Abstract: A vibrating element includes a movable part, a substrate made of metal, a driving source, and a holding member holding the substrate. The substrate includes a pair of support beam parts, a support part, and a torsion beam part. Each of the support beam parts has a first end part and a second end part. The support part supports the first end part. The torsion beam part swingably supports the movable part. The second end part of each of the support beam parts is provided with a fixing part fixed to the holding member. By adjusting an inclination with respect to the holding member, the fixing part is fixed to the holding member in a state in which each of the support beam parts applies tension to the torsion beam part in a direction away from the movable part in a first direction in which the torsion beam part extends.

Abstract: Systems and methods for determining whether or not a temperature sensor is degraded are presented. In one example, a determination of degradation of the temperature sensor is based on a difference between a temperature determined from output of the temperature sensor and an estimate of a temperature of a pressure sensor.

Abstract: The present disclosure provides one embodiment of an integrated microphone structure. The integrated microphone structure includes a first silicon substrate patterned as a first plate. A silicon oxide layer formed on one side of the first silicon substrate. A second silicon substrate bonded to the first substrate through the silicon oxide layer such that the silicon oxide layer is sandwiched between the first and second silicon substrates. A diaphragm secured on the silicon oxide layer and disposed between the first and second silicon substrates such that the first plate and the diaphragm are configured to form a capacitive microphone.

Abstract: A fabric-based pressure sensor array includes: (1) a first layer including M elongated conductive strips coated thereon; (2) a second layer including N elongated conductive strips coated thereon, the M elongated conductive strips extending crosswise relative to the N elongated conductive strips to define M×N intersections; and (3) a unitary textile sheet extending between the first layer and the second layer so as to overlap the M×N intersections, the textile sheet having a variable resistivity in response to applied pressure so as to define M×N pressure sensors at locations corresponding to the M×N intersections.

Abstract: A wireless communication device includes a pressure sensor to generate a first signal in response to a pressure variation. A variable offset capacitor is coupled in parallel with the pressure sensor. A first analog-to-digital converter (ADC) is coupled to the variable offset capacitor and to convert the first signal to a digital signal. The pressure sensor is a capacitive pressure sensor. The variable offset capacitor is a digitally controlled variable capacitor and the ADC is a low-resolution and low-power ADC.

Abstract: Embodiments disclosed herein include a sensor assembly. In an embodiment, the sensor assembly comprises a sensor module and a housing assembly. In an embodiment, the sensor module comprises a substrate, a capacitor with a first electrode and a second electrode on the substrate, and a capacitive-to-digital converter (CDC) electrically coupled to the first electrode and the second electrode. In an embodiment, the housing assembly is attached to the sensor module and comprises a shaft, wherein the shaft is hollow, and a cap over a first end of the shaft, wherein the cap has an opening to expose the capacitor.

Abstract: A muscle contraction detection sensor for detecting a muscle contraction that includes: a substrate to be mounted facing a muscle to be detected; at least two pressing members that are disposed on the substrate and are to be pressed against the muscle; and at least two reaction force detection units configured to detect respective reaction forces received by the pressing members, wherein the pressing members include a first pressing member and a second pressing member, the reaction force detection units include a first reaction force detection unit and a second reaction force detection unit, a muscle contraction is detected based on a change in a difference between, or a change in ratios of, the reaction force received by the first pressing member detected by the first reaction force detection unit and the reaction force received by the second pressing member detected by the second reaction force detection unit.

Abstract: A biological information detecting apparatus includes: an LC resonant pressure sensor including a resonant circuit including a capacitor and an inductor, and having a resonant frequency that changes depending on a change in external pressure applied to the capacitor; and an integrated circuit (IC) chip package including a coil type antenna radiating a radio frequency (RF) signal within a preset frequency band, wherein a change in the resonant frequency results in a change in a power transmission rate depending on a inductive coupling between the resonant frequency and a frequency of the RF signal. The IC chip package includes the coil type antenna disposed in a region overlapping the LC resonant pressure sensor in a plan view of the IC chip package.

