Abstract: The temperature-dependent resistance of a MEMS structure is compared with an effective resistance of a switched CMOS capacitive element to implement a high performance temperature sensor.

Abstract: An acceleration sensor as a physical quantity sensor includes: a substrate; a correction electrode fixed to the substrate; a detection electrode fixed to the substrate; and a moving member fixed to the substrate. The moving member has: a base part; a first anchor part fixed to the substrate; a first finger electrode extending from the base part and facing the correction electrode; a mass part provided in such a way as to be displaceable in a direction of detection of a physical quantity in relation to the substrate; and a second finger electrode extending from the mass part and facing the detection electrode. A distance between a second anchor part where the detection electrode and the substrate are fixed, and the base part, is shorter than a distance between the second anchor part and the mass part.

Abstract: A pressure sensor is disclosed which includes a transmit electrode adapted to be operatively connected to a signal generator, a receive electrode adapted to be operatively connected to a signal receiver and signal processor, and a variably resistive conductive deformable element. The transmit electrode, the receive electrode and the variably resistive conductive deformable element being positioned in proximity to each other such that a pressure event proximate to the variably resistive conductive deformable element causes a change in coupling between the transmit electrode and the receive electrode, and a signal transmit on the transmit electrode as received on the receive electrode is changed in at least one of magnitude or phase in relation to and as a result of a pressure event.

Abstract: An acceleration sensor core unit 1 includes a circuit board 3 and metallic plates 4, 5. The circuit board 3 is made of an epoxy resin, and an acceleration sensor 11 for detecting vibration acceleration in an arrow 105 direction is mounted thereon. The circuit board 3 is sandwiched between the metallic plates 4, 5. Ring-shaped metallic spacers 7a to 7c and ring-shaped metallic spacers 8a to 8c are respectively interposed between the circuit board 3 and the metallic plate 4 and between the circuit board 3 and the metallic plate 5. The circuit board 3 is screwed to each of the metallic plates 4, 5 at three positions. Thus, it is possible to reliably fix the circuit board 3 to the metallic plates 4, 5 with a small attachment space. In this way, rigidity as the acceleration sensor core unit 1 can be secured.

Abstract: A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a mass section coupled to the driving section and displaced along the X axis, a detecting section coupled to the mass section, capable of turning around a Z axis crossing the X axis, and capable of being displaced along the Z axis by a Coriolis force acting on a turning motion horizontal to the substrate, and an elastic section coupling the detecting section and the fixed section. The fixed section is disposed between the center of gravity of the detecting section and the mass section in a plan view.

Abstract: The present disclosure relates to a sensor and a measuring system and a sensor network that incorporate one or more such sensors. An example sensor could be configured to measure a conductivity of a liquid. The sensor includes a first electrode and a second electrode, each electrode having a surface area, wherein the surface area of the electrodes determines a cell constant of the sensor (Kcell), and wherein at least one of the electrodes is provided with a switching means arranged so that the surface area of the respective electrode can be changed, thereby varying the cell constant (Kcell) of the sensor.

Abstract: A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed signal from the plurality of sense electrodes and identifies a portion of the sensed signal having the first harmonic frequency. Based on this identified portion of the sensed signal, the circuitry determines whether a residual voltage is present on the one or more proof masses or on the one or more sense electrodes, and the circuitry modifies the operation of the accelerometer when the residual voltage is determined to be present in order to compensate for the residual voltage.

Abstract: The invention relates to a capacitive sensor element with a plurality of sensor fields, as they correspond for example to the arrangement on a touch screen. This capacitive sensor element comprises at least one multilayer body made up of two structured electrically conductive layers and an insulating layer in between. The invention provides a layout with redundant conductive strips for an arrangement of crossing conductive strips, through which the requirement for register accuracy in the two-layer lamination of layer electrodes is reduced, in particular with respect to connecting the connections to the plugs in the edge area of a module using a corresponding sensor element.

Abstract: A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit includes a static electricity sensor between the first plate and the second plate.

