Abstract: A zoom lens comprises a first lens group G1, which includes a negative focal length, a second lens group G2, which includes a positive focal length, a third lens group G3, which includes a negative focal length, a fourth lens group G4, which includes a positive focal length, and a fifth lens group G5, which includes a positive focal length, in order from nearest to furthest from a photographic subject, or with a sixth lens group G6, which includes a negative focal length, installed as an anchored lens group between the fifth lens group and an image site of the camera apparatus.

Abstract: A lens for use with a light emitting source is provided. The lens has a main body with a light-collecting face and a light-emitting face and which defines an optical axis extending through the centers of these two faces. A pocket for receiving light from the light source is defined in the light-collecting face by an inner axially-facing surface surrounded by an inner radially-facing surface. The inner axially-facing surface is concave and has a spherical shape. The inner radially-facing surface has a non-spherical, tapered shape and extends between the axially-facing surface and an open end of the pocket. A light assembly incorporating the lens includes a light-emitting diode.

Abstract: A projection lens of a microlithographic projection exposure apparatus includes a final lens element and a terminating element having no overall refractive power that is positioned between, but spaced apart from, the final lens element and an image plane of the projection lens. The image plane is adjustably positioned such that a position of the image plane with respect to the final lens element is adjustable.

Abstract: A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

Abstract: An image forming optical system according to the present invention is characterized in that, in an image forming optical system having a positive lens group, a negative lens group, and an aperture stop, the positive lens group is disposed at an image-plane side of the aperture stop, the positive lens group has a cemented lens which is formed by cementing a plurality of lenses, in a rectangular coordinate system in which, a horizontal axis is let to be Nd and a vertical axis is let to be ?d, when a straight line indicated by Nd=?×?d+? (where, ?=?0.017) is set, Nd and ?d of at least one lens forming the cemented lens are included in both of areas namely, an area which is determined by a line when a lower limit value is in a range of a following conditional expression (1), and a line when an upper limit value is in a range of the following conditional expression (1), and in an area determined by following conditional expressions (2) and (3) 1.45<??2.15??(1) 1.30<Nd<2.

Abstract: Improved apparatus and methods for displays are disclosed that utilize light concentration array between mechanical light modulators and the viewing surface of the display. The light concentration array includes an array of optical elements that concentrate light on respective ones of the light modulators to maximize the contrast ratio and off axis viewing of the display.

Abstract: The image observation apparatus includes a first image-forming element and a second image-forming element each of which forms an original image, and an optical system configured to introduce light fluxes from the first and second image-forming elements to an exit pupil position of the optical system where an eye of an observer is placed. The optical system includes an optical surface as a single surface that reflects the light flux from the first image-forming element and transmits the light flux from the second image-forming element. The first image-forming element and the second image-forming element respectively form a first original image and a second original image that correspond to different viewing fields from the exit pupil position. The apparatus combines plural original images to enable observation of one combined image and that can suppress generation of light scattering.

Abstract: An illumination unit for emitting light along an optic axis for a projection system includes an LED die and a collimator lens. The collimator lens includes a central part and a peripheral part. The central part has a first light transmission surface and a second light transmission surface opposite to the first light transmission surface. The peripheral part which is around the central part has an inner refraction wall coupled to the first light transmission surface to form a hollow for situating the LED die, an outer reflection wall opposite to the inner refraction wall, and a refraction surface connecting to the second light transmission surface and the outer reflection wall. Both the central part and the peripheral part of the collimator lens are rotationally asymmetrical corresponding to the optic axis.

Abstract: A compact auto-focus image taking lens system with a Micromirror Array Lens and a lens-surfaced prism of the present invention comprises a lens-surfaced prism, an aperture stop, a first lens element, a second lens element, a Micromirror Array Lens, and an image surface, optionally an infrared cut-off filter. By introducing a Micromirror Array Lens and a lens-surfaced prism, the compact auto-focus image taking lens system with a Micromirror Array Lens and a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, fast focusing speed, low power consumption, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.

Abstract: A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.

