means for orientating the axis of said flat beam (4) at an angle other than 90° to the axis of the overhead line wire (6) and defining with this latter a plane substantially perpendicular to the plane of said beam (4), at least one video camera (8) having its optical axis different from the axis of said flat beam but lying in said perpendicular plane and orientated towards the light-emitting line of intersection of said laser beam (4) with said wire (6), the apparatus also comprising a processing unit for the signals generated by said video camera (8) in order to determine the position of said light-emitting line within the optical field of said video camera (8), and to effect r
    Type: Grant
    Filed: November 15, 2002
    Date of Patent: August 17, 2004
    Assignee: Tecnogamma, S.p.A.
    Inventor: Ettore Casagrande
  • Patent number: 6775014
    Abstract: A system is provided for locating a target, such as a person, relative to a projection screen, the system including two infrared light sources for casting separate shadows of the target on a translucent screen, such as those commonly used for back-projection displays. A sensitive video camera with an infrared filter over the lens that blocks all visible light is located behind the screen. This video camera captures a crisp silhouette for each of the shadows of the target. Image processing techniques detect the person's location as well as typical gestures, such as indicating or pointing to an area of the screen. This allows natural interaction with the display, for example, controlling a pointer or cursor on the screen by pointing at the desired area.
    Type: Grant
    Filed: January 17, 2001
    Date of Patent: August 10, 2004
    Assignees: Fujixerox Co., Ltd., Xerox Corporation
    Inventors: Jonathan Foote, Don Kimber
  • Patent number: 6765223
    Abstract: An edge detector with sub-micron accuracy. The edge detector comprises two single mode optical fibers with an optical path between them. One fiber is coupled to a laser light source, and creates a light beam. The other fiber is coupled to an optical power detector. The optical power reaching the optical power detector is determined by how much of the light beam is obscured by an object. Thus the position of the edge of the object may be determined from the optical power measured by the detector. The edge of an object may be positioned automatically according to the optical power measured by the detector.
    Type: Grant
    Filed: September 28, 2001
    Date of Patent: July 20, 2004
    Assignee: Agilent Technologies, Inc.
    Inventors: John Bernard Medberry, Edward Steketee, James D Adams
  • Patent number: 6766271
    Abstract: An improved infrared occupant detection system that provides accurate and reliable occupant intrusion information at a speed sufficient to timely inhibit or otherwise control deployment of occupant restraints. An array of infrared emitters is selectively activated to emit a predetermined pattern of IR beams in an area between the passenger seat and the point of deployment of the restraint, and the reflected IR energy is detected by a photo-sensitive receiver and analyzed to determine whether an occupant is out of position for deployment of the restraint. In the preferred embodiment, the intensity of the received beam energy and the position of the respective beam are used to construct a table of individual intrusion factors, and a composite intrusion factor based on the individual intrusion factors is categorized by magnitude to form an indication of occupant intrusion level, which in turn, is used to determine whether, or how forcefully, to deploy the restraint in the event of a serious crash.
    Type: Grant
    Filed: April 28, 2003
    Date of Patent: July 20, 2004
    Inventors: Dennis P. Griffin, William W. Fultz, Cunkai Wu
  • Patent number: 6762847
    Abstract: A sensor for sensing placement information of a component to be placed by a pick and place machine is disclosed. The sensor includes a plurality of light sources each of which is disposed to direct illumination at different angles of incidence upon the component. Each source is further adapted to generate light based upon an energization signal. Source control electronics are provided and coupled to the plurality of light sources to successively and/or provide energization signals to each source. A detector is disposed within the sensor relative to the plurality of sources to receive at least one shadow of the component, and provide data at a detector output indicative of the shadow imaged while the component is rotated.
    Type: Grant
    Filed: January 22, 2001
    Date of Patent: July 13, 2004
    Assignee: CyberOptics Corporation
    Inventors: David W. Duquette, Frederick M. Cash, II, Steven K. Case, John P. Konicek, Thomas L. Volkman
  • Patent number: 6762848
    Abstract: In measuring the position of a bonding tool accurately in offset correction in a bonding apparatus, the tool is moved to approach a reference member, the tool is illuminated with a reference pattern by a laser diode, and the deviation between the reference member and tool in one horizontal direction is measured based upon the image of the reference pattern projected on the tool. A position detection camera images the tool in another horizontal direction, thus measuring the deviation of the tool and reference member. The position detection camera is moved to approach the reference member, and the deviation between the position detection camera and the reference member is measured by the position detection camera. The accurate offset amounts between the position detection camera and the tool are determined based upon these measured values and amounts of movement of the position detection camera and the tool.
