Lens, Lens System Or Component Patents (Class 359/355)
  • Patent number: 6021002
    Abstract: A real-image finder comprises an objective optical system which forms an image of an object to be viewed; a field frame member located on a primary image forming plane on which the image formed by the objective optical system is formed; an ocular optical system through which the object image formed on the primary image forming plane; and an image erecting optical system which erects the object image formed by the objective optical system. The transparent members are provided on the front and rear surfaces of the field frame, and the thickness of the transparent members are determined so that if a foreign matter sticks to the end surfaces of the transparent members that are opposite to and located away from the field frame member, no foreign matter can be viewed through the ocular optical system.
    Type: Grant
    Filed: April 24, 1998
    Date of Patent: February 1, 2000
    Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
    Inventors: Takaaki Yano, Tetsuya Abe, Sachio Hasushita
  • Patent number: 6016220
    Abstract: A corrector mirror folds the optical path between the objective and relay portions of a three-mirror anastigmat. The corrector mirror is a non-powered mirror having a nominally flat but higher order aspheric surface. By placing the corrector mirror between the objective portion and an intermediate image formed by the objective portion, the field offset of the anastigmat can be significantly increased. A large field offset makes the off-axis anastigmat ideal for use with an on-axis dewar for infrared imaging applications.
    Type: Grant
    Filed: April 9, 1996
    Date of Patent: January 18, 2000
    Assignee: Raytheon Company
    Inventor: Lacy G. Cook
  • Patent number: 6014252
    Abstract: An optical system compatible with short wavelength (extreme ultraviolet) radiation comprising four reflective elements for projecting a mask image onto a substrate. The four optical elements are characterized in order from object to image as convex, concave, convex and concave mirrors. The optical system is particularly suited for step and scan lithography methods. The invention increases the slit dimensions associated with ringfield scanning optics, improves wafer throughput and allows higher semiconductor device density.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: January 11, 2000
    Assignee: The Regents of the University of California
    Inventor: David R. Shafer
  • Patent number: 5995279
    Abstract: An optical element comprises a lens made of a material for shutting off all or most of light in the infrared region, and an optical low-pass filter, wherein the lens and the optical low-pass filter are incorporated with each other.
    Type: Grant
    Filed: November 6, 1995
    Date of Patent: November 30, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventors: Shigeru Ogino, Shuichi Kobayashi
  • Patent number: 5978132
    Abstract: A reimager comprises precisely two positive lenses wherein the chromatic longitudinal aberration lies within the depth of focus and the thermal image position variation likewise lies within the depth of focus over a temperature range of more than .+-.30.degree. (in the embodiment from -40.degree. C. to +70.degree. C.). Aspheric and diffractive surfaces are utilized and, if required, are joined on respective lens surfaces (31, 51, 53, 71, 73).
    Type: Grant
    Filed: October 14, 1997
    Date of Patent: November 2, 1999
    Assignee: Carl-Zeiss-Stiftung
    Inventor: Wilhelm Ulrich
  • Patent number: 5973826
    Abstract: An optical system compatible with short wavelength (extreme ultraviolet) An optical system compatible with short wavelength (extreme ultraviolet) radiation comprising four reflective elements for projecting a mask image onto a substrate. The four optical elements comprise, in order from object to image, convex, concave, convex and concave mirrors. The optical system is particularly suited for step and scan lithography methods. The invention enables the use of larger slit dimensions associated with ring field scanning optics, improves wafer throughput and allows higher semiconductor device density. The inventive optical system is characterized by reduced dynamic distortion because the static distortion is balanced across the slit width.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: October 26, 1999
    Assignee: Regents of the University of California
    Inventors: Henry N. Chapman, Russell M. Hudyma, David R. Shafer, Donald W. Sweeney
  • Patent number: 5956174
    Abstract: An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 .mu.m), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (type. greater than 0.
    Type: Grant
    Filed: January 15, 1998
    Date of Patent: September 21, 1999
    Assignee: KLA Instruments Corporation
    Inventors: David R. Shafer, Yung-Ho Chuang, Bin-Ming B. Tsai
  • Patent number: 5949073
    Abstract: A photo semiconductor element is covered by a cap with an incident window permitting incident light to penetrate through a translucent member. The photo semiconductor element detects a quantity of incident light penetrating through the translucent member of the incident window. The translucent member of the incident window is made of a material capable of suppressing the transmitting light quantity of incident light components having wavelengths less than 700 nm and larger than 900 nm. A photoelectric current output of the photo semiconductor element is controlled by the incident light penetrating through the translucent member of the incident window. The photo semiconductor element operates in multiple ways as a thermosensing sensor and a photosensing sensor.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: September 7, 1999
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventor: Masaki Shimoyama
  • Patent number: 5933272
    Abstract: An infrared afocal lens assembly for providing an observed magnified IR ie scene with a field of view and a substantially less temperature dependent performance. The assembly includes a collecting lens, focusing lens subassembly, an intermediate focal plane, an eyepiece lens subassembly, and an aperture stop. A wide field of view lens subassembly may be used about the focusing lens subassembly. All lenses are made of either GaAs or ZnS, and all lenses are either single lens or doublets.
