Abstract: A material identification system includes one or more data interfaces configured to receive first sensor data generated by a first sensor responsive to a material sample, and receive second sensor data generated by a second sensor responsive to the material sample. The material identification system also includes one or more processors configured to generate a set of predictions of an identification of the material sample and a corresponding set of certainty information.

Abstract: An analysis apparatus, an analysis method, and an analysis program by which even unskilled ones can perform quantitative analysis of a composition of high-performance cement with high precision.

Abstract: Human body back-scattering inspection systems and methods are disclosed. In the invention, X-rays modulated by the flying-spot forming unit having spirally distributed flying-spots have a distribution having alternating peaks and valleys on the irradiated surface. In this way, scanning starting times can be precisely controlled to cause two devices to have scanning starting times that are different by a half of a cycle. That is, the beams outputted from one device are at maximum when the beams outputted from the other device are at minimum. In other words, even if the ray source of one device emits rays, it will not significantly affect imaging result of the other device. In such way, the two devices may emit rays and perform scanning at the same time, and thus the total scanning time is reduced.

Abstract: A Compton radiation detection device for determining of Compton radiation of iron, includes a sensor and a filter arrangement. The filter arrangement is adapted such that the radiation emitted by a test object due to Compton scattering passes a nickel layer and an iron layer before being detected by the sensor. A dispersive ionization chamber includes an ionization chamber having a plurality off ionization volumes and a window. Each ionization volume includes an electrode. Radiation can enter through the window. The ionization volumes are arranged in a beam propagation direction behind each other. Radiation having lower energy is statistically absorbed in ionization volumes located more proximal to the window. Radiation having higher energy is statistically absorbed in the ionization volumes located more distal from the window.

Abstract: An apparatus and method for inspecting personnel or their effects. A first and second carriage each carries a source for producing a beam of penetrating radiation incident on a given subject. A positioner provides for relative motion of each beam vis-à-vis the subject in a motion, the vertical component of which is one-way. A detector receives radiation produced by at least one of the sources after the radiation interacts with the subject.

Abstract: This invention has one object to provide radiographic apparatus with a compensating filter that allows simple and accurate estimation of direct radiation to acquire a radioscopic image or a sectional image of excellent contrast. This invention includes a direct-ray attenuation-rate acquiring section for acquiring a direct-ray attenuation rate from a dose of direct radiation entering into a subject and a dose of direct radiation emitted from the subject. In this invention, a direct-ray attenuation rate is acquired on an assumption that a primary indirect-ray attenuation rate is equal to the direct-ray attenuation rate, the primary indirect-ray attenuation rate being a rate of decreasing a primary indirect-ray generated with the compensating filter that transmits the subject. Such configuration may achieve provision of X-ray apparatus that allows more simple acquisition of a fluoroscopic X-ray image or a sectional image without performing complicated calculations conventionally.

Abstract: In accordance with an embodiment, a measuring apparatus includes an electromagnetic wave applying unit, a detecting unit, a data processing unit, a film structure transforming unit, and a film structure measuring unit. The electromagnetic wave applying unit generates electromagnetic waves to apply it to a periodic structure of films on a substrate. The detecting unit detects the electromagnetic waves scattered or reflected by the substrate. The data processing unit calculates a surface shape of the periodic structure. The film structure transforming unit calculates a virtual film structure regarding the internal structure of the periodic structure. The film structure measuring unit calculates the thickness of each layer constituting the periodic structure by fitting a first reflectance profile by actual measurement regarding the periodic structure to a second reflectance profile obtained by a simulation using the virtual film structure to restructure the shape of the periodic structure.

