Optical System Structure (e.g., Lens) Patents (Class 374/130)
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Patent number: 8668383Abstract: Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light.Type: GrantFiled: April 16, 2012Date of Patent: March 11, 2014Assignee: Mattson Technology, Inc.Inventor: Paul Janis Timans
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Publication number: 20140064328Abstract: Systems, methods and apparatus are provided through which in some implementations a non-contact thermometer includes a square-angled waveguide.Type: ApplicationFiled: April 17, 2013Publication date: March 6, 2014Applicant: BROOKLANDS, INC.Inventor: Jason Roth
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Publication number: 20140033737Abstract: A temperature measurement system includes at least one filament configured to emit thermal radiation in a relatively broad and substantially continuous wavelength band that is at least partially representative of a temperature of the at least one filament. The system also includes an optical system configured to receive at least a portion of the thermal radiation emitted from the filament. The optical system includes a wavelength splitting device configured to split the emitted thermal radiation into at least one relatively narrow wavelength band of thermal radiation. The optical system also includes a detector array configured to receive the at least one relatively narrow wavelength band of thermal radiation and to generate electrical signals at least partially representative of the received thermal radiation. The temperature measurement system further includes a controller communicatively coupled to the detector array.Type: ApplicationFiled: July 31, 2012Publication date: February 6, 2014Applicant: GENERAL ELECTRIC COMPANYInventors: Guanghua Wang, Nirm Velumylum Nirmalan, Todd Garrett Wetzel, Ronald Scott Bunker, Robert Michael Zacharias, Shawn David Wehe, Robert David Briggs, Jonathan Edward Slepski
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Patent number: 8628237Abstract: A method for measuring a contacting thermal resistance of one-dimensional structures is provided. A first one-dimensional structure and A second one-dimensional structure are crossed and in contact with each other to form a suspended junction. A point P of the first one-dimensional structure is heated until the first one-dimensional structure and the second one-dimensional structure reach a thermal equilibrium. A point A and a point B are selected on the first one-dimensional structure and a point C and a point D are selected on the second one-dimensional structure, wherein the point B, the point A, the suspended junction, the point C and the point D are arranged equidistantly with a distance ?x. A temperature difference ?Tj is calculated by the formula ?Tj=?TAC??TBA??TCD. The heat flux Qj is calculated by the formula Qj=2k?TCD/?x. The contacting thermal resistance Rj is calculated by the formula Rj=?Tj/Qj.Type: GrantFiled: January 24, 2013Date of Patent: January 14, 2014Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Jun-Ku Liu, Qun-qing Li, Yuan Zou, Shou-Shan Fan
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Patent number: 8622612Abstract: A focus error signal resulting from the photothermically-induced expansion is measured in a sample of material under analysis. A laser is disposed as a periodically modulated heating source which is directed to the sample and a device for focus error measuring which is directed to the surface being heated. A device measuring focus error generates a signal representative of the displacement of the surface of material in perpendicular direction due to the expansion produced by the periodic heating, which is filtered, either analogically or digitally, to discriminate the displacement component at the frequency in which it was modulated or at any other related frequency, such any harmonic or a sum with any other modulation. The focus error signal, appropriately calibrated, gives a precise and sensitive measure of the magnitude the expansion.Type: GrantFiled: February 12, 2010Date of Patent: January 7, 2014Assignee: Consejo Nacional de Investigaciones Cientificas y Tecnicas (Conicet)Inventors: Oscar Eduardo Martínez, Esteban Alejo Domené, Nélida Mingolo, Francisco Balzarotti, Andrea Verónica Bragas
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Patent number: 8608375Abstract: A method of measuring a temperature of a noble gas in a chamber includes providing the noble gas in the chamber. The noble gas is characterized by a pressure and a temperature. The method also includes directing a first laser beam into the chamber and directing a second laser beam into the chamber. The first laser beam is characterized by a first frequency and the second laser beam is characterized by a second frequency. The method further includes converting at least a portion of the first laser beam and the second laser beam into a coherent anti-Stokes beam, measuring a Doppler broadening of the coherent anti-Stokes beam, and computing the temperature using the Doppler broadening.Type: GrantFiled: October 15, 2010Date of Patent: December 17, 2013Assignee: Lawrence Livermore National Security, LLCInventor: Mark Rhodes
