Abstract: A light scanning apparatus makes a light beam scan along a main scanning direction on an effective scanning region which has a predetermined width. The apparatus comprises: a light source which emits the light beam; a deflector which includes an oscillation mirror which oscillates about an oscillatory axis which is orthogonal or approximately orthogonal to the main scanning direction, deflects the light beam emitted from the light source using the oscillation mirror, and makes the light beam scan a second scanning range which contains but extends beyond a first scanning range which corresponds to the effective scanning region; a detector which detects the scanning light beam which moves through a position which is outside the first scanning range but is within the second scanning range, and outputs a signal; and a controller which controls a mirror drive signal fed to the oscillation mirror based on the output signal from the detector and accordingly adjusts the amplitude of the oscillation mirror.

Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A light deflector is disclosed that includes a movable mirror serving as a deflector supported by a rotary shaft and configured to deflect a light beam emitted from a light source and scan an area to be scanned; a rotation part configured to cause the movable mirror to vibrate in a reciprocating manner by periodically applying a rotational torque to the movable mirror; a driving circuit configured to control the rotation part; a circuit board having the driving circuit provided thereon, the circuit board being configured to support the movable mirror as a unit; a contact plane contacting the circuit board in a plane perpendicular to the rotary shaft of the movable mirror; and a positioning part configured to determine the position of the rotary shaft in the contact plane.

Abstract: An actuator includes: a first vibrating system having a frame-like driving member and a pair of first axis members holding the driving member from both sides so that the driving member is rotatable about an X axis; a second vibrating system having a movable plate provided inside the driving member and a pair of second axis members holding the movable plate on the driving members from both sides so that the movable plate is rotatable about a Y axis orthogonal to the X axis; a driving unit including a permanent magnet provided on the driving member, a coil provided to oppose the permanent magnet and a voltage applying unit applying voltage to the coil; and a spacer sandwiched between the driving member and the permanent magnet so as to form space preventing intervention by the movable plate. The permanent magnet is provided such that a line segment connecting both poles of the permanent magnet inclines, in a plan view of the movable plate, with respect to the X axis and the Y axis.

Abstract: An oscillator device including an oscillation system with oscillators and torsion springs, a driving member for driving the oscillation system, and a drive control member for supplying a driving signal to the driving member, the oscillation system having at least a first oscillation mode and a second oscillation mode, the second oscillation mode having an angular frequency approximately n-fold the angular frequency of the first oscillation mode where n is an integer, the driving member driving the oscillation system so that it simultaneously oscillates in the first and second oscillation modes, wherein a natural angular frequency calculating member calculates the natural angular frequency of the second oscillation mode based on an output signal from a photodetector, being outputted at a timing whereat the reflection light passes over the photodetector.

Abstract: Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.

Abstract: An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.

Abstract: An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving member to rotate around an X-axis; a second oscillatory system including a movable plate provided inside the driving member and a pair of second axial members holding the movable plate to the driving member from both ends so as to allow the movable plate to rotate around a Y-axis perpendicular to the X axis; and a driving unit including a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, and a voltage applying unit applying a voltage to the coil. The permanent magnet is provided such that a line segment connecting both poles is slanted with respect to each of the X-axis and the Y-axis, in a plan view of the movable plate.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system operates in the frequency domain and determines harmonic drive coefficients for a scanning mirror drive signal. An inner loop of the control system operates in the time domain and compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonic drive coefficients.

Abstract: In a laser display displaying a video by scanning a beam from a laser light source two-dimensionally on a screen, image quality is deteriorated markedly by speckle noises induced from coherency of the light source. A known method of oscillating the screen to remove the speckles has a problem that a large-scale device is necessary and the screen cannot be chosen without any restraint. A speckle pattern that is generated can be suppressed using a beam oscillating means that oscillates a light spot on the screen at a high speed, causing a viewer to perceive a time-mean image as not having speckle noises.

