Abstract: In a light scanning apparatus including an optical system including a beam deflection means therein and a one-dimensional light modulation device, the one-dimensional light modulation device is disposed on the object side of the optical system, and the beam deflection means is disposed at a diaphragm position. In the optical system, a positive-power former group and a positive-power latter group are arranged, and a one-dimensional image obtained through light modulation by the one-dimensional light modulation device is scanned by the beam deflection means, to thereby form a two-dimensional image on an image plane of the optical system. In application to a projector apparatus or the like, the two-dimensional image can be enlargedly projected by a projecting optical system.

Abstract: A device includes a light source; a first guiding unit that guides the light from the light source to an object at prescribed incident angles including a first incident angle and a second incident angle; a signal generating unit that receives light and that generates an image signal based on the received light; a second guiding unit that guides the light reflected from the object to the signal generating unit; and a control unit that controls the first guiding unit to guide the light from the light source to the object at least two different incident angles including the first incident angle and the second incident angle, and controls the signal generating unit to generate image signals for the at least two different incident angles.

Abstract: An illumination apparatus has first and second optical condenser systems sharing a common aperture. The first optical condenser system has a first solid-state light source having a first spectral band and a first curved surface spaced apart from the first solid-state light source and treated to reflect the first spectral band along a first optical path to exit at the common aperture and to pass light outside the first spectral band. The second optical condenser system has a second solid-state light source having a second spectral band and a second curved surface disposed behind the first curved surface with respect to the first and second light sources and treated to reflect the second spectral band along a second optical path to exit at the common aperture.

Abstract: A photon emitting device comprises a plurality of solid state radiation sources to generate radiation. The solid state radiation sources can be disposed in an array pattern. Optical concentrators, arranged in a corresponding array pattern, receive radiation from corresponding solid state radiation sources. The concentrated radiation is received by a plurality of optical waveguides, also arranged in a corresponding array pattern. Each optical waveguide includes a first end to receive the radiation and a second end to output the radiation. A support structure is provided to stabilize the plurality of optical waveguides between the first and second ends. The photon emitting device can provide a replacement for a discharge lamp device in various applications including road illumination, spot lighting, back lighting, image projection and radiation activated curing.

Abstract: The present invention relates to a high numerical aperture exposure system having a wafer. The exposure system in the present invention includes a beam-splitter, a reticle, a reticle optical group, where the reticle optical group is placed between the reticle and the beam-splitter, a concave mirror, a concave mirror optical group, where the concave mirror optical group is placed between the concave mirror and the beam-splitter, a fold mirror, where the fold mirror is placed between the beam-splitter and the wafer, and a wafer optical group, where the wafer optical group is placed between the beam-splitter and the wafer. In the present invention, a beam of light is directed through the reticle and the reticle optical group to the beam-splitter, then it is reflected by the beam-splitter onto the concave mirror. Concave mirror reflects the light onto the fold mirror through the beam-splitter. Fold mirror reflects the light onto the wafer through the wafer optical group.

Abstract: An optical device vibrator has a driving mechanism and a controller. The driving mechanism repeatedly changes position or angle of an optical device in predetermined cycles in order to vibrate the optical device. The controller controls driving of the driving mechanism and changes a setting for the position or angle serving as a reference for the repeated change based on predetermined correction information.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: A rectangular monobloc optical lens and a manufacturing method thereof are disclosed. A monobloc optical lens includes a rectangular surround and a central mirror-surface area. The rectangular surround is mounted inside a clipping part of a lens holder. The central mirror-surface area consists of a convex aspherical surface and a concave aspherical surface while the convex aspherical surface faces an image side and the concave aspherical surface faces an object side. The manufacturing method includes the steps of: cutting a sheet made from glass material into a plurality of rectangular sheet units; then setting the rectangular sheet unit into a mold for lens for hot pressing. Thereby, the manufacturing process is simplified and the cost is reduced. Moreover, the lens has high resolution and the volume of the lens is effectively reduced so as to increase the applications of the lens.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: A zoom lens system comprising a plurality of lens units each composed of at least one lens element, wherein an interval between at least any two lens units is changed so that an optical image is formed with a continuously variable magnification, the zoom lens system comprises a first lens unit having positive power, a second lens unit that includes a lens element having a reflecting surface and has negative power and subsequent lens units including at least one lens unit having positive power, and the condition: 0.50<(C?S)/H<1.00(C=?{square root over ( )}(2R·dR?dR2), S is a sag of the image side surface of the most object side lens element in the second lens unit at height H, H is one-half of an optical axial thickness of the lens element having a reflecting surface, R is a radius of curvature of the image side surface, and dR is an interval between the most object side lens element and the lens element having a reflecting surface) is satisfied.