    Type: Grant
    Filed: March 6, 2001
    Date of Patent: July 13, 2004
    Assignee: Kabushiki Kaisha Shinkawa
    Inventors: Shigeru Hayata, Ryuichi Kyomasu, Satoshi Enokido, Toshiaki Sasano
  • Patent number: 6741364
    Abstract: An apparatus for determining relative positioning of first and second objects being relatively movable may include a laser source carried by the first object for generating a source laser beam toward the second object, and a target optical element carried by the second object for generating a first reflected beam and a second diverging reflected beam from the source laser beam. Furthermore, a detector may be carried by the first object for detecting the first reflected beam and the second diverging reflected beam. A controller may also be connected to the detector for determining a range between the detector and target optical element based upon a size of the second diverging reflected beam. The controller may also determine at least one other positional degree of freedom quantity (e.g., lateral/vertical displacement, pitch angle, yaw angle, and/or roll angle) based upon the first reflected beam and the second diverging reflected beam.
    Type: Grant
    Filed: August 13, 2002
    Date of Patent: May 25, 2004
    Assignee: Harris Corporation
    Inventors: Michael Ray Lange, Robert M. Montgomery
  • Publication number: 20040075848
    Abstract: A sensor for a conductive coating delivery system subject to high voltage including a movable member, such as a pig received through a delivery line having a magnet and a sensor in the delivery system subject to high voltage including an optically polarizing device subject to magneto-optical change upon approach of the magnet generating a polarized light signal, optical fibers connected to the sensor receiving the polarized light signal connected to an electrical device situated remotely from the high voltage generating an electrical signal for controlling a valve, metering pump or the like.
    Type: Application
    Filed: July 30, 2003
    Publication date: April 22, 2004
    Inventors: Michael Baumann, Siedfrieg Poppe, Hidetoshi Yamabe
  • Publication number: 20040075847
    Abstract: A system where the height of road vehicles can be determined using two vertical columns, one column having a vertical linear array of sensors, facing and aligned with an opposite column having a vertical linear array of sources. The columns are spaced apart enough for the road vehicle to pull in between. The sensors and sources are mounted at increasing height levels until they reach the top of the columns, or a height that is well above any possible maximum height that a road vehicle may have, or height that is needed to be measured. As the vehicle pulls in between the two columns, a computer consecutively tests the sensors starting from the bottom to see which, if any, of the sensors has its light source blocked. The accumulated number of blocked light sensors is counted to reveal the height of that portion of the vehicle between the columns.
    Type: Application
    Filed: October 18, 2002
    Publication date: April 22, 2004
    Inventor: Thomas N. McCracken
  • Patent number: 6724490
    Abstract: An image capturing apparatus for obtaining information regarding a depth of a subject includes: an illumination unit operable to cast a first illumination light beam that mainly contains a first wavelength and has a first intensity distribution on a plane perpendicular to an optical axis of the first illumination light beam and a second illumination light beam mainly containing a second wavelength and a third wavelength and having a second intensity distribution on a plane perpendicular to an optical axis of the second illumination light beam onto the subject, the second and third wavelengths being different from the first wavelength, the second intensity distribution being different from the first intensity distribution; and a depth calculation unit operable to calculate a depth-direction distance to the subject based on outgoing light beams from the subject.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: April 20, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Shuji Ono
  • Publication number: 20040069961
    Abstract: A device for determining the position of a scraper which is displaceable for the transport of coating material in a supply path of thereof, the coating material comprises a sensor responding to the presence of the scraper. This sensor is accommodated in a separate measuring head, which contains an inner, self-sufficient current source and a circuit arrangement which generates an electric output signal indicating presence or absence of the scraper on the sensor. The information in this output signal is conducted by means of a device, which manages without galvanic connection, preferably via an optical waveguide, to an evaluation circuit, electrically insulated at a distance from the measuring head and which generates an electric output signal used for controlling other parts of the plant. A device of this kind can also be used for detecting scrapers where, as frequently in electrostatically operating coating plants, the sensor has to be attached at a point located at high electric potential.
