Optical System Structure (e.g., Lens) Patents (Class 374/130)
  • Publication number: 20110110395
    Abstract: A thermometer that enables the measurement of temperature from multiple body sites comprising a body portion that has a circuit configured to measure an IR signal and convert it into an output that accurately reflects body temperature and a switch in communication with the circuit. The thermometer also comprises a probe that has an IR window configured to accept an IR signal and an attachment mechanism coupled to the probe which comprises a generally circular hollow bore at its distal end, fastening members to engage the body of the thermometer and a pin at its proximal end for interacting with the switch on the body of the thermometer. When the attachment mechanism couples to the probe, the pin interacts with the switch in various positions and the circuit converts the signal based upon the position of the switch which position reflects the location from which the temperature measurement was taken.
    Type: Application
    Filed: October 4, 2010
    Publication date: May 12, 2011
    Inventor: Jacob FRADEN
  • Patent number: 7897908
    Abstract: A method and device are described for controlling and/or attenuating aiming laser beam brightness in a hand held radiometer. The beam from the laser is directed at a target measurement surface and a transversely movable element member is interposed between the laser and the target to change the beam brightness on the target. In a preferred device a slidable or rotatable element intercepts the beam between the laser and target and a calibrated opening in the element of selected size and/or shape allows part of the beam to pass through the element to provide a safe brightness at the target.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: March 1, 2011
    Assignee: White Box, Inc.
    Inventor: Milton Bernard Hollander
  • Patent number: 7876204
    Abstract: An object detection system is provided for detecting a thermal emitting object in a blind zone proximate to a host vehicle. The system includes a thermal radiation detector located on a host vehicle and configured to sense temperature of multiple coverage zones proximate to the host vehicle. A processor processes temperature sensed by an infrared detector. The processor determines a change in thermal temperature sensed by the infrared detector and determines the presence of an object in the coverage zone based on the change in the sensed temperature. An output provides a signal indicative of an object sensed in the coverage zone based on the determined change in temperature.
    Type: Grant
    Filed: January 25, 2008
    Date of Patent: January 25, 2011
    Assignee: Delphi Technologies, Inc.
    Inventor: Ronald M. Taylor
  • Publication number: 20100329302
    Abstract: There is provided a lighting apparatus that is capable of accurately measuring the temperature of an optical member that transmits therethrough light emitted from a light source without blocking the optical path of the light.
    Type: Application
    Filed: June 25, 2010
    Publication date: December 30, 2010
    Applicant: NIKON CORPORATION
    Inventor: Norifumi Nakagawa
  • Publication number: 20100309950
    Abstract: A temperature detector has: an infrared sensor located so as not to be in contact with a measured object; an infrared transmission filter which is located between the infrared sensor and the measured object so as to block the infrared sensor from the measured object, and through which infrared rays emitted from the measured object pass; and a distance changer for changing a distance between the measured object and the infrared transmission filter, wherein the infrared sensor is provided so as to detect the infrared rays, which have passed through the infrared transmission filter, to detect a temperature of the measured object even when the distance is changed by the distance changer.
    Type: Application
    Filed: June 7, 2010
    Publication date: December 9, 2010
    Applicant: KONICA MINOLTA BUSINESS TECHNOLOGIES, INC.
    Inventor: Yutaka OTSUKA
  • Publication number: 20100292951
    Abstract: A system and method are disclosed that determines the emissivity and temperature of a target object. A compact emitter capable of sequentially emitting blackbody-like radiation at two different temperatures is used to determine the target object's emissivity and temperature.
    Type: Application
    Filed: May 15, 2009
    Publication date: November 18, 2010
    Applicant: Fluke Corporation
    Inventors: Reno Gaertner, Steffen Ludwig, Rainer Kuepper, Klaus-Peter Moellmann
  • Publication number: 20100238970
    Abstract: A low temperature radiometer includes a main body, a main cavity, an exit cavity, a suspended thermometer, and an attached thermometer. The main cavity is disposed within the main body and is defined through an off-axis parabolic concentrating cone formed of the inner walls of the main body. The exit cavity is disposed within the main body and is defined through a cylindrical inner surface of the main body. The suspended thermometer is suspended within the exit cavity and is disposed to be in communication with radiation entering the main cavity and being diverted to the exit cavity. The attached thermometer is attached to the outer surface of the main body and is in thermal communication and contact with the main body.