Abstract: A light guide lens includes a lens body having a light incidence surface and a light emission surface, a plurality of refraction structures formed on the light incidence surface, and a plurality of reflection structures formed on the light emission surface. The refraction structures send incoming light rays to the light emission surface by refraction. Each of the refraction structures turns incoming light rays coming in all directions into refracted parallel light rays. The refracted parallel light rays arriving from the refraction structures reflect off the corresponding reflection structures and then laterally exit the lens body. The refracted parallel light rays arriving from each of the refraction structures travel to a corresponding one of the reflection structures, such that eventually the incoming light rays exit laterally. The present invention further provides a light emitting diode package structure having the light guide lens.

Abstract: The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the optical elements with a reflecting surface are preferred. It is the object of the invention to provide for a changeability of optical parameters, in particular of the focal width with small time constants, in an inexpensive manner and with a small required constructional volume. The micro-optical arrangement according to the invention comprises a plate-like optical element onto which electromagnetic radiation is directed on an optically effective surface. The optical element thereby is fixed or clamped at least at one outer edge point. The optical element is elastically deformed due to mass inertia as a result of a translatory movement at least approximately parallel to the optical axis between two reversal points (?z0, z0).

Abstract: An omni-directional camera array that is very small and unobtrusive and allows for higher pixel resolution for the face of meeting participants sitting or standing around a conference room table, as would be typical in a video conferencing situation. The camera system of the invention uses N cameras and an N sided mirror to capture images of the surrounding scene. The cameras are arranged to have a small distance between their virtual centers of projection. The images from the N cameras are stitched together to create a 360-degree panorama using a calibration surface. To stitch the images together in real-time, a static image stitcher is used, which stitches images together perfectly for objects on a calibration surface. The calibration surface is typically defined by the boundary of the table the camera is sitting on.

Abstract: The dilemma encountered in most projection systems of having the etendue of the LED-based light source used often being much larger than the etendue of the imager used, causes such systems to have poor throughput efficiency. The etendue folding illumination systems of this invention being comprised of at least one folded collimator/concentrator having coupled into its input aperture an LED-based light source and having an output aperture characteristics that match the target etendue, overcome this dilemma by folding the light source etendue to match the target etendue of the projection system imager while efficiently conserving the flux generated by the light source.

Abstract: An apparatus and method for receiving a Gaussian profile optical input signal and splitting the input signal into two or more homogenized, top-hat profile output beams. In one embodiment first and second hexagonally shaped homogenizer tubes are coupled perpendicularly to one another. A beam splitting element is disposed within the second tube. A Gaussian profile input optical signal is directed into an input end of the first tube and reflects off highly reflective interior surfaces of the first tube as it propagates therethrough and impinges the beam splitting element. As it is split into two or more subcomponents by the beam splitting element, it continues reflecting off of highly reflective interior surfaces of the second tube until each of the output beams reaches a respective output end of the second tube.

Abstract: A relay lens is provided in an illumination system for use in microlithography. The relay lens can be used to uniformly illuminate a field at a reticle by telecentric light beams with variable aperture size. The relay lens can include first, second, and third lens groups. At least one of the second and third lens groups can include a single lens. This can reduce costs and increase transmission by requiring less CaF2 because fewer optical elements are used compared to prior systems.