    Type: Application
    Filed: May 8, 2003
    Publication date: April 15, 2004
    Inventors: Markus Albrecht, Aydin Ucan
  • Patent number: 6704115
    Abstract: A target assembly is provided for use with a laser alignment system. The target assembly includes three light-sensitive target cells arranged to define corners of a triangle. The light-sensitive target cells are mounted to a support plate such that the three light-sensitive target cells face substantially in the same direction, and such that one axis of each light-sensitive target cell is substantially parallel to the plane of the support plate. The support plate may further include mounting structures for mounting the target assembly to an object that must be checked or aligned. Differences between readings can be used to check misalignment about two perpendicular axes, and averages of the respective readings can be used to check position or displacement. The laser alignment system can be employed to align the parallel rotational axes of a driven and driving sheave of an industrial machine.
    Type: Grant
    Filed: October 6, 2000
    Date of Patent: March 9, 2004
    Assignee: Hamar Laser Instruments, Inc.
    Inventor: Martin R. Hamar
  • Publication number: 20040032596
    Abstract: An apparatus for determining relative positioning of first and second objects being relatively movable may include a laser source carried by the first object for generating a source laser beam toward the second object, and a target optical element carried by the second object for generating a first reflected beam and a second diverging reflected beam from the source laser beam. Furthermore, a detector may be carried by the first object for detecting the first reflected beam and the second diverging reflected beam. A controller may also be connected to the detector for determining a range between the detector and target optical element based upon a size of the second diverging reflected beam. The controller may also determine at least one other positional degree of freedom quantity (e.g., lateral/vertical displacement, pitch angle, yaw angle, and/or roll angle) based upon the first reflected beam and the second diverging reflected beam.
    Type: Application
    Filed: August 13, 2002
    Publication date: February 19, 2004
    Applicant: Harris Corporation
    Inventors: Michael Ray Lange, Robert M. Montgomery
  • Patent number: 6678060
    Abstract: A device and method for monitoring variations in the distance between an object and a datum, comprising: a light source, an astigmatic system for projecting an astigmatic image of the light source onto the object, the astigmatic system including the datum; and image shape detector means for detecting changes of shape of the astigmatic image on the object due to the variation in the distance between the object and the datum, and for producing a monitor signal whose value is dependant on the shape of the astigmatic image on the object: the astigmatic system being arranged such that light reflected from the astigmatic image on the object passes back through the astigmatic system and is thereby projected onto a light receiving surface of the image shape detection means as an astigmatic image of the astigmatic image on the object; wherein the astigmatic system comprises a zone plate.
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: January 13, 2004
    Assignee: Rolls-Royce plc
    Inventor: Harold Heyworth
  • Patent number: 6678059
    Abstract: An apparatus for measuring six-degree-of-freedom motions by using three-facet reflector, the six-degree-of-freedom motions of an object being measured by using the laser beam proceeding from a laser light source, comprising: a multiple facet reflector in the form of a trigonal pyramid, the multiple facet reflector being fixed on the object for measurement and able to reflect the laser beam in three directions; three position-sensitive detectors for measuring the position and intensity of the laser light points formed on their surfaces, with the movement of the multiple facet reflector, and then providing output signals; and a controlling section for analyzing six-degree-of-freedom motions of the multiple facet reflector by using the position and intensity of the laser light points output from the three position-sensitive detectors. (FIG. 4).
    Type: Grant
    Filed: June 13, 2001
    Date of Patent: January 13, 2004
    Assignee: Korean Advanced Institute of Science and Technology
    Inventors: Hyung Suck Cho, Won Shik Park, Yong Kyu Byun, Noh Yeol Park
  • Publication number: 20040004729
    Abstract: An inspection device of a tape reel comprises a first inspection device 10 consisting of a light projector 11, a mirror 12, and a light receiver 13, a second inspection device 20 consisting of a light projector 21, a mirror 22, and a light receiver 23, and a rotator 30 that rotates a tape reel 40, and parallel lights R1, R2 irradiated from the light projector 11 are reflected by the mirror 12, to be made incident on inner surfaces of flanges 42, 43 of the tape reel 40, whereas parallel lights R3, R4 irradiated from the light projector 21 are reflected by the mirror 22 to be made incident on the inner surfaces of the flanges 42, 43 of the tape reel 40, and parallel lights R1 to R4 that pass the inner surfaces of the flanges 42, 43 are received by the light receiver 13 or the light receiver 23.