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Patent number: 8602640Abstract: A sensing system is configured to detect physical parameters of a fluid sample. In particular, the sensing system is configured to detect the dew point of the fluid by reducing temperature of a sensing medium and detecting the fluid condensate on a sensing surface by directing light from a light source to the sensing surface and detecting the light reflected off the sensing surface onto a light detector. The light source and the light detector are on the opposite side of the sensing medium from the sensing surface.Type: GrantFiled: May 20, 2009Date of Patent: December 10, 2013Assignee: Entegris—Jetalon Solutions, Inc.Inventors: Ronald P. Chiarello, Christopher Andrew Wacinski, Charles Eric Boyd, Stewart Robin Shearer
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Patent number: 8591103Abstract: An infrared thermometer includes a probe and an infrared sensor. The probe with an infrared target absorbs thermal radiation to provide a substantially consistent source of infrared radiation and an aperture for preventing contamination of the infrared target while permitting the transmission of thermal radiation to the target. The infrared sensor is configured for sensing infrared radiation from the infrared target. The infrared target is positioned within the probe such that it absorbs thermal radiation that comes from the aperture and thereafter emits thermal radiation to the infrared sensor.Type: GrantFiled: August 26, 2010Date of Patent: November 26, 2013Assignee: Welch Allyn, Inc.Inventors: John A. Lane, David E. Quinn
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Patent number: 8568025Abstract: A temperature probe for use in oil-filled transformers comprises an optical fiber, a temperature sensitive member, and a protective cylindrical sheath. The optical fiber and the sensitive member are located in the protective sheath, and continuous longitudinal slit is defined along the length of the sheath to allow oil to flow therein. The optical fiber is mounted in and to the sheath using a bonding material and at a distance from the sheath. The sensitive member is adhesively mounted to the optical fiber, within the sheath, and at a distance thereof.Type: GrantFiled: October 17, 2008Date of Patent: October 29, 2013Inventors: Jean-François Meilleur, Jean-Noël Bérubé, Michel Plourde
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Publication number: 20130259087Abstract: Method and apparatus for measuring temperature of a measured area of a surface without contacting the surface. The thermometer apparatus has an optical system which generates a correlative image of an infrared energy detector sensitive area at an image distance from the thermometer. A limiting aperture, having a size and a shape corresponding to those of the generated image, is between a mirror and the generated image. The measured area of the surface is between the generated image and the thermometer in use. With such a configuration, little infrared energy that does not originate from the measured area strikes the detector. Consequently, the energy reaching the detector is limited such that the size of the measured area remains constant, regardless of changes in the thermometer's field of view attributable to differences in the distance between the surface and the thermometer. A scan-and-integrate mode for practicing the invention is disclosed.Type: ApplicationFiled: March 28, 2012Publication date: October 3, 2013Inventor: Yonatan Gerlitz
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Patent number: 8529123Abstract: A device for calibrating a fiber-optic temperature measuring system has a broadband light source, a coupling-in device, which can couple light generated by the light source for calibration into an optical fiber of the temperature measuring system, a coupling-out device, which can couple components of the light source-generated light that are backscattered in the optical fiber out of the optical fiber. An evaluation device performs a calibration of the temperature measuring system on the basis of the backscattered components of the light.Type: GrantFiled: April 7, 2009Date of Patent: September 10, 2013Assignee: Lios Technology, GmbHInventors: Wieland Hill, Martin Fromme, Jochen Kübler
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Patent number: 8523428Abstract: A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion.Type: GrantFiled: March 28, 2012Date of Patent: September 3, 2013Assignee: Tokyo Electron LimitedInventors: Jun Yamawaku, Chishio Koshimizu, Tatsuo Matsudo
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Patent number: 8506161Abstract: This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.Type: GrantFiled: June 21, 2011Date of Patent: August 13, 2013Assignee: Advanced Energy Industries, Inc.Inventor: Thomas Haw
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Patent number: 8500326Abstract: A probe for temperature measurement uses interference of a low-coherence light beam. The probe includes a temperature acquiring member configured to be brought into contact with a surface of a temperature measurement target and thermally assimilate with the temperature measurement target; a light irradiating/receiving unit configured to irradiate a measurement light beam as a low-coherence light beam to the temperature acquiring member and receive reflected light beams from a front surface and a rear surface of the temperature acquiring member; and a housing configured to define a distance between the temperature acquiring member and the light irradiating/receiving unit to a preset length and isolate optical paths of the measurement light beam and the two reflected light beams from an atmosphere in which the temperature measurement target is placed.Type: GrantFiled: March 10, 2011Date of Patent: August 6, 2013Assignee: Tokyo Electron LimitedInventor: Tatsuo Matsudo
