Abstract: There is provided a multi-mirror system for an illumination system with wavelengths ?193 nm. The multi-mirror system includes (a) an imaging system having a first mirror and a second mirror, (b) an object plane, (c) an image plane in which the imaging system forms an image of an object, and (d) an arc-shaped field in the image plane, where a radial direction in a middle of the arc-shaped field defines a scanning direction. The first and second mirrors are arranged such that an edge sharpness of the arc-shaped field is smaller than 5 mm in the scanning direction. Rays traveling from the object plane to the image plane impinge a used area of the first and second mirrors with incidence angles relative to a surface normal of the mirrors ?30° or ?60°.

Abstract: Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section has an internal shape defined by a first curve and a second curve, the first curve extending from one point on the peripheral edge of the concave portion to the deepest point of the concave portion, and the second curve extending continuously from the first curve and from the deepest point of the concave portion to another point on the peripheral edge of the concave portion. The average of the absolute value of an inclination angle of the first curve is larger than that of the second curve relative to the substrate surface. The second vertical section has an internal shape defined by a shallow curve and deep curves formed at both sides of the shallow curve.

Abstract: An image display optical system is disclosed which achieves a small size and display at a wide angle of view as well as maintains a required level of optical performance and allows suppression of occurrence of various aberrations at the same time. The optical system comprises a first optical element and a second optical element in order from the side of an exit pupil of the optical system to the side of a display device. A combined negative optical power is provided by an emergent surface of the second optical element and an incident surface of the first optical element, and the optical system forms an intermediate image with the displaying luminous flux in the first optical element.

Abstract: An optical system having a pair of ellipsoidal shaped reflective surfaces or mirrors which receive light from an object and provide wide field view imaging for the object. The optical system directs the light onto a flat detector to a record a wide field of view image of the object on the flat detector.

Abstract: An optical system having a pair of ellipsoidal shaped reflective surfaces or mirrors which receive light from an object and provide wide field view imaging for the object. The optical system directs the light onto a flat detector to a record a wide field of view image of the object on the flat detector.

Abstract: An optical system comprises a three-mirror anastigmat including a primary mirror, a secondary mirror, and a tertiary mirror positioned to reflect a beam path. An intermediate image is formed on the beam path at an intermediate-image location between the secondary mirror and the tertiary mirror. A negative-optical-power field mirror is positioned in the beam path at a field-mirror location subsequent to the intermediate-image location along the beam path. The field mirror reflects the intermediate image to the tertiary mirror.

Abstract: Disclosed is a projection optical system specifically to be used with extreme ultraviolet (EUV) light having a wavelength not less than 10 nm and not greater than 20 nm. The projection optical system has six mirrors sequentially reflecting light in an order from the object side toward the image side and being disposed to define a coaxial system, wherein each of the six mirrors has a curvature radius not greater than 1500 mm.

Abstract: A rear projection display device capable of reducing the depth of a display device itself, comprising an optical engine, first, second, third reflective mirrors arranged at such positions as to be easily held integrally with each other, a fourth reflective mirror, a plane reflective mirror for turn-back of light flux, and a screen.

Abstract: A reflector and reflector-type LCD suppresses inter-object reflection over a wide angle, and provides particularly high reflectance in an intended range of viewing angle. The reflector includes a plurality of concave portions with an inclination angle (an angle between a plane tangential to a point on a concave surface and the surface of the base material) that is maximum on a side portion of the curved surface. The concave portions may also be formed such that an inner surface of each of the concave portions include a peripheral curved surface and a bottom curved surface are continuously connected to each other. The peripheral curved surface and the bottom curved surface are interposed partial spheres having different radii and non-collinear normal lines from the surface of each sphere.

Abstract: A method for performing optical adjustments of an exposure apparatus is based on an exposure apparatus having a light source for generating illumination light for exposure, and illumination optics for irradiating a mask with the illumination light generated from the exposure light source so as to imprint a mask pattern on a substrate base.

Abstract: Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section has an internal shape defined by a first curve and a second curve, the first curve extending from one point on the peripheral edge of the concave portion to the deepest point of the concave portion, and the second curve extending continuously from the first curve and from the deepest point of the concave portion to another point on the peripheral edge of the concave portion. The average of the absolute value of an inclination angle of the first curve is larger than that of the second curve relative to the substrate surface. The second vertical section has an internal shape defined by a shallow curve and deep curves formed at both sides of the shallow curve.