Abstract: The lens embraces a bulk-shaped lens body identified by a top surface, a bottom surface and a contour surface, and a well-shaped concavity is implemented in the inside of the lens body, aligned from the bottom surface toward the top surface. The lens body has geometry such as bullet-shape or egg-shape. A ceiling surface of concavity implemented in the lens body serves as a first lens surface, the top surface of the lens body serves as the second lens surface, and inside of the concavity serves as a storing cavity of a light source or a photodetector.

Abstract: A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.

Abstract: A composite optical lens is disclosed. The composite optical lens includes a concave bottom surface adapted to receive light, reflective surface adapted to reflect the received light, and optical surface through which the reflected light leaves the optical lens. The concave bottom surface defines a concave cavity allowing placement of at least a portion of a light emitting device within the concave cavity. The concave bottom surface, the optical surface, or both may have predetermined optical finish to operate on the light such as diffusing or focusing the light. The reflective surface can be coated, designed, or both for total internal reflection effect.

Abstract: A light receiving device 7 includes a sensor 10 for outputting a signal correlating to incident light on a detection surface 10a and a light receiving element 8 disposed in confrontation with the detection surface and capable of transmitting light. The light receiving element has a recessed portion 22 on the opposite surface of the surface confronting the detection surface. A wall surface 24 of the recessed portion reflects the light beam L2 from a lateral direction of the detection surface toward the detection surface 10a.

Abstract: A labor of disconnecting many cables is omitted even when carrying a file basestation with an external storage loaded together with a main body. An information processing unit comprises: a main body having a CPU, a keyboard and a display unit; a file basestation with an external storage, such as an FD•D or a CD ROM•D, loaded; and a portreplicator with many connectors loaded. Removal of the main body alone from the portreplicator can omit the labor of disconnecting many cables connected to the portreplicator.

Abstract: An optical system includes a refractive lens system and a micromirror array lens with angled positioning to improve light efficiency. The micromirror array lens is optically coupled to the refractive lens system, and has a focal length gradient. The micromirror array lens is configured to focus the light input refracted by the micromirror array lens onto a focal plane, the micromiror array lens is positioned at an acute angle with respect to the light input and the focal plane. The optical system may further include an infrared filter and/or an optical stop to block unwanted light. The advantages of the present invention include improved light efficiency, image quality, and/or focusing.

Abstract: A dual viewpoint solid catadioptric lens has a first spherical refractive surface S1 having a center C1 located on an optical axis of the lens and having a radius r1, and a second spherical refractive surface S2 having a center C2 located on the optical axis of the lens and having a radius r2<r1. The lens also has a first ellipsoidal reflective surface E1 with foci F1 and F1? on the optical axis of the lens, and a second ellipsoidal partially reflective surface E2 having foci F2 and F2? on the optical axis of the lens. Focus F1 coincides with C1, focus F2 conincides with C2, and focus F1? coincides with F2?. The points C1 and C2 provide dual viewpoints for the lens, which may be used in a variety of imaging applications.

Abstract: An optical beam splitter (1) for a light beam (2) that is parallel along a beam axis (A) has a transparent central area (3) and a plurality of reflecting reflector surfaces (4a, 4b) that are respectively inclined by a reflector angle (?) relative to the beam axis (A) for generating each a discrete spot beam (5a, 5b), with the central area (3) being convexly curved in the manner of a prism at least in part and/or has beam-expanding diffractive optics (19).

Abstract: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.

Abstract: The invention relates to a panoramic attachment optical system and a panoramic optical system for taking an image having a full 360°-direction angle of view or projecting an image at a full 360°-direction angle of view. These optical systems are reduced in size and flare light and improved in resolving power. A panoramic attachment optical system 10 attached to the entrance side of an image-formation lens 20 to form a full 360°-direction image on an image plane 30 comprises a transparent medium that is rotationally symmetric about a center axis 1 and includes at least two internal reflecting surfaces 12, 13 and at least two refracting surfaces 11, 14. A light beam enters the transparent medium via the refracting surface 11, and reflects at the internal reflecting surfaces 12 and 13 in this order to leave the transparent medium via the refracting surface 14, forming an image at a position of the image plane 30 off the center axis 1 via an image-formation lens 20.