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Patent number: 8496376Abstract: An automatic and continuous method is presented to improve the accuracy of fiber optic distributed temperature measurements derived from Raman back scatterings utilizing two light sources with different wavelengths, by choosing the wavelengths of the two sources so the primary source's return anti-Stokes component overlaps with the incident wavelength of the secondary light source thereby canceling out the non-identical attenuations generated by the wavelength differences between Stokes and anti-Stokes bands.Type: GrantFiled: July 7, 2008Date of Patent: July 30, 2013Assignee: SensorTran, Inc.Inventors: Chung Lee, Kwang Suh
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Patent number: 8480296Abstract: A low temperature radiometer includes a main body, a main cavity, an exit cavity, a suspended thermometer, and an attached thermometer. The main cavity is disposed within the main body and is defined through an off-axis parabolic concentrating cone formed of the inner walls of the main body. The exit cavity is disposed within the main body and is defined through a cylindrical inner surface of the main body. The suspended thermometer is suspended within the exit cavity and is disposed to be in communication with radiation entering the main cavity and being diverted to the exit cavity. The attached thermometer is attached to the outer surface of the main body and is in thermal communication and contact with the main body.Type: GrantFiled: September 16, 2009Date of Patent: July 9, 2013Assignee: United States of America as represented by the Administrator of the National Aeronautics Space AdministrationInventors: Michael DiPirro, Thomas P. Hait, James G. Tuttle
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Patent number: 8483991Abstract: A system and method are disclosed that determines the emissivity and temperature of a target object. A compact emitter capable of sequentially emitting blackbody-like radiation at two different temperatures is used to determine the target object's emissivity and temperature.Type: GrantFiled: May 15, 2009Date of Patent: July 9, 2013Assignee: Fluke CorporationInventors: Reno Gaertner, Steffen Ludwig, Rainer Kuepper, Klaus-Peter Moellmann
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Patent number: 8454230Abstract: The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.Type: GrantFiled: February 16, 2010Date of Patent: June 4, 2013Assignee: Carl Zeiss SMT GmbHInventors: Frank Melzer, Axel Scholz
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Patent number: 8449180Abstract: This invention is to provide a temperature sensor which can measure a precise temperature of a minute region, which can measure a temperature in a wide range from a low temperature to a high temperature, and which has a simple structure. The temperature sensor comprises a two-dimensional electron gas. A resistance of the two-dimensional electron gas is used to measure a temperature. The two-dimensional electron gas may have a heterostructure selected from the group consisting of an AlGaN/GaN system, an AlGaAs/GaAs system, an InAs/GaAs system, an InAs/GaSb/AlSb system, a SiGe/Si system, a SiC/Si system, a CdTe/HgTe/CdTe system, an InGaAs/InAlAs/InP system, and nanocrystalline silicon.Type: GrantFiled: January 19, 2007Date of Patent: May 28, 2013Inventors: Adarsh Sandhu, Takuya Yamamura, Makoto Taoda, Zaki Primadani
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Patent number: 8439560Abstract: A system for determining a blackbody temperature of an electrical discharge including a light-tight enclosure, a viewing aperture sheet received in the light-tight enclosure, the viewing aperture sheet having a first side and a second, opposite side, and defining at least one viewing aperture having a known area, a radiometer having a sensor aperture, the sensor aperture being received in the light-tight enclosure on the first side of the viewing aperture sheet, the sensor aperture being positioned a known distance from the viewing aperture, and an electric current source having an electrode, the electrode being received in the light-tight enclosure on the second side of the viewing aperture sheet.Type: GrantFiled: February 15, 2010Date of Patent: May 14, 2013Assignee: The Boeing CompanyInventor: Michael M. Ladd
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Patent number: 8434938Abstract: An apparatus for monitoring a temperature and/or a temperature-dependent parameter of an optical element arranged in a path of a laser beam includes a measuring light source to produce measuring radiation and direct the measuring radiation to the optical element, a detector arranged to detect a portion of the measuring radiation that has passed through a passage region of the optical element, an evaluating device connected to the detector to monitor the temperature and/or the temperature-dependent parameter. The evaluating device is configured to determine the temperature and/or the temperature-dependent parameter based on an intensity of the measuring radiation detected by the detector in the passage region.Type: GrantFiled: December 23, 2009Date of Patent: May 7, 2013Assignee: Trumpf Laser-und Systemtechnik GmbHInventor: Joachim Schulz