Abstract: Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section has an internal shape defined by a first curve and a second curve, the first curve extending from one point on the peripheral edge of the concave portion to the deepest point of the concave portion, and the second curve extending continuously from the first curve and from the deepest point of the concave portion to another point on the peripheral edge of the concave portion. The average of the absolute value of an inclination angle of the first curve is larger than that of the second curve relative to the substrate surface. The second vertical section has an internal shape defined by a shallow curve and deep curves formed at both sides of the shallow curve.

Abstract: An optical system has a light source of an optical beam, and a wavefront distortion generator that introduces a known wavefront distortion into at least one wavelength component of the optical beam prior to the formation of an intermediate image. A focusing device receives the optical beam, produces the intermediate image of the optical beam, and outputs the optical beam. A wavefront distortion corrector, after the formation of the intermediate image, introduces a wavefront distortion correction into each component of the optical beam into which the known wavefront distortion was introduced by the wavefront distortion generator. The wavefront distortion correction is the reverse of the known wavefront distortion introduced into the optical beam by the wavefront distortion generator.

Abstract: Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section has an internal shape defined by a first curve and a second curve, the first curve extending from one point on the peripheral edge of the concave portion to the deepest point of the concave portion, and the second curve extending continuously from the first curve and from the deepest point of the concave portion to another point on the peripheral edge of the concave portion. The average of the absolute value of an inclination angle of the first curve is larger than that of the second curve relative to the substrate surface. The second vertical section has an internal shape defined by a shallow curve and deep curves formed at both sides of the shallow curve.

Abstract: An optical system has a correction half-sphere lens having multiple secondary mirrors mounted on an outer periphery of the correction half-sphere lens. A primary half-sphere mirror is coaxial and shares a same curvature center with the correction half-sphere lens. The primary half-sphere mirror has multiple through holes each corresponding to one of the secondary mirrors and having a second correction lens received therein to receive light from the corresponding secondary mirror. A cap is provided on top of the primary half-sphere mirror and has a shutter in a center of the cap to control incident light coming to the system.

Abstract: A reflection type magnification projection optical system includes five light-reflecting mirrors arranged from an object side to an image side in a sequence of a concave mirror (M1), a convex mirror (M2), a concave mirror (M3), a convex mirror (M4), and a concave mirror (M5) such that those mirrors basically form a coaxial system, and forming no intermediate image, and wherein an object point and an image point are respectively on opposite sides across an optical axis, and the object point and the image point are kept 400˜1500 mm apart with respect to a direction orthogonal to the optical axis.

Abstract: An object of the present invention is to provide a variable mirror that is readily formable and can be readily and precisely changed into various configurations as desired. A variable mirror 20 according to this invention is a variable mirror having a mirror body 26 formed of an elastic or flexible material and having one surface 26b functioning as a reflecting surface. The mirror body 26 is capable of changing the reflecting surface configuration. The variable mirror is characterized in that the rigidity of the mirror body 26 varies in a direction parallel to the one surface.

Abstract: A concave mirror optical system for a scanner and a method for compensating image distortion. In this invention, the more expensive lens assembly in a conventional optical system is replaced by a concave mirror made from simple low-cost material so that production cost and chromatic dispersion are reduced. Moreover, different magnifications can be obtained due to a difference in focusing power of the concave mirror along XY axis direction.

Abstract: An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a predetermined direction, a second reflection surface group opposing the first reflection surface group and having at least one internal reflection surface and two side surfaces opposing each other in parallel to the predetermined direction. Light incident from one of the refraction surfaces is alternately reflected by the internal reflection surfaces of the first reflection surface group and the internal reflection surface of the second reflection surface group and guided to the other refraction surface.

Abstract: A projection optical system is provided to guide a beam from an image display panel onto a screen surface inclined relative to a reference axis, and to form image information on the screen surface. The projection optical system has a reflecting optical system which has a plurality of rotation-asymmetrical reflecting surfaces having curvatures, and in which the beam from the image display panel is reflected by the plurality of rotation-asymmetrical reflecting surfaces and is guided onto the screen surfaces of the reflecting optical system or between the reflecting optical system and the image display panel. The stop is set so as to be imaged at a negative magnification by an optical member disposed more adjacent to the screen than the stop position.

