By Displacement Of Stylus Or Lever Patents (Class 361/283.2)
  • Patent number: 11209296
    Abstract: A system for non-intrusively measuring process fluid pressure within a process fluid conduit is provided. The system includes a measurement bracket configured to couple to an external surface of the process fluid conduit. The measurement bracket generates a variable gap based on deformation of the process fluid conduit in response to process fluid pressure therein. A gap measurement system is coupled to the measurement bracket and provides an electrical signal based on a measurement of the variable gap. A controller is coupled to the gap measurement system and is configured to calculate and provide a process fluid pressure output based on the electrical signal and information relative to the process fluid conduit.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: December 28, 2021
    Assignee: Rosemount Inc.
    Inventor: Charles R. Willcox
  • Patent number: 11092617
    Abstract: A gyro sensor includes: a spring having an inner span beam connected to an outer span beam via a turnaround beam; and a fixed driver that laterally faces the outer beam. A first beam is provided to the structure side of the outer beam so as to face the outer beam. T1 is a width of a space between the outer beam and the structure, T2 is a width of a space between the inner and outer beams, and T2<T1.
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: August 17, 2021
    Inventor: Teruo Takizawa
  • Patent number: 11036312
    Abstract: An electronic ink cartridge is provided, which improves the mass productivity of a position pointer and which ensures reliability of a characteristic of a pressure sensor to detect writing pressure. The electronic ink cartridge includes a core member provided so as to extend outwardly from a distal end portion of a tubular member in a direction of a center axis of the tubular member, a pressure sensor accommodated in a hollow portion of the tubular member to sense pressure applied to the core member, a connection member provided fixedly on the tubular member to interpose the pressure sensor between the connection member and the core member along the direction of the center axis of the tubular member, and a connection terminal, which is formed on a proximal end face of the connection member and from which an electric characteristic corresponding to the pressure sensed by the pressure sensor is extracted.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: June 15, 2021
    Assignee: Wacom Co., Ltd.
    Inventor: Masayuki Obata
  • Patent number: 11029768
    Abstract: An electronic ink cartridge is provided, which improves the mass productivity of a position pointer and which ensures reliability of a characteristic of a pressure sensor to detect writing pressure. The electronic ink cartridge includes a core member provided so as to extend outwardly from a distal end portion of a tubular member in a direction of a center axis of the tubular member, a pressure sensor accommodated in a hollow portion of the tubular member to sense pressure applied to the core member, a connection member provided fixedly on the tubular member to interpose the pressure sensor between the connection member and the core member along the direction of the center axis of the tubular member, and a connection terminal, which is formed on a proximal end face of the connection member and from which an electric characteristic corresponding to the pressure sensed by the pressure sensor is extracted.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: June 8, 2021
    Assignee: Wacom Co., Ltd.
    Inventor: Masayuki Obata
  • Patent number: 10423246
    Abstract: An input device and an electronic apparatus for receiving a signal from the input device are provided. The input device includes a conductive tip configured to receive an electric field transmission signal generated from at least one electrode of the electronic apparatus, a circuit configured to generate an electric field response signal corresponding to the electric field transmission signal, a variable capacitor disposed between the conductive tip and the circuit and configured to vary the electric field response signal according to writing pressure applied to the conductive tip, and a case in which the circuit and the variable capacitor are disposed. The variable capacitor includes a first electrode and a second electrode coupled to the circuit, a conductive variable electrode disposed to face the first electrode, and a dielectric disposed between the first electrode and the conductive variable electrode. The first electrode and the second electrode are fixed to the case.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: September 24, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kang-nam Kim
  • Patent number: 10318022
    Abstract: An apparatus includes a housing, a tip that moves with respect to the housing based on applied contact force and a pressure sensor that detects the force applied on the tip. The pressure sensor includes a first element integrated or fixed to the tip and a second element that is stationary with respect to the housing and positioned to face the first element. The first element is formed from a rigid material that is conductive. The second element is conductive and has elastic properties. In addition, one of the first element or the second element is coated with a non-conductive layer. The first element moves toward the second element based on force applied on the tip and deforms the second element based on the force. The sensor additionally includes a circuit to detect capacitance between the first element and the second element.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: June 11, 2019
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Vadim Mishalov, Ahia Peretz
  • Patent number: 10309849
    Abstract: The disclosure addresses a force sensor that is scalable in size and adaptable to a variety of form factors, including those suitable for use in an input device for a computer or other processing system, and in some cases including those of the configuration normally referred to as a computer mouse. The force sensor will include at least two structural members that are cooperatively attached one another as to be displaced from one another in response to a force acting upon one of the structural members. In some examples, the engagement between the two structural members will be specifically configured to allow such displacement in response to forces acting laterally on the force sensor. The force sensor will also include one or more sensing mechanisms to provide a measurement of the sensed deflection.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: June 4, 2019
    Assignee: Apple Inc.