Abstract: One aspect relates to at least a portion of at least one Compton scattered X-ray visualizer, imager, or information provider configured to receive an at least one Compton scattered X-ray that has scattered through a substantial scattering depth range to one or more substantial prescribed scattering depths within an at least one matter of an at least a portion of an individual based at least in part on a set of scattering characteristics, the set of scattering characteristics at least partially corresponding to the at least one matter of the least the portion of the individual; the at least the portion of the at least one Compton scattered X-ray visualizer, imager, or information provider being configured for providing an at least one Compton scattered X-ray visualization, imaging, or information providing through one or more visualization, imaging, or information providing depth ranges to one or more visualization, imaging, or information providing prescribed depths into the at least one matter of the least t

Abstract: A system and method for inspecting a vehicle or other object by means of two sources and one or more detectors of penetrating radiation. The sources and detector(s) are carried on a mobile conveyance and deployed at a point of operation. One source irradiates an inspected object from within an enclosure, while a second source swings away from the conveyance on a deployable member, such as a boom, such that the second source can irradiate the vehicle from above. A backscatter image of the inspected object is based at least in part on radiation from the second source scattered by the inspected object.

Abstract: The present invention is a system and method for screening subjects at security locations while preserving the privacy of subjects and retaining the efficiency and thus, throughput, of the screening process. More specifically, the present invention is an improved X-ray detection system and method that allows for maximum threat detection performance with improved verbal and visual communication between the screening and imaging system operator and an image analyst, either proximally or remotely located, thus allowing for an accurate, directed physical search and minimal “pat-down” of subjects under inspection.

Abstract: The application discloses systems and methods for X-ray scanning for identifying material composition of an object being scanned. The system includes at least one X-ray source for projecting an X-ray beam on the object, where at least a portion of the projected X-ray beam is transmitted through the object, and an array of detectors for measuring energy spectra of the transmitted X-rays. The measured energy spectra are used to determine atomic number of the object for identifying the material composition of the object. The X-ray scanning system may also have an array of collimated high energy backscattered X-ray detectors for measuring the energy spectrum of X-rays scattered by the object at an angle greater than 90 degrees, where the measured energy spectrum is used in conjunction with the transmission energy spectrum to determine atomic numbers of the object for identifying the material composition of the object.

Abstract: In the present disclosure, before disassembly of liquid crystal module (1) having liquid crystal panel (2) and a back light, irradiation is performed with X-rays (13) from the front surface side of liquid crystal panel (2) of liquid crystal module (1). By this irradiation with X-rays (13), generated fluorescent X-rays (14) are detected to analyze an element contained in liquid crystal panel (2), while X-rays (17) backscattered or transmitted to the rear surface side of liquid crystal module (1) are detected to determine a type and a state of the back light. Then, based on the determined type and state of the back light, liquid crystal module (1) is disassembled.

Abstract: An apparatus and method for inspecting personnel or their effects. A first and second carriage each carries a source for producing a beam of penetrating radiation incident on a given subject. A positioner provides for relative motion of each beam vis-à-vis the subject in a motion, the vertical component of which is one-way. A detector receives radiation produced by at least one of the sources after the radiation interacts with the subject.

Abstract: A medical treatment system is provided. The medical treatment system includes a medical imaging unit and a mobile display device mechanically disconnected from the medical imaging unit, a control unit, an input device. A data transmission device is operable to transmit data recorded by the medical imaging unit to the mobile display device. A vehicle supports the mobile display device and includes a drive unit. The control unit, operating in conjunction with the input device, is operable to control the display device and the drive unit.

Abstract: To evaluate an exact bone mineral density, when a reference bar region in an X-ray picture of a mandible and a reference bar disposed beside the mandible is selected, the mean value and deviation of the brightness of this region are displayed by means of letter groups. When an evaluation object region is selected, the brightness of this region is corrected according to the mean value and deviation of the brightness of the reference bar region and standard mean value and deviation, or, in other words, according to a fixed reference. The corrected brightness is displayed in the form of histogram. Furthermore, the mean value and deviation of the corrected brightness are determined, and they are displayed by means of letter groups. The bone mineral density is quantitatively evaluated from the histogram and the mean value and deviation of the corrected brightness.