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Patent number: 8425111Abstract: A bridge intelligent cable system with a built-in fiber grating sensor is provided, which is applied in a cable bearing structure such as a cable-stayed bridge, a suspension bridge, and an arch bridge. The system includes an anchor cup, a wire dividing plate, a connecting cylinder, a fiber grating sensor, and a cable body, in which the fiber grating sensor includes a fiber grating strain sensor and a fiber grating temperature sensor, tail fibers of the fiber grating strain sensor and the fiber grating temperature sensor are led out, the packaged fiber grating strain sensor is fixedly connected to an outer-layer steel wire of the connecting cylinder, the packaged fiber grating temperature sensor is suspended on the steel wire of the connecting cylinder, holes are punched in the wire dividing plate, and a preserved steel pipe is buried in advance in the connecting cylinder and the anchor cup.Type: GrantFiled: November 27, 2009Date of Patent: April 23, 2013Assignee: Fasten Group Company, Ltd.Inventors: Lihua Liu, Xia Zhao, Desheng Jiang, Huajuan Xue, Zhubing Zhou, Mingbao Zhou, Enlong Zhang, Shengchun Liu, Sheng Li
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Patent number: 8419272Abstract: A temperature measuring apparatus and a temperature measuring method, comprising a light intensity measuring unit, a calculation unit, and a temperature output unit; wherein an object to be heated having a uniquely defined correlation between temperature and refractive index is irradiated with a probe laser beam in the light intensity measuring unit, and a light intensity property is determined which represents a relationship between time and light intensity of a reflected light or a transmitted light occurring as a result of interference of the multiply-reflected probe laser beam within the object to be heated. In the calculation unit, a virtual object to be heated having equivalent dimensional, thermal, and optical characteristics to those of the object to be heated is subjected to a thermal incidence equivalent to the heating conditions of the object to be heated.Type: GrantFiled: July 4, 2006Date of Patent: April 16, 2013Assignee: Hiroshima UniversityInventor: Seiichiro Higashi
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Patent number: 8414186Abstract: A new step-index multimode pure silica core fiber for DTS (Distributed Temperature Sensing) system particularly useful for downhole environments is disclosed and described. The new sensor system provides optimum tradeoffs between coupling power, spatial resolution, and temperature resolution.Type: GrantFiled: July 18, 2008Date of Patent: April 9, 2013Assignee: SensorTran, Inc.Inventors: Chung Lee, Kwang Suh, Mahesh Ajgaonkar, Kent Kalar
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Patent number: 8388901Abstract: An apparatus and methods are provided for heating and sensing the temperature of a chemical reaction chamber without direct physical contact between a heating device and the reaction chamber, or between a temperature sensor and the reaction chamber. A plurality of chemical reaction chambers can simultaneously or sequentially be heated independently and monitored separately.Type: GrantFiled: May 24, 2012Date of Patent: March 5, 2013Assignee: Applied Biosystems, LLCInventors: John S. Shigeura, Janice G. Shigeura
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Publication number: 20130051424Abstract: An optical system and a focusing structure for an infrared thermometer are provided. The optical system includes a focusing ocular barrel (100) and an objective focusing ring (300), provided at the rear end of an optical probe. By controlling the shift of the ocular (101) and the objective (201), the best visual collimation definition and the highest optical focus resolution of the system can be achieved without reducing the measurement precision. The rear end of the probe includes a cap (507), which can be used for locking the detective image distance of the objective (201) and sealing and protecting the portion of the focusing operation.Type: ApplicationFiled: April 15, 2011Publication date: February 28, 2013Inventor: Guobing Yuan
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Patent number: 8366317Abstract: A sensor for detecting electromagnetic radiation comprises a sensor element, a housing in which the sensor element is disposed, and a radiation inlet window provided in the housing and closed by a material transmissible for the radiation to be detected. The transmissible material is fixed to the housing by fixation means not disposed in the field of view of the sensor element.Type: GrantFiled: June 8, 2005Date of Patent: February 5, 2013Assignee: Excelitas Technologies GmbH & Co. KGInventors: Henrik Ernst, Hermann Karagözoglu, Martin Hausner, Guido Lauck, Jürgen Schilz, Fred Plotz