Abstract: An optical lens, a light emitting device package using the optical lens and a backlight unit are disclosed, whereby light irradiated upward of a light emitting device is refracted from a bottom refraction surface to allow reaching a reflection surface, and an optical lens is mounted for reflecting the light sideways of the lens from the reflection surface to minimize an amount of light irradiated upward of the lens while increasing the amount of light irradiated toward the lateral surface of the lens, thereby limiting the generation of a hot spot to the maximum. The present invention dispenses with a hot spot baffle plate and a complicated assembly process to enable to reduce the number of parts and to decrease the thickness of a panel.

Abstract: A zoom lens is provided and includes: in order from the object side, a first lens group having a positive power and including in order from the object side, a negative lens, a reflecting member that bends an optical path by substantially 90°, and a positive lens having biconvex shape which has at least one aspherical surface; a second lens group having a negative power and including two lenses; a third lens group having a positive power; and a fourth lens group having a positive power and including in order from the object side, a cemented lens having a negative power and a positive lens having a meniscus shape which has at least one aspherical surface and a convex surface on the object side. The zoom lens is adapted to change a magnification thereof by moving the second lens group and forth lens group, and satisfies specific conditional equations.

Abstract: An image pickup apparatus having a wide angle zoom lens system includes a zoom lens system, and an image pickup element which is disposed at an image side of the zoom lens system. The zoom lens system includes in order from an object side thereof, a first lens unit G1 having a positive refracting power, a second lens unit G2 having a negative refracting power, a third lens unit G3 having a positive refracting power, a fourth lens unit G4 having a positive refracting power, and an aperture stop S which is disposed between the second lens unit G2 and the third lens unit G3. A zooming is carried out from a wide angle end to a telephoto end by fixing a position of the first lens unit, and changing a distance between the lens units by moving at least the second lens unit G2 and the third lens unit G3, and the following conditional expressions are satisfied. 33°<tan?1(IHw/fw)??(1) 3<f1g/fw<5??(2).

Abstract: A radiation distribution system designed to produce a batwing distribution. The system may be used with radiative sources emitting in the visible spectrum or in other spectra. The system comprises a specially shaped lens disposed over a radiative source, such as an LED, for example. The lens and source are arranged between two reflector bodies, both of which have an elongated reflective surface that faces the source. The reflector bodies each have two different reflective surfaces that face outward and away from each other. The lens and both reflective surfaces work in concert to redirect a portion of the emitted radiation to create the desired batwing distribution. Several sources may be arranged linearly between a single pair of reflector bodies on a common surface to create a linear array of sources. Likewise, multiple linear arrays may be combined to form a two-dimensional array.

Abstract: A projection image display device is disclosed in which a trapezoidal distortion and/or aberration are restrained when an image is enlarged and projected obliquely onto a screen. An image generator is connected to an optical system base in such a manner that at least an inclination thereof (on an axis parallel to X axis) with respect to a vertical line and a distance thereof in forward and backward direction (Z axis direction) can be adjusted by an adjusting mechanism. Further, a projecting lens 2 as a first optical system and a free-form curved surface mirror as a second optical system are fixed to the optical system base. The free-form curved surface mirror is rotatable (on an rotary axis parallel to X axis) with respect to the vertical line at a substantial center of the free-form curved surface mirror.

Abstract: A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.

Abstract: A zoom lens includes a focus unit, a zoom unit, an aperture stop, and an imaging unit having a splitting element that are arranged in that order from an object side to an image side. The splitting element includes an incident surface for a light beam, a half mirror surface for splitting the light beam into reflected light and transmitted light, a splitting exit surface from which the reflected light is emitted, and an exit surface from which the transmitted light is emitted. The incident surface and the exit surface are perpendicular to an optical axis of the zoom lens. The ratio of the distance from the aperture stop to the exit surface and the equivalent air length from the aperture stop to an image plane of the zoom lens and the ratio of the effective diameters of the exit surface and the splitting exit surface are set properly.

