With Concave And Convex Mirrors In Series Patents (Class 359/859)
  • Patent number: 10660704
    Abstract: An optical surgical probe includes a handpiece, a light guide within the handpiece, and a multi-spot generator at a distal end of the handpiece. The handpiece is configured to optically couple to a light source. The light guide is configured to carry a light beam from the light source to a distal end of the handpiece. The multi-spot generator includes a faceted optical element with a faceted end surface spaced from a distal end of the light guide. The faceted end surface includes at least one facet oblique to a path of the light beam.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: May 26, 2020
    Assignee: Alcon Inc.
    Inventor: Ronald T. Smith
  • Patent number: 10578846
    Abstract: The present invention provides a projection optical system including a first concave reflecting surface, a first convex reflecting surface, a second concave reflecting surface, and a third concave reflecting surface, wherein the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, and the third concave reflecting surface are arranged such that light from an object plane forms an image on an image plane by being reflected by the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, the first convex reflecting surface, and the third concave reflecting surface in an order named.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: March 3, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Michio Kono, Kiyoshi Fukami, Ryosuke Fukuoka
  • Patent number: 10488637
    Abstract: A reflective afocal switching assembly permits variable fields of view while at the same time providing a common axis and mechanism to achieve an optical de-roll of the image. This complex arrangement provides a relatively large change in magnification for an all-reflective optical system than can image over 0.4-12.0 micron spectrum.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: November 26, 2019
    Assignee: UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
    Inventor: John M. Hall
  • Patent number: 10480748
    Abstract: A lens includes a base body having a light incidence face through which light can enter the base body and a light exit face, through which light which has entered the base body can emerge, the light exit face includes a microlens structure having a plurality of microlenses, the light incidence face has at least two collimator segments that collimate light and a light entry region formed differently from the collimator segments, the base body has at least two back-reflection regions respectively assigned to one of the two collimator segments, to reflect back light collimated by a corresponding collimator segment, in a direction of the corresponding collimator segment, and the base body is a reflection region to reflect light that has entered through the light incidence region in the direction of the microlens structure so that the reflected light can emerge from the base body through the microlens structure.
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: November 19, 2019
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventor: Ulrich Streppel
  • Patent number: 10476224
    Abstract: An optical apparatus comprises an optical resonator defining an optical resonator path for an optical resonator beam and an optical beam expander optically coupled to the optical resonator, the optical beam expander defining an optical beam expander path for an optical beam expander beam. The optical resonator path and the optical beam expander path may be configured such that the optical resonator beam and the optical beam expander beam at least partially intersect. Such an optical apparatus may be configured for use as a laser target designator or a laser range finder.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: November 12, 2019
    Assignee: THALES HOLDINGS UK PLC
    Inventors: Andrew Borthwick, Stephen Lee
  • Patent number: 10327318
    Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: June 18, 2019
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Martin Lambert, Tolga Ergin, Thomas Schwarzbaeck
  • Patent number: 10133043
    Abstract: A compact, on-axis telephoto lens camera includes an arrangement of mirrors which receives incident light, and compresses and redirects the light, the arrangement having a primary mirror which receives the incident light, compresses and redirects the light toward a focal point of the primary mirror and has an opening defined at a central portion thereof, and a secondary mirror which receives light from the primary mirror and further redirects same. The camera also includes a cavity which extends into the camera from the opening of the primary mirror, aspheric lenses disposed at least partially within the cavity which receive the light from the multiple-mirror arrangement, and progressively expand and redirect the light received from the mirror arrangement, and an image sensor which receives the light from the aspheric lenses. The image sensor is disposed closely adjacent to the cavity such that a back focal length is substantially zero.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: November 20, 2018
    Assignee: Telelens LLC.
    Inventor: Weimin Lu
  • Patent number: 9872001
    Abstract: A projector includes a first cooling object and a second cooling object, a first circulatory cooling device having a first closed housing, and adapted to circulate a first cooling gas in the first closed housing to cool the first cooling object disposed in the first closed housing, and a second circulatory cooling device having a second closed housing, and adapted to circulate a second cooling gas in the second closed housing to cool the second cooling object disposed in the second closed housing, the first cooling object is an image forming section including a light modulation device adapted to modulate light entering the light modulation device to form an image, and the second cooling object is a first optical component included in an optical component making a contribution to the formation of the image by the light modulation device.