Abstract: A fixed vision system includes a sensor having a sensitive surface for acquiring an image of an object on a detecting plane, and a light-emitting device for generating a luminous reference figure on the detecting plane including an emission surface, and an objective through which a luminous radiation (from the object to the sensor) and a further luminous radiation (from the light-emitting device to the object) pass. The sensor and the light-emitting device are positioned such that, when the detecting plane is focused by the objective on the sensor, the sensitive surface is on the image plane generated by the objective or on a respective mirror plane with respect to the image plane and the emission surface of the light-emitting device is on the image plane or on a respective mirror plane with respect to the image plane.

Abstract: Non invasive in-vivo measurement of composition of a tissue within a part of a human or animal subject is carried out by detecting a Raman spectral characteristic in light scattered through the part using a transmission, rather than a backscattering geometry. The technique is applied to the detection of calcifications in human breast tissues.

Abstract: A method for detecting nuclear species in a sample by adaptive scanning using nuclear resonance fluorescence may comprise illuminating the target sample with photons from a source; detecting a signal in an energy channel; determining a scan evaluation parameter using the signal detected; determining whether the scan evaluation parameter meets a detection efficiency criterion; adjusting one or more system parameters such that the scan evaluation parameter meets the detection efficiency criterion; and comparing the signal in an energy channel to a predetermined species detection criterion to identify a species detection event. In another embodiment, detecting a signal in an energy channel may further comprise detecting photons scattered from the target sample. In another embodiment, detecting a signal in an energy channel may further comprise detecting photons transmitted through the target sample and scattered from at least one reference scatterer.

Abstract: The present invention is a system and method for screening subjects at security locations while preserving the privacy of subjects and retaining the efficiency and thus, throughput, of the screening process. More specifically, the present invention is an improved X-ray detection system and method that allows for maximum threat detection performance with improved verbal and visual communication between the screening and imaging system operator and an image analyst, either proximally or remotely located, thus allowing for an accurate, directed physical search and minimal “pat-down” of subjects under inspection.

Abstract: The transmission of photons through a target produces “holes” in the transmitted energy spectrum that are characteristic of the NRF energies of the nuclear isotopes in the target. Measuring the absorption via the transmission of these photons through a target allows the production of tomographic images that are associated with specific nuclear isotopes. Thus three-dimensional density patterns are generated for the elements in a container. The process is very much like standard X-ray tomography but it identifies specific nuclear isotopes as well as their densities.

Abstract: An X-ray spectroscope collects an energy-dispersive spectrum from a sample under analysis, and generates a list of candidate elements that may be present in the sample. A wavelength dispersive spectral collector is then tuned to obtain X-ray intensity measurements at the energies/wavelengths of some or all of the candidate elements, thereby verifying whether or not these candidate elements are in fact present in the sample. Additionally, the alignment of the wavelength dispersive spectral collector versus the sample can be optimized by tuning the wavelength dispersive spectral collector to the energy/wavelength of a selected one of the candidate elements—preferably one whose presence in the sample has been verified, or one which has a high likelihood of being present in the sample—and then varying the alignment of the wavelength dispersive spectral collector versus the sample until the wavelength dispersive spectral collector returns the maximum intensity reading for the selected candidate element.

Abstract: A calibration technique is provided that utilizes a standard sample that allows for calibration in the wavelengths of interest even when the standard sample may exhibit significant reflectance variations at those wavelengths for subtle variations in the properties of the standard sample. A second sample, a reference sample may have a relatively featureless reflectance spectrum over the same spectral region and is used in combination with the calibration sample to achieve the calibration. In one embodiment the spectral region may include the VUV spectral region.

