Abstract: A method for measuring displacement of an object (20) having a flat surface (21), includes the following steps. When the object is in a first position (A), a first laser beam is emitted onto the flat surface at a first incident angle, the first laser beam thereby is reflected by the flat surface and incident onto a light sensitive transducer (30) at a first incident location (35) at a second incident angle. The object is then moved to a second position (B), second laser beam is emitted onto the flat surface at the first incident angle, the second laser is reflected by the flat surface and incident onto the light sensitive transducer at a second incident location (35?) at the second incident angle. Lastly the displacement (D) of the object is calculated according to a distance (L) between the first and second incident location.

Abstract: A reflective sensor is disclosed which prevents divergent light from a light source from being totally reflected by an interface between the package and the outside thereof and entering a light-receiving element without using a light-shield means and which allows an improved S/N ratio and reduced variations in performance. The reflective sensor includes a light-emitting element and a light-receiving element which are provided on a surface, and a light-transmissive member which covers the light-emitting element and the light-receiving element. The light-receiving element includes a light-receiving region which is spaced from the light-emitting element along the surface, and which light-receiving region is closer to the light-emitting element than an area on the surface that would be illuminated by unimpeded light rays which are totally reflected by an interface between the light-transmissive member and the outside thereof and are directed toward the light-receiving element.

Abstract: An optical device ensuring projection of light over a wide range as well as reduction in size, and a mobile apparatus mounted with the optical device are provided. The optical device (100) includes a light-projecting unit (110) and a light-receiving unit (120). The light-projecting unit (110) has a projector (114) and a lenticular sheet (112) arranged in layers. First and second cylindrical lens arrays having their generatrices orthogonal to each other are formed on the respective surfaces of the sheet (112). The light-receiving unit (120) has a light-receiver (124). The light-projecting unit (110) and the light-receiving unit (120) are arranged adjacent to each other in an integrated manner so that the light-receiver (124) can sense the light emitted from the projector (114) via the sheet (112) and then reflected from an object.

Abstract: A position sensor using a novel structured light generating scale or target member is provided. An imaging array is capable of measuring the relative translation and orientation of the structured light generating scale or target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. The target member includes an array of lenses that provide an array of structured light patterns that diverge, converge, or both, to change the size of the corresponding structured light image as a function of the “Z” coordinate of the relative position, in various embodiments. The X-Y position of each individual structured light image on the imaging array varies with the relative X-Y position of the structured light generating target member, and the shape of structured light image changes as a function of the relative angular orientation.

Abstract: A beam catcher (1) for a light beam (2) pulsating in amplitude at a modulation frequency (f) with a photodetector (4) with a plurality of photosensors (6) which are offset in a spatially defined manner relative to a reference point (5), an evaluating circuit (7), and an output device (8). A phase shifter (10) that is sensitive to the modulation frequency (f) is arranged between at least two photosensors (6).

Abstract: A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.

Abstract: A system and method for detecting thrust in a remote object is disclosed herein. The system is suitable for use in connection with midcourse discrimination systems that distinguish actual targets of interest, such as warheads, from decoys. The system directs laser pulses at the remote object under observation. The system directs at least one initial laser pulse at the remote object to heat the surface material of the remote object and to create an outgas environment near the remote object. The system also directs at least one secondary laser pulse at the outgas environment, which creates very high peak power filaments that bombard the surface of the remote object. The filaments ablate the surface material of the remote object, ejecting mass away from the remote object at a high velocity. The ejection of mass imparts thrust to the remote object, resulting in an imparted differential velocity dependent on the mass of the remote object.

Abstract: A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.

Abstract: An apparatus for shifting a reference distance of a laser displacement sensor is capable of extending the measuring range in a laser displacement sensor having a fixed reference distance and a fixed measurement range by smoothly changing the traveling path of the laser beam by selectively inserting the transparent members having a refraction index different from that of the air into the optical path of the laser beam. The apparatus mounted on the laser displacement sensor provided with a laser beam source for generating a laser beam and a laser beam reception member, includes a transparent member having a refraction index being different from a refraction index of an air and a holder for supporting the transparent member in such a way that the transparent member is placed in an optical path of the laser beam. The transparent member changes a reference distance of the laser displacement sensor by changing the optical path of the laser beam.