    Type: Grant
    Filed: April 7, 2016
    Date of Patent: January 16, 2018
    Assignee: Seiko Epson Corporation
    Inventor: Nobuyuki Ishii
  • Patent number: 9775226
    Abstract: A system for forming a light-sustained plasma capable of emitting vacuum ultraviolet light includes an illumination source configured to generate illumination, a plasma cell including a transmission element having one or more openings, one or more flanges disposed at the openings of the transmission element and configured to enclose the internal volume of the transmission element in order to contain a volume of gas within the plasma cell. The system further includes a collector element arranged to focus the illumination from the illumination source into the volume of gas to generate a plasma within the volume of gas contained within the plasma cell. Further, the plasma emits broadband radiation including at least vacuum ultraviolet radiation. In addition, the transmission element of the plasma cell is transparent to the illumination generated by the illumination source and at least the vacuum ultraviolet radiation emitted by the plasma.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: September 26, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Patent number: 9664898
    Abstract: Laser device comprising at least two gas laser units (10), stacked in layers, each laser unit comprising a plurality of resonator tubes (12), the resonator tubes being in fluidic communication with each other and forming a common tubular space, connecting elements (20, 21) for connecting adjacent resonator tubes so as to form a loop, mirrors (22) arranged in the connecting elements for reflecting the laser light between the resonator tubes, a rear mirror (44) and a partially reflecting output coupler (42) for coupling out a laser beam. In each laser unit an integrated output flange (40) comprises the rear mirror, the partially reflecting output coupler and an output mirror (46) which deflects the laser beam passing through the output coupler to a scanning device (80) located in the central space (8) surrounded by the resonator tubes. The invention also relates to a method for marking an object.
    Type: Grant
    Filed: July 19, 2012
    Date of Patent: May 30, 2017
    Assignee: ALLTEC ANGEWANDTE LASERLICHT TECHNOLOGIE GMBH
    Inventors: Kevin L. Armbruster, Brad D. Gilmartin, Peter J. Kueckendahl, Bernard J. Richard, Daniel J. Ryan
  • Patent number: 9576785
    Abstract: An ignition facilitated electrodeless sealed high intensity illumination device is disclosed. The device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber has an ingress window disposed within a wall of a chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, and a high intensity light egress window configured to emit high intensity light from the chamber. A path of the CW laser beam from the laser light source through the ingress window to a focal region within the chamber is direct. The ingress window is configured to focus the laser beam to within a predetermined volume, and the plasma is configured to be ignited by the CW laser beam, optionally by heating of a non-electrode ignition agent located entirely within the chamber.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: February 21, 2017
    Assignee: Excelitas Technologies Corp.
    Inventor: Rudi Blondia
  • Patent number: 9568717
    Abstract: An off-axis three-mirror optical system with freeform surfaces includes a primary mirror, a secondary mirror, a tertiary mirror, and an image sensor. The primary mirror receives light rays first and the secondary mirror is located on a path of light reflected from the primary mirror. The tertiary mirror receives light reflected from the secondary mirror. The image sensor is located on a path of light reflected from the tertiary mirror. Each reflecting surface of the primary and tertiary mirrors is a sixth order xy polynomial freeform surface. The secondary mirror reflecting surface is a spherical surface. A field of view of the off-axis three-mirror optical system with freeform surfaces in Y-axis direction is greater or equal to 65°. A field of view of the off-axis three-mirror optical system with freeform surfaces in X-axis direction is greater or equal to 0.8°.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: February 14, 2017
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Wei Hou, Jun Zhu, Guo-Fan Jin, Shou-Shan Fan
  • Patent number: 9465300
    Abstract: In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength ? from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about ? or more at one or more locations of the rotationally-asymmetric surface.
    Type: Grant
    Filed: April 3, 2012
    Date of Patent: October 11, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Hans-Juergen Mann, Wilhelm Ulrich, Marco Pretorius
  • Patent number: 9296161
    Abstract: The invention relates to a method for producing an optical assembly, comprising at least two optical functional surfaces arranged in a fixed positional relationship to one another on a common supporting structure, wherein by means of a processing machine, in various process steps, at least two optical functional surfaces and at least one reference structure having a defined and measurable relative position to the optical functional surfaces are produced. The supporting structure remains rigidly connected to the processing machine until said process steps have been completed, and wherein the optical functional surfaces are then measured relative to the at least one reference structure, and any deviation from a target shape and target position is determined, after which said process steps are repeated at least once with modified actuation of the processing machine. The invention further relates to an optical device comprising an optical assembly produced in this way and to a unit for carrying out such a method.