Abstract: An objective, in particular a projection objective for a microlithography projection-exposure installation, with at least one fluoride crystal lens is disclosed. A reduction in the detrimental influence of birefringence is achieved if this lens is a (100)-lens with a lens axis which is approximately perpendicular to the {100} crystallographic planes or to the crystallographic planes equivalent thereto of the fluoride crystal. A further reduction in the detrimental influence of birefringence is obtained by covering an optical element with a compensation coating.

Abstract: A catadioptric projection optical system includes a first optical system, for receiving light from an object, a second optical system, for forming an image of the object on an image plane, and a third optical system disposed optically between the first optical system and the second optical system. The first, second and third optical systems have a common straight optical axis. The image of the object is projected onto the image plane through a plurality of real intermediate image formations, and a pupil plane of the catadioptric projection optical system is free of a void area.

Abstract: An image display device comprises an optical imaging arrangement for providing image information to illumination light and for transmitting the light as an optical image signal; a display for receiving the optical image signal and for displaying an image based on the image information; and a projecting optical arrangement including a reflecting part having a reflecting surface for reflecting the optical image signal, and a refracting optical part having a refracting surface for projecting the optical image signal onto the reflecting part. At least one of the reflecting surface and the refracting surface is aspherical.

Abstract: A zoom lens is disclosed having a zoom ratio larger than four with a field of view at the short focal length position larger than 85 degrees and with a minimal number of moving groups. The zoom lens utilizes a compound zoom structure comprising an NP or NPP zoom kernel followed by a P or PP zoom relay, with only two or three moving groups that can be used for both zooming, focusing and athermalization. An overall compact package size is achieved by the use of prisms to fold the optical path in strategic locations. An optional variable power liquid cell can provide close focusing with little or no focus breathing.

Abstract: A plurality of lens units in an optical unit has at least: from the object side toward the image side, a first lens unit having a positive optical power, a second lens unit having a negative optical power, a third lens unit having a positive optical power, and a fourth lens unit having a positive optical power. When at least the first lens unit moves from the image side to the object side in zooming from the wide-angle end position to the telephoto end position, at least one gap between the lens units varies. Predetermined conditional formulae are satisfied.

Abstract: An optically retro-reflecting sphere includes an inner sphere and an outer concentric spherical shell, and can be coupled to a reflective surface. Light entering the optically retro-reflecting sphere from an incident direction is reflected by the sphere generally towards an exit direction, where the exit direction is parallel and opposite to the incident direction. The inner sphere and outer shell have different refractive indices, selected so that the reflected light is reflected with a non-uniform angular distribution about the exit direction.

Abstract: A zoom lens includes a most object-side lens unit remaining fixed on the optical axis when the magnification of the zoom lens is changed and a focusing operation is performed; a most image-side lens unit remaining fixed when the focusing operation is performed; and a plurality of moving lens units lying between the most object-side lens unit and the most image-side lens unit, moved along the optical axis when the magnification is changed. The most object-side lens unit includes, in order from the object side, a negative lens component, a reflective optical component having a reflecting surface for bending the optical path, and a positive lens component. The most image-side lens unit has at least one aspherical surface. An electronic imaging device includes an electronic image sensor located on the image side of the zoom lens.

Abstract: This invention discloses a reflective illumination system for supplying an optical radiation beam along a folded path for illuminating a planar object. The system includes a radiation source, and two facing parabolic dish-shaped arrays of parabolic or dished reflectors. Divergent light received from the light source incident on a first of the arrays is reflected as a larger collimated beam comprising plural separated sub-beams. Each of the reflectors or facets from the first array directs one of the sub-beams to a facet on the second array. The second array reflects the light it receives with a substantially uniform intensity onto a rectangular target location.