Abstract: A double-membrane capacitive pressure sensor comprising a glass substrate, wherein a shallow groove is formed in the center of the glass substrate; a shallow groove through-hole is formed in the center of the shallow groove, and the shallow groove through-hole extends from the bottom surface of the shallow groove to the bottom surface of the glass substrate; a capacitor C1 capable of measuring the low-pressure difference and a capacitor C2 capable of measuring the high-pressure difference are arranged above the shallow groove; the capacitor C1 capable of measuring the low-pressure difference comprises a bottom electrode plate and a thin pressure sensitive membrane, and the capacitor C2 capable of measuring the high-pressure difference comprises a thick pressure sensitive membrane and a top electrode plate.

Abstract: A physical quantity sensor includes a movable body and a spring that supports the movable body. The spring includes an arm having an elongate shape in a first direction, and a first beam and a second beam that are adjacent to the arm and are disposed in the first direction. An end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction. The beams preferably are protective of the side surfaces of the spring arm, function to enable arm machining accuracy, reduce shape deviations, and reduce the occurrence of quadrature. The sensor exemplarily may detect angular rate or acceleration.

Abstract: A system and method for monitoring respiration of a user, comprising: a respiration sensing module including a sensor configured to detect a set of respiration signals of the user based upon movement resulting from the user's respiration; a supplementary sensing module comprising an accelerometer and configured to detect a set of supplemental signals from the user; an electronics subsystem comprising a power module configured to power the system and a signal processing module configured to condition the set of respiration signals and the set of supplemental signals; a housing configured to facilitate coupling of the respiration sensing module and the supplementary sensing module to the user; and a data link coupled to the electronics subsystem through the housing and configured to transmit data generated from the set of respiration signals and the set of supplemental signals, thereby facilitating monitoring of the user's respiration.

Abstract: A system and method for monitoring respiration of a user, comprising: a respiration sensing module including a sensor configured to detect a set of respiration signals of the user based upon movement resulting from the user's respiration; a supplementary sensing module comprising an accelerometer and configured to detect a set of supplemental signals from the user; an electronics subsystem comprising a power module configured to power the system and a signal processing module configured to condition the set of respiration signals and the set of supplemental signals; a housing configured to facilitate coupling of the respiration sensing module and the supplementary sensing module to the user; and a data link coupled to the electronics subsystem through the housing and configured to transmit data generated from the set of respiration signals and the set of supplemental signals, thereby facilitating monitoring of the user's respiration.

Abstract: A pressure sensing element may include: an intermediate layer having a structure in which at least two functional layers are stacked on each other; a first electrode layer including a plurality of first electrode patterns; and a second electrode layer to overlap the first electrode layer with the intermediate layer between the first and second electrode layers. Among the two functional layers, the first functional layer has a thickness linearly varying in a first pressure section, and the second functional layer has a thickness linearly varying in a second pressure section. The maximum pressure in the first pressure section is lower than that in the second pressure section, and the minimum pressure in the second pressure section is included in the first pressure section.

Abstract: A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.

Abstract: A weight sensing pad assembly includes a pad that is comprised of a resiliently compressible material. The pad is positionable beneath a mattress of an ambulance gurney. In this way the pad is exposed to the weight of a patient lying on the ambulance gurney. An electronic scale is integrated into the pad to sense the weight of the patient when the patient lies on the ambulance gurney. The electronic scale displays weight indicia comprising numbers communicating the weight of the patient in kilograms. In this way the electronic scale facilitates emergency responders to accurately determine medication dosages that are based on the patient's weight.

Abstract: A pressure sensor comprises a deformable substrate, at least one coil supported by the substrate and responsive to a changing coil drive signal to produce a changing magnetic field, a fluid chamber having a first wall formed by the substrate and a second wall formed by a conductive material and positioned proximate to the at least one coil so that the changing magnetic field produces eddy currents within the conductive material that generate a reflected magnetic field, and at least one magnetic field sensing element configured to detect the reflected magnetic field and produce a signal responsive to a distance between the magnetic field sensing element and the second wall. The substrate is deformable by fluid pressure within the fluid chamber and the deformation of the substrate changes the distance between the magnetic field sensing element and the second wall.