Abstract: A system is provided for detecting or locating an edge of a workpiece in a processing path. The system includes a reflector which can be positioned at an elevation higher than the workpiece in the processing path. According to one aspect of the invention, the reflector can be mounted in a recess of a clamp which can be moved to engage the workpiece. The system also includes a light beam source and reflected light beam sensor located along one side of the processing path. According to another aspect of the invention, the light beam can be directed at an oblique angle through a corner of the processing path to the reflector. Interruption of the light beam changes the state of the sensor which indicates the location of the workpiece edge relative to the location of the light beam source along one axis of a mutually orthogonal three-axis coordinate system.

Abstract: A method and apparatus for conducting an overhead crane runway system survey uses a survey apparatus that is alternately pushed or pulled by an overhead crane. The survey apparatus, having a wheeled carriage, includes survey sighting targets, e.g., prisms, that are visible to survey personnel on the ground. XYZ data is there collected and a rail alignment profile, a rail elevation profile, a rail span profile, and/or a crane skew profile may be generated. The data and profiles generated may reviewed to ascertain whether the overhead rails conform to alignment specifications. Further, crane skew data may be reviewed to determine whether the crane itself may be misaligned.

Abstract: A method and apparatus for high-resolution 3D imaging ladar system which can penetrate foliage and camouflage to sample fragments of concealed surfaces of interest is disclosed. Samples collected while the ladar moves can be integrated into a coherent object shape. In one embodiment, a system and method for automatic data-driven registration of ladar frames, comprises a coarse search stage, a pairwise fine registration stage using an iterated closest points algorithm, and a multi-view registration strategy. After alignment and aggregation, it is often difficult for human observers to find, assess and recognize objects from a point cloud display. Basic display manipulations, surface fitting techniques, and clutter suppression to enhance visual exploitation of 3D imaging ladar data may be utilized.

Abstract: An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.

Abstract: One embodiment of the present invention provides a system that uses a visual tag to determine an angle. During operation, the system observes the visual tag from an observation point, wherein the visual tag includes an angle-sensitive image which changes in appearance when observed from different angles. Next, the system uses the appearance of the angle-sensitive image (as observed from the observation point) to determine the angle between the visual tag and the observation point. In a variation on this embodiment, the system uses the determined angle along with supplemental information to determine the physical location of the observation point.

Abstract: Systems and methods are described for processing an emission signal, such as a fluorescent signal, to compensate for noise in an excitation beam, such as a laser beam. As one example, a scanning system is described that includes an excitation signal generator that provides an excitation signal having one or more representative excitation values representative of an excitation beam; an excitation reference provider that provides at least one excitation reference value; a normalization factor generator that compares the excitation reference value to at least one representative excitation value, thereby generating a normalization factor; and a comparison processor that adjusts at least one emission value corresponding to the at least one representative excitation value based, at least in part, on the normalization factor.

Abstract: A method and arrangement for determining the level of at least two measurement points with a light beam direct along a first direction and being deflected through 90° with respect to the first direction to a second direction, the second direction being rotated through a rotation angle corresponding to the position of the measurement point about an axis which is formed by the first direction. The light beam has a cross-sectional intensity distribution with a preferred direction, and after being deflected to the second direction, falls on a detector surface which is positioned successively at each measurement point, the incidence level of the light beam and the orientation of the preferred direction of the cross-section intensity distribution of the light beam on the detector surface being determined for each measurement point, and the rotation angle for each measurement point being determined from the respective orientation of the preferred direction on the detector surface.