    Type: Grant
    Filed: September 13, 2010
    Date of Patent: March 29, 2016
    Assignees: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Friedrich-Schiller-Universität Jena
    Inventors: Sebastian Scheiding, Stefan Risse, Andreas Gebhardt, Christoph Damm, Thomas Peschel, Ralf Steinkopf
  • Patent number: 9282325
    Abstract: Apparatus for evaluating optical components and systems that uses a precision compact mirror support structure to present to an optical system or electro-optical system (e.g., a camera) multiple images of at least one optical evaluation target over a wide field to allow assessment of the performance or alignment of the optical or electro-optical system over its intended field of use. The mirror support structure generates multiple images of an optical evaluation target by providing multiple folded optical paths between the target and the desired field locations of the test optic. The mirrors employed may either be parallel or at angles with respect to one another.
    Type: Grant
    Filed: July 24, 2014
    Date of Patent: March 8, 2016
    Assignee: Optikos Corporation
    Inventors: Stephen D Fantone, Daniel Orband, David Paul Biss
  • Patent number: 9268122
    Abstract: An off-axial three-mirror optical system with freeform surfaces includes a primary mirror, a secondary mirror, a tertiary mirror, and an image sensor. The primary mirror is located on an incident light path. The secondary mirror is located on a primary mirror reflecting light path. The tertiary mirror is located on a secondary mirror reflecting light path. The image sensor is located on a tertiary mirror reflecting light path. The primary mirror, the secondary mirror, and the tertiary mirror are all xy polynomial surfaces up to the sixth order. The off-axial three-mirror optical system with freeform surfaces can achieve push-broom image with small F-number and large field angles.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: February 23, 2016
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Jun Zhu, Tong Yang, Guo-Fan Jin, Shou-Shan Fan
  • Patent number: 9268123
    Abstract: An off-axial three-mirror optical system with freeform surfaces includes a primary mirror, a secondary mirror, a tertiary mirror, and a detector. The primary mirror is located on an incident light path. The secondary mirror is located on a primary mirror reflecting light path. The tertiary mirror is located on a secondary mirror reflecting light path. The detector is located on a tertiary mirror reflecting light path. Each of the primary mirror, the secondary mirror, and the tertiary mirror is an xy polynomial freeform surface up to the fifth order.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: February 23, 2016
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Jun Zhu, Tong Yang, Guo-Fan Jin, Shou-Shan Fan
  • Patent number: 9244361
    Abstract: An imaging optical system for EUV projection lithography has a plurality of mirrors for imaging an object field in an object plane into an image field in an image plane. An image-side numerical aperture of the imaging optical system is at least 0.3. The imaging optical system has a pupil obscuration which is greater than 0.40 and an image filed size of at least 1 mm×10 mm. The imaging optical system can provide high quality imaging of the object.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: January 26, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ralf Mueller, Hans-Juergen Mann
  • Patent number: 9202732
    Abstract: The substrate detection apparatus includes: a collimating reflector located on one side of substrates; an illumination unit configured to radiate light in a planar state toward the collimating reflector such that edge portions of the substrates are located in an optical path of the light; an image acquiring unit configured to acquire a passing light image including the edge portions formed on the collimating reflector with the light radiated in the planar state from the illumination unit; and an image processing unit configured to process the passing light image obtained by the image acquiring unit, thereby detecting the conditions of the substrates.
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: December 1, 2015
    Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
    Inventors: Masayuki Enomoto, Masao Takatori, Yohichi Nakamura
  • Patent number: 9146472
    Abstract: The invention relates to a microlithography projection lens for wavelengths <=248 nm <=, preferably <=193 mm, in particular EUV lithography for wavelengths ranging from 1-30 nm for imaging an object field in an object plane onto an image field in an image plane, the microlithography projection lens developed in such a manner that provision is made for an accessible diaphragm plane, into which for instance an iris diaphragm can be introduced.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: September 29, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 9104026
    Abstract: The present invention relates to an optical imaging device, in particular for microscopy, with a first optical element group and a second optical element group, wherein the first optical element group and the second optical element group, on an image plane, form an image of an object point of an object plane. The first optical element group includes a first optical element with a reflective first optical surface and a second optical element with a reflective second optical surface. The second optical element group includes a third optical element with a reflective third optical surface. The first optical element and the second optical element are formed and arranged such that on formation of the image of the object point, in each case a multiple reflection of at least one imaging beam takes place on the first optical surface and the second optical surface.
