Abstract: Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source (S), comprising a main, first collector stage (E1), with a concave collector mirror (2) placed in front of the source (S) at a distance of greater than 250 mm and pierced by a central hole (3) and a convex mirror (4) placed behind the concave mirror level with the source and pierced by a central hole (5), and at least a second collector stage (E2) with a concave collector mirror (7) placed in front of the stage (E1) and pierced by a central hole (8) and a convex mirror (9) placed behind the concave mirror.

Abstract: A reflection optical system placed between a light valve 5 and a screen 4, wherein curved surfaces are only three reflection surfaces of first to third mirrors 1 to 3, and satisfies the following: (1) ?L<20 degrees, (2) 25 degrees<?UL<55 degrees, (3) 20 degrees<?M1<55 degrees, (4) 15 degrees<?M2<50 degrees, (5) 8 degrees<?M3<30 degrees, (6) ?L<15 degrees, (7) 30 degrees<?UL and (8) 7.5 degrees<|?F|, where ?L: minimum angle which a light beam of pupil center forms with respect to the enlargement side image surface; ?UL: difference between maximum and minimum angles which a light beam of pupil center forms with respect to the enlargement side image surface; ?M1, ?M2 and ?M3: deviation angles of the light beam of pupil center passing the center of the reduction-side image surface in first to third mirrors 1 to 3; and ?F: reduction-side pupil divergent angle.

Abstract: A micro-optical device includes a plurality of minute optical elements each having a curved surface operable to condense incident light. The minute optical elements are arranged at constant intervals. The curved surface is expressed by two or more F values. Each of the minute optical elements is a transmission lens element having the curved surface including a substantially flat part at a center of the transmission lens element, wherein the curved surface is convex or concave.

Abstract: A coude gimbal structure includes a two-axis gimbal system having an outer gimbal pivotable about a first rotational axis, and an inner gimbal supported on the outer gimbal and pivotable about a second rotational axis which intersects the first rotational axis at an intersection point. A folded afocal three-mirror anastigmat has a positive-optical-power primary mirror, a negative-optical-power secondary mirror, and a positive-optical-power tertiary mirror, and a first flat fold mirror, and a second flat fold mirror. A beam path incident upon the primary mirror is reflected from the primary mirror to the secondary mirror. The tertiary mirror lies on the second rotational axis, the first flat fold mirror redirects the beam path reflected from the secondary mirror to the tertiary mirror, and the second flat fold mirror lies at the intersection point and redirects the beam path reflected from the tertiary mirror along the first rotational axis.

Abstract: A coordinate system defines the length of the curve of a parabola used in constructing a parabolic trough reflector. The origin (0,0) of the coordinate system is at the bottom center of the coordinate system. The two upper points of the coordinate system define the width, height of the parabola. These points are defined as (X1,Y1)=(?width,height), and (X2,Y2)=(width,height). The equation defining the parabola is f(x)=a·x2, where a=height/width2. The plot of this equation produces a parabola that fits into the coordinate system. Two small blocks are used as anchor points for the ends of the parabola. The length of the curve of the parabola is defined in the equation: length(x)=a·[x·(x?{square root over (x2+b2)})+b2·ln(x+?{square root over (x2+b2)})] where b=½·a. An inexpensive trough reflector is constructed out of flexible material. It is used to build a much more complicated six reflector system to concentrate parallel radiation like sunlight much like a magnifying glass.

Abstract: In a projection type image display apparatus, for enlarging an image on a image display apparatus 1 by means of a projection lens 2, thereby projecting the enlarged image onto a screen 6, obliquely, being inclined thereto, between the projection lens 2 and a rear-surface mirror 5, there are disposed free shaped surface mirrors 3 and 4, each having a free shaped surface for compensating a trapezoidal distortion due to oblique projection of the enlarged image. The surface configuration of the free shaped surface mirror is so shaped as to satisfy a following equation: |L1?L2|>1.4·Dv if assuming that a distance for a light beam of an upper end of the enlarged image to reach the screen after being reflected upon a free shaped surface is “L1”, a distance for a light beam of a lower end of the enlarged image to reach the screen after being reflected upon the free shaped surface is “L2”, and a distance from an upper end of an image on the screen to a lower end thereof is “Dv”.

Abstract: A projection system includes a modulator and an Offner relay. The modulator is to modulate light in accordance with sub-frames of a frame of image data. The Offner relay is to differently aim, in accordance with each sub-frame, the light as modulated.