Abstract: A non-contact surface configuration measuring method is provided which allows for accurate measurement of a surface which is at a steep angle to a laser probe. Specific areas including parts inclined ±30° or more from an optimum measurement state relative to the laser probe are measured after a workpiece is rotated such that the surface within the specific areas is less than ±30°. Therefore, accurately measured data on the specific areas can be obtained even in a different coordinate system from that of a general area.

Abstract: A method of making a gas treatment device, the method includes projecting a laser line onto a side of substrate from a laser line generator angled away from a viewing source; projecting a laser dot onto the substrate from a laser dot generator located above the viewing source; verifying an alignment of the substrate with at least one of: another substrate and a housing by comparing the laser line projection on the substrate to the laser dot projection on the substrate, wherein the alignment is verified when the laser line projection and the laser dot projection are co-linear; and stuffing the substrate into the housing.

Abstract: A three-dimensional visual sensor is disclosed. A two-dimensional image of a two-dimensional feature portion including a point determined on a work is acquired, and N points are determined. A slit of light is projected by a projector, an image of a projected portion is obtained, and M points are determined. The three-dimensional position of the intersection point between each straight line connecting the N points and a point in a camera and the slit of light plane is determined on the sensor coordinate system, and transformed to the data on the reference coordinate system. The three-dimensional positions of M points are similarly subjected to coordinate transform to the data on the reference coordinate system. Straight lines defined by the M and N points are determined. The intersection point between the two straight lines is determined and returned to the data on the sensor coordinate system by inverse transform.

Abstract: An inspection device of a tape reel comprises a first inspection device 10 consisting of a light projector 11, a mirror 12, and a light receiver 13, a second inspection device 20 consisting of a light projector 21, a mirror 22, and a light receiver 23, and a rotator 30 that rotates a tape reel 40, and parallel lights R1, R2 irradiated from the light projector 11 are reflected by the mirror 12, to be made incident on inner surfaces of flanges 42, 43 of the tape reel 40, whereas parallel lights R3, R4 irradiated from the light projector 21 are reflected by the mirror 22 to be made incident on the inner surfaces of the flanges 42, 43 of the tape reel 40, and parallel lights R1 to R4 that pass the inner surfaces of the flanges 42, 43 are received by the light receiver 13 or the light receiver 23.

Abstract: A machine vision system (1) has two laser sources (2, 3) to illuminate a solder deposit from both sides for comprehensive coverage without occlusion. The camera (4) has an FGPA (32) programmed to define a subset of the sensor array (20) as a region of interest to be processed for each laser source (2, 3). This reduces the amount of data transfer and processing required. The image line (31) is dynamically maintained in the region of interest by adjustement of camara Z position according to warp of the substrate (S).

Abstract: A tool operates with a guide system to identify the orientation of a tool on a work piece. In one implementation, the tool identifies its orientation with respect to a guide signal supplied by the guide system. In an alternate embodiment, the tool determines its absolute orientation, such as a (x, y) coordinate. The tool includes an action component adapted to alter the work piece, such as a cutting head in a router. A guide detector in the tool detects a position of a guide signal from the guide system. A location detector in the tool receives the position data and employs it to determine the tool's orientation. Based on the detected orientation, the tool decides whether any tool adjustments are necessary. Examples of tool adjustments include the following: adjusting the position of the action component, enabling or disabling the action component, and providing operating indicators to direct a tool operator's use of the tool.

Abstract: A method and apparatus for using a plurality of regions of colored light to index and locate discrete targets in photogrammetry systems. The colored regions of light are used to determine a unique location on the surface of a three-dimensional object. Multiple projections of colored regions may be used to determine precise locations on the surface of the object. Each colored region may be assigned a color-numeric identified to assist in the indexing process. The process is suitable for determining the shape of aircraft, watercraft and automotive parts.

Abstract: A method of determining relative position between a reflective reticle and a substrate includes a detection step of detecting relative position between a transmissive reference mark on a reticle stage and a substrate alignment mark on a substrate stage through a reflective optical system which projects a pattern of the reflective reticle onto the substrate with extreme ultraviolet light, and a determination step of determining relative position between the reflective reticle and the substrate based on the detection result in the detection step.