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Patent number: 8360633Abstract: The invention concerns a device for determining the temperature inside an item to be cooked (12). The invention comprises at least one temperature sensor (20) for detecting at least one surface temperature of the item to be cooked (12) and/or an ambient temperature around the item to be cooked, particularly at a measuring location inside the cooking chamber surrounding the item to be cooked, preferably with an ambient temperature sensor which is arranged at said measuring location. Furthermore, the device comprises at least one distance sensor (22) for detecting one or multiple distances between the distance sensor (22) and one or multiple distance measuring points (36) on the surface of the item to be cooked (12).Type: GrantFiled: October 30, 2007Date of Patent: January 29, 2013Assignee: Electrolux Home Products Corporation N.V.Inventors: Christoph Luckhardt, Florian Ruther
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Patent number: 8353626Abstract: An apparatus for determining a temperature of an object without contacting the object. An etalon filter may be used to receive spectral radiation of the object over a plurality of wavelengths and to generate a spectral output signal. A linear array detector may be used that is responsive to the spectral output signal from the etalon filter and adapted to generate an output indicative of the spectral radiation at each of one of the plurality of wavelengths. An actuator may be used that controls movement of one element of the etalon filter to assist in generating the output. A processor may be used which is responsive to the output of the linear array detector and which analyzes a known characteristic of a black body at a plurality of test temperatures, against the output of the linear array detector, to determine a specific temperature of the object.Type: GrantFiled: January 24, 2011Date of Patent: January 15, 2013Assignee: The Boeing CompanyInventors: Mark D. Rogers, Loyal B. Shawgo
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Patent number: 8348502Abstract: There is provided a lighting apparatus that is capable of accurately measuring the temperature of an optical member that transmits therethrough light emitted from a light source without blocking the optical path of the light.Type: GrantFiled: June 25, 2010Date of Patent: January 8, 2013Assignee: Nikon CorporationInventor: Norifumi Nakagawa
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Publication number: 20120307862Abstract: The invention relates to a temperature control device (1) intended to be attached inside an opening (2) of a wall (8) defining an area to be controlled, said device including: a frame (4) intended to be fitted into said opening (2), provided with a means for attachment onto said opening, and with a sealing means for ensuring that the wall (8) is sealed at the opening (2); a heat sensor (5) that is housed inside the frame (4) and is arranged so as to receive infrared waves and convert said waves into electrical signals; and an optical system (6) that is rigidly connected to the frame (4) and is intended for focusing the infrared waves, coming from the area to be controlled, toward said heat sensor (5). The invention also relates to a chamber, having an opening and at least one such temperature control device mounted into said chamber. The invention moreover relates to a method for mounting such a temperature control device into an opening of a wall defining an area to be controlled.Type: ApplicationFiled: November 29, 2010Publication date: December 6, 2012Applicant: WINTECHInventors: Olivier Crottereau, José Fernandez
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Patent number: 8322919Abstract: A fiber-optic temperature sensor with a cantilever beam including two different material strips with different thermal expansion coefficients, the cantilever beam having a reflective surface on an end of the cantilever beam, an optical fiber probe including a transmitting multimode optical fiber and at least one receiving multimode optical fiber for receiving reflected light from the reflective surface. Temperature changes at the sensor are indicated by a change in reflected light coupled into the receiving multimode optical fiber due to lateral displacement of the edge of the reflective surface caused by bending of the cantilever beam. Some embodiments have additional reference receiving fibers for compensation for noise, changes in gap length, and other factors.Type: GrantFiled: February 2, 2010Date of Patent: December 4, 2012Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Nicholas Lagakos, Joseph A Bucaro
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Patent number: 8308348Abstract: The invention relates to a device for determining the dew point temperature of a measurement gas, having a light guide, a condensation surface located on the light guide and whose reflectivity is dependent on the condensation of the measurement gas, a light source for emitting light through the light guide onto the condensation surface, a light sensor for determining the light intensity reflected back into the light guide by the condensation surface and means for adjusting the temperature of the condensation surface, which has a semihydrophobic construction.Type: GrantFiled: July 28, 2005Date of Patent: November 13, 2012Assignee: Bartec Benke GmbHInventors: Alfred Boehm, Wilhelm Binder