Abstract: A method for correcting a field-constant astigmatism of a projection objective of a microlithography projection exposure apparatus, the projection objective having an arrangement composed of a plurality of optical elements that images at least a part of an object onto an off-axis image field lying outside at least one optical axis, the arrangement of the plurality of optical elements having a plane of symmetry that is defined by the at least one optical axis and a center of the image field, includes adjusting a position of at least one element of the plurality of optical elements in such a way that at least one linear and/or quadratic astigmatism is produced that compensates the field-constant astigmatism at least partially. A projection objective of a projection exposure apparatus, as well as a microlithographic method for producing micropatterned components uses the method.

Abstract: The present invention provides a reflector having a light-diffusing property which suppresses inter-object reflection over a wide angle, and giving particularly high reflectance in an intended range of viewing angle; and to provide a reflection type liquid crystal display device using the same. The reflector includes a plurality of light-reflective concave portions. Each of the concave portions is formed so that an inclination angle (an angle between a plane tangential to a point on a concave surface and the surface of the base material) is maximum on a side portion of the curved surface, and so that the direction of the side portion having the maximum inclination angle is on a far side from a view point of an observer.

Abstract: A telescope has an entrance pupil region; a first concave mirror (M1) belonging to a first rotationally symmetric aspheric surface and reflecting light passing through the entrance pupil region; a second convex mirror (M2) belonging to a second rotationally symmetric aspheric surface and reflecting light reflected by the first mirror; a third convex mirror (M3) belonging to a third rotationally symmetric aspheric surface and reflecting light reflected by the second mirror; a fourth concave mirror belonging to a fourth rotationally symmetric aspheric surface and reflecting light reflected by the second mirror to an exit pupil. The first, second, third and fourth rotationally symmetric aspheric surfaces are centered on the symmetry axis of the third mirror. The first, second and fourth mirrors are centered along the first direction perpendicular to the optical axis and off-centered in a second direction perpendicular to the symmetry axis and to the first direction.

Abstract: Projection-optical systems are disclosed that have a large image-side NA of, e.g., ?0.45, and that allow inspection for surface-shape errors of reflecting surfaces with prescribed precision. A first reflective image-forming optical system forms an intermediate image of a first surface. A second reflective image-forming optical system forms a reduced image, on a second surface, of the intermediate image. The first reflective image-forming optical system has a first concave mirror, a second convex mirror, a third mirror, and a fourth concave mirror. The second reflective image-forming optical system has a fifth concave mirror, a sixth mirror, a seventh convex mirror, and an eighth concave mirror. If the absolute value of the center radius of curvature of the reflective surface of the second mirror is RM2, and the maximum object height on the first surface is H0, then the condition 1<RM2/H0<6 is satisfied.

Abstract: An imaging optical system includes a set of mirrors including at least three mirrors on a beam path. Only a last mirror on the beam path has a positive optical power and all other mirrors have negative optical power. The sum of the optical powers of the mirrors is zero. An external posterior aperture stop is on the beam path between the last mirror and the image plane. A back focal length of the optical system is equal to or greater than an effective focal length of the optical system. The field of view is large, and typically at least 30-40 degrees in one plane.

Abstract: Provided is a compact and bright imaging optical system having a high resolution. The imaging optical system includes three reflectors composed of a first reflector (1), a second reflector (2), and a third reflector (3) that are arranged in this order on an optical path of incident ray so as not to block the incident light. In the imaging optical system, in which light beams reflected by the three reflectors form an image plane (4), a convex mirror is used for any one of the first reflector (1) and the third reflector (3) and a concave mirror is used for the other thereof, and vertexes of a triangular dipyramid (6) are defined in terms of a central chief ray (5) by an appropriate point on the central chief ray (5) that is incident to the first reflection surface, a reflection point of each central chief ray on the first to third reflection surfaces, and an image forming point of the central chief ray.

Abstract: There is provided an EUV optical projection system. The system includes a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror situated in an optical path from an object plane to an image plane, for imaging an object in said object plane into an image in said image plane. The image has a width W and a secant length SL, and the width W is greater than about 2 mm.

Abstract: A projection optical system unit has a lower pedestal. The lower pedestal has first and second tubular portions opened to each other. An image formation device holding plate for a DMD is mounted on the first tubular portion at a side where one opening is formed. A mirror holder for a convex mirror is fixed on the second tubular portion at a side where the other opening is formed. A linear heat expansion coefficient in a specific direction of the lower pedestal component is set between 0.8×10?5 (1/K) and 3.0×10?5 (1/K).