    Type: Grant
    Filed: May 28, 1998
    Date of Patent: August 3, 1999
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: John M. Hall
  • Patent number: 5930032
    Abstract: A UV image forming optical system includes a collimating lens which collimates light emitted from a UV light source, and an imaging lens which forms an image of the collimated UV light transmitted through the collimating lens. A rear focal point of the collimating lens adjacent to the imaging lens is located closer to the imaging lens than a last lens surface of the collimating lens on the light emission side. A front focal point of the imaging lens adjacent to the collimating lens is located within the imaging lens. A lens system for UV radiation is also provided, which can be used as an imaging lens for the UV image forming optical system.
    Type: Grant
    Filed: December 22, 1995
    Date of Patent: July 27, 1999
    Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
    Inventors: Koichi Maruyama, Makoto Iwaki
  • Patent number: 5896222
    Abstract: A method of producing a fused silica glass by thermally converting a polymethylsiloxane precursor, the lens transmitting ultraviolet radiation at wavelengths below 300 nm. without undergoing a marked absorption transition, the lens so produced, and a microlithography system employing a lens of such glass.
    Type: Grant
    Filed: December 5, 1997
    Date of Patent: April 20, 1999
    Assignee: Corning Incorporated
    Inventors: Cynthia K. Rosplock, Daniel R. Sempolinski
  • Patent number: 5852508
    Abstract: A lens device for focusing a beam of an ultraviolet-ray region, provided with at least one aspherical lens made of synthetic quartz in which an aspherical portion is formed by a coating a fluororesin on a spherical portion of a side polished to a spherical surface; an ultraviolet-ray emitting device provided with a laser beam source emitting a beam in the ultraviolet-ray region and an object lens which has at least one of the above aspherical lenses; and an optical disc recording device provided with a laser beam source emitting a beam in the ultraviolet-ray region, a light intensity modulating means for modulating the intensity of the laser beam emitted from the laser beam source in accordance with a data signal; and the above object lens.
    Type: Grant
    Filed: May 15, 1996
    Date of Patent: December 22, 1998
    Assignee: Sony Corporation
    Inventors: Shigeo Kubota, Naoya Eguchi
  • Patent number: 5847881
    Abstract: A real image finder includes an objective optical system which forms an image of an object to be viewed on a primary image forming surface, a viewing optical system which is adapted to view the object image formed on the primary image forming surface, and an image erection optical system having four reflection surfaces. The optical axis of the objective optical system is aligned parallel with the optical axis of an ocular optical system. Two of the four reflection surfaces of the image erection optical system are located before the primary image forming surface and the remaining two reflection surfaces are located after the primary image forming surface. The first two reflection surfaces are defined by mirrors and the latter two reflection surfaces are defined by a prism.
    Type: Grant
    Filed: February 19, 1997
    Date of Patent: December 8, 1998
    Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
    Inventor: Takaaki Yano
  • Patent number: 5835262
    Abstract: A high-accuracy multi-wavelength optical microscope for providing a satisfactory contrast of image and much information about a sample. The microscope includes a plurality of light sources, a wavelength varietor independently varying the wavelength of the individual light sources, and polarization plane rotators on the optical path for each light source.
    Type: Grant
    Filed: December 28, 1995
    Date of Patent: November 10, 1998
    Assignees: Research Development Corporation of Japan, Olympus Optical Co., Ltd.
    Inventors: Yoshinori Iketaki, Masaaki Fujii
  • Patent number: 5818632
    Abstract: A multi-element refractive/diffractive lens system, especially useful in an interferometer of the Fizeau type for forming a partially reflective end of the cavity and focusing collimated laser light at a focus in the cavity, uses a plurality of lens elements all of which are plano concave or plano convex singlets and may be either spherical or cylindrical. The lens has a diffractive element which compensates for aberrations due to the refractive elements of the lens system and enables the lens system to be formed from relatively few refractive elements which are all plano-convex or plano-concave singlets thereby providing cost savings arising out of the reduction in the amount of glass material and number of lens elements. Since the lens system is especially suitable for use in a Fizeau type interferometer, it may be of the type called a Fizeau lens.