    Inventors: Lawrence J. Baskett, David T. Amm
  • Patent number: 10145686
    Abstract: In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+?1) occurs in the beam 4a and a compressive stress (??2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: December 4, 2018
    Assignee: HITACHI, LTD
    Inventors: Munenori Degawa, Heewon Jeong
  • Patent number: 9841828
    Abstract: A handheld device includes a housing, an elongated rod movable with respect to the housing, a pyramid structure and a circuit. The elongated rod includes a tip at a first end and a compressible element at a second end. The compressible element includes conductive material configured to press against the electrodes based on a force vector applied on the tip. The pyramid structure includes at least three walls and an electrode on each of the at least three walls and is fixed or integrated with the housing. The circuit transmit signals on the compressible element or the electrodes, detect outputs from the electrodes and provide pressure related information based on the outputs.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: December 12, 2017
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Ahia Peretz, Vadim Mishalov
  • Patent number: 9823141
    Abstract: A sensing device has a first substrate, a second substrate, a plurality of sets of first electrodes, a plurality of second electrodes, a plurality of first axis signal lines, a plurality of second axis signal lines, and a plurality of second signal lines. The second substrate is above the first substrate and has a reset structure. The second electrodes are on the first surface of the second substrate in array. Each set of first electrodes is on the first substrate in array, corresponding to one of the plurality of second electrodes, and having at least one first axis electrode and at least one second axis electrode. The first axis electrode and the second axis electrode both partially overlap with the corresponding second electrode.
    Type: Grant
    Filed: January 25, 2016
    Date of Patent: November 21, 2017
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Szu-Ju Li, Jung-Hao Wang, Hsin-Hung Pan, Meng-Song Yin
  • Patent number: 9778123
    Abstract: A position indicator includes a capacitor having a capacitance that changes in correspondence to a force applied to one end part of a housing. The capacitor is configured by a pressure detecting chip that includes a first electrode and a second electrode disposed opposite to the first electrode with a predetermined distance defined therebetween to have capacitance Cv formed between the first electrode and the second electrode. The capacitance Cv changes when the force applied to the one end part of the housing is transmitted to the first electrode to thereby change a relationship (e.g., the distance) between the two electrodes. A pressure transmitting member having predetermined elasticity is disposed on the first electrode such that the force applied to the one end part of the housing is transmitted to the first electrode of the semiconductor element via the pressure transmitting member.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: October 3, 2017
    Assignee: Wacom Co., Ltd.
    Inventors: Toshihiko Horie, Hidetaka Takiguchi
  • Patent number: 9753586
    Abstract: A touch-sensitive device includes a touch panel, drive unit, and measurement unit. A touch applied to a given node of the panel changes a capacitive coupling between a given drive and sense electrode of the touch panel. The drive unit delivers first and second drive signals, having different first and second frequencies, to first and second drive electrodes respectively at the same or overlapping times. The measurement unit receives a first response signal from a sense electrode, and analyzes the signal using maximum likelihood estimation to determine the coupling capacitance between the first drive electrode and the sense electrode, and between the second drive electrode and the sense electrode. More drive electrodes, including in some cases all the drive electrodes, can be driven with unique drive frequencies, and more sense electrodes, including in some cases all the sense electrodes, can be sensed by the measurement unit.
    Type: Grant
    Filed: October 8, 2009
    Date of Patent: September 5, 2017
    Assignee: 3M Innovative Properties Company
    Inventors: Rachael P. Marino, Richard A. Peterson, Jr.