Abstract: Accelerometer including a seismic mass in a plane and a first capacitor plate and a second capacitor plate arranged parallel to the plane. The seismic mass is arranged in between the first capacitor plate and the second capacitor plate. The first capacitor plate and the second capacitor plate are configured to detect movements of the seismic mass out of the plane. A pillar extending from the first capacitor plate to the second capacitor plate through a cut-out in the seismic mass for stiffening the accelerometer.

Abstract: A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.

Abstract: An occupant classification apparatus configured for classifying an occupant seated in a seat based on capacitance of and the amount of moisture contained in the occupant is disclosed. The occupant classification apparatus includes an electrode device for detecting an occupant seated in a seat, an occupant property measurement device for measuring capacitance of and the amount of moisture contained in the occupant detected by the electrode device, and a controller configured for estimating the occupant based on the capacitance and the amount of moisture measured by the occupant property measurement device.

Abstract: An exemplary sensor may include a MEMS layer anchored to a cap and a substrate by anchoring portions of the MEMS layer. A suspended spring-mass system may include springs, at least one rigid mass, and at least one movable mass. The anchoring springs may be torsionally compliant about one or more axes and coupled to the rigid mass such that forces imparted by the anchoring portions are not transmitted to the movable mass.

Abstract: A semiconductor device production method includes performing trench etching to form a trench in a thickness direction of a semiconductor layer so that both of a first pattern portion and a second pattern portion whose side walls face each other across the trench are formed. In the trench etching, the semiconductor layer is etched and removed while a protective film is formed on a surface of the semiconductor layer, and the trench etching is performed so that the first pattern portion and the second pattern portion are configured to have a same potential or a same temperature during the trench etching.

Abstract: Embodiments of the present invention relate to microphones diaphragms. In one embodiment, a sensor comprising a diaphragm comprised of a composition having a plurality of individual graphene sheets. An emitter formed in a manner to transmit lights towards a surface of the diaphragm. A collector that captures at least a portion of light that is reflected by the diaphragm. A converter is in communication with the detector that converts a signal that is generated by the sensor to a digital signal for processing. The graphene-based composition includes graphene sheets.

Abstract: There is provided a MEMS sensor including: a mass body; a support part floatably supporting the mass body; and a flexible beam having one end connected to the mass body and the other end connected to the support part. At least one end of the flexible beam connected to the mass body or the support part includes a curved portion to maximize an effective length supporting a load.

Abstract: A sensor having a particle barrier is described. In an example, a sensor includes: first and second electrode sets respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface; and a first barrier disposed on the planar support around the first electrode set having a height less than a gap between the planar support and the proof mass to mitigate particle migration into the first or second electrode set.

Abstract: An electronic seal includes a housing, a cover, at least one touch piece, and, a transmission mechanism. The housing has at least one through track, in which the through track is disposed on the bottom of the housing. The cover is disposed on the housing and covers the housing. The touch piece is movably disposed on the through track and is partially exposed out of the housing. The transmission mechanism includes a driving member, in which the driving member drives the touch piece to move along the through track when the driving member is actuated relative to the housing.

Abstract: Systems and methods are described herein for detecting and measuring inertial parameters, such as acceleration. In particular, the systems and methods relate to vibratory inertial sensors implementing time-domain sensing techniques. Within a composite mass sensor system, a sense mass may oscillate at a frequency different from its actuation frequency, allowing flexibility when integrating the sensor into drive systems without sacrificing sensitivity.

Abstract: A physical quantity sensor includes an element piece, in which the element piece includes a support portion that includes a first support portion, a second support portion, and a third support portion that links the first and second support portions, and is connected to a base substrate at the third support portion, a movable electrode portion that is positioned between the first and second support portions, and includes a movable electrode finger, an elastic portion that links the movable electrode portion and the support portion and has elasticity, and a fixed electrode portions having fixed electrode fingers that are arranged facing the movable electrode finger.

Abstract: A water level sensor device of a fuel filter may include a printed circuit board and a water level sensor composed of electrically conductive plastic. The water level sensor may be coupled to the printed circuit board via an electrically conductive metal element. The metal element may be coupled to the water level sensor via a press-fit assembly. The metal element may include a sharp-edged fastening contour configured to tear open the plastic of the water level sensor when the metal element is pressed against the water level sensor.