Abstract: Optical mirror elements for high bandwidth free space optical communication are produced by an electroforming replication technique. Onto the precision surface of a mandrel that is a negative of the required optical surface a layer of metal is deposited forming an exact copy of the mandrel surface and is then separated to form the required optical element. During the production process the mandrel may be coated with a variety of materials that are then separated together with the electroformed optical element during the release step to form a monolithic structure that includes a reflective coating. The mandrel remains unchanged by the process and can then be re-used. The high cost of conventional polishing techniques is therefore limited to the production of the mandrel. The replication process results in the production of low cost optical elements suitable for high bandwidth free space optical data transmission.

Abstract: A projection optical system is provided for projecting a pattern on an object plane onto an image plane in a reduced size. The projection optical system has six reflective surfaces that include, in order of reflecting light from the object plane, a first reflective surface, a second convex reflective surface, a third convex reflective surface, a fourth reflective surface, a fifth reflective surface and a sixth reflective surface. An aperture stop is provided along an optical path between the first and second reflective surfaces. The following condition is met by the system, where L1 is an interval between the object plane and the surface apex that is the closest to the object plane, and L2 is an interval between the surface apex of the first reflective surface and the surface apex that is the closest to the object plane: 0.75 < L ? ? 1 L ? ? 2 < 1.25 .

Abstract: A wide field of view telescope having two concave and two convex reflective surfaces, each with an aspheric surface contour, has a flat focal plane array. Each of the primary, secondary, tertiary, and quaternary reflective surfaces are rotationally symmetric about the optical axis. The combination of the reflective surfaces results in a wide field of view in the range of approximately 3.8° to approximately 6.5°. The length of the telescope along the optical axis is approximately equal to or less than the diameter of the largest of the reflective surfaces.

Abstract: Example embodiments are directed to an off-axis projection optical system including first and second mirrors that are off-axially arranged. The tangential and sagittal radii of curvature of the first mirror may be R1t and R1s, respectively. The tangential and sagittal radii of curvature of the second mirror may be R2t and R2s, respectively. The incident angle of the beam from an object point to the first mirror 10 may be i1, and an incident angle of the beam reflected from the first mirror 10 to the second mirror 30 is i2. The values of R1t, R1s, R2t, R2s, i1 and i2 may satisfy the following Equation R1t cos i1=R2t cos i2 R1s=R1t cos2i1 R2s=R2t cos2i2.

Abstract: In a laser processing machine for processing workpieces using a laser beam (2), a telescope (1) for widening the laser beam (2) comprises an ellipsoidal mirror (3) and a paraboloidal mirror (4) whose axes of rotation (6) extend parallel, in particular collinear, to each other. This orientation permits precise production of the reflecting surfaces of the two mirrors through one single clamping (e.g. through diamond lathe) such that later adjustment is not required.

Abstract: A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M1˜M8) form a reduced image of a first surface on a second surface. A first reflecting image forming optical system (G1) forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) forms a second intermediate image (IMI2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6˜M8) of the third reflecting image forming optical system is greater than the number of reflecting mirrors (M1, M2) of the first reflecting image forming optical system.

Abstract: A telescope has a primary light mirror structure including a central base, and a concave primary mirror having a central opening in which the central base is received and extending radially outwardly from the central opening. The concave primary mirror has an inner margin adjacent to the central opening. A secondary light mirror structure includes a secondary mirror having a center and an outer periphery. The secondary mirror faces the concave primary mirror and the central base of the primary light mirror structure. A spider support extends between the inner margin of the concave primary mirror and the center of the secondary mirror facing the central base. The spider support does not extend to the outer periphery of the secondary mirror. The spider support has openings therethrough to permit light rays to pass between the secondary mirror and the central base of the primary light mirror structure.

Abstract: A catoptric reduction projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such that said mirrors basically form a coaxial system, wherein a third mirror in said six mirrors is located at a pupil position of said optical system.

Abstract: A three mirror anastigmatic optic (and corresponding method of making) comprising a primary mirror, a secondary mirror, a tertiary mirror, and a vertex common to the primary and tertiary mirrors.