    Type: Grant
    Filed: September 28, 2009
    Date of Patent: August 11, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Alexander Epple, Ella Mizkewicz, Heiko Feldmann
  • Patent number: 9016881
    Abstract: Beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (“EUV”) radiation are disclosed. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (?), e.g., the convergence or divergence angle, of the laser beam. Methods for adjusting an opening angle (?) of a laser beam using such beam guides are also disclosed.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: April 28, 2015
    Assignee: TRUMPF Laser-und Systemtechnik GmbH
    Inventor: Martin Lambert
  • Patent number: 8967817
    Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: March 3, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 8965193
    Abstract: Systems and methods are provided for a solid filled mirrored lens system capable of wider fields of view and wider spectra than current lens systems. The mirrored lens is used to focus light incident upon a right circular cylindrical central body comprising a substantially planar first surface and a substantially planar second surface. A primary reflecting surface is located on the second surface of the central body and shaped as an annulus with a void in the central region of the second surface. Further, a secondary reflecting surface is located in a central region of the first surface facing the primary reflecting surface.
    Type: Grant
    Filed: November 11, 2013
    Date of Patent: February 24, 2015
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Christopher B. Svec, Alan R. Greenland, Hao C. Tran
  • Publication number: 20150009567
    Abstract: The disclosure generally relates to concentrating daylight collectors and in particular to concentrating daylight collectors useful for interior lighting of a building. The concentrating daylight collectors generally include a cassegrain-type concentrator section that provides for a full-tracking solar collector with one moving part and with a high efficiency of coupling of collected solar irradiation to a stationary duct. In some cases, the disclosed concentrating daylight collectors can be used more conventionally, such as for directing sunlight onto a photo-voltaic cell for generation of electrical power, or an absorbing surface for extraction of thermal energy.
    Type: Application
    Filed: January 18, 2013
    Publication date: January 8, 2015
    Inventors: David G. Freier, Timothy L. Quinn, Thomas R. Corrigan, Byron E. Trotter
  • Publication number: 20140355146
    Abstract: A device and method for providing a laser system utilizing high efficiency lasers emitters and optionally the high quality beam characteristics of a crystal gain medium single mode laser for emitting beamlets and utilizing an optical and mechanical method of forming the beam and directing it to the desired target using both a concave and a partially reflective convex mirror to reflect the beamlets, with the convex mirror transmitting a portion of the beamlets to a transmission medium for emitting the beamlets as a laser beam.
    Type: Application
    Filed: May 13, 2013
    Publication date: December 4, 2014
    Inventor: Martin A. Stuart
  • Patent number: 8873122
    Abstract: An imaging optical system includes a plurality of mirrors configured to image an object field in an object plane of the imaging optical system into an image field in an image plane of the imaging optical system. An illumination system includes such an imaging optical system. The transmission losses of the illumination system are relatively low.
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: October 28, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Hans-Juergen Mann, Armin Schoeppach, Johannes Zellner
  • Patent number: 8837041
    Abstract: A magnifying imaging optical system is disclosed that has precisely three mirrors, which image an object field in an object plane into an image field in an image plane. A ratio between a transverse dimension of the image field and a transverse dimension measured in the same direction of a useful face of the last mirror before the image field is greater than 3. In a further aspect, the magnifying imaging optical system is disclosed that has at least three mirrors, which image an object field in an object plane in an image field in an image plane. A first mirror in the beam path after the object field is concave, a second mirror is also concave and a third mirror is convex. An angle of incidence of imaging beams on the last mirror before the image field is less than 15°.
    Type: Grant
    Filed: November 22, 2011
    Date of Patent: September 16, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Hans-Juergen Mann, Heiko Feldmann
  • Patent number: 8810891
    Abstract: The present disclosure relates to a deformable mirror including a deformable membrane with a reflecting face and an opposite face, a stiff plate and a structure of at least one actuator at least a part of which is fixed to the stiff plate and able to locally deform the membrane, wherein the deformable mirror also includes a not necessarily uniform adhesive layer against the opposite surface of the membrane, and a structure of at least one flexible coupling including a mechanical connection and upper and lower linking means coupling respectively the upper and lower ends of the mechanical connection to the adhesive layer and to the stiff plate. The disclosure also relates to a tool and a method making it possible to produce such a mirror.