Abstract: An optical scanning device includes a dot clock generator which generates a dot clock having a dot clock cycle corresponding to a scanning direction of an optical flux by dividing master clocks which constitute basic clocks with frequency-dividing-number corresponding to a scanning position. The dot clock generator changes, with respect to a group of dot clocks which is formed of plural sets of dot clocks in which a frequency-dividing-number sequence pattern of the set of dot clocks which is constituted of two or more continuous dot clocks is repeated plural times on one scanning line, the frequency-dividing-number sequence pattern of each set of dot clocks while maintaining a total value of frequency dividing numbers necessary for generating each set of dot clocks at a constant value.

Abstract: An optical scanning device of the invention includes: a substrate main body; two cantilever beam portions which protrude from both-side portions of one side of the substrate main body; a mirror portion whose both-sides are supported by torsion bar portions between the cantilever beam portions; a drive source which causes the substrate main body to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to a substrate by the drive source, and a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and where a fixed end portion of the substrate main body which is located on the opposite side thereof from the mirror portion side is fixed to a supporting component, and the drive source is provided on a portion of the substrate main body.

Abstract: An optical scanning apparatus includes a light source, a light source driving unit that turns on the light source according to image information, a deflector that deflects and scans a light beam emitted from the light source according to sinusoidal vibration, and a scanning/imaging optical system that guides the light beam from the deflector to a scanned surface. The scanning/imaging optical system satisfies two conditions, i.e., (1) provided that the deflector moves in such a manner that an angular velocity is constant, linearity is made larger at a most peripheral image height than at a central image height within a range of an effective writing width, and (2) when a deflection angle of the deflector has a sinusoidal characteristic, the linearity is made smaller at the most peripheral image height than at the central image height within the range of the effective writing width.

Abstract: An apparatus for use in optical scanning is disclosed which vibrates at least a part of a vibrating body having a light-reflective surface, to thereby allow light, upon entry, to be reflected from the light-reflective surface in varying directions. The vibrating body includes: (a) a reflective mirror having the light-reflective surface; and (b) an integral spring extending from the reflective mirror and being excited to generate at least a torsional vibration. The vibrating body has vibrational characteristics in which whether or not a resonant frequency of the torsional vibration and a resonant frequency of a disturbing vibration are equal to each other depends upon a shape-defining parameter for defining a shape of the integral spring extending lengthwise. The shape-defining parameter is pre-set to fall within a range allowing the resonant frequency of the torsional vibration and the resonant frequency of the disturbing vibration to be different from each other.

Abstract: An image display apparatus includes first and second actuators that cause a mirror (movable part) to oscillate about first and second axes intersecting with each other. The first actuator is driven based on a drive signal having a frequency component around a resonant frequency relevant to oscillatory motion of the mirror, to cause the mirror to oscillate about the first axis, thereby scanning a light beam reflected off the mirror in a horizontal direction of the raster scanning. The drive signal is generated by regulating a reference drive signal based on a correction signal for use in correcting distortion of a displayed image, the distortion occurring when the first actuator is driven based on the reference drive signal for use as the drive signal to cause oscillatory motion of the mirror. This consequently simplifies distortion correction in the horizontal direction (the main scanning direction).

Abstract: An optical scanning actuator includes a fixed member having a light source, a movable member having an optical element that deflects light emitted from the light source and caused to vibrate by a driving unit in a direction perpendicular to an optical axis of the optical element, and a joint unit that connects the fixed member and the movable member, supports the movable member, and is bent in a direction perpendicular to an optical axis of light emitted from the light source by vibration of the movable member. The optical scanning actuator scans light emitted from the light source in an vibration direction by vibration of the optical element along with the vibration of the movable member. The joint unit includes pairs of joint members connected via at least one deformation reducing member that reduces bending deformation of the joint members caused by the vibration of the movable member.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying a drive voltage to a set of comb fingers disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure and by driving a second frame of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.

Abstract: A two-element f-? lens used for a micro-electro mechanical system (MEMS) laser scanning unit includes a first lens and a second lens, the first lens is a biconvex lens and the second lens is a biconcave lens. At least one optical surface is aspherical surface in both main scanning direction and sub scanning direction, and satisfies special optical conditions. The two-element f-? lens corrects the nonlinear relationship between scanned angle and the time into the linear relationship between the image spot distances and the time. Meanwhile, the two-element f-? lens focuses the scan light to the target in the main scanning and sun scanning directions, such that the purpose of the scanning linearity effect and the high resolution scanning can be achieved.