    Type: Application
    Filed: September 16, 2009
    Publication date: September 23, 2010
    Applicant: United States of America as represented by the Ad- ministrator of the National Aeronautics and Space
    Inventors: Michael DiPirro, Thomas P. Hait, James G. Tuttle
  • Patent number: 7789556
    Abstract: The present invention provides a dual-probe thermally compensated fluorescence decay rate temperature sensor capable of measuring the true temperature of a sample surface and its associated method of use.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: September 7, 2010
    Assignee: University of South Florida
    Inventor: Nicholas Djeu
  • Patent number: 7787726
    Abstract: A blanket or article of wearing apparel for a subject such as an infant. A fiber optic temperature sensing element is integrated into the fabric by a process such as weaving. The temperature sensing element is a optic fiber having inscribed therein one or more fiber Bragg grating sensors such that a light is introduced into the optic fiber and that light directed onto the subject at a grating interface. A return light signal is received, either by a reflectance mode or a transmission mode, where the return light signal has a wavelength shift indicative of the temperature of the subject by Bragg resonant effect. Higher temperature sensitivity is obtained with a metal material of a high thermal expansion coefficient that is coated around the fiber sensor cladding.
    Type: Grant
    Filed: March 14, 2007
    Date of Patent: August 31, 2010
    Assignee: General Electric Company
    Inventors: Lawrence G. Ten Eyck, Lynn E. Lynam, Hua Xia, Kung-Li J. Deng
  • Patent number: 7767927
    Abstract: Methods and apparatus for remotely measuring temperature of a specular surface. Method takes two measurements of P-polarized radiation emitted at or near Brewster angle from the surface. First measurement (SA) collects and detects first amount of radiation emitted directly from a surface portion using a collection optical system. Second measurement (SB) includes first amount of radiation and adds quantity of radiation collected at or near at/near Brewster angle and reflected from the surface with a retro optical system with a round-trip transmission t2 that retro-reflects a quantity of radiation received from surface portion back to same surface portion where it reflects and combines with first amount of radiation collected by collection optical system. Measurements SA and SB and t2 are used to determine surface emissivity (?). Calibration curve is used that relates ratio of the first measurement SA to surface emissivity (SA/?), to surface temperature.
    Type: Grant
    Filed: May 16, 2005
    Date of Patent: August 3, 2010
    Assignee: Ultratech, Inc.
    Inventor: David A. Markle
  • Publication number: 20100183045
    Abstract: A substrate temperature measuring apparatus includes: a heating source that heat a substrate; a transmission window that transmits therethrough an infrared ray in a range of a wavelength at which the infrared ray cannot transmit through the substrate; and a temperature-measuring instrument having a sensitivity range including the range of the wavelength, and measuring a substrate temperature of the substrate by analyzing an infrared ray radiated from the substrate heated by the heating source and having transmitted through the transmission window.
    Type: Application
    Filed: July 22, 2008
    Publication date: July 22, 2010
    Applicant: ROHM CO., LTD.
    Inventors: Ken Nakahara, Masashi Kawasaki, Akira Ohtomo, Atsushi Tsukazaki
  • Patent number: 7758238
    Abstract: Temperature measurement using a pyrometer in a processing chamber is described. The extraneous light received by the pyrometer is reduced. In one example, a photodetector is used to measure the intensity of light within the processing chamber at a defined wavelength. A temperature circuit is used to convert the measured light intensity to a temperature signal, and a doped optical window between a heat source and a workpiece inside processing chamber is used to absorb light at the defined wavelength directed at the workpiece from the heat source.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: July 20, 2010
    Assignee: Intel Corporation
    Inventors: Sridhar Govindaraju, Karson Knutson, Harold Kennel, Aravind Killampalli, Jack Hwang
  • Patent number: 7698114
    Abstract: Techniques for enhancing thermal design of a system having a number of boundary values are provided. A method for such enhancement includes representing thermal response of the system to the boundary values, obtaining at least one constraining parameter, and determining spatial and/or temporal distribution of the boundary values. The thermal response is represented as a superposition of temperature fields associated with given boundary values. The spatial and/or temporal distribution of the boundary values is determined based on the thermal response represented in the representing step, so as to satisfy the constraining parameter. The boundary values can be, for example, power sources, and the at least one constraining parameter can be, for example, a spatial or temporal location of one of the power sources.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: April 13, 2010
    Assignee: International Business Machines Corporation
    Inventors: Hendrik F. Hamann, James A. Lacey, Jamil Wakil, Alan J. Weger
  • Publication number: 20100086006
    Abstract: A temperature measuring apparatus, a temperature measuring method, and a thermal treatment apparatus which are suitable for temperature measurement of a substrate subjected to a rapid heating in thermal treatment are provided. The temperature measuring apparatus includes a light intensity measuring unit, a calculation unit, and a temperature output unit. In the light intensity measuring unit, an object to be heated having a uniquely defined correlation between temperature and refractive index is irradiated with a probe laser beam, and a light intensity property X is determined which represents a relationship between time and light intensity of a reflected light or a transmitted light occurring as a result of interference of the multiply-reflected probe laser beam within the object to be heated.