  • Patent number: 9702778
    Abstract: A position indicator includes a capacitor having a capacitance that changes in correspondence to a force applied to one end part of a housing. The capacitor is configured by a pressure detecting chip that includes a first electrode and a second electrode disposed opposite to the first electrode with a predetermined distance defined therebetween to have capacitance Cv formed between the first electrode and the second electrode. The capacitance Cv changes when the force applied to the one end part of the housing is transmitted to the first electrode to thereby change a relationship (e.g., the distance) between the two electrodes. A pressure transmitting member having predetermined elasticity is disposed on the first electrode such that the force applied to the one end part of the housing is transmitted to the first electrode of the semiconductor element via the pressure transmitting member.
    Type: Grant
    Filed: March 8, 2016
    Date of Patent: July 11, 2017
    Assignee: Wacom Co., Ltd.
    Inventors: Toshihiko Horie, Hidetaka Takiguchi
  • Patent number: 9435823
    Abstract: A physical quantity sensor includes: an element piece including a movable weight and movable electrode portions which are provided to extend from the movable weight; fixed electrode portions which are provided in a first direction in which the element piece is displaced, with a gap d1 interposed therebetween; and fixed portions which are provided to face an end portion of the element piece, in which a recess is provided on the end portion of the movable weight in a position facing the fixed portions, a first stopper portion which extends towards the movable weight is provided on the fixed portion, and a tip end of the first stopper portion is inserted into the recess, and a gap d2 between the tip end and the movable weight is narrower than the gap d1.
    Type: Grant
    Filed: January 10, 2014
    Date of Patent: September 6, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Atsuki Naruse
  • Patent number: 9430058
    Abstract: A touch stylus capable of detecting pressure on its tip is disclosed in the present disclosure. The touch stylus includes a body, a tip, and a pressure sensing module disposed between the body and the tip for detecting a pressure on the tip. The pressure sensing module includes a lighting unit, a pressure sensing unit connected to the tip, and a controller electrically connected to the lighting unit and the pressure sensing unit. The pressure sensing unit detects a movement of the tip relative to the body, and generates a corresponding electrical signal. The controller receives the electrical signal to drive the lighting unit for generating a corresponding optical signal. A scintillating frequency of the optical signal and a value of the electrical signal are in direct proportion, and an optical detector can transform the optical signal into the pressure on the tip.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: August 30, 2016
    Assignee: Wistron Corporation
    Inventors: Kuo-Hsing Wang, Pei-Chen Chin, Pin-Hsien Su, Wen-Chin Wu, Yi-Sheng Kao
  • Patent number: 9354720
    Abstract: In an example, an isometric input device configured to control a user interface indicator of an electronic device includes a plurality of sensor electrodes, a control member, a conductive support substrate, and a compliant member. The plurality of sensor electrodes is disposed on a sensor substrate. The control member is mechanically coupled to the sensor substrate over at least a portion of the plurality of sensor electrodes. The compliant member is disposed between the sensor substrate and the conductive support substrate. The compliant member defines a gap between the sensor substrate and the conductive support substrate.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: May 31, 2016
    Assignee: SYNAPTICS INCORPORATED
    Inventors: Lin-Hsiang Hsieh, Tzeng-Fu Kao, Chao-Wei Lee
  • Patent number: 9297633
    Abstract: An electronic ink cartridge includes, in a direction of a central axis within a cylindrical body, a core body extended out from a distal end of the cylindrical body, a coupling member disposed on a side of a proximal end of the cylindrical body, a coil housed between the core body and the coupling member and having a predetermined inductance, and a pressure sensitive element whose capacitance changes according to pressure applied to the core body. Two terminals of the coil are electrically connected respectively to two terminals of the pressure sensitive element to thereby form two terminals of a resonance circuit formed by the coil and the pressure sensitive element. A connecting terminal electrically connected to at least one of the two terminals of the resonance circuit is disposed on a proximal end surface side of the coupling member to be accessible thereon from outside.
    Type: Grant
    Filed: June 21, 2013
    Date of Patent: March 29, 2016
    Assignee: Wacom Co., Ltd.