Abstract: A scanning apparatus for a printer or similar instrument. A multiharmonic oscillator is used to provide a composite motion of a laser beam or other light beam to scan an imaging surface. The multiharmonic oscillator may have multiple sections each having a different resonant frequency. One section includes a reflector that intercepts the light beam, and drive electronics move the reflector so the light beam scans the imaging surface. Linear and complex non-linear motions of the light beam may be achieved. Microelectromechanical systems (MEMS) technology may be used to fabricate the oscillator.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body.

Abstract: A combination pivoting mirror and support bracket has a bracket for supporting a pivoting mirror assembly and for attaching the combination to a using device. The bracket has first and second edges. A first portion of the bracket defines a mounting area for fixedly securing the first portion to the using device, and a second portion of the bracket is for mounting the pivoting mirror. An isolation slot is formed in the bracket and located between the first portion of the bracket and the second portion of the bracket. A plurality of piezoelectric devices are mounted to the second portion of the bracket and extend substantially orthogonal to a surface of the bracket. A pivoting mirror has a pair of torsional hinges for pivotally supporting a reflective surface. Each hinge of the pair extends away from the reflecting surface and along a selected axis to an anchor portion.

Abstract: A vibration unit including a frame, a vibration element including a substrate configured to vibrate, and a beam configured to connect the vibration element to the frame. The vibration unit is produced by applying an etching process to at least two surfaces of a substrate. A meeting position of the two surfaces of the substrate located where a first etching process, which takes place on a first surface of the substrate and a second etching process, which takes place on a second surface of the substrate meet, and is located at a position other than a center position in a width direction of the beam.

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract: A scanning apparatus for a printer or similar instrument. A multiharmonic oscillator is used to provide a composite motion of a laser beam or other light beam to scan an imaging surface. The multiharmonic oscillator may have multiple sections each having a different resonant frequency. One section includes a reflector that intercepts the light beam, and drive electronics move the reflector so the light beam scans the imaging surface. Linear and complex non-linear motions of the light beam may be achieved. Microelectromechanical systems (MEMS) technology may be used to fabricate the oscillator.

Abstract: Provided is an optical scanner for observing an image that is formed by performing two-dimensional scanning with the aid of a swinging movable mirror, using light beams modulated on the basis of image information and emitted from a light source unit. An optical scanner of the present invention includes a scanning device and a fixing member having an attachment portion for attachment of the scanning device, the scanning device including a movable mirror, an elastic support portion supporting the movable mirror such that the movable mirror can swing around a swinging center, a support base supporting the elastic support portion, and a swinging unit for swinging the movable mirror. A first surface of the attachment portion is formed on a plane of a surface of the movable mirror. A second surface of the attachment portion is formed on a plane which is perpendicular to the surface of the movable mirror and includes the swinging center.

Abstract: An amplified bimorph scanning mirror for use in various optical systems, an optical coherence tomography scanner incorporating the amplified bimorph scanning mirror, and a method for manufacturing the foregoing are described. A method for optically scanning a target site using the amplified bimorph scanning mirror is further provided. The scan range which can be obtained by exemplary implementations of the present invention can be larger than the scan range made available by conventional scanners.

Abstract: A micro mirror device and an array thereof are disclosed wherein an outer frame is formed at a position distanced from a mirror plate, thereby reducing a dynamic deformation of the mirror plate, preventing degradation of beam reflected from the mirror plate, and enabling to maintain a balance of the mirror plate. A frame structure supporting a diaphragm of a mirror plate is made to be thinner as it is distanced from a central axis of the mirror plate, thereby reducing a dynamic deformation of the mirror plate to a great extent and embodying the lightness of the device.