    Type: Grant
    Filed: April 13, 1995
    Date of Patent: October 6, 1998
    Assignee: Melles Griot, Inc
    Inventor: David Stephenson
  • Patent number: 5802335
    Abstract: A FLIR staring array detector system for imaging an object scene using catadioptric optics has a cold shield efficiency approaching unity. The system provides a full format image of the object scene. The catadioptric optics include reflective objective optics for providing an intermediate image of the object scene and refractive relay optics for providing the full format image. The system further includes a staring detector for receiving the full format image.
    Type: Grant
    Filed: March 21, 1996
    Date of Patent: September 1, 1998
    Assignee: State of Israel-Ministry of Defence, Rafael-Armament Development Authority
    Inventors: Doron Sturlesi, Shimon Peled
  • Patent number: 5796515
    Abstract: Catadioptric optical systems are disclosed that comprise, objectwise to imagewise, a positive first lens, a meniscus second lens having a convex face oriented objectwise, a meniscus third lens having a concave face oriented objectwise, and a concave spherical mirror having a concave face oriented objectwise. Light from an object passes through the first through third lenses and reflects from the concave mirror to form an image between the third lens and the concave mirror. The system satisfies the condition .vertline.f.sub.123 .vertline./f>10, where f.sub.123 is the aggregate focal length of the first through third lenses, and f is an overall focal length of the system. The first and second lenses are preferably made of a specified optical material, collectively have a positive refractive power, and fulfill the condition .vertline.f.sub.12 .vertline./.vertline.f'.sub.12 .vertline.>1, where f.sub.12 is the aggregate focal length of the first and second lenses, and f'.sub.
    Type: Grant
    Filed: July 8, 1997
    Date of Patent: August 18, 1998
    Assignee: Nikon Corporation
    Inventor: Atsushi Katsunuma
  • Patent number: 5781336
    Abstract: Multi-spectral images are detected using a refractive objective lens system. Magnesium oxide (MgO) and calcium fluoride (CaF.sub.2) lenses are used to image scenes in both the visible and infra-red (IR) spectrums. The inventors have discovered that the combination of magnesium oxide, only recently made available in a pure crystal form, and calcium fluoride can be used to fabricate an objective lens for imaging objects in both the visible and infra-red spectrums. Moreover, the combination of magnesium oxide and calcium fluoride results in a super-achromatic condition across visible and infra-red spectrums. This chromatically-corrected spectral range includes wavelengths between 0.4 and 5.9 microns which covers medium-wave IR (MWIR), short-wave IR (SWIR), and the near-IR/visible windows. Combinations of MgO and CaF.sub.2 lenses are used in different compound objective lens designs including doublet, Petzval, inverted telephoto, and telephoto arrangements.
    Type: Grant
    Filed: November 28, 1995
    Date of Patent: July 14, 1998
    Assignee: Lockheed Martin Corporation
    Inventors: Bryan Coon, John F. McGee, III, Neil Sherman, Lou Montulli
  • Patent number: 5754340
    Abstract: The projection optical system of the present invention decreases particularly the secondary spectrum of chromatic aberration and minimizes restrictions on lens design. The projection optical system of a projection exposure apparatus which irradiates a light beam from a light source on a mask to expose a pattern of the mask onto a photosensitive substrate through the projection optical system has at least one diffraction optical element, at least one quartz lens, and at least one fluorite lens. The diffraction optical element has a positive power, the quartz lens has a negative power, and the fluorite lens has a positive power. An Ar--F laser is preferably used as a light source.
    Type: Grant
    Filed: June 29, 1995
    Date of Patent: May 19, 1998
    Assignee: Nikon Corporation
    Inventors: Kazuo Ushida, Koichi Matsumoto
  • Patent number: 5751473
    Abstract: A dual-band optical system 10 preferably for use in the thermal infrared waveband provides initial detection of a target in a first waveband (8-12 .mu.m) having a wide field of view and discriminated target recognition in the second waveband (3-5 .mu.m) at higher magnification and narrow field of view without any field-of-view change mechanism. The system 10 comprises a detector array 11 which is responsive in both wavebands and an optical arrangement 16 with a common objective component 15 for both wavabands. One waveband is transmitted through dichroic beamsplitters 17,18 to the array 11 whereas the other waveband is reflected by the beamsplitters 17,18 and transmitted through a field lens 28 before reaching the array 11. Both wavebands are incident upon a spectrally selective aperture stop 20 providing a large aperture for the low magnification field and a small aperture for the high magnification field.