Abstract: A method for tracking the movement and position of mobile agents using light detection and ranging (LIDAR) as a stand-off optical detection technique. The positions of the agents are tracked by analyzing the time-history of a series of optical measurements made over the field of view of the optical system. This provides a (time+3-D) or (time+2-D) mapping of the location of the mobile agents. Repeated pulses of a laser beam impinge on a mobile agent, such as a bee, and are backscattered from the agent into a LIDAR detection system. Alternatively, the incident laser pulses excite fluorescence or phosphorescence from the agent, which is detected using a LIDAR system. Analysis of the spatial location of signals from the agents produced by repeated pulses generates a multidimensional map of agent location.

Abstract: The light emitted from a focal position-detecting light source 38 and reflected from a reflector 12 is projected onto a screen 341, and a projected image on the screen 341 is detected by a focal position-detecting camera 35. Based on this projected image, the focal position-detecting light source 38 is moved by a position adjusting system 37 so as to place the focal position-detecting light source 38 at a focal position of the reflector 12, and the position of the focal position-detecting light source 38 at this time is detected as the focal position of the reflector 12. When the focal position of the reflector 12 is detected, the projected image on the screen 341 detected by the focal position-detecting camera 35 is used, and, therefore, the conventional measurement by a three dimensional measuring instrument is made unnecessary, thereby improving the working efficiency.

Abstract: A remote pointing apparatus including a remote control that generates an optical signal that is periodically expanded and/or reduced around the origin and an optical sensor that detects whether the optical signal is received, and a remote pointing method therefor. The remote pointing method includes projecting an optical signal that is periodically expanded and/or reduced around an origin; detecting whether the optical signal is received using a plurality of optical sensors that are two-dimensionally disposed; and detecting the position of the origin, which exists within a position recognition range including at least a polygon having the optical sensors as vertexes, based on the results of detection of the optical sensors. Since the remote pointing apparatus and method do not need a light receiving panel that is installed to fully cover a display screen or installed in vertical and horizontal directions of the display panel in order to receive a laser beam, a manufacturing cost thereof can be reduced.

Abstract: An electronic component holding head, an electronic component mounting apparatus using same, and a method for mounting an electronic component, are provided for use in mounting an electronic component having a positioning mark formed on a film member.

Abstract: A system and method for use in obtaining precise positional information relating to one or more points. The points may comprise key locations on a large structure allowing for the geometry of the structure to be assessed based on the positional information. In one embodiment, a high accuracy angular resolution and measurement system includes a laser beam source (110), a bi-directional acousto-optic modulator (112), and an optical detector (104). The position of the optical detector (104) is determinable from deflection angles (120, 122) of the laser beam (106) when the laser beam (106) is deflected by the bi-directional acousto-optic modulator (112) in a direction corresponding to one of a plurality of illumination locations (140) coinciding with the position of the optical detector (104) within an illumination region (142) defined by the illumination locations (140).

Abstract: An apparatus for determining the orientation and/or position of a structure comprises a light source (28) for generating a light beam. A structure (31) is mounted in the optical path of the light beam such that the position and/or orientation of the structure, relative to the light beam, may be altered. The apparatus further comprises first capture means (32) for capturing a diffraction pattern produced by the first structure. Information about the alignment of the structure may be obtained from the diffraction pattern, and the position and/or orientation of the structure (31) relative to the light beam may be adjusted if necessary.

Abstract: Multidirectional retroreflectors and methods of reflecting light beams from multiple directions are provided. The multidirectional retroreflectors utilize a four-mirror retroreflector with a common virtual reflection point.

Abstract: The present invention relates to the field of measuring apparatuses in distribution systems allowing for measuring presence, position and/or shape of an object placed on a carrier and a method for such measuring.