    Inventor: Masayuki Obata
  • Patent number: 9268417
    Abstract: A position pointer is provided for use with a position detection sensor, capable of achieving power saving. The position pointer includes: a first electrode configured to receive an AC signal from a position detection sensor; a transmission signal production circuit configured to produce a position signal, based on which the position detection sensor detects a position of the position pointer; a second electrode different from the first electrode and configured to transmit the position signal to the position detection sensor; a signal detection circuit configured to detect whether or not the AC signal from the position detection sensor is received through the first electrode; and a transmission controlling circuit configured to control transmission of the position signal through the second electrode to the position detection sensor in response to an output from the signal detection circuit.
    Type: Grant
    Filed: March 14, 2012
    Date of Patent: February 23, 2016
    Assignee: Wacom Co., Ltd.
    Inventors: Yasuo Oda, Masaki Yagi, Yoshihisa Sugiyama
  • Patent number: 9269488
    Abstract: A position pointer is disclosed, in which an electronic ink cartridge of an electromagnetic induction type is accommodated. The electronic ink cartridge includes a resonance circuit having a coil and a capacitor circuit, and is configured to detect pressure applied to a core member accommodated in the position pointer based on a variation of a resonance frequency of the resonance circuit. The cartridge includes a tubular member, in which the core member and the coil are accommodated such that the coil is positioned between the core member, which extends outwardly from one end of the tubular member, and the capacitor circuit along a direction of a center axis of the tubular member. The cartridge also includes a connection member in the tubular member, which electrically connects a first end and a second end of the coil to a first terminal and a second terminal of the capacitor circuit, respectively.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: February 23, 2016
    Assignee: Wacom Co., Ltd.
    Inventor: Masayuki Obata
  • Patent number: 9239639
    Abstract: An electronic stylus device includes one or more mechanisms that deform to protected an electronic force sensor. After the mechanism deforms to relieve force applied to a tip of the stylus, a hard stop may engage to arrest further movement of a shaft transferring force from the tip to the force sensor. The intermediate range of forces that may be relieved by the mechanism, in addition to providing the electronic force sensor, enables less stringent manufacturing tolerances to be used with the hard stop.
    Type: Grant
    Filed: June 24, 2014
    Date of Patent: January 19, 2016
    Assignee: AMAZON TECHNOLOGIES, INC.
    Inventors: Timothy Michael Vanderet, Miguel Angel Morales, Joshua Danel Lemons, Srivatsan Subbarayan
  • Patent number: 9121781
    Abstract: A force gauge assembly used to measure forces or spring rate of an object utilizing a diaphragm strain gauge for mechanically compensating for loads not being centrally applied to the gauge. The construction of the gauge provides readings that will be substantially the same as if the load were applied in perfect alignment. The gauge utilizes internal components that remain the same even though the force gauge is adaptable for measuring different objects.
    Type: Grant
    Filed: March 28, 2013
    Date of Patent: September 1, 2015
    Assignee: Compression Matters Corporation
    Inventor: Robert Henry Niemeyer, III
  • Patent number: 8638541
    Abstract: An input device includes a movable electrode and a capacitance detection electrode provided on the upper and lower sides of the resin film substrate, respectively. The movable electrode includes a moving section, and an immobile section. The moving section includes a protrusion. The end of the protrusion comes in contact with the upper side of the resin film substrate in an initial state, or is bonded to the upper side of the resin film substrate. The protrusion has a curved shape so that the side surface of the protrusion is depressed relative to a straight line that connects the end and the base of the protrusion having an approximately trapezoidal cross-sectional shape, or at least one step is formed on the side surface of the protrusion, and the width of the protrusion increases stepwise from the end to the base of the protrusion.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: January 28, 2014
    Assignee: Oga, Inc.
    Inventor: Masanori Mizushima
  • Patent number: 7721412
    Abstract: A process for the manufacture of small sensors with reproducible surfaces, including electrochemical sensors. One process includes forming channels in the surface of a substrate and disposing a conductive material in the channels to form an electrode. The conductive material can also be formed on the substrate by other impact and non-impact methods. In a preferred embodiment, the method includes cutting the substrate to form a sensor having a connector portion and a transcutaneous portion, the two portions having edges that define one continuous straight line.