    Type: Grant
    Filed: April 4, 1996
    Date of Patent: May 12, 1998
    Assignee: Barr & Stroud Limited
    Inventor: Herbert Morrison Runciman
  • Patent number: 5745286
    Abstract: An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.
    Type: Grant
    Filed: October 13, 1995
    Date of Patent: April 28, 1998
    Assignee: Regents of the University of California
    Inventor: Andrew M. Hawryluk
  • Patent number: 5737137
    Abstract: A critical illumination condenser system, particularly adapted for use in extreme ultraviolet (EUV) projection lithography based on a ring field imaging system and a laser produced plasma source. The system uses three spherical mirrors and is capable of illuminating the extent of the mask plane by scanning either the primary mirror or the laser plasma source. The angles of radiation incident upon each mirror of the critical illumination condenser vary by less than eight (8) degrees. For example, the imaging system in which the critical illumination condenser is utilized has a 200 .mu.m source and requires a magnification of 26.times.. The three spherical mirror system constitutes a two mirror inverse Cassegrain, or Schwarzschild configuration, with a 25% area obstruction (50% linear obstruction). The third mirror provides the final pupil and image relay. The mirrors include a multilayer reflective coating which is reflective over a narrow bandwidth.
    Type: Grant
    Filed: April 1, 1996
    Date of Patent: April 7, 1998
    Assignee: The Regents of the University of California
    Inventors: Simon J. Cohen, Lynn G. Seppala
  • Patent number: 5729381
    Abstract: This invention is directed to the production of cuprous halide- or a cuprous-cadmium halide-containing glass articles which are essentially completely opaque to ultraviolet radiation and can be essentially completely opaque to radiation within the region of wavelengths of up to 550 nm, but are transparent to visible radiations having a wavelength longer than the radiation within the region of opacity. The method involves exposing the glass articles to a hydrogen gas-containing atmosphere at a temperature between about 375.degree.-500.degree. C. for a period of at least 18 hours to develop an integral reduced layer in at least one surface of the article having a depth effective to prevent the transmission of ultraviolet radiation and radiation having a wavelength up to 550 nm through the article.
    Type: Grant
    Filed: November 13, 1995
    Date of Patent: March 17, 1998
    Assignee: Corning Incorporated
    Inventors: Thomas G. Havens, David J. Kerko, JoAnn Morrell
  • Patent number: 5719698
    Abstract: Recent UV-lithography is required to provide a fine and sharp pattern with a line width of 0.5 .mu.m or less. The present invention provides a silica glass member adapted for use as an optical element for UV-lithography, by giving consideration to the RMS value of wave front aberration and the slant element of refractive index, which have not been considered in the art. Also, there is provided a silica glass member excellent in durability to the ultraviolet irradiation, by introduction of hydrogen molecules at the synthesis of the silica glass, instead of using a secondary treatment for hydrogen introduction.
    Type: Grant
    Filed: September 6, 1996
    Date of Patent: February 17, 1998
    Assignee: Nikon Corporation
    Inventors: Hiroyuki Hiraiwa, Issey Tanaka
  • Patent number: 5717518
    Abstract: An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 .mu.m), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (typ. greater than 0.
    Type: Grant
    Filed: July 22, 1996
    Date of Patent: February 10, 1998
    Assignee: KLA Instruments Corporation
    Inventors: David R. Shafer, Yung-Ho Chuang, Bin-Ming B. Tsai
  • Patent number: 5699183
    Abstract: Recent UV-lithography is required to provide a fine and sharp pattern with a line width of 0.5 .mu.m or less. The present invention provides a silica glass member adapted for use as an optical element for UV-lithography, by giving consideration to the RMS value of wave front aberration and the slant element of refractive index, which have not been considered in the art. Also, there is provided a silica glass member excellent in durability to the ultraviolet irradiation, by introduction of hydrogen molecules at the synthesis of the silica glass, instead of using a secondary treatment for hydrogen introduction.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: December 16, 1997
    Assignee: Nikon Corporation
    Inventors: Hiroyuki Hiraiwa, Seishi Fujiwara, Hiroki Jinbo, Jun Takano, Norio Komine, Kazuhiro Nakagawa, Issey Tanaka
  • Patent number: 5696624
    Abstract: Recent UV-lithography is required to provide a fine and sharp pattern with a line width of 0.5 .mu.m or less. The present invention provides a silica glass member adapted for use as an optical element for UV-lithography, by giving consideration to the RMS value of wave front aberration and the slant element of refractive index, which have not been considered in the art. Also there is provided a silica glass member excellent in durability to the ultraviolet irradiation, by introduction of hydrogen molecules at the synthesis of silica glass, instead of the secondary treatment for hydrogen introduction.