Abstract: The invention relates to an optical device for aiming along an optical axis and visually indicating a reading area, comprising at least an illuminating assembling acting on a portion of the reading area along an optical emission path. The illuminating assembly comprises a light beam emitting source, a diaphragm having a preset shape, such diaphragm being effective to select a portion of the light beam generated by said emitting source, and a converging lens placed, on the optical emission path, downstream of the diaphragm and adapted to collimate the shaped light beam coming from the diaphragm and project it onto a portion of the reading area. The device of this invention is at once economical and accurate (i.e. capable of producing sharp images), thereby providing the user with a clear cut indication of the reading area being aimed regardless of the distance of the latter from the device.

Abstract: A beam projector is aligned with a linear array of receptors. An alignment receptor is at each end of the linear array of receptors. A beam is projected from the projector. The beam is swept until the alignment receptors sense the beam. A signal is transmitted upon each of the alignment receptors sensing the beam. The position of the beam projector is recorded in response to the transmitted signals. The alignment position of the beam projector, to align with the linear array of receptors, is computed from the recorded positions. The beam projector is aligned with the linear array of receptors according to the alignment position.

Abstract: The invention describes a method and computer program product for the evaluation of data recorded by measuring instruments, which is particularly applicable to the precise localization of non-reflecting marks on a reflecting medium by means of a light-sensitive receiver and can be especially applied in precision positioning devices.

Abstract: A method and a device for the optical distance measurement and for the optical detection of objects with an at least partially specular reflective surface (12) wherein light through the specular reflective surface (12) and a diffuse scattering at a reflector (4) is directed to light receiving means and detected there.

Abstract: In a device for detecting the body position of a passenger in a vehicle sitting in a seat a plurality of light transmitters is situated in or on the back rest, staggered by height, and emit light signals in the direction of one or a plurality of light receiver(s) situated in particular above the back rest. A conclusion may be drawn regarding the form of the blockage of the light signals by the passenger based on the light signals received, which in turn makes it possible to draw a conclusion regarding the posture, in particular the head position or the body inclination. The positions of the light transmitters and light receivers may be exchanged in an analogous manner.

Abstract: An automatic controlling apparatus of a boarding bridge to match a position of the boarding bridge with an airplane, includes: a light irradiator, an optical sensor, and an actuator. The light irradiator irradiates a light to the airplane. The optical sensor can detect a reflection wave of the light reflected from the airplane. The actuator moves the boarding bridge such that a position of the boarding bridge is matched with the airplane, based on a detection result of the reflection wave detected by the optical sensor.

Abstract: This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical and optoelectronic testing by coupling probe light to/from the top of the wafer. In the described exemplary implementations, wafers are designed with one or more optical alignment features or structures. The alignment structures are alongside the devices to be tested, but are easier to find or locate by optical means, than the devices to be tested. An optical diffraction grating structure such as a Littrow grating may be used as reflective alignment structures. (FIG. 6B and paragraph 56.) A Littrow grating as an alignment structure produces a retro-reflection. A Littrow grating is a one-port optical device, with input and output beams going along the same path. Various exemplary implementations are shown in FIGS. 3C, 5, 6A, 6B, 7A and 7B and described in paragraphs 18–21, 39–40 and 53–64.

Abstract: A method and apparatus is provided for determining workpiece drift from its nominal or intended position. The apparatus includes two proportionate sensors, each of which gives an output reading that depends upon how much of the sensor beam is blocked by an edge of the workpiece. A computer can calculate positional drift based upon these readings. Also disclosed is a method for aligning proportionate sensors to be parallel to one another.

Abstract: A monitoring apparatus for a polishing pad. A chemical mechanical polishing machine, a polishing pad, a measuring device, and a display device are provided. The polishing pad is situated in a predetermined position in the chemical mechanical polishing machine. The measuring device is coupled to the chemical mechanical polishing machine to measure the thickness of the polishing pad. The measured thickness of the polishing pad is displayed on the display device.