Abstract: The present invention refers to a sensor (10) having a layer arrangement (12), wherein the layer arrangement (12) comprises at least a base layer (14), a middle layer (16) and an outer layer (18), wherein the middle layer (16) is arranged at least partly upon and in contact with the base layer (14) and wherein the outer layer (18) is arranged at least partly upon and in contact with the middle layer (16), wherein the base layer (14) comprises a metal, wherein the middle layer (16) comprises a metal oxide, and wherein the outer layer (18) is porous and comprises a material selected from the group comprising electrically conductive carbon compounds such as, more particularly, graphite or carbon nanotubes (CNTs), organic electrical conductors and base metals, and wherein electrical contacts can be formed with the base layer (14) and outer layer (18) for a conductivity measurement and/or a resistance measurement.

Abstract: A micromechanical Z-sensor, including a rocker having trough structures which is twistably supported with the aid of a spring device, the rocker having a mass distribution which is asymmetric with respect to the spring device, first electrodes situated above the trough structure, and second electrodes situated below the rocker, and a catch device including at least one spring element against which a stop element which is anchored to a substrate is able to strike, at least two catch devices which are spatially separated from each other being provided per rocker arm of the rocker.

Abstract: An all-silicon electrode capacitive transducer comprising: a movable silicon microstructure coupled to a glass substrate, the movable silicon microstructure having a movable silicon electrode, the glass substrate having a top surface and at least one recess, the movable silicon electrode having a first flat surface parallel to a plane of the top surface of the glass substrate, the movable silicon electrode having a first electronic work function; and a stationary silicon electrode coupled to a glass substrate, the stationary silicon electrode located adjacent to the movable silicon electrode, the stationary silicon electrode configured to sense or actuate displacement of the movable silicon microstructure, wherein the stationary silicon electrode has a second flat surface parallel to the first flat surface, the stationary silicon electrode having a second electronic work function equal to the first electronic work function.

Abstract: A functional device includes a fixed electrode portion including a first fixed electrode portion and a second fixed electrode portion, a first wiring portion connected to the first fixed electrode portion, and a second wiring portion connected to the second fixed electrode portion. At least one of the first wiring portion and the second wiring portion is provided with a branch portion. One wiring line extending from the branch portion is connected to the fixed electrode portion, and another wiring line extending from the branch portion is provided along the first wiring portion or the second wiring portion.

Abstract: An electronic device includes an accommodation space formed between a first base material and a second base material so as to seal a space therebetween, and a functional element in the accommodation space. The accommodation space is formed in an inner region of a bonding portion between the first base material and the second base material. The electronic device includes wirings extending from the inner region through the bonding portion to the outside of the accommodation space. The bonding portion includes a first bonding region and a second bonding region. The wiring includes a first wiring portion having a first direction toward the outside through the first bonding region from the inner region and a second wiring portion having a second direction toward the outside through the second bonding region from the inner region. The first and the second directions are different.

Abstract: A mechanism for reducing stiction in a MEMS device by decreasing surface area between two surfaces that can come into close contact is provided. Reduction in contact surface area is achieved by increasing surface roughness of one or both of the surfaces. The increased roughness is provided by forming a micro-masking layer on a sacrificial layer used in formation of the MEMS device, and then etching the surface of the sacrificial layer. The micro-masking layer can be formed using nanoclusters. When a next portion of the MEMS device is formed on the sacrificial layer, this portion will take on the roughness characteristics imparted on the sacrificial layer by the etch process. The rougher surface decreases the surface area available for contact in the MEMS device and, in turn, decreases the area through which stiction can be imparted.

Abstract: A system comprises a first proximity sensor adapted to detect a human. The system further comprises logic coupled to the first proximity sensor. The logic adjusts a temperature threshold based on whether a human has been detected.

Abstract: A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

Abstract: A MEMS device and method for providing a MEMS device are disclosed. In a first aspect, the MEMS device comprises a first substrate and a second substrate coupled to the first substrate forming a sealed enclosure. A moveable structure is located within the sealed enclosure. An outgassing layer is formed on the first or second substrates and within the sealed enclosure. A first conductive layer is disposed between the moveable structure and the outgassing layer, wherein the first conductive layer allows outgassing species to pass therethrough.