    Type: Grant
    Filed: October 31, 2008
    Date of Patent: August 19, 2014
    Assignee: UJF-Filiale
    Inventors: Frédéric Rooms, Sébastien Camet, Jean-François Curis
  • Patent number: 8810903
    Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: August 19, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 8801202
    Abstract: A coude gimbal structure includes a two-axis gimbal system having an outer gimbal pivotable about a first rotational axis, and an inner gimbal supported on the outer gimbal and pivotable about a second rotational axis which intersects the first rotational axis at an intersection point. A folded afocal three-mirror anastigmat has a positive-optical-power primary mirror, a negative-optical-power secondary mirror, and a positive-optical-power tertiary mirror, and a first flat fold mirror, and a second flat fold mirror. A beam path incident upon the primary mirror is reflected from the primary mirror to the secondary mirror. The tertiary mirror lies on the second rotational axis, the first flat fold mirror redirects the beam path reflected from the secondary mirror to the tertiary mirror, and the second flat fold mirror lies at the intersection point and redirects the beam path reflected from the tertiary mirror along the first rotational axis.
    Type: Grant
    Filed: May 29, 2009
    Date of Patent: August 12, 2014
    Assignee: Raytheon Company
    Inventor: Lacy G. Cook
  • Patent number: 8724082
    Abstract: A semiconductor laser driver includes a light detection circuit to detect a quantity of light as a detected light emission intensity and output the detected light emission intensity to the control circuit, and a control circuit to control a light emission intensity for the semiconductor laser based on the detected light emission intensity and on a predetermined light emission intensity setting value. The light detection circuit includes a photoelectric conversion element to convert the quantity of light emitted from the semiconductor laser into an electrical current and output the converted electrical current, a current magnification setting circuit to amplify the electrical current output from the photoelectric conversion element to a predetermined amplified current at one of multiple different predetermined magnifications, a detection resistor to convert the amplified current output from the current magnification setting circuit into a voltage and output the voltage as the detected light emission intensity.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: May 13, 2014
    Assignee: Ricoh Company, Ltd.
    Inventor: Hiroaki Kyogoku
  • Patent number: 8714760
    Abstract: A reflective optical form that has both a telecentric image and a real entrance pupil. In one example, a non-relayed optical imaging system includes a real entrance pupil configured to admit a beam of electromagnetic radiation, an image plane, and a reflective triplet including a negative primary mirror, a positive secondary mirror optically coupled to the primary mirror, a negative tertiary mirror optically coupled to the secondary mirror, the reflective triplet configured to receive the beam of electromagnetic radiation from the real entrance pupil and to focus the beam of electromagnetic radiation onto the image plane to form a telecentric image at the image plane.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: May 6, 2014
    Assignee: Raytheon Company
    Inventor: Lacy G. Cook
  • Publication number: 20140118819
    Abstract: An optical device is described herein which is a four mirror objective with a large numerical aperture and a small central obscuration. The four mirror objective places two Schwarzschild-like objectives in series with respect to one another. This allows a large numerical aperture, a long working distance, and small central obscuration. Each objective has a primary and secondary mirror. An imaging device and method for imaging a specimen are also described herein.
    Type: Application
    Filed: October 15, 2013
    Publication date: May 1, 2014
    Applicant: CORNING INCORPORATED
    Inventor: MARK C. SANSON
  • Patent number: 8708507
    Abstract: The magnifying apparatus is based on two dimensional arrays of micro magnifying modules (MMMs) positioned along a plane perpendicular to the axis of the magnifying apparatus. In addition, the structure may include a two dimensional array of micro beam multipliers (MBMs) to improve the quality of the magnified image. The micro beam multipliers are positioned along a plane parallel to the array of micro magnifying modules. The structure also may include a two dimensional array of ray angle adjusters (RAAs) to extend the view angle. The ray angle adjusters are positioned along a plane parallel to the array of micro magnifying modules. The array of micro magnifying modules, with or without the micro beam multipliers and/or ray angle adjusters, may be constructed as a thin plate with a thickness of a few millimeters, through which the object is viewed.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: April 29, 2014
    Inventor: Masataka Shirasaki
  • Publication number: 20140085741
    Abstract: The inventions relate to beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (“EUV”) radiation. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (?), e.g., the convergence or divergence angle, of the laser beam. The inventions also relate to methods for adjusting an opening angle (?) of a laser beam using such beam guides.