    Type: Application
    Filed: July 4, 2006
    Publication date: April 8, 2010
    Applicant: HIROSHIMA UNIVERSITY
    Inventor: Seiichiro Higashi
  • Patent number: 7686505
    Abstract: The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
    Type: Grant
    Filed: January 31, 2006
    Date of Patent: March 30, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Frank Meltzer, Axel Scholz
  • Publication number: 20100046577
    Abstract: An engine for use in a thermal instrument. The engine includes an infrared camera module and may also include a visible light camera module. The engine includes several temperature sensors mounted on a printed circuit board assembly that permit the engine to provide improved radiometry functionality and improved fine offset compensation capabilities.
    Type: Application
    Filed: August 21, 2008
    Publication date: February 25, 2010
    Applicant: FLUKE CORPORATION
    Inventors: Justin M. Sheard, Kirk R. Johnson, Michael E. Loukusa, Richard M. Jamieson
  • Patent number: 7665891
    Abstract: A differential temperature sensor system and method of determining a temperature shift of an optical resonator and its surroundings are provided. The differential temperature sensor system includes a light generating device capable of generating a beam having a carrier frequency, a modulator capable of modulating the beam with a sideband frequency, and an optical resonator capable of supporting an ordinary mode and an extraordinary mode. The system includes an ordinary mode-lock setup capable of locking the carrier frequency of the beam to the ordinary mode of the optical resonator and an extraordinary mode-lock setup capable of locking the sideband frequency of the beam to the extraordinary mode of the optical resonator by providing a specific radio frequency to the modulator substantially corresponding to a frequency shift between the ordinary mode and the extraordinary mode of the optical resonator resulting from a temperature change of the optical resonator.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: February 23, 2010
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Anatoliy A. Savchenkov, Nan Yu, Lute Maleki, Vladimir S. Iltchenko, Andrey B. Matsko, Dmitry V. Strekalov
  • Patent number: 7651264
    Abstract: The object is to provide a laser processing apparatus, a laser processing temperature measuring apparatus, a laser processing method, and a laser processing temperature measuring method which can highly accurately detect the processing temperature when carrying out processing such as welding with laser light. A laser processing apparatus 1A for processing members. DR, UR to be processed by irradiating the members with laser light LB comprises a laser (semiconductor laser unit 20A) for generating the laser light LB; optical means for converging the laser light LB generated by the laser onto processing areas DA, UA; and a filter 30, disposed between the members DR, UR to be processed and the optical means, for blocking a wavelength of fluorescence generated by the optical means upon pumping with the laser light LB; wherein light having the wavelength blocked by the filter 30 is used for measuring a temperature of the processing areas DA, UA.
    Type: Grant
    Filed: June 18, 2003
    Date of Patent: January 26, 2010
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Satoshi Matsumoto, Tsuyoshi Kosugi
  • Patent number: 7628536
    Abstract: A microscope apparatus includes: a microscope unit; a chamber, arranged next to the microscope unit, that houses a specimen to be observed by the microscope unit; a humidifier, connected to the chamber, that humidifies the interior of the chamber; a chamber temperature sensor that measures a temperature within the chamber; a microscope temperature sensor that measures a temperature of the microscope unit; and a determination device that determines whether or not observation by microscope is possible based on outputs of the chamber temperature sensor and the microscope temperature sensor.