Abstract: An EUV optical projection system includes at least six mirrors (M1, M2, M3, M4, M5, M6) for imaging an object (OB) to an image (IM). At least one mirror pair is preferably configured as an at least phase compensating mirror pair. The system is preferably configured to form an intermediate image (IMI) along an optical path from the object (OB) to the image (IM) between a second mirror (M2) and a third mirror (M3), such that a first mirror (M1) and the second mirror (M2) form a first optical group (G1) and the third mirror (M3), a fourth mirror (M4), a fifth mirror (M5) and a sixth mirror (M6) form a second optical group (G1). The system also preferably includes an aperture stop (APE) located along the optical path from the object (OB) to the image (IM) between the first mirror (M1) and the second mirror (M2). The second mirror (M2) is preferably convex, and the third mirror (M3) is preferably concave. The system preferably forms an image (IM) with a numerical aperture greater than 0.18.

Abstract: A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors and forms an intermediate image between the sixth mirror and the seventh mirror on an optical path, wherein a position in a height direction of a principal ray from an optical axis at each mirror displaces, and a displacement direction from the first mirror to the fourth mirror is reverse to that from the fifth mirror to the eight mirror, wherein the second mirror to the fifth mirror are a concave mirror, a convex mirror, a concave mirror and a concave mirror, and the seventh mirror to the eighth are a convex mirror and a concave mirror, and wherein the second mirror of the eight mirrors is located closest to the object surface side.

Abstract: There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective surfaces, through which light incident upon said catoptric projection optical system passes, is the same gap between a pair of reflective surfaces, through which light exited from the catoptric projection optical system passes.

Abstract: The invention relates to a compact, slimmed-down, low-cost optical system and electronic equipment that incorporates the same. The optical system at least comprises a stop 2, at least one object-side reflecting surface 12 located on the object side with respect to the stop 2 and inclined from the optical axis of the optical system, at least one image-side reflecting surface 22, 23 located on the image side of the optical system with respect to the stop 2 and inclined from the optical axis, and an image pickup device 3. Regarding all reflecting surfaces inclined from the optical axis in the optical system, the reference plane for each reflecting surface is given by a plane defined by an entrance-side axial chief ray and a reflection-side axial chief ray regarding each reflecting surface.

Abstract: An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective collimating-and-imaging module that receives the objective module output as an objective-end input and produces a collimating-end output, wherein the collimating-and-imaging module comprises a reflective triplet. A dispersive element receives the collimating-end output and produces a dispersive-end input into the collimating-and-imaging module that is reflected through the collimating-and-imaging module to produce a spectral-image-end output. An imaging detector receives the spectral-image-end output of the collimating-and-imaging module. The objective module may be a three-mirror anastigmat having an integral corrector mirror therein, or an all-reflective, relayed optical system comprising a set of five powered mirrors whose powers sum to substantially zero.

Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of ?0.14 or smaller.

Abstract: The present invention discloses an image-forming optical system provided with a plurality of curved mirrors whereby two points at different distances are made to have an optically conjugate relationship, sequentially starting with a first conjugate point which is nearer when an optical path is traced from the first conjugate point to a second conjugate point which is farther, comprises, a first mirror which reflects luminous flux from the first conjugate point to transform the luminous flux into substantially parallel luminous flux, and a second mirror which reflects the luminous flux reflected by the first mirror while keeping the luminous flux substantially parallel.

Abstract: It is an object of this invention to provide a high-quality, high-precision, large-screen display apparatus which can obtain a sufficient light beam reception angle with respect to an image display unit, improve imaging performance, and obtain a thin structure. There is provided a display apparatus for obliquely projecting light from an image display unit onto a projection optical system, wherein the projection optical system includes a plurality of aspherical curved mirrors and projects an image without distortion (1.2% or less).

Abstract: A projection optical system having a plurality of reflecting surfaces is disclosed in which a sufficiently large angle is provided between an incident side reference axis and an emerging side reference axis while tilt angles of the respective reflecting surfaces can remain small. The projection optical system projects luminous flux from an image forming element which forms an original image onto a projection surface. The incident side reference axis and the emerging side reference axis of the projection optical system are oblique to each other. The projection optical system has a plurality of reflecting surfaces each having a curvature. The reflecting surfaces are arranged such that the reference axis has at least one intersection in the projection optical system.

Abstract: A six-mirror catoptric projection optical system for projecting a reduced size of a pattern on an object onto an image plane includes first, second, third, fourth, fifth, and sixth mirrors from the image plane along an optical path, wherein the third and fourth mirrors are located between the fifth mirror and sixth mirror and wherein the catoptric projection optical system forms an intermediate image along the optical path from the third mirror to the fifth mirror.