Abstract: Provided is a compact optical element that secures an optical path length and improves manufacturing precision economically. The optical element includes a transparent member having a first and second refracting surface, and reflecting surfaces. Light entering the transparent member from the first refracting surface is reflected by the reflecting surfaces to the second refracting surface. An optical path from the first to second refracting surface crosses itself inside the transparent member seen from a direction perpendicular to light entering the first refracting surface and exiting the second refracting surface. The transparent member guides the incident light from the first to the second refracting surface while reflecting the light alternately by at least one first and one second reflecting surface is in a first and second region respectively. The first and second regions and, respectively, are on opposite sides of a plane passing through the transparent member taken as a boundary.

Abstract: A catadioptric projection objective which images a pattern arranged in an object plane of the projection objective into the image plane of the projection objective while generating a real intermediate image has a catadioptric objective part having at least one concave mirror and a beam deflecting device and also a dioptric objective part. The imaging system has a system diaphragm having a variable diaphragm diameter for variably limiting the cross section of the radiation passing through the projection objective. This system diaphragm is arranged in the catadioptric objective part, preferably in direct proximity to the concave mirror. The invention enables a projection objective with a simple construction.

Abstract: Systems configured to provide illumination of a specimen during inspection are provided. One system includes catoptric elements configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The catoptric elements include positive and negative elements configured such that pupil distortions of the positive and negative elements are substantially canceled. Another system includes a dioptric element and a catoptric element. The dioptric element and the catoptric element are configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The dioptric and catoptric elements are also configured such that pupil distortions of the dioptric and catoptric elements are substantially canceled.

Abstract: A zoom optical system according to the present invention is provided with, in order from an object side thereof: a first lens group having a negative refractive power; a second lens group having a positive refractive power; a third lens group having a negative refractive power; and a fourth lens group having a positive refractive power. The zoom optical system moves at least the second lens group and the third lens group for zooming operation from a wide-angle end to a telephoto end. The zoom optical system moves the third lens group for a focusing operation. The first lens group is provided with, in order from the object side of the zoom optical system, a meniscus lens having a negative refractive power whose concave surface faces an image side of the zoom optical system, a reflective optical element, and at least one lens.

Abstract: According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.

Abstract: A variable-magnification optical system has a plurality of lens groups that image a light beam from the object side on an image sensor, an optical aperture stop that intercepts part of the light beam heading for the image sensor, and a reflective mirror that changes the optical axis of the light beam of which part has been intercepted by the optical aperture stop. The plurality of lens groups include at least lens groups arranged in a positive-negative-positive-positive optical power arrangement, and at least two of the lens groups are moved for zooming from the wide-angle end to the telephoto end. The variable-magnification optical system fulfills a prescribed conditional formula.

Abstract: The present embodiments provide for apparatuses, and methods for manufacturing apparatuses to convert a first distribution of an input radiation to a second distribution of output radiation. The apparatus can be defined in some embodiments by generating a two-dimensional representation of three active optical surfaces including calculating a segment of first, entry and second surfaces based on first second, and third generalized Cartesian ovals, respectively, and successively repeating the calculating of the segments of the first and second surfaces, and rotationally sweeping the two-dimensional representation about a central axis providing a three-dimensional representation. In some embodiments, portion of the first and/or second surfaces can be totally internally reflective.

Abstract: A viewfinder of a small size and a small thickness is implemented to achieve a miniaturization and reduction in thickness of an image pickup apparatus. The viewfinder includes an eyepiece system for expanding an image displayed on an image display element so as to be visually observed. The eyepiece includes a first single lens disposed adjacent to the image display element and having a negative refractive power and a second single lens disposed remotely from the image display element and having a positive refractive power. A reflecting member is disposed between the first single lens and the second single lens for diverting an optical axis to a predetermined direction.