    Type: Grant
    Filed: December 11, 2008
    Date of Patent: December 8, 2009
    Assignee: Nikon Corporation
    Inventor: Izumi Umemura
  • Publication number: 20090296776
    Abstract: Silicon Carbide (SiC) probe designs for extreme temperature and pressure sensing uses a single crystal SiC optical chip encased in a sintered SiC material probe. The SiC chip may be protected for high temperature only use or exposed for both temperature and pressure sensing. Hybrid signal processing techniques allow fault-tolerant extreme temperature sensing. Wavelength peak-to-peak (or null-to-null) collective spectrum spread measurement to detect wavelength peak/null shift measurement forms a coarse-fine temperature measurement using broadband spectrum monitoring. The SiC probe frontend acts as a stable emissivity Black-body radiator and monitoring the shift in radiation spectrum enables a pyrometer. This application combines all-SiC pyrometry with thick SiC etalon laser interferometry within a free-spectral range to form a coarse-fine temperature measurement sensor.
    Type: Application
    Filed: May 19, 2009
    Publication date: December 3, 2009
    Inventors: Nabeel Agha Riza, Frank Perez
  • Publication number: 20090285259
    Abstract: A thermal measurement system for an object is provided. The system includes an array of detectors in two dimensions configured to receive radiation within multiple wavelength ranges, the array of detectors having a first axis representing a spatial dimension and a second axis representing a wavelength dimension. The system also includes an optical system configured to focus the radiation emitted by the object on to the array of detectors.
    Type: Application
    Filed: May 14, 2008
    Publication date: November 19, 2009
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Jason Randolph Allen, Nirm Velumylum Nirmalan, Mohamed Sakami
  • Patent number: 7611277
    Abstract: Egg candling methods and apparatus are provided wherein non-live eggs, inverted egg, and side air cell eggs can be quickly identified. A method of candling eggs includes exposing a plurality of incubated eggs to an environment having a temperature different from a temperature at which the eggs were incubated; obtaining a thermal image of the eggs; and analyzing the thermal image to obtain surface temperature information for each egg. The surface temperature information is utilized to designate each egg as live/non-live, inverted, or having a side air cell.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: November 3, 2009
    Assignee: Embrex, Inc.
    Inventors: John H. Hebrank, Monika Garrell
  • Patent number: 7611278
    Abstract: The present invention is directed to a hand-held infrared thermometer or radiometer (1) for measuring, remotely, the temperature of a target surface (3). In one embodiment, the radiometer includes an infrared detector (7), associated optical system (7), and associated circuitry and an LCD display (21). Built into or mounted on the radiometer is a distance measuring device (2), the operation of which is controlled by the radiometer. The device (2) includes an ultrasonic transmitter/receiver (12) and associated circuitry for calculating, from a comparison of the transmitted and received pulses, the distance of the radiometer from the target surface. The distance-to-target is displayed on the LCD display (21).
    Type: Grant
    Filed: December 1, 2004
    Date of Patent: November 3, 2009
    Assignee: White Box, Inc.
    Inventors: Milton Bernard Hollander, Shahin Baghai
  • Patent number: 7604399
    Abstract: A temperature monitor for monitoring plural locations on an electrical bus structure. The temperature monitor includes an infrared sensor for receiving infrared energy from a plurality of discrete predetermined locations on the bus structure, a first member defining a stationary first mask, a second member defining a rotating second mask, and a drive member driving the second member in rotation relative to the first member. Rotation of the second member relative to the first member defines an aperture translated across the first mask member to provide a moving line-of-sight that extends from the sensor and that scans to each of the discrete predetermined locations on the bus structure.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: October 20, 2009
    Assignee: Siemens Energy, Inc.
    Inventors: Michael Twerdochlib, Evangelos V. Diatzikis, Edward D. Thompson, David Bateman
  • Patent number: 7591586
    Abstract: A method of precisely measuring temperature of an object without having to setting the emissivity of the object over a wide temperature range from low to high temperature with a single radiation thermometer. The temperature-measuring device of the present invention includes a reference object having an emissivity of substantially 1 in a prescribed wavelength range; a bandpass filter transmitting radiant energy in the prescribed wavelength range; and a radiation thermometer for observing temperature by taking in the radiant energy transmitted through the bandpass filter.