Abstract: Provided is an X-ray analysis apparatus including: an X-ray tubular bulb for irradiating a sample with a radiation beam; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray; an analyzer for analyzing the signal; a sample stage capable of moving an irradiation point relatively with respect to the sample within a mapping area set in advance; and an X-ray mapping processing section for discriminating an X-ray intensity corresponding to a specific element, determining an intensity contrast in which a color or lightness is changed in accordance with the X-ray intensity, and for performing image display at a position corresponding to the irradiation point, in which the X-ray mapping processing section determines the intensity contrast of the X-ray intensity at the irradiation point by setting in advance the X-ray intensity discriminated as to a reference material in which a component el

Abstract: A window arrangement on a pressure pipe, with a casing in the train or at the end of the pressure pipe, said casing featuring flanges on diametrically opposing sides having radially directed passages, whose axes are standing perpendicular to the longitudinal axis of the pressure pipe and are located in a measurement plane for an x-ray measurement device, an x-ray source being associated to the one passage on the outer side and a receiver sensitive to X-rays to the other passage, and with window plates that are transmissive for X-rays which are sealingly arranged in the associated passage and are fixed in the passage with the aid of a fastening member and which consist of a material which is resistant against high temperatures and process-due etchings by chemically aggressive substances.

Abstract: An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information of the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a first observation system which optically observes a surface of the sample in order to determine the irradiation point, and a second observation system which has a smaller depth of field than the first observation system, optically observes a narrow region, and measures the distance from the determined irradiation point by focus adjustment are included.

Abstract: An X-ray imaging inspection system for bags and packages. Transmission imaging is performed using a fan beam and a segmented detector, while scatter imaging is performed with a scanned pencil beam, with both beams active simultaneously. Cross-talk between the beams is mitigated by a combination of shielding, scatter detector design, positioning and orientation, and image processing. Image processing subtracts the measured radiation scattered from the transmission beam into the scatter detectors, reducing cross-talk.

Abstract: The scattered intensity of photons from the nuclear Pygmy Resonance taken in conjunction with the scattered intensity at lower energies provides a signal that is sensitive to the nature of the nuclear species doing the scattering. Highly enriched uranium and depleted uranium can be distinguished by this signal from other materials. Other nuclei can also be distinguished and identified. Methods and apparatus for employing the phenomenon to identify or assist in the identification of materials are disclosed.

Abstract: An apparatus and method for inspecting personnel or their effects. A first and second carriage each carries a source for producing a beam of penetrating radiation incident on a subject. A positioner provides for synchronized relative motion of each carriage vis-à-vis the subject in a direction having a vertical component. A detector receives radiation produced by at least one of the sources after the radiation interacts with the subject.

Abstract: An apparatus and method for inspecting personnel or their effects. A first and second carriage each carries a source for producing a beam of penetrating radiation incident on a subject. A positioner provides for synchronized relative motion of each carriage vis-á-vis the subject in a direction having a vertical component. A detector receives radiation produced by at least one of the sources after the radiation interacts with the subject.

Abstract: A specimen inspection system includes a photon source for outputting photons along a transmission path and a conveyor for translating a specimen completely through the transmission path. A radiation detector is positioned offset with respect to the transmission path for detecting photons that are scattered from the transmission path in response to interaction with the specimen passing therethrough. A controller determines from the detected scattered photons that a first material is present in the specimen.

Abstract: The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective location. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected location.

Abstract: A method for obtaining a concentrated, monochromatic x-ray beam from a standard x-ray tube or other source of polychromatic emission. X-rays from the anode of the x-ray tube fluoresce an adjoining, independent target that produces a monochromatic spectrum, a portion of which is focused by the x-ray optical system. This two-stage method gives the system considerably versatility without undue loss in signal. The two-stage concentrator makes practical the use of focusing optics in hand-held and portable instruments.

Abstract: An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted for analysis points having different compositions in a case where the numerous analysis points having the plural compositions are analyzed by WDS (wavelength-dispersive X-ray spectrometer). At each analysis point, the analyzer performs quantitative analysis using EDS (energy-dispersive X-ray spectrometer) permitting easy and quick analysis. Based on the results, chemical compounds are identified. If the results indicate that there is any new compound, analytical conditions adapted for the new compound are selected. If the new compound is already registered in a database, the analytical conditions are read from the database. Then, quantitative analysis is performed using WDS.

Abstract: A system and method for inspecting an object with multiple sources of substantially coplanar penetrating radiation. Irradiation of the inspected object by the sources is temporally sequenced such that the source of detected scattered radiation is unambiguous. Thus, multiple views of the inspected object may be obtained and image quality may be enhanced.