Abstract: A pressure detecting sensor according to an embodiment of the present invention comprises: a first electrode layer including a plurality of signal electrodes arranged in a first region and a plurality of wiring electrodes arranged in a second region and connected to the plurality of signal electrodes, the first electrode layer being made of a conductive fiber; an elastic dielectric layer arranged in the first region; and a second electrode layer arranged in the elastic dielectric layer, the second electrode layer being made of a conductive fiber.

Abstract: A pressure distribution profile of a subject lying on a mat is used to derive a measure of pulse wave velocity. Beat locations are identified where beat pressure signals are identified, and pulse timing information is obtained from the beat locations. By determining a subject posture, the beat locations are mapped to anatomical body locations and arterial path length information is obtained for the anatomical body locations. A pulse wave velocity is then estimated from the pulse timing information and arterial path lengths. This method enables measuring the pulse wave velocity during sleep in a comfortable, easy and unconstrained manner. This is accomplished by analyzing signals from a pressure sensitive surface for example on top of a bed mattress or by embedding a pressure sensitive layer in the mattress.

Abstract: In a method for detecting people on a floor, at least three electrodes are integrated into the floor of the room that is to be monitored. Respective measurement axes are taken into account and associated with multiple pairs of electrodes integrated into the floor. The detection method includes the following steps: for each pair of electrodes, measuring a capacitance between the two electrodes of the pair; positioning a measurement point in a coordinate system defined by N of the measurement axes at coordinates provided by the capacitances measured for the pairs of electrodes respectively associated with the N measurement axes, where N is a number greater than 1; and detecting whether a person is lying on the floor according to a detection criterion that is function of the position of the measurement point in the coordinate system.

Abstract: A vibrating beam accelerometer (VBA) with an in-plane translational proof mass that may include at least two or more resonators and be built with planar geometry, discrete lever arms, four-fold symmetry and a single primary mechanical anchor between the support base and the VBA. In some examples, the VBA of this disclosure may be built according to a micro-electromechanical systems (MEMS) fabrication process. Use of a single primary mechanical anchor may minimize bias errors that can be caused by external mechanical forces applied to the circuit board, package, and/or substrate that contains the accelerometer mechanism.

Abstract: A zoom function system is disclosed. The zoom function system includes an upper lens assembly, a lower lens assembly, an upper actuator, and a lower actuator. The upper and the lower actuators have stationary elements and movable elements. The upper lens assembly is attached to one of the movable elements of the upper actuator. The lower lens assembly is attached to one of the movable elements of the lower actuator. The zoom function system allows three degrees of freedoms of translational adjustments of lens assemblies and is capable of realigning the lens assemblies to improve the qualities of images.

Abstract: An autofocus system is disclosed. The autofocus system includes a lens assembly, an upper actuator, and a lower actuator. The upper and the lower actuators have stationary elements and movable elements. The lens assembly is attached to the movable elements of the upper and the lower actuators. The autofocus system allows three degrees of freedoms of translational adjustments and two degrees of freedoms of rotational adjustments.

Abstract: Each of a first electrode pattern Ty and a second electrode pattern Tx extends between third electrodes Rx neighboring in a Y direction among the plurality of third electrodes Rx so as to overlap only partly with each of the neighboring third electrodes Rx in a plan view. A microcontroller is configured to detect capacitance generated at those portions. The microcontroller is configured to calculate shear force based on a capacitance change obtained due to a change in an overlapping surface area between the third electrode Rx and the first electrode pattern Ty and the second electrode pattern Tx overlapping each other in a plan view, when a pressure is applied so that an insulator is deformed.