    Type: Grant
    Filed: August 9, 2007
    Date of Patent: September 22, 2009
    Assignee: Japan Aerospace Exploration Agency
    Inventor: Akira Ohnishi
  • Patent number: 7585107
    Abstract: Methods and apparatus allowing distributed temperature sensing (DTS) measurements to be compensated for differential and/or varying loss between Raman Stokes and anti-Stokes signals are provided. By irradiating an optical waveguide with signals at wavelengths at or near the Raman Stokes and anti-Stokes bands, a distributed loss profile for the waveguide may be generated. This distributed loss profile may be used to adjust the amplitudes or amplitude ratios of Raman Stokes and anti-Stokes signals used in DTS measurements, which may lead to more accurate DTS profiles.
    Type: Grant
    Filed: January 17, 2006
    Date of Patent: September 8, 2009
    Assignee: Weatherford/Lamb, Inc.
    Inventors: Domino Taverner, Trevor MacDougall
  • Publication number: 20090213898
    Abstract: A temperature probe for use in oil-filled transformers comprises an optical fiber, a temperature sensitive member, and a protective cylindrical sheath. The optical fiber and the sensitive member are located in the protective sheath, and continuous longitudinal slit is defined along the length of the sheath to allow oil to flow therein. The optical fiber is mounted in and to the sheath using a bonding material and at a distance from the sheath. The sensitive member is adhesively mounted to the optical fiber, within the sheath, and at a distance thereof.
    Type: Application
    Filed: October 17, 2008
    Publication date: August 27, 2009
    Inventors: Jean-Francois Meilleur, Jean-Noel Berube, Michel Plourde
  • Patent number: 7573565
    Abstract: Methods and systems are provided for determining the density and/or temperature of a fluid based on a reflection of optical energy directed at the fluid.
    Type: Grant
    Filed: January 3, 2007
    Date of Patent: August 11, 2009
    Assignee: Strube, Inc.
    Inventors: Mark A. Mentzer, Nicholas P. Petrillo, Wayne A. Webb
  • Patent number: 7554060
    Abstract: Among other things, light that carries information about cooking is directed in a first direction towards a redirection element and, at the redirection element, the light is redirected to be visible to a person cooking.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: June 30, 2009
    Inventors: Raymond O. England, Barret Lippey, Deborah E. Rodgers, Laura J. Schroeder
  • Patent number: 7550725
    Abstract: Hand held infrared measurement devices are disclosed, having at least two separated laser sighting emitters (2), which together mark and define a sighting area on a target surface (7,7?,7?). In an embodiment of the invention, separate lasers (2) are provided which each produce a beam (6) used to illuminate a respective separate optical beam directing element (4), mounted between each laser emitter and the target surface (7,7?,7?). The element may be, for example, any of the optical glass fibers, a prism, or a lens, such as a diffraction beam splitter lens, or a refractive lens, each element directing laser light onto the target surface to produce a visually perceptible target marking. The element is preferably made of optical material such as glass or plastic (e.g., methyl methacrylate). Separate laser emitters permit greater brightness displayed on the target within safe operation limits than use of a single laser alone, even with a beam splitter.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: June 23, 2009
    Assignee: White Box, Inc.
    Inventors: Milton Barnard Hollander, Shahin Baghai
  • Publication number: 20090129436
    Abstract: A device for measuring a temperature of an exhaust gas flow in an exhaust branch of an exhaust gas section of an internal combustion engine is disclosed. A sub-region of the exhaust branch is configured as a parabolic mirror having a focal point positioned outside of the exhaust branch. The device includes a side channel member attached to the exhaust branch and having an open end adjacent to the exhaust branch and a closed end; and a radiation sensitive sensor disposed in the side channel member and at the focal point. The open end is in fluid communication with an interior of the exhaust branch through a cutout of the exhaust branch so that the sensor is coupled to radiation of the exhaust gas flow for measuring a temperature of the exhaust gas flow. A related method is also disclosed.