Abstract: A mirror device and a method for audio feedback of a MEMS mirror device are presented. The mirror device includes a mirror with a reflective surface located to intercept a modulated beam of light produced by a laser. The mirror oscillates on a hinge axis structure. A microphone detects the mirror oscillation information. The mirror device further includes a mirror driver system and a video controller system. The mirror driver system causes the mirror to rotate about the hinge axis structure. The video controller system uses the information received from the microphone, and the information received from the mirror-driver controller, to control the output of the laser.

Abstract: An optical scanning element performs scanning with light by bringing a mirror portion into a swinging state by generating resonance oscillations of the mirror portion due to torsional oscillations. The optical scanning element has a first resonance frequency and a second resonance frequency which generate longitudinal oscillations and lateral oscillations on a lower region side and a high region side of a resonance frequency of the torsional oscillations respectively. Outputting of a drive signal is started by setting a frequency of a drive signal which is used for oscillating the optical scanning element to a specific frequency which falls between the first resonance frequency and the second resonance frequency and is higher than the resonance frequency of the torsional oscillations and, thereafter, the frequency of the outputted drive signal is shifted to the resonance frequency of the torsional oscillations after outputting of the drive signal is started.

Abstract: A light scanning apparatus includes a deflector having an oscillation mirror that oscillates about an axis that is orthogonal to a main scanning direction. A detector detects a scanning light beam deflected by the oscillation mirror and moving in a scanning region. A controller adjusts the amplitude of the oscillation mirror based on a detection signal outputted from the detector, and stops driving the oscillation mirror when the detection signal is not outputted from the detector.

Abstract: Embodiments relate to a MEMS device including a scanner rotatable about at least one rotation axis, with the scanner having a characteristic resonant frequency. According to one embodiment, the MEMS device includes drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis. The drive signal has a drive frequency selected to be about equal to the characteristic resonant frequency or a sub-harmonic frequency of the characteristic resonant frequency. According to another embodiment, the drive electronics are operable to generate a drive signal having a plurality of drive-signal pulses that moves the scanner at an operational frequency and sensing electronics are operable to sense a position of the scanner only when the drive-signal pulses of the drive signal are not being transmitted by the drive electronics. The MEMS device embodiments may be incorporated in scanned beam imagers, endoscopes, and displays.

Abstract: A driving method of an optical actuator is applied to a projection system. The optical actuator includes a carrier, an optical element and an actuator component. The optical element is disposed at the carrier. The actuator component drives the carrier to rotate an angle. The driving method includes the steps of providing a driving signal having an initial section and a target section, and shifting the optical element between a position driven by the initial section and a position driven by the target section via the actuator component according to a first acceleration-deceleration section and a second acceleration-deceleration section. In addition, an optical actuator, a projection lens module and a projection system are also disclosed.

Abstract: An optical scanner is disclosed that has an optical source unit that emits a laser beam; a vibration mirror by which the laser beam from the optical source unit is deflected to scan; a driving circuit that vibrates the vibration mirror based on a driving signal generated from a reference clock; a light-receiving element that receives the laser beam within the scanning area of the laser beam; and a controlling unit that corrects the driving signal so as to make a phase deviation between the reference phase clock and the output signal of the light-receiving element constant.

Abstract: A movable body apparatus includes a vibratory system, a driving portion for driving the vibratory system, a detecting portion for detecting a resonance frequency of the vibratory system, a drive controlling portion, and a storing portion. The vibratory system has a resonance frequency, and includes at least a movable body capable of being reciprocally, rotatably oscillated. The drive controlling portion regulates a driving frequency of a drive signal applied to the driving portion, based on the resonance frequency of the vibratory system. The storing portion stores the frequency detected by the detecting portion at a first predetermined time. The drive controlling portion regulates the driving frequency with reference to the stored frequency, at a second predetermined time after the storing portion stores the frequency, and executes a drive control of the vibratory system.

Abstract: A module configured to deflect light in an image forming apparatus. A torsion bar supports a mirror and defines a rotational axis of the mirror. A controller is configured to apply electronic pulses to at least one driving device to oscillate the mirror in the module around the rotational axis at a scanning frequency different than a resonance frequency of the mirror.