    Type: Application
    Filed: June 24, 2003
    Publication date: January 8, 2004
    Applicant: FUJI PHOTO FILM CO., LTD.
    Inventor: Yoichi Hayashi
  • Patent number: 6662103
    Abstract: A method and system allows conversion of three-dimensional data from a default coordinate frame to an arbitrary user-selected coordinate frame. The method includes obtaining position data in a default coordinate frame and transforming the data into an alternate coordinate frame defined by the user. The alternate coordinate frame can be defined by allowing the user to select a plane, an origin, and an axis, using any desired coordinate system and in any desired orientation. The transformed data allows presentation of position measurements in a form that is relevant to the user's specific application.
    Type: Grant
    Filed: March 21, 2000
    Date of Patent: December 9, 2003
    Assignee: ARC Second Inc.
    Inventors: Jeffrey F. Skolnick, Edward R. Barrientos, Sean M. Beliveau, Thomas M. Hedges, Eric J. Lundberg, Edmund S. Pendleton, Roger Wells
  • Patent number: 6655005
    Abstract: A magnetic head positioning apparatus for adjusting the position of a head member relative to its support member by determining the boundary lines for the edge portion of the head body and the center of the pivot in the support member. Luminance variations near the boundary line between areas different in light reflections are derivated so as to determine the position of the boundary line with a high accuracy at a distance shorter than the unit block pitch of the camera photodetectors used to detect the image of the head body and the support member.
    Type: Grant
    Filed: May 2, 2001
    Date of Patent: December 2, 2003
    Assignee: Alps Electric Co., Ltd.
    Inventors: Toshiaki Ozawa, Shoichi Moriyama, Hiroshi Aimura
  • Patent number: 6650425
    Abstract: A position measuring laser apparatus includes first and second laser transmitter-receivers and a position measure. The laser transmitter-receiver includes a laser beam emitter for emitting a laser beam, and a laser beam receiver for receiving a laser beam resulting from the emitted laser beam reflected from a reference reflecting mirror. An optical axis of the laser transmitter-receiver is oriented at a required angle toward a moving body. The position of the moving body with respect to the reference reflecting mirror is measured based on a beam receiving signal of the laser beam obtained by the laser transmitter-receiver. The position measure compares a drive signal for driving the laser beam emitter with a beam receiving signal generated by the laser beam receiver to measure the position of the moving body based on the beam receiving signal when the drive signal and the beam receiving signal coincide with each other.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: November 18, 2003
    Assignee: Koito Manufacturing Co., Ltd.
    Inventors: Yasushi Kubota, Makoto Nawa, Toshihiko Kurebayashi
  • Patent number: 6633390
    Abstract: A method of detecting focus information about an image projecting optical system includes performing mark projection through the optical system, and, based on illumination lights having different chief ray incidence directions, the mark projection is carried out so that mark images formed by the illumination lights, respectively, are superposed one upon another approximately upon an imaging plane, and detecting focus information about the optical system on the basis of information related to a deviation between the mark images superposed.
    Type: Grant
    Filed: March 20, 2001
    Date of Patent: October 14, 2003
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yoshihiro Shiode, Izumi Tsukamoto, Hiroshi Morohoshi, Yoshio Kawanobe
  • Patent number: 6626900
    Abstract: An apparatus and method for phototherapy are described in which laser light or other radiation is projected from within a catheter, through a balloon member, and toward the surface of tissue. The light reflected from body fluids or the tissue surface is captured by a collecting device located within the catheter, e.g., within the balloon member, and the intensity of the reflected light is ascertained. The apparatus and method provides for accurately positioning the apparatus against the tissue treatment site.
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: September 30, 2003
    Assignee: CardioFocus, Inc.
    Inventors: Edward L. Sinofsky, Norman E. Farr
  • Patent number: 6628390
    Abstract: A wafer alignment sensor uses a microlens array for sensing the position of an alignment pattern on a semiconductor wafer. Phase interactions between adjacent microlenses are suppressed—or alternatively, enhanced—by inducing a &pgr;/2 optical phase shift on alternate microlenses and by optimizing the optical transmittance profile of the alignment system's projection aperture.