    Type: Application
    Filed: May 4, 2006
    Publication date: May 21, 2009
    Applicant: Siemens VDO Automotive AG
    Inventors: Manfred Glehr, Stephan Heinrich
  • Patent number: 7534031
    Abstract: The temperature measuring device of the present invention comprises: a light source for outputting light; an optical fiber to which light outputted by the light source is inputted and from which Brillouin scattered light is outputted; a detection unit for detecting a spectrum of the Brillouin scattered light; a judgment unit for judging whether or not a frequency shift of the spectrum of the Brillouin scattered light detected by the detection unit belongs to a specific region in which the rate of change of the frequency shift with respect to the temperature of the optical fiber is smaller than a predetermined value; and an analysis unit for, when the judgment unit judges that the frequency shift does not belong to the specific region, analyzing the temperature in use of the frequency shift, and for, when the judgment unit judges that the frequency shift belongs to the specific region, not performing analysis, or analyzing the temperature in use of at least the linewidth of the spectrum of the Brillouin scatte
    Type: Grant
    Filed: October 5, 2006
    Date of Patent: May 19, 2009
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Yoshinori Yamamoto, Itaru Sakabe, Eisuke Sasaoka
  • Publication number: 20090116125
    Abstract: The present invention concerns a lens system. More specifically, it concerns a lens system comprising a first lens (3), a deflection element (5) and a second lens (6), wherein the deflection element (5) is arranged between the first lens (3) and the second lens (6). The deflection element comprises at least a first annular zone and a second annular zone, the annular zones being arranged in a concentric fashion and wherein the deflection angle of each annular zone is different from the deflection angle of every other annular zone. Furthermore, the present invention concerns a temperature analysis system comprising a lens system and the use of a temperature analysis system.
    Type: Application
    Filed: May 25, 2007
    Publication date: May 7, 2009
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Aleksey Kolesnychenko, Sjoerd Stallinga, Hendrik Roelof Stapert
  • Patent number: 7494272
    Abstract: Apparatus for dynamic surface annealing of a semiconductor wafer includes a source of laser radiation emitting at a laser wavelength and comprising an array of lasers arranged in rows and columns, the optical power of each the laser being individual adjustable and optics for focusing the radiation from the array of lasers into a narrow line beam in a workpiece plane corresponding to a workpiece surface, whereby the optics images respective columns of the laser array onto respective sections of the narrow line beam. A pyrometer sensor is provided that is sensitive to a pyrometer wavelength. An optical element in an optical path of the optics is tuned to divert radiation emanating from the workpiece plane to the pyrometry sensor. As a result, the optics images each of the respective section of the narrow line beam onto a corresponding portion of the pyrometer sensor.
    Type: Grant
    Filed: September 1, 2006
    Date of Patent: February 24, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Timothy N. Thomas, Dean Jennings, Bruce E. Adams, Abhilash J. Mayur
  • Publication number: 20090037135
    Abstract: A radiation thermometer comprising a radiation detector and an optical input path arranged to direct radiation from an object of interest to the radiation detector is disclosed. The radiation detector is adapted to output a signal related to the radiation received from the object of interest, and a processor is adapted to generate temperature measurements from the signal. Filtering means are provided in the optical input path which are arranged to block radiation having a wavelength between approximately 0.92 and 0.98 microns.
    Type: Application
    Filed: February 6, 2007
    Publication date: February 5, 2009
    Applicant: Land Instruments International Limited
    Inventors: Adrian John Masefield Lyndon, Ian Hamilton Ridley, Stuart Francis Metcalfe
  • Publication number: 20080259994
    Abstract: Disclosed herein is a system and method for measuring radiation temperature through filtration of optical error sources, which can measure surface temperatures of a heating substance within a heating furnace. The system comprises a front lens to collect infrared rays from a measuring target and from surroundings, a pin hole plate having a pin hole formed therein to allow only the infrared rays emitting from the measuring target area to pass therethrough, a rear lens to convert the infrared rays having passed through the pin hole into horizontal infrared rays, a condenser lens to collect the infrared rays having passed through the rear lens, and a radiation pyrometer to measure a temperature of the infrared rays having passed through the filtering unit. The system possible can ensure accuracy and reliability in temperature measurement, and can provide highly precise combustion control, operation stability, and improvement in quality of products.
    Type: Application
    Filed: February 27, 2006
    Publication date: October 23, 2008
    Inventors: Seong-Wan Kim, Deok-Hong Kang, Ki-Hong Kim
  • Patent number: 7429735
    Abstract: The invention is directed to systems and methods of digital signal processing and in particular to systems and methods for measurements of thermoreflectance signals, even when they are smaller than the code width of a digital detector used for detection. For example, in some embodiments, the number of measurements done is selected to be sufficiently large so as to obtain an uncertainty less than the code width of the detector. This allows for obtaining images having an enhanced temperature resolution. The invention is also directed to methods for predicting the uncertainty in measurement of the signal based on one or more noise variables associated with the detection process and the number of measurement iterations.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: September 30, 2008
    Assignees: Mass Institute of Technology (MIT), Mount Holyoke College
    Inventors: Dietrich Lueerssen, Rajeev J. Ram, Janice A. Hudgings, Peter M. Mayer
  • Publication number: 20080225925
    Abstract: Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
    Type: Application
    Filed: March 14, 2008
    Publication date: September 18, 2008
    Applicant: Entegris, Inc.