Abstract: A bright reflection type projection optical system is used for projecting onto a screen under magnification a luminous flux carrying image information from a light valve driven by an image signal, while favorably correcting aberration. The reflection type projection optical system comprises, successively from the enlargement side, a first mirror having a positive power, a second mirror having a negative power, and a third mirror having a positive power.

Abstract: An all-reflective, relayed optical system is arranged along a beam path. The optical system includes a first mirror having positive optical power, and a second mirror having a negative optical power, wherein the second mirror receives the beam path reflected from the first mirror and wherein an intermediate image is formed after the beam path reflects from the second mirror. The optical system further includes a third mirror having positive optical power, wherein the intermediate image on the beam path is reflected from the third mirror; a fourth mirror having a negative optical power, wherein the beam path reflected by the third mirror is reflected by the fourth mirror, and a fifth mirror having positive optical power, wherein the beam path reflected by the fourth mirror is reflected by the fifth mirror to an image location.

Abstract: A compact telescope having a modified Gregorian design comprising three reflecting surfaces. The first reflecting surface is concave and is defined by an outer perimeter and an inner perimeter. The curvature of the first reflecting surface defines a focal plane of the first reflecting surface. The second reflecting surface is optically coupled to the first reflecting surface and is disposed between the first reflecting surface and the focal plane defined by the first reflecting surface. The third reflecting surface is concave and is disposed within the inner perimeter of the first reflecting surface. The curvature of the third reflecting surface is greater than the curvature of the first reflecting surface. The third reflecting surface is optically coupled to the first reflecting surface by the second reflecting surface. An aperture is disposed within the third reflecting surface. Thus light incident upon the first reflecting surface is directed through the aperture.

Abstract: A reflection type image forming optical system and a projector are compact with wide view angle, in expensive and having uniform illumination intensity. The reflection type image forming optical system includes a first reflection mirror having a rotation symmetric aspheric shape concave reflection surface directed to an image forming surface arranged an image forming element thereon, a second reflection mirror having a rotation symmetric aspheric shape convex reflection surface directed toward a flux of light from the first reflection mirror, a third reflection mirror having a rotation symmetric aspheric shape concave reflection surface directed toward a flux of light from the second reflection mirror and a fourth reflection mirror having a rotation symmetric aspheric shape convex reflection surface directed toward a flux of light from the third reflection mirror. The first, second, third and fourth reflection mirrors form a telecentric optical system.

Abstract: A microlithography reduction objective formed from six mirrors arranged in a light path between an object plane and an image plane is provided. The microlithography reduction objective is characterized by having an image-side numerical aperture NA≧0.15. In some embodiments, the mirror closest to the image plane, i.e., the fifth mirror is arranged such that an image-side optical free working distance is greater than or equal to a used diameter of a physical mirror surface of the fifth mirror, a physical mirror surface being the area of a mirror where light rays from the object impinge. The fifth mirror may be arranged such that an image-side optical free working distance is greater than or equal to the sum of one-third the used diameter of the physical mirror surface on the fifth mirror and a length between 20 mm and 30 mm. The fifth mirror may be arranged such that the image-side optical free working distance is at least 50 mm, as well.

Abstract: A reduction objective, a projection exposure apparatus with a reduction objective, and a method of use thereof are disclosed. The reduction objective has a first set of multilayer mirrors in centered arrangement with respect to a first optical axis, a second set of multilayer mirrors in centered arrangement with respect to a second optical axis, and an additional mirror disposed at grazing incidence, such that said additional mirror defines an angle between the first optical axis and said second optical axis. The reduction objective has an imaging reduction scale of approximately 4× for use in soft X-ray, i.e.

Abstract: An illumination system and condenser for use in photolithography in the extreme ultraviolet wavelength region having a first non-imaging optic element collecting electromagnetic radiation from a source and creating a desired irradiance distribution and a second non-imaging optic element receiving the electromagnetic radiation from the first non-imaging optic element and redirecting and imaging the electromagnetic radiation. The electromagnetic radiation emanating from the second non-imaging optic element is suitable for being received by other conventional optical surfaces to provide a desired irradiance distribution with a desired angular distribution and desired shape. Facets are used to provide the desired illumination over the desired illumination field. Reflective facets may be placed on the second non-imaging optic, which can reduce the number of mirrors and increase efficiency.