Abstract: A terrestrial imaging device includes an objective lens which accepts light within an intrinsic angular field of view onto a focal plane and two pairs of plane mirrors. The first pair of plane mirrors reflects a first light incoming ray sequentially to produce first and second reflected light rays within a roughly horizontal plane, the second reflected ray being focused by the objective lens on the focal plane. The second pair of plane mirrors reflects a second incoming ray sequentially to produce third and fourth reflected light rays within a roughly vertical plane, the fourth reflected light ray being focused by the objective lens on the focal plane.

Abstract: A fingerprint navigation system with a folded air lens structure and a folded air lens. The system includes a light source, a folded air lens structure, a light reflector, and a navigation sensor. The folded air lens structure is aligned to direct light from the light source to an object surface. The folded air lens structure includes a first portion and a second portion. The light reflector is aligned to direct the light from the first portion of the folded air lens structure to the second portion of the folded air lens structure. The navigation sensor is calibrated to produce a navigation image corresponding to the light directed through the folded air lens structure and the folded air lens.

Abstract: A dual focal length optical system includes a first optical system and a second optical system. The first optical system is positioned along an optical path and includes an optical structure having an object side surface and an image side surface. The first optical system also includes a first surface of an intermediate reflective element located between the object side surface and the image side surface of the optical structure as viewed along the optical path. The first optical system has a first focal length. The second optical system shares a portion of the same optical path and includes a second surface of the same intermediate reflective element as that of the first optical system. The second optical system has a second focal length. The first focal length of the first optical system is longer than the second focal length of the second optical system.

Abstract: An optical apparatus having an off-axis direction of view is disclosed. The optical apparatus advantageously has an outer dimension of less than about 2 mm. The optical apparatus can be utilized as a subsystem of an endoscopic device.

Abstract: A display comprises a backlight comprising a plurality of individually-controllable light emitters, a light modulator comprising a plurality of individually-controllable elements, and, a retro-reflective optical layer positioned between the backlight and the light modulator. The retro-reflective optical layer is configured to pass light incident thereon at an angle with respect to a normal to the retro-reflective optical layer of less than a threshold angle ?, and reflect light incident thereon at an angle with respect to a normal to the retro-reflective optical layer of greater than ? in a direction opposite and generally parallel to an incoming direction of incident light.

Abstract: An apparatus comprises a condenser for directing electromagnetic radiation to a focal point, the condenser comprising a first interface on a first side of a longitudinal axis for directing a first plurality of rays of the electromagnetic radiation to a focal point and a second interface on a second side of the longitudinal axis for directing a second plurality of rays of the electromagnetic radiation to the focal point, wherein the first and second interfaces are shaped such that at the focal point, the second plurality of rays are about 180° out of phase with respect to the first plurality of rays.

Abstract: A zoom lens includes a first lens group having a negative optical power and including a reflection optical element; a second lens group having a positive optical power; a third lens group having a negative optical power; a fourth lens group having a positive optical power; and, a fifth lens group. At least the second lens group and the fourth lens group move to the object side of the zoom lens for varying a power of the zoom lens from a wide-angle end to a telephoto end. The zoom lens further includes a diaphragm and the diaphragm moves to the object side for varying the power of the zoom lens from the wide-angle end to the telephoto end.

Abstract: Embodiments of this invention include a system, method and apparatus for transmitting like-colored illumination bundles along a common optical axis.

Abstract: The present invention relates to a variably focusing mirror for realizing an automatic focusing and optical zooming of a miniature camera module, the mirror comprising a driving part having a supporting board and more than one permanent magnet attached on the supporting board; and a mirror having a coil, a reflective surface of which a curvature is changed by the magnitude and the direction of a current flowing through the coil and a thin film on which the reflective surface is incorporated. The variably focusing mirror according to the present invention can realize a focusing and an optical zooming by adjusting a curvature radius of a reflective surface. Therefore, it can remarkably decrease the volume of a camera module and be used in various applications requiring for a miniature camera module.

