Abstract: A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especially in a proximity mode where the same is held in close proximity to the scintillator. In this case, a sample holder is provided that can rotate the sample. Further, a z-axis motion stage is also provided that is used to control distance between the sample and the scintillator.

Abstract: An apparatus for X-ray analysis includes (1) a focusing optical system including an X-ray source, a specimen table and a two-dimensional X-ray detector, (2) a device for shifting the angle of incidence of X-rays relative to a specimen supported by the specimen table, (3) a device for moving the two-dimensional X-ray detector in parallel with a central axis of rotation of the specimen and (4) a mask arranged in front of the two-dimensional X-ray detector. The mask has a slit arranged on a line intersecting a plane rectangularly intersecting the central axis of rotation of the specimen and containing a central optical axis of incident X-rays. The mask is driven to move in parallel with the axis of rotation of the specimen so that measuring can be conducted.

Abstract: A monochromator 4 is used to direct X-rays from X-ray source 2 onto a sample 14 as a convergent beam. The sample 14 is in a growth chamber. The sample is rotated, and diffraction measurements are made in parallel with multichannel detector 22. A specific reflection is used so that the intensity against angle graph measured in the multichannel detector gives information about the vertical lattice parameter. To compensate for wobble inevitably introduced by the rotation of the sample, short time measurements are made and summed.

Abstract: An X-ray diffractometer (1) comprising an X-ray source (2) emitting a line focus X-ray beam (3; 11) wherein the larger extension of the beam cross section defines a line direction (4; 12) of the X-ray beam (3; 11), further comprising a sample (6; 13), and an X-ray detector (7) rotatable in a scattering plane around an axis ? intersecting the position of the sample (7) is characterized in that the X-ray source is mounted to a switching device (10), which allows to move the X-ray source into one of two fixed positions with respect to the scattering plane, wherein in the first position the line direction (4) of the X-ray beam (3) is parallel to the scattering plane and in the second position the line direction (12) of the X-ray beam (11) is perpendicular to the scattering plane, and wherein the path of the X-ray beam (3, 11) in the two fixed positions of the X-ray source is the same.

Abstract: The present invention relates to a method for performing a transmission diffraction analysis of an analyte on a support surface, wherein the method comprises: irradiating said analyte with a radiation beam generated by a source of radiation, and detecting said radiation after passing through the analyte. The method is characterised in that irradiation is performed such that the radiation beam strikes the analyte in a substantially vertical and substantially perpendicular direction. Further the present invention relates to an apparatus for performing a transmission diffraction analysis.

Abstract: A device (1; 1a) for the examination of at least one material sample (3; 3a, 3b, 3c) which can be inserted into the device (1; 1a) and is irradiated by means of electromagnetic waves (4), notably X-rays; in the measuring position the material sample (3; 3a, 3b, 3c) can be subjected to irradiation by means of the electromagnetic waves (4) and during a change of sample the beam path (4) can be interrupted by means of a closure element (8) which can be moved into the beam path. The device is constructed in such a manner that the closure element (8) is provided with a reference sample (9) on its side which faces the rays (4) in a manner such that a reference measurement can be performed thereon during a change of sample.

Abstract: An -ray emitted from an incident optical system is incident on a sample supported by a sample support mechanism, and a diffracted X-ray is detected by a receiving optical system. The incident optical system includes an X-ray source and a multilayer-film mirror. An attitude controlling unit of the sample support mechanism switches a condition of the sample support mechanism from a state maintaining the sample to have a first attitude in which a normal line of the surface of the sample is parallel with a first axis of rotation to another state maintaining the sample to have a second attitude in which the normal line of the surface of the sample is perpendicular to the first axis of rotation. When the receiving optical system is rotated around the first axis of rotation while maintaining the sample in the first attitude, in-plane diffraction measurement is possible.

Abstract: Disclosed herein is a method of evaluating the performance of an ion-exchange film. In the method, small-angle scattering curves for the ion-exchange film are obtained by an X-ray measuring apparatus that can detect X-rays scattered at small angles with respect to the axis of an X-ray applied to film. From the positions of the peaks on the small-angle scattering curves and the X-ray intensities at these peaks, the molecular structure of the ion-exchange film is determined, thereby to evaluate the performance of the ion-exchange film.