Abstract: An improved optical apparatus and system for producing a three-dimensional real image of an object. The apparatus includes a support member, a first concave reflective surface affixed to the support member and having an associated focal length, and a second concave reflective surface affixed to the support member. The first concave reflective surface and the second concave reflective surface are placed in substantially fixed spatial relationship to each other to define an acute angle so that when the object is appropriately placed further than the focal length of the first concave reflective surface, the apparatus produces a three-dimensional real image of the object.

Abstract: A classification system for systems of n mirrors, whereby systems of mirrors are classified by a number C, is defined as follows: C = ∑ i = 1 n ⁢ a i · 2 ( n - i ) ⁢ ( M &LeftBracketingBar; M &RightBracketingBar; ) where: ai=1 if the angle of incidence of the chief ray at mirror i is negative, ai=0 if the angle of incidence of the chief ray at mirror i is positive, M is the magnification of the projection system, and index i numbers the mirrors of the system in series.

Abstract: When n is taken as integers of 2 or more, n reflecting systems are constituted by providing reflecting mirrors on opposite (two) side surfaces in 2n side surfaces of a transparent body having the shape of a 2n-sided prism. The n reflecting systems are provided on each pair of opposite side surfaces, and images of an object are formed using each of the n reflecting systems.

Abstract: A reflection type magnification projection optical system includes five light-reflecting mirrors arranged from an object side to an image side in a sequence of a concave mirror (M1), a convex mirror (M2), a concave mirror (M3), a convex mirror (M4), and a concave mirror (M5) such that those mirrors basically form a coaxial system, and forming no intermediate image, and wherein an object point and an image point are respectively on opposite sides across an optical axis, and the object point and the image point are kept 400˜1500 mm apart with respect to a direction orthogonal to the optical axis.

Abstract: The present invention discloses an image-forming optical system provided with a plurality of curved mirrors whereby two points at different distances are made to have an optically conjugate relationship, sequentially starting with a first conjugate point which is nearer when an optical path is traced from the first conjugate point to a second conjugate point which is farther, comprises, a first mirror which reflects luminous flux from the first conjugate point to transform the luminous flux into substantially parallel luminous flux, and a second mirror which reflects the luminous flux reflected by the first mirror while keeping the luminous flux substantially parallel.

Abstract: A lens-less projection optical system of the reflection type is provided with four reflecting mirrors, which successively reflect a light flux transmitted through a picture-forming device. The light flux reflected by the fourth reflecting mirrors is projected on the screen. The second reflecting mirror is so situated that its reflecting surface shaped into a convexly curved surface is directed to the light flux reflected from the first reflecting mirror. The third reflecting mirror is so situated that its reflecting surface shaped into a convexly curved surface is directed to the light flux reflected form the second reflecting mirror. The fourth reflecting mirror is so situated that its reflecting surface shaped into a convexly curved surface is directed to the light flux reflected from the third reflecting mirror.

Abstract: A mirror arrangement (10) for a rear view mirror system comprises three mirrors (14, 16, 18). The first mirror (14) is a concave off-axis parabolic mirror arranged adjacent the eyes of the user with a principal axis and effective focal length f1. The second mirror (16) is substantially flat and is arranged between the first and third mirrors (14, 18). The third mirror (18) is a convex off axis parabolic mirror having a principal axis under an effective focal f3. The first and third mirrors (14, 18) have a common focus and the parabolas of the first and third mirrors (14, 18) are related such that 1.5 f1≦f3 ≦3f1. In another aspect of the invention a mounting arrangement (24) for a rear view mirror system comprises an article of headgear (12) with a channel (20) formed therein and a mirror assembly mounted on the article of headgear so as to bridge the channel. The mirror assembly has series of lugs (26) protruding from the longitudinal edges thereof.