Abstract: To measure or exert optically-induced forces on at least one particle in the focus of an optical cage, the following steps are taken: a) the focus is positioned in a microelectrode arrangement with a three-dimensional electrical field that has a field gradient which forms an electrical capture area, and the focus is at a distance from the capture are and b) the amplitude of the electrical field, the light power of the light beam forming the optical cage, and/or the distance of the capture area from the focus are varied to detect which varied field property moves the particle from the focus to the capture area or vice versa, or at least to temporarily move the particle into the capture area.

Abstract: A method of detecting relative position of a reflecting-type reticle and a substrate with the reticle having an alignment mark thereon. The method includes a holding step of holding the reticle on a reticle stage which has a reference mark, and a detection step of detecting position of the alignment mark on the reticle based on alignment light reflected from the alignment mark and detecting relative position between the reference mark on the reticle stage and the alignment mark.

Abstract: A device and method for measuring the back pressure in chemical reactor tubes includes many automated features. Inflatable tube seals may be automatically inflated. The device may measure several tubes at once. It may transmit data electronically to a remote computer for analysis and graphic display.

Abstract: A controller is provided with an artificial retina chip. The artificial retina chip is connected to a display unit via a game machine body. Before starting the game, the artificial retina chip is instructed to recognize an image of frame of the display unit to store such image as the reference image. After starting the game, the controller is moved to recognize the image of frame of the display unit in order to detect the designated position by comparing the coordinate position data after the movement and the coordinate position data of the reference image.

Abstract: An optical alignment system for use in a semiconductor processing system is provided. The optical alignment system includes a wafer chuck that has an alignment feature integrated into the top surface of the wafer chuck. In addition, a beam-forming system, which is capable of emitting an optical signal onto the alignment feature, is disposed above the wafer chuck. Also, a detector is included that can detect an amplitude of the optical signal emitted onto the alignment feature. In one aspect, the alignment feature can be a reflective alignment feature that reflects a portion of the optical signal back to the beam detector. In additional aspect, the alignment feature can be a transmittance alignment feature capable of allowing a portion of the optical signal to pass through the wafer chuck to the detector. In this aspect, the detector can be disposed below the wafer chuck.

Abstract: A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.

Abstract: The invention is a device for positioning a hand-held RAM inspection system for measuring the thickness of a RAM coating. In detail, the invention includes a housing containing the RAM coating inspection system, the housing having a longitudinal axis. Three laser distance-measuring devices are circularly mounted on the housing at 120 degrees from each other; the laser distance measuring devices are for determining the required distance and orientation of the RAM inspection system from the RAM coating surface. An electrical controller circuit is coupled to the three lasers and the RAM inspection system for triggering the RAM inspection system to measure the RAM material when the three lasers indicate that the housing is at the proper distance and orientation to the RAM coating surface.

Abstract: The invention relates to a device for alignment of a first component (1) and a second component (2) in a predetermined relation to each other, comprising a transmitter unit (7) arranged for mounting on said first component (1) and comprising a light source (9) for the generation of light radiation (10) with a predetermined pattern in the direction towards a receiver unit (11; 11?, 22, 27; 27?) arranged for mounting on said second component (2), where the receiver unit (11; 11?) comprises a detection device (18a, 18b; 18a?, 18b? 23a, 23b; 28a, 28b; 28?a, 28?b) for said light radiation (10). The invention is characterised in that said detector device (18a, 18b; 18a?, 18b?, 23a, 23b; 28a, 28b, 28?a, 28?b) comprises a first detector (18a, 18a? 23a; 28a; 28a?) and a second detector (18b; 18b? 23b; 28b; 28?b), respectively, which are separated depthwise in relation to said transmitter unit (7).

Abstract: Features of the present invention provide an optical layout that can accommodate the relatively strict enclosure requirements for compact component alignment sensor. Specifically, aspects of the present invention provide a single optical component that reduces the degree of divergence, and preferably substantially collimates light from the plurality of divergent light sources prior to entering the sensing field. In this regard, part count is kept low and the physical size of the optical train itself is relatively small.