Abstract: A projection objective for imaging a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective using ultraviolet radiation has a plurality of optical elements including transparent optical elements transparent for radiation at an operating wavelength ?, where 260 nm>?>150 nm, an image-side pupil surface arranged between the object surface and the image surface, and an aperture-defining lens group arranged between the image-side pupil surface and the image surface for converging radiation coming from the image-side pupil surface towards the image surface to define an image-side numerical aperture NA, where 0.7?NA?1.4. The aperture-defining lens group includes at least one high-index lens made from a transparent high-index material having a refractive index nHI, where nHI>nSIO2 and where nSIO2 is the refractive index of silicon dioxide (SiO2) at the operating wavelength.

Abstract: The lens embraces a bulk-shaped lens body identified by a top surface, a bottom surface and a contour surface, and a well-shaped concavity is implemented in the inside of the lens body, aligned from the bottom surface toward the top surface. The lens body has geometry such as bullet-shape or egg-shape. A ceiling surface of concavity implemented in the lens body serves as a first lens surface, the top surface of the lens body serves as the second lens surface, and inside of the concavity serves as a storing cavity of a light source or a photodetector.

Abstract: An optical system with an optical beam propagation extension, having an input and an output for the optical beam. The system includes at least two optical reflection elements for reflection of the beam, arranged to extend the propagation of the beam by reflection on the reflection elements, and at least one optical beam transmission element arranged to be traversed at least twice by the optical beam in different directions during propagation of the optical beam in the optical system. The optical transmission element ensures an optical transformation of the optical beam each time the optical beam passes through so as to correct the divergence thereof.

Abstract: A positional measurement system includes an electromagnetic wave source which emits an electromagnetic wave, a lens system which has a first lens surface, an electromagnetic wave shield section provided around a center axis of the first lens surface, and a second lens surface, and causes the electromagnetic wave having entered by way of the first lens surface exclusive of the electromagnetic wave shield section to exit from the second lens surface, to form an electromagnetic wave concentrated area at a position opposite the electromagnetic wave source, a receiving device which detects the electromagnetic wave concentrated area formed by the lens system, and a computing device which measures a position of the electromagnetic wave source based on information detected by the receiving device on the electromagnetic wave concentrated area.

Abstract: A thin lens consists of a first optical element which comprises a first refracting surface, wherein incoming light passes through the first refracting surface on a first optical axis. A reflecting surface changes a direction of the incoming light from the first optical axis to a second optical axis. Incoming light on the second optical axis passes through a second refracting surface. A second optical element comprises a first refracting surface, wherein incoming light passes through the first refracting surface on the second optical axis. A reflecting surface changes a direction of the incoming light from the second optical axis to a third optical axis. Incoming light on the third optical axis passes through a second refracting surface. The third optical axis is approximately parallel to, and in opposite direction from, the first optical axis.

Abstract: A fixed-focus lens including a first lens group, a second lens group and a third lens group which are arranged in sequence from an object side to an image side is provided. The first lens group has a negative refractive power and includes a first lens and a second lens arranged in sequence from the object side to the image side, and both having negative refractive powers. The first lens is an aspheric lens. The second lens group has a positive refractive power and includes a lens with positive refractive power. The third lens group has a positive refractive power and includes at least one first cemented lens. The fixed-focus lens satisfies 1.2<|fG1/f|<4.2 and 2.8<|fL2/f|<8.6, where f, fG1 and fL2 are effective focal lengths of the fixed-focus lens, the first lens group and the second lens respectively.

Abstract: An immersion optical system includes a liquid immerged optical element having an optical surface which is contactable with a liquid, a convex surface, and an optical axis. A side surface of the liquid immerged optical element is inclined with respect to the optical axis.

Abstract: The present invention is directed to off-axis catadioptric projection optical systems for use in lithography tools for processing modulated light used to form an image on a substrate, such as a semiconductor wafer or flat panel display. In one embodiment the optical system includes an off-axis mirror segment, a fold mirror, a relay, an aperture stop and a refractive lens group. Modulated light is transmitted through the system to form an image on a substrate. In a second embodiment the projection system includes an off-axis mirror segment, an aperture stop and a refractive lens group. In a third embodiment the projection system includes an off-axis mirror segment, a negative refractive lens group, a concave mirror, a relay, an aperture stop, and a refractive lens group. A method to produce a device using a lithographic apparatus including a projection system with an off-axis mirror segment as the first element in a projection optics system is also provided.