Abstract: The thin film deposition system for depositing a thin film on the surface of substrates disposed in a sealed thin film deposition furnace comprises a measuring unit at a site communicating with the thin film deposition furnace, the measuring unit comprising a thin film deposition sample substrate for allowing a thin film substance flowing in from the thin film deposition furnace to adhere while X-ray incidence and extraction windows being provided on the side walls of the measuring unit, wherein X-ray is irradiated on the thin film deposition sample substrate in the measuring unit through the X-ray incidence window by means of a thin film measuring unit provided at the outside of the thin film deposition furnace, and the X-ray reflected from the thin film deposition sample substrate is sensed through the X-ray extraction window.

Abstract: Multiple samples are prepared in slurry form and deposited through a funnel plate by a multiprobe liquid handler into an array of inserts situated in openings in a housing. Each insert has a recess that extends through the insert body and a filter disc situated in the recess to support the sample. The filter is held in place by an annular part which defines a channel providing access to the filter through the lower portion of the recess. A pressure differential is created across each of the filters by attaching a vacuum manifold to the bottom of the housing to simultaneously remove the liquid from each of the samples, leaving the samples in powder form. The housing is then placed in the X-ray diffractometer for sequential analysis of each of the samples, while the samples are situated in the inserts.

Abstract: Provided are an analyzing apparatus and an analyzing method for analyzing a sample by performing measurements using X-rays and measuring a gas generated from the sample.

Abstract: A device is proposed for the precision rotation of samples on a diffractometer, especially for X-ray or synchrotron radiation diffraction experiments, comprising: a centering element (26) which is held at one end of a motor-driven rotating shaft (22) and can be displaced in a plane orthogonal to the axis of rotation of the rotating shaft (22), a sample holder (30) which is fixed to the centering element (26) or integral with the latter for holding a sample (32) substantially centrally with respect to the axis of rotation in an X-ray or synchrotron radiation beam (S), at least one micrometer finger (36) which is arranged in the region of the centering element (26) and can be positioned orthogonally with respect to the axis of rotation of the rotating shaft (22) by means of a micrometer finger drive device.

Abstract: A method and apparatus for the transportation, remote and unattended mounting, and visual alignment and monitoring of protein crystals for synchrotron generated x-ray diffraction analysis. The protein samples are maintained at liquid nitrogen temperatures at all times: during shipment, before mounting, mounting, alignment, data acquisition and following removal. The samples must additionally be stably aligned to within a few microns at a point in space. The ability to accurately perform these tasks remotely and automatically leads to a significant increase in sample throughput and reliability for high-volume protein characterization efforts. Since the protein samples are placed in a shipping-compatible layered stack of sample cassettes each holding many samples, a large number of samples can be shipped in a single cryogenic shipping container.

Abstract: A low-cost, high precision goniometric stage, for use in x-ray diffractography or in optical systems, with a spherical sector supported on at least one bearing, a top surface of the spherical sector that is used for mounting an object, a center of rotation located within the object, a rod or other member that is disposed below the spherical bearing surface, preferably orthogonal to the rotational axes, stepper motors or other actuators to move the device and a mechanical linkage between the rod and the motors.

Abstract: A transmission mode x-ray diffraction screening system has a sample support that holds a sample tray with multiple samples to be tested. The sample support is connected to a translation stage that is movable in three dimensions, and that it offset from the location of the sample support. An x-ray source is located to one side of the sample support, and a detector is located to the other side, thereby allowing the detection of x-rays that are diffracted by the sample in a transmission mode. A retractable beamstop may be located between the sample and the detector to block at least part of the non-diffracted x-rays from the source. A video camera may also be provided for imaging the sample location, which may be illuminated by a laser. The entire system may be automated such that each sample in the sample tray may be sequentially analyzed.

Abstract: In accordance with the present invention, an x-ray diffraction apparatus and method are provided in which an x-ray or goniometer head can be adjusted in different directions to allow the head to direct x-rays at a part from various positions. In this manner, measurements can be taken from a wider region of the part without requiring that the part itself be moved or that an operator move the unit, which can be relatively heavy. In one aspect, the head can be rotated about its internal axis so that it can more readily direct x-rays along curved surfaces of parts while keeping a substantially constant distance therefrom. It is preferred that the apparatus be a portable unit including adjustment mounts to allow the x-ray head to be moved in the different directions so that it can be transported for use in the field at the site at which a part is located. In this instance, the unit allows for measurements to be taken from the part while it remains in service.