    Type: Application
    Filed: March 15, 2013
    Publication date: March 27, 2014
    Inventor: Martin Lambert
  • Patent number: 8632195
    Abstract: In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: January 21, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Hans-Juergen Mann, David Shafer, Wilhelm Ulrich
  • Publication number: 20130342821
    Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.
    Type: Application
    Filed: August 29, 2013
    Publication date: December 26, 2013
    Applicant: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 8553321
    Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: October 8, 2013
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 8534851
    Abstract: One or more embodiments of an optical system includes a primary mirror configured to reflect light incident thereupon; a secondary mirror facing the primary mirror configured to receive the light reflected from the primary mirror and redirect the light reflected from the primary mirror in multiple channels; and one or more tertiary mirrors of common prescriptions, configured to reflect divergent light rays incident from the secondary mirror in multiple channels.
    Type: Grant
    Filed: July 20, 2010
    Date of Patent: September 17, 2013
    Assignee: Raytheon Company
    Inventor: Susan B. Spencer
  • Patent number: 8531750
    Abstract: An afocal beam relay has first and second primary concave reflective surfaces and first and second secondary convex toroidal reflective surfaces. The centers of curvature of each of the first and second primary reflective surfaces and first and second secondary reflective surfaces lie on an axis. The first and second secondary convex reflective surfaces face toward the first and second primary concave reflective surfaces and are disposed to relay a decentered entrance pupil to a decentered exit pupil. An aspheric corrector element is disposed in the path of an input beam of light that is directed by the primary and secondary surfaces to the decentered entrance pupil. The directed beam of light between the first and second secondary convex mirrors is collimated in one direction and focused in mid air in an orthogonal direction.
    Type: Grant
    Filed: August 16, 2012
    Date of Patent: September 10, 2013
    Assignee: Kessler Optics & Photonics Solutions, Ltd.
    Inventor: David Kessler
  • Patent number: 8503074
    Abstract: A multi-wavelength band imaging system including a beam splitter is provided, allowing image capturing means adapted to specific wavelength bands to be used such as from visible to near infrared, intermediate infrared and far infrared. The system may have a field of view of substantially (360) degrees about an optical axis of the system and may fit into a golf ball sized housing. The imaging system includes a first convex mirror and a second concave mirror. Some embodiments for imaging single or close wavelength bands and not requiring a beam splitter are equally provided. Also provided is a self-righting housing for an imaging system, for example as described above, which self-rights under the action of gravity, thereby disposing the imaging system in an appropriate orientation.
    Type: Grant
    Filed: March 18, 2008
    Date of Patent: August 6, 2013
    Assignee: DSAM London LLP
    Inventors: David W. Samuelson, Iain A. Neil
  • Patent number: 8456612
    Abstract: An exposure apparatus projects a pattern of an original onto a substrate by a projection optical system to expose the substrate, wherein the projection optical system includes a mirror assembly, and the mirror assembly includes a first mirror member which has a first reflecting surface and is configured to bend an optical axis of the projection optical system, a second mirror member which has a second reflecting surface and is configured to bend the optical axis, a supporting mechanism configured to support the first mirror member and the second mirror member, and the supporting mechanism is positioned to position the first mirror member and the second mirror member while a positional relationship between the first mirror member and the second mirror member is maintained.
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: June 4, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kyoichi Miyazaki, Kiyoshi Fukami
  • Patent number: 8427744
    Abstract: An optical system includes a primary mirror of a positive-powered concave substantially paraboloidal configuration configured to reflect light incident thereupon; a secondary mirror of a negative-powered convex hyperboloidal configuration facing the primary mirror configured to receive the light reflected from the primary mirror and redirect the light reflected from the primary mirror; a positive-powered tertiary mirror configured to substantially reimage and reflect divergent light rays incident from the secondary mirror; and a powered quaternary mirror configured to receive the reimaged light rays from the tertiary mirror, and to relay the received reimaged light rays to a focal point.