    Type: Grant
    Filed: May 16, 1996
    Date of Patent: December 9, 1997
    Assignee: Nikon Corporation
    Inventors: Norio Komine, Hiroki Jinbo, Seishi Fujiwara, Hiroyuki Hiraiwa
  • Patent number: 5686195
    Abstract: The surface of a zinc selenide substrate is ground to curve in the opposite direction from that which occurs due to the bimetallic effect when zinc sulfide is deposited on a flat substrate by the chemical vapor deposition process. The bowing of the interface that occurs upon cooling of the hot laminate when the surface of the substrate is flat before deposition is compensated for by the pre-figured bowing. A distortion free window for the transmission of infra-red radiation is provided by this invention.
    Type: Grant
    Filed: January 24, 1995
    Date of Patent: November 11, 1997
    Assignee: CVD, Inc.
    Inventors: Raymond L. Taylor, Lee E. Burns, James C. MacDonald
  • Patent number: 5682263
    Abstract: Design forms are disclosed for lens triplets comprising a liquid lens element, which are well-corrected for chromatic aberration over a broad wavelength band extending from the ultraviolet region through the visible region into the near infrared region of the electromagnetic spectrum.
    Type: Grant
    Filed: February 14, 1994
    Date of Patent: October 28, 1997
    Assignee: Lockheed Missiles & Space Company, Inc.
    Inventors: Paul N. Robb, Robert D. Sigler
  • Patent number: 5627674
    Abstract: Lens systems (8, 18, 28, 38, 48, 58) with first and second rigid lens elements and a liquid lens element therebetween are provided. The first and second rigid lens elements (10, 11; 20, 21; 30, 31; 40, 41; 50, 51; 60, 61) and the liquid lens elements (16, 26, 36, 46, 56, 66) co-act with each other to cause the lens system to have substantially diffraction limited performance over a continuous ultraviolet wavelength band, wherein the first and second rigid lens elements and the liquid lens element are configured and positioned with respect to each other according to a selection of particular designs and design forms.
    Type: Grant
    Filed: June 17, 1994
    Date of Patent: May 6, 1997
    Assignee: Lockheed Missiles & Space Company, Inc.
    Inventor: Paul N. Robb
  • Patent number: 5604630
    Abstract: A night vision device that uses low cost optics in a balanced arrangement that corrects for distortions created by the low cost optics. The night vision device is a monocular assembly that uses a Gen II or a Gen III image intensifier tube. An objective lens assembly, containing a plurality of low cost lenses, is positioned in front of the image intensifier tube so that the objective lens assembly directs low intensity light onto the input surface of the image intensifier tube. A collimator assembly is positioned proximate the output surface of the image intensifier tube, wherein the collimator assembly collimates the visible image produced by the image intensifier tube. The collimator assembly is comprised of lenses that are identical in shape, size and material to the lenses found within the objective lens assembly. However, the lenses in the collimator assembly are arranged in reverse, as a mirror image of the lenses in the objective lens assembly.
    Type: Grant
    Filed: June 30, 1995
    Date of Patent: February 18, 1997
    Assignee: ITT Corporation
    Inventor: Gary L. Palmer
  • Patent number: 5555479
    Abstract: The invention relates to a reduction projection lens system of high resolution which enables chromatic aberration to be corrected, and can be improved in terms of transmittance by making the total thickness of the vitreous material forming said lens system. This reduction projection lens system includes refractive and diffractive optical elements and uses as the light source a spectral light source having a center wavelength of up to 300 nm and a wavelength spectral bandwidth of .+-.0.5 pm to .+-.200 pm such as an ArF or KrF excimer laser. The refractive optical element includes at least one aspheric surface, and the refractive and diffractive optical elements are made of the same vitreous material, e.g., SiO.sub.2. conditions, 0.02<.vertline.d/D.vertline.<0.17 and 0.01<.vertline.h/H.vertline.<0.