Abstract: A biological crystal formation screening apparatus uses an x-ray diffraction technique to analyze the sample containers of a sample tray for the presence of crystal formation. An x-ray source is directed toward a sample under investigation, and a two-dimensional x-ray detector is located to receive any diffracted x-ray energy. A positioning apparatus allows the different sample containers of a tray to be sequentially aligned with the source and detector, allowing each to be examined. The sample container is arranged such that a sample is located relative to the well solution so that the x-ray beam is directed to the sample without being incident on the well solution.

Abstract: An X-ray analysis apparatus for investigating material samples, comprising a device for automatic exchange of the samples (1), which comprises a sample table (2) with depositing positions (3) disposed in m lines, wherein the lines extend parallel to an x direction and m≧2, and comprising a gripping device (4) for precise removal of any desired sample (1) from a depositing position (3) and for transfer into a transfer and/or measuring position (5) and back to a depositing position (3), wherein the gripping device (4) can be displaced linearly parallel to the x direction, is characterized in that the sample table (2) can be moved linearly parallel to a y direction, extending at an angle &agr; to the x direction, and independently of the gripping device (4) for gripping samples (1) from different lines, wherein the sample table (2) is disposed parallel to the x-y plane.

Abstract: The present invention relates to a method and apparatus for X-ray diffraction analysis. An improved sample holder is provided that includes a curved surface or a plurality of surfaces at different planes. An improved sample holder also has removable individual sample holders.

Abstract: An X-ray analysis apparatus for investigating material samples, comprising a device for automatic exchange of the samples (1), which comprises a gripping device (4) for precise removal of any desired sample (1) from a depositing position (3) and for transfer into a transfer and/or measuring position and back to a depositing position (3), wherein at least some of the samples are surrounded by a sample holder (13;13′) in the peripheral direction, is characterized in that the samples or containers containing the samples project past the sample holder in the vertical z direction perpendicular to the horizontal x-y plane and that the gripping device is disposed and structured on a side of the sample to surround parts of a sample or of a sample container which project past the sample holder in an operating position in the z direction and to grasp the sample holder.

Abstract: A capillary tube (10) is provided with ends that are initially open. The capillary tube (10) is preferably constructed from a plastic material that will allow the contents of the tube (10) to be analyzed by x-raying the tube (10). Plural fluid segments (20, 28, 30, 32) are introduced into the capillary tube (10) through one end of the tube (10). Then, the ends of the capillary tube (10) are closed, such as fusing them shut (34, 36) or by providing them with closure caps (40, 42). Different capillary tubes (10) contain different combinations of the fluid segments. The contents of each capillary tube (10) forms a distinct sample. The samples are viewed and evaluated while they are in the sealed capillary tubes (10).

Abstract: The method and apparatus of the present invention permit indirect identification of a target plane, such as the plane identified by an alignment feature, based upon the identification of a reference plane which is offset by a predetermined angle from the target plane. In addition, in order to permit alignment features to be defined at non-standard angles with respect to the axial orientation of an ingot, an apparatus is provided that includes a frame having at least two members. The first member abuts a bar extending outwardly from the stage of an x-ray diffractometer, while the second member carries an engagement member for engaging a non-standard alignment feature. The second member may be movable relative to the first member to permit the frame to be mounted upon ingots having different non-standard alignment features.

Abstract: An attachment 3 mounted on a specimen support portion 2 of an X-ray apparatus 1 includes a cover member 9 covering a specimen S and a scattered ray excluding member 8 provided between the cover member 9 and the specimen S. The scattered ray excluding member 8 takes in the form of a box, a case or enclosure defined by a wall 16. The enclosure has a large opening 14a on the side of the cover member 9 and a small opening 14b on the side of the specimen S. The scattered ray excluding member 8 functions to prevent scattered X-ray emitted from the cover member when X-rays from an X-ray source passes through the cover member 9 and traveling toward an X-ray detector.

Abstract: A method and apparatus for continuously presenting a sample from a stream of particulate material which contains crystalline substances and for effectively continuously analysing the sample by X-ray diffraction are provided. An extracted sample flow is fed onto a continuously moving carrier and its surface smoothed and flattened for X-ray diffraction patterns to be detected and analysed to provide a compositional analysis for the crystalline substances. The sample is continuously removed from the carrier prior to further sample being fed onto the carrier. The invention is particularly applicable for phase composition analysis of cement and cement clinker and provides an effectively continuous analysis substantially in real time in contrast to prior art laboratory analyses of discrete samples.