    Type: Grant
    Filed: October 12, 2009
    Date of Patent: April 23, 2013
    Assignee: Raytheon Company
    Inventor: Lacy G. Cook
  • Publication number: 20130063710
    Abstract: In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
    Type: Application
    Filed: October 22, 2012
    Publication date: March 14, 2013
    Inventor: CARL ZEISS SMT GMBH
  • Publication number: 20130048886
    Abstract: A chamber apparatus used with a laser apparatus may include a chamber, a beam expanding optical system, and a focusing optical system. The chamber may be provided with at least one inlet, through which a laser beam outputted from the laser apparatus is introduced into the chamber. The beam expanding optical system is configured to expand the laser beam in diameter. The focusing optical system is configured to focus the laser beam that has been expanded in diameter.
    Type: Application
    Filed: December 13, 2011
    Publication date: February 28, 2013
    Applicant: GIGAPHOTON INC
    Inventors: Masato Moriya, Osamu Wakabayashi
  • Publication number: 20130050671
    Abstract: An imaging optics has a plurality of mirrors to image an object field in an object plane into an image field in an image plane. The imaging optics includes a first partial objective to image the object field onto an intermediate image, and the imaging optics includes a second partial objective to image the intermediate image onto the image field. The second partial objective includes a penultimate mirror in the beam path of imaging light between the object field and the image field, and the second partial objective includes a last mirror in the beam path. The penultimate mirror images the intermediate image onto a further intermediate image, and the last mirror images the further intermediate image onto the image field.
    Type: Application
    Filed: September 4, 2012
    Publication date: February 28, 2013
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Hans-Juergen Mann, David Shafer
  • Patent number: 8335039
    Abstract: An apparatus for measuring an image of a pattern to be formed on a semiconductor by scanning the pattern using a scanner, the apparatus including an EUV mask including the pattern, a zoneplate lens on a first side of the EUV mask and adapted to focus EUV light on a portion of the EUV mask at a same angle as an angle at which the scanner will be disposed with respect to a normal line of the EUV mask, and a detector arranged on another side of the EUV mask and adapted to sense energy of the EUV light from the EUV mask, wherein NAzoneplate=NAscanner/n and NAdetector=NAscanner/n*?, where NAzoneplate denotes a NA of the zoneplate lens, NAdetector denotes a NA of the detector, and NAscanner denotes a NA of the scanner, ? denotes an off-axis degree of the scanner, and n denotes a reduction magnification of the scanner.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: December 18, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-gun Lee, Seong-sue Kim
  • Patent number: 8335038
    Abstract: An apparatus for measuring an image of a pattern to be formed on a semiconductor by scanning the pattern using a scanner, the apparatus including an EUV mask including the pattern, a zoneplate lens on a first side of the EUV mask and adapted to focus EUV light on a portion of the EUV mask at a same angle as an angle at which the scanner will be disposed with respect to a normal line of the EUV mask, and a detector arranged on another side of the EUV mask and adapted to sense energy of the EUV light from the EUV mask, wherein NAzoneplate=NAscanner/n and NAdetector=NAscanner/n*?, where NAzoneplate denotes a NA of the zoneplate lens, NAdetector denotes a NA of the detector, and NAscanner denotes a NA of the scanner, ? denotes an off-axis degree of the scanner, and n denotes a reduction magnification of the scanner.
    Type: Grant
    Filed: October 22, 2010
    Date of Patent: December 18, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-gun Lee, Seong-sue Kim
  • Publication number: 20120307328
    Abstract: An afocal beam relay has first and second primary concave reflective surfaces and first and second secondary convex toroidal reflective surfaces. The centers of curvature of each of the first and second primary reflective surfaces and first and second secondary reflective surfaces lie on an axis. The first and second secondary convex reflective surfaces face toward the first and second primary concave reflective surfaces and are disposed to relay a decentered entrance pupil to a decentered exit pupil. An aspheric corrector element is disposed in the path of an input beam of light that is directed by the primary and secondary surfaces to the decentered entrance pupil. The directed beam of light between the first and second secondary convex mirrors is collimated in one direction and focused in mid air in an orthogonal direction.
    Type: Application
    Filed: August 16, 2012
    Publication date: December 6, 2012
    Applicant: Kessler Optics & Photonics Solutions, Ltd.
    Inventor: David Kessler