Abstract: A method for increasing capacitive response to applied pressure by including a glass layer in the air gap of an improved capacitive sense element. The glass layer has additional thickness compared to previously known capacitive sense elements. The additional thickness is selected to achieve a predetermined increase in dielectric constant across the gap between electrodes. In an illustrative embodiment, the resulting capacitive sense element includes a gap having two dielectric media, air and glass, between the electrodes, wherein the thickness of the glass media in the gap and the thickness of the remaining air gap are predetermined based on the dielectric constant of glass and air to achieve desired capacitive response characteristics of the sensor design.

Abstract: A support pad, including a first cushion layer, a second cushion layer, and a sensing device, is provided. The sensing device is positioned between the first and second cushion layers. The sensing device includes a plurality of sensing elements and a substrate. The substrate includes a plurality of tab portions and a plurality of expandable portions. The sensing elements are respectively mounted to the tab portions. The expandable portions are moveable between contracted and expanded positions in response to pressure applied thereto.

Abstract: A capacitive or resistive tactile sensor having a conductive membrane, a flexible dielectric or weakly conductive sheet and a substrate having electrodes, and a method of manufacturing thereof. The flexible sheet has a first surface and an opposite second surface, the first surface and the second surface are uniformly distanced when at rest. The first surface is adapted to contact one of the conductive membrane or the substrate. The second surface is adapted to contact another one of the conductive membrane or the substrate. The body defines between the first and second surfaces, at a predetermined region, a plurality of laser ablated uniform cavities that are evenly distributed and operatively identical in order to provide a known compression index at the predetermined region of the flexible sheet.

Abstract: Disclosed is a system and to a process for manufacturing a system including a network of sensors including a sheet of dielectric material that is elastically deformable under compressive and shear stress, each cell of the network including a first capacitive sensor for sensing normal pressure in a first direction, a second capacitive sensor for sensing shear stress in a second direction and a third capacitive sensor for sensing shear stress in a third direction. Each capacitive sensor includes a first electrode fixed to the first side of the sheet of dielectric material and a second electrode fixed to the second side of the sheet of dielectric material, the first electrodes of the capacitive sensors of a given cell being connected in series to a first electrically conductive track connecting a row of cells of the network of sensors.

Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to measure a first capacitance value from the first pressure sensor from a physical test performed; the one or more first sensors to measure a second capacitance value from a first electrical test performed on the first pressure sensor; and a correlator to determine correlation coefficient values based on the first capacitance value determined during the physical test on the first pressure sensor and the second capacitance value determined during the first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a third capacitance value determined during a second electrical test on the second pressure sensor.

Abstract: A fingerprint sensing module includes a sensor substrate having a sensing side and a circuit side, an image sensor including conductive traces on the circuit side of the sensor substrate, and a sensor circuit including at least one integrated circuit mounted on the circuit side of the sensor substrate and electrically connected to the image sensor. The sensor substrate may be a flexible substrate. The module may include a velocity sensor on the sensor substrate or on a separate substrate. The module may further include a rigid substrate, and the sensor substrate may be affixed to the rigid substrate.

Abstract: A fast response force sensor is disclosed. The fast response force sensor comprises a solid-state bonding (SSB) spacer and piezo material therein. The SSB spacer is sandwiched between a top stack and a bottom stack of the force sensor. The SSB spacer maintains a fixed relative position between a top stack and a bottom stack of the force sensor when a fixed force is applied or removed. The SSB spacer is in solid state and shall not be significantly deformed while being depressed by a user, and therefore the response time of an output signal is vastly determined by the properties of the piezo material of the force sensor when a force is applied against the force sensor. Therefore, a fast response force sensor can respond quickly to a force applied against it.

Abstract: A support pad, including a first cushion layer, a second cushion layer, and a sensing device, is provided. The sensing device is positioned between the first and second cushion layers. The sensing device includes a plurality of sensing elements and a substrate. The substrate includes a plurality of tab portions and a plurality of expandable portions. The sensing elements are respectively mounted to the tab portions. The expandable portions are moveable between contracted and expanded positions in response to pressure applied thereto.

Abstract: The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.