Abstract: An X-ray diffractometer has an X-ray source (10), a double pinhole collimator (14), a sample (22) mounted on a rotatable sample stage (20), an analyser crystal (30) and a detector (34). The analyser crystal and detector are arranged to rotate together about an axis (21) that is coaxial with the axis of rotation of the sample stage. Very few scattered X-rays (26) reach the detector (34). The diffractometer has particular use for routine quality control measurements.

Abstract: An x-ray diffraction apparatus and method are provided in which an x-ray or goniometer head can be adjusted in different directions to allow the head to direct x-rays at a part from various positions. In this manner, stress measurements can be taken from a wider region of the part without requiring that the part itself be moved or that an operator move the unit, which can be relatively heavy. Preferably, the apparatus is a portable unit including adjustment mounts to allow the x-ray head to be moved in the different directions so that it can be transported for use in the field at the site at which a part is located to allow for measurements to be taken from the part while it remains in service.

Abstract: The present invention is directed to a x-y-axis device and a x-y-z-axis device for micro-manipulating or positioning a crystal for x-ray diffraction. More specifically, the devices which may be placed on the head on a goniometer have small footprints (small in size). The sample may be moved and recorded in step resolutions of 1 micron over an extended range of motion.

Abstract: The present invention is directed to a robot compatible crystal worksite suite comprising a unique dewar, a plurality of magazines, a plurality of cryo-pins (that mount crystals to be transferred from the dewar for crystallography study) adapted to be placed into the magazines and a programmed controller to provide the operational sequence necessary to remove the frozen mounted crystals from the dewar to an instrument or a goniometer for the x-ray diffraction of the crystals.

Abstract: Method for mounting a sample comprising a crystal for X-ray crystallographic analysis, a method for aligning a sample comprising a crystal for X-ray crystallographic analysis, which sample is mounted on a positioning device, and a method for determining the structure of a sample containing a crystal by means of X-ray crystallography. The method includes activating a robot so that the tool retrieves the crystal holder, receives a sufficient amount of a fluid to maintain the crystal in the crystal holder at a temperature not in excess of about 160 degrees K, transfers the retrieved crystal holder to a positioning device, and mounts the transferred crystal holder on the positioning device, whereby the crystal in the retrieved crystal holder is maintained at a temperature not in excess of about 160 degrees K.

Abstract: A method for preparing a library is provided in which the library contains an array of elements and each element contains a different combination of materials. A related apparatus includes an x-ray beam directed at the library, a chamber which houses the library and a beamline for directing the x-ray beam onto the library in the chamber. The chamber may include a translation stage that holds the library and that is programmable to change the position of the library relative to the x-ray beam and a controller that controls the movement of the translation stage to expose an element to the x-ray beam in order to rapidly characterize the element in the library. During the characterization, the x-ray beam scatters off of the element and a detector detects the scattered x-ray beam in order to generate characterization data for the element.

Abstract: The method and apparatus of the present invention permit indirect identification of a target plane, such as the plane identified by an alignment feature, based upon the identification of a reference plane which is offset by a predetermined angle from the target plane. In addition, in order to permit alignment features to be defined at non-standard angles with respect to the axial orientation of an ingot, an apparatus is provided that includes a frame having at least two members. The first member abuts a bar extending outwardly from the stage of an x-ray diffractometer, while the second member carries an engagement member for engaging a non-standard alignment feature. The second member may be movable relative to the first member to permit the frame to be mounted upon ingots having different non-standard alignment features.

Abstract: Method and device for rapid characterization of arrays of crystalline, polycrystalline or amorphous materials; in particular for the formation and X-ray diffraction analysis of polymorph libraries and the discovery of new crystal forms. According to one aspect, a multi-well plate comprising a masking plate with an array of openings and a removable base plate is used to crystallize precipitates. X-ray diffraction analysis is performed by scanning an X-ray beam over the base plate and recording diffractograms of the crystalline precipitates.

Abstract: A structural system for accurately reproducible in situ x-ray studies of operating rechargeable electrochemical battery cell electrode components comprises an hermetically sealed cell component enclosure incorporating an x-ray transmissive window member of beryllium or the like. A research embodiment of the system comprises means for rapidly and consistently interchanging electrode compositions for operative comparison and evaluation, while a laminated cell system embodiment enables accurate testing of electrode components in commercial configurations such as unitary polymeric Li-ion battery cells.