    Type: Grant
    Filed: August 16, 2005
    Date of Patent: May 25, 2010
    Assignee: Abbott Diabetes Care Inc.
    Inventors: James Say, Michael F. Tomasco, Adam Heller, Yoram Gal, Behrad Aria, Ephraim Heller, Phillip John Plante, Mark S. Vreeke
  • Patent number: 7493821
    Abstract: This invention relates generally to a micromachined acoustic transducer that has a scalable array of sealed cavities and perforated members forming capacitive cells that convert the electrical signal to acoustic signal or vice versa. It also relates to the method and more particularly to a micromachined acoustic transducer which includes a plurality of micromachined membranes and perforated members forming capacitive cells and more particularly to an acoustic transducer in which the capacitive cells are connected in a scalable array whereby electrical signals are applied to the said array and converted to acoustic signals. The transducer can either be used as an acoustic actuator or a microphone.
    Type: Grant
    Filed: April 16, 2005
    Date of Patent: February 24, 2009
    Inventor: Yunlong Wang
  • Patent number: 7400488
    Abstract: A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: July 15, 2008
    Assignee: HRL Laboratories, LLC
    Inventors: Jonathan J. Lynch, Sarabjit Mehta, John Pasiecznik, Peter Petre
  • Patent number: 6973706
    Abstract: A process for the manufacture of small sensors with reproducible surfaces, including electrochemical sensors. One process includes fanning channels in the surface of a substrate and disposing a conductive material in the channels to form an electrode. The conductive material can also be formed on the substrate by other impact and non-impact methods. In a preferred embodiment, the method includes cutting the substrate to form a sensor having a connector portion and a transcutaneous portion, the two portions having edges that define one continuous straight line.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: December 13, 2005
    Assignee: TheraSense, Inc.
    Inventors: James Say, Michael F. Tomasco, Adam Heller, Yoram Gal, Behrad Aria, Ephraim Heller, Phillip John Plante, Mark S. Vreeke
  • Patent number: 6853369
    Abstract: The present invention provides a variable capacity condenser having fewer components. A variable capacity condenser according to the present invention comprises a dielectric substance, two electrodes, and a flexible electrode. The dielectric substance has two end faces. The two electrodes are disposed on one end face of the dielectric substance. The flexible electrode faces the other end face of the dielectric substance. The flexible electrode is pressible by a pressing member to vary a distance between at least a portion of the flexible electrode and the other end face of the dielectric substance.
    Type: Grant
    Filed: April 19, 2001
    Date of Patent: February 8, 2005
    Assignee: Wacom Co., Ltd.
    Inventors: Yasuyuki Fukushima, Hiroyuki Fujitsuka
  • Patent number: 6684711
    Abstract: A capacitor industrial process control transmitter includes a three-phase excitation circuit to charge a sensing capacitor and a compensation capacitor of the transmitter and transfer charges to an integrator. The sensing capacitor is charged during the first phase. During the second phase, the voltage to the sensing capacitor is reversed, and the charge on the sensing capacitor is pumped to the integrator. Also, the compensation capacitor is charged with the reversed voltage during the second phase. During the third phase, the voltage to the compensation capacitor is changed, and the charge on the compensation capacitor is pumped to the integrator.
    Type: Grant
    Filed: August 23, 2001
    Date of Patent: February 3, 2004
    Assignee: Rosemount Inc.
    Inventor: Rongtai Wang
  • Patent number: 6683780
    Abstract: A displacement responsive device e.g. a measurement probe (110) is disclosed. Displacement of a stylus (130) causes resilient movement of a carriage (134) supported by planar springs (112) and (114). This movement is detected by a capacitance sensor (160), formed from two cylinders (164) and (166). The cylinders move in at least three degrees of freedom and changes in their capacitance during the said movement can be determined by a circuit (e.g. FIG. 5). Movement in x, y and z directions can be sensed.