Abstract: A high intensity lighting apparatus (400) includes an outer housing (402); a curved support disk (414) having an array of diode or laser-based integrated light source (410) attached thereto disposed within the housing. Each of the light source (110) includes a tube (112) having a laser or diode chip (111) at one end of the tube. The tubes each have at least one concave shaped exit surface (113) on an end opposite the chip, wherein the concave exit surface converges light emitted from each of the light source to focal points within the housing (402). A shape of the curved support disk (414) converges the respective focal points into a light beam having a common focal plane (441). Adjustable secondary optics (431) are disposed in the housing after the focal plane (441) for creating various angles of transmission of the light beam. The laser can be a diode laser, while the diode can be a light-emitting diode (LED).

Abstract: A projection system includes a modulator and an Offner relay. The modulator is to modulate light in accordance with sub-frames of a frame of image data. The Offner relay is to differently aim, in accordance with each sub-frame, the light as modulated.

Abstract: A panoramic imaging device comprises: a lens array having a center lens for receiving light entering in a front range of at most 60° in a capture angle and left and right side lenses formed on the same plane as that with the center lens formed thereon and having optical axes parallel to that of the center lens for receiving lights entering in left and right ranges each of at most 60° in the capture angle; and prisms or mirrors placed on light entrance side of the lens array for guiding and reflecting lights entering in the left and right ranges, such that each light entering each side lens is directed along the optical axis of each side lens. Images formed by the center lens and the left and right side lenses are combined into a panoramic image with a picture angle of at least 120°.

Abstract: An image that has been displayed on the display screen of an image generator is first passed through a projection lens section consisting of a front group and a rear group. Next after being reflected on the reflecting surface of a free-form surface mirror, the image is further reflected by a planar reflecting mirror and then obliquely projected from the lower section of a projection screen onto the screen. The front group of the projection lens section is provided for enlarging the image. In order to correct aberration due to oblique projection onto the projection screen, the rear group uses a free-form surface lens that forms a concave shape with respect to the exit side of light from the lens. The free-form surface mirror corrects trapezoidal distortion due to oblique projection onto the projection screen.

Abstract: The disclosed embodiments relate to a system and method for medium wide-angle projection system. An exemplary embodiment of the present technique comprises an imaging system configured to create an image, a lens having a front surface and a back surface, the lens configured to receive an image on the back surface and produce a medium wide-angle representation of the image on the front surface, and an aperture stop positioned adjacent to the front surface of the lens to capture the medium wide-angle representation of the image from the lens.

Abstract: The display optical system includes first to third surfaces each having at least a reflection function, and a fourth surface having a reflection function and disposed outside an inside area surrounded by the first to third surfaces. The light from an original image passes through the inside area and is reflected by the fourth surface to return into the inside area. The light that has returned into the inside area is reflected by the first surface and is reflected by the second surface toward the first surface to impinge again thereon. The light impinging again on the first surface is re-reflected thereby such that a central-viewing-angle principal ray of the light proceeds in a direction opposite to a direction in which that principal ray has previously reflected by the first surface. The light re-reflected by the first surface is reflected by the third surface toward an exit pupil.

Abstract: An exposure apparatus is configured to expose a pattern of an original on a substrate by using light from a light source. The exposure apparatus includes an illumination optical system configured to illuminate the original by polarized light by using the light from the light source, and a correction unit configured to correct misalignment of the optical axis of the light from the light source and the optical axis of the illumination optical system. The correction unit includes a first lens and a deflecting member, the first lens can move in a direction perpendicular to an optical axis of the lens, and a deflecting direction of the light deflected by the deflecting member is variable.