    Type: Grant
    Filed: September 18, 2000
    Date of Patent: September 30, 2003
    Inventor: Kenneth C. Johnson
  • Patent number: 6611345
    Abstract: Determining the position of a sheet pile (1, 12) having faces (2) and edges (3) is achieved by at least one defined illumination zone (5, 5′, 5″) produced on the sheet pile (1, 12) by diverging beams (4), and at least two boundaries (6, 6′, 6″, 6′″, 6″″, 6′″″) of at least one illumination zone (5, 5′, 5″) are detected and used to determine the position of the sheet pile (1, 12). A device is correspondingly configured with at least one illumination system (9, 9′) and at least one receiver (7, 7′). A positioning system (10) is additionally fitted with a controller (11) in order to bring the sheet pile (1, 12) from the determined actual position (20) into its desired position (21).
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: August 26, 2003
    Assignee: NexPress Solutions LLC
    Inventor: Wolfgang Luxem
  • Patent number: 6601309
    Abstract: A system for marking a corner angle in a working area with the aid of light planes, wherein a straight, elongate guide is disposed on each respective side of a planar working surface in the working area. Each guide carries a carriage that can be moved to chosen positions alongs its guide. Each carriage carries a laser unit which is adapted to emit a light plane that intersects the working surface, as well as the light plane of the other laser unit, at a chosen angle. Each laser unit is adapted to maintain its light plane in a set orientation relative to the longitudinal axis of its associated guide, regardless of the position to which the carriage has been moved along said guide, and both laser units are adapted to be activated simultaneously for marking said corner angle.
    Type: Grant
    Filed: October 1, 2001
    Date of Patent: August 5, 2003
    Assignee: Megascale AB
    Inventor: Hans Hedström
  • Patent number: 6597007
    Abstract: A signal current I1 that is output from output terminal of semiconductor position detection element is converted to a signal voltage V1 by a current/voltage conversion unit and a signal current I2 that is output from output terminal is converted to a signal voltage V2 by a current/voltage conversion unit. Signal voltages V1 and V2 are compared in magnitude by a comparison circuit and a comparison signal is output so that maximum signal Vmax and minimum signal Vmin are selected. In A/D conversion circuit, the A/D conversion range is set using maximum signal Vmax, and minimum signal Vmin is converted to a digital signal and output. The position of beam incidence on semiconductor position detection element is found by incidence position calculating unit using the comparison signal and digital signal.
    Type: Grant
    Filed: December 7, 2001
    Date of Patent: July 22, 2003
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Seiichiro Mizuno, Akira Kurahashi, Izumi Adachi
  • Patent number: 6574359
    Abstract: Methods and apparatus for inspecting a feature on a wafer surface are provided. In one aspect a method of inspecting a feature on a film surface is provided that includes illuminating the feature with laser radiation and detecting radiation scattered from the feature with a plurality of detectors. Each of the plurality of detectors has a known position. A position of the feature observed by each of the plurality detectors is computed based upon the radiation scattered from the feature. An average position of the positions observed by each of the plurality of detectors is computed. A first value for each of the plurality of detectors is computed that is the scalar product of the known position of a given detector with the difference of the position of the feature observed by that given detector and the average of the positions observed by each of the plurality of detectors.
    Type: Grant
    Filed: February 3, 2000
    Date of Patent: June 3, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Bryon K. Hance
  • Publication number: 20030090683
    Abstract: Old railroad beds need to be regraded in order to permit for an increased axle load. There are often cables or tubes embedded in the roadbed at the roadbed sides, which makes the regrading difficult. At intervals along the bed, one removes material by suction to form pits at each side of the track, and, with a laser camera, one both reads the profile adjacent the pits and the positions of the embedded cables/tubes and saves this information, and then, by using the saved information, one controls a device for mechanically excavating material from the roadbed sides without damaging the embedded cables/tubes and grades the railroad bed. A laser measuring device (11-15) for reading the roadbed profile is described.