    Inventors: Marc Laverdiere, Robert F. McLoughlin, Michael Clarke, Dale Maenke, Wiley James Wilkinson
  • Publication number: 20080227349
    Abstract: A blanket or article of wearing apparel for a subject such as an infant. A fiber optic temperature sensing element is integrated into the fabric by a process such as weaving. The temperature sensing element is a optic fiber having inscribed therein one or more fiber Bragg grating sensors such that a light is introduced into the optic fiber and that light directed onto the subject at a grating interface. A return light signal is received, either by a reflectance mode or a transmission mode, where the return light signal has a wavelength shift indicative of the temperature of the subject by Bragg resonant effect. Higher temperature sensitivity is obtained with a metal material of a high thermal expansion coefficient that is coated around the fiber sensor cladding.
    Type: Application
    Filed: March 14, 2007
    Publication date: September 18, 2008
    Inventors: Lawrence G. Ten Eyck, Lynn E. Lynam, Hua Xia, Kung-Li J. Deng
  • Patent number: 7425093
    Abstract: A method and apparatus for thermographically evaluating the bond integrity of a sputtering target assembly is described. The method includes applying a heating or cooling medium or energy to one surface of the assembly and acquiring a graphic recording of a corresponding temperature change on the opposing surface of the assembly using an imaging device. Also described is a method of mathematically analyzing the pixel data recorded in each frame to produce an integrated normalized temperature map that represents the bond integrity of the assembly.
    Type: Grant
    Filed: July 13, 2004
    Date of Patent: September 16, 2008
    Assignee: Cabot Corporation
    Inventors: Charles E. Wickersham, Jr., Zhiguo Zhang, Larry Edwin Ellison, Mikhail Y. Kachalov, John D. White, III
  • Patent number: 7416330
    Abstract: The temperature of the surface and/or inside of a substrate is measured by irradiating the front surface or rear surface of the substrate, whose temperature is to be measured, with light and measuring the interference of a reflected light from the substrate and a reference light. A method and apparatus for measuring temperature or thickness which is suitable for directly measuring the temperature of the outermost surface layer of a substrate, and an apparatus for treating a substrate for an electronic device, which uses such method, are provided.
    Type: Grant
    Filed: August 4, 2005
    Date of Patent: August 26, 2008
    Assignees: Tokyo Electron Limited
    Inventors: Masafumi Ito, Yasuyuki Okamura, Tatsuo Shiina, Nobuo Ishii, Tomohiro Suzuki, Chishio Koshimizu
  • Patent number: 7364355
    Abstract: A method of linearizing the output a infrared camera having an InGaAs includes determining the an equivalent black body temperature of an object by utilizing a plurality of calibration constants determined by collecting data from a number of temperatures of the object, and determining a target temperature of the object by utilizing the equivalent black body temperature and the emissivity of the object.
    Type: Grant
    Filed: June 23, 2005
    Date of Patent: April 29, 2008
    Assignee: Ircon, Inc.
    Inventor: Steven Ignatowicz
  • Patent number: 7357570
    Abstract: A method and device for determining the temperature of a sample, wherein a probing light beam is directed onto the sample whereby at least two partial beams of the probing light pass through paths of different lengths inside the sample by backscattering or reflecting the beams from at least two different depths in the sample, returning the partial beams to an analysis unit, and producing an interference pattern in the analysis unit by means of an interferometric device which uses one light beam as a reference for evaluating the interference pattern in an evaluating unit, wherein the signal intensity of the partial beam is determined counter to the optical path and the temperature displacement and temperature of the sample are determined by the temperature adjustment of the signal intensity.
    Type: Grant
    Filed: January 11, 2004
    Date of Patent: April 15, 2008
    Assignee: Medizinisches Laserzentrum Luebeck GmbH
    Inventor: Georg Schuele
  • Patent number: 7350972
    Abstract: A temperature sensing method in which pulses of optical radiation are launched by a laser diode (11) into an optical fibre (14) and optical radiation backscattered from the fibre is detected, the method comprising passing the backscattered radiation through a single optical filter (15) whereby a first signal is recorded at the anti-Stokes Raman wavelength from a signal launched by the laser diode in a laser mode and a second signal is recorded at the Rayleigh wavelength from a signal launched by the laser diode in a light emitting diode mode, and a comparison is made of the two signals to provide an indication of temperature.