Abstract: Disclosed is a mobile terminal device in which a locking mode is released based on a touch intensity in order to prevent an unlocking operation by an unintended touch, and a driving method thereof, wherein the driving method includes detecting a touch intensity for each touch when a plurality of touches occur in a locking mode, and releasing the locking mode on the basis of the plurality of touch intensities detected, or executing a function corresponding to the plurality of touch intensities detected.

Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.

Abstract: A control element comprising a support; a control part which defines at least one operating surface, which is movable or elastically yielding if an operating force F acts upon the operating surface; a layer structure that is disposed between the control part and the support and that is elastically deformed if an operating force F acts on the operating surface. The layer structure has at least one first electrode associated with the support and a second electrode, which is associated with the control part and disposed underneath the operating surface, for the definition of a measuring capacity varying in accordance with the operating force. The layer structure further has an intermediate layer having a recess which is disposed between the first and second electrodes for defining a hollow chamber; and means for venting the hollow chamber. The means for venting is integrated at least partially into the intermediate layer.

Abstract: A pressure sensing element according to one aspect of the present disclosure includes a first electrode including at least one protrusion, a second electrode facing the at least one protrusion, and a dielectric disposed between the first electrode and the second electrode. The dielectric includes a first dielectric and a second dielectric. The first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode. The second dielectric is disposed between a first portion of the first electrode and the first dielectric. The first portion does not include the at least one protrusion. The at least one protrusion has a higher elastic modulus than the first dielectric.

Abstract: Advantageous mounting flanges for measuring devices and related methods of use are provided. The present disclosure provides advantageous mounting flanges configured to be mounted to measuring devices/instruments (e.g., pressure or temperature measuring devices/instruments), and related methods of use. More particularly, the present disclosure provides advantageous systems/methods for the design and use of user-friendly press-on mounting flanges configured to be mounted to pressure and temperature instruments (e.g., to the case of pressure or temperature gauges) to allow the instruments to be secured to a supporting structure (e.g., to a panel) via the mounting flanges. Disclosed herein is an advantageous mounting flange configured to be mounted to a case of a measuring device/gauge, thereby allowing the measuring device/gauge to be mounted to and held in a panel via the mounting flange. As such, the gauge case mounting flange is configured to hold the measuring gauge in place in the panel.

Abstract: There is provided an apparatus for detection of electrical signals of a biological subject. The apparatus comprises an electrode acting as a conductor for contact with skin of the subject. The electrode includes a first sheet material acting as a base layer and a plurality of pillars members extending from the first sheet material. The apparatus is free of gel or wet gel acting as an electrical conductive media.

Abstract: The capacitive fingerprint sensing apparatus and capacitive fingerprint sensing method of the invention perform fingerprint sensing through self-capacitive sensing technology and mutual-capacitive sensing technology respectively and combine the self-capacitive fingerprint pattern and the mutual-capacitive fingerprint pattern into a synthesized fingerprint pattern. Therefore, the capacitive fingerprint sensing apparatus and capacitive fingerprint sensing method of the invention can effectively increase the capacity sensed by the unit sensing electrode without decreasing its high resolution. As a result, not only the noise interference can be reduced to increase the accuracy of fingerprint recognition, but also the number of signal traces can be also reduced to simplify the circuit structure and save the chip area.

Abstract: The invention relates to a capacitive pressure measuring cell for detecting the pressure of a medium adjacent to the pressure measuring cell, comprising a ceramic elastic measuring membrane, the first side of which at least partially contacts the medium and the second side of which facing away from the medium comprises a measuring electrode, and a ceramic cylindrical basic body disposed opposite to the second side of the measuring membrane and comprising at least one counter electrode which forms a measuring capacitance with the measuring electrode.

Abstract: In an embodiment, a pressure transducer includes a first portion, a second portion, and a third portion. The third portion is positioned in a cavity contained in the second portion. In addition, a seal is placed in the cavity. The first portion and second include provisions for applying a downward pressure on the third portion when the first portion and the second portion are joined. The downward pressure is applied by the third portion to the seal to seal the cavity.