Abstract: A reflective afocal telescope is described herein that has multiple field of views and can be packaged in a compact arrangement. In one embodiment, the reflective telescope includes two entrance pupils, a primary mirror, a secondary mirror, a tertiary mirror, a quaternary mirror, a moveable fold mirror and an exit pupil. The fold mirror can be moved into a non-bypass position and out of the way such that the incident beams transverse the primary, secondary, tertiary and quaternary mirrors and form a collimated region and a real external exit pupil. Or, the fold mirror can be moved into a bypass position where the incident beams bypass the primary, secondary, tertiary and quaternary mirrors and instead reflect off the fold mirror directly to the exit pupil. In an alternative embodiment, the tertiary mirror instead of the fold mirror can be moved into either the bypass position or the non-bypass position.

Abstract: An all-reflective telescope has, in order, a positive-optical-power primary mirror, a negative-optical-power secondary mirror, a positive-optical-power tertiary mirror, a negative-optical-power quaternary mirror, and a positive-optical-power field lens. The mirrors and lens are axisymmetric about a beam axis. The light beam is incident upon an infrared detector after reflecting from the quaternary mirror. A cooling housing encloses the detector and the field lens, but does not enclose any of the mirrors. An uncooled warm-stop structure outside of the cooling housing but in a field of view of the detector is formed as a plurality of facets with reflective surfaces oriented to reflect a view of an interior of the cooling housing back to the interior of the cooling housing.

Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system so as to sequentially reflect light from an object side to an image side, and being arranged so that light from the object surface to the first mirror may intersect light from the second mirror to the third mirror.

Abstract: A device with at least one light source, comprising several individual light sources (3, 3?) and an optical arrangement. At least two individual light sources (3, 3?) comprise a light-emitting surface with different, long axes perpendicular to each other. At least two individual light sources (3, 3?) form at least one individual light source grouping (4, 4?), which is arranged coaxially to the optical axis (5) of an astigmatic optical element (7). Said astigmatic optical element (7) is impinged upon by the emitted bundles (2) from the individual light sources. One axis of the emission surface of an individual light source (3) lies on the meridional plane of the astigmatic optical element (7). Said plane is defined through the mid-point of the emission surface. The other axis of the emission surface lies on the corresponding sagittal plane.

Abstract: Two reflection surfaces that are a first reflection surface (2) and a second reflection surface (3), each in a non-axisymmetric form, are disposed in the stated order in a direction in which light fluxes travel, and bring light fluxes from an object into focus on an image surface (4). The first reflection surface (2) and the second reflection surface (3) are provided eccentrically, and each of the first reflection surface (2) and the second refection surface (3) is concave in a cross-sectional shape taken along a plane containing a center of the image surface (4) and vertices of the reflection surfaces (2, 3). This ensures that light fluxes are guided to the image surface without being blocked, whereby an excellent image can be formed. Thus, a reflective optical device with a wider angle and improved performance can be provided.

Abstract: A projection objective formed from six mirrors arranged in a light path between an object plane and an image plane is provided. The projection objective, in some examples, is characterized by having a physical distance between the vertexes of adjacent mirrors that is large enough to allow for the six mirrors to have sufficient thickness and stability properties to prevent surface deformations due to high layer tensions. In some embodiments, mirror thickness are such that surface deformations are prevented with mirrors having layer tensions lower than 350 MPa. Mirror surfaces may comprise multilayer systems of Mo/Be or Mo/Si layer pairs. In some examples, the physical distance between a vertex of the third mirror and a vertex of the sixth mirror (S3S6) satisfies the following relationship: 0.3×(a used diameter of the third mirror S3+a used diameter of the sixth mirror S6)<S3S6.

Abstract: An all-reflective, relayed optical system is arranged along a beam path. The optical system includes a first mirror having positive optical power, and a second mirror having a negative optical power, wherein the second mirror receives the beam path reflected from the first mirror and wherein an intermediate image is formed after the beam path reflects from the second mirror. The optical system further includes a third mirror having positive optical power, wherein the intermediate image on the beam path is reflected from the third mirror; a fourth mirror having a negative optical power, wherein the beam path reflected by the third mirror is reflected by the fourth mirror, and a fifth mirror having positive optical power, wherein the beam path reflected by the fourth mirror is reflected by the fifth mirror to an image location.