    Type: Grant
    Filed: October 31, 1994
    Date of Patent: September 10, 1996
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Kunie Nakagiri
  • Patent number: 5548439
    Abstract: An infrared refractive reimaging afocal telescope (10) has an objective lens group (12), an eyepiece lens (14), and a switching lens group (16). The system (10) provides a plurality of magnification modes in a compact arrangement. Diffractive surfaces are provided on at least one of the objective lenses and the eyepiece lens. Also, the system (10) utilizes switching lenses (40, 42, 44, 46) to provide magnification changes. The diffractive surfaces provide chromatic aberration correction. The system provides for excellent image quality in all modes using a minimum number of lens elements.
    Type: Grant
    Filed: December 27, 1994
    Date of Patent: August 20, 1996
    Assignee: Hughes Aircraft Company
    Inventor: Richard R. Smith
  • Patent number: 5504618
    Abstract: An extreme wide angle, very large aperture, very compact, solar blind, UV imaging lens system. The lens system has a fused silica polyvinyl alcohol glass color filter, a lens made of fused silica, a lens made of nickel sulfate, a layer of coupling fluid and another lens made of fused silica. Alternatively, sapphire can be used after the color filter instead of the fused silica. An alternative lens is composed of two layers of fused silica, a layer of nickel sulfate, another layer of fused silica, coupling fluid followed by polyvinyl alcohol, a color glass filter and coupling fluid followed by fused silica. In a fourth embodiment, the two layers of fused silica are followed by polyvinyl alcohol, a layer of colored glass filter, fused silica, nickel sulfate, coupling fluid, and fused silica.
    Type: Grant
    Filed: June 20, 1994
    Date of Patent: April 2, 1996
    Assignee: Loral Infrared & Imaging Systems, Inc.
    Inventors: John H. Hirs, Anthony M. Nicoli, Warren L. Clark
  • Patent number: 5502592
    Abstract: Design forms are disclosed for infrared imaging systems that can operate at hyper-hemispherical fields of view (e.g., up to 270.degree.) and at wide relative apertures (e.g., up to f/0.7) to produce images having low distortion--typically no more than 20% greater than the distortion resulting when the image size is proportional to the field angle.
    Type: Grant
    Filed: November 22, 1993
    Date of Patent: March 26, 1996
    Assignee: Lockheed Missiles & Space Company, Inc.
    Inventor: Thomas H. Jamieson
  • Patent number: 5493443
    Abstract: In a Raman microscope, in particular for a Fourier transform (FT) spectrometer with a lens for magnified imaging of a point-shaped region (1) on a surface of a measuring sample (2) and with a laser for irradiating laser radiation onto the point-shaped region (1), the laser radiation is in the infrared (IR), preferentially in the near-infrared (NIR) region and the lens is a Cassegrain mirror-lens (3, 4) with a convex mirror (3) arranged rotationally symmetrically to an optical axis (5) and with a concave mirror (4) which is likewise rotationally symmetric to the optical axis (5) of the lens, whereby the focal point of the concave mirror (4), lying on the optical axis (5), coincides with the point-shaped region (1) on the surface of the measuring sample (2). In this fashion distortion-free NIR Raman spectra can be taken with simple optical elements.
    Type: Grant
    Filed: December 10, 1993
    Date of Patent: February 20, 1996
    Assignee: Bruker Analytisch MeBtechnik GmbH
    Inventors: Arno Simon, Reiner Schubel
  • Patent number: 5481401
    Abstract: Light from a mercury lamp is focused by an objective lens system and is incident on a specimen to be examined. A focusing optical path of light reflected by the specimen is split into an optical path of an ultraviolet ray and an optical path of visible light by a dichroic mirror having wavelength selectivity. The ultraviolet ray is guided to an ultraviolet CCD camera. The ultraviolet CCD camera supplies a monochrome picture signal to a monochrome display through a first picture processor. On the other hand, the visible light is guided to a color CCD camera. The color CCD camera supplies a color picture signal to a color display through a second picture processor. Therefore, an ultraviolet picture of the specimen is displayed on the monochrome display at a high resolving power and a large magnification. At the same time, a color picture of the specimen is displayed on the color display.
    Type: Grant
    Filed: August 15, 1994
    Date of Patent: January 2, 1996
    Assignee: Olympus Optical Co., Ltd.
    Inventors: Nobuhiro Kita, Shingo Kashima, Kazuo Shimizu
  • Patent number: 5479292
    Abstract: In an infrared wide-angle single lens which is as constructed as of a positive meniscus lens, the following conditional expressions (1) through (6) are satisfied:(1) -50.0 th<r.sub.1 <-3.5 th(2) -5 th<r.sub.2 <-1.1 th(3) 2<n<4.5(4) 0.1 f<d<0.8 f(5) 0.5 f<bf<1.5 f(6) 0.5 f<th<2fwhere, an aperture stop is disposed between an object plane and a first surface, d is the distance between the aperture stop and the first surface, th is the lens thickness, bf is the backfocus, r.sub.1 is the radius of curvature of the first surface of the lens, r.sub.2 is the radius of curvature of a second surface of the lens, n is the refractive index of a vitric material of the lens at a wavelength of 10 .mu.m, and f is the focal length.