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Patent number: 8297835Abstract: A regulation system for a compressor comprises a fiber-optic lattice sensor which makes it possible to determine a flow temperature of a fluid to be compressed by means of the compressor. Another aspect of the invention relates to a use of a fiber-optic Bragg lattice sensor as a temperature sensor in a regulation system.Type: GrantFiled: April 21, 2005Date of Patent: October 30, 2012Assignee: Siemens AktiengesellschaftInventors: Paul Girbig, Michael Willsch
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Publication number: 20120269228Abstract: An infrared sensor allows for a large temperature difference between a temperature sensor for the detection of infrared rays and a temperature sensor for temperature compensation; a reduction in size; and a low manufacturing cost. The infrared sensor comprises: an electrical insulating film sheet; first temperature sensor and second temperature sensor which are provided on one side of the electrical insulating film sheet, and are located at a distance from each other; first foil conductor patterns formed on one side face of the electrical insulating film sheet, and are connected to the first temperature sensor; second foil conductor patterns formed on the one side of the electrical insulating film sheet, and are connected to the second temperature sensor; and an infrared reflector film provided on the other side of the electrical insulating film sheet, and is opposite the second temperature sensor across the electrical insulating film sheet.Type: ApplicationFiled: October 14, 2010Publication date: October 25, 2012Applicant: Mitsubishi Materials CorporationInventors: Kenzo Nakamura, Sei Kitaguchi, Mototaka Ishikawa
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Patent number: 8235590Abstract: An engine for use in a thermal instrument. The engine includes an infrared camera module and may also include a visible light camera module. The engine includes several temperature sensors mounted on a printed circuit board assembly that permit the engine to provide improved radiometry functionality and improved fine offset compensation capabilities.Type: GrantFiled: August 21, 2008Date of Patent: August 7, 2012Assignee: Fluke CorporationInventors: Justin M. Sheard, Kirk R. Johnson, Michael E. Loukusa, Richard M. Jamieson
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Publication number: 20120183013Abstract: There are many industrial applications in which non-contact temperature sensing is useful for increasing production speed and quality, such as printing, laminating, extrusion, and metal forming. Disclosed is a non-contact temperature determining apparatus which uses two wide wavelength bands integrating sensors to determine the radiance ratio of a target and thereby determine a corresponding temperature of the target. Also disclosed is a non-contact temperature determining apparatus in which a beam splitter passes one wide wavelength band to a sensor and reflects another distinct wide wavelength band to another sensor from which temperature can be determined. A disclosed embodiment of the dual waveband temperature detector improves upon traditional and currently available ratio pyrometers by further reducing the cost of the system, making installation and use easier, and improving temperature detection for low temperature industrial applications.Type: ApplicationFiled: January 17, 2012Publication date: July 19, 2012Applicant: Exergen CorporationInventors: Alexander Stein, Francesco Pompei
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Patent number: 8172457Abstract: The invention relates to a method and a sensor for determining the hydrocarbon dew point in a gas, in particular in a gaseous fuel. According to the invention a roughened condensation surface is provided on a planar measurement surface of a transparent body. Light is shone onto the roughened condensation surface through the transparent body and the intensity of the light reflected back into the transparent body is measured. The hydrocarbon dew point temperature can be inferred from changes in the intensity of the light which is reflected back when heating or cooling the condensation surface.Type: GrantFiled: January 25, 2007Date of Patent: May 8, 2012Assignee: Bartec Benke GmbHInventor: Alfred Boehm
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Patent number: 8152365Abstract: A method and system are disclosed for determining at least one optical characteristic of a substrate, such as a semiconductor wafer. Once the optical characteristic is determined, at least one parameter in a processing chamber may be controlled for improving the process. For example, in one embodiment, the reflectivity of one surface of the substrate may first be determined at or near ambient temperature. From this information, the reflectance and/or emittance of the wafer during high temperature processing may be accurately estimated. The emittance can be used to correct temperature measurements using a pyrometer during wafer processing. In addition to making more accurate temperature measurements, the optical characteristics of the substrate can also be used to better optimize the heating cycle.Type: GrantFiled: June 29, 2006Date of Patent: April 10, 2012Assignee: Mattson Technology, Inc.Inventor: Paul Janis Timans