    Type: Grant
    Filed: September 20, 2002
    Date of Patent: January 27, 2004
    Assignee: Renishaw PLC
    Inventors: David Kenneth Thomas, Andrew Loach, Graham Richard Ferguson
  • Patent number: 6658938
    Abstract: A transducer with at least one variable-area capacitor comprising a flexible electrode with a surface facing a surface of a cooperating rigid electrode and an electret affixed to a portion of one of said surfaces, wherein said surface of said rigid electrode has a contoured region selected to increase a region of substantially fixed capacitance spacing as said flexible electrode deflects in response to an applied stress.
    Type: Grant
    Filed: March 6, 2002
    Date of Patent: December 9, 2003
    Inventor: Robert B. McIntosh
  • Patent number: 6622368
    Abstract: A method of manufacturing a transducer of the type having a diaphragm (11) with a predetermined tension. After the transducer has been manufactured with its basic structure the diaphragm is adjusted to have a predetermined tension, which is preferably low in order to obtain a high sensitivity. Two embodiments are disclosed. One embodiment includes heating the transducer to a temperature above the glass transition temperature of the material (12, 14) retaining the diaphragm. Another embodiment includes measuring the actual tension of the diaphragm, which can be used to calculate an adjustment of the thickness of the diaphragm resulting in the desired tension.
    Type: Grant
    Filed: January 5, 2001
    Date of Patent: September 23, 2003
    Assignee: SonionMEMS A/S
    Inventors: Matthias M├╝llenborn, Pirmin Rombach
  • Publication number: 20030048592
    Abstract: A displacement responsive device e.g. a measurement probe (110) is disclosed. Displacement of a stylus (130) causes resilient movement of a carriage (134) supported by planar springs (112) and (114). This movement is detected by a capacitance sensor (160), formed from two cylinders (164) and (166). The cylinders move in at least three degrees of freedom and changes in their capacitance during the said movement can be determined by a circuit (e.g. FIG. 5). Movement in x, y and z directions can be sensed.
    Type: Application
    Filed: September 20, 2002
    Publication date: March 13, 2003
    Inventors: David Kenneth Thomas, Andrew Loach, Graham Richard Ferguson
  • Patent number: 6441449
    Abstract: A micro electro-mechanical systems device having variable capacitance is controllable over the full dynamic range and not subject to the “snap effect” common in the prior art. The device features an electrostatic driver (120) having a driver capacitor of fixed capacitance (121) in series with a second driver capacitor of variable capacitance (126). A MEMS variable capacitor (130) is controlled by applying an actuation voltage potential to the electrostatic driver (120). The electrostatic driver (120) and MEMS variable capacitor (130) are integrated in a single, monolithic device.
    Type: Grant
    Filed: October 16, 2001
    Date of Patent: August 27, 2002
    Assignee: Motorola, Inc.
    Inventors: Ji-Hai Xu, Jenn-Hwa Huang, John Michael Parsey, Jr.
  • Patent number: 6373682
    Abstract: A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage variable controlled capacitor device is provided. This device can store high energy over a wide range while using relatively low electrostatic operating voltages. The MEMS device comprises a microelectronic substrate, a substrate signal electrode, and one or more substrate control electrodes. The MEMS device also includes a moveable composite overlying the substrate, having a composite signal electrode, one or more composite control electrodes, and a biasing element. In cross-section, the moveable composite comprises at least one electrode layer and, in most instances, a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied.
    Type: Grant
    Filed: December 15, 1999
    Date of Patent: April 16, 2002
    Assignee: MCNC
    Inventor: Scott Halden Goodwin-Johansson
  • Patent number: RE41521
    Abstract: The present invention provides a variable capacity condenser having fewer components. A variable capacity condenser according to the present invention comprises a dielectric substance, two electrodes, and a flexible electrode. The dielectric substance has two end faces. The two electrodes are disposed on one end face of the dielectric substance. The flexible electrode faces the other end face of the dielectric substance. The flexible electrode is pressible by a pressing member to vary a distance between at least a portion of the flexible electrode and the other end face of the dielectric substance.
    Type: Grant
    Filed: February 8, 2007
    Date of Patent: August 17, 2010
    Assignee: Wacom Co., Ltd.
    Inventors: Yasuyuki Fukushima, Hiroyuki Fujitsuka