    Type: Grant
    Filed: September 9, 1993
    Date of Patent: December 26, 1995
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Motonobu Yoshikawa, Yoshiharu Yamamoto
  • Patent number: 5469299
    Abstract: A high resolution objective lens system for use in the ultraviolet region around 250 nm comprising in order from the object side: a first lens unit comprising a meniscus lens component having an object side concave surface having high curvature and a positive lens component, and having a positive refractive power as a whole; a second lens unit comprising at least two cemented lens components and having a positive refractive power as a whole; and a third lens unit comprising a cemented lens component and having a negative refractive power as a whole: each of the lens elements arranged in the lens units being made of an optical material which has, a thickness of at least 5 mm, and an internal transmittance of at least 50% for a ray having a wavelength of 300 nm.
    Type: Grant
    Filed: November 23, 1993
    Date of Patent: November 21, 1995
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Chikara Nagano
  • Patent number: 5442480
    Abstract: Chromatic dispersion between first and second wavelengths of light is corrected by a lens/zone plate combination. The zone plate is adapted both to send most of the first wavelength light into its zeroth order and to send most of the second wavelength light into its first order and to change the focal length of the second wavelength light to coincide with the focal length of the first wavelength light. A preferred embodiment includes a zinc/selinide sulfide lens having a zone plate etched onto one of its surfaces. The zone plate has a multi-step phase profile including four phase levels. The lens/zone plate combination is particularly adapted for use with CO.sub.2 and HeNe lasers to bring their focal lengths into coincidence.
    Type: Grant
    Filed: August 31, 1993
    Date of Patent: August 15, 1995
    Assignee: Massachusetts Institute of Technology
    Inventors: Gary J. Swanson, Miles Scott
  • Patent number: 5440422
    Abstract: A method for the manufacture of quasi-monochromatic microscope dry objectives for a wavelength range from 190 to 360 nanometers proceeds from a basic objective with a specified number of lenses. The basic objective is corrected for a specified wavelength with respect to image aberrations. By using lenses with slightly different production thicknesses and by arranging the lenses at different air separations, objectives for other areas of application are created. All of the objectives have the same number of lenses and virtually the same resolution. The data for three objectives derived from a basic objective are provided as an example.
    Type: Grant
    Filed: June 14, 1993
    Date of Patent: August 8, 1995
    Assignee: Leica Mikroskopie und Systeme GmbH
    Inventor: Wolfgang Vollrath
  • Patent number: 5386315
    Abstract: A compound lens for use in a low light level system operating in the near-infrared region. The lens system includes a high light-gathering ability requiring both a large aperture and good transmissivity over the wavelengths of interest. A wide field of view (e.g., 50.degree.) without excessive chromatic and geometric aberrations that generally accompanies systems with a large aperture is provided. Space is provided in the lens system for a variable iris and variable density spot subassembly. Desired optical quantities are obtained through the use of zinc selenide as the material for an aspheric lens. The use of this diamond-turnable infrared material as a field lens yields exceptional performance for a fast (e.g., F/1.25) lens with a wide field of view.
    Type: Grant
    Filed: June 4, 1993
    Date of Patent: January 31, 1995
    Assignee: Martin Marietta Corporation
    Inventors: Max Amon, John Tejada
  • Patent number: 5363235
    Abstract: An optical system (10) includes a three mirror anastigmat telescope (12) and imager optics (14). The imager optics (14) provide narrow and wide field of view staring of the viewed scene. The optical system is positioned in a turret assembly (50) and folded to provide a sensor. The sensor includes an output laser beam generator (90). The telescope (12) is shared by the infrared system and the laser (90) to provide a simplistic and compact turret arrangement (50) which is well suited for aircraft targeting and designation purposes.
    Type: Grant
    Filed: February 10, 1993
    Date of Patent: November 8, 1994
    Assignee: Hughes Aircraft Company
    Inventors: Pul C. Kiunke, Reynold S. Kebo, Chungte W. Chen
  • Patent number: 5329404
    Abstract: A 5.times. laser beam expander lens that is well-corrected for chromatic aberration can be used without refocussing over a wavelength range from 0.365 micron to 1.3 micron.