Abstract: An exposure apparatus is provided wherein an illumination beam emitted from a mask is projected onto a substrate, through a projection optical system having a reflecting optical element that includes a reflecting region for reflecting the illumination beam at a position spaced from an optical axis of the projection optical system, and a space portion that is provided on the side of the optical axis with respect to the reflecting region. The apparatus further includes a position detecting device for detecting position information of the substrate, at least part of which is located in the space of the reflecting optical element.

Abstract: A variable mirror that is readily formable and can be readily and precisely changed into various configurations as desired is provided. The variable mirror includes a mirror body formed of an elastic or flexible material and having one surface functioning as a reflecting surface. The mirror body is capable of changing the reflecting surface configuration. The rigidity of the mirror body varies in a direction parallel to the one surface.

Abstract: The present invention relates to an omnidirectional wide angle optical system, which is associated with a sensor, camera, projector, medical instrument, surveillance system, flight control system, robotic command and control or sensing system, home entertainment system, conference area, virtual reality suite, theater, or similar article. The optical system consists of an external refracting surface which may be strongly curved, an strongly curved internal primary reflector surface, a secondary reflector surface (in most embodiments), central wide angle refracting optics (in some embodiments), a modular or integral imaging and correcting lens system which may have aperture adjustment means, and mounting components.

Abstract: The invention is directed to a directionally adjustable telescope arrangement (1) having a first arcuate mirror (3), a second arcuate mirror (9) and a planar deflecting mirror (13). A third arcuate mirror (17) is provided in the imaging beam path of the telescope arrangement (1). The mirror (17) coacts with the first arcuate mirror (3) and the second arcuate mirror (9) to effectively form images.

Abstract: A telescope apparatus for celestial observations by a reflecting telescope which is provided with: a first reflecting mirror 3 having its surface 3a coated over the entire area thereof with a grid-like metallic film 10 that reflects radio waves 1 but permits the passage therethrough of infrared and visible rays 2 and having its back 3b coated over the entire area thereof with a full-face metallic film that reflects both of the radio waves 1 and the infrared and visible rays 2; and a second reflecting mirror 4 having its surface 4a coated over the entire area thereof with the grid-like metallic film 10 that reflects the radio waves 1 but permits the passage therethrough of the infrared and visible rays 2 and having its back 4b coated over the entire area thereof with the full-face metallic film 11 that reflects both of the radio waves 1 and the infrared and visible rays.

Abstract: An optical system compatible with short wavelength (extreme ultraviolet) radiation comprising four optical elements providing five reflective surfaces for projecting a mask image onto a substrate. The five optical surfaces are characterized in order from object to image as concave, convex, concave, convex and concave mirrors. The second and fourth reflective surfaces are part of the same optical element. The optical system is particularly suited for ring field step and scan lithography methods. The invention uses aspheric mirrors to minimize static distortion and balance the static distortion across the ring field width, which effectively minimizes dynamic distortion.

Abstract: In a method for correcting optical wavefront errors in an optical system, the optical wavefront is calculated for different wavelengths and fields of view between the entry pupil (EP) and exit pupil (AP). Any phase differences are compensated by at least one surface (5, 7) compensating the phase differences in the beam path. A particular optical system, expediently in the form of a telescope, accordingly has a beam path which comprises the following: a first reflector (3), arranged along its axis (A), for reflecting a beam (1) incident along an optical axis (O) onto a concave second reflector (4) which throws the beam obtained from the first reflector (3) onto a third reflector (5), from which it is passed to a concave fourth reflector (6) in order to be reflected at an angle with said optical axis (O). Such a means (5, 7) for correcting the wavefront errors is provided in the beam path of such an optical system.

Abstract: An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 &mgr;m), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (typ, greater than 0.

Abstract: An optical system has an aperture stop, and an optical unit placed on the image side of the aperture stop. The optical unit consists of the following components in the order named from the object side: a first optical component with a reflective curved surface, for forming an intermediate image of an object, a second optical component with a reflective curved surface, for forming an image of the aperture stop with light from the intermediate image of the object, and a third optical component with a reflective curved surface, for forming a secondary image of the object with light from the image of the aperture stop. When fB1(&thgr;), fB2(&thgr;), and fB3(&thgr;) are focal lengths of the first optical component, the second optical component, and the third optical component, respectively, at an azimuth &thgr;, the focal lengths satisfy the following conditions in the azimuth range of 0<&thgr;<2&pgr;: fB1(&thgr;)>0, fB2(&thgr;)<0, fB3(&thgr;)>0.