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Publication number: 20120031106Abstract: A system includes a radiation detector array configured to direct a field of view toward multiple conduits within a fluid flow path from a turbine into a heat exchanger. The radiation detector array is configured to output a signal indicative of a multi-dimensional temperature profile of the fluid flow path based on thermal radiation emitted by the conduits. The system also includes a controller communicatively coupled to the radiation detector array. The controller is configured to determine a temperature variation across the fluid flow path based on the signal, and to compare the temperature variation to a threshold value.Type: ApplicationFiled: August 5, 2010Publication date: February 9, 2012Applicant: General Electric CompanyInventors: Rahul Jaikaran Chillar, Julio E. Mestroni, Eric J. Kauffman, Adil Ansari
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Patent number: 8096704Abstract: Silicon Carbide (SiC) probe designs for extreme temperature and pressure sensing uses a single crystal SiC optical chip encased in a sintered SiC material probe. The SiC chip may be protected for high temperature only use or exposed for both temperature and pressure sensing. Hybrid signal processing techniques allow fault-tolerant extreme temperature sensing. Wavelength peak-to-peak (or null-to-null) collective spectrum spread measurement to detect wavelength peak/null shift measurement forms a coarse-fine temperature measurement using broadband spectrum monitoring. The SiC probe frontend acts as a stable emissivity Black-body radiator and monitoring the shift in radiation spectrum enables a pyrometer. This application combines all-SiC pyrometry with thick SiC etalon laser interferometry within a free-spectral range to form a coarse-fine temperature measurement sensor.Type: GrantFiled: May 19, 2009Date of Patent: January 17, 2012Assignees: Nusensors, Inc., University of Central FloridaInventors: Nabeel Agha Riza, Frank Perez
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Patent number: 8092081Abstract: A method and apparatus is provided for determining when a battery, or one or more batteries within a battery pack, undergoes an undesired thermal event such as thermal runaway. The system uses an optical fiber mounted in close proximity to, or in contact with, an external surface of the battery or batteries to be monitored. A source of light is optically coupled to the input facet of the optical fiber and a detector optically coupled to the output facet of the optical fiber. Battery health is determined by monitoring the light transmitted through the optical fiber.Type: GrantFiled: May 28, 2009Date of Patent: January 10, 2012Assignee: Tesla Motors, Inc.Inventors: Weston Arthur Hermann, Paul Bryan Kreiner, Scott Ira Kohn, Dorian West, Jonathan Louis Hall
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Publication number: 20110305258Abstract: An IR sensor comprises a heat sink substrate (10) having portions (12) of relatively high thermal conductivity and portions (14) of relatively low thermal conductivity and a planar thermocouple layer (16) having a hot junction (18) and a cold junction (20), with the hot junction (18) located on a portion (14) of the heat sink substrate with relatively low thermal conductivity. A low thermal conductivity dielectric layer (22) is provided over the thermocouple layer (16), and has a via (24) leading to the hot junction (18). An IR reflector layer (26) covers the low thermal conductivity dielectric layer (22) and the side walls of the via (24). An IR absorber (30; 30?) is within the via. This structure forms a planar IR microsensor which uses a structured substrate and a dielectric layer to avoid the need for any specific packaging. This design provides a higher sensitivity by providing a focus on the thermocouple, and also gives better immunity to gas conduction and convection.Type: ApplicationFiled: September 7, 2009Publication date: December 15, 2011Inventors: Mohamed Boutchich, Benoit Bataillou
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Publication number: 20110235675Abstract: There is provided a substrate mounting table capable of accurately measuring a temperature of a wafer supported on the substrate mounting table without incurring contamination within a chamber and without forming a hole for measuring a temperature in the substrate mounting table. The substrate mounting table includes a mounting surface 90a configured to mount a wafer W thereon; a substrate lifting unit 80 configured to lift the wafer W by a lift pin 84 from the mounting surface 90a; and a light irradiating/receiving unit 87 configured to irradiate a measurement light beam 88 as a low-coherence light beam to the wafer W through an inside of the lift pin 84 serving as an optical path and receive reflected light beams from a front surface and a rear surface of the wafer W. The light irradiating/receiving unit 87 is fixed to a base plate 86 of the substrate lifting unit 80.Type: ApplicationFiled: March 23, 2011Publication date: September 29, 2011Applicant: TOKYO ELECTRON LIMITEDInventors: Tatsuo Matsudo, Chishio Koshimizu