Abstract: This invention describes a method for increasing the speed of the parabolic marching method by about a factor of 256. This increase in speed can be used to accomplish a number of important objectives. Firstly, the speed can be used to collect data to form true 3-D images or 3-D assembled from 2-D slices. Speed allows larger images to be made. Secondly, the frequency of operation can be increased to 5 MHz to match the operating frequency of reflection tomography. This allow the improved imaging of speed of sound which in turn is used to correct errors in focusing delays in reflection tomography imaging. This allows reflection tomography to reach or closely approach its theoretical spatial resolution of ½ to ¾ wave lengths. A third benefit of increasing the operating frequency of inverse scattering to 5 MHz is the improved out of topographic plane spatial resolution. This improves the ability to detect small lesions.

Abstract: An X-ray imaging inspection system for bags and packages. Transmission imaging is performed using a fan beam and a segmented detector, while scatter imaging is performed with a scanned pencil beam, with both beams active simultaneously. Cross-talk between the beams is mitigated by a combination of shielding, scatter detector design, positioning and orientation, and image processing. Image processing subtracts the measured radiation scattered from the transmission beam into the scatter detectors, reducing cross-talk.

Abstract: Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.

Abstract: Method and apparatus are provided for combining information obtained from CT and Coherent Scatter Computed Tomography to better determine whether there are dangerous materials in the baggage or not. Hence, the attenuation coefficient and the diffraction pattern of the item of baggage are used to determine whether the baggage should be cleared.

Abstract: A method for identifying a substance is described. The method includes detecting, by a first scatter detector, a first set of scattered radiation, generating a first effective atomic number from the first set of scattered radiation, detecting, by a second scatter detector, a second set of scattered radiation, generating a second effective atomic number from the second set of scattered radiation, and determining whether the first effective atomic number is within a limit of the second effective atomic number.

Abstract: A system may include emission of megavoltage radiation from a megavoltage radiation source, acquisition of a first image using an imaging device while first megavoltage radiation is emitted from the megavoltage radiation source and while a plurality of elements is between the megavoltage radiation source and the imaging device, and determination of an amount of scatter radiation based at least on areas of the acquired image corresponding to the plurality of elements. In some aspects, at least one of the plurality of elements is substantially pointed toward a focal spot of the megavoltage radiation source.

Abstract: A method for identifying a substance is described. The method includes detecting, by a first scatter detector, a first set of scattered radiation, generating a first effective atomic number from the first set of scattered radiation, detecting, by a second scatter detector, a second set of scattered radiation, generating a second effective atomic number from the second set of scattered radiation, and determining whether the first effective atomic number is within a limit of the second effective atomic number.

Abstract: A void or particle content is determined using the X-ray small angle scattering measurement for a sample made of a thin film having voids or particles disorderly dispersed in the matrix, the diffraction peaks being not available for such a sample. The invention includes three aspects. The first aspect is that an equipment constant is determined and an unknown void or particle content is calculated based on the equipment constant. The second aspect is that a plurality of samples having unknown matrix densities are prepared, the matrix densities are determined so that differences in the matrix densities among the samples become a minimum, and a void or particle content is calculated based on the matrix density and the scale factor of the X-ray small angle scattering. The third aspect is for a plurality of samples having unknown particle densities, and executes procedures similar to those of the second aspect.

Abstract: A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first sample film to provide a first set of extracted intensities using a function, and determining a first quantitative characteristic associated with the first sample film using the first set of extracted intensities. Next, obtain a second set of spectral data measured for a comparable sample film measured by a second photoelectron spectroscopy system. Next, apply the same function and continually adjust the function to extract intensities for the respective elemental species associated with the comparable sample film to provide a second set of corrected-extracted intensities. A second quantitative characteristic for the comparable sample is determined. The function is continually adjusted until the determined second quantitative characteristic closely or substantially matches the first quantitative characteristic.