    Type: Application
    Filed: September 25, 2002
    Publication date: May 15, 2003
    Inventor: Dan Nilsson
  • Patent number: 6538751
    Abstract: An image capturing apparatus for obtaining information regarding a depth of a subject includes: an illumination unit operable to cast a first illumination light beam mainly having a first wavelength and a second illumination light beam mainly having a second wavelength and a third wavelength from optically different emission positions onto the subject, the second and third wavelengths being different from the first wavelength; and a depth calculator operable to calculate a depth-direction distance to the subject based on outgoing light beams from the subject.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: March 25, 2003
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Shuji Ono
  • Patent number: 6532075
    Abstract: A system and method for utilizing a topology detector to capture visual information comprises a topology detector that propagates a detection pulse towards a target object using a transmitter module, and then senses wave segments of the detection pulse with a sensor array as the wave segments are reflected back toward the topology detector. The topology detector may then generate contour values that correspond to localized areas of the target object. A detection manager may then access the contour values to responsively generate and store topology values that may be mapped to respective pixel values of a set of captured image data that represents the target object.
    Type: Grant
    Filed: September 11, 2000
    Date of Patent: March 11, 2003
    Assignees: Sony Corporation, Sony Electronics Inc.
    Inventors: Eric D. Edwards, Steven G. Goldstein, David G. Longendyke
  • Patent number: 6529281
    Abstract: In an apparatus a photosensitve surface of PSD is provided with a conductive trunk region extending in a base line direction and a plurality of conductive branch regions arranged in the base line direction and each connected to the trunk region, and each branch region makes an angle of 45° to the base line direction. An LED is arranged to be able to project slit light extending at the angle of 45° to the base line direction.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: March 4, 2003
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Tatsuo Takeshita, Masayuki Sakakibara
  • Publication number: 20030030821
    Abstract: In measuring the position of a bonding tool accurately in offset correction in a bonding apparatus, the tool is moved to approach a reference member, the tool is illuminated with a reference pattern by a laser diode, and the deviation between the reference member and tool in one horizontal direction is measured based upon the image of the reference pattern projected on the tool. A position detection camera images the tool in another horizontal direction, thus measuring the deviation of the tool and reference member. The position detection camera is moved to approach the reference member, and the deviation between the position detection camera and the reference member is measured by the position detection camera. The accurate offset amounts between the position detection camera and the tool are determined based upon these measured values and amounts of movement of the position detection camera and the tool.
    Type: Application
    Filed: October 9, 2002
    Publication date: February 13, 2003
    Applicant: Kabushiki Kaisha Shinkawa
    Inventors: Shigeru Hayata, Ryuichi Kyomasu, Satoshi Enokido, Toshiaki Sasano
  • Publication number: 20030016369
    Abstract: A position measuring system that includes a scale having a first track with successive partial areas of differing reflectivity and a second track with successive partial areas of differing reflectivity. A scanning unit which moves relative to the scale in a measuring direction so that a first position dependent scanning signal and a second position dependent scanning signal are generated by scanning the first track and the second track by the scanning unit. The first position dependent scanning signal and the second position dependent scanning signals have a different pitch behavior in case of a pitch tilt of either the scanning unit or the scale to the effect, that in that case the first position dependent scanning signal indicates an erroneous position, while the second position dependent scanning signal continues to show a correct position.
    Type: Application
    Filed: June 26, 2002
    Publication date: January 23, 2003
    Inventors: Ullrich Benner, Wolfgang Holzapfel
  • Patent number: 6509969
    Abstract: A system for inspecting and/or processing a sample on a stage with a probe or imaging apparatus, the probe or imaging apparatus is defined by an optical column having beam generating means and means to deflect the beam, the position of the stage relatively to the probe or imaging apparatus being controlled by position control means. The position control means comprises gyroscopic means fixed to the stage and/or the probe or imaging apparatus and is operatively connected with the deflection means in order to compensate unintentional movements of the stage relatively to the column.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: January 21, 2003
    Assignee: Advantest Corp.
    Inventors: Shinpei Takeshita, Jurgen Frosien
  • Patent number: 6501536
    Abstract: A method and apparatus for use in locating the eyes of a vehicle driver or passenger in a vehicle for controlling vehicle systems including the positioning of vehicle sideview mirrors in relation to the driver's eyes to maximize the view of traffic on either side of the vehicle or the characteristics of vehicle airbag deployment. The location of a driver's or passenger's eyes is derived from the adjustment by the driver (or passenger, if capable of doing so) of adjustable light beam(s) emanating from light source(s) or illuminated indicia, until it (or they) intersect the driver's or passenger's eyes. From the angles of adjustment of the light beam(s) and other known coordinates of the vehicle, the location of the driver's or passenger's eyes or the target may be computationally derived as a set of Cartesian coordinates.