Abstract: The methods and apparatuses presented herein determine and/or improve the quality of one or more physiological assessment parameters, e.g., response-recovery rate, based on biometric signal(s) and/or motion signal(s) respectively output by one or more biometric and/or motion sensors. The disclosed methods and apparatuses also estimate a user's stride length based on a motion signal and a determined type of user motion, e.g., walking or running. The speed of the user may then be estimated based on the estimated stride length.

Abstract: A condenser microphone unit includes a diaphragm vibrated by acoustic waves, a fixed electrode disposed to face the diaphragm, and an insulation base making contact with a rim portion of the fixed electrode to support the fixed electrode, wherein a ring-shaped protrusion is provided on a rim portion of the insulation base, the ring-shaped protrusion protruding toward the fixed electrode with a radially inward taper and having a ring-shaped distal face to oppose the rim portion of the fixed electrode, the distal face of the ring-shaped protrusion supports the rim portion of the fixed electrode, and an adhesive is provided on a tapered surface of the ring-shaped protrusion positioned between the insulation base and the fixed electrode, the adhesive having property to shrink by curing. When the adhesive is cured, contact portions of the insulation base and the fixed electrode are tightly bonded together.

Abstract: A pressure sensing element of an aspect of the present disclosure includes a first electrode including at least one protrusion having elasticity; a second electrode facing the at least one protrusion; and a dielectric disposed between the first electrode and the second electrode and including a first dielectric and a second dielectric. The first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode. The second dielectric is disposed between a first portion of the first electrode, the first portion not including the at least one protrusion, and the first dielectric.

Abstract: A packaged integrated device includes a package substrate having a first surface and a second surface opposite the first surface, and the package substrate has a hole therethrough. The integrated device package also includes a first lid mounted on the first surface of the package substrate to define a first cavity, and a second lid mounted on the second surface of the package substrate to define a second cavity. A microelectromechanical systems (MEMS) die can be mounted on the first surface of the package substrate inside the first cavity and over the hole. A port can be formed in the first lid or the second lid.

Abstract: A terminal includes a housing, a touch screen, and an imaging assembly. The imaging assembly in one embodiment is disposed in the housing so that an imaging axis extends externally from the housing. The imaging assembly can be utilized for capture of images disposed externally to the housing. In one embodiment a frame of image data captured utilizing an imaging assembly can be processed for attempting to decode a decodable indicia. In one embodiment a frame of image data captured utilizing an imaging assembly can be stored.

Abstract: A tactile sensor, computer readable medium, methods of using and manufacturing the tactile sensor, and methods and apparatuses for processing the information generated by the tactile sensor. The tactile sensor includes a planar optical waveguide comprised of a flexible and transparent layer; a light configured to direct light into the optical waveguide; a light sensor or an imager facing the optical waveguide and configured to generate signals from light scattered out of the optical waveguide; and a controller which may be configured to generate an image of the object and characteristics of the object. The waveguide may be configured so that some of the light directed into the optical waveguide is scattered out of the waveguide if the waveguide is deformed by being pressed against the object. A finite element and a neural network are used to estimate mechanical characteristics of the objects.

Abstract: A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.

Abstract: A ring gyroscope structure with central spring structure that prefers prefers 2?-modes and makes them low in frequency. The flexing resonance modes that tend to couple to external mechanical excitation are clearly higher that the 2?-modes. The described structure is thus very robust against external mechanical shocks and vibrations.

Abstract: There is provided a fingerprint sensing device comprising: a sensing chip comprising an array of sensing elements, the sensing elements being configured to be connected to readout circuitry for detecting a capacitive coupling between each of the sensing elements and a finger placed on a sensing surface of the sensing device; a cover layer arranged vertically above the sensing elements to cover at least a portions of the sensing elements, wherein an outer surface of the cover layer form the sensing surface of the sensing device; wherein the cover layer comprises a three-dimensional pattern configured to reduce the amount of reflected light within a predetermined sub-range of the visible range. There is also provided a method for manufacturing a fingerprint sensing device.