    Type: Grant
    Filed: September 29, 2003
    Date of Patent: April 1, 2008
    Inventors: Peter John Seebacher, Ian Keith Hook, Paul Randall Stoddart
  • Patent number: 7339685
    Abstract: A radiometer includes a sighting system that generates a digital image of an object surface having an area that is to be imaged onto the IR detector. A shape outline is overlaid on the digital image of an object surface to indicate the extent of the energy zone that is imaged onto the IR detector. In one embodiment, a shape is displayed between the locations of two imaged skewed laser dots to indicate the extent of the energy zone without requiring a range determination.
    Type: Grant
    Filed: March 6, 2006
    Date of Patent: March 4, 2008
    Assignee: Fluke Corporation
    Inventors: Paul Carlson, Patrick Parker, Alex S. Nikittin, Thomas Heinke
  • Patent number: 7306367
    Abstract: A method and system for measuring remotely the surface temperature of a silicon wafer and layers, without the need to know the surface emissivity. The surface temperature is measured in-situ and in real-time during a high-temperature process, in a vacuum system, by using the linear polarization property of radiation. A blackbody source is heated to various, known temperatures, and provides radiation that impinges on the silicon surface and is reflected from it together with a self-emitted component. This combined reflected radiation is polarized and filtered to an appropriate wavelength, and observed with an imaging camera. Pairs of orthogonally polarized images of the surface are obtained for a set silicon surface temperature and for each blackbody temperature. The pairs of images are analyzed, pixel by pixel, to obtain a null polar level indicative of the surface temperature.
    Type: Grant
    Filed: January 23, 2002
    Date of Patent: December 11, 2007
    Assignee: Electro-Optics Research & Development Ltd.
    Inventors: Leslie Salem, Eitan Zeiler, Omri Govrin
  • Patent number: 7303331
    Abstract: A temperature measuring system, comprising an imaging device for focusing radiation towards a radiation detector, wherein the imaging device is a diffractive optical device.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: December 4, 2007
    Assignee: Rolls-Royce plc
    Inventor: Harold Heyworth
  • Patent number: 7284903
    Abstract: A method of obtaining a distributed measurement comprises deploying an optical fibre in a measurement region of interest, and launching into it a first optical signal at a first wavelength ?0 and a high power level, a second optical signal at a second wavelength ??1, and a third optical signal at the first wavelength ?0 and a low power level. These optical signals generate backscattered light at the second wavelength ??1 arising from Raman scattering of the first optical signal which is indicative of a parameter to be measured, at the first wavelength ?0 arising from Rayleigh scattering of the first optical signal, at the second wavelength ?—1 arising from Rayleigh scattering of the second optical signal, and at the first wavelength ?0 arising from Rayleigh scattering of the third optical signal.
    Type: Grant
    Filed: March 31, 2005
    Date of Patent: October 23, 2007
    Assignee: Schlumberger Technology Corporation
    Inventor: Arthur H. Hartog
  • Patent number: 7192186
    Abstract: A multimeter with non-contact temperature measurement capability. The multimeter is contained in a housing, and has outputs relating to measured electrical parameters. There is also an output display contained in the housing, for displaying results to a user. A non-contact optically-based temperature sensing device is coupled to the housing, and has an output related to sensed temperature. Circuitry contained in the housing processes both the multimeter outputs and the temperature sensing device output, and transmits the processed output to the output display.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: March 20, 2007
    Assignee: Extech Instruments Corporation
    Inventor: Gerald W. Blakeley, III
  • Patent number: 7056012
    Abstract: A multimeter with non-contact temperature measurement capability. The multimeter is contained in a housing, and has outputs relating to measured electrical parameters. There is also an output display contained in the housing, for displaying results to a user. A non-contact optically-based temperature sensing device is coupled to the housing, and has an output related to sensed temperature. Circuitry contained in the housing processes both the multimeter outputs and the temperature sensing device output, and transmits the processed output to the output display.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: June 6, 2006
    Assignee: Extech Instruments Corporation
    Inventor: Gerald W. Blakeley, III