Abstract: An image pickup optical system includes, in order from the object side, a front unit having at least one reflecting surface with power that is rotationally asymmetrical, an aperture stop, and a rear unit having at least one reflecting surface with power that is rotationally asymmetrical. In this case, F-numbers in two directions perpendicular to each other on a plane perpendicular to the optical axis are different. Decentration takes place in one of the two directions and the F-number in a direction perpendicular to a decentering direction is smaller than that in the decentering direction. When the F-number in the decentering direction is represented by FNY and the F-number in the direction perpendicular to the decentering direction is represented by FNX, the optical system satisfies the following condition: 1.1<FNY/FNX<2.0.

Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.

Abstract: A terrestrial imaging device includes an objective lens which accepts light within an intrinsic angular field of view onto a focal plane and two pairs of plane mirrors. The first pair of plane mirrors reflects a first light incoming ray sequentially to produce first and second reflected light rays within a roughly horizontal plane, the second reflected ray being focused by the objective lens on the focal plane. The second pair of plane mirrors reflects a second incoming ray sequentially to produce third and fourth reflected light rays within a roughly vertical plane, the fourth reflected light ray being focused by the objective lens on the focal plane.

Abstract: A laser diode/pre-scan assembly associated with a printhead for a laser printer is presented. The laser diode/pre-scan assembly includes a pair of collimation lenses that are de-centered from the axes of a pair of laser beams to direct the pair of beams inwardly in a process direction and into a single pre-scan lens. A corresponding method of constructing a laser diode/pre-scan assembly for a laser printer is also presented.

Abstract: A compact wide-angle imaging lens system includes, in order from the object side to the image side, a first lens (1) of negative refractive power, a free-form surface prism (2) of positive refractive power, a second lens (3) of positive refractive power and a third lens (7) of negative refractive power. The free-form surface prism has an incidence surface (S3), a reflection surface (S4) and an exit surface (S5). The first lens and the free-form surface prism are arranged in a juxtaposed manner, and the second and third lenses are disposed below the free-form surface prism and adjacent to the image side. The free-form surface prism functions equivalent to a right-angle prism with aspheric surfaces.

Abstract: An optical system includes a cylindrical side emitter lens, a reflector and a cylindrical Fresnel lens to produce a substantially uniformly illuminated exit plane with well collimated light in the forward direction. The cylindrical side emitter lens redirects light from a light source, such as a number of light emitting diodes placed in a straight line, into side emitted light along an optical axis that is parallel with the exit plane. The reflector may be a stepped multi-focal length reflector that includes multiple reflector surfaces with different focal lengths based on the surfaces distance to the light source and height to redirect light from the cylindrical side emitter lens to illuminate the exit plane and collimate the light along one axis in the forward direction. The cylindrical Fresnel lens is used to collimate the light along an orthogonal axis in the forward direction.

Abstract: A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.

Abstract: A catadioptric objective includes a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA with electromagnetic radiation from a wavelength band around a central wavelength ?. The optical elements include a concave mirror and a plurality of lenses. The projection objective forms an image of the pattern in a respective Petzval surface for each wavelength ? of a wavelength band, the Petzval surfaces deviating from each other for different wavelengths. In embodiments, a longitudinal departure p of the Petzval surface at a given wavelength from a planar reference surface at an edge field point of the image field (at maximum image height y?), measured parallel to the optical axis in the image surface region, varies with the wavelength ? according to dp/d?<(0.2?/NA2)/nm.

Abstract: A projection exposure system for microlithography includes an illuminating system (2), a reflective reticle (5) and reduction objectives (71, 72). In the reduction objective (71, 72), a first beam splitter cube (3) is provided which superposes the illuminating beam path (100) and the imaging beam path (200). In order to obtain an almost telecentric entry at the reticle, optical elements (71) are provided between beam splitter cube (3) and the reflective reticle (5). Advantageously, the reduction objective is a catadioptric objective having a beam splitter cube (3) whose fourth unused side can be used for coupling in light. The illuminating beam path (100) can also be coupled in with a non-parallel beam splitter plate. The illuminating beam path is refractively corrected in passthrough to compensate for aberrations via the special configuration of the rear side of the beam splitter plate.