Abstract: X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted into a conventional Rowland circle monochromator geometry. A transfer mechanism selectively moves reflectors from the cassette to a reflector positioner. The use of the cassette allows each reflector to be placed closer to a source of x-rays, thereby allowing a larger solid angle for x-ray collection. An alternative x-ray monochromator uses a non-focusing reflector that can be fixed, scanned axially or scanned radially to provide large solid angle detection of x-rays at various energies with a single reflector.

Abstract: An optic device, system and method for imaging are described. The optic device includes a first solid phase layer having a first index of refraction with a first photon transmission property and a second solid phase layer having a second index of refraction with a second photon transmission property, the solid phase layers being situated between an output face and a non-flat input face. The first and second layers are conformal to each other. The imaging system includes a source of electrons and a target, with an array of the optic devices coupled thereto to form limited cone beams of X-ray radiation.

Abstract: A method for operating an X-ray or neutron-optical system and beam stop comprising an X-ray or neutron source (1) from which corresponding radiation is guided as a primary beam (2) to a sample (4) under investigation, with an X-ray or neutron detector (6) for receiving radiation diffracted or scattered from the sample (4), wherein the source (1), the sample and the detector are disposed substantially on one line (=z-axis) and wherein a beam stop (5; 31; 41) is provided between the sample and the detector whose cross-sectional shape is adjusted to the cross-section of the primary beam is characterized in that the beam stop is disposed to be displaceable along the z-direction for optimum adjustment of the amounts of useful and interfering radiation impinging on the detector.

Abstract: A void or particle content is determined using the X-ray small angle scattering measurement for a sample made of a thin film having voids or particles disorderly dispersed in the matrix, the diffraction peaks being not available for such a sample. The invention includes three aspects. The first aspect is that an equipment constant is determined and an unknown void or particle content is calculated based on the equipment constant. The second aspect is that a plurality of samples having unknown matrix densities are prepared, the matrix densities are determined so that differences in the matrix densities among the samples become a minimum, and a void or particle content is calculated based on the matrix density and the scale factor of the X-ray small angle scattering. The third aspect is for a plurality of samples having unknown particle densities, and executes procedures similar to those of the second aspect.

Abstract: A method for determining a weight per unit area and/or a chemical composition of a conveyed material sample. From the analysis of a portion of an incident ionizing radiation, in particular an X-radiation, scattered from a material sample, a detector signal corresponding to the gsm substance and/or the chemical composition of the material sample is generated and used for determining the weight per unit area and/or the chemical composition of the material sample. A device for determining a weight per unit area and/or a chemical composition of a material sample has a compact measurement head arranged unilaterally with respect to the material sample. This measurement head includes an X-radiation source and a detector arrangement integrated into the measurement head of at least one X-ray detector connected to a voltage supply and an evaluation unit.

Abstract: An analytical method for determining crystallographic phases of a measuring sample comprises the steps of acquiring a diffraction pattern of the measuring sample and qualitative phase analysis of the measured diffraction pattern, acquiring an element spectrum of the measuring sample and determining concentrations of chemical elements in the measuring sample from the acquired element spectrum, and carrying out a quantitative phase analysis of the measuring sample on the basis of the measured intensities of the acquired diffraction pattern thereby taking into consideration determined element concentrations as a boundary condition, wherein differences between calculated and measured intensities of the diffraction pattern and between calculated and determined element concentrations are simultaneously minimized in an iterative process. The inventive method permits quantitative phase determination with high reliability.

Abstract: An x-ray metrology system includes an e-beam generator to cause a test sample to emit x-rays, x-ray optics for focusing the x-rays, and an x-ray imager to generate an image of the test sample from the focused x-rays. Because the x-ray imager provides a direct representation of the x-ray emission characteristics of the test sample, the resolution of a measurement taken using such a sensor is limited only by the resolution of the sensor (and any focusing optics), rather than by the amount of e-beam spread in the thin film. The x-ray imaging can be performed for object planes at the test sample that are not parallel to the test sample, thereby allowing vertical dimension data to be accurately generated by the x-ray imaging system.