Abstract: A centrally-obscured reflective telescope having a semi-active focus and thermal compensation system. The telescope has a housing having an input window, a primary mirror, a secondary mirror suspended between the input window and the primary mirror by support struts, an optional tertiary mirror, and an optional fold mirror. The system includes one or more heating elements respectively disposed on each of the support struts. A first temperature sensor (disposed on the primary mirror) generates a reference temperature, a second temperature sensor is disposed on the secondary mirror, and one or more third temperature sensors are disposed on each of the support struts. A temperature compensation controller is coupled to the heating elements and temperature sensors and controls the heat output of the plurality of heating elements to heat the support struts and control the position of the secondary mirror relative to the primary mirror.

Abstract: A reflection reduction projection optical system having large numerical aperture for use in X-ray lithography. The reflection reduction projection optical system includes at least five aspheric surface reflecting mirrors and a reflecting mirror having a predetermined configuration, causing reduction imaging on an imaging surface I by imaging a light beam from an object O only one time. The reflection reduction projection optical system includes, in light path sequence from the object, a first convex mirror, a first concave mirror, the mirror having a predetermined configuration, a second concave mirror, a second convex mirror, and a third concave mirror. The reflection reduction projection optical system also includes an aperture stop located on the second convex mirror.

Abstract: The invention relates to a wide-angle catoptric system. The system comprises a convex primary mirror (M1), a secondary mirror (M2), a tertiary mirror (M3), and a quaternary mirror (M4), and it is characterized in that the secondary mirror (M2) is convex. The invention is particularly applicable to astronomical or space observation over a broad spectral range.

Abstract: An étendue efficient angle conversion system that operates in a quasi-imaging mode. This system is capable of generating angular and spatial axial asymmetric output beams and is also capable of incorporating therein optional color reformatting capabilities. With the aid of anamorphic beam transformers such asymmetric beams can further be reformatted to spatially and angularily match particular illumination needs of a target. This system can further be applied to the design of fiber optic illumination systems and projection display systems and can further be combined with delivery efficiency maximization concepts. In addition, delivery efficiency improvements of light engines can be obtained with the use of optimized lamp, reflector, integrators, anamorphic beam transformers, coupling optics, etc.

Abstract: The invention concerns a microlithography projection objective device for short wavelengths, preferably <100 nm with a first (S1), a second mirror (S2), a third (S3), a fourth mirror (S4), a fifth (S5) and a sixth mirror (S6). The invention is characterized by the fact that the image-side numerical aperture is NA≧0.15 and that the mirror nearest to the object to be illuminated, preferably nearest to the wafer, is arranged in such a way that the image-side optical free working distance corresponds at least to the used diameter D of this mirror nearest to the wafer and/or the image-side optical free working distance is at least the sum of a third of the used diameter D of this mirror and a length which lies between 20 mm and 30 mm, and/or the image-side optical free working distance is at least 50 mm, preferably 60 mm.

Abstract: An all-reflective zoom optical system is disclosed. The system comprises a plurality of curved relay mirrors successively reflecting electromagnetic radiation received by the system to generate a real image with electromagnetic radiation on a focal surface that is fixed across the zoom range. Further, the entrance aperture also is constant for any zoom position. The curved relay mirrors are movable in relationship to each other in mutually parallel tracks to effect the magnification. The system further includes a primary and secondary mirror for collecting and reflecting incoming electromagnetic radiation to the curved relay mirrors.

Abstract: An irradiance redistribution guide (IRG) for providing from a radiation source having a nonuniform irradiation distribution, a predetermined irradiance distribution over a predetermined target area spaced away from the IRG. The IRG includes a tubular reflective inner surface disposed between an entrance aperture and an exit aperture. The reflective inner surface has a varying cross-sectional radius. The profile of the cross-sectional radius is defined by a spline function that is uniquely determined by a plurality of knots. The IRG, when used in conjunction with a high-power solar concentrator, is advantageous in materials processing that requires high irradiance level that is uniformly distributed over an area spaced away from the exit aperture by a working distance.