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Publication number: 20110228811Abstract: A non-contact infrared (IR) thermometer for measuring temperature from the surface of an object includes an IR radiation sensor attached to a heating element and a thermal shield having an interior surface positioned within the sensor's field of view that has a high emissivity. An electronic circuit controlling the heating element maintains the temperatures of the sensor and shield substantially close to an anticipated surface temperature of the object. The IR radiation sensor is further thermally coupled to a reference temperature sensor. An optical system positioned in front of the shield focuses thermal radiation from the object on the surface of the sensor, while the shield prevents stray radiation from reaching the sensor. Signals from the IR and reference sensors are used to calculate the object's surface temperature.Type: ApplicationFiled: October 23, 2009Publication date: September 22, 2011Applicant: Kaz USA, Inc.Inventor: Jacob Fraden
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Patent number: 8011827Abstract: The present invention provides a dual-probe thermally compensated fluorescence decay rate temperature sensor capable of measuring the true temperature of a sample surface and its associated method of use.Type: GrantFiled: September 3, 2010Date of Patent: September 6, 2011Assignee: University of South FloridaInventor: Nicholas Djeu
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Patent number: 8007733Abstract: An apparatus and methods are provided for heating and sensing the temperature of a chemical reaction chamber without direct physical contact between a heating device and the reaction chamber, or between a temperature sensor and the reaction chamber. A plurality of chemical reaction chambers can simultaneously or sequentially be heated independently and monitored separately.Type: GrantFiled: October 26, 2007Date of Patent: August 30, 2011Assignee: Applied Biosystems, LLCInventors: John Shigeura, Janice G. Shigeura, legal representative
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Patent number: 7997792Abstract: The present invention relates to an optical fiber temperature sensor capable of reducing an error in a temperature measurement. The sensor comprises an optical fiber, an optical frequency difference adjusting section, a light source system, a spectrum measuring section, a temperature calculating section, and a correcting section. The light source system outputs, into different ends of the optical fiber, probe light and pumping light of which each center frequency is set corresponding to an instruction from the optical frequency difference indicating section respectively. The temperature calculating section calculates a temperature of an object based on BGS in a first domain measured by the spectrum measuring section. On the other hand, the correcting section outputs a correction instruction to the light source system so that BGS center frequency of a second domain may be in agreement with a reference value thereof.Type: GrantFiled: August 21, 2007Date of Patent: August 16, 2011Assignee: Sumitomo Electric Industries, Ltd.Inventors: Eisuke Sasaoka, Yoshinori Yamamoto
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Patent number: 7980758Abstract: The invention concerns an equipment for non-contact temperature measurement (1) of samples of materials (2) arranged in a vacuum chamber (12). A UV lamp (6) illuminates the samples (2) through a window (4), so as to subject them to a predetermined thermal cycle and to perform an environmental test, in particular for materials designed for space missions. An external pyrometer measures the temperature of the samples (2) through a window (6). It is associated with a scanning module (9) including a mobile mirror, with two axes of rotation and three orthogonal axes of translation, arranged on the optical path of the infrared radiation (Rir) so as to obtain a two-dimensional scanning of each sample (2) by means of a measuring spot focused on the surface of the samples. In a preferred embodiment, the samples are of slight thickness and locked pressed against a convex support. The whole assembly is monitored by an automatic data processing system with recorded program (10).Type: GrantFiled: June 7, 2006Date of Patent: July 19, 2011Assignee: Organisation Intergouvernementale Dite Agence Spatiale EuropeenneInventors: Christoph SempriMoschnig, Marc Van Eesbeek, Stan Heltzel
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Patent number: 7959517Abstract: A method and apparatus for changing the temperature pattern of the surface of a golf ball or golf club is disclosed. The apparatus includes a thermal device capable of imparting a temperature pattern onto the surface of a golf ball. The thermal device preferably imparts the temperature pattern from a distance, preferably while the golf ball is positioned on a golf tee. After a predetermined amount of time, the golf ball may be stuck by a golf club. A thermal imaging device, which may detect a cooling pattern imparted to the golf ball by prongs of a cooling device, is preferably used to acquire images of the temperature pattern. The acquired images may then be analyzed by a processor to determine the kinematic characteristics of the golf ball.Type: GrantFiled: August 31, 2004Date of Patent: June 14, 2011Assignee: Acushnet CompanyInventor: Eric J. Lastowka