Abstract: The present invention provides a capacitive acceleration sensor with a bending elastic beam and a preparation method. The sensor at least includes a first electrode structural layer, a middle structural layer and a second electrode structural layer; wherein the first electrode structural layer and the second electrode structural layer are provided with an electrode lead via-hole, respectively; the middle structural layer includes: a frame formed on a SOI silicon substrate with a double device layers, a seismic mass whose double sides are symmetrical and a bending elastic beam with one end connected to the frame and the other end connected to the seismic mass, wherein anti-overloading bumps and damping grooves are symmetrically provided on two sides of the seismic mass, and the bending elastic beams at different planes are staggered distributed and are not overlapped with each other in space.

Abstract: A flexible tactile imager includes an array of sensing cells that measure shear force and normal force. The sensing cells include a first sub-cell and a second sub-cell. Each sub-cell includes multi-fingered capacitors configured to measure shear force in a first or second direction and to measure the normal force. The multi-fingered capacitors include a flexible printed circuit board, a comb-like fingered sense electrode and drive electrode patterned on a layer of the flexible printed circuit board, a deformable dielectric material positioned above the comb-like fingered sense and drive electrodes, the comb-like fingered floating electrode patterned above the deformable dielectric material, a first capacitance formed between the comb-like fingered sense electrode and the comb-like fingered floating electrode, and a second capacitance formed between the comb-like fingered drive electrode and the comb-like fingered floating electrode.

Abstract: Methods, apparatuses, and systems are disclosed for a transducer. The transducer can include a bottom plate formed from a first sheet of material, a top plate formed from a second sheet of material, and a middle portion. The middle portion includes a mid-upper element formed from a third sheet of material, with a mid-upper frame, a mid-upper mass, and a plurality of mid-upper attachment members coupling the mid-upper mass to the mid-upper frame. The middle portion can also include a central element formed from a fourth sheet of material, with the central element having a central frame and a central mass.

Abstract: A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.

Abstract: A method of making a semiconductor device forms anchors for one or more layers of material. The method includes depositing a first layer of material on a substrate, applying a mask over the first layer of material to mask nanoparticle-sized areas of the first material, removing portions of the first layer of material to form a first set of recesses around the nanoparticle-sized areas of the first material, depositing a second layer of material in the recesses and over the nanoparticle-sized areas so that a second set of recesses is formed in a top surface of the second layer of material, and forming a component of the semiconductor device over the second layer of material. Material of a bottom surface of the component is included in the second set of recesses.

Abstract: A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.

Abstract: A force transducer, in particular a load cell, includes a spring body that deforms when loaded with a force or load to be measured. Two support parts, which are separated by a gap, are moved out of a position of rest. A capacitive displacement detector is used to detect the relative movement of the support parts, where the capacitor includes two electrode combs that are each held on one of the support parts and includes a multiplicity of electrode fingers. The electrode combs are configured designed and mounted on the two support parts such that the electrode fingers of the one electrode comb pass into the finger interspaces of the other electrode comb when the spring body is loaded so that the force transducer is resistant to overloading.

Abstract: An angular velocity sensor includes a vibrator located along x-y plane specified by x direction and y direction that are orthogonal to each other; a substrate that is separated away from the vibrator along z direction perpendicular to the x-y plane; an anchor device extended from the substrate to the x-y plane in which the vibrator is located; a linkage beam device that links the anchor device to the vibrator, the linkage beam being able to twist about the y direction; an excitation portion that vibrates the vibrator along the z direction; and a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator. The vibrator includes a linkage region to link with the linkage beam device, and the linkage region becomes a wave node when the vibrator vibrates along the z direction.

Abstract: The electrostatic capacity coupling type touch panel includes X electrodes (XP) and Y electrodes (YP) which intersect each other via a first insulating layer, and a plurality of Z electrodes in floating states to each other via a second insulating layer. For the second insulating layer, a material which changes in thickness by pressing of touch is used. The Z electrode is disposed so as to overlap both an X electrode and a Y electrode which are adjacent to each other. In a pad part of the X electrode, an area is larger toward the center of the X electrode and an area is smaller toward the center of the adjacent X electrode. Therefore, the nonconductive input means can be used, and highly accurate position detection is realized with a small number of electrodes even when a touch area is small.