Abstract: The present invention is directed to a x-y-axis device and a x-y-z-axis device for micro-manipulating or positioning a crystal for x-ray diffraction. More specifically, the devices which may be placed on the head on a goniometer have small footprints (small in size). The sample may be moved and recorded in step resolutions of 1 micron over an extended range of motion.

Abstract: Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

Abstract: A combinatorial X-ray diffractor, particularly a combinatorial X-ray diffractor which can measure one row of samples among a plurality of samples arranged into a matrix simultaneously by X-ray diffraction. For the purpose of high throughput screening, a plurality of samples (10) are arranged into a row X1, a row X2, a row X3, and a row X4 on a sample stage and samples in each row are measured simultaneously by X-ray diffraction, measured data are processed by an information processor (20), information data useful for the evaluation of thin film material are automatically extracted and arranged and the extracted and arranged information data are displayed on a display apparatus (27).

Abstract: An analyzer system to ease sample handling having a sample exchanger with an analyzer apparatus, a sample table, and a transfer unit for taking the sample from the table into the analyzer apparatus. The sample table includes a base and a tray for holding the samples supported so they tray can be pulled out in front of the base. With this, it is possible for an operator to handle the samples easily, in particular samples located deep on the table usually difficult to handle. The operator may pull out the tray in the front direction from the base, without having to stand. The tray may be separately carried to a computer controller of the analyzer apparatus, thereby enabling input of sample data while mounting or installing the samples onto the tray to prevent erroneous inputting.

Abstract: An X-ray spectrometer having a curved crystal monochromator which diffracts a continuous X-ray beam from an X-ray source to produce a monochromatic X-ray beam. An angle of incidence of the continuous X-ray beam can be changed with respect to the monochromator so as to change the wavelength of the monochromatic X-ray beam which is focused on and taken out from a receiving slit. The X-ray source, the monochromator and the receiving slit must be positioned always on a Rowland circle. The X-ray source and the monochromator can be moved so that the angle of incidence changes, while the receiving slit remains always stationary and the direction of an X-ray path from the center of the monochromator to the receiving slit remains always constant. Such an X-ray spectrometer is usable as an X-ray irradiation system of XAFS (X-ray Absorption Fine Structure) apparatus so that XAFS measurements require no movement of the sample.

Abstract: The present invention relates to the calibration and alignment of an X-ray reflectometry (“XRR”) system for measuring thin films. An aspect of the present invention describes a method for accurately determining C0 for each sample placement and for finding the incident X-ray intensity corresponding to each pixel of a detector array and thus permitting an amplitude calibration of the reflectometer system. Another aspect of the present invention relates to a method for aligning an angle-resolved X-ray reflectometer that uses a focusing optic, which may preferably be a Johansson crystal. Another aspect of the present invention is to validate the focusing optic. Another aspect of the present invention relates to the alignment of the focusing optic with the X-ray source. Another aspect of the present invention concerns the correction of measurements errors caused by the tilt or slope of the sample.

Abstract: A method and apparatus for continuously presenting a sample from a stream of particulate material which contains crystalline substances and for effectively continuously analysing the sample by X-ray diffraction are provided. An extracted sample flow is fed onto a continuously moving carrier and its surface smoothed and flattened for X-ray diffraction patterns to be detected and analysed to provide a compositional analysis for the crystalline substances. The sample is continuously removed from the carrier prior to further sample being fed onto the carrier. The invention is particularly applicable for phase composition analysis of cement and cement clinker and provides an effectively continuous analysis substantially in real time in contrast to prior art laboratory analyses of discrete samples.

Abstract: An X-ray diffractometer has an X-ray source (10), a double pinhole collimator (14), a sample (22) mounted on a rotatable sample stage (20), an analyser crystal (30) and a detector (34). The analyser crystal and detector are arranged to rotate together about an axis (21) that is coaxial with the axis of rotation of the sample stage. Very few scattered X-rays (26) reach the detector (34). The diffractometer has particular use for routine quality control measurements.

Abstract: The invention provides a method of performing x-ray crystallography on samples by using a robot to select the target sample, to position the sample for x-ray crystallography, and to deposit the sample, all without transferring the sample to another device, such as a goniometer. This method allows high throughput, automated crystallography, thereby providing a high volume of samples to be tested while lessening the need for human intervention.