Abstract: A 1× projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.

Abstract: The invention relates to a zoom lens that has high optical performance specifications such as high zoom ratios, wide angles of view, reduced F-numbers and limited aberrations, and enables an optical path to be easily bent. The zoom lens comprises a moving lens group B(G2) that has positive refracting power and moves only toward the object side upon zooming from the wide-angle end to the telephoto end, and a lens group A(G1) remaining fixed during zooming, which is located on the object side of the zoom lens with respect to the moving lens group B and has negative refracting power. The moving lens group B is composed of, in order from its object side, a positive lens element, a positive lens element and a negative lens element, three lens elements in all.

Abstract: A reflector for a light source, such as an LED, is provided with a shape which efficiently collects and directs energy to an illumined surface whereby almost 100% of the light is collected and distributed into a designer composite beam. The shape in one embodiment is comprised of three zones beginning with a parabolic surface of revolution at the base of the reflector, followed by a transition or straight conic zone and ending with an elliptical zone. In another embodiment the reflector shape is determined according to a transfer function which allows for arbitrary designer control of the reflected rays at each point on the reflector, which when combined with direct radiation from the source, results in a designer controlled composite beam or illumination. The device is more than 90% energy efficient and allows replacement of higher power, less energy efficient light sources with no loss in illumination intensity.

Abstract: A light mixing apparatus and method for mixing two Gaussian profile input light beams of different frequencies to form a third, homogenized output light beam having a top hat profile. The apparatus includes a first homogenizer tube having interfaced to it a second homogenizer tube. The second homogenizer tube includes an outer tubular portion which receives inside of it a tubular subassembly having an optical element at one end. The optical element is positioned to reside within the first homogenizer tube at a 45° angle relative to a longitudinal axis of the first homogenizer tube. The optical element is transmissive on one surface and on the opposite surface includes a reflective surface for reflecting light traveling through the second homogenizer tube along the longitudinal axis of the first homogenizer tube. The apparatus forms a robust yet efficient means for mixing Gaussian profile light beams of different wavelengths to produce an output light beam having a top hat profile and a desired color.

Abstract: An imaging device includes a convex mirror for reflecting first incident light representing an object, the convex mirror having a shape of solid of revolution; an imaging mechanism for taking a reflected image represented by light reflected in the convex mirror; and an optical member for guiding the first incident light toward the convex mirror and guiding the reflected light toward the imaging mechanism, the optical member having an attenuation section for attenuating second incident light which is incident on an outer circumferential surface of the optical member in an opposite direction to the first incident light, passes through the optical member, is reflected by an inner circumferential surface of the optical member so as to be directed toward the convex rotational mirror, and is superimposed on the first incident light.

Abstract: A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.

Abstract: The invention relates to a superwide-angle lens optical system having a long back-focus lens arrangement and comprising a relay lens group. The optical system is constructed of, in order from an object side thereof, an objective lens group Ob having positive refracting power, a primary image-formation plane formed by the objective lens group Ob and a relay lens group R1 having positive refracting power. A field stop FS is positioned at or near the primary image-formation plane, and condition (1-1) is satisfied. h/fo>1.8??(1-1) Here fo is the focal length of the objective lens group Ob, and h is the diameter of an image circle on the primary image-formation plane.

Abstract: A catadioptric projection lens for imaging a pattern arranged in an object plane onto an image plane, preferably while creating a real intermediate image, including a catadioptric first lens section having a concave mirror and a physical beamsplitter having a beamsplitting surface, as well as a second lens section that is preferably refractive and follows the beamsplitter, between its object plane and image plane. Positive refractive power is arranged in an optical near-field of the object plane, which is arranged at a working distance from the first optical surface of the projection lens. The beamsplitter lies in the vicinity of low marginal-ray heights, which allows configuring projection lenses that are fully corrected for longitudinal chromatic aberration, while employing small quantities of materials, particularly those materials needed for fabricating their beamsplitters.