Abstract: A method for manufacturing an apparatus and the apparatus being configured to convert a first distribution of an input radiation to a second distribution of output radiation. The method consists of the steps of generating a two-dimensional representation of at least three active optical surfaces of an optical device including calculating a segment of a first surface based on edge ray sets as a first generalized Cartesian oval, calculating a segment of an entry surface based on the edge ray set as a second generalized Cartesian oval, calculating a segment of a second surface based on the edge ray set as a third generalized Cartesian oval, and successively repeating the steps of calculating the segment of the first surface and calculating the segment of the second surface in a direction towards a source, and rotationally sweeping the two-dimensional representation about a central axis providing a three-dimensional representation of the optical device.

Abstract: An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first, convex mirror and a second, concave mirror. The second partial objective, which projects the intermediate image onto a second field plane, has a third and a fourth mirror, both concave. All of the four mirrors have central mirror apertures. The axial distance between the first and second mirrors is in a ratio between 0.95 and 1.05 relative to the distance between the second mirror and the intermediate image. The axial distance ZM3-IM between the third mirror and the second field plane conforms to the relationship 0.03 · Du M3 + 5.0 ? ? ? mm < Z M3 - IM < 0.25 · Du M3 tan ? ( arcsin ? ( NA ) ) . NA represents the numerical aperture NA in the second field plane, and DuM3 represents the diameter of the third mirror.

Abstract: An optical element formed from a transparent optical material includes two refraction surfaces, a first reflection surface group having a plurality of internal reflection surfaces arrayed in a predetermined direction, a second reflection surface group opposing the first reflection surface group and having at least one internal reflection surface and two side surfaces opposing each other in parallel to the predetermined direction. Light incident from one of the refraction surfaces is alternately reflected by the internal reflection surfaces of the first reflection surface group and the internal reflection surface of the second reflection surface group and guided to the other refraction surface.

Abstract: An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective collimating-and-imaging module that receives the objective module output as an objective-end input and produces a collimating-end output, wherein the collimating-and-imaging module comprises a reflective triplet. A dispersive element receives the collimating-end output and produces a dispersive-end input into the collimating-and-imaging module that is reflected through the collimating-and-imaging module to produce a spectral-image-end output. An imaging detector receives the spectral-image-end output of the collimating-and-imaging module. The objective module may be a three-mirror anastigmat having an integral corrector mirror therein, or an all-reflective, relayed optical system comprising a set of five powered mirrors whose powers sum to substantially zero.

Abstract: It is an object of this invention to provide a high-quality, high-precision, large-screen display apparatus which can obtain a sufficient light beam reception angle with respect to an image display unit, improve imaging performance, and obtain a thin structure. There is provided a display apparatus for obliquely projecting light from an image display unit onto a projection optical system, wherein the projection optical system includes a plurality of aspherical curved mirrors and projects an image without distortion (1.2% or less).

Abstract: Light-reflective concave portions are disposed on the surface of a substrate. The concave portions have a first and second vertical section perpendicular to each other. The first vertical section has an internal shape defined by a first curve and a second curve, the first curve extending from one point on the peripheral edge of the concave portion to the deepest point of the concave portion, and the second curve extending continuously from the first curve and from the deepest point of the concave portion to another point on the peripheral edge of the concave portion. The average of the absolute value of an inclination angle of the first curve is larger than that of the second curve relative to the substrate surface. The second vertical section has an internal shape defined by a shallow curve and deep curves formed at both sides of the shallow curve.

Abstract: A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object surface and image surface includes four or more mirrors arranged substantially as a coaxial system to reflect light from an object side to an image side, reflection surfaces on the four or more mirrors forming the same direction for forming a reflection angle.

Abstract: An optical system (in FIGS. 1A and 1B) wherein a rectilinear laser beam of homogeneous energy distribution is defined for annealing a non-single crystalline semiconductor film (a surface to-be-irradiated 1108), is constructed of reflectors (1106, 1107 etc.) easily and inexpensively without including lenses of transmission type. The rectilinear laser beam can be defined having a length of at least 600 (mm) which corresponds to the shorter latus of a large-sized substrate for mass production.

Abstract: It is an object to provide a reflector plate capable of suppressing coloring caused by interference and enhancing visibility. A plurality of first reflecting units 10 and a plurality of second reflecting units 11 are provided together. In this case, a reflecting plane 11a of the second reflecting unit 11 is set to be smaller in diameter and have smaller difference in in-plane height than those of a reflecting plane 10a of the first reflecting unit 10, and an arrangement interval between the second reflecting units 11 is set to be greater than that between the first reflecting units 10.