Abstract: Method and apparatus for mounting a sample comprising a crystal for X-ray crystallographic analysis, a method for aligning a sample comprising a crystal for X-ray crystallographic analysis, which sample is mounted on a positioning device, and a method for determining the structure of a sample containing a crystal by means of X-ray crystallography.

Abstract: The apparatus comprises a crystal growing incubator having opposing first and second sides. The apparatus also includes an X-ray system which comprises an X-ray source disposed adjacent to the first side of the crystal growing incubator and an X-ray detector disposed adjacent to the second side of the crystal growing incubator. The X-ray source is configured to irradiate crystalline material grown in the crystal growing incubator and the X-ray detector is configured to detect the presence of diffracted X-rays from crystals grown in the crystal growing incubator. The apparatus preferably further comprises a positioner that positions the incubator and the X-ray system relative to each other. Also provided is a method of screening for crystalline material in its in-situ growth environment using the above described apparatus.

Abstract: This present invention provides a sample changer for automatically changing from one sample to the next in support of high throughput X-ray powder diffraction data acquisition in a capillary geometry. The samples are mounted on the outer rim of a disk or turntable, with each sample having its capillary axis parallel to a radius emanating from the center of the disk on which the samples are mounted. Each sample is mounted on a separate motor shaft which permits the sample to be rotated about the longitudinal axis of the capillary during data acquisition. To change from one sample to the next, the disk or turntable is rotated about its axis thereby presenting in turn each new sample to a X-ray beam. When the data acquisition is completed for that sample, a new sample is rotated into the beam and its data collection is carried out.

Abstract: Method and apparatus for mounting a sample comprising a crystal for X-ray crystallographic analysis, a method for aligning a sample comprising a crystal for X-ray crystallographic analysis, which sample is mounted on a positioning device, and a method for determining the structure of a sample containing a crystal by means of X-ray crystallography.

Abstract: A two-dimensional position-sensitive X-ray detector is used for the precision measurement of lattice constants so that a plurality of X-ray rocking curves can be measured at the same time for the respective points on a sample and an area map, on the sample, of the lattice constants can be obtained in a short time. X-rays from an X-ray source pass through the first slit and are then incident on a crystal collimator. X-rays reflected by the crystal collimator are incident on the sample. X-rays diffracted at the sample are detected by the two-dimensional position-sensitive X-ray detector. The diffracted X-rays from the respective points on the sample are detected separately at respective points on the X-ray detector.

Abstract: An apparatus for characterizing a library is provided in which the library contains an array of elements and each element contains a different combination of materials. The apparatus includes an x-ray beam directed at the library, a chamber which houses the library and a beamline for directing the x-ray beam onto the library in the chamber. The chamber may include a translation stage that holds the library and that is programmable to change the position of the library relative to the x-ray beam and a controller that controls the movement of the translation stage to expose an element to the x-ray beam in order to rapidly characterize the element in the library. During the characterization, the x-ray beam scatters off of the element and a detector detects the scattered x-ray beam in order to generate characterization data for the element.

Abstract: The thin film deposition system for depositing a thin film on the surface of substrates disposed in a sealed thin film deposition furnace comprises a measuring unit at a site communicating with the thin film deposition furnace, the measuring unit comprising a thin film deposition sample substrate for allowing a thin film substance flowing in from the thin film deposition furnace to adhere while X-ray incidence and extraction windows being provided on the side walls of the measuring unit, wherein X-ray is irradiated on the thin film deposition sample substrate in the measuring unit through the X-ray incidence window by means of a thin film measuring unit provided at the outside of the thin film deposition furnace, and the X-ray reflected from the thin film deposition sample substrate is sensed through the X-ray extraction window.

Abstract: The system includes a synchrotron X-ray source configured to emit an X-ray beam along a beam path. The system also includes a detector, preferably an area detector, such as a CCD detector, disposed in the beam path. The detector is configured to measure diffraction of the X-ray beam caused by a sample. The system additionally includes an automatic sample changer. The automatic sample changer is configured to sequentially position each of plurality of samples into the beam path between the synchrotron X-ray source and the detector. The samples preferably have a mass of about 10 to 100 &mgr;gs and are exposed to the X-ray beam for between 5 and 60 seconds before being automatically exchanged with another sample. The method provides that a sample is automatically positioned into an X-ray beam path and irradiated. The diffraction is then detected, the sample removed, and the process repeated for multiple samples.