    Type: Grant
    Filed: January 22, 2001
    Date of Patent: December 31, 2002
    Inventor: Ronald J. Fredricks
  • Patent number: 6490533
    Abstract: Systems and methods are described for processing an emission signal, such as a fluorescent signal, to compensate for noise in an excitation beam, such as a laser beam. As one example, a scanning system is described that includes an excitation signal generator that provides an excitation signal having one or more representative excitation values representative of an excitation beam; an excitation reference provider that provides at least one excitation reference value; a normalization factor generator that compares the excitation reference value to at least one representative excitation value, thereby generating a normalization factor; and a comparison processor that adjusts at least one emission value corresponding to the at least one representative excitation value based, at least in part, on the normalization factor.
    Type: Grant
    Filed: December 3, 2001
    Date of Patent: December 3, 2002
    Assignee: Affymetrix, Inc.
    Inventors: Nathan K. Weiner, Peter D. Honkanen, Timothy J. Woolaver
  • Patent number: 6459492
    Abstract: A device for measuring the displacement of a movable object includes a stationary light source (10) that produces an incident light beam. A target feature (17), attached to, or integral with, the object, reflects the incident light beam and forms a first image of the light source in close proximity of the target feature. An imaging lens (26) receives the reflected light beam and reforms the first image of the light source as a second image on the photodetector (20). The photodetector, spaced from the object, receives the reflected light beam and produces an electric signal having a characteristic which is proportional to a received location on the photodetector of the second image and which represents a position of the object. The target feature includes a curved surface that reflects the light beam such that a small, point-like or line-like first image of the light source is formed and reformed as a second image on the photodetector.
    Type: Grant
    Filed: December 6, 1999
    Date of Patent: October 1, 2002
    Assignee: Agilent Technologies, Inc.
    Inventor: Michael Hercher
  • Patent number: 6449034
    Abstract: In order to control the perpendicularity of a component (10) such as a nuclear fuel pellet, this component is placed upon a support plane and measurements are taken, by means of two pairs of laser micrometers (A1, A2; B1, B2), of the distances separating diametrically opposed generators of the component from a rod of reference (T, T′), at two different levels and in two measuring planes (P, P′) perpendicular to each other. From this is derived a maximum out-of-true perpendicularity of the component being controlled.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: September 10, 2002
    Assignee: Compagnie Generale Des Matieres Nucleaires
    Inventors: Michel Marchand, Christian Richaud
  • Patent number: 6423960
    Abstract: The invention discloses a method and system for processing scan signals from a confocal microscope. The confocal microscope comprises an illumination source and a scanning device with a scanning mirror system. A control and processing unit is provided, which unit uses a plurality of programmable devices for the real time processing of digital signals. The control and processing unit has at least three input ports and one output port. A first detector generates analog signals corresponding to the light reflected from a specimen within the microscope and a second detector generates analog signals corresponding to the intensity of the light from the illumination source. In addition, a position signal of the scanning laser beam is provided to the control and processing unit. Analog-to-digital converters receive the analog signals, generate digital signals and provide the digital signals to the input ports of the control and processing unit.
    Type: Grant
    Filed: December 31, 1999
    Date of Patent: July 23, 2002
    Assignee: Leica Microsystems Heidelberg GmbH
    Inventors: Johann Engelhardt, Bernd Widzgowski
  • Patent number: 6402521
    Abstract: An apparatus for demonstrating changes in motion with respect to time. Two arrays of equally spaced photoresistors and light-emitting diodes are placed on two parallel straight line arrays. Rails upon which an object moves are placed parallel to the arrays. A laser is attached to the object. At any moment of time during the motion of the object, the laser illuminates one or two adjacent photoresistors. Each photoresistor in a line of elements is connected to a first input of a logic AND gate, to whose second input clock pulses are conducted and whose output is connected through a logic flip-flop element to the light-emitting diode. The apparatus provides for demonstration of a motion development in time by conveying a visual demonstration of path sections or intervals traversed by the object in equal time intervals to thereby make possible a picture of whether the motion is steady or accelerated.
    Type: Grant
    Filed: June 29, 1999
    Date of Patent: June 11, 2002
    Inventor: Djordje Atanackov