    Type: Grant
    Filed: November 20, 1992
    Date of Patent: July 12, 1994
    Assignee: Lockheed Missiles & Space Company, Inc.
    Inventor: Paul N. Robb
  • Patent number: 5315434
    Abstract: An infrared-transmissive lens formed by using glass including germanium and selenium or germanium and sulfur as main components and a human body detecting device including the lens and a pyroelectric infrared sensor are disclosed. With this configuration, glass having excellent transmissivity of infrared rays, no poisonous characteristic and difficulty to be crystallized is obtained and the glass is subjected to thermal pressing work to form a lens. The lens and a pyroelectric infrared sensor are combined to obtain a scanning type human body detecting sensor device. Further, the scanning type human body detecting sensor device can be used to detect a plurality of human bodies simultaneously.
    Type: Grant
    Filed: May 14, 1992
    Date of Patent: May 24, 1994
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Yasuo Mizuno, Masakatsu Sugai, Masaki Ikeda, Akihiko Yoshida
  • Patent number: 5305138
    Abstract: A superachromatic focusing objective lens which focuses wavelengths extending between the ultraviolet and the visible wavelength spectrum and is able to achieve superachromatic correction for three wavelengths within the visible spectrum is disclosed. The present objective lens includes an achromatic lens to assist in the correction spherical and coma aberration, a modified gauss for minimizing spherochromatism, a reversed modified gauss for adding symmetry to aid in the correction of coma, distortion and lateral color aberrations, and a stop located between the modified gauss and the reverse modified gauss. A glass plate is provided for forming a splatter shield to protect the lens from debris, and may be used to define one wall of a vacuum chamber. The elements of the objective lens may be made from various glasses to include calcium fluoride, quartz, and barium fluoride.
    Type: Grant
    Filed: July 31, 1992
    Date of Patent: April 19, 1994
    Assignee: International Business Machines Corporation
    Inventors: Candace J. Freedenberg, Frederick A. Herring, Uldis A. Ziemins
  • Patent number: 5251063
    Abstract: A three-lens objective has the following characteristics: A front lens consists of a first material of relatively low dispersion, a median lens consists of a second material of relatively larger dispersion, and a rear lens consists of a material of relatively low dispersion. The front lens has positive power, the median lens has negative power, and the rear lens has positive power. The spacing between front lens and median lens is substantially smaller than the distance between median lens and rear lens. Each of the lenses has at least one aspherical surface.
    Type: Grant
    Filed: October 16, 1992
    Date of Patent: October 5, 1993
    Assignee: Bodenseewerk Geratetechnik GmbH
    Inventor: Rainer Baumann
  • Patent number: 5239360
    Abstract: An apparatus for enhancing signal to noise ratio in the detection of electromagnetic radiation traversing a capillary tube includes a ball lens and a holding element for holding the ball lens and the capillary tube, the holding element having an aperture so that the aperature and the lens together define an optic axis. The holding element is configured to hold the capillary tube such that the center of the capillary tube traverses the optic axis. The lens has a focal length and is held at such a position relative to that focal length by the holding element such that electromagnetic radiation incident on the aperature is focussed to pass radially through the capillary tube. Thus, the effective path length is 100% of the inside diameter of the capillary tube.
    Type: Grant
    Filed: July 31, 1990
    Date of Patent: August 24, 1993
    Assignee: Applied Biosystems, Inc.
    Inventors: Stephen E. Moring, Dennis E. Mead
  • Patent number: 5239409
    Abstract: An infrared microscope is disclosed which provides illumination for reflectance by the sample. This illumination follows a path through the objective toward the sample, and again, after reflection, through the objective toward the detector The reflectance illumination is directed toward the objective and sample by a fully reflective mirror, which injects approximately half of the interferometer beam into the microscope, and permits substantially all of the reflected beam to reach the detector.
    Type: Grant
    Filed: June 3, 1991
    Date of Patent: August 24, 1993
    Assignee: Research-Cottrell Technologies, Inc.
    Inventors: Walter M. Doyle, Norman S. Hughes
  • Patent number: 5225927
    Abstract: A real image type view finder comprising at least one cemented lenses. Of the lens components constituting the cemented lens, a lens component is made of resin. The lens component may be made of material of high transmittance to ultraviolet rays.
    Type: Grant
    Filed: April 27, 1990
    Date of Patent: July 6, 1993
    Assignee: Asahi Kogaku Kogyo K.K.
    Inventors: Katsuhiko Nozaki, Tetsuya Abe