Abstract: These needs, and others, are met by at least one embodiment of the disclosed invention which provides for a touch sensitive screen for an electronic device wherein there is a sparse pattern of sensors disposed within the active area and a dense pattern of sensors disposed within the viewing area. In this configuration, the pixels in the active area may have a larger aspect ratio and provide a more pleasing image while the dense sensors disposed within the viewing area provide more accurate touch sensitivity. Further, the software, or other electronics, used to create the image, may be structured to position menus or other selectable images adjacent to the viewing area. Similarly, certain images, such as icons, can be programmed to be displayed directly under the sensors in the active area. Generally, this configuration provides for the best of both worlds; a bright, clear image with some touch sensitivity in the active area and a sensitive sensor grid in the viewing area where there are no pixels.

Abstract: The circuit arrangement according to the invention comprises a measuring apparatus that measures an electrical connection, and also one or more conductor patterns. The conductor pattern is connected to the measuring apparatus using an adaptor component, which fits the impedance produced by the conductor pattern to be suitable for the measuring apparatus.

Abstract: A portable electronic device comprises at least one force sensor configured to generate a force signal based at least in part on a force applied to a touch-sensitive display and a processor configured to receive the force signal and to provide a feedback signal when the force exceeds a force threshold. The at least one force sensor may be integrated into the touch-sensitive display.

Abstract: Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a probe body and a capacitive sensor disposed at a distal end of the probe body. The capacitive sensor produces a sensing capacitance. The pressure sensor also includes a shunt capacitance. In the described pressure sensor, a change in the sensing capacitance due to dimensional changes associated with a temperature change is offset by a corresponding change in the shunt capacitance.

Abstract: A voice activity detection apparatus having a capacitive sensor and a voice activity detector sensor. The voice activity detector sensor detects vibration of human tissue associated with user speech. Utilization of the voice activity detector sensor output is tied to the output of the capacitive sensor, where the capacitive sensor detects whether it is in contact with user skin.

Abstract: A micromechanical component is described having a substrate which has at least one stator electrode fixedly mounted with respect to the substrate, a movable mass having at least one actuator electrode fixedly mounted with respect to the movable mass, and at least one spring via which the movable mass is displaceable. The movable mass is structured from the substrate with the aid of at least one separating trench, at least one outer stator electrode spans at least one section of the at least one separating trench and/or of the movable mass, the at least one actuator electrode protrudes between the at least one outer stator electrode and the substrate, and at least one inner stator electrode protrudes between the at least one actuator electrode and the substrate. A related manufacturing method is also described for a micromechanical component.

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam.

Abstract: The present invention relates to a variable-area capacitor for a micromechanical sensor, a micromechanical comb grid capacitor accelerometer and a micromechanical comb grid capacitor gyroscope. Among them, the variable-area capacitor structure comprises of a movable and a fixed electrodes in each capacitor unit; a front surface of aforesaid movable electrode is parallel to that of aforesaid fixed electrode; the front surface of aforesaid movable electrode is in a rectangular shape, and the front surface of the fixed electrode is in a triangular or sawteeth shape or the front surface of the movable electrode is in a triangular or sawteeth shape, and the front surface of the fixed electrode is in a rectangular form; the triangular front surface is only overlapped with one long side of aforesaid rectangular front surface. Micromechanical sensors with variable-area capacitor structures of the invention can adjust elasticity coefficient as compared with present technology.

Abstract: A method of manufacturing a variable capacitor includes forming a capacitor conductor. The method also includes forming a phase change material adjacent the capacitor conductor. The method further includes forming a first contact on the capacitor conductor. The method additionally includes forming a second contact and a third contact on the phase change material.

Abstract: An electrical contactor for use in a high voltage bus utilizes two capacitor plates and a dielectric element movable in a gap between the plates under a charging voltage applied to the plates. The dielectric element is biased to a contactor off, or open, position by a biasing element, such as a spring. Once activated, the contactor remains closed under the influence of the charging voltage across the capacitor plates, yet does not draw a current during this state. The contactor may be released by a controllable discharge circuit placed across the capacitor plates.